JP3999891B2 - ガス検知方法及びその装置 - Google Patents
ガス検知方法及びその装置 Download PDFInfo
- Publication number
- JP3999891B2 JP3999891B2 JP28538998A JP28538998A JP3999891B2 JP 3999891 B2 JP3999891 B2 JP 3999891B2 JP 28538998 A JP28538998 A JP 28538998A JP 28538998 A JP28538998 A JP 28538998A JP 3999891 B2 JP3999891 B2 JP 3999891B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- sensitive body
- low temperature
- gas sensitive
- temperature period
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001514 detection method Methods 0.000 title claims description 31
- 239000004065 semiconductor Substances 0.000 claims description 24
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 23
- 238000005070 sampling Methods 0.000 claims description 13
- 229910006404 SnO 2 Inorganic materials 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000007789 gas Substances 0.000 description 104
- 239000003990 capacitor Substances 0.000 description 11
- -1 H 2 S and CH 3 SH Chemical class 0.000 description 8
- 239000013256 coordination polymer Substances 0.000 description 7
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- 238000009499 grossing Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 125000002485 formyl group Chemical group [H]C(*)=O 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 150000003464 sulfur compounds Chemical class 0.000 description 2
- 238000010411 cooking Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Images
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- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28538998A JP3999891B2 (ja) | 1998-10-07 | 1998-10-07 | ガス検知方法及びその装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28538998A JP3999891B2 (ja) | 1998-10-07 | 1998-10-07 | ガス検知方法及びその装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000111508A JP2000111508A (ja) | 2000-04-21 |
| JP2000111508A5 JP2000111508A5 (enrdf_load_stackoverflow) | 2005-11-24 |
| JP3999891B2 true JP3999891B2 (ja) | 2007-10-31 |
Family
ID=17690915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28538998A Expired - Fee Related JP3999891B2 (ja) | 1998-10-07 | 1998-10-07 | ガス検知方法及びその装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3999891B2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006025249A1 (de) * | 2006-05-29 | 2007-12-06 | Eads Deutschland Gmbh | Verfahren und Einrichtung zum Betreiben eines MOX-Gas-Sensors |
| CN101617221A (zh) * | 2006-10-19 | 2009-12-30 | 有机和无机化学公司简称Sochinor | 燃烧排放气体的传感器 |
| RU2350941C1 (ru) * | 2007-06-26 | 2009-03-27 | ООО Бюро аналитического приборостроения ХРОМДЕТ-ЭКОЛОГИЯ | Газоанализатор и способ его работы |
-
1998
- 1998-10-07 JP JP28538998A patent/JP3999891B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2000111508A (ja) | 2000-04-21 |
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