JP3997585B2 - Multilayer board manufacturing method - Google Patents

Multilayer board manufacturing method Download PDF

Info

Publication number
JP3997585B2
JP3997585B2 JP1306898A JP1306898A JP3997585B2 JP 3997585 B2 JP3997585 B2 JP 3997585B2 JP 1306898 A JP1306898 A JP 1306898A JP 1306898 A JP1306898 A JP 1306898A JP 3997585 B2 JP3997585 B2 JP 3997585B2
Authority
JP
Japan
Prior art keywords
metal foil
load
stacked
multilayer board
flat plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1306898A
Other languages
Japanese (ja)
Other versions
JPH11214842A (en
Inventor
昇 阿部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP1306898A priority Critical patent/JP3997585B2/en
Publication of JPH11214842A publication Critical patent/JPH11214842A/en
Application granted granted Critical
Publication of JP3997585B2 publication Critical patent/JP3997585B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Production Of Multi-Layered Print Wiring Board (AREA)

Description

【0001】
【発明の属する技術分野】
本発明は、電気・電子機器等に使用される多層板の製造方法に関するものである。
【0002】
【従来の技術】
電気・電子機器等に使用されるプリント配線板の製造に、多層板が用いられている。この多層板は、表面に導体回路が形成された1枚又は複数枚の内層用基板の表裏にプリプレグと呼ばれる熱硬化性樹脂組成物を基材に含浸してシート状とした接着シートを積み重ね、さらにその両外側に金属箔を配して重ねて被圧着体を形成した後、この被圧着体を平板に挟み、更に成形プレスの加圧板に挟んで、加圧板からの伝熱により加熱すると共に、加圧板間の圧力により加圧して製造されている。
【0003】
なお、生産性向上のために、図2に示すように、内層用基板11とプリプレグ12と金属箔13とを、その両外側に金属箔13が配置されるように積み重ねた被圧着体14を、間に平板18を介在させて垂直方向に複数重ねて積層体10を形成し、その積層体10を加圧板19,19間に挟んで加熱・加圧して、一度に多数の多層板を得る方法が一般に行われている。
【0004】
これらの内層用基板11、プリプレグ12、金属箔13、平板18を重ねて積層体10を形成する方法としては、下側のものから上側に向かって順番に重ねる方法で行われており、例えば図2の重ね構成の場合には、一番下の平板18の上に金属箔13を重ね、次いでその上にプリプレグ12を所要枚数重ねた後、その上に内層用基板11を重ね、次いでその上にプリプレグ12を所要枚数重ねた後、その上に金属箔13を重ね、次いで、その上に平板18を重ねるように、下側の加圧板19に対応する部分から上側の加圧板19に対応する部分に向かって、順番に重ねる方法が行われている。
【0005】
しかし、このように重ねて製造した場合、得られる多層板の表面の金属箔13に、一般に「シワ」と呼ばれるスジ状の凹部が形成される場合があった。これは、プリプレグ12の表面には熱硬化性樹脂組成物の付着量のばらつきによる凹凸が形成されているため、このプリプレグ12と重ねられた金属箔13にも凹凸が生じていると考えられており、この金属箔13の凹凸が加圧板19,19間に挟んで加熱・加圧したときに十分に伸びなかった場合に、スジ状の凹部が形成されると考えられている。
【0006】
なお、表面に導体回路が形成された内層用基板11を挟むこと無しに製造した場合と比較して、内層用基板11を挟んだ場合、特にスジ状の凹部が形成されやすくなっている。これは、表面に導体回路が形成された内層用基板11を挟んだ場合、導体回路が形成された部分に対応する位置と形成されて無い部分に対応する位置によって、加圧板19,19間に挟んで加熱・加圧したときの金属箔13にかかる圧力の差が生じ、相対的に圧力が低い導体回路が無い部分に対応する位置の金属箔13に、スジ状の凹部が形成され易くなるためと考えられている。
【0007】
更に、被圧着体14を垂直方向に複数重ねて一度に多数の多層板を得ようとする方法の場合、各被圧着体14内に重ねられたそれぞれの内層用基板11の、導体回路が形成された部分と形成されて無い部分がぼぼ同じ位置に重るため、導体回路が形成された部分と形成されて無い部分によってかかる圧力の差が特に大きくなり、スジ状の凹部が特に形成され易くなっている。
【0008】
このスジ状の凹部が形成された多層板を用いて、表面の金属箔をエッチングして導体回路を形成した場合、スジ状の凹部が形成された部分が断線となりやすく、プリント配線板の歩留まりが低いという問題があった。そのため、得られる多層板の表面の金属箔にスジ状の凹部が形成されにくい多層板の製造方法が求められている。
【0009】
【発明が解決しようとする課題】
本発明は、上記問題点を改善するために成されたもので、その目的とするところは、表面に導体回路を形成した内層用基板と、熱硬化性樹脂組成物及び基材よりなるプリプレグと、金属箔とを、その両外側に金属箔が配置されるように積み重ねた被圧着体を、平板に挟んで複数重ねて積層体を形成し、その積層体を加熱・加圧して製造する多層板の製造方法であって、得られる多層板の表面の金属箔にスジ状の凹部が形成されにくい多層板の製造方法を提供することにある。
【0010】
【課題を解決するための手段】
本発明の請求項1に係る多層板の製造方法は、表面に導体回路を形成した内層用基板と、熱硬化性樹脂組成物及び基材よりなるプリプレグと、金属箔とを、その両外側に金属箔が配置されるように所定の位置の上に積み重ねた被圧着体を、平板に挟んで複数重ねて積層体を形成し、その積層体を加熱・加圧して製造する多層板の製造方法において、被圧着体を形成する金属箔のうち下側の金属箔と平板とを所定の位置の上に重ねる方法が、平板の上側に金属箔を重ねた後、その平板及び金属箔を加圧して凹状に湾曲させ、次いで、この湾曲物を所定の位置の上に重ねた後、上記平板及び金属箔への加圧を解放する方法であることを特徴とする。
【0011】
本発明の請求項2に係る多層板の製造方法は、請求項1記載の多層板の製造方法において、湾曲物を重ねる方法が、湾曲物を重ねようとする所定の位置の上に既に重ねられた積載物を除電しながら、湾曲物を重ねる方法であることを特徴とする。
【0012】
本発明の請求項3に係る多層板の製造方法は、請求項1又は請求項2記載の多層板の製造方法において、被圧着体を形成する金属箔のうち上側の金属箔を重ねる方法が、金属箔を重ねようとする所定の位置の上に既に重ねられた積載物を加圧して凸状に湾曲させた後、その湾曲させた状態の積載物の上に金属箔を重ね、次いでその金属箔及び積載物へ振動を与えながら、その金属箔及び積載物への加圧を解放する方法であることを特徴とする。
【0013】
本発明の請求項4に係る多層板の製造方法は、請求項3記載の多層板の製造方法において、金属箔及び積載物へ振動を与えながら、その金属箔及び積載物への加圧を解放する方法が、金属箔及び積載物へ振動を与えながら、金属箔の表面の中央部に押圧物を接触させた後、その押圧物を接触させたまま端部の方向に走査させ、次いで金属箔及び積載物へ振動を与えながら、その金属箔及び積載物への加圧を解放する方法であることを特徴とする。
【0014】
本発明によると、凹状に湾曲した平板及び金属箔への加圧を解放したときに、平板が平面化しようとする力によって、金属箔には外側に向かって伸ばされる力がかかるため、金属箔の凹凸が平面化される。そのため、加熱加圧して多層板を製造すると、金属箔が伸ばされているため、得られる多層板の表面の金属箔にスジ状の凹部が形成されにくくなる。
【0015】
【発明の実施の形態】
本発明に係る多層板の製造方法を図面に基づいて説明する。図1は本発明に係る多層板の製造方法の一実施の形態の、工程の要部を説明する正面図であり、図2は本発明に係る多層板の製造方法の一実施の形態を説明する分解正面図であり、図3は図2の変形例を説明する分解正面図である。図4は本発明に係る多層板の製造方法の一実施の形態を説明する平面図であり、図5は本発明に係る多層板の製造方法の一実施の形態の、要部を説明する正面図であり、図6は本発明に係る多層板の製造方法の他の実施の形態の、要部を説明する正面図である。
【0016】
本発明に係る多層板の製造方法の一実施の形態は、図2に示すように、内層用基板11と、プリプレグ12と、金属箔13とを、その両外側に金属箔13が配置されるように積み重ねた被圧着体14を、平板18に挟んで複数重ねて積層体10を形成し、その積層体10を加熱・加圧して製造する多層板の製造方法である。
【0017】
本発明に用いる内層用基板11としては、表面に導体回路を形成した板であれば特に限定するものではなく、例えば、エポキシ樹脂系、フェノール樹脂系、ポリイミド樹脂系、不飽和ポリエステル樹脂系、ポリフェニレンエーテル樹脂系等の熱硬化性樹脂及びこれらの熱硬化性樹脂に無機充填材等を配合したものの板や、ガラス等の無機質繊維やポリエステル、ポリアミド、木綿等の有機質繊維のクロス、ペーパー等の基材を、上記熱硬化性樹脂等で接着した板に、導体回路を形成したものが挙げられる。導体回路を形成する位置は、表面のみに限定するものではなく、内部にも形成していてもよい。またこの内層用基板11には、その壁面に金属皮膜を形成した穴を有していてもよい。
【0018】
本発明に用いるプリプレグ12は、熱硬化性樹脂組成物及び基材よりなるものであり、例えば、熱硬化性樹脂組成物に溶剤を添加して粘度を調整した後、その液に基材を浸漬して含浸し、次いで加熱することにより溶剤を乾燥して熱硬化性樹脂組成物を半硬化して得られるものや、室温で固体の熱硬化性樹脂組成物を加熱溶融させた状態で基材に塗布して含浸することにより得られるものである。なお、プリプレグ12中の熱硬化性樹脂組成物は、半硬化(Bステージ)状態のものに限定される。
【0019】
上記基材としては、ガラス等の無機質繊維やポリエステル、ポリアミド、ポリアクリル、ポリイミド等の有機質繊維や、木綿等の天然繊維の織布、不織布、紙等を用いることができる。なお、ガラス繊維製の織布(ガラスクロス)を用いると、耐熱性、耐湿性が優れた多層板が得られ好ましい。なお、基材の厚みは0.04〜0.30mmのものが一般に使用される。
【0020】
また、上記熱硬化性樹脂組成物としては、エポキシ樹脂系、フェノール樹脂系、ポリイミド樹脂系、不飽和ポリエステル樹脂系、ポリフェニレンエーテル樹脂系等の単独、変性物、混合物のように、熱硬化性樹脂組成物全般を用いることができる。なお、熱硬化性樹脂組成物がエポキシ樹脂系の場合、電気特性及び接着性のバランスが良好であり好ましい。
【0021】
この熱硬化性樹脂組成物中には、熱硬化性樹脂を必須として含有し、必要に応じてその熱硬化性樹脂の硬化剤、硬化促進剤、無機充填材及び溶剤等を含有することができる。なおエポキシ樹脂等のように自己硬化性の低い熱硬化性樹脂組成物は、その樹脂を硬化するための硬化剤等も含有することが必要である。
【0022】
プリプレグ12中の熱硬化性樹脂組成物の量は、熱硬化性樹脂組成物及び基材の合計重量100重量部に対し、40〜70重量部であると好ましい。40重量部未満の場合は、得られる多層板の内部に気泡が残留して電気的特性が低下する場合があり、70重量部を超える場合は、得られる多層板の板厚のばらつきが大きくなる場合がある。
【0023】
また、本発明に用いられる金属箔13としては、金属製の箔であれば特に限定するものではなく、銅、アルミニウム、真鍮、ニッケル等の単独、合金、複合の箔を用いることができる。この金属箔13の厚みとしては、0.012〜0.070mmが一般的である。なお、金属箔13の片面に、熱硬化性樹脂組成物の層が形成されていてもよい。この場合、熱硬化性樹脂組成物の層がプリプレグ12と接するように積層する。
【0024】
これらの内層用基板11、プリプレグ12、金属箔13、平板18を重ねて積層体10を形成する方法としては、図4に示すように、予め上面に金属箔13を重ねた平板18を、積層体を形成しようとする所定の位置Aに運んで(aの搬送)積載した後、その上に予め内層用基板11及びプリプレグ12を重ねて形成した中間体15を運んで(bの搬送)積載し、次いで、その中間体15の上に金属箔13を運んで(cの搬送)積載した後、その金属箔13の上に予め上面に金属箔13を重ねた平板18を運んで(aの搬送)積載し、更に必要に応じて中間体15、予め上面に金属箔13を重ねた平板18・・と順に運んで重ねる。なお、予め平板18の上面に金属箔13を重ねる位置Bでは、上記a,b,cの搬送と同時進行で、平板18の搬送(xの搬送)及び金属箔13の搬送(yの搬送)が行われており、平板18の上面に金属箔13が重ねられるようになっている。
【0025】
なお、予め上面に金属箔13を重ねた平板18を、積層体を形成しようとする所定の位置Aに運ぶ場合には、図1(a)に示すように、平板18の上側に被圧着体14を形成する金属箔のうち下側の金属箔13aを重ねた後、図1(b)に示すように、その平板18及び金属箔13aの中央部を加圧して凹状に湾曲させ、次いで図1(c)に示すように、この湾曲物16を所定の位置の上に既に重ねられた積載物17の上に重ねた後、平板18及び金属箔13aへの加圧を解放することにより、図1(d)に示すように、湾曲物16を平面化する。
【0026】
なお平板18としては、鉄やステンレス等の金属板又はこれらの金属板の表面を絶縁処理したものが好ましい。これらの平板18の剛性は、金属箔13aと比較して高いため、平板18及び金属箔13aへの加圧を解放したときには、平板18が平面化しようとする力によって、図1(c)に示すように、金属箔13aには外側(図で矢印の方向)に向かって伸ばされる力がかかり、金属箔13aの凹凸が平面化される。そのため、このようにして重ねて形成した積層体を加熱・加圧して多層板を製造すると、金属箔13aが伸ばされているため、得られる多層板の表面の金属箔にスジ状の凹部が形成されにくくなる。
【0027】
平板18及び金属箔13aを加圧して凹状に湾曲させて湾曲物16を形成する方法としては、例えば図5に示すように、平板18の上に金属箔13aを重ねたものの端部を下側から平板保持爪21で保持した状態で、平板反らしシリンダー23を下方に伸ばすことにより、平板18及び金属箔13aの中央部を加圧して凹状に湾曲させ湾曲物16を形成する。そして、湾曲物16を所定の位置の上に既に重ねられた積載物17の上に重ねる場合には、湾曲物昇降シリンダー25を下方に伸ばすことにより、湾曲物16を下方に移動させて積載物17の上に重ねる。そして、爪移動シリンダー27を側方に縮めることにより、平板保持爪21を側方に引き抜くと共に、平板反らしシリンダー23を上方に縮めることにより加圧を停止して平板18及び金属箔13aを平面化する。
【0028】
なお、湾曲物16を重ねようとする所定の位置の上に既に重ねられた積載物17が帯電している場合、湾曲物16を重ねたときに金属箔13aに静電気が伝わって金属箔13aに凹凸が形成される場合があるため、湾曲物16を積載物17の上に重ねる場合には、積載物17を除電しながら、湾曲物16を重ねると、表面の金属箔にスジ状の凹部が特に形成されにくい多層板が得られ好ましい。この除電する方法としては、接地した金属物を接触させる方法や、静電除去用の空気を吹き付ける方法が挙げられる。
【0029】
また、被圧着体14を形成する金属箔13のうち上側の金属箔13bを重ねる場合には、金属箔13bを重ねようとする所定の位置の上に既に重ねられた積載物17の中央部を加圧して凸状に湾曲させた後、その湾曲させた状態の積載物17の上に金属箔13bを重ね、次いでその金属箔13b及び積載物17へ超音波を印加して振動を与えながら、その金属箔13b及び積載物17への加圧を解放する方法で重ねると、表面の金属箔にスジ状の凹部が特に形成されにくい多層板が得られ好ましい。
【0030】
これは、凸状に湾曲させた積載物17の上に重ねた金属箔13bも凸状に湾曲するため、振動を与えた場合、振動の力と重力が重なって金属箔13bには外側(図5で矢印の方向)に向かって伸ばされる力がかかり、金属箔13bの凹凸が平面化されるためと考えられる。
【0031】
この積載物17を加圧して凸状に湾曲させる方法としては、例えば図5に示すように、積載物17をその上に乗せたキャリア板31の端部を上側からキャリア板保持爪33で保持した状態で、キャリア板反らしシリンダー35を上方に伸ばすことにより、キャリア板31の中央部を加圧して凸状に湾曲させる。そして、金属箔13b及び積載物17へ振動を与える場合には、キャリア板反らしシリンダー35の先端に設けられた超音波発生装置37によって金属箔13b及び積載物17へ振動を与え、金属箔13bを平面化する。なお、金属箔13b及び積載物17へ与える振動は、超音波のみに限定するものではなく、偏心モーター等により振動させるようにしても良い。
【0032】
なお、金属箔13b及び積載物17へ振動を与える際には、図6に示すように、金属箔13bの表面の中央部に押圧物39を接触させた後、その押圧物39を接触させたまま端部の方向に走査させると、この走査によって金属箔13bの凹凸が更に伸ばされて特に平面化されるため、表面の金属箔にスジ状の凹部が特に形成されにくい多層板が得られ好ましい。なおこの押圧物39の走査は、金属箔13b及び積載物17へ振動を与えながら行っても良く、金属箔13b及び積載物17へ振動を与えずに行っても良いが、振動を与えながら行なうと、特に表面の金属箔にスジ状の凹部が形成されにくい多層板が得られ好ましい。この押圧物39を接触させる方法としては、例えば、はけ、ブラシ、ロール等を金属箔13bに接触させる方法や、空気を吹き付ける方法が挙げられる。
【0033】
そして上記のようにして重ねて積層体を形成した後、図2に示すように、その積層体10を加圧板19,19間に挟んで加熱・加圧して多層板を製造する。この加熱・加圧する方法としては、加圧板19を加熱して、加圧板19からの伝熱により加熱する方法や、金属箔13に給電して抵抗加熱により加熱する方法が挙げられる。なお、抵抗加熱は、電気抵抗を有する導体に給電し、ジュール効果で発生する熱により加熱する方法である。なお、加熱の条件としては、プリプレグ12中の熱硬化性樹脂組成物が硬化する温度になるよう適宜調整すればよい。
【0034】
なお、積層体10を加圧板19,19間に挟む場合には、必要に応じて、セルロースペーパーやアラミド繊維ペーパー等のクッション材や熱伝導調整材等を間に挟んで加熱・加圧してもよい。
【0035】
なお上記実施の形態は、プリプレグ12間に1枚の内層用基板11を挟んだ被圧着体14の実施の形態を説明したが、内層用基板11の枚数は1枚に限定するものではなく、間にプリプレグ12を挟んで複数の内層用基板11を鉛直方向に重ね、その両外側にプリプレグ12を配して被圧着体14を形成しても良く、図3に示すように、複数枚のプリプレグ12の間に、内層用基板11を水平方向に複数並設して被圧着体14を形成しても良い。なお、内層用基板11を水平方向に複数並設する場合には、水平方向に複数並設した内層用基板11どうしを接着剤や粘着テープ等の固着物で固着しておくと、中間体15を搬送するときや、金属箔13b及び積載物17へ振動を与えるとき等に、内層用基板11が個別に動くことが起きにくくなるため、この内層用基板11が個別に動くことに起因するスジ状の凹部が、得られる多層板表面の金属箔に形成されにくくなる。
【0036】
また、加圧板19,19間に挟む被圧着体14の数は、2つ以上であれば特に限定するものではなく、更に多くの被圧着体14を、間に平板18を挟んで積層してもよい。
【0037】
【発明の効果】
本発明に係る多層板の製造方法は、平板及び金属箔を加圧して凹状に湾曲させた後、この湾曲物を所定の位置の上に重ね、次いで、平板及び金属箔への加圧を解放する方法で被圧着体を形成する金属箔のうち下側の金属箔を重ねるため、得られる多層板の表面の金属箔にスジ状の凹部が形成されにくくなる。
【0038】
本発明の請求項3に係る多層板の製造方法は、被圧着体を形成する金属箔のうち上側の金属箔も伸ばしながら重ねるため、特に得られる多層板の表面の金属箔にスジ状の凹部が形成されにくくなる。
【図面の簡単な説明】
【図1】本発明に係る多層板の製造方法の一実施の形態の、工程の要部を説明する正面図である。
【図2】本発明に係る多層板の製造方法の一実施の形態を説明する分解正面図である。
【図3】図2の変形例を説明する分解正面図である。
【図4】本発明に係る多層板の製造方法の一実施の形態を説明する平面図である。
【図5】本発明に係る多層板の製造方法の一実施の形態の、要部を説明する正面図である。
【図6】本発明に係る多層板の製造方法の他の実施の形態の、要部を説明する正面図である。
【符号の説明】
10 積層体
11 内層用基板
12 プリプレグ
13 金属箔
13a 被圧着体を形成する金属箔のうち下側の金属箔
13b 被圧着体を形成する金属箔のうち上側の金属箔
14 被圧着体
15 中間体
16 湾曲物
17 積載物
18 平板
19 加圧板
21 平板保持爪
23 平板反らしシリンダー
31 キャリア板
33 キャリア板保持爪
35 キャリア板反らしシリンダー
37 超音波発生装置
39 押圧物
A 積層体を形成しようとする所定の位置
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for producing a multilayer board used in electrical / electronic devices and the like.
[0002]
[Prior art]
Multilayer boards are used in the production of printed wiring boards used in electrical and electronic equipment. This multilayer board is a stack of adhesive sheets made into a sheet by impregnating a base material with a thermosetting resin composition called a prepreg on the front and back of one or a plurality of inner layer substrates having a conductor circuit formed on the surface, Further, a metal foil is disposed on both outer sides to form a pressure-bonded body, and then the pressure-bonded body is sandwiched between flat plates, further sandwiched between pressure plates of a molding press, and heated by heat transfer from the pressure plates. It is manufactured by pressurizing with the pressure between the pressure plates.
[0003]
In order to improve productivity, as shown in FIG. 2, a pressure-bonded body 14 in which an inner layer substrate 11, a prepreg 12, and a metal foil 13 are stacked so that the metal foil 13 is disposed on both outer sides thereof is provided. The laminated body 10 is formed by stacking a plurality of plates 18 in the vertical direction with the flat plate 18 interposed therebetween, and the laminated body 10 is sandwiched between the pressure plates 19 and 19 and heated and pressed to obtain a large number of multilayer plates at a time. The method is generally done.
[0004]
As a method of stacking these inner layer substrate 11, prepreg 12, metal foil 13, and flat plate 18 to form the laminate 10, it is performed by a method of stacking in order from the lower side to the upper side. In the case of the two-layer configuration, the metal foil 13 is stacked on the lowermost flat plate 18, and then the required number of prepregs 12 are stacked thereon, and then the inner layer substrate 11 is stacked thereon, and then the upper layer. After the required number of prepregs 12 are overlaid, the metal foil 13 is overlaid thereon, and then the flat plate 18 is overlaid thereon, so that the portion corresponding to the lower pressure plate 19 corresponds to the upper pressure plate 19. A method of overlapping in order toward the part is performed.
[0005]
However, in the case of being manufactured in such a manner, a stripe-shaped recess generally called “wrinkle” may be formed in the metal foil 13 on the surface of the obtained multilayer board. This is because the surface of the prepreg 12 has irregularities due to variations in the amount of the thermosetting resin composition, and the metal foil 13 laminated with the prepreg 12 is considered to have irregularities. When the unevenness of the metal foil 13 is not sufficiently expanded when sandwiched between the pressure plates 19 and 19 and heated and pressed, it is considered that a streak-like recess is formed.
[0006]
In addition, when the inner layer substrate 11 is sandwiched, compared to a case where the inner layer substrate 11 having a conductor circuit formed on the surface is not sandwiched, a streak-shaped recess is particularly easily formed. This is because, when the inner layer substrate 11 having a conductor circuit formed on the surface is sandwiched, the position corresponding to the portion where the conductor circuit is formed and the position corresponding to the portion where the conductor circuit is not formed are arranged between the pressure plates 19 and 19. A difference in pressure applied to the metal foil 13 when heated and pressed between the two is generated, and a streak-like recess is easily formed in the metal foil 13 at a position corresponding to a portion without a conductor circuit having a relatively low pressure. It is considered because.
[0007]
Furthermore, in the case of a method for obtaining a plurality of multilayer boards at a time by stacking a plurality of the objects to be bonded 14 in the vertical direction, a conductor circuit is formed on each inner layer substrate 11 stacked in each object 14 to be bonded. Since the formed part and the non-formed part almost overlap at the same position, the difference in pressure between the part where the conductor circuit is formed and the part where the conductive circuit is not formed becomes particularly large, and the streak-shaped recess is particularly easily formed. It has become.
[0008]
When a conductor circuit is formed by etching the metal foil on the surface using the multilayer board having the streak-like recesses, the part where the streak-like recesses are formed is likely to be disconnected, and the yield of the printed wiring board is increased. There was a problem of being low. Therefore, there is a demand for a method for producing a multilayer board in which streak-like recesses are unlikely to be formed in the metal foil on the surface of the resulting multilayer board.
[0009]
[Problems to be solved by the invention]
The present invention was made in order to improve the above-mentioned problems. The object of the present invention is to provide a substrate for an inner layer having a conductor circuit formed on the surface, a prepreg comprising a thermosetting resin composition and a base material. Multilayers produced by stacking a plurality of pressure-bonded bodies stacked with metal foils so that the metal foils are arranged on both outer sides of the metal foil and sandwiching the plates to form a laminate, and heating and pressing the laminate An object of the present invention is to provide a method for manufacturing a multilayer plate, in which streaky recesses are not easily formed in the metal foil on the surface of the resulting multilayer plate.
[0010]
[Means for Solving the Problems]
A method for producing a multilayer board according to claim 1 of the present invention comprises a substrate for an inner layer having a conductor circuit formed on a surface thereof, a prepreg composed of a thermosetting resin composition and a base material, and a metal foil on both outer sides thereof. A multilayer board manufacturing method for manufacturing a multilayer body by stacking a plurality of pressure-bonded bodies stacked on a predetermined position so that a metal foil is disposed between sandwiched flat plates, and heating and pressing the multilayer body In the method of stacking the metal foil on the lower side of the metal foil forming the object to be bonded and the flat plate on a predetermined position, the metal foil is stacked on the upper side of the flat plate, and then the flat plate and the metal foil are pressed. It is characterized by a method of releasing the pressure applied to the flat plate and the metal foil after the curved object is overlaid on a predetermined position.
[0011]
The multilayer board manufacturing method according to claim 2 of the present invention is the multilayer board manufacturing method according to claim 1, wherein the method of stacking the curved objects is already overlaid on a predetermined position where the curved objects are to be stacked. It is characterized in that it is a method of stacking curved objects while discharging the load.
[0012]
The method for producing a multilayer plate according to claim 3 of the present invention is the method for producing a multilayer plate according to claim 1 or claim 2, wherein the method of overlapping the upper metal foil among the metal foils forming the object to be bonded is as follows. Pressurize the load already stacked on the predetermined position where the metal foil is to be stacked and bend it in a convex shape, then stack the metal foil on the curved load, and then the metal The method is characterized by releasing the pressure applied to the metal foil and the load while applying vibration to the foil and the load.
[0013]
The multilayer board manufacturing method according to claim 4 of the present invention is the multilayer board manufacturing method according to claim 3, wherein pressure is applied to the metal foil and the load while applying vibration to the metal foil and the load. The method in which the metal foil and the load are vibrated, the pressed object is brought into contact with the central portion of the surface of the metal foil, and then the metal foil is scanned in the direction of the end while the pressed object is kept in contact therewith. And a method of releasing pressure on the metal foil and the load while applying vibration to the load.
[0014]
According to the present invention, when the pressurization to the concavely curved flat plate and the metal foil is released, the metal foil is subjected to a force that extends toward the outside due to the force that the flat plate attempts to flatten. The unevenness is flattened. Therefore, when a multilayer board is manufactured by heating and pressurizing, the metal foil is stretched, so that it becomes difficult to form streak-like recesses in the metal foil on the surface of the obtained multilayer board.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
The manufacturing method of the multilayer board concerning this invention is demonstrated based on drawing. FIG. 1 is a front view for explaining a main part of a process of an embodiment of a method for producing a multilayer board according to the present invention, and FIG. 2 explains an embodiment of a method for producing a multilayer board according to the present invention. FIG. 3 is an exploded front view for explaining a modification of FIG. FIG. 4 is a plan view for explaining an embodiment of a method for producing a multilayer board according to the present invention, and FIG. 5 is a front view for explaining a main part of an embodiment of the method for producing a multilayer board according to the present invention. FIG. 6 is a front view for explaining a main part of another embodiment of the method for producing a multilayer board according to the present invention.
[0016]
As shown in FIG. 2, in one embodiment of the method for producing a multilayer board according to the present invention, an inner layer substrate 11, a prepreg 12, and a metal foil 13 are disposed on both outer sides. In this method, a plurality of the pressure-bonded bodies 14 stacked in this manner are stacked between flat plates 18 to form a laminated body 10, and the laminated body 10 is heated and pressed to produce the multilayer board.
[0017]
The inner layer substrate 11 used in the present invention is not particularly limited as long as it is a plate having a conductor circuit formed on its surface. For example, epoxy resin-based, phenol resin-based, polyimide resin-based, unsaturated polyester resin-based, polyphenylene Thermosetting resins such as ether resins, and boards made by blending these thermosetting resins with inorganic fillers, inorganic fibers such as glass, cloths made of organic fibers such as polyester, polyamide, cotton, and paper What formed the conductor circuit on the board which adhere | attached the material with the said thermosetting resin etc. is mentioned. The position where the conductor circuit is formed is not limited to the surface but may also be formed inside. The inner layer substrate 11 may have a hole formed with a metal film on the wall surface.
[0018]
The prepreg 12 used in the present invention is composed of a thermosetting resin composition and a substrate. For example, after adjusting the viscosity by adding a solvent to the thermosetting resin composition, the substrate is immersed in the liquid. Impregnated and then heated to dry the solvent and semi-cure the thermosetting resin composition, or a base material in a state where the solid thermosetting resin composition is heated and melted at room temperature It is obtained by applying to and impregnating. The thermosetting resin composition in the prepreg 12 is limited to a semi-cured (B stage) state.
[0019]
As the substrate, inorganic fibers such as glass, organic fibers such as polyester, polyamide, polyacryl, and polyimide, and natural fibers such as cotton, woven fabric, nonwoven fabric, and paper can be used. Use of glass fiber woven fabric (glass cloth) is preferable because a multilayer board having excellent heat resistance and moisture resistance can be obtained. In general, a substrate having a thickness of 0.04 to 0.30 mm is used.
[0020]
In addition, as the thermosetting resin composition, an epoxy resin type, a phenol resin type, a polyimide resin type, an unsaturated polyester resin type, a polyphenylene ether resin type or the like alone, a modified product, a mixture, a thermosetting resin, etc. The entire composition can be used. In addition, when a thermosetting resin composition is an epoxy resin type | system | group, the balance of an electrical property and adhesiveness is favorable and preferable.
[0021]
The thermosetting resin composition contains a thermosetting resin as an essential component, and can contain a curing agent, a curing accelerator, an inorganic filler, a solvent, and the like of the thermosetting resin as necessary. . Note that a thermosetting resin composition having a low self-curing property such as an epoxy resin needs to contain a curing agent for curing the resin.
[0022]
The amount of the thermosetting resin composition in the prepreg 12 is preferably 40 to 70 parts by weight with respect to 100 parts by weight of the total weight of the thermosetting resin composition and the substrate. If the amount is less than 40 parts by weight, bubbles may remain in the resulting multilayer board and the electrical characteristics may deteriorate. If the amount exceeds 70 parts by weight, the thickness of the resulting multilayer board varies greatly. There is a case.
[0023]
Moreover, as metal foil 13 used for this invention, if it is metal foil, it will not specifically limit, Single, alloy, and composite foil, such as copper, aluminum, brass, nickel, can be used. The thickness of the metal foil 13 is generally 0.012 to 0.070 mm. A layer of a thermosetting resin composition may be formed on one side of the metal foil 13. In this case, the thermosetting resin composition layer is laminated so as to be in contact with the prepreg 12.
[0024]
As a method of forming the laminate 10 by stacking these inner layer substrate 11, prepreg 12, metal foil 13 and flat plate 18, as shown in FIG. 4, the flat plate 18 having the metal foil 13 previously stacked on the upper surface is laminated. After transporting (loading a) to a predetermined position A where the body is to be formed, the intermediate body 15 formed by previously superimposing the inner layer substrate 11 and the prepreg 12 thereon is transported (loading b). Then, after carrying the metal foil 13 on the intermediate body 15 (c) and loading it, carrying the flat plate 18 having the metal foil 13 previously laminated on the metal foil 13 in advance (of a Transport) Stack, and if necessary, carry the intermediate body 15 and the flat plate 18 with the metal foil 13 previously stacked on the upper surface in order. In addition, at the position B where the metal foil 13 is previously superimposed on the upper surface of the flat plate 18, the flat plate 18 is transported (x transport) and the metal foil 13 is transported (y transport) simultaneously with the transport of a, b, c. The metal foil 13 is superposed on the upper surface of the flat plate 18.
[0025]
In addition, when the flat plate 18 on which the metal foil 13 is previously stacked is transported to a predetermined position A where a laminated body is to be formed, as shown in FIG. After laminating the lower metal foil 13a among the metal foils forming the plate 14, as shown in FIG. 1 (b), the flat portion 18 and the central portion of the metal foil 13a are pressed to bend into a concave shape, As shown in 1 (c), after this curved object 16 is overlaid on a load 17 that has already been superimposed on a predetermined position, by releasing the pressure on the flat plate 18 and the metal foil 13a, As shown in FIG. 1D, the curved object 16 is planarized.
[0026]
The flat plate 18 is preferably a metal plate such as iron or stainless steel or a surface obtained by insulating the surface of these metal plates. Since the rigidity of these flat plates 18 is higher than that of the metal foil 13a, when the pressurization to the flat plate 18 and the metal foil 13a is released, the force that the flat plate 18 tries to flatten is shown in FIG. As shown, the metal foil 13a is subjected to a force extending toward the outside (in the direction of the arrow in the figure), and the unevenness of the metal foil 13a is planarized. Therefore, when a multilayer plate is manufactured by heating and pressurizing the laminate formed in this way, the metal foil 13a is stretched, so that a streak-shaped recess is formed in the metal foil on the surface of the obtained multilayer plate. It becomes difficult to be done.
[0027]
As a method of forming the curved body 16 by pressurizing the flat plate 18 and the metal foil 13a to bend into a concave shape, for example, as shown in FIG. In the state of being held by the flat plate holding claws 21, the flat plate warping cylinder 23 is extended downward to pressurize the central portion of the flat plate 18 and the metal foil 13 a to bend into a concave shape to form the curved object 16. When the curved object 16 is stacked on the load 17 that has already been stacked on a predetermined position, the curved object 16 is moved downward by extending the curved object lifting cylinder 25 to move the load 16 downward. 17 on top. Then, by retracting the claw moving cylinder 27 to the side, the flat plate holding claw 21 is pulled out to the side, and by pressing the flat plate warping cylinder 23 upward, the pressurization is stopped to flatten the flat plate 18 and the metal foil 13a. To do.
[0028]
In addition, when the load 17 already stacked on a predetermined position where the curved object 16 is to be stacked is charged, when the curved object 16 is stacked, static electricity is transmitted to the metal foil 13a and the metal foil 13a is charged. Since the unevenness may be formed, when the curved object 16 is stacked on the load 17, when the curved object 16 is stacked while the charge of the load 17 is removed, a streak-shaped recess is formed on the metal foil on the surface. A multilayer board that is particularly difficult to form is obtained and preferred. Examples of the method for eliminating static electricity include a method in which a grounded metal object is brought into contact, and a method in which air for removing static electricity is blown.
[0029]
Further, when the upper metal foil 13b of the metal foil 13 forming the object to be bonded 14 is overlapped, the central portion of the load 17 already stacked on a predetermined position where the metal foil 13b is to be stacked is used. After pressurizing and curving into a convex shape, the metal foil 13b is overlaid on the curved load 17 and then applying ultrasonic waves to the metal foil 13b and the load 17 to give vibration, When the metal foil 13b and the load 17 are overlapped by a method of releasing the pressurization, it is preferable to obtain a multilayer plate in which a streak-like recess is not easily formed on the metal foil on the surface.
[0030]
This is because the metal foil 13b superimposed on the load 17 curved in a convex shape is also curved in a convex shape. Therefore, when vibration is applied, the vibration force and gravity overlap and the metal foil 13b is outside (see FIG. This is considered to be because a force stretched in the direction of the arrow (5) is applied and the unevenness of the metal foil 13b is planarized.
[0031]
For example, as shown in FIG. 5, the load 17 is pressed and curved in a convex shape, and the end of the carrier plate 31 on which the load 17 is placed is held by the carrier plate holding claws 33 from above. In this state, by extending the carrier plate warping cylinder 35 upward, the central portion of the carrier plate 31 is pressurized and curved in a convex shape. When vibration is applied to the metal foil 13b and the load 17, the ultrasonic wave generation device 37 provided at the tip of the carrier plate warping cylinder 35 applies vibration to the metal foil 13b and the load 17 so that the metal foil 13b Planarize. In addition, the vibration given to the metal foil 13b and the load 17 is not limited to ultrasonic waves, and may be caused to vibrate by an eccentric motor or the like.
[0032]
In addition, when giving vibration to the metal foil 13b and the load 17, as shown in FIG. 6, the pressed object 39 was brought into contact with the center of the surface of the metal foil 13 b, and then the pressed object 39 was contacted. If the scanning is performed in the direction of the end portion, the unevenness of the metal foil 13b is further extended and particularly planarized by this scanning, so that it is preferable to obtain a multilayer plate in which streaky concave portions are not particularly easily formed on the metal foil on the surface. . The scanning of the pressing object 39 may be performed while applying vibration to the metal foil 13b and the load 17, or may be performed without applying vibration to the metal foil 13b and the load 17, but is performed while applying vibration. In particular, it is preferable to obtain a multilayer board in which streak-like recesses are hardly formed on the metal foil on the surface. Examples of the method of bringing the pressed object 39 into contact include a method of bringing a brush, a brush, a roll, or the like into contact with the metal foil 13b, or a method of blowing air.
[0033]
Then, after stacking as described above to form a laminate, as shown in FIG. 2, the laminate 10 is sandwiched between pressure plates 19 and 19 and heated and pressed to produce a multilayer plate. Examples of the heating / pressurizing method include a method in which the pressure plate 19 is heated and heated by heat transfer from the pressure plate 19, and a method in which the metal foil 13 is fed and heated by resistance heating. Note that resistance heating is a method in which power is supplied to a conductor having electrical resistance and heated by heat generated by the Joule effect. In addition, what is necessary is just to adjust suitably as heating conditions so that it may become the temperature which the thermosetting resin composition in the prepreg 12 hardens | cures.
[0034]
When the laminated body 10 is sandwiched between the pressure plates 19, 19, it may be heated / pressurized with a cushioning material such as cellulose paper or aramid fiber paper, a heat conduction adjusting material, or the like as necessary. Good.
[0035]
In addition, although the said embodiment demonstrated embodiment of the to-be-bonded body 14 which pinched | interposed the one board | substrate 11 for inner layers between the prepregs 12, the number of the board | substrates 11 for inner layers is not limited to one sheet, A plurality of inner layer substrates 11 may be vertically stacked with the prepreg 12 interposed therebetween, and the prepreg 12 may be disposed on both outer sides thereof to form a pressure-bonded body 14. As shown in FIG. A plurality of inner layer substrates 11 may be arranged in the horizontal direction between the prepregs 12 to form the pressure-bonded body 14. When a plurality of inner layer substrates 11 are arranged side by side in the horizontal direction, the intermediate body 15 is obtained by fixing the plurality of inner layer substrates 11 arranged in the horizontal direction with a fixed object such as an adhesive or an adhesive tape. Since the inner layer substrate 11 is less likely to move individually when transporting the metal foil or when the metal foil 13b and the load 17 are vibrated, the streaks caused by the individual movement of the inner layer substrate 11 are less likely to occur. Shaped recesses are less likely to be formed in the resulting metal foil on the surface of the multilayer board.
[0036]
Further, the number of the pressure-bonded bodies 14 sandwiched between the pressure plates 19 and 19 is not particularly limited as long as it is two or more, and more pressure-bonded bodies 14 are stacked with a flat plate 18 interposed therebetween. Also good.
[0037]
【The invention's effect】
In the method of manufacturing a multilayer board according to the present invention, a flat plate and a metal foil are pressed to bend into a concave shape, and then the curved object is stacked on a predetermined position, and then the pressurization to the flat plate and the metal foil is released. Since the lower metal foil is stacked among the metal foils that form the object to be bonded by this method, streak-like recesses are hardly formed on the metal foil on the surface of the resulting multilayer board.
[0038]
In the method for producing a multilayer board according to claim 3 of the present invention, the upper metal foil of the metal foil forming the object to be bonded is stretched and stacked. Is difficult to form.
[Brief description of the drawings]
FIG. 1 is a front view for explaining a main part of a process of an embodiment of a method for producing a multilayer board according to the present invention.
FIG. 2 is an exploded front view for explaining an embodiment of a method for producing a multilayer board according to the present invention.
FIG. 3 is an exploded front view for explaining a modification of FIG. 2;
FIG. 4 is a plan view for explaining an embodiment of a method for producing a multilayer board according to the present invention.
FIG. 5 is a front view for explaining a main part of an embodiment of the method for producing a multilayer board according to the present invention.
FIG. 6 is a front view for explaining a main part of another embodiment of the method for producing a multilayer board according to the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Laminated body 11 Inner layer board | substrate 12 Prepreg 13 Metal foil 13a Lower metal foil 13b among the metal foils which form a to-be-bonded body Upper metal foil 14 among the metal foils which form a to-be-bonded body 14 To-be-bonded body 15 Intermediate body 16 Curved object 17 Loaded object 18 Flat plate 19 Pressure plate 21 Flat plate holding claw 23 Flat plate warping cylinder 31 Carrier plate 33 Carrier plate holding claw 35 Carrier plate warping cylinder 37 Ultrasonic generator 39 Pressed object A Predetermined to form a laminate position

Claims (4)

表面に導体回路を形成した内層用基板と、熱硬化性樹脂組成物及び基材よりなるプリプレグと、金属箔とを、その両外側に金属箔が配置されるように所定の位置の上に積み重ねた被圧着体を、平板に挟んで複数重ねて積層体を形成し、その積層体を加熱・加圧して製造する多層板の製造方法において、被圧着体を形成する金属箔のうち下側の金属箔と平板とを所定の位置の上に重ねる方法が、平板の上側に金属箔を重ねた後、その平板及び金属箔を加圧して凹状に湾曲させ、次いで、この湾曲物を所定の位置の上に重ねた後、上記平板及び金属箔への加圧を解放する方法であることを特徴とする多層板の製造方法。A substrate for an inner layer having a conductor circuit formed on the surface, a prepreg composed of a thermosetting resin composition and a base material, and a metal foil are stacked on a predetermined position so that the metal foil is arranged on both outer sides. In the manufacturing method of the multilayer board which forms a laminated body by stacking a plurality of the bonded bodies sandwiched between flat plates and heats and pressurizes the laminated body, the lower side of the metal foil forming the bonded body The method of stacking the metal foil and the flat plate on the predetermined position is that the metal foil is stacked on the upper side of the flat plate, then the flat plate and the metal foil are pressed to bend into a concave shape, and then the curved object is put into the predetermined position. A method for producing a multilayer board, characterized by being a method of releasing pressure applied to the flat plate and the metal foil after being overlaid on top. 湾曲物を重ねる方法が、湾曲物を重ねようとする所定の位置の上に既に重ねられた積載物を除電しながら、湾曲物を重ねる方法であることを特徴とする請求項1記載の多層板の製造方法。2. The multilayer board according to claim 1, wherein the method of stacking the curved objects is a method of stacking the curved objects while discharging the load already stacked on a predetermined position where the curved objects are to be stacked. Manufacturing method. 被圧着体を形成する金属箔のうち上側の金属箔を重ねる方法が、金属箔を重ねようとする所定の位置の上に既に重ねられた積載物を加圧して凸状に湾曲させた後、その湾曲させた状態の積載物の上に金属箔を重ね、次いでその金属箔及び積載物へ振動を与えながら、その金属箔及び積載物への加圧を解放する方法であることを特徴とする請求項1又は請求項2記載の多層板の製造方法。The method of stacking the upper metal foil among the metal foils that form the object to be bonded is to pressurize the load already stacked on the predetermined position where the metal foil is to be stacked and to bend it into a convex shape. The method is characterized in that a metal foil is stacked on the curved load and then the metal foil and the load are released while applying vibration to the metal foil and the load. The manufacturing method of the multilayer board of Claim 1 or Claim 2. 金属箔及び積載物へ振動を与えながら、その金属箔及び積載物への加圧を解放する方法が、金属箔及び積載物へ振動を与えながら、金属箔の表面の中央部に押圧物を接触させた後、その押圧物を接触させたまま端部の方向に走査させ、次いで金属箔及び積載物へ振動を与えながら、その金属箔及び積載物への加圧を解放する方法であることを特徴とする請求項3記載の多層板の製造方法。The method of releasing the pressure on the metal foil and the load while giving vibration to the metal foil and the load is that the pressed object contacts the center of the surface of the metal foil while giving the vibration to the metal foil and the load. After that, the pressed object is scanned in the direction of the edge while being in contact, and then the metal foil and the load are released while applying pressure to the metal foil and the load. The method for producing a multilayer board according to claim 3.
JP1306898A 1998-01-26 1998-01-26 Multilayer board manufacturing method Expired - Fee Related JP3997585B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1306898A JP3997585B2 (en) 1998-01-26 1998-01-26 Multilayer board manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1306898A JP3997585B2 (en) 1998-01-26 1998-01-26 Multilayer board manufacturing method

Publications (2)

Publication Number Publication Date
JPH11214842A JPH11214842A (en) 1999-08-06
JP3997585B2 true JP3997585B2 (en) 2007-10-24

Family

ID=11822841

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1306898A Expired - Fee Related JP3997585B2 (en) 1998-01-26 1998-01-26 Multilayer board manufacturing method

Country Status (1)

Country Link
JP (1) JP3997585B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102573337A (en) * 2010-12-30 2012-07-11 北大方正集团有限公司 Manufacturing method of multilayer circuit board, laminating device and multilayer circuit board

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4639640B2 (en) * 2004-05-19 2011-02-23 日立化成工業株式会社 Laminate production method
JP5314523B2 (en) * 2009-07-24 2013-10-16 東レエンジニアリング株式会社 Substrate laminating apparatus and method, and substrate laminating head
JP5381531B2 (en) * 2009-09-11 2014-01-08 日立化成株式会社 Lamination table and method for producing metal foil-clad laminate using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102573337A (en) * 2010-12-30 2012-07-11 北大方正集团有限公司 Manufacturing method of multilayer circuit board, laminating device and multilayer circuit board

Also Published As

Publication number Publication date
JPH11214842A (en) 1999-08-06

Similar Documents

Publication Publication Date Title
TWI344807B (en) Laminated multi-layer circuit board
JP3997585B2 (en) Multilayer board manufacturing method
JP2991032B2 (en) Method for manufacturing multilayer substrate
JP2004241526A (en) Wiring board
JPH07106760A (en) Manufacture of mutlilayered substrate
JP3145079B2 (en) Method and apparatus for manufacturing multilayer printed circuit board
KR20050004091A (en) Epoxy resin laminate board as a reinforcing material for flexible printed wiring board
JP4175192B2 (en) Multilayer substrate manufacturing method
JP3876802B2 (en) Press method
JP2923347B2 (en) Manufacturing method of laminated board
JP3989145B2 (en) Laminate production method
JP3915260B2 (en) Multilayer board manufacturing method
JP2000013024A (en) Manufacture of multilayer board and plate for multilayer board manufacture
JP3944987B2 (en) Multilayer board manufacturing method
JPH11214843A (en) Manufacture of multilayer board
JP4161461B2 (en) Laminate production method
JPH1191035A (en) Manufacture of laminate board
JP2000071386A (en) Production of laminated sheet
JP3954831B2 (en) Method for producing heat-resistant flexible laminate
JP2002361744A (en) Method for manufacturing heat-resistant flexible laminated sheet
JPH10303553A (en) Manufacture for printed wiring board
JPH11235782A (en) Manufacture of metal foil-clad laminate
JPS62128734A (en) Molding of laminated board
JPH10215073A (en) Method for manufacturing multilayer board
JP2006032494A (en) Method of manufacturing multilayered circuit board

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20040924

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20070717

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20070730

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100817

Year of fee payment: 3

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100817

Year of fee payment: 3

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110817

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120817

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130817

Year of fee payment: 6

LAPS Cancellation because of no payment of annual fees