JP3991729B2 - Inspection device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to, for example, an inspection apparatus for inspecting whether the component in the inspection body in which the component is mounted on the substrate is correctly mounted on the substrate or whether the mounted component itself is correct. is there.
[0002]
[Prior art]
Conventionally, the structure of this type of inspection apparatus has been as follows. That is, an irradiating means for irradiating the inspection object with a laser, a light receiving means for receiving the laser light reflected from the inspection object, and a detection means for detecting appearance information of the inspection object with the laser light received by the light receiving means. The laser beam is irradiated from the irradiation means to the inspection body through one rotating refracting body, and the reflected light reflected from the inspection body is received by the light receiving means, and the laser received by the light receiving means. A so-called triangulation method is used to detect appearance information of the shape of the inspection object based on the light receiving position.
[0003]
[Problems to be solved by the invention]
In the conventional inspection apparatus, since the scanning range of the laser beam is a fixed rotational shape, it is impossible to inspect various inspection objects of different types and sizes according to the inspection standard. There were problems that it took time and high-precision inspection was not possible.
[0004]
Specifically, as shown in FIG. 9, various components 12 a to 12 e on the substrate 11 are scanned a plurality of times with a rotation diameter of a fixed size for the scanning range irradiated with laser light, and the components 12 a to 12 e are scanned. An inspection was made as to whether or not the substrate 11 was accurately mounted. However, when scanning a plurality of times, it takes much time, and since scanning is performed with a fixed rotation diameter regardless of the size of the parts 12a to 12e, inspection accuracy can be obtained for a small part 12c or a part 12d having a lead terminal. There was no problem.
[0005]
This point of inspection accuracy will be described in more detail. Since scanning is performed with a fixed rotation diameter regardless of the size of the parts 12a to 12e, small parts are scanned when scanning with a large rotation diameter. Detection points for parts are reduced, in other words, detection resolution is increased and inspection accuracy is deteriorated.
[0006]
Therefore, in order to solve the above-described conventional problems, the present invention uses a scanning trajectory of the laser beam as a variable rotational shape or linear scan, and scans according to various types and sizes of inspection objects and inspection standards. The purpose of the inspection is to shorten the inspection time and provide a highly accurate inspection.
[0007]
[Means for Solving the Problems]
In order to achieve the above object, the present invention has the following configuration.
[0008]
According to the first aspect of the present invention, a variable means for changing the scanning range of the laser light is provided between the irradiation means and the inspection body, and the variable means has a configuration in which a plurality of laser light refractors are opposed to each other. , Based on the inspection information consisting of the type, position, size, orientation and inspection standard Determine the relative angle of the opposing refractors and rotate them in the same direction synchronously. The configuration is such that the displacement of the inspection object is detected by a single rotation scan, so that the inspection object can be small or large, or a component having a lead terminal. Since they can be scanned appropriately and can be inspected with high accuracy, the positional deviation can be detected by only one rotational scan, so that the inspection time can be shortened compared to the inspection that scans a plurality of times. Is obtained.
[0010]
Claims of the invention 2 The invention described in 1 includes a switching unit that switches whether the scanning range is rotated once or a plurality of times based on the inspection information including the type, position, size, direction, and inspection standard of the inspection object. As a result, the appropriate number of scans can be changed in accordance with the size and shape of the inspection object, and an effect of being able to perform an appropriate inspection can be obtained.
[0011]
Claims of the invention 3 According to the invention described in (1), after detecting a positional shift by shape recognition using appearance information detection of an inspection object, based on the position information, the structure of detecting the float and polarity of the inspection object from the height of the inspection object and the amount of reflected light In addition, since the height and the amount of reflected light are measured in the determined area based on the position information of the inspection object, an operation and effect that a highly reliable inspection can be performed can be obtained.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
(Embodiment 1)
Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.
[0018]
In FIG. 1, reference numeral 1 denotes a main body, and a sensor head 2 is provided in the main body 1. In the sensor head 2, there are provided laser light irradiation means 3 and laser light receiving means 4. Further, below the laser beam irradiation means 3, flat glass plates 5 and 6 made of two glasses, which are refractors, are provided. Servo motors 9 and 10 are connected to these flat glass plates 5 and 6 via timing belts 7 and 8, respectively.
[0019]
In FIG. 1, reference numeral 11 denotes a substrate, on which a plurality of components 12 are mounted, more specifically, components 12a to 12e are mounted as shown in FIG. Referring to FIG. 3, the parts 12a to 12c in FIG. 3 are parts without lead terminals, of which the part 12a is the largest, the next largest is the part 12b, A small part is 12c, and 12b is a part having a polarity like a capacitor. Reference numeral 12e denotes a component having a lead terminal 12F such as an IC, and reference numeral 12D denotes a lead terminal of the insertion component 12d.
[0020]
The electrical configuration of this embodiment is as shown in FIG. In other words, the servo motors 9 and 10 are connected to position detecting means 13 and 14 for detecting their rotational positions, respectively, and the position detecting means 13 and 14 and the light receiving means 4 are connected to the CPU 15. That is, in the present embodiment, the servo motors 9 and 10 are respectively detected by the position detection means 13 and 14 and the detected positions are transmitted to the CPU 15.
[0021]
As described above, the flat glass plates 5 and 6 are connected to the servo motors 9 and 10 via the timing belts 7 and 8, respectively. The servomotors 9 and 10 are connected to drive circuits 17 and 18 and a synchronizing circuit 16, and the servomotors 9 and 10 are rotated in the same direction in synchronism with each other, and by changing one rotation speed, The two flat glass plates 5 and 6 form the states shown in FIGS. In FIG. 4A, the flat glasses 5 and 6 are in a parallel state, and this state is expressed as a relative angle of 0 degrees. If the flat glass plates 5 and 6 are rotated in synchronism with the servo motors 9 and 10 via the timing belts 7 and 8 in this state, the laser beam emitted from the laser beam irradiation means 3 is shown in FIG. As shown in a), a large circular scanning locus is drawn.
[0022]
The scanning locus is determined based on the inspection information 19 input in advance shown in FIG. 2, and the inspection object 19 is input with the type, position, size, and inspection standard of the inspection object.
[0023]
Next, when the rotation speed of one of the flat glasses 5 and 6 is changed in a state where the synchronization of the synchronizing circuit 16 in FIG. 2 is stopped, for example, as shown in FIG. A relative angle difference close to degrees can be made. In this state, if the flat glass plates 5 and 6 are rotated while being synchronized by the synchronizing circuit 16 again, a small circular scanning locus is drawn.
[0024]
From this state, the rotation speed of the flat glass 5 or the flat glass 6 is changed while the synchronization by the synchronizing circuit 16 is stopped, and the relative angle of the flat glasses 5 and 6 is 90 degrees as shown in FIG. If the flat glass plates 5 and 6 are rotated in synchronization with the synchronizing circuit 16 in this state, a scanning trajectory having a medium size is formed as shown in FIG. Here, FIG. 4E is a diagram showing the locus of the laser beam at this time, r1 is the radius of rotation when the flat glass 5 is alone, and the locus of the virtual laser beam is as shown by a broken line, and r2 is The radius of rotation when the flat glass 6 is alone, θ is a relative angle. The actual laser beam trajectory rotates on the solid line.
[0025]
Again, the rotation speed of the flat glass 5 or the flat glass 6 is changed in such a state that the synchronization by the synchronizing circuit 16 is stopped, and the relative angle of the flat glasses 5 and 6 is 180 degrees as shown in FIG. If the flat glass plates 5 and 6 are rotated in synchronism by the synchronizing circuit 16, the small dot-like scanning is performed although the flat glass plates 5 and 6 are rotated as shown in FIG. A locus will be formed. However, the turning radius r1 and the turning radius r2 must be approximately equal.
[0026]
These states are shown in FIGS. 5 (a) to 5 (c). 5A shows the number of rotations of the servo motor 10, FIG. 5B shows the number of rotations of the servo motor 9, and FIG. 5C shows the relative angles of the flat glasses 5 and 6. FIG. That is, when the rotational speed is A0 in the state of FIG. 5A, the flat glasses 5 and 6 are in a parallel state, that is, a state of θ0 = 0 ° as shown in FIG. The state of the rotational speed A1 in a) decreases the rotational speed of the servo motor 10 for the time T1, and when the state of FIG. 4C is formed thereby, the rotational speed of the servo motor 10 is restored to the original state again. Thus, by setting the rotational speed A0 in FIG. 5A, the relative angles of the flat glasses 5 and 6 increase to θ2, for example, close to 180 degrees as shown in FIG. 4C.
[0027]
Then, when the rotational speed of the servo motor 10 is increased for the time T2 as shown in FIG. 5A, the relative angle of the flat glasses 5 and 6 is as shown in FIG. 4B. In this state, the rotation speed of the servo motor 10 is returned to A0, that is, the servo motor 9 is also rotating at the rotation speed A0, and rotation synchronization is performed. Synchronous rotation is performed in the state of (b).
[0028]
Again, the rotational speed of the servo motor 10 in FIG. 5 (a) is set to the rotational speed A3 and decreased for T3 hours. In this state, the state as shown in FIG. 4 (d) is formed. Is rotated at A0, that is, when synchronized operation is performed, rotation is performed while maintaining a relative angle of θ3, that is, 180 degrees. That is, FIG. 4D shows the state.
[0029]
As described above, in this embodiment, the size of the rotation locus of the substantially circular laser beam on the substrate 11 can be varied as shown in FIGS. .
[0030]
In this state where the circular locus is drawn, if the main body 1 is stopped on the substrate 11 and rotated once, a circular locus is drawn as 100 shown in FIG. 23 (hereinafter referred to as C-scan). On the other hand, if the main body 1 is moved while being rotated, the scanning locus in this example draws a spiral locus that moves in the right direction as indicated by 101 in FIG. 24 (hereinafter referred to as R-scan). is there.
[0031]
On the other hand, by rotating the flat glasses 5 and 6 in the reverse direction, the scanning trajectory of the laser light can be linearly moved from a circular motion (hereinafter referred to as S-scan).
[0032]
The principle of the S scan will be described with reference to FIG.
[0033]
FIG. 10A shows a state in which the relative angles of the flat glasses 5 and 6 in FIG. 1 are 0 degrees. When the flat glasses 5 and 6 are rotated in the opposite direction in this state, the laser light is shown in FIG. As shown by line A in (d), scanning is performed linearly in the X direction.
[0034]
FIG. 10B shows a case where the relative angles of the flat glasses 5 and 6 are 90 degrees. When the flat glasses 5 and 6 are rotated in the opposite direction in this state, the scanning direction of the laser light is obtained. Is a linear motion in the direction of 45 degrees counterclockwise from the A line, as indicated by the B line in FIG.
[0035]
Further, in FIG. 10C, when the flat glasses 5 and 6 are rotated in the reverse direction in synchronization with each other, the scanning direction of the laser light is 90 from the A line counterclockwise as shown by the C line in FIG. It becomes a linear motion in the direction of degrees.
[0036]
Thus, by setting the relative angles of the flat glasses 5 and 6 arbitrarily, linear motion in any direction is possible.
[0037]
Now, an inspection method for inspecting various components 12a to 12e shown in FIG. 3 using such laser beam scanning will be described for each component type.
[0038]
First, a component having no lead terminal in FIG. 3 will be described.
[0039]
Since the information that the part 12a is a large part and has no lead terminal is known from the inspection information 19 inputted in advance shown in FIG. 2, the relative angle of the flat glasses 5 and 6 is determined as shown in FIG. The inspection is performed with a small C scan in a large scanning range.
[0040]
Then, when moving to the component 12c next, information indicating that the component 12c is a component without a small lead terminal is known from the pre-input inspection information 19 shown in FIG. The relative angles of the flat glasses 5 and 6 are made small as shown in FIG.
[0041]
Here, a method for determining the positional deviation of the C scan will be described.
[0042]
As shown in FIG. 6, the rotation diameter (D) of the C-scan is determined from the component length (L) of the component 12a and its positional deviation inspection standard (S), and the rotation diameter (D) = component length (L ) -Position displacement inspection standard (S) × 2. In this way, when there is no large misalignment or part 12a, any or all of the points A to D whose height changes as shown in FIG. 7 disappear, and the slight width direction as shown in FIG. 7 disappears. The positional deviation is obtained by comparing the positional information obtained from the inspection information 19 input in advance shown in FIG. 2 since the positional information of the four points A to D is obtained.
[0043]
On the other hand, if the slight positional deviation in the longitudinal direction exceeds the positional deviation inspection standard as shown in FIG. 8, E and F points other than the points A to D are generated, and it is determined that the component 12a is not correctly mounted on the substrate 11. It can be done.
[0044]
Next, when moving from the part 12c to the part 12b, the information that the part 12b is a square part and a polar part is known from the inspection information shown in FIG. For example, the relative angles of the flat glasses 5 and 6 are set to be slightly large as shown in FIG.
[0045]
This is the reason why the part 12b is R-scanned instead of C-scanned, but the shape of the part 12b is different from a rectangular shape having a length and width ratio of about 2: 1 like the normal parts 12a and 12c. Since the shape is close to a square shape, an optimal rotation diameter cannot be obtained by C-scanning, and any one of the four points A to D or the part 12b is within the allowable range of displacement, or This is because it is considered that all cannot be detected, and it is impossible to determine whether or not the electronic component 12b is correctly mounted on the substrate 11.
[0046]
The R-scan inspection method will be described by taking the part 12b in FIG. 11 as an example.
[0047]
The laser beam first travels from the substrate 11 to the component 12a at point a, falls from the component 12a to the substrate 11 at point b, similarly climbs at point c, falls at point d, rides at point e, and point f. Falls at point g, rides at point g, falls at point h, rides at point i, and falls at point j.
[0048]
In other words, it is possible to detect from the information of 10 points a to j obtained by the above four rotation scanning, and the CPU 15 matches the information of the 10 points with the component (in this case, 12b), and the inspection information. By comparing with 19, it is determined whether or not the component 12 b is mounted at the correct position on the substrate 11.
[0049]
Then, the polarity inspection of the component 12b will be described with reference to FIG.
[0050]
In general, the position measurement information obtained by the above-described R-scan for the component 12b at the position of the broken line is first shown as the polarity display for the type such as the component 12b in which the right and left regions of the component have a light amount difference. From the edges of the left and right parts, areas A and B of about ¼ of the length are set.
[0051]
Judge whether the polarity is correct by comparing the measured light quantity of the set left and right areas with the polarity information of the mounting data input in advance, that is, the information on which side of the part the light quantity is larger To do.
[0052]
As described above, it is possible to reliably determine even a small light amount difference from the determination in the correct area determined from the position information and the determination based on the difference between the right and left light amounts, which is not the absolute light amount.
[0053]
In the inspections 12a to 12c as described above, it is automatically determined from the inspection information 19 input in advance so that a large scanning range is obtained for a large part and a small scanning range is obtained for a small part. Since the diameter is reduced in accordance with the part, the amount of information that can be captured in one rotation is the same, so the data interval, that is, the resolution is increased, and the inspection can be performed with higher accuracy.
[0054]
That is, as can be understood from FIG. 3, the components 12a, 12b, and 12c have different sizes for the respective reasons, and the tolerances of the mounting positions when mounted on the substrate 11 are respectively different. The ratio is a certain ratio for each part size.
[0055]
Therefore, the absolute value of the tolerance is small for small parts, and the tolerance for large parts is large. By selecting a large scanning range for such a large component 12a and a small scanning range for a small component, appropriate inspection can be performed regardless of the size of the component.
[0056]
Next, an inspection method for the component 12e having the lead terminal 12F shown in FIG. 3 will be described.
[0057]
The component 12e is composed of 16 lead terminals 12F protruding outward from the main body 12E, and is the component 12e properly mounted on the substrate 11 with the 16 lead terminals 12F? Suppose no is important.
[0058]
Therefore, in this case, when the inspection of the component 12b is finished, the flat glass 5 and 6 rotating in the same direction is stopped and rotated in the opposite direction, so that the scanning locus of the laser light is linearly moved from the circular motion. By using the S-scan, it is possible to inspect components having lead terminals such as ICs and transistors, which are difficult to detect by rotational movement, at high speed and with high accuracy.
[0059]
Next, an inspection method using this S scan will be described with reference to FIGS.
[0060]
A component 12e shown in FIG. 13 is an IC used as an example of a component having a lead terminal 12F. The component 12e has a large number of lead terminals 12F on the outer periphery of the main body 12E.
[0061]
At this time, on the first lead terminal 12F described on the lower side of FIG. 13, the flat glasses 5 and 6 are set to a relative angle of 180 degrees as shown in FIG. 10C, and the flat glasses 5 and 6 are synchronized. When the laser beam is rotated in the opposite direction, the laser beam scans on the first lead terminal 12F, whereby the first lead terminal 12F can be inspected.
[0062]
In this state, the main body 1 of the inspection apparatus shown in FIG. 1 is sequentially moved leftward while temporarily stopping the outer periphery of the main body 12E of the component 12e on the lead terminal 12F as indicated by a broken line A in FIG.
[0063]
Next, in the inspection of the fifth lead terminal 12F described on the left side of FIG. 13, the main body 1 of the inspection apparatus is temporarily stopped on the lead terminal 12F. Here, if the relative angle of the flat glasses 5 and 6 is set to 0 degree as shown in FIG. 10A, and the flat glasses 5 and 6 are rotated in the opposite direction in this state, the lead terminals 12F are obtained. Also, the inspection can be performed by scanning the laser beam.
[0064]
That is, even when the lead terminal 12F of the component 12e is inspected in this way, the main body 1 of the inspection apparatus may be operated on a straight line as shown by the broken line A in FIG.
[0065]
At this time, only one lead terminal 12F from each side of the lead terminals 12F of the component 12e can be inspected, for example, by inspecting the first, fifth, ninth, and thirteenth, and at a higher speed. It can be inspected.
[0066]
Next, a method for determining the positional deviation of the actual lead terminal 12F will be described.
[0067]
First, the laser sequentially scans the center position in the width direction of each lead terminal 12F in FIG. 13 to measure the height. If the lead terminal 12F exists as shown in FIG. 13, the points a and b as shown in FIG. 15 are obtained from the threshold values Th1 and Th2 of the component 12e calculated from the inspection information 19 input in advance shown in FIG. If the position of the point is obtained and the distance between the points a and b is within the determined range, it is determined that the lead terminal 12F exists and is in the correct position.
[0068]
On the other hand, in FIG. 14, if the part 12e is shifted upward from the original position indicated by the broken line, the threshold Th1, similarly, is obtained when the lead terminal 12F is scanned. Although the points a and c are obtained by Th2, since the lead terminal 12F does not exist at the scanned position, the points a and c are almost the same position, so it is determined that the positions are shifted.
[0069]
Here, it is a general determination criterion that a positional deviation can be determined based on the presence / absence of the lead terminal 12F if there is a positional deviation more than half of the width direction of the lead terminal 12F. Because.
[0070]
Further, if it is intended to determine the positional deviation with higher accuracy, the scanning can be performed by shifting the scanning position on the lead terminal 12F from the center to the outside as shown in FIG.
[0071]
In this example, the scanning position is shifted outward, but the same is true if the scanning position is shifted inward. In addition, when the points d and e are obtained by setting the threshold values Th1 and Th2 shown in FIG. 15, since the distance is outside the determined range, it is determined that the float is upside down. Is possible.
[0072]
At this time, if an attempt is made to inspect a small floating of the lead terminal 12F, an accurate height of the substrate 11 is required. In such a case, pattern wiring in the vicinity of the component 12e as shown by point A in FIG. This can be done by measuring the height of the substrate 11, such as a surface, where the laser beam does not pass through the substrate.
[0073]
The reason for measuring the portion where the laser beam is not transmitted is that if the laser beam is transmitted, the correct height of the substrate 11 cannot be measured by receiving the reflected light from the transmitted portion.
[0074]
As shown in FIG. 4D, the substrate height is measured by rotating the flat glasses 5 and 6 in synchronization with the synchronizing circuit 16 in a state where the relative angles of the flat glasses 5 and 6 are 180 degrees. The part 12e is inspected after scanning the position of the pattern wiring surface or the like taught in advance.
[0075]
Note that this can be performed not only for components with lead terminals 12F, such as the component 12e, but also for components whose height is to be accurately inspected.
[0076]
Next, a method for inspecting the clinch state of the lead terminal 12D of the insertion component 12d will be described.
[0077]
The insertion component 12d inserts the lead terminal 12D into the insertion hole 11a of the predetermined substrate 11 and bends and fixes the lead terminal 12D. If the bending state, that is, the clinching state is inappropriate, the insertion component 12d is inserted. Falls off and is missing.
[0078]
First, the correct clinching state will be described with reference to FIGS. 17A to 17C. FIG. 17A is a side view showing a state in which the insertion part 12d is inserted into the substrate 11. FIG. FIGS. 17B and 17C are views of the lead terminal 12D as viewed from the lead terminal 12D side, and the lead terminal 12D has a length determined in a predetermined direction from the insertion hole 11a on the substrate 11. FIG. It is inserted.
[0079]
On the other hand, what is an inappropriate clinch state is as shown in FIGS. 18A to 18B. FIG. 18A shows a state where there is no lead terminal 12D due to a lack of the insertion part 12d, and FIG. 18B shows a state where the lead terminal 12D is short due to insufficient bending of the lead terminal 12D.
[0080]
In order to inspect these inappropriate clinch states at high speed and reliably, as shown in FIG. 19, the lead terminal 12D is required to protrude from the insertion hole 11a on the land 11b around the insertion hole 11a. This can be determined by performing a C-scan of the locus 100 with a rotation diameter of.
[0081]
That is, when the C scan is performed, if there is no change in height, it can be determined that the state shown in FIG. 18 (a) or 18 (b) is present, and the direction inputted in advance, in this case, between AB shown in FIG. If there is a height equal to or higher than the set value obtained from the thickness of the lead terminal 12D, it is determined that the lead terminal 12D is present.
[0082]
Further, as shown in FIG. 20, since the lead terminal 12D is not sufficiently cut, the lead terminal 12D is bent in a certain bending direction and length when the lead terminal 12D is long. Therefore, as shown in FIG. 21, the determination can be made by performing a C scan of the locus 100 with the rotation diameter within the allowable range of the length around the tip position of the lead terminal 12D.
[0083]
That is, when it is in the correct position as shown in FIG. 21, only a height higher than the set value exists between the CDs shown in FIG. 21, but when the lead terminal 12D is long as shown in FIG. The lead terminal 12D can be determined to be long because there is a height higher than the set value between AB in addition to between the CDs shown in FIG.
[0084]
【The invention's effect】
As described above, according to the present invention, since the variable means for changing the scanning range of the laser beam is provided between the irradiation means and the inspection body, the lead terminal can be used regardless of the size of the inspection body. Even if there is a part, it is possible to perform an appropriate inspection according to the part type input in advance, and it is faster by the number of scans according to the part. Therefore, data can be acquired with a small resolution, and inspection accuracy suitable for each inspection object can be obtained.
[Brief description of the drawings]
FIG. 1 is a front view showing an inspection apparatus according to an embodiment of the present invention.
Fig. 2 Control block diagram
FIG. 3 is a plan view showing a state in which components are mounted on a board.
FIGS. 4A to 4D are front views showing a state of rotation of flat glass in the same direction.
(E) Plan view showing the locus of laser light in the same state
FIG. 5A is a diagram showing the number of rotations of the servo motor.
(B) A diagram showing the rotation speed of the servo motor
(C) The figure which shows transition of the relative angle of flat glass
FIG. 6 is a plan view showing one rotation scanning of laser light on a component.
FIG. 7 is a plan view showing one rotation scanning of a laser beam on a component displaced in the width direction.
FIG. 8 is a plan view showing one rotation scanning of a laser beam on a component displaced in the length direction.
FIG. 9 is a plan view showing a scanning locus of a conventional inspection.
FIGS. 10A to 10C are front views showing the reverse rotation state of the flat glass.
(D) Plan view showing the locus of laser light in the same state
FIG. 11 is a plan view showing multiple rotation scanning of laser light on a component.
FIG. 12 is a plan view showing multiple rotation scanning of laser light on a polar part.
FIG. 13 is a plan view showing scanning of laser light on a component having lead terminals.
FIG. 14 is a plan view showing scanning of laser light on a component having a misaligned lead terminal.
FIG. 15 is a side view illustrating a method for inspecting a component having a lead terminal.
FIG. 16 is a plan view showing scanning of laser light on a component having a misaligned lead terminal.
FIG. 17A is a side view showing a normal lead clinching state of an insertion part.
(B) Plan view
(C) Plan view
FIGS. 18A to 18B are plan views showing a defective lead clinching state of an insertion part;
FIG. 19 is a plan view showing one rotation scanning of laser light in a normal lead clinching state of an insertion part;
FIG. 20 is a plan view showing a lead clinching state of a defective insertion part.
FIG. 21 is a plan view showing one rotation scanning of laser light in a normal lead clinching state of an insertion part;
FIG. 22 is a plan view showing one rotation scanning of laser light in a lead clinching state in which an insertion part is defective.
FIG. 23 is a plan view showing a scanning locus.
FIG. 24 is a plan view thereof.
[Explanation of symbols]
1 Body
2 Sensor head
3 Irradiation means
4 Light receiving means
5 Flat glass
6 Flat glass
7 Timing belt
8 Timing belt
9 Servo motor
10 Servo motor
11 Substrate
11a Insertion hole
11b Land
12 parts
12a parts
12b parts
12c parts
12d insert
12e parts
12D Insertion lead terminal
12E body
12F Lead terminal
13 Position detection means
14 Position detection means
15 CPU
16 Synchronization circuit
17 Drive circuit
18 Drive circuit
19 Inspection information

Claims (3)

Irradiation means for irradiating the inspection body mounted on the substrate with laser light, light receiving means for receiving the laser light reflected by the inspection body, and appearance information of the inspection body is detected by the laser light received by the light reception means and detection means for, providing a varying means for varying the scanning range of the laser beam between the test subject and the irradiation means, the variable means is a structure in which a plurality of opposing the refraction of the laser beam, pre Me input The relative angle of the opposing refracting bodies is determined based on the inspection information consisting of the type, position, size and orientation of the inspection object and the inspection standard, and is rotated in the same direction in synchronism with one rotation scanning. Inspection device that detects misalignment of the inspection object. Irradiation means for irradiating the inspection body mounted on the substrate with laser light, light receiving means for receiving the laser light reflected by the inspection body, and appearance information of the inspection body is detected by the laser light received by the light reception means and detection means for, providing a varying means for varying the scanning range of the laser beam between the test subject and the irradiation means, the variable means is a structure in which a plurality of opposing the refraction of the laser beam, pre Me input The relative angle of the opposing refractors is determined based on the inspection information consisting of the type, position, size, orientation, and inspection standard of the inspection object, and is rotated in the same direction synchronously and the scanning range is set once. Alternatively, an inspection apparatus having switching means for switching whether to perform a plurality of rotational scans.   3. A configuration in which, after detecting a positional shift by shape recognition using appearance information detection of an inspection object, based on the position information, the floating and polarity of the inspection object are detected from the height of the inspection object and the amount of reflected light. The inspection device described in 1.

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