JP3986500B2 - 射出成形機への超臨界流体の供給装置 - Google Patents

射出成形機への超臨界流体の供給装置 Download PDF

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Publication number
JP3986500B2
JP3986500B2 JP2004037370A JP2004037370A JP3986500B2 JP 3986500 B2 JP3986500 B2 JP 3986500B2 JP 2004037370 A JP2004037370 A JP 2004037370A JP 2004037370 A JP2004037370 A JP 2004037370A JP 3986500 B2 JP3986500 B2 JP 3986500B2
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Prior art keywords
pressure
valve
flow path
supercritical fluid
fluid
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Expired - Fee Related
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Japanese (ja)
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JP2005225141A5 (https=
JP2005225141A (ja
Inventor
久登 清水
元 川崎
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Tacmina Corp
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Tacmina Corp
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  • Injection Moulding Of Plastics Or The Like (AREA)
  • Molding Of Porous Articles (AREA)
JP2004037370A 2004-02-13 2004-02-13 射出成形機への超臨界流体の供給装置 Expired - Fee Related JP3986500B2 (ja)

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JP2004037370A JP3986500B2 (ja) 2004-02-13 2004-02-13 射出成形機への超臨界流体の供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004037370A JP3986500B2 (ja) 2004-02-13 2004-02-13 射出成形機への超臨界流体の供給装置

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JP2005225141A JP2005225141A (ja) 2005-08-25
JP2005225141A5 JP2005225141A5 (https=) 2005-10-06
JP3986500B2 true JP3986500B2 (ja) 2007-10-03

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4657938B2 (ja) * 2006-02-01 2011-03-23 株式会社カワタ 流体供給装置
US8985139B2 (en) 2008-10-07 2015-03-24 Plasteco Corporation Carbon dioxide supply system
US20190118432A1 (en) * 2017-10-23 2019-04-25 Trexel, Inc. Blowing agent introduction in polymer foam processing
JP7562403B2 (ja) * 2020-12-24 2024-10-07 東京エレクトロン株式会社 基板処理装置及び基板処理方法

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JP2005225141A (ja) 2005-08-25

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