JP3983893B2 - Work supply / discharge device for 2 head flat finishing machine - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a workpiece supply / discharge device known as a so-called lapping machine, and more particularly to a workpiece supply / discharge device that supplies or discharges a large number of disc-shaped workpieces to a grinding wheel at once.
[0002]
[Prior art]
In general, in a two-head flat finishing machine, an upper surface plate 101 and a lower surface plate 105, which are annular disks as shown in FIG. The platen 101 and the lower platen 105 are rotated in directions opposite to each other, and the upper platen 101 moves downward as indicated by the arrow A with respect to the workpiece W in the work holder 110 placed on the lower platen 105 to make the upper platen. The board 101 is pressed against the upper surface of the workpiece W, whereby both surfaces of the workpiece W are ground by the upper surface plate 101 and the lower surface plate 105. In the upper surface plate 101 and the lower surface plate 105, the upper main shaft 102 attached to the upper surface plate fixing plate 100 and the lower main shaft 106 attached to the lower surface plate fixing plate 104 are usually provided by a motor or the like (not shown). They are driven to rotate in opposite directions. The upper spindle 102 is rotatably supported by the upper spindle stock 103, and the lower spindle 106 is rotatably supported by the lower spindle stock 107. 108 is a sun gear and 109 is a sun gear shaft. The sun gear 108 meshes with an external gear 110 a formed on the outer periphery of the work holder 110, and the external gear 110 a also meshes with an inner peripheral gear 112 fixed to the machine main body 111 to drive the sun gear 108 to rotate. Thus, the work holder 110 performs a planetary motion to grind the work W uniformly.
[0003]
By the way, as shown in FIG. 6, the work holder 110 has a large number of receiving holes 113 for taking in the work W in the circumferential direction. It is necessary to put in the 110 accommodation holes 113. Further, when the grinding process is completed, it is necessary to take out the workpiece W from the accommodation hole 113.
[0004]
Conventionally, the upper surface plate 101 is moved up or moved / turned in the horizontal direction to separate the upper surface plate 101 from the lower surface plate 105 and then a loading device (loading robot) disposed in the vicinity of the machine body 111. ) (Not shown) and an unloading device (unloading robot) (not shown) are moved toward the workpiece W, and the workpiece W is gripped by the gripping portion to supply and discharge the workpiece W. It was.
[0005]
[Problems to be solved by the invention]
However, in the conventional workpiece supply / discharge device, a loading device and an unloading device are separately provided, so that a space for it is required around the machine body, and a device for further arranging these both devices is manufactured. This necessitates a problem that the cost of the entire system becomes very expensive. Further, since the loading device and the unloading device are moved to the workpiece W, the cycle time is increased correspondingly, the mechanism becomes complicated, and the productivity is not improved.
[0006]
In view of the above points, the object of the present invention is to supply and discharge workpieces with the upper surface plate itself, thereby eliminating the need for loading robots and unloading robots, saving space and improving productivity. An object of the present invention is to provide a workpiece supply / discharge device for a flat finishing machine.
[0007]
[Means for Solving the Problems]
In order to achieve this object, a workpiece supply / discharge device according to the present invention includes an upper surface plate fixing plate and a lower surface plate fixing plate that can be set coaxially and can rotate coaxially, and a lower surface of the upper surface plate fixing plate. And an annular upper surface plate attached to the upper surface of the lower surface plate fixing plate and an annular lower surface plate attached to the upper surface of the lower surface plate fixing plate, and inner peripheries of the upper surface plate and the lower surface plate A rotatable sun gear provided coaxially with the lower surface plate in a space to be formed, an inner peripheral gear surrounding the sun gear and the same axis, and the sun gear and the inner periphery installed on the lower surface plate A plurality of circular work holders each having an outer gear meshing with a gear on the outer periphery and each having a plurality of work mounting holes in the circumferential direction; a work pedestal and a product pedestal; Two heads that can move on the workpiece table and product table together with the upper surface plate A vacuum circuit that generates negative air pressure, a blow circuit that generates positive air pressure, a controller that selectively controls both circuits, and an upper surface plate that are applied to a surface finishing machine. It is characterized by comprising an air passage that can be opened in each of the work attachment holes of the work holder, and attachment / detachment means for attaching / detaching the vacuum circuit and the blow circuit to / from the air passage.
[0008]
The vacuum circuit includes a vacuum pump, a switching valve, a check valve, a drain separator, an air filter and an air pipe connecting them, and the blow circuit includes an air compressor, a switching valve, a check valve, It is characterized by comprising an air pipe connecting them. Further, the attaching / detaching means includes an upper joint block attached to the tip of the air pipe, a cylinder mechanism for moving the upper joint block, and a lower joint block attached to the upper surface plate fixing plate side.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, preferred embodiments of the present invention will be described with reference to FIGS. 1, 2, 3, and 4. FIG. 1 is a plan view of a two-head surface finishing machine incorporating the workpiece supply / discharge device of the present invention, FIG. 2 is a schematic diagram showing an upper surface plate, a vacuum circuit, and a blow circuit, and FIG. 3 is a diagram of a vacuum circuit and a blow circuit. FIG. FIG. 4 is a schematic view showing another embodiment.
[0010]
The basic structure of the two-head flat finishing machine of the present invention is the same as the structure of the conventional machine shown in FIGS. That is, as shown in FIG. 2, an annular upper surface plate (upper grindstone) 2 is attached to the lower end surface of the upper surface plate fixing plate 1, and an upper main shaft 3 is attached to the center of the upper surface on the opposite side. The upper spindle 3 is rotatably supported by the upper spindle stock 4 and is rotationally controlled by a servo motor 17 (FIG. 1) provided on the upper spindle stock 4. The lower surface plate fixing plate 5 is arranged below the upper surface plate fixing plate 1 so as to be coaxial with and face the lower surface plate fixing plate 1, and on the upper surface thereof, a lower surface plate (lower whetstone) having substantially the same size as the upper surface plate 2. ) 6 is attached, and the upper surface plate 2 and the lower surface plate 6 are coaxial and are arranged so as to face each other at a predetermined interval. A lower main shaft 7 is attached to the lower surface plate fixing plate 5, and the lower main shaft 7 is rotatably supported on the lower main shaft base 8 and is driven to rotate in a direction opposite to the upper main shaft 3 by a motor or the like, although not shown. The Accordingly, the upper surface plate 2 and the lower surface plate 6 rotate in opposite directions. For example, when the upper surface plate 2 rotates in the clockwise direction, the lower surface plate 6 rotates in the counterclockwise direction.
[0011]
As in the prior art, the sun gear 9 attached to the sun gear shaft 10 is disposed in the cylindrical space 60 in the inner peripheral portions of the upper surface plate 2 and the lower surface plate 6, and the external gear 12 formed on the outer periphery of the work holder 11. The external gear 12 of the work holder 11 is also meshed with the inner peripheral gear 21 attached to the machine body 15, and the sun gear 9 rotates, or the sun gear 9 and the inner peripheral gear 21 rotate at the same time. Thus, the work holder 11 performs planetary movement around the sun gear 9 at a predetermined rotational speed. A plurality of workpiece accommodation holes 13 are formed in the circumferential direction of the workpiece holder 11, and the workpiece W is accommodated therein. When each work holder 11 performs planetary motion, the workpiece W held by each work holder 11 also performs planetary motion together with the work holder 11.
[0012]
In the machine body 15, a column 16 stands vertically rearward (upward in FIG. 1) when viewed from the front, and the upper headstock 4 can move vertically with respect to the vertical surface of the column 16. Yes. A linear guide 20 is vertically provided between the column 16 and the upper spindle stock 4 so as to guide the movement of the upper spindle stock 4. A servo motor 18 is fixed to the column 16, and a known ball screw is provided vertically therewith, and is fitted to a nut provided on the headstock 4 to drive the servo motor 18 as is known. The headstock 4 is guided by the linear guide 20 and moves vertically up and down. As a result, the upper surface plate 2 descends or rises toward the lower surface plate 6 as indicated by the arrow A (FIG. 2), and the upper and lower surfaces of the work W are fixed while the work holder 11 performs a planetary motion as described above. The lower surface of the plate 2 and the upper surface of the lower surface plate 6 are pressed against each other and ground by these both surface plates.
[0013]
As described above, the work table 22 and the product table 23 are provided on the left and right sides of the machine body 15. In FIG. 1, the work table 22 is on the right side and the product table 23 is on the left side. As in the prior art, the column 16 can be turned 90 ° left and right as indicated by the arrow B by a servo motor 19 attached to the machine body 15 while supporting the upper headstock 4. The plate 1 and the upper surface plate 2 can turn 90 ° to the left and right. Each of the work table 22 and the product table 23 includes a work storage hole 24 and a product storage hole 25 similar to the work storage hole 13 of the work holder 11, and the work W and a product obtained by processing the work W are stored therein. It is like that. An operation panel 26 is attached to the machine body 15 and includes a start button and push buttons for setting various processing conditions.
[0014]
Next, an air circuit that sucks or blows the workpiece W will be described with reference to FIG. A donut-shaped manifold 30 is attached to the upper surface of the upper surface plate fixing plate 1 so as to surround the upper main shaft 3. The manifold 30 is similarly cut into a donut shape to form an air passage 31, and a lower joint block 32 is attached to one place on the upper surface thereof. The upper joint block 41 provided above is moved up and down as indicated by an arrow C by a cylinder mechanism 42 provided in the column 16 so that it can be connected to or disconnected from the lower joint block 32. . The upper joint block 41 is attached to an air pipe 40, and the air pipe 40 is connected to a vacuum circuit 45 and a blow circuit 46. Therefore, when the upper joint block 41 is coupled to the lower joint block 32, the vacuum circuit 45 and the blow circuit 46 are connected to the manifold 30 (air passage 31). Here, the upper joint block 41, the lower joint block 32, and the cylinder mechanism 42 constitute an attaching / detaching means for connecting one end of the air pipe 40 to the air passage 31 or disconnecting it from the air passage 31.
[0015]
One end of a pipe 34 is attached to the side surface of the manifold 30 via a joint 33, and the other end of the pipe 34 is connected to a joint 35 that is attached to be spaced apart in the upper surface circumferential direction of the upper surface plate fixing plate 1. Reference numeral 36 denotes an air passage formed in the upper surface plate fixing plate 1 in the vertical direction. One end is connected to the joint 35 and the other end is spaced apart in the circumferential direction on the lower surface of the upper surface plate fixing plate 1. It is connected to the formed air pocket 37. Reference numeral 38 denotes an air passage formed in the upper surface plate 2 in a vertical direction. One end of each air passage communicates with the air pocket 37 and the other end is opened so as to face the workpiece W. The number of the air passages 38 is the same as the number of the workpieces W, and the upper surface plate 2, the lower surface plate 6, and the sun gear 9 are rotationally controlled after the axial centers of the upper surface plate 2 and the lower surface plate 6 coincide with each other. Thus, the workpiece W can be positioned substantially at the center of the workpiece W accommodated in the workpiece accommodation hole 13 of the workpiece holder 11. Although this explanation has been made for a so-called three-way system in which the inner peripheral gear 21 is fixed to the machine body 15, the upper surface plate 2, the lower surface plate 6, and the sun gear 9 are also driven so that the inner peripheral gear 21 is also rotationally driven. Further, the present invention can be applied to a so-called 4-way system in which the inner peripheral gear 21 is rotated independently.
[0016]
Next, the vacuum circuit 45 and the blow circuit 46 will be described with reference to FIG. 47 is a vacuum pump, 48 is a pressure sensor for detecting the pressure of the vacuum pump 47, and 50 is a switching valve (3-port valve). An air pipe 49 has one end connected to the vacuum pump 47 and the other end connected to the T port of the switching valve 50. A check valve 51 that allows air to flow from the switching valve 50 toward the upper joint block 41 is provided in the part 40a of the air pipe 40 described above. A bypass air pipe 40b is provided in parallel with the partial air pipe 40a, and another check valve 52, an air filter 53 and a drain separator 54 are arranged in series thereon. The check valve 52 allows air to pass from the upper joint block 41 toward the switching valve 50, and the drain separator 54 collects the coolant adhering to the workpiece. Here, the air pipe 40, vacuum pump 47, pressure sensor 48, air pipe 49, switching valve 50, check valve 52, air filter 53 and drain separator 54 constitute a vacuum circuit 45.
[0017]
An air compressor 55 is connected from the air compressor 55 to the P port of the switching valve 50 through an air pipe 56. Here, the air pipes 40 and 56, the air compressor 55, the switching valve 50 and the check valve 51 constitute a blow circuit 46. 2 is a controller for controlling switching / operation of the vacuum circuit 45 and the blow circuit 46 described above.
[0018]
The operation of the present invention configured as described above will be described below.
[0019]
First, the servo motor 18 is driven to raise the upper surface plate 2 together with the upper headstock 4, and the column 16 is rotated 90 ° counterclockwise in FIG. 1 by the servo motor 19 to bring the upper surface plate 2 to the work table 22. Make it correspond. On the work table 22, there is a work accommodation hole 24 similar to the work accommodation hole 13 of the work holder 11, and since the work W is installed here, the air passage 38 corresponds to substantially the center of the work W. Become. The upper surface plate 2 is lowered and the upper surface plate 2 is brought into contact with the workpiece W. Here, the cylinder mechanism 42 is operated to connect the upper joint block 41 to the lower joint block 32. The switching valve 50 is switched from the state shown in FIG. 3 by the controller 58 to connect the T port and the A port, and the air pipe 40 is connected to the vacuum pump 47 through the air pipe 49.
[0020]
Next, the vacuum pump 47 is operated. The air in the air passage 38 passes through the air pipe 40 from the air pocket 37, the air passage 36, the joint 35, the pipe 34, the joint 33, the air passage 31 in the manifold 30, the lower joint block 32, and the upper joint block 41, respectively. Further, the vacuum pump 47 is pulled out through the switching valve 50 and the air pipe 49 through the bypass composed of the drain separator 54, the air filter 53 and the check valve 52. That is, the work W is attracted to the upper surface plate 2 by operating the vacuum circuit 45. Here, when the workpiece W is not attracted to the upper surface plate 2, the pressure of the pressure sensor 48 does not drop, so that it can be checked that the workpiece W is not attracted. When all the workpieces W are adsorbed, the upper surface plate 2 is lifted as it is, and the column 16 is turned 90 ° clockwise in FIG. 1 so that the upper surface plate 2 corresponds to the lower surface plate 6. That is, the workpiece W attracted to the upper surface plate 2 corresponds to the workpiece receiving hole 13 of the workpiece holder 11. The upper surface plate 2 is lowered and the work W adsorbed on the upper surface plate 2 is put into the work accommodation hole 13.
[0021]
Here, the operation of the vacuum pump 47 is stopped, and the switching valve 50 is switched to the state of FIG. 3 to which the ports P and A are connected. Next, by operating the air compressor 55, the air passes from the air pipe 56 to the air pipe 40 via the switching valve 50, and passes through the check valve 51 in the opposite manner to the above, the upper joint block 41, the lower joint block 32, the air The air enters the air passage 38 through the passage 31, the joint 33, the pipe 34, the joint 35, the air passage 36, and the air pocket 37, and the work W is reliably set in the work accommodation hole 13 of the work holder 11 by the force of air. When the workpiece W is set, the compressor 55 is stopped, the cylinder mechanism 42 is operated, and the upper joint block 41 is separated from the lower joint block 32 so that the upper surface plate 2 can freely rotate. Hereinafter, both surfaces of the workpiece W are ground by the upper surface plate 2 and the lower surface plate 6 as in the conventional case.
[0022]
When the grinding process is completed, the rotation of the upper surface plate 2, the lower surface plate 6 and the sun gear 9 is controlled to stop the rotation when each of the air passages 38 is positioned substantially at the center of the workpiece W. Next, as described above, the switching valve 50 is switched from the state shown in FIG. 3 to the state where the ports T and A are connected, and the workpiece (product) W that has been ground by operating the vacuum pump 47 is changed to the upper surface plate 2. Adsorb. Next, the upper headstock 4 is raised, and the column 16 is rotated 90 ° clockwise in FIG. 1 so that the upper surface plate 2 corresponds to the product table 23, and the adsorbed product W is placed in the product accommodation hole 25. Make it correspond. Here, similarly to the above, the switching valve 50 is switched to connect the ports P and A, the air compressor 55 is operated to operate the blow circuit 46, and the product W adsorbed on the upper surface plate 2 is moved to the product receiving hole. Put in 25.
[0023]
As described above, the workpiece W is supplied and discharged. In order to reliably supply and discharge the workpiece W, it is preferable to provide as many air pockets 37 as the number of workpiece holders 11 corresponding to the positions of the workpiece holders 11.
[0024]
Next, another embodiment shown in FIG. 4 will be described. In the drawings, the same components are denoted by the same reference numerals. In the embodiment shown in FIG. 4, the manifold 30 of the first embodiment is omitted, the air pipe 40 is branched into a large number above the upper surface plate fixing plate 1, and the upper joint block 41 at the tip of each air pipe 40 is moved upward. It corresponds to the lower joint block 32 provided on the surface plate fixing plate 1. The air passages 38 provided in the upper surface plate 2 corresponding to the number of workpieces W are coaxially passed through the upper surface plate fixing plate 1 and connected to the lower joint block 32. When the cylinder mechanism 42 is operated, the upper joint blocks 41 are connected to or disconnected from the lower joint blocks 32 together. In this embodiment, the air pocket 37 is eliminated, and an air circuit is formed corresponding to each work W, so that the air efficiency is further improved, and the work W is supplied and discharged reliably.
[0025]
【The invention's effect】
As described above, the workpiece supply / discharge device for a two-head surface finishing machine according to the present invention has a structure in which the upper surface plate itself sucks or blows the workpiece, so that it is not necessary to install a loading robot and an unloading robot. This eliminates the need for such a space, saves space, and eliminates the need to manufacture a device for installing the loading robot and the unloading robot, so that the cost of the entire system can be reduced. In addition, the upper surface plate itself turns while adsorbing the work and moves and discharges the work, and the upper surface plate itself turns while adsorbing the work from the work table and supplies the work to the work holder. Therefore, since the loading robot and the unloading robot are not moved to the workpiece as in the prior art, the cycle time can be shortened. Furthermore, since the upper surface plate itself has a function of loading and unloading workpieces, there is an effect that a line connected to the preceding and following processes that can be automatically supplied can be constructed at low cost.
[Brief description of the drawings]
FIG. 1 is a plan view of a two-head flat finishing machine incorporating a workpiece supply / discharge device of the present invention.
FIG. 2 is a schematic diagram showing a connection between an upper surface plate, a vacuum circuit, and a blow circuit.
FIG. 3 is a block diagram showing a vacuum circuit and a blow circuit.
FIG. 4 is a schematic diagram showing another connection between an upper surface plate, a vacuum circuit, and a blow circuit.
FIG. 5 is a schematic view showing a conventional two-head surface finishing machine.
FIG. 6 is a plan view showing a relationship between a work holder and a lower surface plate.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Upper surface plate fixing plate 2 Upper surface plate 3 Upper spindle 4 Upper spindle base 5 Lower surface plate fixing plate 6 Lower surface plate 7 Lower spindle 8 Lower spindle base 9 Sun gear 11 Work holder 13 Work accommodation hole 16 Column 17 Servo motor 18 Servo motor 19 Servo motor 22 Work place table 23 Product place 24 Work place hole 25 Product place hole 30 Manifold 31 Air passage 32 Lower joint block 36 Air passage 37 Air pocket 38 Air passage 40 Air pipe 41 Upper joint block 42 Cylinder mechanism 45 Vacuum circuit 46 Blow circuit 47 Vacuum pump 50 Switching valve 51, 52 Check valve 55 Air compressor 60 (Cylindrical) space W Workpiece

Claims (4)

An upper surface plate fixing plate and a lower surface plate fixing plate that can be set coaxially and can rotate coaxially, and an annular upper surface plate and a lower surface plate that are coaxially attached to the lower surface of the upper surface plate fixing plate Rotation provided coaxially with the lower surface plate in a space formed by an annular lower surface plate coaxially mounted on the upper surface of the plate fixing plate and the inner periphery of the upper surface plate and the lower surface plate A possible sun gear, an inner gear that surrounds the sun gear coaxially, and an outer gear that is installed on the lower surface plate and meshes with the sun gear and the inner gear on the outer circumference. It has a plurality of circular work holders having a plurality of work mounting holes, a work table and a product table, and the upper surface plate fixing plate can be moved together with the upper surface plate onto the work table and the product table. Applied to the two-head flat finishing machine,
A vacuum circuit for generating negative air pressure, a blow circuit for generating positive air pressure, a controller for selectively controlling both circuits, and the work mounting hole of the work holder provided in the upper surface plate A workpiece supply / discharge device for a two-head flat finishing machine comprising an air passage that can be opened to each of the above and an attachment / detachment means for attaching / detaching the vacuum circuit and the blow circuit to / from the air passage. The work supply / discharge device for a two-head flat finishing machine according to claim 1, wherein the vacuum circuit includes a vacuum pump, a switching valve, a check valve, a drain separator, an air filter, and an air pipe connecting them. The work supply / discharge device for a two-head flat finishing machine according to claim 1 or 2, wherein the blow circuit includes an air compressor, a switching valve, a check valve, and an air pipe connecting them. 4. The attachment / detachment means comprises an upper joint block attached to the tip of an air pipe, a cylinder mechanism for moving the upper joint block, and a lower joint block attached to the upper surface plate fixing plate side. The workpiece supply / discharge device for a two-head flat finishing machine according to claim 1.

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