JP3955558B2 - X-ray inspection equipment - Google Patents

Description

  The present invention relates to an X-ray inspection apparatus for inspecting the presence or absence of foreign matter in an inspection object from the amount of X-ray transmission when X-rays are exposed, and in particular, detection output from a sensitivity-corrected X-ray detector. The present invention relates to an X-ray inspection apparatus capable of performing a stable inspection without causing erroneous determination even if a deviation occurs in data.

  The X-ray inspection apparatus irradiates X-rays to inspection products of various varieties (for example, raw meat, fish, processed foods, medicines, etc.) that are sequentially transported at predetermined intervals on the transport path, and this exposed X-rays. This is an apparatus for inspecting whether or not foreign objects such as metal, glass, stones, and bones are mixed in the inspected object based on the permeation amount of the inspected object and a missing item of the inspected object.

In this type of X-ray inspection apparatus, as disclosed in, for example, Patent Document 1 below, an array of X-ray detectors that detect X-rays that pass through an object to be inspected upon exposure to X-rays. A line sensor is used. The X-ray detector 10 has a plurality of elements arranged in a straight line in a direction orthogonal to the transport direction on the plane of the transport direction of the object to be transported, as shown in FIG. A plurality of photodiodes 10a arranged in line with each other and a scintillator 10b provided on the line-shaped photodiode 10a are configured in an array.
JP 2002-168806 A

  By the way, conventionally, when an inspection object is inspected using the X-ray detector 10 formed of an array-shaped line sensor, each element of the X-ray detector 10 is inspected before the inspection is not carried. An appropriate correction value is set for the X-ray detector 10 so that the output level becomes a constant value, and the sensitivity of the output level of the X-ray detector 10 is corrected based on this correction value before inspection. It was.

  However, in the array-shaped X-ray detector 10 used in this type of X-ray inspection apparatus, the sensitivity of a single element varies depending on external factors such as temperature and humidity, and the output level varies depending on the element. .

  Further, if the above-described sensitivity correction is performed in a state where dust is attached to the light receiving surface of the X-ray detector 10, and then the inspection is performed in a state where the attached dust is removed, the output of the element in the portion where the dust is removed An error occurs in the level, and this part may affect foreign object detection and the like, leading to erroneous determination, resulting in a problem that stable inspection cannot be performed. Further, even if dust adheres to the light receiving surface of the X-ray detector 10 after the sensitivity correction, the same problem is caused.

  As described above, in the conventional X-ray inspection apparatus, even if the sensitivity of the X-ray detector 10 is corrected before the inspection and the output level of the detection data output from each element is corrected to a constant value, the temperature and humidity are thereafter changed. The detection data output from the X-ray detector 10 after the sensitivity correction may be shifted due to the difference in the output level of each element due to external factors such as adhesion of dust or the like to the light receiving surface.

  Then, when a deviation occurs in the detection data immediately after the sensitivity correction in which the output level of each element shown in FIG. 6A is corrected to a constant value, the level difference of the corrected detection data level changes the tone of the grayscale image. As it appears in the data. For example, when the output level of the element in which the detection data after the sensitivity correction is shifted is higher than the reference value, the gray image of that portion is displayed as a gray line (black portion in FIG. 6B). On the other hand, when the output level of the element in which the detection data after the sensitivity correction is shifted is lower than the reference value, the gray image of that portion is displayed as a white line (hatched portion in FIG. 6B). ). In addition, as described above, the portion where the detection data after the sensitivity correction has been shifted has an influence on the foreign object detection and the like, resulting in erroneous determination, resulting in a problem that stable and accurate inspection cannot be performed.

  Therefore, the present invention has been made in view of the above-described problems, and even if a deviation occurs in detection data output from the sensitivity-corrected X-ray detector, a stable inspection is performed without being affected by the deviation. An object of the present invention is to provide an X-ray inspection apparatus capable of performing the above.

In order to achieve the above object, an X-ray inspection apparatus according to claim 1 of the present invention includes an X-ray generator 9 that emits X-rays to an inspection object W transported on a transport path;
X-rays passing through the inspection object are detected by a plurality of elements arranged linearly in a direction Y orthogonal to the plane of the inspection object in the transport direction X, and the detected detection data is detected for each element. An X-ray detector 10 that sequentially outputs a plurality of elements as one line and repeats the sequential output as the inspection object is conveyed;
The X-ray detector is subjected to sensitivity correction so that the output level of each element of the X-ray detector becomes a constant value when the inspection object is not transported before inspection. In the X-ray inspection apparatus for inspecting the inspection object based on density data based on detection data detected by the element,
Wherein in a state where the object to be inspected is not conveyed, by using the density data by detecting data detected by said sensitivity corrected elements are sequentially output from the X-ray detector, and calculates the average value of the entire said density data a first average value calculating means 17a, and the second average value calculating means 17b for calculating an average value of the density data for each element corresponding to a single body element out of the concentration data, said first average value calculating means It has but a difference calculating means 17c for calculating the difference data obtained by subtracting the mean value calculated is the second average value calculating means from the calculated average value for each of the elements, and
Correcting means for correcting the displacement of the said detected data by pulling Kukoto pointing to the difference data of the corresponding element from the concentration data due to detection data detected by the sensitivity corrected elements are sequentially outputted from the pre-Symbol X-ray detector 17d.

The X-ray inspection apparatus according to claim 2 is the X-ray inspection apparatus according to claim 1,
It is characterized by comprising a discriminating means 19 for discriminating the presence / absence of a foreign substance in the contents in the contents area of the inspection object W of the density data corrected by the correcting means 17d.

The X-ray inspection apparatus according to claim 3 is the X-ray inspection apparatus according to claim 1,
It is characterized by comprising a discriminating means 19 for discriminating the presence / absence of a missing content in the content area of the inspection object W of the density data corrected by the correcting means 17d.

The X-ray inspection apparatus according to claim 4 is the X-ray inspection apparatus according to claim 1,
A seal part calculation unit that extracts an outer shape from the density data corrected by the correction unit 17d, and calculates a seal part region of the inspection object W based on preset seal part information on the basis of the extracted outer shape. 18 and
And a discriminating means 19 for discriminating whether or not there is a seal defect by comparing the gray level of the image of the seal portion area calculated by the seal portion calculating means with the gray level of the image of the contents of the inspection object. And

  According to the present invention, even if the detection data output from the X-ray detector whose sensitivity has been corrected before the inspection is deviated, the data of the X-ray detector immediately before the object to be inspected is grayed out. Correction of data that subtracts the influence value of white lines and white lines, and the detection data output from the sensitivity-corrected X-ray detector is always stable without affecting foreign object detection, missing part detection, seal defect detection, etc. It is possible to perform various accurate inspections.

  1 is a perspective view showing a schematic configuration of an X-ray inspection apparatus according to the present invention, FIG. 2 is a block diagram of the X-ray inspection apparatus according to the present invention, and FIG. 3 shows an object to be inspected in the X-ray inspection apparatus according to the present invention. FIGS. 4A and 4B are diagrams illustrating a temporal positional relationship with data used for data correction, and FIGS. 4A and 4B are explanatory diagrams regarding data correction of the X-ray inspection apparatus according to the present invention.

  The X-ray inspection apparatus 1 of the present example is provided in a part of the production line, and the presence or absence of foreign matter in the inspection object W that is sequentially conveyed at a predetermined interval, and the seal portion failure due to the biting of the contents. Various inspections such as presence / absence and absence / existence of contents are performed.

  In the X-ray inspection apparatus 1 shown in FIG. 1, a conveyance unit 2 and a foreign matter detection unit 3 are provided in the apparatus main body 4, and a display 5 is provided in the upper front portion of the apparatus main body 4.

  The transport unit 2 sequentially transports the same type of inspection object W on the transport path at predetermined intervals at a constant speed. This conveyance part 2 can be comprised with the belt conveyor arrange | positioned horizontally with respect to the apparatus main body 4, for example. The conveyance unit 2 directs the inspection object W carried in from the carry-in port 7 at a predetermined conveyance speed set in advance by driving of the drive motor 6 shown in FIG. 1 toward the carry-out port 8 side (carrying direction X in the drawing). Transport.

  The foreign matter detection unit 3 is used to detect the presence or absence of foreign matter, the presence or absence of a defective seal portion, the presence or absence of a missing part of the contents of the inspection object W being conveyed, An X-ray generator 9 provided at a predetermined height above and an X-ray detector 10 provided to face the X-ray generator 9 in the transport unit 2 are provided.

  The X-ray generator 9 has a configuration in which a cylindrical X-ray tube 12 provided in a metal box 11 is immersed in insulating oil (not shown), and an electron beam from the cathode of the X-ray tube 12 is an anode target. X-rays are generated by irradiation. The X-ray tube 12 is provided in a direction (Y direction) whose longitudinal direction is orthogonal to the conveyance direction X of the inspection object W. The X-rays generated by the X-ray tube 12 are exposed to the lower X-ray detector 10 in the form of a substantially triangular screen by a slit (not shown) along the longitudinal direction.

  The X-ray detector 10 detects and detects X-rays that pass through the inspection object W by a plurality of elements arranged linearly in a direction Y orthogonal to the plane of the inspection object W in the transport direction X. Concentration data is sequentially output as one line with a plurality of elements for each element, and the sequential output from one line is repeated as the object W is conveyed. As described in the prior art, the X-ray detector 10 has a plurality of elements straight in the Y direction perpendicular to the transport direction X on the plane of the transport direction X of the object W to be transported, as shown in FIG. It is arranged on the line. The plurality of elements includes a plurality of photodiodes 10a arranged in a line and a scintillator 10b provided on the line-shaped photodiode 10a.

  As shown in FIG. 2, position detection means 13 for detecting the passage of the inspection object W is provided on the carry-in entrance 7 side of the transport unit 2. This position detection means 13 is comprised by the photo sensor which consists of a pair of light projector / receiver provided in the entrance side of the belt conveyor as the conveyance part 2, for example. With this configuration, an ON signal is input from the position detection unit 13 to the signal processing unit 14 as a timing signal while the inspection object W passes in front of the photosensor.

  In the X-ray detector 10 having such a configuration, X-rays are exposed from the X-ray generator 9 to the inspection object W transported on the transport unit 2. Then, the X-rays transmitted through the inspection object W accompanying the X-ray exposure to the inspection object W are received by the scintillator 10b and converted into light. The light converted by the scintillator 10b is received by the photodiode 10a disposed below the scintillator 10b. Each photodiode 10a converts the received light into an electrical signal and outputs it. The X-ray detector 10 outputs an electric signal having a level corresponding to the intensity of the received X-ray to the signal processing means 14.

  In FIG. 2, the signal processing means 14 includes a CPU, a memory, and the like, and after a predetermined time using the ON signal when the position detection means 13 detects the inspection object W as a timing signal, the X-ray detector 10. Various signal processing is performed by taking in electrical signals from

  As shown in FIG. 2, the signal processing unit 14 includes a setting input unit 15, a storage unit (data memory) 16, a data correction processing unit 17, a seal portion calculation unit 18, and a determination unit 19.

  The setting input means 15 includes a plurality of keys and switches operated by the user for giving various settings and instructions regarding foreign matter inspection, seal defect inspection, shortage inspection and display of the inspection object W. More specifically, the setting input means 15 sets the conveyance speed of the conveyance unit 2, the detection limit value serving as a reference for determining the presence or absence of foreign matter in the inspection object W, and the seal portion of the inspection object W. A detection limit value is set as a reference for determining whether or not there is a seal failure. Further, the setting input means 15 can set a detection limit value serving as a reference for determining the presence or absence of foreign matter in the inspection object W and the presence or absence of a missing item when performing a plurality of inspections. It has become. These detection limit values are appropriately set according to the type of the inspection object W, the type of foreign matter to be detected, and the like.

  In addition to the above settings, the setting input means 15 appropriately inputs a numerical value for the width dimension of the seal portion of the inspection object W (for example, if the outer shape is rectangular, the dimension is directed inward from the four sides of the outer shape). Can do. Further, the setting input means 15 inputs the number of locations having the seal portion, or designates the type of the inspection object W, thereby specifying the width dimension of the seal portion corresponding to the type of the inspection object W stored in advance. Various information regarding the seal portion can be input such as setting.

  The storage means 16 stores X-ray transmission data for each inspection object W. This X-ray transmission data is obtained by A / D converting an electric signal from the X-ray detector 10 by an A / D converter (not shown). More specifically, every time one inspection object W is inspected, for example, 640 pieces of X-ray transmission data per line (Y direction) of the X-ray detector 10 are conveyed to the storage means 16 at least. A predetermined number of lines (for example, 480 lines) corresponding to the length of the inspection object W in the transport direction (corresponding to a detection period from the front end to the rear end) is stored.

  The data correction processing unit 17 includes a first average value calculating unit 17a, a second average value calculating unit 17b, a difference calculating unit 17c, and a correcting unit 17d. The data correction processing means 17 uses the detection signal from the position detection means 13 as a timing signal, and of the detection data from the X-ray detector 10 stored in the storage means 16, immediately before the inspection object W is conveyed. Data correction is performed using the detected data.

  The first average value calculating means 17a calculates the average value of the entire density data of a predetermined number of lines output from the X-ray detector 10. More specifically, as shown in FIG. 4 (a), from all the elements in the width direction of the X-ray detector 10 arranged in the Y direction orthogonal to the transport direction X on the plane in the transport direction X of the inspection object W. The average value I of the entire density data of a predetermined number of lines (N) to be output is calculated from the X-ray transmission data read from the storage means 16.

  The second average value calculating means 17b calculates an average value of density data corresponding to a single element from density data of a predetermined number of lines output from the X-ray detector 10 for each element. More specifically, as shown in FIG. 4B, density data for each element corresponding to a single element is selected from density data of a predetermined number of lines (N) output from each element of the X-ray detector 10. The average value Pi (i is the number of elements of the X-ray detector 10) is calculated from the X-ray transmission data read from the storage means 16. In the example of FIG. 4B, since the number of elements i of the X-ray detector 10 is 640, 640 average values Pi of P1, P2,..., P640 are calculated.

  The difference calculating unit 17c calculates difference data for each element by subtracting the average value calculated by the second average value calculating unit 17b from the average value calculated by the first average value calculating unit 17a. More specifically, the second average value calculating means 17b calculates from the average value I of the entire density data of the predetermined number of lines (N) output from the X-ray detector 10 calculated by the first average value calculating means 17a. The average value Pi of the density data for each element corresponding to the unit element is subtracted from the density data of a predetermined number of lines output from the X-ray detector 10 to obtain difference data Li ( i is the number of elements of the X-ray detector 10). For example, if the number of elements i of the X-ray detector 10 is i = 640, 640 differential data Li of L1, L2,..., L640 are calculated.

  The correcting unit 17d reads out the X-ray transmission data including the inspection object W from the storage unit 16 for each line, and subtracts the difference data Li of the element corresponding to the X-ray transmission data of each element for each read line to obtain X Data detected by the line detector 10 is corrected. The corrected detection data is output to the seal portion calculation means 18 as normal X-ray transmission data (shading data) regarding the inspection object W.

  The data correction processing means 17 reads out data from the X-ray detector 10 immediately before the inspection object W is conveyed from the storage means 16 using the detection signal from the position detection means 13 as a timing signal, and performs data correction. However, it is possible to use data of a portion where the inspection object W is not conveyed, that is, data between the inspection objects W which are sequentially conveyed. At that time, data correction is performed using the detection signal from the position detection means 13 as a timing signal.

  The seal portion calculation means 18 creates a whole grayscale image (overall image for each inspection object W including the belt surface of the transport section 2) from the X-ray transmission data corrected by the correction means 17d, and this created whole The gray image of the contents is extracted from the gray image.

  Moreover, the seal | sticker part calculation means 18 has extracted the outline area | region which shows an inner area from the outline of the to-be-inspected object W from the whole image by the X-ray transmission data corrected by the correction means 17d. More specifically, the seal portion calculation means 18 obtains the entire histogram from the X-ray transmission data corrected by the correction means 17d. Then, the data D1 of the inspection object W and the data D2 other than the inspection object W (actually the belt surface of the conveyance unit 2) are divided into binary values from the obtained entire histogram. For example, the data D1 of the inspection object is set to 255, and the data D2 other than the inspection object is set to 0. Then, the binarized inspection object data D1 is extracted as an outer region.

  Further, the seal portion calculation means 18 calculates a seal portion region from the extracted outer region. When information on the seal portion, for example, a numerical value of the width dimension of the seal portion is input from the setting input unit 15 to the seal portion region, the image of the extracted outer region is reduced by the set width size. Then, the reduced image is subtracted from the image of the outer region to calculate the seal portion region.

  The discriminating means 19 includes a foreign matter discriminating means 19a, a seal portion defect discriminating means 19b, and a missing part discriminating means 19c. ), A selection signal for selecting the inspection object W as a non-defective product or a defective product is output to the outside.

  The foreign matter discriminating means 19a judges the portion of the content area of the inspection object W corrected by the correcting means 17d as a foreign matter in the content area where the contrast level is different from the others. That is, when a portion having a higher light and dark level than the other portion exists in the content area, the portion having the higher light and dark level is determined as a foreign object. More specifically, the foreign matter discrimination means 19a uses the density level of the X-ray transmission data of the contents area of the inspection object W corrected by the correction means 17d and the foreign matter detection limit value preset by the setting input means 15. In comparison, when the X-ray transmission data exceeds the foreign matter detection limit value, it is determined that foreign matter is mixed in the inspection object W, and a selection signal indicating the presence of foreign matter is output. The foreign object detection limit value can be set from the setting input unit 15 as appropriate for each inspection object W according to the contents.

  The seal portion failure determination means 19b determines the presence or absence of a seal failure by comparing the shade level of the image of the seal portion area calculated by the seal portion calculation means 18 with the shade level of the image of the contents of the inspection object W, From this discrimination result, a selection signal indicating normal seal or poor seal is output. That is, in this seal portion defect determination means 19b, when there is a light / dark level equal to or higher than the light / dark level of the image of the contents of the test object W in the seal region, the test object W has a seal failure. And a sorting signal indicating a sealing failure is output. It should be noted that the detection limit value of the defective seal portion can be appropriately set from the setting input means 15 for each inspection object W according to the contents.

  The missing item discriminating means 19c is packaged when the density level is lower than a preset missing item detection limit value (the X-ray transmission amount is large) in the contents area of the inspection object W corrected by the correcting means 17d. For example, it is determined that the number of poultices in the material is low, and a selection signal indicating that there is a shortage is output. In addition, the shortage determination means 20c uses a preset shortage detection mask area, and according to the area where the density level equivalent to the content exists for each content area of the shortage detection mask area. The presence or absence of contents is determined. It should be noted that the shortage detection limit value and the shortage detection mask area can be set and input from the setting input unit 15 as appropriate for each inspection object W according to the contents.

  Although not shown in the drawings, the signal processing means 14 includes a filter means, and when the contents are accommodated in the extremely thin packaging material such as a poultice, for example, as the inspection object W, correction is performed by the correction means 17d. A predetermined filtering process is applied to the X-ray transmission data of the inspected object W. In this filter processing, for example, a feature extraction filter such as a differential filter (Roberts filter, Prewitt filter, Sobel filter) or a Laplacian filter is used. This enhances the entire image to facilitate edge detection, and further enhances and facilitates extraction of foreign object information and biting information to be detected. Therefore, the foreign matter determination means 19a is not limited to the comparison between the level of the grayscale image and the foreign matter detection limit value, and the foreign matter is compared with the set foreign matter detection limit value for the image in which the foreign matter information after the filter processing is emphasized. The presence or absence of may be judged. Further, the seal portion failure determination means 19b may determine a seal failure based on the presence or absence of an edge component in the seal portion region after the filtering process.

  On the display screen of the display 5, the inspection object W is displayed on the basis of the entire image of the inspection object W extracted by the seal portion calculation means 18, the image of the outline area, the image of the seal area, and the determination result of the determination means 19. X-ray transmission image in plan view, “OK” or “NG” pass / fail judgment result, inspection results such as total number of inspections, number of non-defective products, total number of NG, etc. are displayed based on predetermined key operations from the setting input means 15. .

  When data correction is performed by the X-ray inspection apparatus 1 having the above-described configuration, the data correction processing unit 17 performs processing described below. The processing operation of the data correction unit 17 will be described below with reference to FIGS.

  In this example, as shown in FIG. 3, from the X-ray detector 10 immediately before the inspection object W reaches the X-ray exposure position after a predetermined time since the position detection means 13 detects the inspection object W. The data correction is performed by subtracting the influence values of the gray and white lines using the detection data of the predetermined number of lines (hatched portion in FIG. 3).

  When performing data correction, first, a predetermined number (N) of lines output from the X-ray detectors 10 arranged in the Y direction orthogonal to the transport direction X on the plane of the test object W in the transport direction X. An average value I of the entire density data is calculated. The average value I of the entire density data of the predetermined number of lines (N) is calculated by the first average value calculation means 17a reading out the X-ray transmission data from the storage means 16.

  Next, an average value Pi of density data for each element corresponding to a single element from density data of a predetermined number of lines (N) output from the X-ray detector 10 (i is the number of elements of the X-ray detector 10). Is calculated. The average value Pi of the density data for each element corresponding to this single element is calculated by the second average value calculation means 17b reading out the X-ray transmission data from the storage means 16. As shown in FIG. 4B, when the number of elements i of the X-ray detector 10 is 640, 640 average values Pi of P1, P2,..., P640 are calculated.

  Next, the difference calculating unit 17c is configured so that the second average value calculating unit 17b calculates from the average value I of the entire density data of the predetermined number of lines (N) of the X-ray detector 10 calculated by the first average value calculating unit 17a. The difference value Li for each element of the X-ray detector 10 (i is the number of elements of the X-ray detector 10) is subtracted from the calculated average value Pi of the density data for each element corresponding to the single element of the X-ray detector 10. ) Is calculated. As shown in FIGS. 4A and 4B, if the number of elements i of the X-ray detector 10 is 640, 640 differential data Li of L1, L2,..., L640 are calculated.

  Then, the correcting unit 17d reads out the X-ray transmission data including the inspection object W from the storage unit 16, and subtracts the difference data Li of the element corresponding to the X-ray transmission data of each element for each read line to obtain the X-ray. Data detected by the detector 10 is corrected. Thereby, X-ray transmission data from which an influence value that generates a gray or white line due to a shift in detection data output from a sensitivity-corrected X-ray detector is subtracted can be obtained. The corrected detection data (X-ray transmission data including the inspection object W) is output as normal X-ray transmission data to the seal portion calculation means 18 and the determination means 19. Thereafter, the discriminating means 19 discriminates pass / fail of the inspected object based on the seal portion area calculated by the seal portion calculating means 18 and the corrected detection data, and outputs a selection signal corresponding to the discrimination to the outside.

  As described above, in the X-ray inspection apparatus 1 of the present example, even if the detection data output from the X-ray detector 10 whose sensitivity has been corrected before the inspection is deviated, the inspection object W that is sequentially transported is detected. Since data correction for erasing gray and white lines is performed before X-rays are exposed to the inspection object W using the data of the X-ray detector 10, detection output from the X-ray detector whose sensitivity has been corrected is performed. The influence value due to the data shift is removed, and no gray or white line is displayed on the X-ray transmission image (image data) including the inspection object W, and it is output from the sensitivity-corrected X-ray detector. Detection data shift does not affect foreign object detection, missing part detection, seal defect detection, etc., and always stable and accurate inspections (existence of foreign matter contamination, inspection for presence of missing parts, inspection for defective seals) )It can be performed.

It is a perspective view which shows schematic structure of the X-ray inspection apparatus which concerns on this invention. 1 is a block diagram of an X-ray inspection apparatus according to the present invention. It is a figure which shows the relationship between the to-be-inspected object in the X-ray inspection apparatus which concerns on this invention, and the data used for the sensitivity correction of an X-ray detector. (A), (b) It is explanatory drawing regarding the data correction of the X-ray inspection apparatus which concerns on this invention. It is a figure which shows schematic structure of the X-ray detector employ | adopted as an X-ray inspection apparatus. (A) It is a figure which shows the data immediately after correct | amending the detection data output from the X-ray detector of an X-ray inspection apparatus. (B) It is a figure which shows data when a shift | offset | difference arises in the detection data output from the X-ray detector by which the sensitivity correction | amendment was carried out.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 X-ray inspection apparatus 10 X-ray detector 13 Position detection means 14 Signal processing means 16 Storage means 17 Data correction processing means 17a 1st average value calculation means 17b 2nd average value calculation means 17c Difference calculation means 17d Correction means 18 Sealing part calculating means 19 Discriminating means W Inspection object

Claims (4)

An X-ray generator (9) that emits X-rays to the object to be inspected (W) transported on the transport path;
X-rays passing through the inspection object are detected by a plurality of elements arranged linearly in a direction (Y) perpendicular to the plane of conveyance of the inspection object (X), and the detected detection data is obtained. An X-ray detector (10) that sequentially outputs the number of the plurality of elements as one line for each element and repeats the sequential output as the inspection object is conveyed;
The X-ray detector is subjected to sensitivity correction so that the output level of each element of the X-ray detector becomes a constant value when the inspection object is not transported before inspection. In the X-ray inspection apparatus for inspecting the inspection object based on density data based on detection data detected by the element,
Wherein in a state where the object to be inspected is not conveyed, by using the density data by detecting data detected by said sensitivity corrected elements are sequentially output from the X-ray detector, and calculates the average value of the entire said density data a first average value calculating means (17a), and the second average value calculating means for calculating an average value of the density data for each element corresponding to a single body element out of the concentration data (17b), said first Difference calculation means (17c) for calculating, for each element, difference data obtained by subtracting the average value calculated by the second average value calculation means from the average value calculated by the average value calculation means ;
Correcting means for correcting the displacement of the said detected data by pulling Kukoto pointing to the difference data of the corresponding element from the concentration data due to detection data detected by the sensitivity corrected elements are sequentially outputted from the pre-Symbol X-ray detector (17d). An X-ray inspection apparatus comprising: The discriminating means (19) for discriminating the presence or absence of foreign substances in the contents in the contents area of the inspection object (W) of the density data corrected by the correcting means (17d). The X-ray inspection apparatus according to 1. A determination means (19) for determining the presence or absence of a content shortage in the content area of the inspection object (W) of the density data corrected by the correction means (17d). Item 1. The X-ray inspection apparatus according to Item 1. An outer shape is extracted from the density data corrected by the correction means (17d), and a seal portion area of the object to be inspected (W) is calculated based on preset seal portion information with the extracted outer shape as a reference. Seal part calculating means (18);
And a discriminating means (19) for discriminating whether or not there is a seal defect by comparing the gray level of the image of the seal portion area calculated by the seal portion calculating means with the gray level of the image of the contents of the inspection object. The X-ray inspection apparatus according to claim 1.

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