JP3955028B2 - Waveguide / conductive structure - Google Patents

Waveguide / conductive structure Download PDF

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JP3955028B2
JP3955028B2 JP2004058117A JP2004058117A JP3955028B2 JP 3955028 B2 JP3955028 B2 JP 3955028B2 JP 2004058117 A JP2004058117 A JP 2004058117A JP 2004058117 A JP2004058117 A JP 2004058117A JP 3955028 B2 JP3955028 B2 JP 3955028B2
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waveguide
substrate
plating
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conductive
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JP2005252486A (en
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哲男 湯本
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Sankyo Kasei Co Ltd
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本発明は、電波導波管、空洞共振器などの導波構造物、電気導電回路などの導電構造物、又は導波機能と導電機能が混在する構造物(コンポネント)(以下、これを総称して「導波・導電構造物」という。)に関する。   The present invention relates to a waveguide structure such as a radio wave waveguide and a cavity resonator, a conductive structure such as an electric conductive circuit, or a structure (component) in which a waveguide function and a conductive function are mixed (hereinafter collectively referred to as “component”). (Referred to as “waveguide / conductive structure”).

従来から電波導波管は金属パイプを複雑に屈成加工して製作しているが、精密な加工が困難であるため、最近の従来例では金属板に溝状の導波路を穿設加工し、この金属板に蓋を載せてボルトで締結して導波管を形成するもの、他の従来例では熱可塑性合成樹脂板に溝状の導波路を射出成形し、この樹脂板に蓋を載せてボルトで締結して導波管を形成するもの
が提案されている。 しかし、この金属板に導波路の溝を穿設加工し、この金属板に蓋を載せてボルトで締結して導波管を成形するものは、ボルトにより接合される金属板と蓋との接合面が精密に研磨加工されていることが必要で、もし隙間があれば電波の漏洩が生じ特性がでない問題がある。さらに、締結時のボルトトルクが均等でなければ、やはり電波の漏洩の問題が生じるため微調整が要求される。 熱可塑性合成樹脂板に溝状の導波路を射出成形し、この樹脂板に蓋を載せてボルトで締結して導波管を成形する従来例も、締結時のボルトトルクが均等でなければ、やはり電波の漏洩の問題が生じるため微調整が必要であり、さらに、溝状の導波路、導波管は複雑にかつ幾重にも蛇行した形状であるため、この導波路を形成する管部分の型中子が抜けないのが殆どで、そのため多くの場合は実用化されていない。 三菱電機株式会社の技術資料「樹脂導波管コンポーネント」 2002年7月、電子情報通信学会で「金属メッキした樹脂射出成形導波管フィルタ」と題する論文
Conventionally, radio wave waveguides have been manufactured by complicated bending of metal pipes, but since precise processing is difficult, in recent conventional examples, a grooved waveguide is drilled in a metal plate. A waveguide is formed by placing a lid on this metal plate and fastening with a bolt. In other conventional examples, a groove-shaped waveguide is injection molded on a thermoplastic synthetic resin plate, and the lid is placed on this resin plate. To form a waveguide by fastening with bolts
Has been proposed. However, a waveguide groove is formed by drilling a waveguide groove in this metal plate, placing a lid on the metal plate and fastening with a bolt, and joining the metal plate to the lid and the lid. The surface needs to be polished precisely, and if there is a gap, there is a problem that radio waves leak and the characteristics are not good. Furthermore, if the bolt torque at the time of fastening is not uniform, there will still be a problem of leakage of radio waves, and fine adjustment is required. In the conventional example in which a groove-shaped waveguide is injection-molded on a thermoplastic synthetic resin plate, a lid is placed on the resin plate, and a waveguide is formed by fastening with a bolt, the bolt torque at the time of fastening is not uniform, Since the problem of leakage of radio waves still occurs, fine adjustment is necessary. Furthermore, since the groove-shaped waveguide and waveguide are complicated and multiple meandering shapes, the tube portion forming this waveguide is In most cases, the mold core does not come off, so in many cases it has not been put to practical use. Mitsubishi Electric Corporation's Technical Document “Resin Waveguide Components” Paper titled “Metal-plated Resin Injection Molded Waveguide Filter” at the Institute of Electronics, Information and Communication Engineers in July 2002

そこで、本発明が解決しようとする問題点は、合成樹脂の一体成形では型中子が抜けないような複雑な形状のものであっても容易に成形することができ、その構造物は小型化し、且つ完全シームレス化することができ、電波の漏洩がなく高性能化した導波・導電構造物を容易に且つ精密に成形することにある。   Therefore, the problem to be solved by the present invention is that even if the mold core has a complicated shape that does not come off in the synthetic resin integral molding, it can be easily molded, and the structure is downsized. In addition, it is possible to easily and precisely form a waveguide / conductive structure that can be completely seamless and that has no leakage of radio waves and has high performance.

本発明に係る導波構造物の第1の特徴は、第1基体(1)と第2基体(2)とからなり、上記両基体は、熱可塑性合成樹脂を素材とするもので、上記両基体の少なくともいずれか一方(2)には溝状の導波路が形成してあり、他方の基体を溶着させることによりシームレス化した導波管(21)(22)が形成してあり、上記導波管の内周面にはめっき(210)(220)が施してあるところにある。
この導波構造物の第2の特徴は、上記導波管(21)(22)は複数であり、この導波管の間にダミーの導波管(23)が設けてあるところにある。
この導波構造物の第3の特徴は、上記両基体の一方(1)は光透過性のよい色調であり、他方(2)は光吸収性のよい色調であり、この光透過性のよい基体側からレーザー光(a)を照射することにより上記両基体を溶着してあるところにある。
この導波構造物の第4の特徴は、上記めっき(210)(220)(230)は二重層であるところにある。
A first feature of the waveguide structure according to the present invention includes a first substrate (1) and a second substrate (2), both of which are made of a thermoplastic synthetic resin. A groove-shaped waveguide is formed on at least one of the substrates (2), and a waveguide (21) (22) made seamless by welding the other substrate is formed. The inner peripheral surface of the wave tube is plated (210) (220).
The second feature of the waveguide structure is that a plurality of the waveguides (21) and (22) are provided, and a dummy waveguide (23) is provided between the waveguides.
The third feature of the waveguide structure is that one of the two substrates (1) has a color tone with good light transmission, and the other (2) has a color tone with good light absorption. The two substrates are welded by irradiating laser beam (a) from the substrate side.
The fourth feature of this waveguide structure is that the plating (210) (220) (230) is a double layer.

本発明に係る導電構造物の第5の特徴は、第1基体(3)と第2基体(4)とからなり、上記両基体は、熱可塑性合成樹脂を素材とするもので、上記第1基体(3)にはスルーホール(31)(32)が形成してあり、上記両基体の少なくともいずれか一方(4)には溝状の導電路が形成してあり、他方(3)の基体を溶着させることによりシームレス化した導電管(41)(42)(43)が形成してあり、上記スルーホールは上記導電管に連通しており、上記スルーホール及び上記導電管の内周面にはめっき(310)(320)(410)(420)(430)が施してあり、このスルーホールと上記導電管のめっきは電気的に導通しているところにある。
導電構造物の第6の特徴は、第1基体には、上記スルーホール(31)(32)に導通している所定の回路パターン(310)(320)が形成してあるところにある。
導電構造物の第7の特徴は、第2基体の外周面に所定の回路パターンが形成してあるところにある。
上記導電構造物の第8の特徴は、上記両基体の一方(3)光透過性のよい色調であり、他方の基体(4)は光吸収性のよい色調であり、この光透過性のよい基体側からレーザー光(a)することにより上記両基体を溶着してあるところにある。
A fifth feature of the conductive structure according to the present invention includes a first substrate (3) and a second substrate (4), and both the substrates are made of a thermoplastic synthetic resin. The substrate (3) has through holes (31) and (32), and at least one of the two substrates (4) has a groove-shaped conductive path, and the other (3) substrate. Conductive tubes (41), (42), and (43) are formed by welding, and the through holes communicate with the conductive tubes, and the through holes and the inner peripheral surface of the conductive tubes are formed. Is plated (310) (320) (410) (420) (430), and the plating of the through hole and the conductive tube is in electrical conduction.
A sixth feature of the conductive structure is that predetermined circuit patterns (310) and (320) that are electrically connected to the through holes (31) and (32) are formed on the first base.
A seventh feature of the conductive structure is that a predetermined circuit pattern is formed on the outer peripheral surface of the second base.
The eighth feature of the conductive structure is that one of the substrates (3) has a color tone with good light transmission, and the other substrate (4) has a color tone with good light absorption, and this light transmission property is good. The two substrates are welded by laser light (a) from the substrate side.

本発明の係る導波導電構造物の第9の特徴は、第1基体(3)と第2基体(5)とからなり、上記両基体は、熱可塑性合成樹脂を素材とするもので、上記第1基体(3)にはスルーホール(31)(32)が形成してあり、上記両基体の少なくともいずれか一方(5)には溝状の導電路が形成してあり、他方(3)の基体を溶着させることによりシームレス化した導電管(51)(52)が形成してあり、上記スルーホールは上記導電管に連通しており、上記両基体の少なくともいずれか一方(5)には溝状の導波路が形成してあり、他方の基体を接合させることにより導波管(53)が形成してあり、上記導波管にはめっき(530)が施してあり、上記スルーホール(31)(32)と上記導電管(51)(52)の内周面には、それぞれめっき(310)(320)(510)(520)が施してあり、上記スルーホールのめっき(310)(320)と上記導電管のめっき(510)(520)とは電気的に導通しているところにある。
上記導波導電構造物の第10の特徴は、上記両基体の一方(3)は光透過性のよい色調であり、他方(5)は光吸収性のよい色調であり、この光透過性のよい基体側からレーザー光を照射することにより上記両基体を溶着してあるところにある。
A ninth feature of the waveguide conductive structure according to the present invention includes a first substrate (3) and a second substrate (5). Both the substrates are made of a thermoplastic synthetic resin. The first substrate (3) has through holes (31) and (32), and at least one of the two substrates (5) has a groove-like conductive path, and the other (3) Conductive tubes (51) and (52) that are made seamless by welding the bases of the above are formed, the through holes communicate with the conductive tubes, and at least one of the two bases (5) A groove-shaped waveguide is formed, and a waveguide (53) is formed by bonding the other substrate, and the waveguide is plated (530), and the through hole ( (31) (32) and the inner peripheral surface of the conductive tube (51) (52) are plated (310) (320) (510) (520), respectively, the plating of the through hole (310) ( 320) and the above conductive tube The plating (510) (520) is in place which is electrically conductive.
The tenth feature of the waveguide conductive structure is that one of the substrates (3) has a color tone with good light transmission and the other (5) has a color tone with good light absorption. The two substrates are welded by irradiating a laser beam from a good substrate side.

以上の構成を有する本発明に係る導波・導電構造物は複雑な形状の成形が可能であり、軽量小型化しており、従来例のようにねじ止めなどの微調整が不要になるためコトスダウンに有効であり、シームレス化した導波間からは電波の漏洩がなく高性能化したものである。   The waveguide / conductive structure according to the present invention having the above-described configuration can be molded in a complicated shape, is lighter and smaller, and does not require fine adjustment such as screwing as in the conventional example. It is effective, and there is no leakage of radio waves between the seamless waveguides, and the performance is improved.

以下、図面を参照して電波を導く導波構造物、電流を流す導電構造物、電波と導電の両者が混在する構造物のそれぞれの実施の形態について説明する。   Hereinafter, embodiments of a waveguide structure that guides radio waves, a conductive structure that conducts current, and a structure in which both radio waves and conductivity are mixed will be described with reference to the drawings.

本発明の実施の形態1を図1〜8を参照して説明すると、この実施の形態は導波構造物に関するもので、その構造は図1、図2に示す板状の第1基体1と図3、図4に示すように、第1基体1と同一平面形状であるがそれより厚板の第2基体2との2部材からなり、この両基体は、相互に相溶性のある品質の熱可塑性合成樹脂、望ましくは同一素材の合成樹脂、例えば全芳香族系ポリエステル液晶ポリマーを素材とするもので、この素材を射出成形することにより成形されたものである。そして、この両基体の一方の第1基体1は光透過性のよい色調、望ましくは透明の材質であり、他方の第2基体は光吸収性のよい色調、例えば黒色である。この液晶ポリマーとしては、例えば、「ベクトラ」(ポリプラスチックス株式会社の商品名)の「めっきグレードC810」がある。   A first embodiment of the present invention will be described with reference to FIGS. 1 to 8. This embodiment relates to a waveguide structure, and the structure thereof is the same as that of the plate-like first substrate 1 shown in FIGS. As shown in FIG. 3 and FIG. 4, the first substrate 1 has the same planar shape as the first substrate 1 but is composed of two members, the second substrate 2 which is thicker than the first substrate 1, and both the substrates have a quality compatible with each other. A thermoplastic synthetic resin, preferably a synthetic resin of the same material, such as a wholly aromatic polyester liquid crystal polymer, is formed by injection molding of this material. One of the first substrates 1 has a color tone with good light transmission, preferably a transparent material, and the other second substrate has a color tone with good light absorption, for example, black. As this liquid crystal polymer, for example, “Vectra” (trade name of Polyplastics Co., Ltd.) “plating grade C810” is available.

第2基体2には、複数、図面では2つの導波管21,22を構成する溝状の導波路が一体的に射出形成してあり、この両導波路の間にはダミーの導波管23を構成するための溝状の導波路が一体形成してあり、図5,6に示すようにこの第2基体2は第1基体1と接合させ溶着させることによりシームレス化した導波管21〜23を構成する。勿論、導波路21,22、ダミーの導波路23を第1基体1に形成したもの、両基体のそれぞれに導波路21,22、ダミーの導波路23を形成したものでもよい。いずれにしても、両基体1,2の少なくともいずれか一方には導波管を構成するための溝状の導波路が形成してあり、他方の基体を溶着させることにより一体化し完全なシームレス化した導波管が形成されるものであればよい。   In the second base 2, a plurality of, in the drawing, groove-shaped waveguides constituting two waveguides 21 and 22 are integrally formed, and a dummy waveguide is interposed between the two waveguides. A groove-shaped waveguide for forming the structure 23 is integrally formed. As shown in FIGS. 5 and 6, the second base 2 is joined to the first base 1 and welded to make the waveguide 21 seamless. To 23. Of course, the waveguides 21 and 22 and the dummy waveguide 23 may be formed on the first base 1, or the waveguides 21 and 22 and the dummy waveguide 23 may be formed on both bases, respectively. In any case, at least one of the substrates 1 and 2 is formed with a groove-shaped waveguide for forming a waveguide, and the other substrate is integrated to be integrated and completely seamless. Any waveguide can be used as long as the waveguide is formed.

次に、第1基体1と第2基体2とを接合させ、さらに両者を溶着させて一体化する工程について説明すると、図5、図6の示すように第1基体1と第2基体2とを接合させる。そこで、図示していないが耐熱透明ガラスの押え治具で第1基体1を押圧する。この押え治具の上方からレーザー光aを照射するが、この時のレーザー光は波長が940nm、出力60Wのもので、照射スピードは1〜2mm/sec程度でよい。このレーザー光aは押え治具と第1基体1とを貫通し、第2基体2の接合端面に吸収される。この時、第2基体2の色調が光吸収力のよい黒色であるので、このレーザー光aの吸収が効率的に行われる。レーザー光aのエネルギーは熱に変換されて、第1、第2の基体1,2の接合面を溶着させ、そのままの状態で第1基体1と第2基体2とをクランプしておくと、この熱は第2基体2から透過部材の第1基体1に伝わり、この両基体の接合面が溶着されて一体化する。これが一次成形品である。   Next, the process of joining the first base 1 and the second base 2 together and further welding and integrating them will be described. As shown in FIGS. 5 and 6, the first base 1 and the second base 2 Are joined. Therefore, although not shown, the first substrate 1 is pressed by a heat-resistant transparent glass pressing jig. The laser beam a is irradiated from above the holding jig. The laser beam at this time has a wavelength of 940 nm and an output of 60 W, and the irradiation speed may be about 1 to 2 mm / sec. The laser beam a penetrates the holding jig and the first base 1 and is absorbed by the joining end face of the second base 2. At this time, since the color tone of the second substrate 2 is black with good light absorption, the laser light a is efficiently absorbed. The energy of the laser beam a is converted into heat, the bonding surfaces of the first and second substrates 1 and 2 are welded, and the first substrate 1 and the second substrate 2 are clamped as they are, This heat is transmitted from the second base 2 to the first base 1 of the transmissive member, and the joint surfaces of both bases are welded and integrated. This is the primary molded product.

そこで、図7、図8に示すように導波管21,22,23の内周面にめっき210,220,230を施こすが、このめっき工程は、先ず図5、図6に示す溶着した第1基体1と第2基体2(一次成形品)の外周面と導波管21,22,23の内周面を粗面化することが必要である。この粗面化、つまりエッチング処理方法として、カ性ソーダまたはカ性カリを所定濃度、例えば45wt%に溶解したアルカリ性水溶液を所定温度、例えば50〜90℃に加熱し、第1基体1と第2基体2を所定時間、例えば30分浸漬する。このエッチングによって第1基体1と第2基体2の外周面と導波管21,22,23の内周面は粗面化する。   Therefore, as shown in FIGS. 7 and 8, plating 210, 220, and 230 are applied to the inner peripheral surfaces of the waveguides 21, 22, and 23. In this plating process, first, welding shown in FIGS. 5 and 6 is performed. It is necessary to roughen the outer peripheral surfaces of the first base 1 and the second base 2 (primary molded product) and the inner peripheral surfaces of the waveguides 21, 22 and 23. As a roughening, that is, etching method, an alkaline aqueous solution in which caustic soda or caustic potash is dissolved at a predetermined concentration, for example, 45 wt%, is heated to a predetermined temperature, for example, 50 to 90 ° C. The substrate 2 is immersed for a predetermined time, for example, 30 minutes. By this etching, the outer peripheral surfaces of the first base 1 and the second base 2 and the inner peripheral surfaces of the waveguides 21, 22 and 23 are roughened.

これを、図示していないが、通常の上下の金型の対向面には、一体化している第1基体1と第2基体2からなる一次成形品の外周に所定の空隙を有する形状に合致する形状のキャビティが形成されており、このキャビティ内に一次成形品を入れて金型を閉じ、この状態で、このキャビティ内にオキシアルキレン基含有ポリビニルアルコール系樹脂を射出して一次成形品の非めっき面である外周面を被覆する。これが二次成形品である。この被覆剤であるオキシアルキレン基含有ポリビニルアルコール系樹脂として、例えば「エコマティAX」(日本合成化学工業株式会社の商品名)がある。射出成形条件としては、この「エコマティAX」をシリンダー温度220℃で、金型温度80℃、射出圧力900kg/cm2、冷却時間30秒である。   Although not shown in the figure, the opposing surfaces of the normal upper and lower molds conform to a shape having a predetermined gap on the outer periphery of the primary molded product made up of the integrated first base 1 and second base 2. A cavity having a shape to be formed is formed, a primary molded product is placed in the cavity, the mold is closed, and in this state, an oxyalkylene group-containing polyvinyl alcohol resin is injected into the cavity to remove the primary molded product. The outer peripheral surface which is a plating surface is covered. This is a secondary molded product. As an oxyalkylene group-containing polyvinyl alcohol resin which is this coating agent, for example, “Ecomati AX” (trade name of Nippon Synthetic Chemical Industry Co., Ltd.) is available. As the injection molding conditions, this "Ekomatei AX" has a cylinder temperature of 220 ° C, a mold temperature of 80 ° C, an injection pressure of 900 kg / cm2, and a cooling time of 30 seconds.

次に粗面化しているめっき面は露出しているので、この粗面にパラジウム、金などによる触媒を附与する。この触媒方法は公知のものであるが、例えば錫、パラジウム系の混合触媒液に溶着している第1基体1と第2基体2を浸漬した後、塩酸、硫酸などの酸で活性化し、表面にパラジウムを析出させる。この混合触媒液の温度は15〜23℃で5分間浸漬する。このようにして、めっき面には触媒が附与された状態になる。   Next, since the roughened plating surface is exposed, a catalyst such as palladium or gold is applied to the rough surface. This catalyst method is a known method. For example, the first substrate 1 and the second substrate 2 that are welded to a mixed catalyst solution of tin and palladium are immersed in the catalyst, and then activated with an acid such as hydrochloric acid or sulfuric acid, To deposit palladium. The mixed catalyst solution is immersed at 15 to 23 ° C. for 5 minutes. In this way, the plated surface is in a state where a catalyst is applied.

その後、溶着し一体化している第1基体1と第2基体2からなる二次成形品を、80℃の湯内に10分間入れておくと、被膜剤のエコマティAXは湯中に溶出して除去される。「ベクトラ」のめっきグレードC810は熱変形温度が200℃以上であるので、何の変化も与えることがない。そこで、この触媒附与面にめっきを施すが、このめっきは化学銅めっき、化学ニッケルめっきなどが用いられる。このように導波管21,22,23の内周面にはめっき面210,220,230が形成され、最後に熱処理を施して内部の水分を除去すればよい。
なお、第1基体1と第2基体2とは、最初にエッチング処理した後で、両基体をレーザー光で溶着し、非めっき面の被覆し、その後に、前記しためっき工程を行ってもよい。
After that, when the secondary molded product composed of the first substrate 1 and the second substrate 2 which are welded and integrated is placed in hot water at 80 ° C. for 10 minutes, the ecomatic AX of the coating agent is eluted in the hot water. Removed. Since “Vectra” plating grade C810 has a heat distortion temperature of 200 ° C. or higher, it does not give any change. Therefore, plating is performed on the surface to which the catalyst is attached, and chemical copper plating, chemical nickel plating, or the like is used for this plating. As described above, the plated surfaces 210, 220, and 230 are formed on the inner peripheral surfaces of the waveguides 21, 22, and 23, and finally, heat treatment may be performed to remove moisture inside.
The first substrate 1 and the second substrate 2 may be subjected to the etching process first, and then both substrates are welded with laser light to cover the non-plated surface, and then the above-described plating step may be performed. .

以上の実施例では、めっきを化学銅めっきか化学ニッケルめっきを施した例であるが、このめっきを、銅めっきとニッケル・鉄めっきとの二重層とすることにより、この銅めっきは導電性による電界ノイズをシールドし、ニッケル・鉄めっきは、その高透磁性により磁界ノイズをシールドする。   In the above examples, chemical copper plating or chemical nickel plating is applied. However, by making this plating a double layer of copper plating and nickel / iron plating, this copper plating depends on conductivity. Electric field noise is shielded, and nickel / iron plating shields magnetic field noise by its high permeability.

また、ダミーの導波管23は必ずしも必要ではなく、導波管21,22のみでもよいが、電波の強さなどの条件次第では、この導波管21から電波が漏洩して隣接する導波管22に電波が侵入して混信する危険性があるので、1つの導波管から他の導波管に電波が侵入することを確実に防止するためには、この両導波管の間にダミーの導波管23を介在させた方が望ましい。   Further, the dummy waveguide 23 is not always necessary, and only the waveguides 21 and 22 may be used. However, depending on conditions such as the strength of radio waves, radio waves leak from the waveguide 21 and are adjacent to each other. Since there is a danger of radio waves entering the tube 22 and causing interference, in order to reliably prevent radio waves from entering one waveguide to another, there is a gap between the two waveguides. It is desirable to interpose a dummy waveguide 23.

次に、本発明の実施の形態2を図9〜17を参照して説明すると、この実施の形態は導電構造物に関するもので、その構造は図9、図10に示す板状の第1基体3と、図11、図12に示す同一平面形状でありこれより厚板状の第2基体4との2部材からなり、この両基体は、相互に相溶性のあるもの、又は相溶性のある同一の熱可塑性合成樹脂、例えば全芳香族系ポリエステル液晶ポリマーの前記「ベクトラ」のめっきグレードC810を素材とするもので、この両基体の一方の第1基体は光透過性のよい色調、望ましくは透明性の材質であり、他方の第2基体は光吸収性のよい色調の黒色である。   Next, a second embodiment of the present invention will be described with reference to FIGS. 9 to 17. This embodiment relates to a conductive structure, and the structure is a plate-like first base body shown in FIGS. 3 and the same planar shape as shown in FIGS. 11 and 12, and a thicker plate-like second base body 4. The two base bodies are compatible with each other or compatible with each other. The same thermoplastic synthetic resin, for example, the above-mentioned “Vectra” plating grade C810 of wholly aromatic polyester liquid crystal polymer is used as a material, and the first base of one of the two bases has a light-transmitting color tone, preferably It is a transparent material, and the other second substrate is black having a color tone with good light absorption.

第1基体3には複数、図面では2つのスルーホール31,32が形成してあり、第2基体4には、複数の、図面では2つの導電管41,42を構成する溝状の導電路が形成してあり、この導電路の間にはダミーの導電管43を構成する導電路が形成してあり、図13、14に示すように、この第2基体は第1基体1と接合させることにより導電管41〜43を構成する。そして、第1基体3の2つのスルーホール31,32は、図13に示すように、第2基体4の2つの導電管41,42を構成する溝状の導電路に連通している。
勿論、導電路41,42、ダミーの導電路43を第1基体3に形成したもの、両基体に導電路41,42、ダミーの導電路43を形成したものでもよい。いずれにしても、両基体3,4の少なくともいずれか一方には溝状の導電路が形成してあり、他方の基体を溶着させることにより導電管が形成されるものであればよい。
The first substrate 3 has a plurality of through holes 31 and 32 in the drawing, and the second substrate 4 has a plurality of groove-shaped conductive paths constituting two conductive tubes 41 and 42 in the drawing. A conductive path constituting a dummy conductive tube 43 is formed between the conductive paths. As shown in FIGS. 13 and 14, the second base is joined to the first base 1. Thus, the conductive tubes 41 to 43 are configured. Then, the two through holes 31 and 32 of the first base 3 are communicated with the groove-like conductive paths constituting the two conductive tubes 41 and 42 of the second base 4 as shown in FIG.
Of course, the conductive paths 41 and 42 and the dummy conductive paths 43 may be formed on the first base 3, or the conductive paths 41 and 42 and the dummy conductive paths 43 may be formed on both bases. In any case, it suffices that at least one of the substrates 3 and 4 is provided with a groove-like conductive path and a conductive tube is formed by welding the other substrate.

次に、第1基体3と第2基体4とを接合させ、この両基体を溶着させる工程について説明すると、図13、図14の示すように第1基体3と第2基体4とを接合させる。そこで、前記の実施の形態と同様に押え治具でこの第1基体1を押圧して、押え治具の上方からレーザー光aを照射する。この時のレーザー光の波長、出力、照射スピードは前記の実施の形態1と同一程度でよい。このレーザー光は押え治具と第1基体3とを貫通し、第2基体4の接合端面に吸収される。この時、第2基体4の色調が光吸収力のよいもの、例えば黒色であるので、このレーザー光aの吸収が効率的に行われる。レーザー光aのエネルギーは熱に変換されて、両基体3、4の接合面を溶着させる。このままの状態で第1基体3と第2基体4とをクランプしておくと、この熱はこの第2基体から透過部材の第1基体に伝わり、この両基体が溶着され一体化する。これが一次成形品である。   Next, the process of bonding the first substrate 3 and the second substrate 4 and welding the both substrates will be described. As shown in FIGS. 13 and 14, the first substrate 3 and the second substrate 4 are bonded. . Therefore, as in the above-described embodiment, the first base 1 is pressed with a pressing jig, and the laser beam a is irradiated from above the pressing jig. The wavelength, output, and irradiation speed of the laser light at this time may be the same as those in the first embodiment. This laser beam penetrates the holding jig and the first base 3 and is absorbed by the joining end face of the second base 4. At this time, since the color tone of the second substrate 4 is good in light absorption, for example, black, the laser light a is efficiently absorbed. The energy of the laser beam a is converted into heat, and the joining surfaces of both the substrates 3 and 4 are welded. If the first base 3 and the second base 4 are clamped in this state, the heat is transferred from the second base to the first base of the transmission member, and the bases are welded and integrated. This is the primary molded product.

そこで、図15〜図17に示すように導電管41,42,43の内周面にめっきを施こすが、このめっき工程は、先ず図13、図14に示す溶着した第1基体3と第2基体4の外周面と導電管41,42,43の内周面を粗面化することが必要である。この粗面化、つまりエッチング処理方法として、カ性ソーダまたはカ性カリを例えば45wt%に溶解したアルカリ性水溶液を例えば50〜90℃に加熱し、第1基体3と第2基体4を例えば30分浸漬する。このエッチングによって第1基体3と第2基体4の外周面と導電管41,42,43の内周面は粗面化する。また、上下の金型の対向面には、一体化している両基体3,4の外周に所定の空隙を有する形状に合致する形状のキャビティが形成されており、このキャビティ内に一体化している一次成形品を挿置し、この金型を閉じ、このキャビティ内にオキシアルキレン基含有ポリビニルアルコール系樹脂を射出して非めっき面を被覆する。これが二次成形品である。このオキシアルキレン基含有ポリビニルアルコール系樹脂としては、前記の「エコマティAX」を用い、この射出成形条件のシリンダー温度、金型温度、射出圧力及び冷却時間は、実施の形態1の同じである。   Therefore, as shown in FIGS. 15 to 17, the inner peripheral surfaces of the conductive tubes 41, 42 and 43 are plated. This plating step is performed first with the welded first base 3 and the first base 3 shown in FIGS. It is necessary to roughen the outer peripheral surface of the two substrates 4 and the inner peripheral surfaces of the conductive tubes 41, 42, 43. As this roughening, that is, an etching treatment method, an alkaline aqueous solution in which caustic soda or caustic potash is dissolved in 45 wt%, for example, is heated to, for example, 50 to 90 ° C., and the first substrate 3 and the second substrate 4 are subjected to, for example, 30 minutes. Immerse. By this etching, the outer peripheral surfaces of the first base 3 and the second base 4 and the inner peripheral surfaces of the conductive tubes 41, 42, 43 are roughened. In addition, a cavity having a shape matching a shape having a predetermined gap is formed on the outer circumferences of the integrated bases 3 and 4 on the opposing surfaces of the upper and lower molds, and the cavity is integrated in the cavity. The primary molded product is inserted, the mold is closed, and an oxyalkylene group-containing polyvinyl alcohol resin is injected into the cavity to cover the non-plated surface. This is a secondary molded product. As this oxyalkylene group-containing polyvinyl alcohol resin, the above-mentioned “Ecomati AX” is used, and the cylinder temperature, mold temperature, injection pressure, and cooling time of the injection molding conditions are the same as those in the first embodiment.

粗面化しているめっき面は露出しているので、この粗面にパラジウム、金などによる触媒を附与する。この触媒方法は、例えば錫、パラジウム系の混合触媒液に、溶着している第1基体3と第2基体4を浸漬した後、塩酸、硫酸などの酸で活性化し、表面にパラジウムを析出させる。この混合触媒液の温度や浸漬時間も前記の実施の形態1と同じである。   Since the roughened plating surface is exposed, a catalyst such as palladium or gold is added to the rough surface. In this catalyst method, for example, the first substrate 3 and the second substrate 4 that are welded are immersed in a mixed catalyst solution of tin and palladium, and then activated with an acid such as hydrochloric acid or sulfuric acid to deposit palladium on the surface. . The temperature and immersion time of the mixed catalyst solution are the same as those in the first embodiment.

その後、相互に接合面が溶着している第1基体3と第2基体4からなる二次成形品を80℃の湯内に10分間入れておくと、被覆剤のエコマティAXは湯中に溶出する。「ベクトラ」のめっきグレードC810は熱変形温度が200℃以上であるので、何の変化も与えることがない。このようにして、めっき面であるスルーホール31,32、導電管41,42,43、回路パターン44,45には触媒が附与された状態になる。   After that, when a secondary molded product composed of the first base 3 and the second base 4 having the bonded surfaces welded to each other is placed in 80 ° C. hot water for 10 minutes, the coating ecomatic AX is dissolved in the hot water. To do. Since “Vectra” plating grade C810 has a heat distortion temperature of 200 ° C. or higher, it does not give any change. In this way, the through holes 31 and 32, the conductive tubes 41, 42, and 43, and the circuit patterns 44 and 45, which are plated surfaces, are in a state where a catalyst is applied.

そこで、この触媒附与面にめっきを施すが、このめっきは化学銅めっき、化学ニッケルめっきなどが用いられる。このようにスルーホール31,32にはめっき面310,320と、このめっき面に導通している回路パターン310,320(これはめっき面310,320と同じものであるので同一符号をつけた)、導電管41,42,43の内周面のめっき面410,420,430が形成され、さらに第2基体4には2つの回路パターン44,45が形成され、最後に熱処理を施して内部の水分を除去すればよい。   Therefore, plating is performed on the surface to which the catalyst is attached, and chemical copper plating, chemical nickel plating, or the like is used for this plating. In this way, the through holes 31 and 32 have plated surfaces 310 and 320 and circuit patterns 310 and 320 electrically connected to the plated surfaces (the same reference numerals are given to the plated holes 310 and 320 because they are the same as the plated surfaces 310 and 320). The plated surfaces 410, 420, and 430 are formed on the inner peripheral surfaces of the conductive tubes 41, 42, and 43. Further, two circuit patterns 44 and 45 are formed on the second base body 4, and finally heat treatment is performed. Water may be removed.

この実施の形態によると、導電経路は複数、つまり多層の回路が形成されるもので、具体的には、その第1はスルーホール31を中心としてそれから回路パターン310と導電管41との経路と、第2はスルーホール32を中心としてそれから回路パターン320と導電管42との経路と、第3は導電管43の経路、第4は回路パターン44の経路、第5は回路パターン45の多くの経路が形成されている。
なお、第1基体3と第2基体4とは、最初にエッチング処理した後で、両基体をレーザー光で溶着し、非めっき面の被覆し、その後のめっき工程を行ってもよい。
According to this embodiment, a plurality of conductive paths, that is, a multi-layer circuit is formed. Specifically, the first is centered on the through hole 31 and then the path between the circuit pattern 310 and the conductive tube 41. The second is centered around the through-hole 32, and then the path between the circuit pattern 320 and the conductive tube 42, the third is the path of the conductive tube 43, the fourth is the path of the circuit pattern 44, and the fifth is the many of the circuit patterns 45. A path is formed.
Note that the first base 3 and the second base 4 may be subjected to an etching treatment first, and then both bases are welded with a laser beam to cover the non-plated surface, and a subsequent plating step may be performed.

以上はめっきを化学銅めっきか化学ニッケルめっきを施した例であるが、このめっきを銅めっきとニッケル・鉄めっきの二重層としてもよい。   The above is an example of chemical copper plating or chemical nickel plating, but this plating may be a double layer of copper plating and nickel / iron plating.

また、ダミーの導電管43は必ずしも必要ではなく、導電管41、42のみでもよい。   The dummy conductive tube 43 is not always necessary, and only the conductive tubes 41 and 42 may be used.

本発明の実施の形態3を、図18〜図20を参照して説明する。これは導波構造物と導電構造物が混在している導波導電構造物を示すもので、この図面自体は前記の実施の形態2の図15〜図17と同一である。   A third embodiment of the present invention will be described with reference to FIGS. This shows a waveguide conductive structure in which a waveguide structure and a conductive structure are mixed, and this drawing itself is the same as FIGS. 15 to 17 of the second embodiment.

この実施の形態では、図18に示す第1基体3と図20に示す第2基体5との2部材からなり、この両基体は、熱可塑性合成樹脂を素材とし射出成形したもので、この素材の具体例は前記の実施の形態1,2と同じである。両基体の一方の第1基体3は光透過性のよい色調であり、他方の第2基体5は光吸収性のよい色調であり、この光透過性のよい基体3側からレーザー光を照射することにより両基体3、5の接合面は溶着し一体化してある。   In this embodiment, the first substrate 3 shown in FIG. 18 and the second substrate 5 shown in FIG. 20 are composed of two members, both of which are formed by injection molding using a thermoplastic synthetic resin as a material. The specific example is the same as in the first and second embodiments. One first substrate 3 of both substrates has a color tone with good light transmittance, and the other second substrate 5 has a color tone with good light absorption, and laser light is irradiated from the side of the substrate 3 with good light transmittance. As a result, the joint surfaces of both bases 3 and 5 are welded and integrated.

先ず、導電構造物について説明すると、第1基体3は図9、図10に示すものと同一形状で、この基体には複数、図面では2つのスルーホール31,32が形成してある。また、両基体3,5の少なくともいずれか一方、図19の例では第2基体5には導電管51,52を構成する溝状の導電路が形成してあり、他方の第1基体3をこの第2基体に接合させ溶着させることにより導電管51,52が形成される。そして、スルーホール31,32は導電管51,52に連通している。導電管51,52の内周面にも、それぞれめっき510,520が施してあり、スルーホール31,32の内周面に施してあるめっきは、第1基体3の表面に伸長し回路パターン310,320になって、この導電管のめっきに電気的に導通している。さらに、第2基体5の表面には回路パターン54,55が形成してある。   First, the conductive structure will be described. The first base 3 has the same shape as that shown in FIGS. 9 and 10, and a plurality of through holes 31, 32 are formed in the base. Further, in the example of FIG. 19, groove-like conductive paths constituting the conductive tubes 51 and 52 are formed in the second base 5 in the example of FIG. 19, and the other first base 3 is connected to the second base 3. Conductive tubes 51 and 52 are formed by bonding and welding to the second substrate. The through holes 31 and 32 communicate with the conductive tubes 51 and 52. The inner peripheral surfaces of the conductive tubes 51 and 52 are also plated with 510 and 520, respectively, and the plating applied to the inner peripheral surfaces of the through holes 31 and 32 extends to the surface of the first base 3 and the circuit pattern 310. 320, and is electrically connected to the plating of the conductive tube. Further, circuit patterns 54 and 55 are formed on the surface of the second substrate 5.

次に、導波構造物について説明すると、両基体3,5の少なくともいずれか一方、図19の例では第2基体5には導波管53を構成する溝状の導波路が形成してあり、他方の基体、この例では第1基体3をこの第2基体に溶着させることによりシームレス化した導波管53が形成される。そして、導波管53の内周面にはめっき530が施してある。   Next, the waveguide structure will be described. At least one of the substrates 3 and 5, in the example of FIG. 19, the second substrate 5 is provided with a groove-shaped waveguide constituting the waveguide 53. A seamless waveguide 53 is formed by welding the other substrate, in this example, the first substrate 3 to the second substrate. The inner peripheral surface of the waveguide 53 is plated 530.

なお、この導波管53に施すめっき530としては、めっきを銅めっきとニッケル・鉄めっきの二重層とすることにより、この銅めっきは導電性による電界ノイズをシールドし、ニッケル・鉄めっきは、その高透磁性により磁界ノイズをシールドすることができる。   In addition, as plating 530 to be applied to the waveguide 53, the copper plating shields electric field noise due to conductivity by making the plating a double layer of copper plating and nickel / iron plating. Magnetic field noise can be shielded by the high permeability.

したがって、この実施の形態3によると、導電経路としては一方のスルーホール31を中心として回路パターン310、導電管51の経路、他方のスルーホール32を中心として回路パターン320、導電管52の経路、回路パターン54、55があり、さらに、導波経路としては導波管53による経路がある。   Therefore, according to the third embodiment, as the conductive path, the circuit pattern 310 and the conductive tube 51 are routed around one through hole 31, the circuit pattern 320 and the conductive tube 52 are routed around the other through hole 32, There are circuit patterns 54 and 55, and there is a path by the waveguide 53 as a waveguide path.

発明の活用例として、テレビ受信用パラボラアンテナの入口に設置される導波管フイルタ、自動車の追突防止用の電波を放射するレーダー放射導波管、トンネル内の電波を増幅させるための高周波共振器、多層回路基板などとして利用できる。   Examples of use of the invention include a waveguide filter installed at the entrance of a TV receiving parabolic antenna, a radar radiation waveguide that emits radio waves for preventing rear-end collisions of automobiles, and a high-frequency resonator for amplifying radio waves in a tunnel It can be used as a multilayer circuit board.

実施例1の第1基体の正面図Front view of the first substrate of Example 1 実施例1の図1の2−2線断面図Sectional view taken along line 2-2 of FIG. 実施例1の第2基体の正面図Front view of the second substrate of Example 1 実施例1の図3の4−4線断面図Sectional view taken along line 4-4 of FIG. 実施例1の第1基体と第2基体とを接合した状態の正面図The front view of the state which joined the 1st base of Example 1 and the 2nd base 実施例1の図5の6−6線断面図Sectional view taken along line 6-6 in FIG. 5 of the first embodiment. 実施例1の第1基体と第2基体とを接合した状態でめっきを施した状態の正面図The front view of the state which plated in the state which joined the 1st base | substrate and 2nd base | substrate of Example 1 実施例1の図7の8−8線断面図Sectional view taken along line 8-8 in FIG. 実施例2の第1基体の正面図Front view of first substrate of Example 2 実施例2の図9の10−10線断面図Sectional view taken along line 10-10 in FIG. 9 of the second embodiment. 実施例2の第2基体の正面図Front view of the second substrate of Example 2 実施例2の図11の12−12線断面図Sectional view taken along line 12-12 in FIG. 11 of the second embodiment. 実施例2の第1基体と第2基体とを接合した状態の正面図The front view of the state which joined the 1st base of Example 2 and the 2nd base. 実施例2の図13の14−14線断面図14 is a cross-sectional view taken along line 14-14 of FIG. 実施例2の第1基体と第2基体とを接合した状態でめっきを施した状態の正面図The front view of the state which plated in the state which joined the 1st base | substrate and 2nd base | substrate of Example 2 実施例2の図15の16−16線断面図15 is a cross-sectional view taken along line 16-16 in FIG. 実施例2の第1基体と第2基体とを接合した状態でめっきを施した状態の背面図The rear view of the state which plated in the state which joined the 1st base | substrate and 2nd base | substrate of Example 2 実施例3の第1基体と第2基体とを接合した状態でめっきを施した状態の正面図The front view of the state which plated in the state which joined the 1st base | substrate and 2nd base | substrate of Example 3 実施例3の図18の19−19線断面図18 is a cross-sectional view taken along line 19-19 in FIG. 実施例3の第1基体と第2基体とを接合した状態でめっきを施した状態の背面図The rear view of the state which plated in the state which joined the 1st base | substrate and 2nd base | substrate of Example 3

符号の説明Explanation of symbols

1 第1基体
2 第2基体
21 導波管
22 導波管
210 めっき
220 めっき
23 ダミーの導波管
230 めっき
3 第1基体
31 スルーホール
310 めっき(回路パターン)
32 スルーホール
320 めっき(回路パターン)
4 第2基体
41 導電管
410 めっき
42 導電管
420 めっき
43 導電管
430 めっき
5 第2基体
51 導電管
510 めっき
52 導電管
520 めっき
53 導波管
530 めっき
DESCRIPTION OF SYMBOLS 1 1st base | substrate 2 2nd base | substrate 21 Waveguide 22 Waveguide 210 Plating 220 Plating 23 Dummy waveguide 230 Plating 3 1st base | substrate 31 Through-hole 310 Plating (circuit pattern)
32 Through hole 320 Plating (circuit pattern)
4 Second substrate 41 Conductive tube 410 Plating 42 Conductive tube 420 Plating 43 Conductive tube 430 Plating 5 Second substrate 51 Conducting tube 510 Plating 52 Conducting tube 520 Plating 53 Waveguide 530 Plating

Claims (3)

第1基体(1)と第2基体(2)とからなり、
上記両基体は、熱可塑性合成樹脂を素材とするもので、
上記両基体の少なくともいずれか一方(2)には溝状の導波路が形成してあり、他方の基体を溶着させることによりシームレス化した導波管(21)(22)が形成してあり、
上記導波管(21)(22)は複数であり、この導波管の間にダミーの導波管(23)が設けてあり、
上記導波管とダミーの導波管との内周面にはめっき(210)(220)(230)が施してある
ことを特徴とする導波構造物。
It consists of a first substrate (1) and a second substrate (2),
Both the substrates are made of a thermoplastic synthetic resin,
At least one of the two substrates (2) is formed with a groove-shaped waveguide, and a waveguide (21) (22) made seamless by welding the other substrate is formed,
There are a plurality of the waveguides (21) and (22), and a dummy waveguide (23) is provided between the waveguides.
A waveguide structure characterized in that plating (210) (220) (230) is applied to the inner peripheral surfaces of the waveguide and the dummy waveguide.
請求項1において、上記めっき(210)(220)(230)は、銅めっきと、ニッケル・鉄めっきとの二重層であることを特徴とする導波構造物。 2. The waveguide structure according to claim 1, wherein the plating (210) (220) (230) is a double layer of copper plating and nickel / iron plating . 第1基体(3)と第2基体(5)とからなり、
上記両基体は、熱可塑性合成樹脂を素材とするもので、
上記第1基体(3)にはスルーホール(31)(32)が形成してあり、
上記両基体の少なくともいずれか一方(5)には溝状の導電路が形成してあり、他方(3)の基体を溶着させることによりシームレス化した導電管(51)(52)が形成してあり、
上記スルーホールは上記導電管に連通しており、
上記両基体の少なくともいずれか一方(5)には溝状の導波路が形成してあり、他方の基体を接合させることにより導波管(53)が形成してあり、
上記導波管にはめっき(530)が施してあり、
上記スルーホール(31)(32)と上記導電管(51)(52)の内周面には、それぞれめっき(310)(320)(510)(520)が施してあり、
上記スルーホールのめっき(310)(320)と上記導電管のめっき(510)(520)とは電気的に導通している
ことを特徴とする導波導電構造物。
It consists of a first substrate (3) and a second substrate (5),
Both the substrates are made of a thermoplastic synthetic resin,
Through holes (31), (32) are formed in the first base (3),
At least one of the two substrates (5) is formed with a groove-like conductive path, and the other (3) substrate is welded to form a seamless conductive tube (51) (52). Yes,
The through hole communicates with the conductive tube,
At least one of the two substrates (5) has a groove-shaped waveguide, and a waveguide (53) is formed by bonding the other substrate,
The waveguide is plated (530),
Plating (310) (320) (510) (520) is applied to the inner peripheral surfaces of the through holes (31) (32) and the conductive tubes (51) (52), respectively.
The waveguide conductive structure, wherein the through-hole plating (310) (320) and the conductive tube plating (510) (520) are electrically connected .
JP2004058117A 2004-03-02 2004-03-02 Waveguide / conductive structure Expired - Fee Related JP3955028B2 (en)

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CN105590902B (en) * 2013-02-08 2019-02-19 日月光半导体制造股份有限公司 Antenna packages module and its manufacturing method
JP2015076661A (en) * 2013-10-07 2015-04-20 日本電気株式会社 Coaxial wiring device and transmission/reception integral splitter
JP6537943B2 (en) * 2015-09-18 2019-07-03 Ntn株式会社 Waveguide slot antenna and method of manufacturing the same
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