JP3936503B2 - ポジ型フォトレジスト組成物 - Google Patents

ポジ型フォトレジスト組成物 Download PDF

Info

Publication number
JP3936503B2
JP3936503B2 JP32709199A JP32709199A JP3936503B2 JP 3936503 B2 JP3936503 B2 JP 3936503B2 JP 32709199 A JP32709199 A JP 32709199A JP 32709199 A JP32709199 A JP 32709199A JP 3936503 B2 JP3936503 B2 JP 3936503B2
Authority
JP
Japan
Prior art keywords
group
substituent
acid
alkyl group
general formula
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP32709199A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001142215A5 (enExample
JP2001142215A (ja
Inventor
元 中尾
健一郎 佐藤
一也 上西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
Original Assignee
Fujifilm Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Priority to JP32709199A priority Critical patent/JP3936503B2/ja
Publication of JP2001142215A publication Critical patent/JP2001142215A/ja
Publication of JP2001142215A5 publication Critical patent/JP2001142215A5/ja
Application granted granted Critical
Publication of JP3936503B2 publication Critical patent/JP3936503B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Materials For Photolithography (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP32709199A 1999-11-17 1999-11-17 ポジ型フォトレジスト組成物 Expired - Lifetime JP3936503B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32709199A JP3936503B2 (ja) 1999-11-17 1999-11-17 ポジ型フォトレジスト組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32709199A JP3936503B2 (ja) 1999-11-17 1999-11-17 ポジ型フォトレジスト組成物

Publications (3)

Publication Number Publication Date
JP2001142215A JP2001142215A (ja) 2001-05-25
JP2001142215A5 JP2001142215A5 (enExample) 2005-07-14
JP3936503B2 true JP3936503B2 (ja) 2007-06-27

Family

ID=18195201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32709199A Expired - Lifetime JP3936503B2 (ja) 1999-11-17 1999-11-17 ポジ型フォトレジスト組成物

Country Status (1)

Country Link
JP (1) JP3936503B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7192681B2 (en) 2001-07-05 2007-03-20 Fuji Photo Film Co., Ltd. Positive photosensitive composition
JP4831277B2 (ja) * 2001-07-13 2011-12-07 信越化学工業株式会社 高分子化合物、レジスト材料、及びパターン形成方法
KR101035881B1 (ko) 2003-03-14 2011-05-20 후지필름 가부시키가이샤 감광성 조성물
JP4494161B2 (ja) * 2004-10-14 2010-06-30 東京応化工業株式会社 高分子化合物、ポジ型レジスト組成物およびレジストパターン形成方法
JP4533756B2 (ja) * 2005-01-07 2010-09-01 富士フイルム株式会社 イオン注入工程用ポジ型レジスト組成物及びそれを用いたイオン注入方法
JP4712077B2 (ja) * 2008-07-31 2011-06-29 富士フイルム株式会社 ポジ型感光性組成物
JP5568354B2 (ja) 2009-03-31 2014-08-06 富士フイルム株式会社 感活性光線性又は感放射線性樹脂組成物及びそれを用いたパターン形成方法

Also Published As

Publication number Publication date
JP2001142215A (ja) 2001-05-25

Similar Documents

Publication Publication Date Title
JP3620745B2 (ja) ポジ型フォトレジスト組成物
JP4117112B2 (ja) ポジ型フォトレジスト組成物
JP4102032B2 (ja) ポジ型レジスト組成物
JP3841399B2 (ja) ポジ型レジスト組成物
JP4181760B2 (ja) ポジ型フォトレジスト組成物
JP4187949B2 (ja) ポジ型レジスト組成物
JP4149154B2 (ja) ポジ型レジスト組成物
JP4149153B2 (ja) ポジ型レジスト組成物
JP4149148B2 (ja) ポジ型レジスト組成物
JP4255100B2 (ja) ＡｒＦエキシマレ−ザ−露光用ポジ型フォトレジスト組成物及びそれを用いたパタ−ン形成方法
JP4124978B2 (ja) ポジ型レジスト組成物
JP4067284B2 (ja) ポジ型レジスト組成物
JP2003122012A (ja) ポジ型レジスト組成物
JP4742156B2 (ja) ポジ型レジスト組成物及びそれを用いたパターン形成方法
JP4049236B2 (ja) ポジ型レジスト組成物
JP2008299350A (ja) 遠紫外線露光用ポジ型フォトレジスト組成物
JP3948506B2 (ja) ポジ型フォトレジスト組成物
JP3890380B2 (ja) 遠紫外線露光用ポジ型フォトレジスト組成物
JP3936503B2 (ja) ポジ型フォトレジスト組成物
KR100765245B1 (ko) 포지티브 포토레지스트 조성물
JP4070521B2 (ja) ポジ型レジスト組成物
JP3934291B2 (ja) 遠紫外線露光用ポジ型レジスト組成物
JP4210439B2 (ja) ポジ型フォトレジスト組成物
JP4262422B2 (ja) ポジ型フォトレジスト組成物及びそれを用いたパターン形成方法
US6794108B1 (en) Positive photoresist composition for far ultraviolet exposure

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20041118

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20041118

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20060324

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A712

Effective date: 20061124

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20070215

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20070314

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20070323

R150 Certificate of patent or registration of utility model

Ref document number: 3936503

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100330

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110330

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110330

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120330

Year of fee payment: 5

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120330

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130330

Year of fee payment: 6

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130330

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140330

Year of fee payment: 7

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term