JP3925882B2 - ポジ型感光性樹脂組成物 - Google Patents

ポジ型感光性樹脂組成物 Download PDF

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Publication number
JP3925882B2
JP3925882B2 JP14768998A JP14768998A JP3925882B2 JP 3925882 B2 JP3925882 B2 JP 3925882B2 JP 14768998 A JP14768998 A JP 14768998A JP 14768998 A JP14768998 A JP 14768998A JP 3925882 B2 JP3925882 B2 JP 3925882B2
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Japan
Prior art keywords
group
acid
photosensitive resin
resin composition
positive photosensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP14768998A
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English (en)
Japanese (ja)
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JPH11338152A5 (enExample
JPH11338152A (ja
Inventor
保雅 河辺
健一郎 佐藤
利明 青合
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
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Fujifilm Corp
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Publication date
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Priority to JP14768998A priority Critical patent/JP3925882B2/ja
Publication of JPH11338152A publication Critical patent/JPH11338152A/ja
Publication of JPH11338152A5 publication Critical patent/JPH11338152A5/ja
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Publication of JP3925882B2 publication Critical patent/JP3925882B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Materials For Photolithography (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
JP14768998A 1998-05-28 1998-05-28 ポジ型感光性樹脂組成物 Expired - Fee Related JP3925882B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14768998A JP3925882B2 (ja) 1998-05-28 1998-05-28 ポジ型感光性樹脂組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14768998A JP3925882B2 (ja) 1998-05-28 1998-05-28 ポジ型感光性樹脂組成物

Publications (3)

Publication Number Publication Date
JPH11338152A JPH11338152A (ja) 1999-12-10
JPH11338152A5 JPH11338152A5 (enExample) 2005-02-24
JP3925882B2 true JP3925882B2 (ja) 2007-06-06

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ID=15436061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14768998A Expired - Fee Related JP3925882B2 (ja) 1998-05-28 1998-05-28 ポジ型感光性樹脂組成物

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JP (1) JP3925882B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002006483A (ja) * 2000-06-20 2002-01-09 Sumitomo Chem Co Ltd フォトレジスト組成物
KR100642416B1 (ko) * 2004-08-31 2006-11-03 주식회사 하이닉스반도체 상부 반사방지막 조성물 및 이를 이용한 반도체 소자의패턴 형성 방법
KR100745064B1 (ko) * 2004-09-17 2007-08-01 주식회사 하이닉스반도체 상부 반사방지막 조성물 및 이를 이용한 반도체 소자의패턴 형성 방법

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Publication number Publication date
JPH11338152A (ja) 1999-12-10

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