JP3918579B2 - Surface observation device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
  The present invention provides a surface observation device suitable for observing the surface shape of a fine structure.In placeRelated.
[0002]
[Background]
Conventionally, a surface observation device using a color highlight illumination method has been used for observing the surface shape of a three-dimensional structure. For example, it is used for inspection of a soldered portion of an electronic component mounted on a circuit board. ing. FIG. 1 shows a conventional surface observation apparatus 1 using a color highlight illumination system. The surface observation apparatus 1 includes three ring-type light emitters 2a, 2b, and 2c arranged along the same central axis 6, a color CCD camera 3 arranged above the ring-type light emitters 2a, 2b, and 2c. The three ring-shaped light emitters 2a, 2b, and 2c are fluorescent tubes that emit light of different wavelength regions toward the inspection object 5, and are set at higher positions as the radius decreases.
[0003]
As shown in FIG. 1, from the ring-type light emitters 2a, 2b, 2c toward the inspection object 5 mounted on the circuit board 4, the central axis 6 and θ1, θ2, θ3 (where θ1 <θ2 <θ3 ) (Hereinafter, this angle is referred to as an irradiation angle), for example, when red light, green light, and blue light are projected, the inspection object 5 reflects one of the lights toward the color CCD camera 3. When viewed from the color CCD camera 3, the upper surface appears colored in the reflected light color. Therefore, for example, when inspecting a soldering surface, an image of a solder portion in a state where soldering is good or bad is taken in advance, and this coloring pattern is compared with the coloring pattern of an image obtained by photographing an object to be inspected. Then, it can be inspected whether the inspection object 5 is a non-defective product or a defective product.
[0004]
By the way, as the miniaturization and high integration of parts progress in recent years, in order to inspect these surface shapes, surface observation devices with a microscope function capable of observing details, concave portions and complicated shapes Therefore, there is a need for a surface observation device that can cope with this. However, if an attempt is made to produce a surface observation device that is simply a combination of a microscope and a conventional ring-type light emitter, there will be restrictions on the size of the ring-type light emitter and the position where the ring-type light emitter is installed. In other words, the ring radius must be larger than the radius of the microscope objective lens so that the ring emitter does not enter under the microscope objective lens. It is necessary to consider the position where the ring-type light emitter is installed so as not to be blocked. When designing a surface observation device with these restrictions added, it is difficult to increase the number of ring-type light emitters because the space is limited, but if the number of ring-type light emitters is small, the surface shape There arises a problem that the recognition accuracy becomes coarse.
[0005]
In addition, when the inspection object 5 has a recess having a depth with respect to the size of the frontage, in order to observe the recess of the inspection object 5, if light is to reach the deepest part, Light must be projected at a small irradiation angle. When using a conventional ring-type light emitter, if the irradiation angle is to be reduced, it is necessary to reduce the ring radius of the ring-type light emitter or to increase the distance between the ring-type light emitter and the inspection object. . However, there is a limit to manufacturing a ring-type light emitter with a small ring radius, and if the irradiation angle is reduced by increasing the distance between the ring-type light emitter and the inspection object, the surface observation device is It will increase in size. Furthermore, when trying to make a surface observation device that combines a microscope and a ring-type illuminant as described above, there is an objective lens for the microscope, so it is not possible to arrange the ring-type illuminant so that the irradiation angle is very small. Impossible.
[0006]
DISCLOSURE OF THE INVENTION
  The present invention has been made in view of the above-described problems, and its object is to observe or inspect the surface shape of a fine object (particularly, an object having a recess) without increasing the size of the apparatus. To provide a surface observation device that canThe
[0007]
  The surface observation device according to the present invention receives a light source unit that emits light in a plurality of wavelength ranges, light emitted from the light source unit, irradiates the object with different irradiation angles at different irradiation angles, and at least Illumination means for irradiating light of one wavelength range toward the object as coaxial incident light, and imaging means for identifying and imaging light of each wavelength reflected by the objectThe illumination means comprises a plurality of sets of optical fiber bundles, and each set of optical fiber bundles is arranged in a circular shape or a concentric shape at the light emitting end, and each optical fiber at the light incident end. A light converter having bundled optical converters separated from each other, and converting light having a different wavelength range incident on the light incident end of each optical fiber bundle constituting the light converter from the light emitting end surface into light having a concentric light beam cross section Then, the light is emitted.Here, the coaxial incident light refers to light that is irradiated along an optical axis that coincides with the optical axis of an imaging means that images light reflected by an object.
[0008]
In the surface observation apparatus of the present invention, an imaging unit (for example, a color CCD) that irradiates an object with light of a plurality of wavelength ranges at different irradiation angles, and identifies and images light of each wavelength reflected by the object. In a surface observation device that uses a camera, a color video, etc.) to determine the surface shape of an object from its coloration condition, etc., light of at least one wavelength region is irradiated as coaxial incident light toward the object The imaging means and the lighting fixture are less likely to interfere with each other, and the illumination means (especially the light emitting portion) can be made compact, and the surface observation apparatus can be downsized. In particular, since the incident angle can be reduced by using coaxial incident light, it is possible to irradiate light to a deep portion of the concave portion of the object, and the concave portion and the like are also accurate without increasing the size of the surface observation apparatus. Can be observed well.
[0009]
  Further, the surface observation apparatus of the present inventionThe illumination means comprises a plurality of sets of optical fiber bundles, and the optical fiber bundles of each set are arranged in a circular shape or a concentric shape at the light exit end, and the optical fiber bundles are arranged at the light entrance end. A separate light converter is provided, and light having a different wavelength range incident on the light incident end of each optical fiber bundle constituting the light converter is converted into light having a concentric light beam cross section from the light emitting end face and emitted. Therefore, light in a plurality of wavelength ranges can be emitted from a small area at the light exit end of the light converter, and light can be emitted at a small irradiation angle without increasing the distance between the illumination means and the object. It is possible to accurately observe an object having a recess.
[0010]
  The present inventionThe fruitIn the embodiment, the illuminating means includes a ring light including an optical fiber bundle in which ends on the light incident end side are bundled and ends on the light emitting end side are arranged in an annular shape. The light emitted from the light source can be converted into an annular shape for irradiation, and the illumination means for irradiating the annular light can be downsized as compared with the case where an annular fluorescent tube or the like is used. Therefore, it is possible to irradiate annular light with a small irradiation angle.
[0011]
  The present inventionAnotherIn an embodiment, the illuminating means can shape the light in each wavelength region so that the cross section of the light beam is circular or annular, and irradiate the object as coaxial incident light. For example, a coaxial incident optical system using a microscope or the like may be used. In this embodiment, since light in each wavelength region can be irradiated as coaxial incident light, the illumination means can be made particularly small, and it is suitable for observation or inspection of an object having a minute object or a recess. ing.
[0012]
In still another embodiment of the present invention, one of the lights having different wavelength ranges irradiated by the illuminating means is white light, and the surface of the object is irradiated with the white light. This makes it possible to read character information such as a production number printed on the surface of the object.
[0013]
In still another embodiment of the present invention, since the light synthesized from the light emitted from the light source unit can be irradiated from the illumination means, the wavelength range of the light irradiated on the object is more diverse than the type of the light source. Can be.
[0015]
The above-described constituent elements of the present invention can be arbitrarily combined as much as possible.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
(First embodiment)
FIG. 2B is a partially broken side view of the optical converter 8 used in the surface observation device 7 according to the embodiment of the present invention. 2A and 2C are front views of the light emitting end and the light incident end of the optical converter 8. FIG. The optical converter 8 bundles optical fiber bundles 11a, 11b, and 11c, and fiber cords 10a, 10b, and 10c in which the outsides of the individual optical fiber bundles 11a, 11b, and 11c obtained by bundling a plurality of optical fibers are covered with protective materials 9a and 9b. And a fiber guide 13 in which the optical fiber bundles 11a, 11b, and 11c are combined into one. The optical fiber bundles 11a, 11b, and 11c in the fiber cords 10a, 10b, and 10c that are separately bundled are bundled by the bundling portion 12, and further separated by individual optical fibers and rearranged, and then concentric in the fiber guide 13. Have been rearranged. In the fiber guide 13, for example, as shown in FIG. 2A, the optical fiber of the optical fiber bundle 11a constitutes the central part, the optical fiber of the optical fiber bundle 11b constitutes the outer peripheral part thereof, and the optical fiber bundle 11c further constitutes the outer peripheral part thereof. The optical fibers 8 are arranged in the concentric circles having different radii at the light emitting end of the optical converter 8 and rearranged in the concentric circles having different radii.
[0017]
Therefore, if the light incident ends of the optical fiber bundles 11a, 11b, and 11c of the optical converter 8 are irradiated with, for example, red light 15a, green light 15b, and blue light 15c (see FIG. 3), they are emitted from the fiber guide 13. The light beam cross-section is such that the center portion has a circular red light 15a, the outer periphery thereof is an annular green light 15b, and the outer periphery thereof is an annular blue light 15c (see FIG. 4). Different concentric circles. In the fiber guide 13, a highly reflective partition 9c such as an aluminum foil is provided at the boundary between the optical fiber bundles 11a, 11b, and 11c, so that the adjacent optical fiber bundles 11a, 11b, and 11c have different wavelengths. Even when emitting light, these lights do not mix.
[0018]
FIG. 3 is a schematic view showing the structure of the surface observation device 7 using the light converter 8 described above. The surface observation device 7 includes a microscope 16 integrated with the light converter 8, a light source unit 17 that supplies light to the light converter 8, a horizontal inspection table 18 provided below the microscope 16, and the microscope 16. A color CCD camera 19 provided above and an image processing device 20 electrically connected to the color CCD camera 19 are configured. The light source unit 17 includes three halogen lamps 21a, 21b, and 21c and band-pass filters 22a, 22b, and 22c that transmit only red light 15a, green light 15b, and blue light 15c, respectively.
[0019]
White light emitted from the halogen lamps 21a, 21b, and 21c of the light source unit 17 is applied to the bandpass filters 22a, 22b, and 22c, respectively, to generate red light 15a, green light 15b, and blue light 15c, and these lights Are made incident on the light incident ends of the optical fiber bundles 11a, 11b, and 11c. At this time, the light may be condensed on the light incident ends of the optical fiber bundles 11a, 11b, and 11c using a lens or the like, but all the optical fibers constituting the optical fiber bundles 11a, 11b, and 11c may be condensed. It is desirable to irradiate light evenly.
[0020]
As described above, the light emitted from the optical converter 8 to the inside of the microscope 16 is such that the central portion of the light beam cross section is the red light 15a, the outer peripheral portion is the green light 15b, and the outer peripheral portion is the blue light 15c. The light becomes concentric light having different radii for each wavelength region. The concentric light is converted into parallel light through the collimator lens 23, and the path is changed in the direction of the inspection object 27 by the half mirror 24 and is incident on the objective lens 25. At this time, if the center of the concentric light and the central axis 28 of the objective lens 25 are matched, the light at the center of the concentric light is emitted toward the inspection object 27 at a small irradiation angle. The light on the outer peripheral circle side is emitted toward the inspection object 27 at a larger irradiation angle. That is, the red light 15a is incident on the inspection object 27 coaxially with a small irradiation angle, the green light 15b with a larger irradiation angle than the red light 15a, and the blue light 15c with a larger irradiation angle.
[0021]
The light irradiated by the objective lens 25 is not completely condensed at one point. As shown in FIG. 4, the light varies on the central axis 28 for each wavelength region due to spherical aberration and chromatic aberration of the lens. In order to focus on the position, the same region of the inspection object 27 can be irradiated with light emitted from different angles.
[0022]
Of the light reflected from the surface of the inspection object 27, the light reflected in the direction of the color CCD camera 19 provided above is collected by the imaging lens 26 and enters the color CCD camera 19. The image obtained by the color CCD camera 19 is A / D converted and sent to the image processing device 20. The image processing apparatus 20 is configured by a personal computer or a display provided with predetermined software, and can display an acquired image on the display.
[0023]
FIG. 5B is a diagram showing an image obtained by the color CCD camera 19 when the concave inspection object 27 shown in FIG. 5A is irradiated with light. A region where the inclination of the bottom surface of the concave portion 27a is close to the horizontal plane appears to be colored red by the red light 15a having a small irradiation angle, but appears to be colored green and blue as the inclination from the horizontal plane increases. In the image processing apparatus 20, the area of the image obtained in this way is calculated by calculating the area of the region colored with each illumination color, or by measuring the deviation or distortion from the central axis 28, whereby the inspection object 27 is measured. It is also possible to examine the shape and the presence of foreign matter in the recess 27a. In addition, it is checked whether the non-defective product or defective product stored in the storage device in the image processing apparatus 20 in advance matches the acquired image to determine whether the inspection object 27 is a non-defective product. Alternatively, it can be determined whether the product is defective.
[0024]
As described above, when the optical converter 8 of the present embodiment and the objective lens 25 of the microscope 16 are combined, observation can be performed even when the inspection object 27 is a microstructure. Further, as in the present embodiment, if the inspection object 27 can be coaxially illuminated from the inside of the microscope 16, the irradiation angle is made smaller than when the inspection object 27 is irradiated from the outside of the microscope 16. Therefore, even in the case of the inspection object 27 having a concave curved surface of about several tens of microns like a microlens mold, it is possible to irradiate light up to a deeply intertwined portion. Moreover, since the surface observation apparatus 7 should just be comprised using a conventional microscope, an optical fiber, etc., it can be manufactured at low cost. In addition, although the optical converter 8 of this embodiment is comprised from the three optical fiber bundles, how many optical fiber bundles may be sufficient.
[0025]
The light source unit 17 may have a structure in which white light emitted from one white light source is split by a prism or a wavelength selection mirror to generate a plurality of lights having different wavelength bands.
[0026]
(Second Embodiment)
FIG. 6 is a schematic view showing the structure of a surface observation apparatus 7 that uses the above-described optical converter 8 and is another embodiment of the present invention. The surface observation device 7 includes a color CCD camera 19 having a camera lens unit 29, and a fiber cord (optical fiber) that guides light to two ring lights 30a and 30b having different radii, a camera lens unit 29, and ring lights 30a and 30b. 10a, 31a, 31b, a camera lens unit 29 and a light source unit 17 for supplying light to the ring lights 30a, 30b, and an image processing device 20 electrically connected to the camera lens unit 29 Has been. The light source unit 17 includes three halogen lamps 21a, 21b, and 21c, a bandpass filter 22a that transmits only light in the red wavelength region, a bandpass filter 22b that transmits only light in the green wavelength region, and only light in the blue wavelength region. The transmission bandpass filter 22c is configured. The camera lens unit 29 includes a collimator lens 23, a half mirror 24, and an objective lens 25. The color CCD camera 19, the objective lens 25, the ring lights 30a and 30b, and the inspection object 27 soldered to the circuit board 32 are disposed on the same central axis. The ring lights 30a and 30b are arranged in a ring shape with the light emitting ends of the fiber cords 31a and 31b directed toward the inspection object 27. The ring light 30a with a small radius is a ring light 30b with a large radius. It is installed above.
[0027]
When white light is irradiated from the halogen lamp 21a toward the bandpass filter 22a, the red light 15a transmitted through the bandpass filter 22a enters the fiber cord 10a. Since the fiber cord 10a bundles a plurality of optical fibers so that the cross section is circular, the cross section of the light beam of the red light 15a emitted from the fiber cord 10a into the camera lens unit 29 is circular. The red light beam is converted into parallel light by the collimator lens 23, the traveling direction is changed to a direction in which the inspection object 27 is present by the half mirror 24, and the objective lens 25 is transmitted and coaxially incident on the inspection object 27. Further, when white light is irradiated from the halogen lamps 21b and 21c toward the bandpass filters 22b and 22c, the green light 15b and the blue light 15c transmitted through the bandpass filters 22b and 22c are incident on the fiber cords 31a and 31b. From the lower surfaces of the ring lights 30a and 30b, green light 15b and blue light 15c are projected toward the inspection object 27 at different irradiation angles.
[0028]
When the inspection object 27 is a soldered part as shown in FIG. 7, if the above-described red light 15a, green light 15b, and blue light 15c are projected, an image photographed by the color CCD camera 19 The horizontal plane and the plane with a small inclination from the horizontal plane appear colored in red, and the plane with a larger inclination than the red colored plane appears colored in green, which is further than the green colored plane. A surface with a large slope appears colored blue. Therefore, it is possible to inspect the soldering quality from the colored pattern of the soldering portion 33 of the inspection object 27.
[0029]
Further, the band pass filter 22a of the present embodiment is movable and can be removed outside the optical axis. When the band-pass filter 22a is removed from the optical axis, the inspection object 27 is irradiated with white light from above. Therefore, as shown in FIG. 7, when character information 34 such as a serial number is attached to the surface of the component, the character information can be read by irradiating white light.
[0030]
If the test object can be irradiated not only with light in different wavelength ranges from different angles but also with white light from above the test object, the part number written on the surface of the test object 27 can be used. The inspection can be performed while confirming the above, and the inspection can be performed more accurately and efficiently.
[0031]
(Third embodiment)
FIG. 8 is a schematic view showing the structure of a surface observation apparatus 7 which is still another embodiment of the present invention. This surface observation device 7 emits light to a color CCD camera 19 having a camera lens unit 29 integrated with the light converter 8, and two ring lights 30a and 30b, light converter 8 and ring lights 30a and 30b having different radii. It comprises a light source unit 17 to be supplied. The light source unit 17 includes four halogen lamps 21a, 21b, 21c, and 21d, a bandpass filter 22a that transmits only light in the red wavelength region, a bandpass filter 22b that transmits only light in the green wavelength region, and light in the blue wavelength region. The band-pass filter 22c that transmits only the light. The color CCD camera 19, the objective lens 25 provided in the camera lens unit 29, the ring lights 30 a and 30 b, and the inspection object 27 on the inspection table 18 are arranged on the same central axis. The ring lights 30a and 30b are arranged on the ring with the light emitting ends of the fiber cords 31a and 31b directed toward the inspection object 27. The ring light 30a having a small radius is located above the ring light 30b having a large radius. Is installed.
[0032]
In the optical converter 8, two fiber cords 10a and 10b are bundled by a bundling portion 12, and the light emitting end of the optical fiber constituting the fiber cord 10a is circular in the fiber guide 13, and the fiber cord 10b. Are rearranged in an annular shape with the outer circumferential circle being the inner circumferential circle. Therefore, the white light 15w emitted from the halogen lamp 21a toward the optical fiber bundle 11a is emitted from the light emitting end of the fiber guide 13 into the camera lens unit 29 as light having a circular cross section. Further, when the red light 15a is generated by irradiating the band-pass filter 22a with white light from the halogen lamp 21b and the red light 15a is irradiated to the light incident end of the optical fiber bundle 11b, the camera lens is emitted from the light emitting end of the fiber guide 13. A red light 15 a having a ring-shaped cross section is emitted into the portion 29. The white light 15w and the red light 15a incident on the camera lens unit 29 are transmitted through the collimator lens 23 to become parallel light, and the traveling direction is changed in the direction of the inspection object 27 by the half mirror 24 and transmitted through the objective lens 25. Then, it is coaxially incident on the inspection object 27. Further, the ring light 30 a provided outside the color CCD camera 19 emits green light 15 b and the ring light 30 b emits blue light 15 c toward the inspection object 27 from different irradiation angles.
[0033]
Here, when the inspection object 27 is a component soldered onto the substrate as shown in FIG. 7, when observing the soldered portion 33, the halogen lamp 21a is turned off, and the red light 15a, the green light 15b, Only the blue light 15c needs to be projected. At this time, the surface with a small inclination from the horizontal plane on the surface of the inspection object 27 appears colored in red, and the surface with a larger inclination than the surface colored in red appears colored in green and colored in green. A surface with a larger inclination than the surface that has been made appears colored blue. Therefore, it is possible to inspect the soldering quality from the colored pattern of the soldering portion 33 of the inspection object 27.
[0034]
In addition, when character information 34 such as a manufacturing number is attached to the surface of the component as shown in FIG. 7, if the halogen lamp 21a is turned on, white light is irradiated from above the component. Can be read. According to the present embodiment, not only the shape is inspected but also the characters on the surface of the inspection object can be read out by performing a simple operation of turning on or off the halogen lamp.
[0035]
(Fourth embodiment)
FIG. 9 is a schematic view showing the structure of a surface observation apparatus 7 which is another embodiment of the present invention. The surface observation device 7 includes a color CCD camera 19 having a camera lens unit 29 integrated with the light converter 8, a light source unit 17 for supplying light to the light converter 8, and two ring lights 30a and 30b having different radii. , Etc. The light source unit 17 includes five halogen lamps 21a, 21b, 21c, 21d, and 21e, bandpass filters 22a and 22b that transmit only light in the red wavelength region, bandpass filters 22c and 22d that transmit light in the green wavelength region, and blue It is composed of a band-pass filter 22e that transmits only light. The color CCD camera 19, the objective lens 25 provided in the camera lens unit 29, the ring lights 30a and 30b, and the inspection object 27 on the circuit board 32 are arranged on the same central axis. The ring lights 30a and 30b are arranged on the ring with the light emitting ends of the fiber cords 31a and 31b directed toward the inspection object 27. The ring light 30a having a small radius is located above the ring light 30b having a large radius. Is installed.
[0036]
When white light is irradiated from the halogen lamp 21a toward the bandpass filter 22a, red light transmitted through the bandpass filter 22a enters the fiber cord 10a. Further, the white light emitted from the halogen lamps 21b and 21c passes through the bandpass filters 22b and 22c and enters the fiber cord 10b. Since the incident end of the fiber cord 10b is irradiated with red light and green light, orange light (or yellow light) produced by combining red light and green light is emitted from the light exit end of the fiber cord 10b. Emitted. In the fiber guide 13, the light emitting ends of the optical fibers constituting the fiber cord 10a are rearranged in a circular shape to constitute the center portion, and the emitting ends of the optical fibers constituting the fiber cord 10b constitute the outer peripheral portion thereof. It is rearranged like a ring. Therefore, the light emitted from the fiber guide 13 becomes red light having a circular cross section of the light beam and ring-shaped orange light (or yellow light) having an outer peripheral circle of the red light as an inner peripheral circle.
[0037]
The red light and orange light (or yellow light) incident on the camera lens unit 29 are transmitted through the collimator lens 23 to become parallel light, and the traveling direction is changed in the direction of the inspection object 27 by the half mirror 24, and the objective lens. 25 is transmitted and coaxially incident on the inspection object 27. Further, green light is emitted from the ring light 30a provided outside the color CCD camera 19 and blue light is emitted from the ring light 30b toward the inspection object 27 from different irradiation angles. Therefore, if the angle formed by the central axis of the objective lens 25 and the light irradiated on the inspection object is referred to as an irradiation angle, red light, orange light (or yellow light), green light, The inspection object 27 is irradiated with blue light.
[0038]
According to the surface observation apparatus according to the present embodiment, the light projected onto the inspection object 27 using the objective lens 25 of the camera lens unit 29 becomes light with a small irradiation angle, and the inspection object is detected using the ring lights 30a and 30b. The light projected on 27 becomes light with a large irradiation angle. Therefore, according to the surface observation apparatus according to the present embodiment, it is possible to inspect a three-dimensional structure having a complicated shape having various inclined surfaces.
[0039]
【The invention's effect】
According to the surface observation apparatus of the present invention, an imaging unit (for example, a color CCD camera) that irradiates a target with light of a plurality of wavelength ranges at different irradiation angles and identifies and captures light of each wavelength reflected by the target. In the surface observation apparatus that determines the surface shape of the target object based on the coloration, etc., the light of at least one wavelength region is irradiated as the coaxial incident light toward the target object. The imaging unit and the illuminating device are less likely to interfere with each other, and the illumination unit (particularly the light emitting portion) can be made compact, and the surface observation apparatus can be downsized. In particular, since the incident angle can be reduced by using coaxial incident light, it is possible to irradiate light to a deep portion of the concave portion of the object, and the concave portion and the like are also accurate without increasing the size of the surface observation apparatus. Can be observed well.
[Brief description of the drawings]
FIG. 1 is a schematic diagram showing a configuration of a surface observation apparatus using a conventional color highlight illumination method.
2A is a front view from the light emitting end side of the light converter of the surface observation device of the present invention, FIG. 2B is a side view of the light converter partially broken, and FIG. 2C is a light converter. It is a front view from the light incident end side.
3 is a schematic view showing a configuration of a surface observation apparatus using the optical converter of FIG.
FIG. 4 is a diagram for explaining a state of light irradiated to an inspection object through an objective lens.
5A is a cross-sectional view of an inspection object, and FIG. 5B is a view showing an image photographed by a color CCD camera when light is irradiated on the concave curved surface of the inspection object shown in FIG. 5A. is there.
FIG. 6 is a schematic diagram showing the configuration of a surface observation apparatus according to another embodiment of the present invention.
7A and 7B are a plan view and a side view of an inspection object.
FIG. 8 is a schematic view showing a configuration of a surface observation apparatus according to still another embodiment of the present invention.
FIG. 9 is a schematic view showing a configuration of a surface observation apparatus according to still another embodiment of the present invention.
[Explanation of symbols]
7 Surface observation equipment
8 Optical converter
10a, 10b Fiber cord
11a, 11b, 11c Optical fiber bundle
12 Bundling part
13 Fiber guide
15a red light
15b green light
15c blue light
16 Microscope
17 Light source
19 Color CCD camera
20 Image processing device
21a, 21b, 21c, 21d halogen lamp
22a, 22b, 22c Band pass filter
24 half mirror
27 Inspection object
29 Camera lens section
30a, 30b ring light

Claims (5)

A light source unit that emits light in a plurality of wavelength ranges;
Illuminating means for receiving light emitted from the light source unit and irradiating the object with light having different wavelength ranges at different irradiation angles and irradiating at least one wavelength range of light toward the object as coaxial incident light; ,
Imaging means for identifying and imaging light of each wavelength reflected by the object;
In a surface observation apparatus having
The illumination means includes a plurality of sets of optical fiber bundles, and each set of optical fiber bundles is arranged in a circular shape or a concentric shape at the light output end, and each optical fiber bundle is separated from each other at the light incident end. With a light converter,
Light of different wavelength bands incident on the light incident ends of respective optical fiber bundles constituting the optical converter, the front surface you characterized in that emit converted into light having a concentric light beam cross-section from the light emitting end face Observation device.   The said illuminating means is provided with the ring light which consists of an optical fiber bundle by which the edge part by the side of a light-incidence end was bundled, and the edge part by the side of a light emission end was arranged in the annular | circular shape. Surface observation device.   2. The surface according to claim 1, wherein the illuminating unit shapes the light of each wavelength region so that a cross section of the light beam is circular or annular, and irradiates the object as coaxial incident light. Observation device.   The surface observation apparatus according to claim 1, wherein one of the light beams having different wavelength ranges irradiated by the illumination unit is white light.   2. The surface observation apparatus according to claim 1, wherein at least a part of light having different wavelength ranges irradiated by the illumination unit is light synthesized from light emitted from the light source unit. .

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