JP2002310626A - Lighting system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a lighting system capable of irradiating a three- dimensional-shaped object, using a light of plural colors by at least one white light source and a prism. SOLUTION: An annular ring-shaped slit 16 is arranged in the under surface of a circular ring shape white light emitter 15, and the white light 17, emitted from the white light emitter 15, is converted into a cylindrical parallel light by the slit 16. The circular ring shape prism 13, having a triangular cross section, is arranged under the slit 16, the parallel light is passed through the prism 13 to under go spectral diffraction, and light with continuously changing wavelength is projected toward an object observing area at an illuminating angle different according to the wavelength.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lighting device suitable for observing the surface shape of a three-dimensional object.

[0002]

2. Description of the Related Art For example, after mounting an electronic component on a printed circuit board and soldering the electronic component to a printed wiring board, a three-dimensional observation device is used to inspect whether soldering is good or bad. .

[0003] As a method of observing a three-dimensional object, a color highlight illumination system has been conventionally known. As shown in FIG. 1, the inspection apparatus 1 using the color highlight illumination method includes a plurality of ring-shaped light-emitting bodies 2a, 2b, and 2c (for example, red light, green light, and blue light) that emit light of different colors. Are arranged so that three annular fluorescent tubes that emit light from each other overlap each other, and the color CCD camera 3 is installed above the central axis C thereof.
The upper c has a smaller diameter as it goes up. The three-dimensional object 4 is placed below the center of the inspection device 1 and lights 5a, 5a,
b, 5c are irradiated. Ring-shaped light-emitting bodies 2a, 2b, 2
Lights 5a, 5b, 5c of different colors emitted from c enter the three-dimensional object 4 at different irradiation angles (irradiation elevation angles),
Since the light is specularly reflected on the surface of the three-dimensional object 4 (for example, the solder surface of the soldering portion), the color CCD camera 3
In the image observed in the above, regions having the same inclination with respect to the center axis C of the inspection apparatus 1 appear to be colored in the same color, and regions having different inclinations with respect to the center axis C are colored in different colors. appear. Therefore, the unevenness of the three-dimensional object 4 can be recognized based on the coloring of the three-dimensional object 4.

[0004]

However, such an inspection apparatus requires a plurality of ring-shaped light emitters in order to improve the resolution in order to improve the accuracy of shape recognition. For this reason, there is a problem that the irradiation wavelengths of the plurality of ring-shaped light emitters overlap, and the shape recognition accuracy is reduced. In addition, since a plurality of ring-shaped light emitters are required, there have been problems such as an increase in energy consumption, an increase in the size of an inspection device, and complicated position adjustment of each ring-shaped light emitter.

The present invention has been made in view of the above-mentioned problems of the conventional example, and has as its object the purpose of at least
It is an object of the present invention to provide an illuminating device capable of irradiating a three-dimensional object with light of a plurality of colors using one white light source and a prism.

[0006]

DISCLOSURE OF THE INVENTION An illumination device according to the present invention is an illumination device for irradiating an object with light of different wavelengths to observe the shape of the object. Is characterized by comprising a light conversion unit that converts the light into substantially annular parallel light, and a unit that splits the parallel light emitted from the light conversion unit.

Here, the light converting means may be constituted by, for example, a slit, or may be constituted by arranging light emitting ends of an optical fiber for guiding light emitted from a white light source in a ring shape. Further, if a prism is used as the spectral unit, the structure can be simplified.

According to the illuminating device of the present invention, the white light emitted from the white light source is collimated and separated by the spectroscopic means, so that the light whose wavelength continuously changes can be changed at different irradiation angles for each wavelength. Can irradiate the object observation area, the irradiation light resolution becomes high precision, and the observation precision of the object improves. Further, according to the illumination device of the present invention, the light emitted from the white light source is collimated and separated by the spectral means into light having different wavelengths, so that at least one white light source is used as the light source. It suffices if it suffices to solve the problem that the irradiation wavelengths of the light emitted from different light sources overlap each other and reduce the shape recognition accuracy as in the conventional example. In addition, since at least one white light source is required, the size of the lighting device can be reduced, and the energy consumption of the lighting device can be reduced. Furthermore, when there is one white light source, there is an advantage that there is no problem of position adjustment between the light sources.

When a prism is used as the spectral means, it is desirable that the prism be annular (ring-shaped) with the central axis in the light irradiation direction of the illuminating device as a central axis. The shape may be a polygonal shape or an elliptical shape. Also,
When it is desired to use a prism that is easy to manufacture, linear prisms may be arranged in a ring shape. Even when a slit or the like is used for the light conversion means, the slit is desirably annular, but may be partially missing in some cases, or may have a polygonal shape or an elliptical shape. .

Further, in the embodiment of the present invention, since a substantially cylindrical light reflecting surface for condensing the light dispersed by the dispersing means on the object observation area is provided, the light dispersed by the dispersing means is provided. Is spread over a large area,
The light can be reflected by the light reflecting surface and collected. In particular, if a cross section including the central axis of the light irradiation direction is formed with a light reflecting surface in such a shape that the light reflected by the light reflecting surface is condensed at one point, even a minute object can be observed. become. The light reflecting member may be partially omitted corresponding to the light converting means.

In still another embodiment of the present invention, a cross section including a central axis in a light irradiation direction of a substantially cylindrical light reflecting surface for condensing the light separated by the splitting means on an object observation area. Has a shape such that light having different wavelengths separated by the light splitting means is condensed to different regions in a sectional manner, so that the separated light is divided into wavelengths (for example, blue light band, green light band, (For example, in a red light band), the illumination light can be illuminated in a distinct color, and the illumination color can be emphasized. Further, in still another embodiment of the present invention, a coaxial epi-illumination optical system for co-axially projecting outgoing light toward an object observation area is provided. And a high-precision inspection can be performed.

The above-described components of the present invention can be combined as much as possible.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) FIG. 2 is an exploded perspective view of a lighting device 11 according to an embodiment of the present invention, as viewed obliquely from below and partially cut away. The lighting device 11 includes a light source unit 12 and a prism 13. The light source section 12 includes a hollow light guide 14 having a circular rectangular tubular cross section.
A circular white light-emitting body 15 (for example, an annular fluorescent tube of white light) is housed therein. A slit 16 is provided in the lower surface of the light guide 14 along the lower surface of the light guide 14 in a circular shape. I have. The slit 16 is a white light emitting body 15
When the white light-emitting body 15 is turned on, the white light emitted from the white light-emitting body 15 passes through the slit 16 and then passes through the slit 16 to form a thin cylindrical parallel light. It is emitted as light. In order to prevent white light reflected on the inner surface of the light guide 14 from being emitted from the slit 16 in an oblique direction, the light guide 14
It is desirable to apply a light-absorbing material such as a black paint on the inner surface of the substrate. Further, the thickness (depth) of the slit 16 may be increased in order to convert the light emitted from the slit 16 into parallel light. The circular slit 16 may be opened continuously over the entire circumference of the light guide 14 or may be opened intermittently.

The prism 13 is formed in an annular shape from transparent plastic or glass having a high refractive index, and is disposed immediately below the slit 16. The cross section of the prism 13 is triangular. In this embodiment, the thickness is small on the outer peripheral side and thick on the inner peripheral side. Although the center of the prism 13 is open, the center of the prism 13 may be solid and flat.

However, in this lighting device 11,
When the white light emitting body 15 of the light source unit 12 is turned on, as shown in FIG. 3, white light (white slit light) 17 that has been converted into a cylindrical parallel light is emitted from the slit 16. Slit 1
The white light 17 emitted from 6 passes through the prism 13. When the white light 17 passes through the prism 13, it is split from short-wavelength blue light to long-wavelength red light according to the spectral characteristics of the prism 13, and the long-wavelength red light 18 a is refracted by the prism 13 at a small angle, Short wavelength blue light 18b
Is largely refracted inward by the prism 13.
Further, since the prism 13 is formed in a ring shape,
The band of the split light is radiated in a circular shape.

FIG. 4B shows a state where the three-dimensional object 20 placed on the inspection table 19 is illuminated by the illuminating device 11, and FIG. 4A is illuminated. FIG. 2 shows a plan view of a three-dimensionally shaped object 20. When the three-dimensional object 20 on the inspection table 19 is illuminated by the illumination device 11 as shown in FIG. 4B, the blue light 18a illuminates the three-dimensional object 20 at a small angle with respect to the perpendicular G, and the red light 18a 18b is a three-dimensional object 20 at a large angle with respect to the perpendicular G.
To illuminate. As a result, when the three-dimensional object 20 is viewed from above, as shown in FIG. 4A, the three-dimensional object 20 turns blue in a region having a large inclination (a region forming a small angle with respect to the perpendicular G). In a region close to a horizontal plane (a region forming an angle close to 90 ° with respect to the vertical line G), the three-dimensional object 20 appears to be colored red, and the three-dimensional shape depends on the degree of coloring of the three-dimensional object 20. The irregularities on the surface of the object 20 can be identified.

According to this lighting device 11, the white light-emitting body 1
The light emitted from the light source 5 is split into light having different wavelengths by being split by the prism 13, and the three-dimensional object can be illuminated at a different irradiation angle for each wavelength. It suffices that at least one body 15 is provided, and the problem that the irradiation wavelengths of the lights emitted from different light emitters overlap and the shape recognition accuracy is reduced can be solved. In addition, since it is sufficient that at least one white light emitting body 15 is provided, the size of the lighting device 11 can be reduced.
The energy consumption of the lighting device can also be reduced. Furthermore, since only one white light emitting body 15 is required, there is an advantage that there is no problem of position adjustment between the light emitting bodies.

The lighting device 11 is used for various inspections. For example, it can be used for inspection of the mounting condition of a surface mount component (such as a mounting defect that has risen obliquely from a circuit board) and a solder defect of a soldered portion. In addition, for inspection, it can be used as an inspection device for an automatic inspection provided with an imaging device, and can be used as an inspection instrument for illuminating a three-dimensional object by hand and performing a visual inspection.

FIG. 5 is a schematic view showing the structure of an automatic inspection device 21 using the above-mentioned illumination device 11. In this automatic inspection apparatus 21, a color imaging device 22 such as a color CCD camera is installed above the central axis of the illumination device 11, and a processing device 23 composed of a personal computer and predetermined software and a display 24 are provided. It has. When the lighting device 11 is turned on to illuminate the three-dimensional object 20, the color image of the three-dimensional object 20 illuminated by the lighting device 11 is captured by the color imaging device 22, and the captured color image is displayed on the display 24. Will be displayed. On the other hand, the color image picked up by the color image pickup device 22 is subjected to image processing by the processing device 23, and is automatically inspected for defects such as mounting defects and solder defects.

FIG. 6 is a sectional view showing the structure of an inspection tool 25 which is used by hand and inspects defects such as mounting defects and solder defects with the naked eye. This inspection instrument 25 is obtained by adding an observation lens 26 to the illumination device 11.
When the inspection tool 25 is used, the three-dimensional object 20 is illuminated by holding the inspection tool 25 in a hand, and an enlarged image of the three-dimensional object 20 illuminated by the illumination device 11 by the lens 26 is visually observed. Then, the degree of coloring can be visually inspected for defects such as defective mounting and defective soldering.

Incidentally, as shown in FIG.
May be provided so as to fit into the inner peripheral portion of the prism 13. If the prism 13 and the lens 26 are integrated as described above, the size of the inspection instrument 25 can be reduced.
In addition, the prism 13 and the lens 26 may be integrally formed, or the separately formed lens 26 may be fitted into the prism 13. However, if integrally formed, the manufacturing process and the assembling labor are reduced, and the cost is reduced. It can be cheap.

(Second Embodiment) FIG. 8 is a partially broken side view showing the structure of a lighting device 31 according to another embodiment of the present invention. In this lighting device 31, a light source 32
A prism 33 is arranged on the lower surface of the prism 33, and the outer periphery of the prism 33 and the area immediately below the prism 33 are covered with a cylindrical reflector 34.
As shown in FIGS. 9A and 9B, the light source unit 32 includes a fiber bundle 35 and an annular light guide 36, and the lower surface of the light guide 36 has each light beam obtained by separating the fiber bundle 35. The end faces of the fibers 35a are arranged in an annular shape. Note that the optical fiber 35a is
The arrangement is not limited to one row as in (b), but may be arranged in a plurality of rows. For example, it is conceivable to insert the optical fibers 35a into a resin light guide 36 by arranging them in a ring shape. Then, the other end of the fiber bundle 35 is white L
When coupled to a white light emitter such as an ED or a white lamp, and white light is introduced from the other end of the fiber bundle 35, the white light propagates through the optical fiber 35a, from the end face of the fiber 35a arranged on the lower surface of the light guide 36. It is emitted in a cylindrical shape.

The prism 33 also has a triangular cross section.
Although it has an annular shape, in this embodiment, the thickness is thinner on the inner peripheral side and thicker on the outer peripheral side. Cylindrical reflector 3
4 has a light reflecting surface on the inner surface. This prism 33
Is thicker on the outer peripheral side, the white light 37 emitted from the light source unit 32 is separated into blue light 18a to red light 18b by transmitting through the prism 33, spread. The blue light 18a to the red light 18b that have spread to the outer peripheral side are reflected by the inner surface of the reflection plate 34, and are collected at a central portion below the lighting device 31.

In such an illuminating device 31 as well, since the white light is split and the lights having different wavelengths are radiated at different incident angles, the irradiation wavelengths of the lights radiated from the different illuminants overlap. The problem that the shape recognition accuracy is reduced is solved. Further, since the light source 32 has no light emitter, the size of the light source 32 can be further reduced.

(Third Embodiment) FIG. 10 is a partially broken side view showing a structure of a lighting device 38 according to still another embodiment of the present invention. The illumination device 38 has the same structure as the illumination device 31 shown in FIG. 8, but the lower part of the cross section including the central axis of the light irradiation direction is concavely curved. The blue light 18a to the red light 18b reflected on the inner surface of the reflection plate 34 are condensed at one point.

In this embodiment, immediately after the white light 18 emitted from the light source 32 passes through the prism 33, the white light 18 is split from the red light 18b to the blue light 18a from the inner peripheral side to the outer peripheral side of the prism 33. . The lower part of the reflecting plate 34 is curved inward with a larger curvature toward the lower side, and the portion of the split light is reflected by the reflecting plate 34 in a state close to regular reflection, and the red light band. , The light is reflected at a large deflection angle, and each color light band is concentrated at one point. According to such a configuration, light with different wavelengths is irradiated at one point at different irradiation angles, so that it is suitable for illumination of a small three-dimensionally shaped object.

FIG. 11 is a schematic view showing the structure of an automatic inspection device 39 using the illumination device 38. In this automatic inspection device 39, the end of the fiber bundle 35 is a white LED.
A color imaging device 22 such as a color CCD camera is installed above the central axis of the illumination device 11 and a processing device 23 composed of a personal computer and predetermined software. And a display 24.

When the white light emitter 40 is turned on to illuminate the three-dimensional object 20, a color image of the three-dimensional object 20 illuminated by the illumination device 38 is captured by the color image pickup device 22, and the captured color image is taken. The image is displayed on the display 24. On the other hand, the color image picked up by the color image pickup device 22 is subjected to image processing by the processing device 23, and is automatically inspected for defects such as mounting defects and solder defects.
According to such an automatic inspection device 39, since the dispersed light is concentrated at one point, it is possible to inspect the minute three-dimensionally shaped object 20. In addition, it is also possible to manufacture an inspection instrument for inspecting with the naked eye while holding it by hand using the lighting device 38.

(Fourth Embodiment) FIG. 12 is a partially broken side view showing a structure of a lighting apparatus 41 according to still another embodiment of the present invention. The illumination device 38 has substantially the same structure as the illumination device 31 shown in FIG. 8, but has a curved surface reflection section having a concave mirror shape having a cross section formed of a curved surface such as an arc or a parabola below the reflector 34. Parts 42a, 42b,
Reference numeral 42c is formed over the entire circumference of the reflection plate 34 and in a plurality of stages.

In this embodiment, immediately after the white light 18 emitted from the light source 32 passes through the prism 33, the white light 18 is split from the red light 18b to the blue light 18a from the inner peripheral side to the outer peripheral side of the prism 33. . The light separated by the prism 33 is converted into curved surface reflection portions 42a, 42b, 42 for each wavelength range.
c, is reflected by each of the curved surface reflection portions 42a, 42b, and 42c, and is condensed on a surface at the same distance from the lighting device 41. For example, in FIG. 12, assuming that the light of the blue light band 43b, the green light band 43g, and the light of the red light band 43r are respectively incident on the curved surface reflection portions 42a, 42b, and 42c, the blue light reflected by the curved surface reflection portion 42a The light of the band 43b is collected at one point at a predetermined distance from the lighting device 41. Further, the light in the green light band 43g reflected by the curved reflecting portion 42b is converged in an annular shape on a surface at the same distance from the lighting device 41. The light of the red light band 43r reflected by the curved surface reflection portion 42c is collected in a ring shape on the surface at the same distance from the lighting device 41, and in a slightly larger ring shape on the surface at the same distance from the lighting device 41. Lighted. Such a lighting device 4
According to 1, after white light is split, the visible light range of this light can be divided into several parts to condense each light, and the illumination light can be clearly divided into blue light, green light, red light, etc. The illumination color can be emphasized separately.

Although not shown, the illumination device 41 can also be used as an automatic inspection device by using a color image pickup device or the like, and can be used as an inspection tool for visual inspection by adding an observation lens. Can also.

(Fifth Embodiment) FIG. 13 is a schematic view showing the structure of another automatic inspection device 44 using the illumination device 38 shown in FIG. This automatic inspection device 43 uses a coaxial incident light optical system used for a microscope or the like. The coaxial epi-illumination optical system is housed inside a lens barrel 45 and a light source connection port 46 extending from a side surface of the lens barrel 45. A plano-convex lens 47 is housed inside the light source connection port 46, and a half mirror 48 is arranged in the lens barrel 45 at the same height as the plano-convex lens 47, and a condenser lens 49 is provided directly below the half mirror 48. Is provided. The light source connection port 46
The lighting device 3 having the structure described with reference to FIG.
8 is attached, and the end of the fiber bundle 35 of the lighting device 38 is connected to the white light emitter 40. Lens barrel 45
A color image pickup device 22 is attached to the upper end of the camera, and the color image pickup device 22 is connected to a processing device 23 having a display 24. Such a configuration can be easily manufactured by using an illumination device 38 as shown in FIG. 10 as a coaxial incident light source of a microscope.

When the white light is emitted from the light source 32, the white light is transmitted through the prism 33 and separated, and the separated light of each wavelength is reflected by the reflecting plate 34 and collected at one point. Is done. The plano-convex lens 47 is adjusted so that the focal point of the light emitted from the illumination device 38 matches the focal point of the plano-convex lens 47.
Are arranged, the light passing through the plano-convex lens 47 becomes parallel light. At this time, light having different wavelengths has different incident angles to the plano-convex lens 47 and different points of incidence to the plano-convex lens 47. Therefore, even after being parallelized, the distance from the optical axis differs depending on the wavelength, and the light beam cross section In, the lights having different wavelengths are distributed concentrically. For example, in the light beam cross section of the parallel light, the center becomes blue light and changes to red light toward the outer peripheral side.

The light beam converted into parallel light by the plano-convex lens 47 is reflected by the half mirror 48 and travels to the condenser lens 49. Light that passes through the center of the condenser lens 49 is transmitted without being refracted, but light that passes outside the condenser lens 49 is refracted by an angle corresponding to the distance from the center and goes to the focal point of the condenser lens 49. Therefore, the light transmitted through the condenser lens 49 is condensed at one point and the irradiation angle varies depending on the wavelength. The light emitted from the condenser lens 49 is three-dimensionally reflected by the surface of the three-dimensional object. The three-dimensional object appears to be colored according to the inclination of the surface of the three-dimensional object, and the unevenness of the three-dimensional object can be determined based on the coloring.

(Other Embodiments) FIG. 14 is a view of a lighting device 51 according to still another embodiment of the present invention as viewed from the lower surface side. In this embodiment, the light source unit 12 (or 3
On the lower surface of 2), an annular slit 16 is formed.
A plurality of prisms 33 each having a relatively short length and linearly arranged along the optical fiber 35a are arranged in a polygonal shape. Since the straight prism 33 is easier to manufacture than the short annular prism 33, the manufacturing can be simplified according to such an embodiment.

FIG. 15 is a view of a lighting device 52 according to still another embodiment of the present invention as viewed from the lower surface side. In this embodiment, a polygonal slit 16 (or optical fiber 35a) is formed on the lower surface of the light source unit 12 (or 32), and the slit 16 (or optical fiber 35a) is aligned with a relatively straight line. Short length prism 33
Are arranged in a polygonal shape. According to such an embodiment, the manufacture of the slit 16 and the short prism 33 (or the arrangement of the optical fibers 35a) can be simplified.

FIG. 16 is a view of a lighting device 53 according to still another embodiment of the present invention as viewed from the lower surface side. In this embodiment, on the lower surface of the light source unit 12 (or 32),
A prism 33 linearly arranged in a hexagonal shape is arranged along the slit 16 (or the optical fiber 35a) formed in an annular shape.

FIG. 17 is a view of a lighting device 54 according to still another embodiment of the present invention as viewed from the lower surface side. In this embodiment, on the lower surface of the light source unit 12 (or 32),
The prisms 33 arranged linearly are arranged in a hexagonal shape in accordance with the slits 16 (or the optical fibers 35a) formed in a hexagonal shape.

When using the prism 33 on a straight line,
It is desirable that the polygon be as close to circular as possible,
In the case of using as an inspection tool for inspecting with the naked eye or an inspection apparatus that does not require high accuracy, a polygon having a small number of sides as in the embodiment of FIG. 16 or FIG. 17 may be used.

FIG. 18 is a view of a lighting device 55 according to still another embodiment of the present invention as viewed from the lower surface side. In this embodiment, the slit 16 (or the optical fiber 35a) is formed in an elliptical shape on the lower surface of the light source unit 12 (or 32), and the slit 16 (or the optical fiber 35a) is formed in an elliptical shape along the elliptical slit 16 (or the optical fiber 35a). Are arranged. When used as an inspection instrument for inspecting with the naked eye, the slits 16 and the like and the prism 33 are not limited to circular shapes, and may be elliptical.

[0041]

According to the illuminating device of the present invention, the light whose wavelength has been changed continuously can be radiated to the object observation area at different irradiation angles for each wavelength by dispersing the white light source by the spectral means. As a light source, at least one white light source is required, and the irradiation wavelengths of light emitted from different light sources do not overlap as in the case of using a plurality of light sources of different emission colors. The accuracy is high, and the observation accuracy of the object is improved. In addition, since at least one white light source is required, the size of the lighting device can be reduced, and the energy consumption of the lighting device can be reduced. Furthermore, when there is one white light source, there is an advantage that there is no problem of position adjustment between the light sources.

[Brief description of the drawings]

FIG. 1 is a schematic diagram illustrating a conventional inspection apparatus using a color highlight illumination system.

FIG. 2 is an exploded perspective view of the lighting device according to the embodiment of the present invention, which is partially cut away as viewed obliquely from below.

FIG. 3 is an explanatory diagram of an operation of the above lighting device.

FIG. 4B is a diagram illustrating a state where a three-dimensional object placed on an inspection table is illuminated, and FIG. 4A is a plan view of the illuminated three-dimensional object.

FIG. 5 is a schematic diagram showing a structure of an automatic inspection device using the lighting device of FIG.

FIG. 6 is a cross-sectional view showing the structure of an inspection instrument for observation with the naked eye.

FIG. 7 is a cross-sectional view showing an inspection instrument having another structure.

FIG. 8 is a partially broken side view showing a structure of a lighting device according to another embodiment of the present invention.

FIGS. 9A and 9B are a side view and a bottom view of a light source unit used in the lighting device of FIG.

FIG. 10 is a partially broken side view showing a structure of a lighting device according to still another embodiment of the present invention.

11 is a schematic diagram showing the structure of an automatic inspection device using the lighting device of FIG.

FIG. 12 is a partially broken side view showing a structure of a lighting device according to still another embodiment of the present invention.

FIG. 13 is a schematic diagram showing the structure of another automatic inspection device using the lighting device shown in FIG.

FIG. 14 is a view of a lighting device according to still another embodiment of the present invention as viewed from the lower surface side.

FIG. 15 is a view of a lighting device according to still another embodiment of the present invention as viewed from the lower surface side.

FIG. 16 is a view of a lighting device according to still another embodiment of the present invention as viewed from the lower surface side.

FIG. 17 is a view of a lighting device according to still another embodiment of the present invention as viewed from the lower surface side.

FIG. 18 is a view of a lighting device according to still another embodiment of the present invention as viewed from the lower surface side.

[Explanation of symbols]

 Reference Signs List 12 light source unit 13 prism 15 white light emitter 16 slit 17 white light 18a blue light 18b red light 20 three-dimensional object 22 color imaging device 23 processing device 26 lens 32 light source unit 33 prism 34 reflector 35 fiber bundle 35a optical fiber

Continued on the front page F term (reference) 2F065 AA49 AA54 CC01 CC26 FF41 GG03 GG13 GG17 GG23 HH05 JJ03 JJ26 LL02 LL46 QQ21 SS13 2G051 AA61 AA65 AB14 BB07 BB09 BB11 BB17 CA03 CA11 CC09

Claims (7)

[Claims] 1. An illumination device for irradiating an object with light of different wavelengths to observe the shape of the object, comprising: a white light source; and light illuminated from the white light source being converted into parallel light having a substantially circular light beam cross section. A light conversion unit for converting, and a unit for separating parallel light emitted from the light conversion unit,
Lighting device provided with. 2. The lighting device according to claim 1, wherein the light conversion unit is constituted by a slit. 3. The illumination according to claim 1, wherein the light conversion unit is formed by annularly arranging light emitting ends of an optical fiber for guiding light emitted from the white light source. apparatus. 4. The illuminating device according to claim 1, further comprising a substantially cylindrical light reflecting surface for condensing the light split by the splitting means on an object observation area. 5. The light reflecting surface according to claim 4, wherein a cross section including a central axis in a light irradiation direction is shaped so as to condense the light reflected by the light reflecting surface to one point. Lighting equipment. 6. A cross section of the light reflecting surface including a central axis in a light irradiation direction has a shape such that light having different wavelengths separated by the light separating means is condensed to different regions in a sectional manner. The lighting device according to claim 4. 7. The illumination device according to claim 1, further comprising a coaxial epi-optical system for co-axially projecting the emitted light toward the object observation area.