JP3911106B2 - Processing method, processing apparatus, tool and mold - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a processing method, a processing apparatus, a tool, and a mold, and in particular, a processing method, a processing apparatus, a tool, and a processing method, a processing apparatus, and a tool for processing a mold for an optical element with high accuracy. It relates to the processed mold.
[0002]
[Prior art]
Molds, particularly molds for optical elements, are required to have high precision, and are manufactured by processing steps such as cutting and polishing, grinding and polishing, cutting only, or grinding only.
[0003]
Then, it is usually considered that the starting point, the end point, and the switching direction of the processing direction when processing the mold are outside the mold or on the mold.
[0004]
When the switching position is outside the mold, the tool comes into contact with the boundary between the outside of the mold and on the mold, that is, the outer peripheral edge, and the machining becomes intermittent.
[0005]
However, when the tool comes into contact with the outer peripheral edge, an abrupt load is applied to the tool, and the tool is susceptible to damage such as chipping or scratching. When a die is machined with such a damaged tool, there are problems that scratches and scratches occur on the machined surface of the workpiece, and a desired shape accuracy cannot be obtained.
[0006]
Further, when the switching position is on the mold, a phenomenon occurs in which the machining start point, end point, and machining direction switching position are excessively cut. That is, in the polishing of the mold, the polishing time becomes longer or the number of times of polishing increases at the start and end of polishing or at the switching position of the processing direction. Therefore, as shown in FIG. The groove 3 due to overcutting is formed in the boundary line L portion of 2.
[0007]
There is a problem that as the removal amount of the excessively cut groove 3 becomes larger as compared with other portions, the range that can be used effectively becomes smaller.
[0008]
Therefore, conventionally, as described in JP-A-62-246467, an auxiliary die (Yatoi) having the same height as the periphery of the die is fitted around the die, and the polishing operation is started. There has been proposed a polishing method in which the end or switching of the processing direction is performed on the auxiliary mold.
[0009]
[Problems to be solved by the invention]
However, in the technique described in the above publication, a pseudo mold (Yatoi) is required outside the surface to be processed, and the pseudo mold is manufactured through almost the same process as the original lens mold. This is a factor that greatly increases the total processing time of mold production. Furthermore, it is necessary to process the mold and the yatoy as a single unit, and almost the same highly accurate machining is required for both the mold and the yatoy. As a result, there is a problem that the machining area increases, the machining time becomes long, the wear of the tool becomes severe, and a yato is required, resulting in an increase in production cost.
[0010]
  In view of this, the invention according to claim 1 is such that a tool rotated about a predetermined axis and a mold for an optical element are moved relative to each other along a predetermined tool path, and the mold is processed on the processing working surface of the tool. As a tool path, machining start, machining direction switching, and machining end are performed at a position where the working surface of the tool does not contact the outer peripheral edge of the mold and outside the optically effective range of the mold. Set travel routeAt the start of machining along the tool path, switching of the machining direction, and the end of machining, the rotation speed of the tool is reduced compared with that during machining,Without using a yatoy, processing in a short time to suppress tool wear, prevent damage to the tool, and efficiently process the mold with the desired shape accuracyIn addition, the amount of removal of the mold by the tool at the start of machining, switching of the machining direction and the end of machining is reduced, and the optical effective area becomes narrow due to excessive cutting outside the effective area of the mold. Can be processed with better shape accuracy.The purpose is to provide a processing method.
[0011]
  Claim6In the described invention, when a tool rotated by a predetermined axis and a mold for an optical element are relatively moved along a predetermined tool path, and the tool is processed on the processing surface of the tool, the tool path As a moving path for starting processing, switching the processing direction and ending processing outside the optically effective range of the mold, where the working surface of the tool is not in contact with the outer peripheral edge of the mold. SettingAt the start of machining along the tool path, switching of the machining direction, and the end of machining, the rotation speed of the tool is reduced compared with that during machining,Without using a yatoy, processing in a short time to suppress tool wear, prevent damage to the tool, and efficiently process the mold with the desired shape accuracyIn addition, the amount of removal of the mold by the tool at the start of machining, switching of the machining direction and the end of machining is reduced, and the optical effective area becomes narrow due to excessive cutting outside the effective area of the mold. Can be processed with better shape accuracy.The object is to provide a processing apparatus.
[0013]
  Claim2 or claim 7The described invention performs processing by applying a predetermined load to the tool at the time of machining, and reduces the load at the start of machining along the tool path, switching of the machining direction, and completion of machining, compared to the time of machining. , Reduce the amount of mold removal by the tool at the start of machining, change of machining direction and end of machining, and prevent the optically effective area from being narrowed by cutting too much outside the effective area of the mold It is an object of the present invention to provide a processing method or a processing apparatus capable of processing a mold with better shape accuracy.
[0014]
  Claim3 or claim 8In the described invention, by performing predetermined masking outside the effective range of the mold, the amount of removal of the mold by the tool at the start of machining, switching of the machining direction and at the end of machining is further appropriately reduced, To provide a machining method or a machining apparatus capable of further preventing the optical effective area from being narrowed by excessively cutting outside the effective area of the mold and processing the mold with better shape accuracy. It is aimed.
[0015]
  Claim4 or claim 9The described invention includes a tool having an effective area tool part involved in machining of the effective area of the mold and an unnecessary area tool part involved in machining outside the effective area of the mold, and the effective area tool part is in the effective area. It is formed of a member having a predetermined sharpness suitable for machining, and an unnecessary area tool portion is formed of a member having a predetermined amount of sharpness lower than the sharpness of the effective area tool portion. The amount of removal of the mold by the tool at the time of switching and finishing of the processing is further appropriately reduced, and further preventing the optical effective area from becoming narrow due to excessive cutting outside the effective area of the mold, An object of the present invention is to provide a processing method or a processing apparatus capable of processing a mold with better shape accuracy.
[0016]
  Claim5 or claim 10The described invention uses loose abrasives as abrasive grains, and the tool is an effective area tool part involved in machining the effective area of the mold, and an unnecessary area tool part involved in machining outside the effective area of the mold, The effective area tool part is formed of a member having a fine hole or fiber capable of holding loose abrasive grains on the surface, and the fine area or fiber capable of holding the free abrasive grain is not present on the surface. By forming it with a member, the amount of removal of the mold by the tool at the start of machining, switching of the machining direction and the end of machining is further appropriately reduced, and excessive cutting outside the effective range of the mold is performed. It is an object of the present invention to provide a processing method or a processing apparatus that can further prevent the optical effective area from being narrowed and can process a mold with better shape accuracy.
[0017]
  Claim11In the described invention, a tool working surface is used as a tool path when the mold is processed by being relatively moved along a predetermined tool path with a mold for an optical element while being rotated about a predetermined axis. The movement path for starting machining, switching the machining direction, and ending machining is set outside the effective area of the mold as an optical element at a position that does not contact the outer peripheral edge of the mold, and the mold is effective. An effective area tool part involved in machining the area and an unnecessary area tool part involved in machining outside the effective area of the mold, and the effective area tool part is formed of a member having a predetermined sharpness suitable for machining in the effective area Unnecessary area tool part is sharper than the effective area tool part by a predetermined amount.ofBy forming it with a falling member, the amount of removal of the mold at the start of processing, switching of the processing direction and the end of processing is reduced, and it is processed and worn in a short time without using a yatoy. Another object of the present invention is to provide a tool capable of efficiently processing a mold with desired shape accuracy while suppressing damage.
[0018]
  Claim12The described invention is used for machining using loose abrasive grains, and the tool is formed of a member having a fine hole or a fiber on the surface in which the effective zone tool portion can hold loose abrasive grains, and the unwanted zone tool portion is formed. By using fine holes or fibers that can hold loose abrasive grains as a member that does not exist on the surface, the amount of mold removed by the tool at the start of processing, switching of the processing direction, and the end of processing can be reduced. Decrease even more appropriately, less wear and damage without using a yatoy, while further preventing the optical effective range from being narrowed by cutting too much outside the effective range of the mold, desired It aims at providing the tool which can process a metal mold | die more efficiently with the shape accuracy of this.
[0019]
  Claim13In the described invention, the tool is assumed to have an unnecessary area tool part joined to both sides centering on the effective area tool part, so that at the start of machining, switching of the machining direction and end of machining. The amount of removal of the mold is reduced more appropriately, and processing in the effective range is performed with high accuracy while suppressing wear and damage by processing in a short time without using a yatoy. An object of the present invention is to provide a tool capable of preventing the optically effective range from being narrowed due to excessive cutting and efficiently processing a mold with a desired shape accuracy.
[0020]
  Claim14In the described invention, when a tool rotated relative to a tool rotated about a predetermined axis along a predetermined tool path and machining with the tool working surface, the tool working surface is used as a tool path. By setting the movement path to start processing, change the processing direction and end processing, at a position that does not contact the outer peripheral edge of the mold and outside the optical effective range of the mold, Efficient machining with the desired shape accuracy and molding of high-precision optical elements without using a yatoy and without damaging or damaging the tool in a short time.In addition, the amount of mold removal by the tool outside the optically effective range can be further reduced by masking.The purpose is to provide a mold.
[0021]
[Means for Solving the Problems]
  According to a first aspect of the present invention, there is provided a machining method in which a tool and an optical element mold are relatively moved along a predetermined tool path while the tool is rotated about a predetermined axis, and the tool has a working surface. In the processing method of processing the mold, as the tool path, the processing working surface of the tool is a position where it does not contact the outer peripheral edge of the mold, and outside the optical effective range of the mold, Set the movement path to start machining, change the machining direction and end the machiningAt the start of the machining along the tool path, the switching of the machining direction, and the end of the machining, the rotational speed of the tool is decelerated compared with that during the machining.The above-mentioned purpose is achieved.
[0022]
  According to the above configuration, when the tool rotated on the predetermined axis and the mold for the optical element are relatively moved along the predetermined tool path, and the tool is processed on the processing surface of the tool, the tool As a path, a moving path that starts machining, switches machining direction, and finishes machining at a position where the machining working surface of the tool does not contact the outer peripheral edge of the mold and outside the optically effective range of the mold. Therefore, without using a yatoy, it can be processed in a short time to suppress wear of the tool and prevent damage to the tool, and efficiently with the desired shape accuracy Mold can be processedIn addition, when starting machining along the tool path, switching the machining direction, and ending machining, the rotation speed of the tool is reduced compared to during machining, so machining start, machining direction switching, and machining The amount of removal of the mold by the tool at the end of the process can be reduced, preventing the optical effective area from becoming too narrow by cutting too much outside the effective area of the mold, making the mold even better Can be machined with precisionThe
[0023]
  Claim6In the processing apparatus according to the invention described above, the tool and the optical element mold are relatively moved along a predetermined tool path while rotating the tool around a predetermined axis, and the tool is operated on the processing surface of the tool. In the processing apparatus for processing a mold, as the tool path, the processing working surface of the tool is in a position where it does not contact the outer peripheral edge of the mold, and outside the optical effective range of the mold, Set the movement path for starting, switching the machining direction and ending the machiningAt the start of the machining along the tool path, the switching of the machining direction, and the end of the machining, the rotation speed of the tool is decelerated compared with that during the machining.By doing so, the above object is achieved.
[0024]
  According to the above configuration, when the tool rotated on the predetermined axis and the mold for the optical element are relatively moved along the predetermined tool path, and the tool is processed on the processing surface of the tool, the tool As a path, a moving path that starts machining, switches machining direction, and finishes machining at a position where the machining working surface of the tool does not contact the outer peripheral edge of the mold and outside the optically effective range of the mold. Therefore, without using a yatoy, it can be processed in a short time to suppress wear of the tool and prevent damage to the tool, and efficiently with the desired shape accuracy Mold can be processedIn addition, when starting machining along the tool path, switching the machining direction, and ending machining, the rotation speed of the tool is reduced compared to during machining, so machining start, machining direction switching, and machining The amount of removal of the mold by the tool at the end of the process can be reduced, preventing the optical effective area from becoming too narrow by cutting too much outside the effective area of the mold, making the mold even better Can be machined with precisionThe
[0027]
  Also, for example, the claim2 or claim 7The processing is performed by applying a predetermined load to the tool during the processing, and the load is applied when starting the processing along the tool path, switching the processing direction, and ending the processing. May be reduced as compared with the above processing.
[0028]
According to the above configuration, a predetermined load is applied to the tool at the time of machining, and the load is reduced from that at the time of machining along the tool path, switching of the machining direction, and finishing of machining. Therefore, it is possible to reduce the amount of removal of the mold by the tool at the start of machining, switching of the machining direction and at the end of machining, and the optical effective area becomes narrow due to excessive cutting outside the effective area of the mold. This can be prevented and the mold can be processed with better shape accuracy.
[0029]
  Further, for example, the claims3 or claim 8As described above, a predetermined masking may be performed outside the effective area of the mold.
[0030]
According to the above configuration, since predetermined masking is performed outside the effective range of the mold, the removal amount of the mold by the tool at the start of processing, switching of the processing direction, and the end of processing is further appropriately reduced. It is possible to further prevent the optical effective area from being narrowed by excessive cutting outside the effective area of the mold, and to process the mold with better shape accuracy.
[0031]
  Also, for example, the claim4 or claim 9As described in the above, the tool comprises an effective area tool part involved in machining of the effective area of the mold, and an unnecessary area tool part involved in machining outside the effective area of the mold, Even if the effective area tool portion is formed of a member having a predetermined sharpness suitable for processing of the effective area, and the unnecessary area tool portion is formed of a member having a predetermined amount of sharpness lower than the sharpness of the effective area tool portion. Good.
[0032]
According to the above configuration, the tool includes the effective area tool part involved in machining in the effective area of the mold and the unnecessary area tool part involved in machining outside the effective area of the mold, and the effective area tool part is effective. It is formed of a member having a predetermined sharpness suitable for processing of the region, and the unnecessary region tool part is formed of a member whose sharpness is lower than the effective region tool part by a predetermined amount. The amount of removal of the mold by the tool at the time of switching and finishing the machining can be reduced more appropriately, and the optical effective area can be further prevented from being narrowed due to excessive cutting outside the effective area of the mold. Thus, the mold can be processed with better shape accuracy.
[0033]
  Further, for example, the claims5 or claim 10As described in the above, the processing method or the processing apparatus uses loose abrasive grains as abrasive grains, and the tool includes an effective area tool portion involved in the processing of the effective area of the mold, and the mold An unnecessary area tool part involved in machining outside the effective area, and the effective area tool part is formed of a member having a fine hole or fiber capable of holding the loose abrasive grains on the surface, and the unnecessary area tool The part may be formed of a member that does not have fine holes or fibers that can hold the loose abrasive grains on the surface.
[0034]
According to the above configuration, using free abrasive grains as the abrasive grains, the tool is an effective area tool part involved in machining the effective area of the mold, and an unnecessary area tool part involved in machining outside the effective area of the mold, The effective area tool part is formed with a member having fine holes or fibers on the surface that can hold loose abrasive grains, and the unnecessary area tool part has fine holes or fibers on the surface that can hold loose abrasive grains. The amount of removal of the mold by the tool at the start of machining, switching of the machining direction and the end of machining can be reduced more appropriately, and outside the effective range of the mold. Therefore, it is possible to further prevent the effective optical range from being narrowed due to excessive cutting, and to process the mold with better shape accuracy.
[0035]
  Claim11The tool according to the invention described above is a tool for machining the mold by being relatively moved along a predetermined tool path with a mold for an optical element while being rotated about a predetermined axis, The processing start surface, the switching of the processing direction, and the end of the processing are performed at a position where the working surface of the tool is not in contact with the outer peripheral edge of the mold and outside the effective range of the mold as the optical element. An effective area tool part that is set for a movement path to be performed and is involved in machining the effective area of the mold, and an unnecessary area tool part that is involved in machining outside the effective area of the mold, and the effective area tool The part is formed of a member having a predetermined sharpness suitable for processing the effective area, and the unnecessary area tool part is sharper than the effective area tool part by a predetermined amount.ofThe object is achieved by being formed of a falling member.
[0036]
According to the above configuration, the tool working surface is used as a tool path when the mold is processed by being relatively moved along the predetermined tool path with the optical element mold while being rotated about a predetermined axis. Is not in contact with the outer peripheral edge of the mold, and outside the effective range as the optical element of the mold, a movement path for starting processing, switching the processing direction and ending the processing is set, and the mold An effective area tool part involved in machining in the effective area and an unnecessary area tool part involved in machining outside the effective area of the mold, and the effective area tool part is a member having a predetermined sharpness suitable for machining in the effective area It is formed, and the unnecessary area tool part is formed of a member that has a predetermined amount of sharpness than the effective area tool part, so that the mold at the start of machining, switching of the machining direction and the end of machining Reducing the amount of removal Can, without using the lens holder unit, while suppressing wear and damage by processing in a short time, can be processed efficiently mold a desired shape accuracy.
[0037]
  In this case, for example, the claim12As described in the above, the tool is used for processing using loose abrasive grains, and the effective area tool portion is formed of a member having fine holes or fibers capable of holding the loose abrasive grains on the surface, The unnecessary area tool part may be formed of a member in which fine holes or fibers capable of holding the loose abrasive grains do not exist on the surface.
[0038]
According to the said structure, it is used for the process which uses a loose abrasive grain, a tool is formed with the member in which the fine hole or fiber which an effective area tool part can hold | maintain a loose abrasive grain exists on the surface, and an unnecessary area tool part However, it is assumed that fine holes or fibers that can hold loose abrasive grains are formed with members that do not exist on the surface, so the amount of removal of the mold by the tool at the start of processing, switching of the processing direction, and the end of processing is reduced. It can be reduced more appropriately, and it is less likely to suffer from wear and damage without using a yatoy, further preventing the optically effective range from being narrowed by cutting too much outside the effective range of the mold. However, the mold can be processed more efficiently with a desired shape accuracy.
[0039]
  Also, for example, the claim13As described above, in the tool, the unnecessary area tool portion may be joined to both sides with the effective area tool portion as a center.
[0040]
According to the above configuration, since the tool is assumed to have the unnecessary area tool portion joined to both sides with the effective area tool portion as the center, at the start of machining, switching of the machining direction and the end of machining. The amount of removal of the mold can be reduced more appropriately, and processing in the effective range can be performed with high accuracy while suppressing wear and damage by processing in a short time without using a yatoy. At the same time, it is possible to prevent the effective optical range from being narrowed due to excessive cutting outside the effective range, and to efficiently process the mold with a desired shape accuracy.
[0041]
  Claim14The mold of the described invention is a mold for an optical element which is relatively moved along a predetermined tool path with respect to a tool rotated about a predetermined axis, and is processed on the processing surface of the tool. , The tool path is a position where the working surface of the tool does not contact the outer peripheral edge of the mold, andConcernedOutside the optical effective range of the mold, a moving path for starting the processing, switching the processing direction and ending the processing is set and processed.And masking the outside of the effective optical range of the moldThe above-mentioned purpose is achieved.
[0042]
  According to the above configuration, the tool working surface is used as the tool path when the tool is rotated relative to the tool rotated about the predetermined axis along the predetermined tool path and is machined on the tool working surface. Is in a position that does not contact the outer peripheral edge of the mold, and outside the effective optical range of the mold, it is processed by setting a movement path to start processing, change the processing direction, and end processing Therefore, it is possible to prevent wear and damage to the tool without using a yatoy and in a short time, and it is efficiently processed with the desired shape accuracy to form a highly accurate optical element. CanIn addition, the removal amount of the mold by the tool outside the optical effective range can be further reduced by masking.The
[0043]
DETAILED DESCRIPTION OF THE INVENTION
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of the invention will be described in detail with reference to the accompanying drawings. The embodiments described below are preferred embodiments of the present invention, and thus various technically preferable limitations are given. However, the scope of the present invention is particularly limited in the following description. As long as there is no description which limits, it is not restricted to these aspects.
[0044]
1 to 3 are diagrams showing a first embodiment of a processing method, a processing apparatus, a tool and a mold according to the present invention, and FIG. 1 shows a processing method, a processing apparatus, a tool and a mold according to the present invention. It is a principal part front view of the processing apparatus 10 to which 1st Embodiment of this is applied.
[0045]
In FIG. 1, the processing apparatus 10 has a tool 12 attached to the tip of a rotating shaft 11a of a motor 11, and the tool 12 is, for example, a spherical grinding wheel. The motor 11 rotationally drives the tool 12 around the rotation shaft 11a at a predetermined rotation speed.
[0046]
As the tool 12, for example, a grinding wheel using diamond abrasive grains having a particle size of # 8000 is used as a grinding wheel.
[0047]
The processing apparatus 10 processes the mold 13 with the rotating tool 12 while adjusting the relative position between the tool 12 and the mold 13 that is a processing target placed on a table (not shown).
[0048]
The mold 13 is used to produce an optical element such as a resin lens or a mirror. In general, the optical surface of the optical element has an optical effective area (optical effective area) within one plane and the outside thereof. It is designed and manufactured by setting the optically unnecessary area. This is because it is difficult to ensure the accuracy up to the contour ridge line of the optical surface when molding the resin to form the optical surface.
[0049]
Therefore, the mold 13 for producing the optical element has areas that are an optically effective area and an optically unnecessary area of the optical element. For example, in FIG. The inside of the boundary line L shown is the optically effective area Ai, and the outside of the boundary line L is the optically unnecessary area Ao.
[0050]
Next, the operation of the present embodiment will be described. When processing the mold 13 with the tool 12, the processing apparatus 10 is in a position where the processing action portion of the tool 12 does not contact the outer peripheral edge of the mold 13, and outside the optical effective area Ai, that is, In the optically unnecessary area Ao, processing is performed by starting and ending the processing of the mold 13 by the tool 12 and switching the processing direction.
That is, when the processing apparatus 10 processes the mold 13 with the tool 12, the spherical tool 12 is brought into contact with the mold 13 with the rotation shaft 11a inclined at a predetermined angle, and as shown by a broken line in FIG. The tool 12 and the mold 13 are moved relative to each other by a simple tool path 14 to process the mold 13 with the tool 12.
[0051]
As shown in FIG. 2, the tool path 14 starts machining the mold 13 with the tool 12 with the upper left position outside the boundary line L in FIG. 2 as the machining start position Ps, for example. The working direction of the mold 13 is switched by the tool 12 at the direction switching position Ph in the optically unnecessary area Ao outside the boundary line L in FIG. 2 on both sides of the mold 13.
[0052]
That is, the machining of the mold 13 by the tool 12 is started in the width direction of the mold 13 from the machining start position Ps, and the machining is performed to the direction switching position Ph that is the optical unnecessary area Ao on the right side outside the boundary line L. Then, the relative movement direction of the tool 12 and the mold 13 is changed to the vertical direction to switch the machining direction, and the relative position of the tool 12 and the mold 13 is moved in the vertical direction by a predetermined pitch. The relative movement direction of the tool 12 and the mold 13 is changed to the width direction with the position as the direction switching position Ph, and the mold 13 is processed again by the tool 12.
[0053]
When the processing apparatus 10 performs processing to the direction switching position Ph that is the optically unnecessary area Ao on the left side of the mold 13 with the tool 12, the processing apparatus 10 changes the relative movement direction of the tool 12 and the mold 13 to the vertical direction. The relative position between the tool 12 and the mold 13 is moved in the vertical direction by a predetermined pitch, and the relative movement direction of the tool 12 and the mold 13 is changed to the width direction with the position as the direction switching position Ph. Then, the mold 13 is processed again by the tool 12.
[0054]
The tool 12 and the mold 13 are moved relative to each other along the tool path 14 shown in FIG. 2, and the tool 13 is sequentially processed by the tool 12, and the relative position of the tool 12 and the mold 13 is the processing end position Po. When it reaches, the processing is finished.
[0055]
As described above, when the tool 12 moves on the machining surface of the mold 13, the tool 12 moves as a tool path 14 at a position that does not contact the outer peripheral edge of the mold 13.
[0056]
Thus, when the processing apparatus 10 of the present embodiment processes the mold 13 with the tool 12, the tool 12 is in a position where it does not contact the outer peripheral edge of the mold 13 with respect to the mold 13, and The start and end of processing of the mold 13 or the switching of the processing direction is performed in the optically unnecessary area Ao outside the optically effective area Ai.
[0057]
Therefore, as shown in FIG. 3, the mold 13 has the boundary line L as shown in FIG. 3 without forming the groove 3 in the vicinity of the boundary line L, unlike the mold 1 processed by the conventional processing apparatus shown in FIG. As a result, a smooth processed surface can be formed with high accuracy from the optically effective area Ai to the optically unnecessary area Ao.
[0058]
Then, when processing the mold 13, the processing apparatus 10 sets the rotational speed of the tool 12 to the optimum rotational speed for obtaining the desired optical accuracy in the optical effective area Ai, for example, the optical effective area Ai. It may be controlled to 2500 rpm, and in the optically unnecessary area Ao, the relationship of the removal depth with respect to the rotational speed may be controlled to the rotational speed obtained by experiment, for example, 300 rpm.
[0059]
The rotation speed of the tool 12 is suddenly switched from the rotation speed of the optical effective area Ai to the rotation speed of the optical unnecessary area Ao when the tool 12 moves from the optical effective area Ai to the optical unnecessary area Ao. Therefore, after the tool 12 moves from the optically effective area Ai to the optically unnecessary area Ao, or before the tool 12 moves from the optically unnecessary area Ao to the optically effective area Ai, the optically unnecessary area Ao. The transition is made quickly and continuously. The rotation speed of the tool 12 may be switched at the machining start position Ps, the direction switching position Ph, and the machining end position Po.
[0060]
In this way, the amount of removal of the mold 13 by the tool 12 at the start of machining, switching of the machining direction and the end of machining can be reduced, and the mold 13 is cut too much in the optically unnecessary area Ao. It is possible to prevent the optically effective area Ai from being narrowed and to process the mold 13 with better shape accuracy.
[0061]
Further, when the spherical tool 12 as in the present embodiment is used as the tool 12 and the rotary shaft 11a that is the tool axis is inclined at a predetermined angle as shown in FIG. The convergence of the part involved in processing the left region of 1 is greater than the convergence of the part involved in processing the right region.
[0062]
Therefore, if the rotational speed of the tool 12 is controlled so that the convergence difference of the part related to the machining of the tool 12 does not occur on the entire surface of the mold 13, the mold 13 is machined with higher accuracy. be able to.
[0063]
In this case, for example, if the rotational speed when machining the right optical unnecessary area Ao is set slightly faster than the rotational speed of the tool 12 when machining the left optical unnecessary area Ao in FIG. Thus, the influence of the convergence difference of the tool 12 used can be suppressed.
[0064]
Further, in the processing of the mold 13, the processing apparatus 10 may perform processing by applying a predetermined load to the tool 12 in the vertical direction by a load applying mechanism (not shown).
[0065]
In this case, in the optical effective area Ai, the load application mechanism controls the optical effective area Ai to an optimum load for obtaining a desired processing accuracy, for example, 100 gf. In the optical unnecessary area Ao, The relationship of the removal depth is controlled to a load obtained by experiment, for example, 50 gf.
[0066]
As a method for setting the load, for example, it is possible to set using a generally known Preston rule of thumb. Preston's rule of thumb is that the polishing amount h is calculated by the following equation (1) from a constant p due to a metal material or a tool, a polishing pressure v, a relative speed between the mold 13 and the tool 12, and a polishing time (number of polishings). .
[0067]
h = k × p × v × t (1)
The load switching may be performed on the boundary line L.
[0068]
In this way, the load application mechanism controls the optical effective area Ai to an optimum load for obtaining a desired processing accuracy in the optical effective area Ai, and the relationship between the removal depth and the load in the optical unnecessary area Ao. When the mold 13 is processed by controlling the load obtained in the experiment, the mold 13 is grooved in the vicinity of the boundary line L like the mold 1 processed by the conventional processing apparatus shown in FIG. As shown in FIG. 3, a smoother machining surface can be formed with high accuracy from the optically effective area Ai to the optically unnecessary area Ao with the boundary line L interposed therebetween, as shown in FIG.
[0069]
Further, when processing the mold 13 with the processing apparatus 10, a predetermined area of the optically unnecessary area Ao, for example, masking all areas of the optically unnecessary area Ao with the boundary line L as a boundary, or Of the unnecessary optical area Ao, the outer optical unnecessary area Ao may be masked with a predetermined magic ink at the processing start position Ps, the direction switching position Ph, and the processing end position Po.
[0070]
As the magic ink, it is possible to appropriately use the magic ink as long as it reduces the amount of processing by the tool 12 of the mold 13 and can be easily removed after the processing without adversely affecting the processing in the optical effective area Ai. it can.
[0071]
By masking the optically unnecessary area Ao with magic ink in this way, the removal amount of the mold 13 by the tool 12 in the optically unnecessary area Ao can be further reduced, and the mold 13 is shown in FIG. Unlike the mold 1 processed by the conventional processing apparatus shown, the groove 3 is not formed in the vicinity of the boundary line L, and as shown in FIG. Therefore, a smoother processed surface can be formed with high accuracy by the optically unnecessary area Ao.
[0072]
Note that the control of the rotational speed of the tool 12, the addition of a load to the tool 12, and the masking of the optically unnecessary area Ao with magic ink may be performed in combination of two methods or all methods.
[0073]
<Experimental example 1>
The mold 13 was ground using the same processing apparatus 10 as in the first embodiment. As the tool 12, a spherical grinding wheel was used, and a grinding wheel using diamond abrasive grains having a particle size of # 8000 was used.
[0074]
Using this tool 12, the rotating shaft 11a of the motor 11 (the rotating shaft of the tool 12) is inclined by a predetermined angle, and the tool 13 and the tool 13 are moved relative to each other by the tool path 14 as shown in FIG. It was moved and ground. At this time, the rotation speed of the tool 12 was set to 2500 rpm in the optically effective area Ai, and 300 rpm in the optically unnecessary area Ao. The rotation speed of the tool 12 was continuously switched at the machining start position Ps, the direction switching position Ph, and the machining end position Po.
[0075]
As a result of this experiment, the mold 13 is moved from the optically effective area Ai to the optically unnecessary area Ao without using a yatoy and without forming a groove near the boundary line L as shown in FIG. And smooth high-precision grinding.
[0076]
<Experimental example 2>
The mold 13 was ground using the same processing apparatus 10 as in the first embodiment. As the tool 12, spherical foamed polyurethane capable of holding free abrasive grains was used, and as the abrasive grains, fine diamond powder having a particle size of 2 μm or less, which was free abrasive grains, was used.
[0077]
Using this tool 12, the rotating shaft 11a of the motor 11 (the rotating shaft of the tool 12) is inclined by a predetermined angle, and the tool 13 and the tool 13 are moved relative to each other by the tool path 14 as shown in FIG. It was moved and ground.
[0078]
At this time, a predetermined load was applied to the tool 12 in the vertical direction by the load applying mechanism to the tool 12 for processing.
[0079]
As the load to be added, in the optical effective area Ai, 100 gf is added as the optimum load for obtaining the desired processing accuracy in the optical effective area Ai, and in the optical unnecessary area Ao, in particular, the processing start position. At Ps, the direction switching position Ph, and the machining end position Po, 50 gf, which is the load obtained by the above equation (1), was added.
[0080]
As a result of this experiment, the mold 13 is moved from the optically effective area Ai to the optically unnecessary area Ao without using a yatoy and without forming a groove near the boundary line L as shown in FIG. And smooth high-precision grinding.
[0081]
<Experimental example 3>
The mold 13 was ground using the same processing apparatus 10 as in the first embodiment. As the tool 12, spherical foamed polyurethane capable of holding free abrasive grains was used, and as the abrasive grains, fine diamond powder having a particle size of 1 μm or less, which was free abrasive grains, was used.
[0082]
Further, all the areas of the optically unnecessary area Ao with the boundary line L of the mold 13 to be ground as a boundary were masked with the magic ink.
[0083]
Then, the tool 13 is used to incline the rotating shaft 11a of the motor 11 (the rotating shaft of the tool 12) by a predetermined angle, and the mold 13 masked with the above magic ink is passed through the tool path 14 as shown in FIG. And the mold 13 were moved relative to each other for grinding. With the magic ink, the removal amount of the mold 13 by the tool 12 in the optically unnecessary area Ao could be reduced.
[0084]
As a result of this experiment, the mold 13 is moved from the optically effective area Ai to the optically unnecessary area Ao without using a yatoy and without forming a groove near the boundary line L as shown in FIG. And smooth high-precision grinding.
[0085]
FIG. 4 is a diagram showing a second embodiment of the processing method, processing apparatus, tool and mold of the present invention, and FIG. 2 shows the second embodiment of the processing method, processing apparatus, tool and mold of the present invention. It is a principal part front view of the processing apparatus 20 to which this embodiment is applied.
[0086]
In FIG. 4, the processing apparatus 20 has a tool 22 attached to the tip of a rotating shaft 21a of a motor 21, and the tool 22 is, for example, a tire-shaped grinding wheel. The motor 21 rotates the tool 22 around the rotation shaft 21a at a predetermined rotation speed. Note that the tool 22 is not limited to a tie or shape, and may be spherical, for example.
[0087]
The processing apparatus 20 adjusts the relative position between the tool 22 and the mold 13 similar to that of the first embodiment, which is a processing target placed on a table (not shown), and the mold 13 by the rotating tool 22. Is processed.
[0088]
As in the first embodiment, the mold 13 is used as a mold for manufacturing an optical element such as a resin lens or a mirror, and as shown in FIG. An optically unnecessary area Ao exists, and the boundary thereof is a boundary line L.
[0089]
The tool 22 is disposed such that the rotating shaft 21a of the motor 21 as the tool axis is substantially parallel to the machining surface of the mold 13. In this state, the tool 22 is The effective area tool portion 22a involved in machining in the optically effective area Ai of the above and the unnecessary area tool portion 22b involved in machining in the optically unnecessary area Ao of the mold 13 are included.
[0090]
The tool 22 has an effective area tool portion 22a having a sharpness grindstone suitable for polishing the optical effective area Ai. For example, the concentration of abrasive grains is 100 (the volume ratio of the abrasive grains is 25 vol%). A whetstone that is formed of a grindstone and whose unnecessary area tool portion 22b has a predetermined amount of sharpness lower than the sharpness of the effective area tool portion 22a, for example, the concentration of abrasive grains is 20 (the volume ratio of the abrasive grains is 5 vol%) It is formed with a whetstone. The tool 22 is formed in a state where the unnecessary area tool portion 22b is joined to both sides of the effective area tool portion 22a with the effective area tool portion 22a in the middle.
[0091]
The tool 22 aligns the joining position of the effective area tool part 22a and the unnecessary area tool part 22b with the position where the optical unnecessary area Ao of the mold 13 and the unnecessary area tool part 22b of the tool 22 coincide, that is, the boundary line L. It is set at a position that matches. In addition, the joining position of the effective area tool part 22a and the unnecessary area tool part 22b is not limited to the position set to the boundary line L, and may be changed as appropriate.
[0092]
Next, the operation of the present embodiment will be described. As in the first embodiment, the processing apparatus 20 is a position where the tool 22 does not contact the outer peripheral edge of the mold 13 and is optically effective when the tool 13 is processed with the tool 22. Processing is performed outside the area Ai, that is, in the optically unnecessary area Ao, by starting and ending the processing of the mold 13 by the tool 22 or switching the processing direction.
That is, when processing the mold 13 with the tool 22, the processing apparatus 20 brings the tire-shaped tool 22 into contact with the mold 13 with the rotating shaft 11 a being substantially parallel to the processing surface of the mold 13. The tool 22 and the mold 13 are moved relative to each other in the surface direction (perpendicular to the circumferential direction) of the tire-shaped tool 22 by the tool path 14 as shown by a broken line in FIG. Process.
[0093]
Specifically, the machining of the mold 13 by the tool 22 is started in the width direction of the mold 13 from the machining start position Ps, and the direction switching position Ph that is the optical unnecessary area Ao on the right side outside the boundary line L. When the machining is performed, the relative movement direction of the tool 22 and the mold 13 is changed to the vertical direction to switch the machining direction, and the relative position of the tool 22 and the mold 13 is moved in the vertical direction by a predetermined pitch. Then, the relative movement direction of the tool 22 and the mold 13 is changed to the width direction with the position as the direction switching position Ph, and the mold 13 is processed again by the tool 22.
[0094]
When the tool 22 performs processing up to the direction switching position Ph that is the optically unnecessary area Ao on the left side of the mold 13, the relative movement direction of the tool 22 and the mold 13 is changed to the vertical direction to switch the processing direction. When the relative position of the tool 22 and the mold 13 is moved in the vertical direction by a predetermined pitch, the relative movement direction of the tool 22 and the mold 13 is changed to the width direction with the position as the direction switching position Ph, and again. Then, the mold 13 is processed by the tool 22.
[0095]
The relative movement of the tool 22 and the mold 13 is performed along the tool path 14 shown in FIG. 2, and the mold 13 is sequentially processed by the tool 22, and the relative position of the tool 22 and the mold 13 is the processing end position. When it reaches Po, the processing is finished.
[0096]
As described above, the tool 22 is formed in a state in which the unnecessary area tool portion 22b is joined to both sides of the effective area tool portion 22a with the effective area tool portion 22a in the middle. The portion 22a is formed of a sharp grindstone suitable for polishing the optical effective area Ai, for example, a grindstone having a concentration of abrasive grains of 100, and the unnecessary area tool section 22b is an effective area tool section. A grindstone whose sharpness falls by a predetermined amount from the sharpness of 22a, for example, a grindstone having an abrasive concentration of 20, is formed. Further, the tool 22 moves as a tool path 14 at a position where the tool 22 does not come into contact with the outer peripheral edge of the mold 13 when moving the machining surface of the mold 13.
[0097]
Therefore, the mold 13 has the boundary line as shown in FIG. 3 without forming the groove 3 in the vicinity of the boundary line L like the mold 1 processed by the conventional processing apparatus shown in FIG. A smooth machining surface can be formed with high accuracy from the optically effective area Ai to the optically unnecessary area Ao across L, and the removal amount of processing of the optically unnecessary area Ao can be further reduced. .
[0098]
In the present embodiment, the tool 22 is not limited to the above-described diamond abrasive wheel. For example, the effective area tool portion 22a is formed of foamed polyurethane capable of holding loose abrasive grains, and an unnecessary area tool is used. The part 22b is made of non-foamed polyurethane that does not hold loose abrasive grains, and the effective area tool part 22a and the unnecessary area tool part 22b are joined. As the abrasive grains, for example, diamond powder having a particle diameter of 2 μm or less is used. May be used.
[0099]
<Experimental example 4>
The mold 13 was ground using the same processing apparatus 20 as in the second embodiment. As the tool 22, a tire-shaped grinding wheel is used. As the grinding wheel, diamond abrasive grains having a particle size of # 8000 are used, and the effective area tool portion 22 a is a grindstone having a concentration of abrasive grains of 100. A grindstone having a concentration of abrasive grains 20 of 22b was used.
[0100]
Using this tool 22, the rotating shaft 11a of the motor 11 is made substantially parallel to the machining surface of the mold 13, and the tool 13 and the mold 13 are relatively moved by the tool path 14 as shown in FIG. The grinding process was performed.
[0101]
As a result of this experiment, the amount of removal of the mold 13 by the tool 22 in the optically unnecessary area Ao can be reduced, and the mold 13 can be connected to the boundary line as shown in FIG. A smooth and highly accurate grinding process from the optically effective area Ai to the optically unnecessary area Ao could be performed without forming a groove in the vicinity of L.
[0102]
<Experimental example 5>
The mold 13 was ground using the same processing apparatus 20 as in the second embodiment. As the tool 22, a tire-shaped tool is used, the effective area tool part 22 a is formed of foamed polyurethane, the unnecessary area tool part 22 b is formed of non-foamed polyurethane, and the diamond powder has a particle size of 2 μm or less as abrasive grains. May be used.
[0103]
Using this tool 22, the rotating shaft 11a of the motor 11 (the rotating shaft of the tool 12) is made substantially parallel to the machining surface of the mold 13, and the tool 13 is moved along the tool path 14 as shown in FIG. And the mold 13 were moved relative to each other for grinding.
[0104]
As a result of this experiment, the amount of removal of the mold 13 by the tool 22 in the optically unnecessary area Ao can be reduced, and the mold 13 can be connected to the boundary line as shown in FIG. A smooth and highly accurate grinding process from the optically effective area Ai to the optically unnecessary area Ao could be performed without forming a groove in the vicinity of L.
[0105]
The invention made by the present inventor has been specifically described based on the preferred embodiments. However, the present invention is not limited to the above, and various modifications can be made without departing from the scope of the invention. Needless to say.
[0106]
【The invention's effect】
  According to the processing method of the first aspect of the present invention, the tool rotated about a predetermined axis and the optical element mold are relatively moved along a predetermined tool path, and the tool working surface of the tool is moved. When machining the mold, as a tool path, the machining working surface of the tool is not in contact with the outer peripheral edge of the mold, and outside the optically effective range of the mold, the machining start, the switching of the machining direction and Since the movement path to finish machining is set, machining can be performed in a short time without using a yatoy to suppress wear of the tool, and damage to the tool can be prevented. The mold can be processed efficiently with the accuracy of the shape.In addition, when starting machining along the tool path, switching the machining direction, and ending the machining, the rotation speed of the tool is reduced compared to during machining, so the machining starts, the machining direction changes, and the machining ends. The amount of removal of the mold by the tool at the time of cutting can be reduced, and the optical effective area is prevented from being narrowed by cutting too much outside the effective area of the mold, so that the mold has better shape accuracy. Can be processed.
[0107]
  Claim6According to the processing apparatus of the described invention, a tool rotated about a predetermined axis and a mold for an optical element are relatively moved along a predetermined tool path, and the mold is processed on the processing surface of the tool. As a tool path, machining start, machining direction switching, and machining end are performed at a position where the working surface of the tool does not contact the outer peripheral edge of the mold and outside the optically effective range of the mold. Since the movement route is set, it is possible to process the tool in a short time without using a yatoy, to suppress wear of the tool, and to prevent damage to the tool. Can efficiently process the mold.In addition, when starting machining along the tool path, switching the machining direction, and ending the machining, the rotation speed of the tool is reduced compared to during machining, so the machining starts, the machining direction changes, and the machining ends. The amount of removal of the mold by the tool at the time of cutting can be reduced, and the optical effective area is prevented from being narrowed by cutting too much outside the effective area of the mold, so that the mold has better shape accuracy. Can be processed.
[0109]
  Claim2 or claim 7According to the processing method or the processing apparatus of the described invention, processing is performed by applying a predetermined load to the tool during processing, and the load is applied at the start of processing along the tool path, switching of the processing direction, and end of processing. Since the amount is reduced compared to the time of machining, the amount of removal of the mold by the tool at the start of machining, switching of the machining direction and the end of machining can be reduced, and optical by cutting too much outside the effective range of the mold The effective area can be prevented from becoming narrow, and the mold can be processed with better shape accuracy.
[0110]
  Claim3 or claim 8According to the processing method or the processing apparatus of the described invention, since predetermined masking is performed outside the effective range of the mold, the removal amount of the mold by the tool at the start of processing, switching of the processing direction, and the end of processing The mold can be processed with better shape accuracy by further preventing the optically effective range from becoming too narrow due to excessive cutting outside the effective range of the mold. Can do.
[0111]
  Claim4 or claim 9According to the machining method or the machining apparatus of the described invention, the tool includes an effective area tool part involved in machining the effective area of the mold and an unnecessary area tool part involved in machining outside the effective area of the mold. The effective area tool part is formed of a member having a predetermined sharpness suitable for processing in the effective area, and the unnecessary area tool part is formed of a member having a predetermined amount of sharpness lower than that of the effective area tool part. The amount of removal of the mold by the tool at the start of machining, switching of the machining direction and the end of machining can be reduced more appropriately, and the optical effective area can be increased by cutting too much outside the effective area of the mold. Narrowing can be further prevented, and the mold can be processed with better shape accuracy.
[0112]
  Claim5 or claim 10According to the processing method or the processing apparatus of the described invention, the loose abrasive is used as the abrasive, and the tool is used for the effective area tool part involved in the processing of the effective area of the mold and the processing outside the effective area of the mold. And an unnecessary area tool part that is involved, and the effective area tool part is formed of a member having a fine hole or fiber that can hold loose abrasive grains on the surface, and the unnecessary area tool part is fine enough to hold loose abrasive grains. Since the hole or fiber is formed of a member that does not exist on the surface, the amount of mold removal by the tool at the start of processing, switching of the processing direction, and the end of processing can be further reduced appropriately. Further, it is possible to further prevent the optical effective area from being narrowed by excessive cutting outside the effective area of the mold, and to process the mold with better shape accuracy.
[0113]
  Claim11According to the tool of the invention described in the above, when the mold is processed by being relatively moved along the predetermined tool path with the optical element mold while being rotated around a predetermined axis, A movement path for starting the processing, switching the processing direction and ending the processing is set at a position where the processing surface does not contact the outer peripheral edge of the mold and outside the effective range as the optical element of the mold, Equipped with an effective area tool part involved in machining the effective area of the mold and an unnecessary area tool part involved in machining outside the effective area of the mold, the effective area tool part having a predetermined sharpness suitable for machining in the effective area The unnecessary area tool part is sharper than the effective area tool part by a predetermined amount.ofSince it is formed of falling members, the amount of mold removal at the start of processing, switching of the processing direction, and the end of processing can be reduced, and processing can be performed in a short time without using a yatoy. Thus, the mold can be efficiently processed with desired shape accuracy while suppressing wear and damage.
[0114]
  Claim12According to the described tool, it is used for processing using loose abrasive grains, and the tool is formed by a member having an effective area tool portion on which a fine hole or fiber capable of holding loose abrasive grains is present on the surface. Since the part is formed of a member that does not have fine holes or fibers that can hold loose abrasive grains on the surface, the amount of mold removed by the tool at the start of processing, switching of the processing direction, and the end of processing Can be reduced more appropriately, without using a yatoy, it is less likely to suffer wear and damage, and it is further prevented that the optical effective range becomes narrow due to excessive cutting outside the effective range of the mold. However, the mold can be processed more efficiently with a desired shape accuracy.
[0115]
  Claim13According to the described tool, since the tool is assumed to be joined to the both sides of the tool with the effective area tool part at the center, at the time of starting machining, switching the machining direction and ending the machining. The amount of removal of molds can be reduced more appropriately, and processing in the effective range can be performed with high accuracy while processing in a short time and suppressing wear and damage without using a yatoy In addition, it is possible to prevent the effective optical range from being narrowed due to excessive cutting outside the effective range, and to efficiently process the mold with a desired shape accuracy.
[0116]
  Claim14According to the mold of the described invention, the tool path is used as the tool path when the tool is rotated relative to the tool rotated about the predetermined axis along the predetermined tool path and is processed on the processing surface of the tool. Set the movement path to start machining, switch machining direction, and finish machining outside the mold's optical effective range, where the working surface is not in contact with the outer peripheral edge of the mold. Since it is processed, it is possible to prevent wear and damage to the tool without using a yatoy and in a short time, and it is efficiently processed with the desired shape accuracy and high accuracy. An optical element can be molded.Moreover, since the masking is applied outside the effective area of the mold, the amount of removal of the mold by the tool at the start of machining, switching of the machining direction, and the end of machining can be reduced more appropriately. It is possible to further prevent the optical effective area from being narrowed by cutting too much outside the effective area, and to process the mold with a better shape accuracy.
[Brief description of the drawings]
FIG. 1 is a front view of a main part of a processing apparatus to which a first embodiment of a processing method, a processing apparatus, a tool, and a mold according to the present invention is applied.
2 is a plan view of a mold showing a tool path, an optically effective area, and an optically unnecessary area of the tool of FIG. 1; FIG.
FIG. 3 is a front cross-sectional view of a mold ground by the processing apparatus of FIG. 1;
FIG. 4 is a front view of an essential part of a machining apparatus to which a second embodiment of a machining method, a machining apparatus, a tool, and a mold according to the present invention is applied.
FIG. 5 is a front sectional view of a mold polished by a conventional processing apparatus.
[Explanation of symbols]
10 Processing equipment
11 Motor
11a Rotating shaft
12 tools
13 Mold
14 Toolpath
Ai Optical effective range
Ao Optically unnecessary area
Ps processing start position
Ph direction switching position
Po Machining end position
20 Processing equipment
21 Motor
21a Rotating shaft
22 tools
22a Effective area tool part
22b Unnecessary area tool part

Claims (14)

In the processing method of processing the mold on the processing surface of the tool by relatively moving the tool and the optical element mold along a predetermined tool path while rotating the tool about a predetermined axis, As a tool path, the machining operation surface of the tool is not in contact with the outer peripheral edge of the mold, and outside the optically effective range of the mold, the machining start, the machining direction switching, and the machining are performed. The movement path for ending the machining is set, and at the start of the machining along the tool path, switching of the machining direction, and completion of the machining, the rotational speed of the tool is decelerated compared with that during the machining. A characteristic processing method. The machining is performed by applying a predetermined load to the tool during the machining, and the load is set to be greater than that during the machining when starting the machining along the tool path, switching the machining direction, and ending the machining. The processing method according to claim 1, wherein the processing method is reduced . 3. The processing method according to claim 1, wherein predetermined masking is performed outside the effective area of the mold . The tool comprises an effective area tool part involved in machining the effective area of the mold, and an unnecessary area tool part involved in machining outside the effective area of the mold, the effective area tool part being the It is formed of a member having a predetermined sharpness suitable for processing in an effective area, and the unnecessary area tool part is formed of a member whose sharpness falls by a predetermined amount from the sharpness of the effective area tool part. The processing method according to any one of claims 1 to 3 . Using free abrasive grains as abrasive grains, the tool is an effective area tool part involved in the processing of the effective area of the mold, and an unnecessary area tool part involved in processing outside the effective area of the mold, The effective area tool portion is formed of a member having a fine hole or fiber capable of holding the loose abrasive grains on the surface thereof, and the fine hole or fiber capable of holding the loose abrasive grain is formed by the unnecessary area tool portion. The processing method according to claim 1, wherein the processing method is formed of a member that does not exist on the surface . In a processing apparatus that rotates the tool about a predetermined axis and relatively moves the tool and the optical element mold along a predetermined tool path, and processes the mold on the processing surface of the tool, As the tool path, the machining operation surface of the tool is in a position where it does not contact the outer peripheral edge of the mold, and outside the optically effective range of the mold, the start of machining, switching of the machining direction, and the Set a movement path for finishing machining, and reduce the rotation speed of the tool compared to the time of machining when starting the machining along the tool path, switching the machining direction, and finishing the machining. A processing device characterized by The machining is performed by applying a predetermined load to the tool during the machining, and the load is set to be greater than that during the machining when starting the machining along the tool path, switching the machining direction, and ending the machining. The processing device according to claim 6, wherein the processing device is reduced . 8. The processing apparatus according to claim 6, wherein predetermined masking is performed outside the effective area of the mold . The tool comprises an effective area tool part involved in machining the effective area of the mold, and an unnecessary area tool part involved in machining outside the effective area of the mold, the effective area tool part being the It is formed of a member having a predetermined sharpness suitable for processing in an effective area, and the unnecessary area tool portion is formed of a member whose sharpness falls by a predetermined amount from the sharpness of the effective area tool portion. The processing apparatus according to any one of claims 6 to 8 . Using free abrasive grains as abrasive grains, the tool is an effective area tool part involved in the processing of the effective area of the mold, and an unnecessary area tool part involved in processing outside the effective area of the mold, The effective area tool part is formed of a member having a fine hole or fiber that can hold the loose abrasive grains on the surface, and the unnecessary hole tool part is a fine hole or fiber that can hold the loose abrasive grain. The processing apparatus according to claim 6, wherein the processing apparatus is formed of a member that does not exist on the surface . While being rotated about the predetermined axis so as to be relatively moved along the mold and the predetermined tools Rupasu for an optical element, in a tool for machining the mold, as the tool path, machining the working surface of the tool is the A position that does not contact the outer peripheral edge of the mold, and outside the effective range of the mold as the optical element, a movement path for starting the processing, switching the processing direction, and ending the processing is set. An effective area tool part involved in machining the effective area of the mold and an unnecessary area tool part involved in machining outside the effective area of the mold, the effective area tool part machining the effective area A tool characterized in that it is formed of a member having a predetermined sharpness suitable for the above-mentioned, and the unnecessary area tool portion is formed of a member having a predetermined amount of sharpness lower than that of the effective area tool portion . The tool is used for processing using loose abrasive grains, the effective area tool portion is formed of a member having a fine hole or a fiber on the surface capable of holding the loose abrasive grains, and the unnecessary area tool portion is The tool according to claim 11, wherein a fine hole or fiber capable of holding loose abrasive grains is formed of a member having no surface. The tool according to claim 11 or 12, wherein the tool has the unnecessary area tool portion joined to both sides with the effective area tool portion as a center. In a mold for an optical element that is moved relative to a tool rotated about a predetermined axis along a predetermined tool path and processed on the processing surface of the tool, the tool path is the tool. The movement path for starting the machining, switching the machining direction, and ending the machining outside the optically effective range of the mold, where the machining working surface is not in contact with the outer peripheral edge of the mold. Is set and processed, and the die is masked outside the optically effective range of the die.

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