JP3907121B2 - X-ray analyzer and passage device for X-ray analyzer - Google Patents

Description

  The present invention relates to a passage device that forms a passage on an X-ray optical path of an X-ray analyzer. The present invention also relates to an X-ray analyzer configured using the passage device.

  Conventionally, X-ray analyzers such as an X-ray diffractometer, a fluorescent X-ray apparatus, and an X-ray small angle measuring apparatus are known as apparatuses for analyzing unknown samples. In this X-ray analyzer, X-rays emitted from a sample when the sample is irradiated with X-rays generated from an X-ray source, such as diffracted X-rays, scattered X-rays, fluorescent X-rays, reflected X-rays, etc. Detect with a detector. In this X-ray analyzer, various X-ray optical elements including an X-ray source, a sample, and an X-ray detector are disposed on an X-ray optical path from the X-ray source to the X-ray detector.

  In this X-ray analyzer, it may be necessary to change the X-ray optical path to an atmosphere different from the air atmosphere. In order to prevent the attenuation of the X-ray intensity by air, the X-ray optical path is maintained in a vacuum or in a helium gas atmosphere. Thus, the device used to make the X-ray optical path different from the atmosphere is the passage device. This passage device is configured, for example, by covering the X-ray optical path using a bellows, that is, a bellows-shaped member (see, for example, Patent Document 1 and Patent Document 2).

  Moreover, in the X-ray analyzer, with respect to various X-ray optical elements disposed on the X-ray optical path, the distance between adjacent ones may be changed in order to satisfy optical conditions. is there. When the distance between the pair of X-ray optical elements is changed in this way, when the passage device is disposed between the X-ray optical elements, the passage device is accompanied by a change in the distance between the X-ray optical elements. The length of must be changed as well. In Patent Document 1 and Patent Document 2 described above, the length of the passage device is adjusted by following the change in the distance between the X-ray optical elements by configuring the passage device using a bellows that can be expanded and contracted. I am doing so. In addition, in the X-ray analyzer disclosed in Patent Document 1, a technique is disclosed in which a bellows is expanded and contracted by translating a secondary unit that supports the bellows using a screw shaft.

JP-A-8-313459 (page 3, FIG. 1) Japanese Patent Laid-Open No. 11-94770 (page 3, FIG. 1)

  However, in the X-ray analysis apparatus disclosed in Patent Document 1, only one screw shaft for driving the secondary unit is provided. For this reason, it has been difficult to accurately expand and contract the bellows within a minute size range. That is, it is difficult to finely adjust the length of the passage device. In particular, it was very difficult to manually adjust the length of the passage device.

  The present invention has been made in view of the above-described problems, and is capable of precisely adjusting the length of the passage device provided between the X-ray optical elements constituting the X-ray analyzer with a simple operation. The purpose is to do.

In order to achieve the above object, an X-ray analyzer according to the present invention detects an X-ray emitted from a sample by an X-ray detection means when the sample is irradiated with X-rays generated from an X-ray source. In the analyzer, a pair of support members disposed at different positions on the X-ray optical path from the X-ray source to the X-ray detection means, and all or part of the X-ray optical path supported by these support members A covering member for forming an atmosphere different from the air atmosphere, and one end portion of the covering member provided between the pair of supporting members around the covering member can be rotated to one of the pair of supporting members. and other end is supported so as not to axially move fits the other in the axially movable screw of the pair of support members, and a plurality of screw shafts which are arranged substantially parallel to the X-ray path , Provided between the plurality of screw shafts, And having a rotation transmission means for rotating synchronously those of the screw shaft together.

  Here, the screw fitting is a relationship in which the screw shaft and the support member are fitted with each other by a male screw and a female screw, and when one is turned, the other is linearly moved.

  The X-ray analyzer in the present invention is not limited to a specific type. For example, there are an X-ray small angle measuring device, an X-ray diffractometer, a fluorescent X-ray device, a micro X-ray diffractometer, and any other X-ray analyzer. These X-ray analyzers can be applied to an apparatus in which the distance between the optical elements needs to be changed in a state where the X-ray optical path is maintained in an atmosphere different from the air atmosphere.

  According to the X-ray analyzer configured as described above, the support member and the screw shaft are screw-fitted. Thereby, the distance between the support members, that is, the length of the passage device can be adjusted by a simple operation of simply rotating the screw shaft. Further, by providing a plurality of screw shafts, it is possible to prevent the support member from being inclined with respect to the screw shaft. Therefore, the movement of the support member becomes smooth, and precise length adjustment can be performed.

  In the X-ray analyzer of the present invention, the covering member is preferably a bellows. The bellows is a so-called bellows-shaped member, and for example, a metal bellows, a welded bellows, or the like can be considered. The bellows which is a covering member expands and contracts only in the moving direction of the support member, and does not twist or expand in other directions. Therefore, the covering member can be accurately expanded and contracted. In addition, when a rubber film or the like other than the bellows is used for the covering member, a force that hinders the expansion and contraction of the covering member may occur due to elastic deformation. In contrast, in many cases, the bellows can expand and contract without being elastically deformed, and therefore, a large force is not required for adjusting the length of the passage device as compared with other covering members.

  In the X-ray analyzer of the present invention, it is desirable that a rotation transmission means is provided between the plurality of screw shafts. According to this configuration, the movement of each of the plurality of screw shafts can be synchronized by operating one screw shaft. Thereby, the position of the support member can be finely adjusted, that is, the length of the passage device can be finely adjusted.

  It is desirable that the X-ray analysis apparatus provided with the rotation transmitting means has an operation input member that rotates one of the plurality of screw shafts. For example, a knob or a lever may be used as the operation input member. By having the operation input unit, the screw shaft can be easily rotated manually. Moreover, you may rotate using a motor. Therefore, the length of the passage device can be easily adjusted manually or electrically.

  In the above X-ray analysis apparatus using an operation input member, it is desirable that the operation input member is detachable from the screw shaft. Thereby, the operation input part can be removed except when adjusting the length of the passage device. Therefore, it is possible to avoid troubles such as the length of the passage device being accidentally changed due to a disturbance such as touching the operation input unit during operation of the X-ray analyzer.

  The X-ray analyzer of the present invention preferably has a holding member provided on at least one of the plurality of screw shafts, and the holding member preferably holds the covering member. When the inside of the covering member is not decompressed to a vacuum state, the covering member may be loosened by its own weight. On the other hand, if the covering member is held by the holding member provided on the screw shaft, the covering member can be prevented from loosening, and the X-ray optical path can always be secured.

  In the X-ray analysis apparatus of the present invention, the pair of support members, the covering member, and the plurality of screw shafts are configured as one unit, and it is desirable that this unit is detachable from the X-ray optical path. . The place where the distance between the X-ray optical elements should be changed on the X-ray optical path differs depending on the use conditions of the X-ray analyzer, the type of X-ray used, and the like. By making the unit detachable, the unit can be installed at an arbitrary position on the X-ray optical path. That is, the distance between the X-ray optical elements at arbitrary positions on the X-ray optical path can be changed.

Next, an X-ray analyzer according to the present invention detects an X-ray emitted from a sample by X-ray detection means when the sample is irradiated with X-rays generated from an X-ray source. And a pair of support members disposed at different positions on the X-ray optical path from the X-ray source to the X-ray detection means, and the entire X-ray optical path supported by these support members. Alternatively, a covering member that is disposed so as to surround a part and that forms an atmosphere different from the air atmosphere, and is provided between the pair of supporting members around the covering member , and one end portion of one of the pair of supporting members is provided. a plurality of the other end portion is rotatably and supported so as not to axially move is arranged substantially parallel to the axially movable screw fitting pre Symbol X-ray path to the other of said pair of support members and the screw shaft, set between the plurality of screw shaft Is characterized by having a rotation transmitting means for rotating synchronously those of the screw shaft to each other.

  According to this X-ray analyzer passage device, the support member and the screw shaft are screw-fitted. Thereby, the distance between the support members, that is, the length of the passage device can be adjusted by a simple operation of simply rotating the screw shaft. Further, by providing a plurality of screw shafts, it is possible to prevent the support member from being inclined with respect to the screw shaft. Therefore, the support member is smoothly moved.

  The passage device for an X-ray analyzer of the present invention preferably includes a gantry that supports the pair of support members, and the gantry can be adjusted in height. According to this configuration, the position of the X-ray optical path of the passage device and the position of the X-ray optical path of the X-ray analyzer can be accurately matched. In addition, in a plurality of X-ray analyzers, fine adjustment of the installation position when the passage device is shared can be easily performed.

  In the X-ray analyzer passage device of the present invention, it is desirable to provide a handle on one or both of the support members. According to this configuration, it is possible to easily attach and detach the passage device to / from the X-ray analyzer.

  As described above, according to the X-ray analyzer and the X-ray analyzer passage device according to the present invention, the support member and the screw shaft are screw-fitted. Thereby, the distance between the support members, that is, the length of the passage device can be adjusted by a simple operation of simply rotating the screw shaft. Further, by providing a plurality of screw shafts, it is possible to prevent the support member from being inclined with respect to the screw shaft. Therefore, the movement of the support member becomes smooth, and precise length adjustment can be performed.

(Embodiment of passage device for X-ray analyzer)
Hereinafter, an embodiment of a passage device for an X-ray analyzer according to the present invention will be described by taking a case where a bellows is used as a covering member as an example. Of course, the present invention is not limited to this embodiment.

  FIG. 1 shows an embodiment of a passage device for an X-ray analyzer according to the present invention. FIG. 2 is a cross-sectional view taken along line AA of the passage device 1 of FIG. FIG. 3 is a cross-sectional view taken along the line CC in FIG. The passage device 1 shown in FIG. 1 is installed at an arbitrary position on the X-ray optical path X0 from the X-ray source to the X-ray detector in the X-ray analyzer. The passage device 1 is provided with support members 4a and 4b, a bellows 3 as a covering member supported at both ends by the support members 4a and 4b, and a bellows 3 around the bellows 3 in parallel. And three screw shafts 5a, 5b, 5c. The support members 4 a and 4 b are flanges of the bellows 3.

  In the present embodiment, the bellows is used as the covering member that forms the passage along the X-ray optical path. However, instead of the bellows, other members that expand and contract can be used. Further, although three screw shafts are provided, the number of screw shafts may be two or more than four.

  Each of the support members 4a and 4b is provided with a circular opening 6. When the passage device 1 is mounted on the X-ray analyzer, the openings 6 are placed on the X-ray optical path X0. As shown in FIG. 2, both ends of the bellows 3 are hermetically connected around the opening 6 via an O-ring 7. Further, one end of each of the three screw shafts 5a, 5b, 5c is rotatably supported by the bearing 8 on the one support member 4a. Three nuts 9 are fixed to the other support member 4b, and the other end portions of the three screw shafts 5a, 5b, and 5c are screwed to these nuts 9, respectively.

  A knob 13 as an operation input member is detachably provided at the end of the screw shaft 5a on the support member 4b side. By manually rotating the knob 13, the screw shaft 5a can be rotated about its own axis. The knob 13 is preferably detachable from the other screw shafts 5b and 5c. In this way, the knob 13 can be installed at a location according to the operator's wishes.

  A rotation transmission device 50 for transmitting the rotation of the shaft between the screw shafts is provided at the end of the screw shafts 5a, 5b, and 5c on the support member 4a side. As shown in FIG. 3, the rotation transmission device 50 includes a pulley 10 fixed on each screw shaft 5a, 5b, 5c, an idler 11 provided on a side surface of the support member 4a, each pulley 10 and each idler. 11 and a belt 12 stretched between 11. In FIG. 1, when one screw shaft 5a is rotated by the knob 13, the rotation is transmitted to the other screw shafts 5b and 5c by the belt 12, and as a result, the three screw shafts 5a, 5b and 5c are synchronized with each other. And rotate around the axis. In order to ensure synchronization, a timing belt may be used as the belt 12.

  If the screw shafts 5a, 5b, and 5c are rotated about the individual shaft centers, the support member 4b that is screw-fitted with the screw shafts 5a, 5b, and 5c in FIG. Translate along X0. If the support member 4b is translated in the direction approaching the counterpart support member 4a, the bellows 3 is contracted and deformed. On the other hand, if the support member 4b is translated in the direction away from the support member 4a, the bellows 3 is stretched and deformed.

  The rotation transmitting device 50 is not limited to a specific configuration as long as the plurality of screw shafts 5a, 5b, and 5c can be rotated in synchronization with each other. For example, instead of the rotation transmission means using the belt 12 and the pulley 10, a rotation transmission means using a chain and a sprocket or a rotation transmission means using a gear mechanism can be used.

  In the screw shaft 5 a shown in FIG. 1, a low limiter 15 is provided between the pulley 10 and the nut 9. A high limiter 16 is provided between the support member 4 b and the knob 13. The low limiter 15 and the high limiter 16 are members provided so that the support member 4b that moves in the direction of arrow B in FIG. 2 by the rotation of the screw shafts 5a, 5b, and 5c does not exceed the operating range of the passage device 1. Specifically, when the support member 4b hits the low limiter 15, the bellows 3 is most contracted. On the other hand, when the support member 4b hits the high limiter 16, the bellows 3 extends most. The operating range can be arbitrarily set within an allowable range in which the bellows 3 can expand and contract.

  A holding member 17 is provided between the pulley 10 and the nut 9 in the screw shaft 5b. The holding member 17 can freely move on the screw shaft 5b in the direction of arrow B in FIG. 2, that is, in the axial direction of the screw shaft 5b. The holding member 17 has, for example, a circular ring member 17a, and the bellows 3 passes through the ring member 17a. Thereby, the bellows 3 is held by the holding member 17. In this way, it is possible to prevent the bellows 3 from slacking in the vertical direction in FIG. In the present embodiment, the holding member 17 is provided on one screw shaft, but it may be provided on a plurality of screw shafts. Further, a plurality of holding members 17 can be provided on the same screw shaft.

  In FIG. 1, a gantry 14 is provided below each of the support members 4a and 4b. The height of each mount 14 can be adjusted. By adjusting the height of the gantry 14, the position of the bellows 3 relative to the X-ray optical path X0 can be adjusted. Moreover, the handle 31 is provided in the edge of support member 4a and 4b. An operator can hold these handles 31 and easily move the passage device 1 and attach / detach it to / from the X-ray analyzer.

  Hereinafter, the operation | movement is demonstrated about the channel | path apparatus for X-ray analyzers of this embodiment. In FIG. 1, the passage device 1 is attached to the X-ray analyzer so that the bellows 3 surrounds the X-ray optical path X0 of the X-ray analyzer. In addition, the kind of X-ray analyzer is not limited to a specific thing. At this time, the support members 4a and 4b of the passage device 1 are fixed to appropriate optical elements in the X-ray analyzer. When the passage device 1 is provided, for example, to form a vacuum path, the support members 4a and 4b are hermetically fixed to the optical element. When it becomes necessary to change the distance between the optical elements of the X-ray analyzer, first, the knob 13 is attached to the screw shaft 5a. Then, the distance between the optical elements is adjusted and the knob 13 is manually rotated. Then, the screw shaft 5a rotates, and at the same time, the rotation is transmitted to the other screw shafts 5b and 5c by the belt 12 hung on the pulley 10, and the three screw shafts 5a, 5b and 5c rotate at the same angular velocity at the same time. To do.

  By simultaneously rotating the screw shafts 5a, 5b, and 5c, the support member 4b is translated in the direction of arrow B in FIG. For example, when the knob 13 is rotated in one direction in a state where the distance between the support members 4a and 4b is open, that is, in a state where the bellows 3 is extended, the support member 4b moves so as to approach the other support member 4a. To do. At this time, the bellows 3 provided between the support members 4a and 4b contracts and moves. If the knob 13 is further rotated, the support member 4b comes into contact with the low limiter 15 and the length of the passage device 1 becomes the shortest.

  Next, when the knob 13 is rotated in the opposite direction from the contracted state, the support member 4b moves away from the support member 4a. At this time, the bellows 3 provided between the support members 4a and 4b extends and moves. If the knob 13 is further rotated, the support member 4a comes into contact with the high limiter 16, and the length of the passage device 1 becomes the longest.

  Note that the bellows 3 is held by the holding member 17 without being loosened during the expansion / contraction operation and stop of the passage device 1. When the bellows 3 is formed of a metal bellows, the bellows 3 is heavy and easily loosens. In this case, if the bellows 3 is held by the holding member 17, loosening of the bellows 3 can be prevented. After the adjustment of the length of the passage device 1 is completed, the knob 13 is removed from the screw shaft 5a. As a result, it is possible to prevent troubles such as an operator or any member accidentally touching the knob 13 during operation of the X-ray analyzer and changing the length of the passage device 1.

  In the above embodiment, the length of the passage device 1 is adjusted by fixing the support member 4a and moving the other support member 4b. However, the support member 4b is fixed and the other support member 4a is moved. You can also adjust the length. Further, the relationship between the rotation direction of the knob 13 and the moving direction of the support members 4a and 4b can be changed depending on the direction of the screws provided on the screw shafts 5a, 5b and 5c and the nut 9.

  According to the passage device 1 of the present embodiment, since the support member 4b and the screw shafts 5a, 5b, and 5c are screw-fitted, the distance between the support members, that is, the passage device of the passage device can be simply operated by turning the screw shaft. The length can be adjusted. Further, when a plurality of guide rods are provided between the support members 4a and 4b and only one of them is used as a screw shaft, the support member 4b that moves in parallel is inclined, and smooth parallel movement can be achieved. There is a risk of disappearing. On the other hand, in this embodiment, since all the three rods that substantially function as guide rods are screw shafts, it is possible to prevent the support member 4b from being inclined with respect to the screw shaft. Therefore, the movement of the support member 4b becomes smooth, and precise length adjustment can be performed.

(Modification)
In the above embodiment, the case where the knob 13 is attachable to and detachable from the screw shafts 5a, 5b, and 5c is exemplified, but the knob 13 may be fixed. Further, the knob 13 may not be provided directly on the screw shaft. For example, it can also be provided via a gear mechanism.

(Embodiment of X-ray analyzer)
Hereinafter, the case where the X-ray analysis apparatus according to the present invention is applied to a small angle scattering apparatus as an example thereof will be described as an example. FIG. 4 shows a small angle scattering device 2 according to an embodiment of the present invention. The small angle scattering apparatus 2 shown here includes an X-ray tube 19 provided with an X-ray source 18, a confocal mirror 20 as an X-ray condensing means for converging X-rays generated from the X-ray source 18 to one focal point, and The first slit 21, the second slit 22, the third slit 23, an attenuator 26 as an X-ray intensity adjusting means, a sample chamber 24, a direct beam stopper 39, and a two-dimensional X-ray detector 25 are provided. Have. Reference numeral 29 denotes an X-ray shutter.

  A path between the X-ray source 18 and the X-ray detector 25 and traveled by the X-ray is an X-ray optical path X0. The sample S to be measured is accommodated in the sample chamber 24 and disposed on the X-ray optical path X0.

  FIG. 5 schematically shows the progress of X-rays in the small angle scattering device 2 shown in FIG. In FIG. 5, the same reference numerals as those in FIG. 4 denote the same elements. As shown in FIG. 5, the confocal mirror 20 has two X-ray reflecting surfaces 20a and 20b that are in a crossing relationship with each other. The X-rays reflected by these X-ray reflecting surfaces are collected at the same or substantially the same focal point f.

  In FIG. 4, each of the following members that are X-ray optical elements, that is, the X-ray tube 19, the confocal mirror 20, the first slit 21, the second slit 22, the attenuator 26, the third slit 23, and the sample chamber 24. A passage 41 is provided between the members. The sample chamber 24 is disposed on the downstream side of the third slit 23 (that is, the right side in FIG. 4), the direct beam stopper 39 is further disposed on the downstream side, and the two-dimensional X-ray detector 25 is further disposed on the downstream side. It is arranged. In the present embodiment, the passage device 1 is provided between the sample chamber 24 that is an X-ray optical element and a direct beam stopper 39 that is also an X-ray optical element.

  The inside of the passage 41 and the passage device 1 is exhausted by the exhaust device P, and the pressure is reduced to a vacuum or a reduced pressure state close to a vacuum. In the present embodiment, the exhaust device P is installed between the second slit 22 and the direct beam stopper 39. The purpose of the small angle scattering device 2 of the present embodiment is to detect scattered X-rays generated from the sample S installed in the sample chamber 24, but the intensity of the scattered X-rays is very small. The reason why the passage 41 and the passage device 1 form a vacuum path as described above is to prevent scattered X-rays generated from the sample S, which is a measurement target, from being disturbed by air scattering.

  The X-ray tube 19 is desired to be capable of generating X-rays with as strong an intensity as possible in order to enable quick measurement. Therefore, in the present embodiment, for example, the X-ray tube 19 is configured using a rotor target that incorporates a cooling mechanism and can rotate at high speed, and a filament that can apply a high voltage between the target.

  In this embodiment, point-focused X-rays are extracted from the X-ray source 18. In general, the X-ray focal point is a rectangle, and in this embodiment, X-rays are extracted from the short side of the rectangle. That is, X-rays are extracted outside the X-ray tube 19 from an X-ray extraction window provided on the short side of the X-ray focal point. For this reason, the extracted X-ray has a square, substantially square, circular, or substantially circular cross section. When such X-ray extraction is performed, the X-ray focal point is referred to as a point-focused X-ray focal point.

  As the two-dimensional X-ray detector 25 in the present embodiment, a CCD (Charge Coupled Device) X-ray detector is used. The CCD X-ray detector is a detector constituted by a CCD image sensor. Specifically, it is configured by a pixel array composed of photodiodes and the like, and a CCD array that reads signals generated in each pixel. A CCD has, for example, an electrode array formed by arranging a plurality of electrodes in a straight line with an insulating film on a semiconductor substrate, and this electrode array is arranged corresponding to a pixel array formed at an X-ray intake port. This is a CCD detector.

  In FIG. 4, the passage device 1 disposed between the sample chamber 24 and the direct beam stopper 39 is configured by the passage device 1 shown in FIG. As shown in FIG. 1, the passage device 1 is configured as one unit, and the unit is inserted between the sample chamber 24 and the direct beam stopper 39. Then, one support member 4 a of the passage device 1 is airtightly connected to the downstream side of the sample chamber 24 on the X-ray optical path, and the other support member 4 b is airtightly connected to the upstream side of the direct beam stopper 39. Handles 31 are provided on the support members 4a and 4b of the passage device 1, and the passage device 1 can be easily moved and attached to and detached from the X-ray analyzer using these handles.

  In FIG. 4, when the passage device 1 is inserted between the sample chamber 24 and the direct beam stopper 39, the height of the passage device 1 is increased by the gantry 14 (see FIG. 1) provided on the support members 4 a and 4 b of the passage device 1. Adjust the height. Thereby, the passage formed by the bellows 3 that is the covering member can be installed at a height that coincides with the X-ray optical path X0 of the small angle scattering device 2.

  In FIG. 4, the distance L between the sample S and the X-ray receiving surface of the X-ray detector 25 is generally called the camera length. The camera length L is set to various lengths according to the size of the X-ray receiving surface of the X-ray detector 25 and the desired resolution. When setting the camera length L to a desired length, the direct beam stopper 39 and the X-ray detector 25 are moved along the guide rail 51. At this time, the operator rotates the knob 13 of the passage device 1 of FIG. 1 as the direct beam stopper 39 moves. By this operation, the distance between the support members 4a and 4b, that is, the length of the passage device 1 can be set to a length corresponding to the length of the camera length L.

  After adjusting the camera length L as described above, the exhaust device P depressurizes the X-ray optical path X0 of the small angle scattering device 2 to a vacuum state. At this time, a force for contracting the bellows 3 acts in the passage device 1. However, as shown in FIG. 1, since the support member 4b is screwed to the screw shafts 5a, 5b, and 5c, the support member 4b does not move in the axial direction of the screw shaft, and therefore the bellows 3 is contracted. Absent. As a result, the camera length L is held at the set length.

  After mounting the passage device 1 as described above, small angle scattering measurement is performed by the small angle scattering device 2. Specifically, as shown in FIG. 5, high-intensity X-rays are generated from the X-ray source 18 in a point focus state, and the X-rays are collected by the confocal mirror 20 so as to converge to the focal point f. . Further, the double slit structure of the first slit 21 and the second slit 22 sets the X-ray convergence state to a stable state. The X-rays that have passed through the first slit 21 and the second slit 22 are adjusted to a desired X-ray intensity by an attenuator 26. Further, the third slit 23 prevents the parasitic scattered radiation generated in the second slit 22 from hitting the sample S or the CCD detector 25.

  When the X-rays that have passed through the third slit 23 enter the sample S, in FIG. 6, the scattered X-rays having the intensity corresponding to the molecular structure at the scattering angle corresponding to the molecular structure of the sample S, that is, the diffraction angle 2θ. Occurs. Then, the scattered X-rays are detected by the CCD detector 25.

  In FIG. 6, the direct beam stopper 39 is disposed in front of the CCD detector 25 of the portion W0 where the direct beam Rd hits, and prevents the direct beam Rd from hitting the pixels of the CCD detector 25 directly. . A region indicated by W1 indicates a region where the parasitic scattered rays generated in the second slit 22 in FIG. 5 cannot be blocked by the third slit 23 and reach the CCD detector 25.

  That is, the region W0 and the region W1 in the CCD detector 25 are regions where the scattered radiation from the sample S cannot be measured due to the direct beam or the parasitic scattered radiation. Therefore, the small-angle region measured by the small-angle scattering device 2 of the present embodiment is a 2θ region outside W1 in FIG.

  In the small angle scattering apparatus 2 of the present embodiment, the camera length L can be changed to an appropriate length according to the intensity of the X-ray to be used, the type of the sample S, and the desired resolution. On the other hand, as described in relation to FIG. 1, the passage device 1 is simply operated by simply turning the screw shafts by screwing the support member 4b and the screw shafts 5a, 5b, and 5c. Thus, the length of the passage device 1 can be adjusted in accordance with the change of the camera length L. Further, by providing three screw shafts 5, it is possible to prevent the support member 4b from being inclined with respect to the screw shaft. Therefore, the movement of the support member 4b becomes smooth, and precise length adjustment can be performed. Further, by providing the rotation transmission device 50 including the pulley 10 and the belt 12, the rotation of each of the plurality of screw shafts can be synchronized only by operating one screw shaft. You can fine-tune the height.

  After the adjustment of the length of the passage device 1 is completed, the knob 13 is removed from the screw shaft 5a. Thereby, troubles, such as an operator or some member touching the knob 13 accidentally and changing the length of the channel | path apparatus 1, can be prevented.

(Modification)
In the above embodiment, the case where the channel | path apparatus 1 of this invention is used between a sample and a detector was illustrated. However, since the passage device 1 is configured as one unit and can be attached to and detached from the X-ray analyzer, it can be used for other passages on the X-ray optical path. In the above embodiment, the case where the passage device of the present invention is applied to the small angle scattering device has been exemplified. However, the passage device of the present invention may be any other X-ray analyzer such as an X-ray diffractometer, fluorescent X It can also be applied to a wire device. In any X-ray analysis apparatus, the passage device is arranged at a position where the distance needs to be adjusted on the X-ray optical path.

  The X-ray analyzer passage device and the X-ray analyzer according to the present invention are preferably used when it is necessary to adjust the distance on the X-ray optical path in X-ray measurement.

It is a perspective view showing one embodiment of a passage device for X-ray analyzers concerning the present invention. It is sectional drawing according to the AA line of FIG. It is sectional drawing according to CC line of FIG. 1 is a perspective view showing an embodiment of an X-ray analysis apparatus according to the present invention. It is a figure which shows typically the optical system of the X-ray analyzer shown in FIG. It is a figure which expands and shows the principal part of FIG.

Explanation of symbols

1. 1. Passage device 2. small angle scattering device; Bellows (coating member),
4a, 4b. Support members, 5a, 5b, 5c. Screw shaft, 6. 6. opening, O-ring; Bearings, 9. Nut, 10. Pulley, 11. Idler, 12. Belt, 13. 13. Knob (operation input member) Base, 15. Low limiter,
16. High limiter, 17. Holding member, 18. X-ray source, 19. X-ray tube,
20. Confocal mirror, 20a, 20b. X-ray reflecting surface, 21. First slit, 22. Second slit, 23. 3rd slit, 24. Sample chamber,
25. Two-dimensional X-ray detector; Attenuator, 29. X-ray shutter,
31. Handle, 39. Direct beam stopper, 41. aisle,
50. Rotation transmission device, 51. Guide rail, L. Camera length, S. sample,
X0. X-ray optical path

Claims (6)

In an X-ray analyzer that detects X-rays emitted from an X-ray source by X-ray detection means when the sample is irradiated with X-rays generated from an X-ray source,
A pair of support members disposed at different positions on the X-ray optical path from the X-ray source to the X-ray detection means;
A covering member that is supported by these supporting members and is disposed so as to surround all or part of the X-ray optical path, and forms an atmosphere different from the atmospheric atmosphere;
Provided between the pair of support members around the covering member, one end of which is supported by one of the pair of support members so as not to rotate and move in the axial direction , and the other end of the pair of support members. A plurality of screw shafts which are screw-fitted to the other side so as to be axially movable and arranged substantially parallel to the X-ray optical path;
An X-ray analysis apparatus, comprising: a rotation transmission unit that is provided between the plurality of screw shafts and rotates the screw shafts in synchronization with each other .   2. The X-ray analyzer according to claim 1, wherein the covering member is a bellows. The X-ray analyzer according to claim 1 or 2, wherein the pair of support members are arranged in parallel to each other .   4. The X-ray analyzer according to claim 1, further comprising a holding member provided on at least one of the plurality of screw shafts, wherein the holding member includes the covering member. X-ray analyzer characterized by holding.   5. The X-ray analysis apparatus according to claim 1, wherein the pair of support members, the covering member, and the plurality of screw shafts are configured as one unit, and the unit is the X-ray analyzer. An X-ray analyzer which is detachable from a ray optical path. In a passage device used in an X-ray analyzer that detects X-rays emitted from an X-ray source by X-ray detection means when the sample is irradiated with X-rays generated from an X-ray source,
A pair of support members disposed at different positions on the X-ray optical path from the X-ray source to the X-ray detection means;
A covering member that is supported by these supporting members and is disposed so as to surround all or part of the X-ray optical path, and forms an atmosphere different from the atmospheric atmosphere;
Provided between the pair of support members around the covering member, one end of which is supported by one of the pair of support members so as not to rotate and move in the axial direction , and the other end of the pair of support members. A plurality of screw shafts which are screw-fitted to the other side so as to be movable in the axial direction and arranged substantially parallel to the X-ray optical path;
A passage device for an X-ray analyzer, comprising: a rotation transmitting means that is provided between the plurality of screw shafts and rotates the screw shafts in synchronization with each other .

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