JPH10208684A - Electron-beam bi-prism device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To facilitate positioning of a piezo-electric body in a rotor so as to correctly select a position where sample observation or sample inspection is required so as to carry out observation or inspection by enabling a cylindrical piezo-electric body to be arranged coaxially to the rotational center of a rotor when the piezoelectric body is mounted on the rotor. SOLUTION: A piezoelectric body 91 supported on the piezoelectric support part 82h of a rotor 81 is so arranged as sandwiching a space positioned between a pair of earth electrodes 84a, 84b. When a piezo-electric body driving voltage is impressed between a piezoelectric body driving electrode 92 and a piezoelectric body gland electrode 91a, the piezoelectric body 91 deviates to move the filament 96 in horizontal direction. Accordingly, the filament 96 supported on the piezoelectric body can be adjusted in its position within a minute distance. In addition, by supplying a high frequency current to the filament 96, foreign matter stuck to a filament can be eliminated.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for obtaining electron holography for obtaining an image containing information such as the shape, thickness, and magnetic field of a sample by utilizing interference caused by a wave of electrons, that is, an electron beam pipe. About rhythm.

[0002]

2. Description of the Related Art An interference fringe created in an electron microscope is magnified by an electronic lens, and a laser beam is applied to an image (electronic hologram) printed on a film to obtain a reproduced image (three-dimensional image). Information such as small shape, thickness, and magnetic field can be obtained. Next, an electron microscope for obtaining the electron beam hologram will be described. In order to obtain a high quality electron beam hologram, an electron beam with good coherence and high brightness, in which an interference phenomenon clearly appears, is required. For this purpose, a field emission gun in which the energy is uniformed by cold cathode radiation (ΔE = about 0.2 eV) is used.
The electron beam hologram splits the electron beam from the electron gun into two,
A scattered wave generated when one of the two divided electron beams is applied to the sample and a reference wave not applied to the other sample are caused to interfere with each other, and internal information is recorded as interference fringes. In an ordinary electron microscope, an enlarged image of a sample is formed by an objective lens. To obtain an electron beam hologram, an electron beam biprism is placed between the objective lens and the enlargement lens as shown in FIG.

In FIG. 1, the electron biprism is composed of one filament and a pair of ground electrodes sandwiching the filament. The electron biprism has the same effect on electrons as a light prism formed by combining two triangular prisms. Electron beams incident on the right and left sides of the filament of the electron biprism are deflected to form interference fringes as shown in the figure, and the interference fringes are magnified by a magnifying lens and photographed and recorded on a film to obtain an electron beam hologram. An interference image by an electron beam (electron hologram) by mounting an electron biprism on a field emission electron microscope
Can be created, and by reproducing it, information on the phase and amplitude components of the electron beam can be obtained. The information enables observation of a magnetic field and an electric field, quantitative measurement of phase information, and the like.

[0004]

In the conventional electron biprism apparatus, the filament (Pt electrode) can be moved horizontally and rotated about a vertical axis, but these movements are manually performed. I was going. Therefore, the control of the horizontal movement of the electrode was limited to about 0.1 mm. It was also difficult to match the direction of the sample to be observed with the direction of the filament. For this reason, it has not been easy to accurately select a place where the observation or inspection of the sample is desired and to observe or inspect. The present invention has been made in view of the above circumstances, and has the following content as an object. (O01) In an electron beam biprism apparatus, a place where observation or inspection of a sample is desired is accurately selected so that observation or inspection can be performed.

[0005]

Next, the present invention devised to solve the above-mentioned problems will be described. The elements of the present invention are used to facilitate correspondence with the elements of the embodiments described later. , The reference numerals of the elements of the embodiment are enclosed in parentheses. The reason why the present invention is described in correspondence with the reference numerals of the embodiments described below is to facilitate understanding of the present invention and not to limit the scope of the present invention to the embodiments.

(Embodiment of the Invention) In order to solve the above problems, an electron biprism device of the invention has the following requirements. (A01) The path of an electron beam emitted from an electron gun is provided. An outer cylinder (10 + 12) mounted on the outer end of a cylindrical electron beam biprism mounting member (4) penetrating a lens barrel (1) of an electron microscope disposed so as to surround the outer side; ), An inner cylinder (31 + 37 to 39 + 42 + 43) supported movably in the axial direction, an inner cylinder moving operation member (24 + 28) for moving the inner cylinder (31 + 37 to 39 + 42 + 43) in the axial direction, and an inner cylinder (24 + 28). 31 + 37 to 39 + 42 + 43), an operation rod (58) supported movably in the axial direction,
And a head supporting member (7) having an operating rod operating member (54) for moving the operating rod (58) forward and backward.
62), (A02) the base end is the inner cylinder (31 + 37-3)
9 + 42 + 43) Head body (47), (A03) connected to the tip and having a rotor support hole (73a) at the tip
A pair of ground electrodes (84) rotatably supported by the rotor support holes (73a) and opposed to each other with the rotation axis interposed therebetween.
a, 84b), a ring-shaped and plate-shaped conductive plate for driving a piezoelectric body (87), a conductive plate for connecting a piezoelectric ground (88), and a conductive plate for feeding a filament A rotor (81) having (86a, 86b);
(A04) A rotor rotation driving device (5) for rotating the rotor (81) in accordance with the forward / backward movement of the operation rod (58).
(4 to 62 + 106 to 111), (A05) The piezoelectric body driving conductive plate (8) fixedly supported by the head body (47) and rotating and rotating with the rotation of the rotor (81).
7) The contact terminals (116-119) that come into contact with the piezoelectric ground connection conductive plate (88) and the filament power supply conductive plates (86a, 86b), respectively, and (A06) the contact terminals (116-119). (A07) A conductive cable (121) having a power supply lead wire connected to the pair of ground electrodes (84a, 84b) supported by the rotor (81) and disposed between the pair of ground electrodes (84a, 84b). (A08) Both ends are supported by the piezoelectric body (91) and the pair of ground electrodes (84a, 84a,
4b) filaments (96), (A09) interposed
A piezoelectric body driving electrode (92) and a piezoelectric body ground electrode (91a) formed on the opposite surfaces of the piezoelectric body (91), respectively (A010);
2) and when a piezoelectric driving voltage is applied between the piezoelectric ground electrode (91a) and the filament (96),
The piezoelectric body (9) displaced so as to move
1), (A011) A conductive wire connecting between the piezoelectric body driving conductive plate (87) and the piezoelectric body driving electrode (92), and between the piezoelectric body grounding conductive plate (88) and the piezoelectric ground electrode (91a). And a conductive line connecting the filament-powered conductive plates (86a, 86b) and the filament (96).

(Operation of the Present Invention) In the electron beam biprism device of the present invention having the above-described structure, the head support member (7
The outer cylinder (10 + 12) of (62) to (62) is a cylindrical electron biprism mounting member () that penetrates a lens barrel (1) of an electron microscope disposed so as to surround the outside of the path of the electron beam emitted from the electron gun. It is attached to the outer end of 4). The outer cylinder (10 + 1)
2) supports the inner cylinder (31 + 37 to 39 + 42 + 43) movably in the axial direction. Inner cylinder moving operation member (24 + 2
8) Adjust the position by moving the inner cylinder (31 + 37 to 39 + 42 + 43) in the axial direction. The operating rod operating member (54) is provided with the inner cylinder (31 + 37 to 39+
42 + 43), the operating rod (58) supported movably in the axial direction is moved forward and backward. Head body (47) having a rotor support hole (73a) formed at the tip
The base end is the inner cylinder (31 + 37 to 39 + 42 + 4
3) Connected to the tip. Therefore, the head body (4)
7) moves forward and backward in conjunction with the forward and backward movement of the inner cylinder (31 + 37 to 39 + 42 + 43).

The head body (47) rotatably supports the rotor (81) through the rotor support hole (73a). The rotor (81) has a pair of ground electrodes (84a, 84b) arranged opposite to each other with a rotation axis interposed therebetween, and has a ring-shaped and plate-shaped conductive plate for driving a piezoelectric body centered on the rotation axis on a lower surface. (87), a conductive plate (88) for connecting the piezoelectric ground, and a conductive plate (86a,
86b). Rotor rotation drive (54-62 +
106 to 111) rotate the rotor (81) in accordance with the forward / backward movement of the operation rod. The rotor (8
The piezoelectric body drive conductive plate (87), the piezoelectric ground connection conductive plate (88), and the filament power supply conductive plates (86a, 86b) that rotate and move with the rotation of 1) include:
The contact terminal (1) fixedly supported by the head body (47)
16 to 119) are in contact with each other. Conductive cable (1
21) is connected to each of the contact terminals (116 to 11).
9). Therefore, even if the rotor rotates, the conductive plates (86a, 8a) can be connected to the conductive cable (121) via the contact terminals (116 to 119).
6b, 87, 88).

The piezoelectric body (91) supported by the rotor (81) is arranged with a space interposed between the pair of ground electrodes (84a, 84b). The piezoelectric body (91)
The filament (96) whose both ends are supported is disposed between the pair of ground electrodes (84a, 84b). A piezoelectric driving electrode (92) and a piezoelectric ground electrode (91a) are formed on opposite surfaces of the piezoelectric body (91), respectively. The conductive plate for driving the piezoelectric body (87)
And a conductive wire connecting between the piezoelectric drive electrodes (92), a conductive wire connecting between the piezoelectric ground connection conductive plate (88) and the piezoelectric ground electrode (91a), and the filament power supply conductive plates (86a, 86b). ) And the filament (96).
Therefore, the voltage supplied from the conductive cable (121) is applied from the contact terminals (116 to 119) via the respective conductive plates (86a, 86b, 87, 88) to the piezoelectric body drive electrode (92), the piezoelectric body It is supplied to the ground electrode (91a) and the filament (96). When a piezoelectric body driving voltage is applied between the piezoelectric body driving electrode (92) and the piezoelectric body ground electrode (91a), the piezoelectric body (9
1) is displaced so as to move the filament (96) in the horizontal direction. Therefore, the piezoelectric body (91)
The position of the filament (96) supported by the member can be adjusted by a small moving distance. In addition, by supplying a high-frequency current to the filament (96), it is possible to remove foreign matter attached to the filament.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION

(Embodiment 1 of the First Invention) Embodiment 1 of the electron biprism device of the present invention is characterized in that the present invention has the following requirements. (A012) The piezoelectric device having a cylindrical shape. Body (91). (Operation of the First Embodiment of the First Invention) In the first embodiment of the electron beam biprism device of the present invention having the above-described configuration,
The piezoelectric body (91) having a cylindrical shape is used. Such a cylindrical piezoelectric body (91) is provided with the rotor (8).
When the piezoelectric body (91) is mounted on the rotor (81), the piezoelectric body (91) can be easily positioned on the rotor (81) because it can be arranged coaxially with the rotation center of the rotor (81).

[0011]

Next, examples (embodiments) of the embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited to the following embodiments. In order to facilitate understanding of the following description, orthogonal coordinate axes X, Y, and Z are defined in directions of arrows X, Y, and Z orthogonal to each other in the drawings, and the arrow X direction is forward, and the arrow Y is arrow Y. The direction is leftward and the arrow Z direction is upward. In this case, the direction opposite to the X direction (front) (−X direction) is backward, the direction opposite to the Y direction (left) (−Y direction) is right, and the direction Z (upward) is opposite (−Z direction). Is below. In addition, front (X direction) and rear (-X direction)
, Including the front-back direction or the X-axis direction, to the left (Y direction)
And the right or left (-Y direction), or the Y-axis direction, and the upward or downward (-Z direction) or the vertical or Z-axis direction. In the figure,
The one with "•" in "O" means an arrow heading from the back of the paper to the front, and the one with "X" in "O" means an arrow pointing from the front to the back of the paper. Shall mean.

(Embodiment) FIG. 1 is a plan view showing an embodiment of an electron biprism apparatus of the present invention mounted on a lens barrel of a transmission electron microscope (charged particle beam apparatus). FIG.
FIG. 2 is a sectional view taken along line II-II. 3A and 3B are explanatory views of a head main body of an embodiment of the electron beam biprism device, FIG. 3A is a plan view, and FIG. 3B is a sectional view taken along the line IIIB-IIIB of FIG. 3A. FIG.
FIG. 4A is an explanatory view of a head main body of the electron beam biprism device of the embodiment, FIG. 4A is a view seen from an arrow IVA of FIG.
FIG. 4B is a diagram viewed from the arrow IVB in FIG. 4A. FIG. 5 is an explanatory view of a head main body of the electron biprism device of the embodiment, FIG. 5A is a sectional view taken along line VA-VA of FIG. 3B,
FIG. 5B is a view as viewed from the arrow VB in FIG. 3B.

FIG. 6 is an explanatory view of a rotor used in the embodiment, FIG. 6A is a plan view, and FIG. 6B is VIB-VIB of FIG. 6A.
6C is a sectional view taken along the line VIC-VIC in FIG. 6A. FIG. 7 is an enlarged vertical cross-sectional view of the tip of the head of the electron biprism device of the embodiment. FIG. 8 is an enlarged cross-sectional view of the tip of the head of the electron biprism device of the embodiment, and is a cross-sectional view taken along the line VIII-VIII of FIG. FIG.
9A is an explanatory view of the rear rotor holding plate shown in FIG. 7 of the embodiment, FIG. 9A is a left side view, FIG. 9B is a bottom view, viewed from the arrow IXB of FIG. 9A, and FIG. 9D as viewed from the arrow IXC in FIG. 9B, and FIG.
FIG. 3 is a sectional view taken along line IXD-IXD. FIG.
10A is a left side view, FIG. 10B is a bottom view, viewed from the arrow XB in FIG. 10A, and FIG. 10C is a cross-sectional view taken along the line XC-XC in FIG. 10B. It is. FIG. 11 is a top view of the head of the electron biprism device of the embodiment. FIG. 12 is a partial cross-sectional front view of a head of the electron biprism device of the embodiment.
FIG. 13 is a partial cross-sectional bottom view of the head of the electron biprism device of the embodiment. FIG. 14 is a circuit diagram of the electron biprism device of the embodiment.

In FIGS. 1 and 2, a head housing flange 2 having a head housing hole 2a extending in the horizontal direction is disposed inside a cylindrical lens barrel 1 of a transmission electron microscope as a charged particle beam device. The head housing flange member 2
An electron beam passage hole 2b extending in the vertical direction (Z-axis direction) is provided at the center of the head. The electron beam passage hole 2b intersects the head accommodation hole 2a at the inner end of the head accommodation hole 2a. I have. The electron beam passage hole 2b is a hole through which an electron beam emitted from an electron gun (not shown) disposed above passes from above to below. A biprism mounting flange 4 is mounted on the lens barrel 1. The biprism mounting flange 4 has a head insertion hole 4a communicating with the head accommodation hole 2a.
have. The mounting flange 7 of the biprism device 6 is fixed to the outer end (rear end, that is, the −X end) of the biprism mounting flange 4 via the gasket 5 with a plurality of bolts 8 (see FIG. 1). Have been. That is, a ring-shaped gasket 5 is sandwiched between the inner peripheral portions of the joint portions of the biprism mounting flange 4 and the mounting flange 7, and the inside and outside of each of the flanges 4 and 7 are hermetically sealed. The connecting portion of the flanges 4 and 7 constitutes a conflat flange (ie, a metal seal for obtaining an ultra-high vacuum) (4 + 5 + 7) which is airtightly connected with the gasket 5 therebetween.

A connecting flange 10 is welded to the rear end face of the mounting flange 7. A conductive cable connection hole 10a is formed at a lower portion of the connection flange 10.
A spherical seat forming member 11 is disposed on an outer end surface (rear end surface) of the connecting flange 10, and an outer cylindrical member 12 disposed outside the spherical seat forming member 11.
Is connected to the connection flange 10. An outer cylinder (10+) is formed by the connection flange 10 and the outer cylinder member 12.
12) is configured. Inside the outer cylinder member 12, a cylindrical inner end side (X end side) swinging member 13 is arranged. The inner end (X end) of the inner end side swing member 13 is rotatable around the spherical surface of the spherical seat forming member 11. A cylindrical outer end (-X end) swing member 14 (see FIG. 2) is connected to an outer end (-X side end) of the inner end swing member 13 by a screw 16. The inner end side swing member 13 has a front portion (X side portion) of a lower end portion cut away, and a tension spring 17 is disposed in the cut portion. The tension spring 17 applies a tensile force between the lower end portion of the inner end side swing member 13 and the connection flange 10 to pull the inner end side swing member inward (X direction). It is pressed against the connecting flange 10. 1, on the left side (Y side) of the outer cylinder member 12, an outer end portion (-X
The right end (−X end) of the rear end (−X end) of the inner end side swinging member 13 is provided on the right side (−Y side). A left / right position adjustment knob 19 for determining the position of the (Y-side end) is provided. In FIG. 2, a pressing member 21 that presses the outer end (the −X side end) of the inner end swinging member 13 downward is provided above the outer cylindrical member 12, and is provided below the outer cylindrical member 12. A vertical positioning bolt 22 for determining the vertical position of the rear end portion (the end portion on the −X side) of the lower end of the inner end side swing member 13 is provided. Therefore, by adjusting the left / right position adjustment knob 19 (see FIG. 1) and the vertical positioning bolt 22 (see FIG. 2), the inner end side swing member 13 and the outer end side swing member 14 connected thereto are adjusted. , Right and left and up and down rotation positions can be adjusted. Further, the reference numerals 18, 19, 21,
The element indicated by 22 makes it impossible to rotate the inner end side swing member 13 and the outer end side swing member 14 around the axis. The left / right position adjustment knob 19 and the vertical positioning bolt 22 constitute an inner cylinder tilt operation member (19 + 22).

In FIG. 2, a cylindrical spiral guide groove forming member 23 is provided around the cylindrical outer end side swinging member 14.
Is rotatably mounted. A cylindrical X-direction coarse adjustment knob 24 is provided outside the spiral guide groove forming member 23.
Has been fixed. Therefore, the spiral guide groove forming member 23 is also configured to rotate by adjusting the rotation of the X-direction coarse adjustment knob 24. A cylindrical pin support member 25 is provided in an inner hole of the cylindrical outer end side swinging member 14.
Are fitted. A guided pin 26 for adjusting the X position is fixed to the pin support member 25. The guided pin 26 for adjusting the X position is formed on the outer peripheral surface of the cylindrical spiral guide groove forming member 23. It engages with a spiral guide groove (not shown) extending in the circumferential direction and the axial direction. The guided pin 26 penetrates a guide groove formed in the cylindrical outer end side swing member 14 and extending in the X-axis direction. Therefore, when the X direction coarse adjustment knob 24 is rotated, the spiral guide groove forming member 23 is rotated.
The helical guide groove (not shown) moves the guided pin 26 for adjusting the X position to the outer end side swinging member 1.
4 along the guide groove (not shown) extending in the X-axis direction. (チ ェ ッ ク Check required) At the time of interview, the outer end side swinging member 14 and the spiral guide groove forming member 23
I received an explanation that it was not separated from it, but it seems to have been separated on the drawing. In the above description, the inner end side swing member 13 and the outer end side swing member 14 are described as being configured to be unrotatable about the axis, but the configuration that disables rotation is unknown. On the rear end side of the spiral guide groove forming member 23 and the X direction coarse adjustment knob 24, an X direction fine adjustment knob 28 is arranged. The X-direction fine adjustment knob 28 has a flange-shaped operation portion 28a and a cylindrical portion 28b extending forward. The cylindrical portion 28b is provided with the X-direction coarse adjustment knob 24.
And the outside of the spiral guide groove forming member 23. The elements indicated by the reference numerals 24 and 28 constitute an inner cylinder moving operation member (24 + 28).

A cylindrical adjusting force transmitting member 31 is arranged inside the cylindrical pin supporting member 25. A male screw 31a is formed on the outer peripheral surface of the rear end portion of the adjusting force receiving member 31, and is screwed with a female screw formed at the center of the flange-like operation portion 28a of the X-direction fine adjustment knob 28. ing. The outer peripheral surface of the adjustment force receiving member 31 has the X
An engagement groove 31b with which the guided pin 26 for position adjustment engages with play in the X-axis direction is formed. Therefore, when the guided pin 26 is moved in the X-axis direction by the inner cylinder moving operation member (24 + 28), the adjustment force receiving member 31 having the engaging groove 31b engaged with the guide pin 26 is also received. It is configured to be adjusted in the axial direction. When the X-direction fine adjustment knob 28 is rotated, the adjustment force receiving member 31 has a male screw 31a screwed with the female screw of the X-direction fine adjustment knob 28.
Cannot be rotated by the guided pin 26,
The position is finely adjusted by moving in the X-axis direction. A compression spring 32 and a slider 33 constantly pushed rearward (−X direction) by the compression spring 32 are arranged inside the adjustment force transmission member 31. The slider 33 is provided with a guided groove 33a that engages with a guide pin 34 fixed to the adjustment force transmitting member 31. For this reason, the slider 33 cannot rotate around the axis, but can slide only in the X-axis direction.

The front end (X end) of the adjusting force transmission member 31
, A rear end connecting member 37, a cylindrical connecting member 38, and a front end connecting member 39 are sequentially connected. A bellows 40 is provided between the front end of the rear end connection member 37 and the connection flange 10, and the tubular connection member 38 is disposed inside the bellows 40. The front end connecting member 39 is supported by a spherical bearing 41 supported on the inner surface of the connecting flange 10 so as to be rotatable in a small angle range together with a supported spherical forming member 39a mounted on the outer surface thereof. The center of the spherical surface of the spherical bearing 41 coincides with the center of the spherical surface of the spherical seat forming member 11. And, around the center of these spherical surfaces, each of the swinging members 13,
14, the pin support member 25 fitted and supported by the outer end side swing member 14, the adjustment force transmission member 31, and the like are configured to rotate. The front end connecting member 39 has a cylindrical cover 42 having a cable insertion hole 42a extending forward.
Are connected, and a connecting block 4 is provided at the front end of the cylindrical cover 42.
3 are connected. The connection block 43 has one operation member connection hole 43a and four terminal connection holes 43b (see FIG. 1). In the operation member connection hole 43a and the terminal connection hole 43b, an operation member and a conductive cable, which will be described later, are respectively connected. A head body 47 to which a spacer 46 is fixed is connected to the connection block 43 by a connection nut 44. Code 3
An inner cylinder (31 + 37 to 39 + 42 + 43) is constituted by the elements indicated by 1, 37 to 39, 42, and 43.

A rear end plate 52 is connected to the rear end of the adjustment force transmitting member 31 by bolts 51. The rear end plate 52 has a potentiometer 53 and a motor 5
4 are supported. The motor 54 has a function as a member for operating an operation rod described later, that is, an operation rod operation member 54. The rotation angle signal of the motor 54 detected by the potentiometer 53 is used for controlling the rotation of the motor 54. The potentiometer 53, the motor 54 and the like are covered by a cover 55 fixed to the rear end plate 52. A male screw 56a is formed at the tip of the rotating shaft 56 of the motor 54, and the male screw 56a
Is screwed with the female screw 33b. Therefore, although the slider 33 tends to rotate due to the rotation of the rotation shaft 56 of the motor 54, the slider 33 cannot rotate because the guided groove 33a is engaged with the guide pin 34. Therefore, the slider 33 slides in the axial direction. The rear end of the operation rod 58 is connected to the front end of the slider 33 by a screw 57. The operation rod 58 is connected to a rear end face of a front end plate 61 of a bellows 59 provided at a front end of the front end connection member 39. A connecting operation rod 62 extending forward from the front surface of the front end plate 61
Extends into the operation member connection hole 43a (see FIG. 1) of the connection block 43. The head support members (7 to 62) are constituted by the elements indicated by the reference numerals 7 to 62.

In FIG. 2, a conductive cable insertion cylindrical member 63 is connected to a conductive cable connection hole 10a below the connection flange 10, and a flange 64 is connected to a lower end of the conductive cable insertion cylindrical member 63. ing.
A connection flange 68 of a conductive cable housing case 67 that houses the connection side end of the conductive cable 66 is detachably connected to the flange 64. The flange 64
A ring-shaped gasket 69 is sandwiched between the inner peripheral portions of the joining portions of the connection flanges 68 to hermetically seal the inside and outside of each of the flanges 64 and 68. That is, the connecting portion between the flanges 64 and 68 constitutes a conflat flange which is airtightly connected with the gasket 69 therebetween.

3 to 5, the head main body 47 has a cylindrical portion 71 at an outer end portion (rear end portion, -X side end portion),
An outer shape extending inward (forward, in the X direction) from 1 has a rectangular parallelepiped operating member housing portion 72 and a rotor support portion 73 provided at the tip of the operating member housing portion 72. In FIG. 5B, a plurality of screw holes 71a used when fixing the spacer 46 (see FIGS. 1 and 2) are formed in the cylindrical portion 71. On the outer peripheral portion of the cylindrical portion 71, a connecting male screw 71b is formed. The connecting male screw 71b is connected to the connecting block 4 by the connecting nut 44 (see FIGS. 1 and 2).
Used when connecting to 3. The cylindrical portion 71 has an operation rod through hole 71c and a conductive cable insertion hole 7c.
1d is formed.

The operating member housing section 72 has an operating member housing hole 72a (see FIGS. 3A and 4A). FIG. 3A
2, the operating member housing section 72 has a connection hole 72b for connecting the operating member housing hole 72a and the operating rod through hole 71c. In FIG. 3A, a thin spring locking groove 72c extending in the front-rear direction is formed in the operation member housing hole 72a on the right side of the connection hole 72b. A bolt hole 72d is formed so as to cross the spring locking groove 72c from right to left. A spring locking bolt 74 (see FIG. 11) is screwed into the bolt hole 72d. In FIG. 4B, a right side surface (a side surface on the −Y side) of the operation member housing portion 72.
Is formed with a conductive cable insertion groove 72e. At the rear end of the conductive cable insertion groove 72e, a conductive cable extraction groove 72f is formed. Conductive cable exit groove 72f
Is connected to the conductive cable insertion hole 71d as can be seen from FIG. 5B. Therefore, as shown in FIG. 4, the conductive cable taken out from the conductive cable insertion hole 71d into the conductive cable extraction groove 72f is configured to be guided to the rotor support portion 73 through the conductive cable insertion groove 72e. I have.

3A and 3B, the rotor support 73
An octagonal rotor support hole 73a is formed on the upper surface. The rotor support hole 73a having an octagonal side surface contacts and supports the rotor outer surface at three points when the cylindrical rotor is fitted. An electron beam passage hole 73b is formed at the center of the rotor support hole 73a. 3A, 4A,
In FIG. 5A, a rectangular terminal arrangement hole 73c is formed on the lower surface of the rotor support 73 on each of the left and right sides of the electron beam passage hole 73b. Terminal placement hole 73c
Is connected to the rotor support hole 73a. On the lower surface of the rotor support portion 73, a conductive cable accommodating recess 73d is provided behind the terminal arrangement hole 73c (see FIGS. 3B and 4A).
Are formed. In FIG. 4A, a screw hole forming region 73e is provided on the lower surface of the rotor support portion 73 between the terminal arrangement hole 73c and the conductive cable housing concave portion 73d. In the screw hole forming area 73e, four terminal mounting screw holes 73f are formed. As shown in FIGS. 3B and 4A, the screw hole forming region 73e is formed to be recessed above the lower surface of the rotor support portion 73.

In FIG. 4A, the front end of the conductive cable insertion groove 72e and the conductive cable housing recess 73d are connected by a connection groove 73g. In FIG. 3A, the two operation wire guide pulley support holes 73h and one rotor holding member support hole 73i are provided on the upper surface of the rotor support portion 73.
Are formed. Further, on the upper surface of the rotor support portion 73, a rotor holding plate fixing screw hole 73j is formed at each of the four corner portions, and two more screw holes 73j 'are formed along the front edge. I have. In FIG. 4A, a cover plate fixing screw hole 73k is formed at each of four corners also on the lower surface of the rotor support portion 73, and two more screw holes 73k 'are formed along the front edge. ing. Incidentally, four rotor holding plate fixing screw holes 73j on the upper surface of the rotor support portion 73 are provided.
And two screw holes 73j ', four cover plate fixing screw holes 73k and two screw holes 73k' on the lower surface.
Are coaxial with each other, but are configured such that the fixing screws can be screwed in from the upper surface side and the lower surface side, respectively, by using short fixing screws.

In FIG. 6, a rotor 81 is made of a conductive metal material and has a disc-shaped bottom portion 82 having a circular hole at the center, an outer cylindrical portion 83 projecting upward from the disc-shaped bottom portion 82, and an inner portion. It has a cylindrical portion 84. The disc-shaped bottom portion 82 has a cylindrical supported portion 82a at the lower end fitted to the side surface of the rotor support hole 73a, and an upper end of the cylindrical supported portion 82a on the upper surface of the rotor support portion 73. It has a ring-shaped supported portion 82b that is supported. A ring-shaped operation wire guide groove 82c is formed above the ring-shaped supported portion 82b. A ring-shaped cap support portion 82d is formed above the operation wire guide groove 82c. The bottom portion 82 of the rotor 81 is
2 has a screw hole 82e for fixing the operation wire at the front portion, and has a lead wire insertion hole 82f at the rear portion of the inner cylindrical portion 84. The lead wire insertion hole 82f is
A hole for passing a lead wire for voltage supply from the lower surface side to the upper surface side of the bottom 82 of the first. Further, a pair of left and right filament power supply lead wire insertion holes 82g, 8
2 g are formed. On the upper surface of the bottom 82, a cylindrical step is formed at the center, and the step forms a piezoelectric support 82h.

On the lower surface of the bottom portion 82, the ring-shaped conductive member mounting portion is formed in three steps, and is formed so as to be concave upward from the outside to the inside. The ring-shaped conductive member mounting portion includes a ring-shaped conductive member outer mounting portion 82i, a ring-shaped conductive member central mounting portion 82j, and a ring-shaped conductive member inner mounting portion 82k. The ring-shaped conductive member mounting portions 82i, 82j, and 82k are coated with insulating coatings, respectively, to form ring-shaped conductive plates 86,8.
7, 88 (see FIG. 13). However,
Only the conductive plate 86 attached to the ring-shaped conductive member outer mounting portion 82i is divided into left and right. That is, as shown in FIG. 13, the conductive plate 86 includes a left conductive plate 86a and a right conductive plate 86b.

The outer cylindrical portion 83 of the rotor 81 is provided above the cap supporting portion 82d, and has a cap fixing screw hole 83a. The inner cylindrical portion 84 of the rotor 81 is cut off at the left and right portions at the upper end, and has a front upper end 84a and a rear upper end 84b. The front upper end portion 84a and the rear upper end portion 84b are arranged to face each other, and their opposing surfaces are formed as planes parallel to each other. The opposed front upper end portion 84a and rear upper end portion 84b of the rotor 81 made of the conductive metal material constitute a pair of ground electrodes (84a, 84b). A left upper end portion 84c and a right upper end portion 84d of the inner cylindrical portion are lower than the front and rear upper end portions 84a and 84b. The rotor 81 is constituted by the elements indicated by the reference numerals 82 to 88.

In FIGS. 7 and 8, the rotor 81 has a cylindrical supported portion 82a at the lower end thereof.
The ring-shaped supported portion 82b is supported on the upper surface of the rotor support portion 73 by three-point contact with the side surface of the rotor 3a (see FIG. 3A). A cylindrical piezoelectric body 91 is provided on the piezoelectric body support portion 82h.
Is supported. A film-like piezoelectric ground electrode 91a (see FIG. 7) is formed on the inner peripheral surface of the cylindrical piezoelectric body 91, and the piezoelectric ground electrode 91a is connected to the ring-shaped conductive plate 88 (see FIG. 7). It is connected to the. That is, the conductive plate 88 is used as the conductive plate 88 for connecting the piezoelectric ground. Further, on the outer surface of the piezoelectric body 91, piezoelectric body drive electrodes 92, 92 (see FIG. 7) are formed on the front and rear side surfaces, respectively. The piezoelectric body drive electrodes 92, 92
Are connected to the ring-shaped conductive plate 87. That is, the ring-shaped conductive plate 87 is connected to the piezoelectric driving conductive plate 8.
7 is used.

In FIG. 8, electrodes 93 and 94 are provided on the left and right upper ends of the piezoelectric body 91, respectively. A platinum filament 96 is stretched between the electrodes 93 and 94. The electrode 93 has a half-ring shape (1/2 of a ring).
) Is connected to the electrode plate 86a (see FIG. 13), and the electrode 94 is connected to the half-ring-shaped electrode plate 86b. That is, the half-ring shaped electrodes 86a and 86b are used as the conductive plates 86a and 86b for feeding the filament. 7 and 8, the rotor 8
The cap 9 is provided on the first cap support portion 82d (see FIG. 6).
7 are supported. The cap 97 is fixed by fixing screws screwed into the cap fixing screw holes 83a. The cap 97 is arranged so as to surround the periphery of the rotor 81, and has an electron beam passage hole 97a formed in the center thereof.

Operation wire guide pulleys 98, 98 (see FIG. 11) are rotatably supported in the two operation wire guide pulley support holes 73h on the upper surface of the rotor support portion 73 shown in FIG. 3A. A shaft 101 that penetrates the rotor holding member 99 (see FIG. 7) is inserted into the rotor holding member support hole 73i on the upper surface of the rotor support portion 73 shown in FIG. 3A. The flange portion 99a of the rotor pressing member 99 has a function of pressing the ring-shaped supported portion 82b of the rotor 81 so as not to move upward. The upper surfaces of the operation wire guide pulleys 98 and 98 and the rotor holding member 99 have a rear rotor holding plate 1.
02 is pressed so as not to move upward. The rear rotor holding plate 102 is provided with the rotor support 73.
Screw 1 screwed into two rotor holding plate fixing screw holes 73j formed in the corner at the rear end (-X end)
03 is fixed to the upper surface of the rotor support 73.

In FIG. 9, the rear rotor holding plate 1
No. 02 has a semicircular hole 102a formed in the front side portion. The inner peripheral edge of the semicircular hole 102a is
It is a portion arranged so as to face the rear outside surface.
On the lower surface (the surface on the -Z side) of the rear rotor holding plate 102, a concave portion 102b which is recessed upward is formed on the rear side (the -X side) of the semicircular hole 102a. As shown in FIG. 7, the rear rotor holding plate 102 has the operation wire guide pulley 98,
98 and the rotor holding member 99 are arranged so as to be accommodated so as to be accommodated therein. The operation wire guide pulley 9 is moved by the rear rotor holding plate 102.
8, 98 and the rotor pressing member 99 are pressed so as not to move upward.

In FIG. 10, the front rotor holding plate 104 has a semicircular hole 104a in the rear portion. The inner peripheral edge of the semicircular hole 104a is
1 is a portion arranged to face the front outer surface. A semi-ring shaped rotor holding portion 104b is provided along the periphery of the semicircular hole 104a of the front rotor holding plate 104. As shown in FIG. 7, the rotor holding portion 104b is a portion for holding the ring-shaped supported portion 82b of the rotor 81.

An operation wire 106 is wound around the operation wire guide groove 82c (see FIG. 6) of the rotor 81, and the operation wire 106 is screwed into the operation wire fixing screw hole 82e (see FIG. 6). Wire fixing screw 107
(See FIG. 7). In FIG.
The operation wire 106 is connected to the operation wire guide pulley 9
One end is connected to the front end of the tension spring 108, guided by 8,98. The rear end of the tension spring 108 is locked by the spring locking bolt 74 screwed into a bolt hole 72d crossing the spring locking groove 72c (see FIG. 3A). Accordingly, the operation wire 106 is constantly pulled by the tension spring 108, and the tension generates a force for rotating the rotor 81 clockwise in the top view.

In FIG. 11, the operation rod through hole 7
1c (see FIG. 3A) and the connection hole 72b, and is connected to the front end of a wire connection rod 111 arranged in the operation portion housing hole 72a. By moving the wire connecting rod 111 back and forth, the wire connecting rod 1
11 The operating wire 106 connected to the front end can be pulled or loosened. At this time, the rotor 81 connected to the operation wire 106 rotates. Therefore, the rotational position of the rotor 81 can be controlled by moving the wire connecting rod 111 forward and backward. The rear end of the wire connecting rod 111 is shown in FIG.
The operation member connection hole 43a of the connection block 43 shown in FIG.
) Is connected to the front end of the connection operation rod 62. In FIG. 1, the rear end of the connection operation rod 62 is connected to a front end plate 61 of a bellows 59, and the front end plate 61 is connected to the slider 33 via an operation rod 58. The slider 33 is connected to the motor 54.
The rotation of the rotary shaft 56 causes the slider 33 and the wire connecting rod 111 to move forward and backward, thereby controlling the rotation position of the rotor.

In FIG. 13, contact terminals 116 to 119 are in contact with the filament power supply conductive plates 86a and 86b, the piezoelectric driving conductive plate 87, and the piezoelectric ground connection conductive plate 88, respectively. The contact terminals 116 to
119 is fixed by a fixing screw screwed into the terminal mounting screw hole 73f (see FIG. 4A). FIG. 14 is an electric circuit diagram of the electron biprism device of the embodiment. Each of the conductive plates 86a, 86b, 87, 88 and each contact terminal 11
6 to 119, and the respective conductive plates 86a, 86
The connection relationship between b, 87, 88 and the piezoelectric body 91 and the filament 96 is as shown in FIG. The conductive cable 121 including the four conductive wires connected to the contact terminals 116 to 119 passes through the conductive cable accommodating recess 73d and the conductive cable insertion groove 72e shown in FIG. 4B), and is led out to the rear side of the head main body 47 through the conductive cable insertion hole 71d (see FIG. 5B). Four conductive wires of the conductive cable 121 led out to the rear side of the head main body 47 are connected to four terminals 121a (only one is shown in FIG. 12) supported by the spacer 46. The four terminals supported by the spacers respectively extend into four terminal connection holes 43b (only one is shown in FIG. 1) of the connection block 43.

In FIG. 2, the conductive cable 66 connected to an external power supply (not shown) has four conductive wires, and the four input terminals 123 (of the hermetic seal 122 in the conductive cable housing case 67). (Only three are shown). It is connected to an inner conductive cable 126 having four conductive wires (only three shown) connected to four output terminals 124 (only three shown) of the hermetic seal 122. The conductive cable 126 passes through the inside of the spherical bearing 41 from the conductive cable connection hole 10 a at the lower part of the connection flange 10 and passes through the biprism mounting flange 4.
Extends into. Further, the four conductive wires of the conductive cable 126 pass through the cable insertion holes 42a of the cylindrical cover 42, and are connected to the four terminal connection holes 4 of the connection block 43.
3b. The conductive cable 12
6 is the terminal connection hole 43b and the four terminals 121a.
(Only one cable is shown in FIG. 12)
21 are connected to the four conductors. Therefore, the four conductive wires of the conductive cable 66 shown in FIG. 2 connected to the external power supply (not shown) are connected to the four conductive wires of the conductive cable 121 shown in FIG.

As shown in FIGS. 12 and 13, the operating member receiving section 72 and the rotor supporting section 73 of the head main body 47 are provided.
A lower surface covering plate 131 is attached to the lower surface of the.
The wire connecting rod 1 is provided on the lower surface covering plate 131.
A friction plate 132 that contacts the lower surface of the eleventh surface 11 is fixed. The friction plate 132 comes into frictional contact with the wire connecting rod 111 and has a function of preventing the wire connecting rod 111 from suddenly moving. Code 54
To 62, 106 to 111, etc., constitute a rotor rotation driving device (54 to 62 + 106 to 111). 11 to 13, an upper cover plate 133 is mounted on the upper surface and the left and right side surfaces of the operation member housing portion 72 of the head main body 47. The upper cover plate 133 is provided with the conductive cable insertion groove 72e.
(See FIGS. 4 and 13) Conductive Cable 1 Inserted
21 (see FIG. 13) in the conductive cable insertion groove 72e. The biprism device 6 is constituted by the elements indicated by the reference numerals 7 to 133.

(Effects of the Embodiment) The embodiment of the biprism device 6 having the above-described structure is, as shown in FIGS.
Used as a device for the biprism mounting flange 4. A gasket 5 is formed between the biprism mounting flange 4 fixed to the lens barrel 1 and the mounting flange 7 of the biprism device 6.
The airtightness is high because they are connected by a conflat flange that sandwiches In addition, the flange 64 at the lower end of the cylindrical member 63 for inserting a conductive cable and the connecting flange 68 are connected by a conflat flange holding a gasket 69, so that the airtightness is high. That is, since the portions where the attachment / detachment work is performed during the normal work are connected by the conflat flange, high airtightness can always be obtained. Also,
The inside of the connecting flange 10 is hermetically sealed to the outside by the bellows 40 and the rear end connecting member 37. Further, the inside of the connecting flange 10 is sealed with a bellows 59 with high airtightness to the inside of the cylindrical connecting member 38 for accommodating the operation rod 58 and the adjusting force receiving member 31 and the like. Therefore, the inside of the connecting flange 10 and the inside of the head accommodating hole 2a inside the lens barrel 1 communicating therewith can be highly airtight with respect to the atmosphere outside the lens barrel 1. For this reason, the head receiving hole 2a
The inside can be maintained at a high degree of vacuum. Therefore, the biprism device can be used under an ultra-high vacuum.

The rotor rotation driving device (54 to 62 + 1)
06 to 111), the operation rod 58 (see FIG. 2) and the wire connecting rod 11
1 moves forward and backward. At this time, the rotor 81 connected to the operation wire 106 rotates. Due to the rotation of the rotor 81, the position of the filament 96 supported by the rotor 81 and the pair of ground electrodes 84a and 84b sandwiching the filament 96 rotate in a horizontal plane. For this reason, the rotational position of the filament 96 with respect to the sample can be adjusted, so that it is not necessary to first accurately position the sample.

The conductive cables 66, 126 and 1
The contact terminals 118 and 119 (FIG. 1)
3), a voltage can be applied between the piezoelectric driving conductive plate 87 and the piezoelectric ground connection conductive plate 88. By changing the direction of the applied voltage (the direction of +-), the position of the portion of the piezoelectric body 91 that supports the filament 96 can be precisely controlled. In this case, the position of the filament 96 between the ground electrodes 84a and 84b can be precisely controlled on the order of nm. Also,
In this embodiment, regardless of the rotational position of the rotor 81, the position of the filament 96 is
Can be precisely moved in a direction perpendicular to the direction in which

(Modifications) Although the embodiments of the present invention have been described in detail, the present invention is not limited to the above-described embodiments, but falls within the scope of the present invention described in the appended claims. Thus, various changes can be made. Modified embodiments of the present invention will be exemplified below.

(H01) Piezoelectric body 91 mounted on rotor 81
Instead of using a cylindrical one, it is possible to use a pair of plate-shaped or prism-shaped piezoelectric bodies that are arranged facing each other.

[0043]

The above-described sample holder and sample rotation preventing member of the present invention have the following effects. (E01) The movement of the filament of the electron beam biprism device can be controlled on the order of nm. Further, the direction in which the sample is desired to be observed and the direction of the filament can be easily matched. Therefore, the observation or inspection position of the sample can be accurately moved to the target position, so that it is possible to easily and reliably observe or inspect a portion of the sample to be observed or inspected.

[Brief description of the drawings]

FIG. 1 is a transmission electron microscope (charged particle beam device)
1 is a plan view of an embodiment of an electron beam biprism device of the present invention mounted on a lens barrel of FIG.

FIG. 2 is a sectional view taken along line II-II of FIG.

3 is an explanatory view of a head main body of an embodiment of the electron biprism device, FIG. 3A is a plan view, and FIG. 3B is a sectional view taken along the line IIIB-IIIB of FIG. 3A.

FIG. 4 is an explanatory view of a head body of the electron beam biprism device of the embodiment, and FIG. 4A is an arrow IV of FIG. 3B.
FIG. 4B is a view as seen from the arrow IVB in FIG. 4A.

FIG. 5 is an explanatory view of a head main body of the electron biprism device of the embodiment, and FIG. 5A is a view of VA-V in FIG. 3B.
FIG. 5B is a cross-sectional view taken along the line A, as viewed from the arrow VB in FIG. 3B.

6 is an explanatory view of a rotor used in the embodiment, FIG. 6A is a plan view, FIG. 6B is a sectional view taken along line VIB-VIB of FIG. 6A, and FIG. 6C is a line VIC-VIC of FIG. 6A. It is sectional drawing.

FIG. 7 is an enlarged vertical cross-sectional view of a head end portion of the electron beam biprism device of the embodiment.

FIG. 8 is an enlarged cross-sectional view of the tip of the head of the electron biprism apparatus of the embodiment, and is an arrow VIII of FIG.
FIG. 8 is a sectional view taken along line VIII.

FIG. 9 is an explanatory view of the rear rotor holding plate shown in FIG. 7 of the embodiment, FIG. 9A is a left side view, and FIG. 9B.
FIG. 9C is a bottom view as viewed from the arrow IXB in FIG. 9A.
FIG. 9 is a front side view as viewed from the arrow IXC in FIG. 9B.
D is a sectional view taken along the line IXD-IXD of FIG. 9B.

10 is an explanatory view of the rotor tip side holding member shown in FIG. 7; FIG. 10A is a left side view, FIG. 10B is a bottom view, viewed from an arrow XB in FIG. 10A, and FIG. It is arrow XC-XC sectional view taken on the line of FIG. 10B.

FIG. 11 is a top view of a head of the electron biprism device of the embodiment.

FIG. 12 is a partially sectional front view of a head of the electron beam biprism device of the embodiment.

FIG. 13 is a partial cross-sectional bottom view of the head of the electron biprism device of the same embodiment.

FIG. 14 is a circuit diagram of the electron biprism device of the embodiment.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... lens barrel, 4 ... electron beam biprism mounting member, 47 ... head main body, 58 ... operation rod, 54 ... operation rod operation member, (7-62) ... head support member, 73a ... rotor support hole, 47 ... head Main body, 81: rotor, 87: conductive plate for driving piezoelectric body, 88: conductive plate for connecting piezoelectric ground, 9
DESCRIPTION OF SYMBOLS 1 ... Piezoelectric body, 91a ... Piezoelectric ground electrode, 92 ... Piezoelectric drive electrode, 96 ... Filament, 121 ... Conductive cable, (31 + 37-39 + 42 + 43) ... Inner cylinder, (24)
+28) ... inner cylinder moving operation member, (84a, 84b) ... ground electrode, (86a, 86b) ... filament conductive plate, (10 + 12) ... outer cylinder, (54-62 + 106-1)
11) ... rotor rotation driving device, (116 to 119) ... contact terminals,

Claims (2)

[Claims] 1. An electron biprism device having the following requirements: (A01) a cylindrical electron penetrating a lens barrel of an electron microscope arranged so as to surround the outside of a path of an electron beam emitted from an electron gun; An outer cylinder mounted on the outer end of the line biprism mounting member, an inner cylinder supported movably in the axial direction inside the outer cylinder, and an inner cylinder moving operation member for moving the inner cylinder forward and backward in the axial direction A head support member having an operation rod movably supported in the axial direction in the inner cylinder, and an operation rod operation member for moving the operation rod forward and backward; (A02) a base end portion at the distal end of the inner cylinder; Head body connected and formed with a rotor support hole at the tip, (A03)
A ring-shaped and plate-shaped conductive plate for driving a piezoelectric body, which is rotatably supported by the rotor support hole and has a pair of ground electrodes arranged to face each other with a rotation axis interposed therebetween; A rotor having a conductive plate for connecting a piezoelectric ground and a conductive plate for feeding a filament; (A04) a rotor rotation driving device for rotating the rotor in accordance with the forward and backward movement of the operating rod; and (A05) fixedly supported by the head body. And a contact terminal for contacting the piezoelectric body drive conductive plate, the piezoelectric ground connection conductive plate, and the filament power supply conductive plate that rotate and move with the rotation of the rotor,
(A06) a conductive cable having a power supply lead wire connected to each of the contact terminals, and (A07) a piezoelectric body supported by the rotor and arranged with a space sandwiched between the pair of ground electrodes (A08) a filament supported at both ends by the piezoelectric body and disposed between the pair of ground electrodes; (A09) a piezoelectric body drive electrode and a piezoelectric ground formed on opposite surfaces of the piezoelectric body, respectively; An electrode, (A010) the piezoelectric body displaced so as to move the filament in a horizontal direction when a piezoelectric body drive voltage is applied between the piezoelectric body drive electrode and the piezoelectric body ground electrode, (A011) the piezoelectric body A conducting wire connecting between the driving conductive plate and the piezoelectric driving electrode, a conducting wire connecting the piezoelectric ground connecting conductive plate and the piezoelectric ground electrode, and Lament feeding conductive plate and conductive wire for connecting the filament. 2. The electron biprism device according to claim 1, which satisfies the following requirements: (A012) The piezoelectric body having a cylindrical shape.