JP3897893B2 - 変位拡大装置およびこれを用いた微小領域走査装置 - Google Patents

変位拡大装置およびこれを用いた微小領域走査装置 Download PDF

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Publication number
JP3897893B2
JP3897893B2 JP05391098A JP5391098A JP3897893B2 JP 3897893 B2 JP3897893 B2 JP 3897893B2 JP 05391098 A JP05391098 A JP 05391098A JP 5391098 A JP5391098 A JP 5391098A JP 3897893 B2 JP3897893 B2 JP 3897893B2
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Japan
Prior art keywords
fixed
rotating pair
displacement
piezoelectric element
pair
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Expired - Fee Related
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JP05391098A
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English (en)
Japanese (ja)
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JPH11248719A (ja
JPH11248719A5 (enExample
Inventor
克則 本間
宏 村松
典孝 山本
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Seiko Instruments Inc
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Seiko Instruments Inc
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Priority to JP05391098A priority Critical patent/JP3897893B2/ja
Publication of JPH11248719A publication Critical patent/JPH11248719A/ja
Publication of JPH11248719A5 publication Critical patent/JPH11248719A5/ja
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Publication of JP3897893B2 publication Critical patent/JP3897893B2/ja
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Expired - Fee Related legal-status Critical Current

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Control Of Position Or Direction (AREA)
JP05391098A 1998-03-05 1998-03-05 変位拡大装置およびこれを用いた微小領域走査装置 Expired - Fee Related JP3897893B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP05391098A JP3897893B2 (ja) 1998-03-05 1998-03-05 変位拡大装置およびこれを用いた微小領域走査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP05391098A JP3897893B2 (ja) 1998-03-05 1998-03-05 変位拡大装置およびこれを用いた微小領域走査装置

Publications (3)

Publication Number Publication Date
JPH11248719A JPH11248719A (ja) 1999-09-17
JPH11248719A5 JPH11248719A5 (enExample) 2005-03-17
JP3897893B2 true JP3897893B2 (ja) 2007-03-28

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ID=12955882

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JP05391098A Expired - Fee Related JP3897893B2 (ja) 1998-03-05 1998-03-05 変位拡大装置およびこれを用いた微小領域走査装置

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JP (1) JP3897893B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4343879B2 (ja) * 1999-09-27 2009-10-14 キヤノン株式会社 切削加工方法
JP3815789B1 (ja) * 2005-03-11 2006-08-30 株式会社マコメ研究所 変位伝達装置
JP4958139B2 (ja) * 2006-02-14 2012-06-20 日置電機株式会社 変位最終出力端付きの変位拡大機構および該変位拡大機構を具備させた処理装置
JP5487462B2 (ja) * 2008-07-11 2014-05-07 国立大学法人秋田大学 作動変換型変位拡大装置
CN102904481A (zh) * 2012-03-08 2013-01-30 中南大学 一种螺旋型紧凑位移放大装置
CN107131404B (zh) * 2017-04-24 2019-03-19 天津大学 单驱双摆式纯转动微定位平台

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Publication number Publication date
JPH11248719A (ja) 1999-09-17

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