JP3886571B2 - Vacuum deposition apparatus for film and vacuum deposition method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
  The present invention relates to a vacuum deposition apparatus for film.And vacuum deposition methodIn detail, a vacuum deposition apparatus for film that performs vacuum deposition on the surface of a film such as paper, foil-like plastic or metalAnd vacuum deposition methodIn particular, a vacuum deposition apparatus for film that continuously performs vacuum deposition on the surface of a strip-shaped filmAnd vacuum deposition methodBelongs to the technical field.
[0002]
[Prior art]
  Conventionally, when vacuum deposition is performed on the surface of a film by a vacuum deposition apparatus such as an AIP apparatus (arc ion plating apparatus) or a sputtering apparatus, the film is damaged by heat input during deposition (film wrinkles, deformation, In order to prevent the occurrence of softening, melting, etc., a method is employed in which the film surface is vacuum-deposited while the film is conveyed while the film is in close contact with the surface of the roll body of the cooled roll. For example, in a vacuum, as shown in FIG. 1, while transporting the film 1 in a state where the film 1 is in close contact with the surface of the roll body 2 of the cooled roll, the deposition particles 3 are transferred from the target 4 to the surface of the film 1. The method of vapor deposition is adopted.
[0003]
  Here, the roll axial direction length of the roll body is longer than the width direction length of the film. In order to convey the film smoothly (smoothly), the surface roughness, parallelism, and roundness of the roll body are important for the roll, and these must be excellent (small values). . The surface roughness is generally required to be 1S or less.
[0004]
  In order to prevent the vapor deposition film from being formed on the surface in the vicinity of both ends of the roll body during vapor deposition, masking is performed by arranging a mask. For example, as shown in FIG. 2, masking is performed by arranging a mask 5 having an opening at the center. In FIG. 2, the mask 5 is illustrated on the right end side (from the right end to the center) of the mask, and the subsequent left end side (from the center to the left end) is not shown. .
[0005]
  When masking is performed in this manner, the region including the surface in the vicinity of both ends of the roll body is covered and becomes a shadow of the mask, so that it is difficult to form a deposited film on the surface in the vicinity of both ends of the roll body.
[0006]
[Problems to be solved by the invention]
  However, as can be seen from FIG. 2, the surface in the vicinity of both ends of the film also becomes a shadow of the mask, so this portion becomes an insufficient portion (hereinafter referred to as an insufficient film thickness portion) where the deposited film is thin. There is a problem that. Among these, both ends of the film and the vicinity in the vicinity thereof are often portions where the deposited film is not formed (hereinafter, non-deposited portions). As a result, the insufficient film thickness portion and the non-deposited portion cannot be used as a product and are cut off, resulting in poor product yield.
[0007]
  From the viewpoint of product yield, the masking width is kept to a minimum. As a result, the vapor deposition particles gradually enter between the mask and the roll (or the film on the roll), so the surface near both ends of the roll body. However, the vapor deposition film is not formed at all, and the vapor deposition particles adhere little by little. Therefore, while using as a vacuum vapor deposition apparatus for a long time, the vapor deposition film deposits to form a vapor deposition film. The In particular, when using a vacuum deposition apparatus with a high evaporation rate such as an AIP apparatus, the deposition film forming speed is relatively high. Thus, when a vapor deposition film is formed on the surface in the vicinity of both ends of the roll body portion, the film cannot be smoothly conveyed, and in some cases, the film cannot be conveyed. That is, if the film width of the film is always constant and the film is always conveyed straight, the film can be smoothly conveyed even if a vapor deposition film is formed on the surface in the vicinity of both ends of the roll body. However, in actuality, there are films with various film widths to be vacuum-deposited, and the film width is not constant, and even if the film width is constant, the film actually meanders slightly. Therefore, when a vapor deposition film is formed on the surface in the vicinity of both ends of the roll body, the film cannot be smoothly conveyed, and in some cases, the film cannot be conveyed.
[0008]
  Therefore, it is necessary to remove the deposited film formed on the surface in the vicinity of both ends of the roll body. When removing this deposited film, it is difficult to perform the work while the roll is incorporated in the vacuum deposition apparatus. Especially, the deposited film formed when the AIP (arc ion plating) method is applied is used for adhesion. In this case, it is more difficult, and the surface roughness of the roll body after removal of the deposited film is generally required to be 1 S or less. Therefore, the roll is removed from the vacuum deposition apparatus, and the deposited film is removed. Removal work is performed.
[0009]
  The present invention has been made paying attention to such circumstances, and its purpose is for a film to be vacuum-deposited on the film surface while transporting the film in close contact with the surface of the cooled roll body. Vacuum deposition equipmentAnd vacuum deposition methodIn the vacuum deposition, the film thickness insufficient part or non-deposition part of the vapor deposition film is not formed on the surface in the vicinity of both ends of the film, and a uniform vapor deposition film in the film width direction can be formed. As a result, the product yield can be improved. On the other hand, it is difficult to form a vapor deposition film on the surface of the roll body necessary for the smooth conveyance of the film, and a vapor deposition film that hinders the smooth conveyance of the film is formed on the surface of the roll body. Even when a deposited film that is difficult to smoothly transport the film is formed, it takes a long time to form the deposited film. Vacuum deposition apparatus for film that can be performed in the built-in state and can simplify the removal work of the deposited filmAnd vacuum deposition methodIs to provide.
[0010]
[Means for Solving the Problems]
  In order to achieve the above object, a vacuum deposition apparatus for film according to the present inventionAnd vacuum deposition methodIs a vacuum deposition apparatus for a film according to claim 1,The vacuum deposition method for a film according to claim 3.It has the following configuration.
[0011]
  That is, the vacuum deposition apparatus for a film according to claim 1 is:Placed opposite the targetWhile cooling at least the surface of the roll body of the roll and transporting the film in close contact with the surface of the roll body, On the side not in close contact with the roll bodyA vacuum deposition apparatus for a film for performing vacuum deposition on a film surface, wherein a roll axial direction length of the roll body is shorter than a width direction length of the film, and both ends of the roll body are end portions of the film Than the center of each film widthOn the surface near both ends of the film. To prevent the formation of insufficient film thickness or non-vapor deposition partsA vacuum deposition apparatus for a film, characterized in that
[0012]
  3. The film vacuum deposition apparatus according to claim 2, wherein both ends of the roll body are located 1 to 50 mm away from the center of the film width than both ends of the film. For vacuum evaporation.A vacuum deposition method for a film according to claim 3 is a vacuum deposition method for film in which vacuum deposition is performed on the film surface using the vacuum deposition apparatus for film according to claim 1 or 2.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
  The film vacuum deposition apparatus according to the present invention can be produced, for example, as follows, and can be used for a vacuum deposition process on the film surface.
[0014]
  A roll whose roll axial length in the roll axial direction is shorter than the length in the width direction (film width) of the film to be vacuum deposited is installed in a vacuum deposition chamber.
[0015]
  At this time, as shown in FIG. 3, the roll R is placed so that both end portions 7A and 7B of the roll body portion 7 are located at the center 8C of the film width, respectively, than the end portions 8A and 8B of the film 8 to be vacuum-deposited. Deploy. That is, the roll R is such that the left end 7A of the roll body 7 is located on the right side of the left end 8A of the film 8 and the right end 7B of the roll body 7 is located on the left side of the right end 8B of the film 8. Place.
[0016]
  Do not use a mask. Except for the above points, the structure is the same as that of a conventional vacuum deposition apparatus for film. That is, the surface roughness of the roll body 7 is 1 S or less as in the case of the conventional film vacuum deposition apparatus, and the parallelism and cylindricity are the same as in the case of the conventional film vacuum deposition apparatus, The roll body 7 is cooled. The vacuum deposition chamber is similar to the conventional film vacuum deposition apparatus in that there are an inlet and an outlet for the film. In FIG. 3, reference numeral 6 denotes a roll shaft portion.
[0017]
  Next, after the target 9 is arranged in the vacuum deposition chamber, the film is unwound little by little from the film unwinding drum around which the film to be vacuum deposited is wound, and inserted into the vacuum deposition chamber from the film entrance of the drum vacuum deposition chamber. The film is brought into close contact with the surface of the roll body 7 in the vacuum deposition chamber, and is taken out of the vacuum deposition chamber from the film outlet in the vacuum deposition chamber, and the leading end of the film is fixed to the film fixing portion of the film winding drum. At this time, the state in which the film 8 is in close contact with the surface of the roll body 7 is as shown in FIG. 3, and when viewed in the roll axial direction (or the film width direction), both end portions 7A and 7B of the roll body 7 are provided. Are positioned at the center 8C of the film width rather than at the end portions 8A and 8B of the film 8, respectively. That is, both end portions 8A and 8B of the film 8 are in a state of protruding from the roll body portion 7, respectively.
[0018]
  Next, the roll body 7 is cooled, and the vacuum deposition chamber is set to a predetermined degree of vacuum by a vacuum pump, and then the process gas is introduced and the target 9 is maintained while maintaining the predetermined pressure (degree of vacuum). While being heated by the heating means, the film 8 is conveyed at a predetermined conveying speed toward the outlet side of the film in the vacuum deposition chamber in a state where the film 8 is in close contact with the surface of the roll body portion 7 of the cooled roll. The film surface 8S is continuously vacuum-deposited, and the vacuum-deposited film is wound on a film take-up drum.
[0019]
  At this time, the film 8 is conveyed while meandering a little, but both end portions 8A and 8B of the film 8 always protrude from the roll body portion 7, that is, always both end portions 7A of the roll body portion 7 by the film 8. , 7B and the entire area including the surface in the vicinity thereof can be covered. Therefore, vapor deposition particles do not adhere to the surface of the roll body 7, and it is possible to prevent a vapor deposition film that hinders smooth conveyance of the film from being formed.
[0020]
  Further, as can be seen from FIG. 3, there is no shadow portion of the mask in the film 8 as in the case of the conventional apparatus shown in FIG. 2, so that the film thickness of the deposited film is insufficient on the surface in the vicinity of both ends of the film 8. No vapor deposition part or non-deposition part is formed, and a vapor deposition film having a uniform film thickness in the width direction of the film 8 can be formed.
[0021]
  In the above-described vacuum deposition apparatus for film, a roll whose roll axial direction length is shorter than the film width of the film to be vacuum deposited is used, but instead of this, vacuum deposition is attempted. Even when a film having a film width longer than the length of the roll body in the roll axial direction is used as the film to be performed, the same effect as described above is exhibited.
[0022]
  As can be seen from the embodiments of the present invention, according to the present invention, when vacuum deposition is performed on the film surface while transporting the film in close contact with the surface of the cooled roll body, On the surface in the vicinity of both ends of the film, insufficient film thickness portions or non-vapor deposition portions of the vapor deposition film are not formed, and it is possible to form a vapor deposition film with a uniform film thickness in the width direction of the film, which in turn improves the product yield. It is possible to prevent a vapor deposition film that hinders smooth conveyance of the film from being formed on the surface of the roll body. Further, as will be described later, even if a deposited film that hinders smooth conveyance of the film is formed, it takes a long time to form the deposited film, and the operation of removing the deposited film is rolled into a vacuum deposition apparatus. It is possible to carry out with the state of being incorporated, and the removal work of the deposited film can be simplified.
[0023]
  Details thereof will be described below.
[0024]
  The vacuum deposition apparatus for film according to the present invention, as described above,Placed opposite the targetWhile cooling at least the surface of the roll body of the roll and transporting the film in close contact with the surface of the roll body, On the side not in close contact with the roll bodyA vacuum deposition apparatus for a film for performing vacuum deposition on a film surface, wherein a roll axial direction length of the roll body is shorter than a width direction length of the film, and both ends of the roll body are end portions of the film Than the center of each film widthBy doing so, the film thickness insufficient part and the non-deposition part of the vapor deposition film are not formed on the surface in the vicinity of both ends of the film.It is characterized by that.
[0025]
  Therefore, the film can always be in a state where the entire region including the surface in the vicinity of both ends of the roll body portion is covered by the film, so that a vapor deposition film that hinders smooth conveyance of the film is not formed on the surface of the roll body portion. Can be. For this reason, it is not necessary to provide a mask for preventing the deposition film from being formed on the surface in the vicinity of both ends of the roll body as shown in FIG. As a result, an insufficient film thickness portion or a non-vapor deposition portion of the vapor deposition film is not formed on the surface in the vicinity of both ends of the film, and a vapor deposition film having a uniform film thickness in the width direction of the film can be formed. Can be improved.
[0026]
  In addition, both ends of the film from the roll bodyStick outSince the protruding film part is not in close contact with the surface of the roll body part, it is not cooled directly by the roll body part, but is in close contact with the surface of the roll body part and directly by the roll body part. The film portion protruding by heat exchange with the film portion to be cooled (heat conduction from the film portion) is also sufficiently cooled. Therefore, as for the protruding film portion, similarly to the film portion in close contact with the surface of the roll body portion, damage to the film due to heat input during vapor deposition does not occur, and damage to the entire film due to heat input during vapor deposition is prevented. Can do.
[0027]
  In the present invention, the roll has a roll body portion in close contact with the film, the length in the roll axial direction of the roll body portion is shorter than the length in the width direction of the film, and both end portions of the roll body portion are formed of the film. It is necessary to be positioned at the center of the film width from the end portion, and at least the surface of the roll body portion to be cooled. As long as these requirements are satisfied, the type of roll (shape, constituent material, etc.) is not particularly limited. For example, the roll has a relatively simple shape as shown in FIG. 3, that is, the roll body 7 and the roll shaft. 6 and the so-called stepped roll R as shown in FIG.₁Etc. can be used.
[0028]
  Stepped roll R as shown in FIG.₁In this case, the maximum diameter roll body 12 corresponds to the roll body in close contact with the film. The length in the roll axis direction of the roll body 12 is shorter than the length in the width direction of the film 13, and both end portions 12A and 12B of the roll body 12 are respectively longer than the end portions 13A and 13B of the film 13. The requirement for the roll can be satisfied by being positioned closer to the center 13C of the film width and at least the surface of the roll body 12 is cooled. In FIG. 4, reference numeral 10 denotes a roll shaft portion, and 11 denotes a small-diameter cylindrical portion. The diameter of the small-diameter cylindrical portion 11 is considerably larger than that of the roll shaft portion 10, but the roll body 12 to which the film 13 is in close contact. The film 13 is not in contact with the small diameter cylindrical portion 11.
[0029]
  Such stepped roll R₁4 is used so as to satisfy the above requirements as shown in FIG. 4, as in the case of the apparatus shown in FIG. 3, a vapor deposition film that interferes with the smooth conveyance of the film 13 is formed on the surface of the roll body 12. In addition, an insufficient film thickness portion or a non-vapor deposition portion of the vapor deposition film is not formed on the surface in the vicinity of both ends of the film 13, and a vapor deposition film having a uniform film thickness in the width direction of the film 13 can be formed. .
[0030]
  In the case of the apparatus shown in FIG. 4, the roll has a small-diameter cylindrical part 11 whose diameter is considerably larger than that of the roll shaft part 10. Therefore, as compared with the case of the apparatus shown in FIG. The area on the rear side of the roll when the target position side is the front side of the roll, ie, the upper side in FIG. Thus, there is an advantage that the deposited film is hardly formed (attached) on the surface and the like, and the attached area becomes small.
[0031]
  On the other hand, in the case of the apparatus shown in FIG. 4, a vapor deposition film is formed and laminated on the surface of the small-diameter cylindrical portion 11, and the vapor deposition film comes into contact with the film over a long period of use, thereby smoothly transporting the film. There is concern that it will be a hindrance. However, since it takes a very long time for the deposited film to be laminated so as to come into contact with the film, the deposited film can be used without requiring removal of the deposited film for a long period of time. In addition, when a deposited film is formed on the surface of the small-diameter cylindrical portion 11 that hinders the smooth conveyance of the film, it is necessary to remove the deposited film on the surface of the small-diameter cylindrical portion 11; Since it is the diameter before film adhesion and does not come into contact with the film, it is not necessary that the surface roughness after removal of the vapor deposition film is excellent, so removal of the vapor deposition film on the surface of the small diameter cylindrical portion 11 can be done with a grinder or chisel etc. It can be removed without hindrance, and such a removal operation of the deposited film can be performed while the roll is incorporated in the vacuum deposition apparatus. In addition, the time until the vapor deposition film that hinders the smooth conveyance of the film is formed on the surface of the small diameter cylindrical portion 11 is increased by increasing the difference in diameter between the roll barrel portion 12 and the small diameter cylindrical portion 11. Become.
[0032]
  Therefore, even in the case where a vapor deposition film that hinders the smooth conveyance of the film is formed as in the case of the apparatus shown in FIG. 4, the time until the formation is long, and the operation of removing the vapor deposition film is also necessary. Can be performed while the roll is incorporated in the vacuum vapor deposition apparatus, and the operation of removing the vapor deposition film is simple.
[0033]
  By the way, regarding the positional relationship between the both ends of the roll body and the both ends of the film, the both ends of the roll body are positioned 1 to 50 mm away from the center of the film width respectively than the both ends of the film. It is desirable to do so (the vacuum deposition apparatus for a film according to claim 2). That is, the left end of the roll body is located 1-50 mm to the right of the left end of the film, and the right end of the roll body is 1-50 mm to the left of the right end of the film. It is desirable to be positioned. By doing so, when the film is transported while minimizing the meandering of the film, a margin of about 1 mm can be secured, and a vapor deposition film that hinders the smooth transportation of the film is surely not formed on the surface of the roll body. In addition, the entire film including the film portion protruding from the roll body portion can be more reliably prevented from being damaged by heat input during vapor deposition. Here, when the distance between the end of the roll body and the end of the film is outside the range of 1 to 50 mm and less than 1 mm, when the film is conveyed while being relatively large meandering, The vicinity of the end is not covered by the film, and a deposited film tends to be formed on the surface near the end of the roll body. On the other hand, if it exceeds 50 mm, the end of the film or the vicinity thereof is not sufficiently cooled. There is a concern that thermal damage will occur, and there is a tendency that bending is caused due to insufficient support by the roll in the vicinity of the end of the film.
[0034]
  As described above, in the present invention, it is not necessary to arrange a mask for forming a deposited film on the surface of the roll body as shown in FIG. 2, and therefore the present invention has a remarkable effect that the mask can be unnecessary. Play. In other words, the mask requires a high degree of manufacturing accuracy, needs to be taken into consideration for the removal of the film, and also needs to be cooled when used in a vacuum deposition chamber. Although it is desired to reduce the quantity and most preferably to eliminate the need for a mask, the present invention has the advantage that a mask can be dispensed with and this demand can be met.
[0035]
  Thus, in the present invention, it is not necessary to arrange a mask, but the present invention is not limited to not using a mask, and a mask can be used. For example, a mask is used as shown in FIGS. can do.
[0036]
  The apparatus shown in FIG. 5 is provided with masks 14 and 15 in the apparatus shown in FIG. 3, and the apparatus shown in FIG. 6 is provided with masks 16 and 17 in the apparatus shown in FIG. When a mask is provided as shown in these figures, the deposited film is difficult to adhere to the surface of the equipment or the like on the rear side of the roll, and the adhesion area is reduced. Since these masks are for the purpose of exhibiting such operational effects, the structure is extremely simple compared to the mask as shown in FIG.
[0037]
  Here, in the apparatus shown in FIG. 6, the small-diameter cylindrical portion 11 reduces the deposition film adhesion area to the equipment on the rear side of the roll, so the mask is arranged at a position considerably away from the film end. On the other hand, in the apparatus shown in FIG. 5, the distance between the mask and the film end is narrow. Therefore, the apparatus shown in FIG. 6 can form a deposited film having a more excellent film thickness uniformity in the width direction of the film than the apparatus shown in FIG. In the apparatus shown in FIG. 6, when the distance between the mask and the film end is narrowed, the deposition film hardly adheres to the surface of the small diameter cylindrical portion 11.
[0038]
  In the present invention, the type of film to be used is not limited, and for example, a film such as paper, foil-like plastic or metal can be used. The cooling means for the surface of the roll body is not limited. For example, it is possible to adopt a method in which the roll body is formed in a hollow cylindrical shape and cooling water is circulated and supplied to the hollow part. The roll body surface must be cooled, but other parts may be cooled at the same time. The length in the circumferential direction of the roll body portion of the intimate contact between the surface of the roll body portion and the film is not limited. In order to keep the size of the apparatus to the minimum necessary, it is only necessary to have a length in the circumferential direction of the roll body that satisfies the cooling. The conveyance speed of the film is not limited, and may be appropriately determined depending on the required cooling degree of the film, the required thickness of the deposited film, and the like. The type of vacuum deposition means is not limited, and for example, an AIP method or a sputtering method can be applied.
[0039]
【Example】
Example 1
  The film was vacuum-deposited by the same apparatus and method as those described as examples in the embodiment of the invention. However, the films, rolls and the like to be vacuum deposited were limited as follows.
[0040]
  (1) As the film 8 to be vacuum-deposited, an etching aluminum film having a thickness of 50 μm, a width of 500 mm, and a total length of 2000 m was used. The film 8 is wound around a film unwinding drum before vapor deposition.
  (2) As the roll R, a roll body 7 having a length in the roll axial direction: 480 mm and a roll body diameter: 600 mm was used. The roll body portion 7 is made of hollow cylindrical stainless steel, and the roll body portion is cooled by circulating and supplying cooling water to the hollow portion. The surface roughness of the roll body 7 is 0.5 S.
  (3) The length of the roll body 7 in the roll axis direction is 20 mm shorter than the film width, and the roll R is arranged so that the center of the length is located at the center 8C of the film width. That is, the distance between the left end of the roll body 7 and the left end of the film 8 was 10 mm, and the distance between the right end of the roll body 7 and the right end of the film 8 was 10 mm.
  (4) Ti (titanium) was used as the target 9. The AIP method was applied as the type of vacuum deposition means. The deposited film formed on the film surface is made of TiN (titanium nitride).
  (5) The circumferential length of the roll barrel portion in the circumferential direction at the intimate contact between the surface of the roll barrel portion 7 and the film 8 was set to 1500 mm.
  (6) The conveyance speed of the film 8 was 2000 mm / min.
  (7) The degree of vacuum in the vacuum deposition chamber during deposition was maintained at 1.5 Pa.
  (8) The target thickness of the deposited film to be formed was 0.1 ± 0.02 μm.
[0041]
  The above vacuum deposition was performed continuously and repeated. That is, when vapor deposition on the first film 8 was completed, vacuum vapor deposition on the next film (undeposited) was performed in the same manner as described above, and this was repeated one after another, and vapor deposition was performed on a total film of 5000 m. .
[0042]
(Comparative Example 1)
  Using the apparatus shown in FIG. 2, vacuum deposition was performed on the film 1 as in Example 1. That is, the roll body 2 has a length in the roll axis direction: 600 mm and a roll body diameter: 600 mm, and the center of the roll axis direction length of the roll body 2 is the film width as shown in FIG. A roll was placed so as to be positioned at the center of the mask, and a mask 5 was placed. Except for this point, vacuum deposition was performed by an apparatus and method having the same configuration as in Example 1. The length of the roll body 2 in the roll axis direction is 100 mm longer than the film width, the distance between the left end of the roll body 2 and the left end of the film 1 is 50 mm, the right end of the roll body 2 and the film 1 The distance from the right end of the is 50mm.
[0043]
  As a result, in the case of Comparative Example 1, it was confirmed that an insufficient film thickness portion and a non-deposition portion were formed on the surface in the vicinity of both ends of the film continuously from the start time to the end of the evaporation. In addition, although the degree of meandering during smooth conveyance of the film was 5 to 10 mm in the roll axis direction, the film could not be smoothly conveyed from the time when the film was deposited by 500 m. It was confirmed that this was due to the formation of a deposited film that hindered the smooth conveyance of the film on the surface in the vicinity of both ends of the roll body.
[0044]
  On the other hand, in the case of Example 1, an insufficient film thickness portion or a non-vapor deposition portion of the vapor deposition film is not formed on the surface in the vicinity of both ends of the film, and a vapor deposition film having a uniform film thickness in the width direction of the film is formed. It was confirmed that all can be used as a product. Moreover, although the degree of meandering of the film was 5 to 10 mm in the roll axis direction, the film could be smoothly conveyed during the entire vapor deposition (total length of the vapor deposited film was 5000 m). When the surface of the roll body was observed after vapor deposition, no vapor deposition film that hindered smooth conveyance of the film was observed. In both cases of Example 1 and Comparative Example 1, the entire film was not damaged by heat input during vapor deposition.
[0045]
(Example 2)
  Using the apparatus shown in FIG. 4, vacuum deposition was performed on the film 13 as in Example 1. That is, as the roll, the length of the roll body portion 12 in the roll axial direction is 480 mm, the diameter of the roll body portion is 600 mm, the diameter of the small diameter cylindrical portion 11 is 594 mm, and the lengths of the left and right small diameter cylindrical portions are each 100 mm. Stepped roll R₁As shown in FIG. 4, the roll was placed so that the center of the roll body portion 12 in the roll axial direction was positioned at the center of the film width. Except for this point, vacuum deposition was performed by an apparatus and method having the same configuration as in Example 1. The distance between the left end of the roll body 12 and the left end of the film 13 is 10 mm, and the distance between the right end of the roll body 12 and the right end of the film 13 is 10 mm.
[0046]
  As a result, a vapor deposition film was formed and laminated on the surface of the small-diameter cylindrical portion 11, but the vapor deposition film did not come into contact with the film and hindered smooth conveyance of the film. The other results were the same as in Example 1.
[0047]
(Example 3)
  Masks 14 and 15 are provided in the apparatus according to the first embodiment as shown in FIG. Except for this point, vacuum deposition was performed on the same film 8 using the same apparatus and method as in Example 1. As a result, compared with the case of Example 1, it was difficult to adhere a vapor deposition film to the surface of the apparatus etc. in the back side of a roll, and the adhesion area became small. Other results were the same as those in Example 1.
[0048]
(Example 4)
  Masks 16 and 17 were provided in the apparatus according to Example 2 as shown in FIG. Except for this point, vacuum deposition was performed on the same film 13 by the apparatus and method having the same configuration as in Example 2. As a result, compared with the case of Example 2, it was difficult for the vapor deposition film to adhere to the surface of equipment or the like on the rear side of the roll, and the adhesion area was reduced. Other results were the same as in Example 2. In addition, compared with the case of Example 3, the film thickness uniformity was more excellent.
[0049]
(Example 5)
  In place of the roll of Example 1, a roll body 7 having a roll axial length of 98 mm and a roll body diameter of 210 mm is used, films having different film widths are used, the left end of the roll body 7 and the film 8 The distance between the left end of the roll body 7 is 1 mm, and the distance between the right end of the roll body 7 and the right end of the film 8 is 1 mm. Except for this point, vacuum deposition was performed on the same film 8 using the same apparatus and method as in Example 1. The result was the same as in Example 1.
[0050]
(Example 6)
  Length of roll body 7 in the roll axial direction: using a roll of 98 mm, using films having different film widths, the distance between the left end of roll body 7 and the left end of film 8 being 50 mm, roll body 7 The distance between the right end of the film and the right end of the film 8 was 50 mm. Except for this point, vacuum deposition was performed by an apparatus and method having the same configuration as in Example 5. The result was the same as in Example 1.
[0051]
(Example 7)
  The length of the roll body 7 in the roll axis direction: using a roll of 98 mm, using films having different film widths, the distance between the left end of the roll body 7 and the left end of the film 8 is 0.5 mm. The distance between the right end portion of the portion 7 and the right end portion of the film 8 was set to 0.5 mm. Except for this point, vacuum deposition was performed by an apparatus and method having the same configuration as in Example 5. As a result, when the degree of meandering of the film was 0.6 to 1 mm in the roll axis direction, a deposited film was formed on the surface in the vicinity of the end of the roll body 7, but when the degree of meandering of the film was 0.5 mm or less, the roll body The deposited film was not formed on the surface of the portion 7, and the degree of meandering of the film was often 0.5 mm or less, and the film could be smoothly conveyed until the film was deposited 1000 m. Other results were the same as those in Example 1.
[0052]
(Example 8)
  Length of roll body 7 in the roll axial direction: using a roll of 98 mm, using films having different film widths, the distance between the left end of roll body 7 and the left end of film 8 being 60 mm, roll body 7 The distance between the right end of the film and the right end of the film 8 was set to 60 mm. Except for this point, vacuum deposition was performed by an apparatus and method having the same configuration as in Example 5. As a result, the film was slightly bent in the vicinity of the end of the roll, so that the film thickness uniformity of the deposited film in the width direction of the film slightly decreased. Other results were the same as those in Example 1.
[0053]
Example 9
  Length of roll body 7 in the roll axial direction: using a roll of 98 mm, using films having different film widths, the distance between the left end of roll body 7 and the left end of film 8 being 80 mm, roll body 7 The distance between the right end of the film and the right end of the film 8 was set to 80 mm. Except for this point, vacuum deposition was performed by an apparatus and method having the same configuration as in Example 5. As a result, the film thickness insufficiency part and the non-vapor deposition part of the deposited film were not formed on the surface in the vicinity of both ends of the film, but the film thickness uniformity in the width direction of the film was lower than in the case of Example 8. . Further, generation of wrinkles due to heat was slightly observed in the vicinity of the end of the film. Other results were the same as those in Example 1.
[0054]
【The invention's effect】
  The present invention relates to a vacuum deposition apparatus for a film that performs vacuum deposition on the film surface while transporting the film in close contact with the surface of the cooled roll body.And vacuum deposition methodIn the vacuum deposition, the film thickness insufficient part or non-deposition part of the vapor deposition film is not formed on the surface in the vicinity of both ends of the film, and a uniform vapor deposition film in the film width direction can be formed. As a result, the entire product can be used as a product, and the yield of the product can be improved. Even when a certain vapor deposition film is formed, the time until the formation is long, and further, the operation of removing the vapor deposition film can be performed with the roll incorporated in the vacuum vapor deposition apparatus. There is a remarkable effect that the work of removing the deposited film can be simplified.
[Brief description of the drawings]
FIG. 1 is a perspective view for explaining a vacuum deposition state by a conventional film vacuum deposition apparatus.
FIG. 2 is a perspective view showing a main part of a conventional vacuum deposition apparatus for film.
FIG. 3 is a front cross-sectional view showing the main part of a vacuum deposition apparatus for film according to an embodiment of the present invention.
FIG. 4 is a front cross-sectional view showing a main part of a vacuum deposition apparatus for a film according to one embodiment of the present invention.
FIG. 5 is a front cross-sectional view showing a main part of a vacuum deposition apparatus for a film according to one embodiment of the present invention.
FIG. 6 is a front cross-sectional view showing a main part of a vacuum deposition apparatus for a film according to one embodiment of the present invention.
[Explanation of symbols]
  1--film, 2--roll body, 3--deposited particles, 4 --- target, 5--mask, 6--roll shaft, 7--roll body, 7A--roll body Left end, 7B--Right end of roll body, 8 --- Film, 8A--Left end of film, 8B--Right end of film, 8C--Center of film width, 8S--Film surface, 9 --Target, 10--Roll shaft, 11--Small cylindrical part, 12--Roll body, 12A--Left end of roll body, 12B --Right end of roll body, 13--Film, 13A-- Left edge of film, 13B-- Right edge of film, 13C-- Center of film width, 14, 15-- Mask, 16, 17-- Mask, R--Roll, R₁--Stepped roll.

Claims (3)

The side that is not in close contact with the roll body while cooling the surface of at least the roll body of the roll disposed facing the target and transporting the film in close contact with the surface of the roll body A vacuum deposition apparatus for a film for performing vacuum deposition on the film surface of the film, wherein a roll axial direction length of the roll body is shorter than a width direction length of the film, and both ends of the roll body are at the end of the film. The film is characterized in that an insufficient film thickness portion or a non-deposition portion is not formed on the surface in the vicinity of both end portions of the film by being positioned from the center of the film width than the portion . Vacuum deposition equipment.   The vacuum deposition apparatus for a film according to claim 1, wherein both end portions of the roll body portion are located 1 to 50 mm away from the center of the film width from both end portions of the film. A vacuum deposition method for a film, wherein the film surface is subjected to vacuum deposition using the vacuum deposition apparatus for a film according to claim 1.

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