JPH07207444A - Vacuum deposition device - Google Patents

Abstract

PURPOSE:To obtain a vacuum deposition device in which safe and good vacuum deposition can be performed. CONSTITUTION:The vacuum deposition device has a vapor deposition chamber in a vacuum vessel equipped with a cooling roll 4 on which a substrate 1 is wound and travelled from an expander roll 9 and a vapor deposition device 17 to perform vacuum deposition on the substrate while travelling. The distance from the end position of winding on the expander roll 9 to the initial position of winding on the cooling roll 4 is specified to <=500mm so that vacuum deposition is performed while proper tensile state is kept.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for vacuum-depositing a metallic material or a non-metallic material on a running substrate such as a plastic film or paper.

[0002]

2. Description of the Related Art FIG. 3 shows an example of an apparatus for depositing a metal such as aluminum on a moving substrate in a vacuum container by vacuum deposition.

After the substrate 1 is delivered from the delivery reel 105, it passes through a guide roll 103 and a cooling roll 104.
The vapor deposition material 117 is vacuum-deposited by the vapor deposition device 107 composed of the crucible 115 and the heating coil 116 while being wound around, and then the winding reel 10 is passed through the guide roll 103 again.
Take up to 6.

When the substrate 1 passes through the expander roll 109, the substrate 1 is slightly tensioned in the width direction, and the cooling roll 104
It is vacuum-deposited while passing through the lower surface side. Incidentally, in the figure, 114
Is an evacuation device.

[0005]

As described above, the substrate 1 is tensioned in the width direction by the expander rolls 109 in order to remove the looseness in the width direction before vapor deposition.

FIG. 4 shows the structure of the expander roll 109. In the expander roll 109, a plurality of bearings 118 are attached to a fixed shaft 120, and an outer ring 119 made of a flexible material such as rubber is provided on the outer periphery thereof. They are fitted together, and the roll width changes loosely in the circumferential direction (longest width = l ₁ ,
Average width = l ₃ , shortest width = l ₂ ).

Therefore, the outer ring 119 expands on the longest width kk side of the average width mm during one rotation, and conversely contracts on the shortest width nn side.

Therefore, by adjusting and installing the expander roll 109 so that the traveling substrate 1 is in contact with the outer ring 119 from the position of the shortest width nn to the position of the longest width kk, the substrate 1 is always tensioned in the width direction. With is attached,
It is continuously fed to the cooling roll 104.

However, the installation position of the expander roll 109 is not appropriate, and the expander roll 10 of the substrate 1 is not installed.
If the distance between the winding end position with 9 and the winding start position with the cooling roll 104 is too large, the effect of tension in the width direction on the substrate 1 is weakened and the substrate 1 is deformed by heat during vapor deposition.
If the deterioration occurs, and if it is too close, on the contrary, the influence of high heat from the vapor deposition device 117 becomes strong and the expander roll 109 is damaged, or if the cooling process in advance for the substrate 1 is bad, the same as above. There was a problem such as the thermal deformation and thermal deterioration of.

Therefore, an object of the present invention is to provide a vacuum vapor deposition apparatus which can perform safe and excellent vacuum vapor deposition.

[0011]

To achieve the above object, in a vacuum vapor deposition apparatus according to the present invention, a substrate passes through a cooling roll in which a substrate is wound / run through an expander roll and the cooling roll. In a vacuum vapor deposition apparatus having a vapor deposition chamber in which a vapor deposition apparatus for performing vacuum vapor deposition on a substrate is provided, a distance from a winding end position with the expander roll to a winding start position with the cooling roll is within 500 mm. It is characterized in that it is set to. Further, it is preferable to provide a touch roll between the expander roll and the cooling roll so as to be in contact with the cooling roll.

[0012]

According to the above construction, the substrate carried into the vapor deposition chamber is tensioned in the width direction to remove looseness when passing through the expander roll, and is reliably wound around the cooling roll by the touch roll, so It is vacuum-deposited while maintaining a perfect tension.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a schematic view of a main part of a vacuum vapor deposition device according to the present invention. Since a payout device, a winding device and a vapor deposition chamber are the same as those in FIG. 3, they are omitted here with reference to FIG.

As shown, a cooling roll 4 is provided in the vapor deposition chamber.
And a vapor deposition apparatus 1 comprising a crucible 15 and a heating coil 16.
7, and a guide roller 3 and an expander roll 9 are installed between the payout device (not shown) and the cooling roll 4 (on the input side). Since the expander roll 9 has the same configuration as that shown in FIG. 4, detailed description thereof will be omitted here with reference to FIG.

Further, a touch roll 18 is installed between the expander roll 9 and the cooling roll 4. At this time, the expander roll 9 is cooled from the winding end position of the substrate 1 with the roll 9. It is installed so that the distance L to the winding start position with the roll 4 is within L = 500 mm.

With this structure, when the substrate 1 dispensed from the dispenser passes through the guide roll 3 and the expander roll 9, a predetermined tension force is applied in the width direction to remove looseness. Then, the touch roll 18 is surely wound around the cooling roll 4 to run, and vacuum vapor deposition is performed by the vapor deposition device 17 while passing through the lower surface side of the cooling roll 4, and then the expander roll 9 and the guide roll (not shown). ) And is wound up by a winding device (not shown).

During the traveling operation of the substrate 1 described above, the tension force applied to the substrate 1 by the expander roll 9 gradually decreases when the portion leaves the expander roll 9.

FIG. 2 is a graph in which the reduction state of the tension force in the width direction (extension of the substrate width) applied to the substrate 1 is investigated.
The vertical axis shows the change rate (%) of the board width (at a specific location), and the horizontal axis shows the travel distance (mm). Here, points a-b indicate the winding length with the expander roll 9.

As can be seen from this graph, the rate of change of the substrate width is the maximum value (1) at the end point b of winding with the expander roll 9.
%), It decreases almost linearly away from the expander roll 9, and the rate of change is almost 0% at a distance of 500 mm or more from point b. It has been confirmed that this tendency hardly changes even if the winding length with respect to the expander roll 9 (related to the roll diameter and the winding incident angle of the substrate) is slightly changed.

Based on this survey data, this apparatus uses an expander roll so that the distance from the winding end position of the substrate 1 with the expander roll 9 to the winding start position of the cooling roll 4 is within 500 mm. 9 is installed, so substrate 1
Is sent to the cooling roll 4 while the tension force in the width direction is held by the expander roll 9, and the action of the touch roll 18 ensures the winding around the cooling roll 4, thereby ensuring safety. And good vacuum deposition is performed.

[0021]

As described above, according to the present invention, when the substrate carried into the deposition chamber is passed through the expander roll, a proper tension force is applied in the width direction so that the looseness is removed and the tension is reduced. The state is maintained and the sheet is fed to the cooling roll, and the touch roll ensures the winding around the cooling roll. By these, thermal deformation and thermal alteration that are likely to occur on the substrate during vapor deposition are suppressed, and damage to the expander roll and the like does not occur, and safe and favorable vacuum vapor deposition can be performed.

[Brief description of drawings]

FIG. 1 is a main part configuration diagram of an embodiment of a vacuum vapor deposition device according to the present invention.

FIG. 2 is a data diagram showing an effect of this device.

FIG. 3 is a diagram showing a conventional continuous vacuum deposition apparatus.

FIG. 4 is a configuration diagram of an expander roll.

[Explanation of symbols]

 1 Substrate 3 Guide Roll 4 Cooling Roll 9 Expander Roll 17 Vapor Deposition Device 18 Touch Roll

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Kenji Shinya 4-6-22 Kannon Shinmachi, Nishi-ku, Hiroshima City, Hiroshima Prefecture Mitsubishi Heavy Industries, Ltd. Hiroshima Research Institute (72) Hajime Okita 4-chome, Kannon Shinmachi, Nishi-ku, Hiroshima Prefecture 6-22 No. 22 Hiroshima Research Laboratory, Mitsubishi Heavy Industries, Ltd.

Claims (2)

[Claims] 1. A vacuum vapor deposition device comprising a cooling roll in which a substrate is wound and runs through an expander roll in a vacuum container, and a vapor deposition chamber internally provided with a vapor deposition device for performing vacuum vapor deposition on the substrate passing through the cooling roll. In the apparatus, the distance from the winding end position with the expander roll to the winding start position with the cooling roll is set within 500 mm, which is a vacuum vapor deposition device. 2. The vacuum vapor deposition apparatus according to claim 1, wherein a touch roll is provided between the expander roll and the cooling roll so as to be in contact with the cooling roll.