JP7355519B2 - Winding type film forming equipment and vacuum processing method - Google Patents

Description

The present invention relates to a film for film formation, a winding type film formation apparatus, and a vacuum processing method.

In a winding type film forming apparatus, a film forming film (web) is unwound from an unwinding roller, a film forming process is performed on the film forming surface thereof, and then the film forming film is wound up by a winding roller. However, since the film for film formation is long and strip-shaped, wrinkles may occur in the film for film formation taken up by the take-up roller.

Under these circumstances, attempts have been made to suppress the occurrence of wrinkles in the film for film formation by adjusting film formation conditions such as tension and heat applied to the film for film formation (for example, see Patent Document 1). ).

Japanese Patent Application Publication No. 2009-228014

However, even if the formation of wrinkles in the film for film formation during film formation is suppressed by the film forming conditions, the film for film for film formation already has wrinkles at the start of winding when the film for film formation is wound around the take-up roller. If wrinkles have occurred, there is a possibility that the wrinkles will be transferred to the film forming film that is subsequently wound up. In this case, wrinkles will remain in the film for film formation even if the film formation conditions are adjusted.

In view of the above circumstances, an object of the present invention is to provide a film-forming film, a winding-type film-forming apparatus, and a vacuum processing method that more reliably suppress the occurrence of wrinkles.

In order to achieve the above object, a film-forming film according to one embodiment of the present invention is a belt-shaped film-forming film that is unwound from an unwinding roller, subjected to vacuum treatment on the film-forming surface, and then wound around a take-up roller. be.
Both ends of the film for film formation are comprised of a first end and a second end.
The film-forming film is supported by the unwinding roller and the take-up roller, and when the film-forming film starts to be wound around the take-up roller starting from the first end, at least The first region including the length region up to the unwinding roller has a surface friction coefficient different from the surface friction coefficient of the other regions.

With such a film-forming film, the film-forming film easily slides in the axial direction of the take-up roller immediately after it starts being wound up on the take-up roller, and wrinkles are less likely to occur in the film-forming film.

In the above-mentioned film-forming film, the film-forming film has a first surface that is the film-forming surface and a second surface opposite to the first surface, and in the second surface, At least a portion of the first region may be configured to have a smaller coefficient of surface friction than the surface friction coefficient in regions other than the first region.

With such a film-forming film, on the second surface, at least a part of the first region is configured to be smaller than the surface friction coefficient in the region other than the first region, so that the take-up roller Wrinkles are less likely to occur in the deposition film that is wound up.

In the above-mentioned film-forming film, when the film-forming film starts to be wound around the take-up roller starting from the second end, the length region from the second end to at least the unwinding roller is The included second region may have a surface friction coefficient different from that of the other regions.

In such a film-forming film, the second region including the length region from the second end to at least the unwinding roller has a surface friction coefficient different from that of the other regions. Therefore, wrinkles are less likely to occur in the film forming film that is wound up on the take-up roller.

In the film for film formation, at least a portion of the second region on the first surface may be configured to have a smaller coefficient of surface friction than the surface friction coefficient of the region other than the second region.

With such a film-forming film, on the first surface, at least a part of the second region is configured to be smaller than the surface friction coefficient in the region other than the second region, so that the take-up roller Wrinkles are less likely to occur in the deposition film that is wound up.

In order to achieve the above object, a winding type film forming apparatus according to one embodiment of the present invention has a first end and a second end, and unwinds a belt-shaped film forming film from an unwinding roller, and This is a winding-type film-forming apparatus that vacuum-processes the film-forming surface of the film-forming film while winding it around a take-up roller.
The above-mentioned winding-type film-forming apparatus has a length region from the first end to at least the unwinding roller when the film-forming film starts to be wound around the winding roller starting from the first end. A surface treatment mechanism is provided that performs surface treatment on the first area including the area so as to have a surface friction coefficient different from the surface friction coefficient of the area other than the first area.

With such a winding-type film-forming device, the film-forming film easily slides in the axial direction of the wind-up roller immediately after it starts being wound up on the wind-up roller, making it difficult for wrinkles to occur in the film-forming film. Become.

In order to achieve the above object, a vacuum processing method according to one embodiment of the present invention includes a belt-shaped film forming film whose both ends are composed of a first end and a second end, and which is unwound from an unwinding roller and placed on a take-up roller. This is a vacuum processing method in which the film-forming surface of the film for film-forming is vacuum-processed while being rolled up.
In the above-described vacuum processing method, when the film-forming film starts to be wound around the take-up roller starting from the first end, a first end that includes a length region from the first end to at least the unwinding roller is set. One area is surface-treated to have a surface friction coefficient different from that of the areas other than the first area.

With such a vacuum processing method, the film-forming film easily slides in the axial direction of the take-up roller immediately after it starts being wound up on the take-up roller, and wrinkles are less likely to occur in the film-forming film.

As described above, according to the present invention, there are provided a film forming film, a winding type film forming apparatus, and a vacuum processing method in which the generation of wrinkles is more reliably suppressed.

Figure (a) is a schematic perspective view of a film-forming film according to this embodiment. Figures (b) and (c) are schematic perspective views showing how the film-forming film according to the present embodiment is wound around an unwinding roller. FIG. 1 is a schematic cross-sectional view of a winding type film forming apparatus according to the present embodiment. Figure (a) is a schematic perspective view showing the state immediately after the film-forming film according to the comparative example starts being wound around a take-up roller. Figure (b) is a schematic perspective view showing the state immediately after the film-forming film according to the present embodiment starts being wound around a take-up roller.

Embodiments of the present invention will be described below with reference to the drawings. In each drawing, XYZ axis coordinates may be introduced. In addition, the same members or members having the same function may be given the same reference numerals, and the description may be omitted as appropriate after the member has been described.

FIG. 1(a) is a schematic perspective view of a film-forming film according to this embodiment. FIGS. 1(b) and 1(c) are schematic perspective views showing the film forming film according to the present embodiment being wound around an unwinding roller. FIG. 2 is a schematic cross-sectional view of the winding type film forming apparatus according to this embodiment.

The film-forming film 100 shown in FIGS. 1(a) and 1(b) is a strip-shaped and elongated film base material installed in the winding-type film-forming apparatus 1 (FIG. 2). Examples of the film-forming film 100 include a metal film, a resin film, a resin film coated with a metal film, and the like.

Both ends of the film-forming film 100 are comprised of a first end 101 and a second end 102. Further, the film-forming film 100 has a first surface 111 that is subjected to vacuum treatment, and a second surface 112 opposite to the first surface 111. The first surface 111 is a film formation surface. In this embodiment, the first surface 111 is not necessarily the only surface on which the film is formed. When attempting double-sided film formation on the film-forming film 100, the second surface 112 also becomes a film-forming surface.

The film-forming film 100 is supported by an unwinding roller 31 and a winding roller 32 in the winding-type film-forming apparatus 1 . The film-forming film 100 is unwound from the unwinding roller 31, wound around the main roller 10 at a predetermined winding angle, and subjected to pretreatment, film-forming processing, etc. on the main roller 10. After this, the film-forming film 100 is wound up by the take-up roller 32.

Here, when the film-forming film 100 starts to be wound around the take-up roller 32 starting from the first end 101, the length region of the film-forming film 100 from the first end 101 to at least the unwinding roller 31 is The area including the first area is referred to as a first area 110.

For example, when the area from the first end 101 to the position P where the film-forming film 100 is released from the unwinding roller 31 is set as the paper passing area 110a, the first area 110 is the paper passing area 110a and the paper passing area 110a. It has a communication area 110b that is connected to.

The first region 110 is subjected to a selective surface treatment, and in the film-forming film 100, the first region 110 has a surface friction coefficient different from that of other regions. That is, at least a portion of the first region 110 and a region other than the first region 110 have different surface friction coefficients. For example, on the second surface 112, the surface friction coefficient in at least a portion of the first region 110 is configured to be smaller than the surface friction coefficient in regions other than the first region 110.

Further, such a configuration in which the surface friction coefficient differs depending on the region is not limited to the second surface 112, but in the first surface 111, the surface friction coefficient in at least a part of the first region 110 is different from the surface friction coefficient in the region other than the first region 110. It may be smaller than the surface friction coefficient.

Further, after the film forming process is performed on the first surface 111 of the film forming film 100 and the film forming film 100 is finished being wound around the take-up roller 32, a film is formed on the second surface 112 of the film forming film 100. When attempting to do so, the take-up roller 32 that took up the film-forming film 100 is used as the unwinding roller 31.

For example, as shown in FIG. 1(c), when the film-forming film 100 is fed out from the unwinding roller 31 with the second surface 112 as the film-forming surface, the film-forming film 100 is wound with the second end 102 as the starting point. It is wound around the take-up roller 32.

Here, when the film-forming film 100 starts to be wound around the take-up roller 32 starting from the second end 102, the length region from the second end 101 of the film-forming film 100 to at least the unwinding roller 31 is The area including this will be referred to as a second area 120.

For example, when the area from the second end 102 to the position P where the film-forming film 100 is released from the unwinding roller 31 is defined as the paper passing area 120a, the second area 120 is the paper passing area 120a and the paper passing area 120a. It has a communication area 120b that is connected to.

A selective surface treatment is performed on the second region 110, and in the film-forming film 100, the second region 120 has a surface friction coefficient different from that of other regions. That is, at least a portion of the second region 120 and a region other than the second region 120 have different surface friction coefficients. For example, on the first surface 111, the surface friction coefficient in at least a portion of the second region 120 is smaller than the surface friction coefficient in the region other than the second region 120.

Further, such a configuration in which the surface friction coefficient differs depending on the region is not limited to the first surface 111, but also in the second surface 112, where the surface friction coefficient in at least a part of the second region 120 is different from the surface friction coefficient in the region other than the second region 120. It may be smaller than the surface friction coefficient.

In the film-forming film 100, when the length from the first end 101 to the second end 102 is L0, the length L0 is configured to be 10 m or more and 10000 m or less. Further, the length L1 of the first region 110 or the length L2 of the second region 120 is not particularly limited, and is, for example, 1.5 times or more the length region from the first end 101 to the unwinding roller 31. It may be twice or less, and is 1 m or more and 50 m or less. Moreover, the thickness of the film-forming film 100 is 4 μm or more and several 100 μm or less.

The material of the film-forming film 100 includes at least one of copper foil, aluminum foil, nickel foil, stainless steel foil, and resin film. The resin includes any one of PET resin, OPP resin, CPP resin, PE resin, PEN resin, PI resin, PP resin, and the like.

Further, in the paper passing area 110a, an area extending from 1 m to 20 m from the first end 101 may be an untreated area where the surface is not treated. Further, in the paper passing area 120a, an area extending from 1 m to 20 m from the second end 102 may be an untreated area where the surface is not treated. Such an unprocessed area becomes a locking area for attaching and supporting the film-forming film 100 to the take-up roller 32.

The surface friction coefficient of the first region 110 or the second region 120 in the film-forming film 100 may be adjusted before the film-forming film 100 is installed in the winding-type film-forming apparatus 1. Surface treatment for adjusting the surface friction coefficient of the first region 110 or the second region 120 may be performed within the transfer-type film forming apparatus 1 .

In the winding type film forming apparatus 1 shown in FIG. 2, while the film forming film 100 is running in a vacuum container 70, metal is applied to the film forming surface (first surface 111 or second surface 112) of the film forming film 100. This is a film forming apparatus in which a film (for example, a lithium film) is formed. The winding type film forming apparatus 1 includes, for example, a main roller 10, a film forming source 20, a film traveling mechanism 30, a partition plate 40, a surface treatment mechanism 60, and a vacuum container 70.

The main roller 10 is a cylindrical roller made of metal such as iron, stainless steel, or aluminum. The main roller 10 rotates around a central axis C1. The main roller 10 is arranged between the film-forming film 100 and the film-forming source 20. The diameter of the main roller 10 is not particularly limited, and is smaller than the respective diameters of the unwinding roller 31 and the winding roller 32.

A rotational drive mechanism for rotationally driving the main roller 10 is provided outside the winding type film forming apparatus 1 . Alternatively, the main roller 10 may have a rotational drive mechanism. Alternatively, the main roller 10 may be a roller that is not rotated by a rotational drive mechanism but rotates freely around the central axis 10c. In the main roller 10, the outer circumferential surface 10s serves as a roller surface, and the outer circumferential surface 10s contacts the surface of the film-forming film 100 opposite to the film-forming surface of the film-forming film 100.

When the film-forming film 100 is running in the direction of arrow A, the main roller 10 in contact with the film-forming film 100 rotates counterclockwise, for example. At this time, the speed at which the outer circumferential surface 10s moves around the central axis 10c (tangential speed) is set, for example, to the same speed as the traveling speed of the film-forming film 100. As a result, while the film-forming film 100 is running, misalignment between the outer circumferential surface 10s and the film-forming film 100 is less likely to occur, and a film can be stably formed on the film-forming surface.

In this embodiment, a temperature control mechanism such as a temperature control medium circulation system may be provided inside the main roller 10 to adjust the temperature of the outer circumferential surface 10s. The temperature control mechanism is, for example, a temperature control medium circulation system.

The film forming source 20 includes a melting container 21 (crucible), a top plate 22, and a spout nozzle 23. The film forming source 20 faces the outer peripheral surface 10s of the main roller 10. The melting container 21 houses a vapor deposition material 25 such as lithium (Li), for example. The vapor deposition material 25 is melted in the melting container 21 by, for example, resistance heating, induction heating, electron beam heating, or the like.

The film traveling mechanism 30 includes an unwinding roller 31, a take-up roller 32, and guide rollers 33a, 33b, 33c, and 33d. The diameters of each of the unwinding roller 31 and the winding roller 32 are not particularly limited, and are configured to be smaller than the diameters of the guide rollers 33a, 33b, 33c, and 33d. A rotational drive mechanism for rotationally driving the unwinding roller 31 and the winding roller 32 is provided outside the winding type film forming apparatus 1 . Alternatively, each of the unwinding roller 31 and the take-up roller 32 may have a rotational drive mechanism.

The film-forming film 100 is wound around the unwinding roller 31 in advance and is unwound from the unwinding roller 31 . Thereafter, the film-forming film 100 is subjected to a film-forming process, and the film-forming film 100 is wound up by the winding roller 32.

For example, the film forming film 100 continuously fed out from the unwinding roller 31 is supported by the guide rollers 33a, 33b while running, and the running direction is changed by each of the guide rollers 33a, 33b, and the main roller 10 is wound around.

The film-forming film 100 wound around the main roller 10 is supported by the main roller 10 while contacting the outer peripheral surface 10s of the main roller 10, and guided to the guide roller 33c.

The film forming film 100 separated from the outer circumferential surface 10s of the main roller 10 is supported by the guide rollers 33c and 33d while running, and the running direction is changed by each of the guide rollers 33c and 33d, and the film is continuously attached to the take-up roller 32. It is rolled up.

The partition plate 40 is arranged between the film forming source 20 and the main roller 10. The partition plate 40 is provided with an opening 41 that opens the film forming source 20 toward the outer peripheral surface 10s of the main roller 10.

The surface treatment mechanism 60 performs a surface treatment on the first region 110 of the film-forming film 100 so that the first region 110 has a surface friction coefficient different from that of other regions. Alternatively, the surface treatment mechanism 60 performs a surface treatment on the second region 120 of the film-forming film 100 so that the second region 120 has a surface friction coefficient different from that of other regions.

For example, the surface treatment includes a treatment that selectively reduces the surface friction coefficient of the first region 110 or the second region 120. For example, while running the film-forming film 100, the surface treatment mechanism 60 performs spraying of a coating agent, plasma cleaning, etc. on the first region 110 or the second region 120. As the coating agent, for example, a resin coat (eg, acrylic resin) containing an inorganic filler such as alumina, silica, titania, or magnesia is used.

For example, the surface friction coefficient is adjusted by the surface roughness of the film-forming film 100, for example. The arithmetic mean roughness Ra of the regions other than the first region 110 or the second region 120 is 10 nm or more and 500 nm or less, whereas the arithmetic mean roughness Ra of the first region 110 or the second region 120 is 1000 nm. It is adjusted to 5000 nm or less.

The vacuum container 70 accommodates the main roller 10, the film forming source 20, the film traveling mechanism 30, the partition plate 40, the surface treatment mechanism 60, the film forming film 100, and the like. The vacuum container 70 can maintain a reduced pressure state, and its interior is maintained at a predetermined degree of vacuum through an exhaust pipe 71 connected to an evacuation system (not shown) such as a vacuum pump, for example.

Alternatively, the gas supply mechanism 72 may supply at least one of dry air, inert gas (Ar, He, etc.), carbon dioxide (CO ₂ ), nitrogen, and the like into the vacuum container 70 .

In this embodiment, in addition to lithium, at least one of indium (In), zinc (Zn), tin (Sn), gallium (Ga), bismuth (Bi), sodium (Na), and potassium (K) is used. Either one may be accommodated in the melting container 21.

[Effect]

FIG. 3A is a schematic perspective view showing a state immediately after the film-forming film according to the comparative example starts being wound around a take-up roller. FIG. 3(b) is a schematic perspective view showing the state immediately after the film-forming film according to the present embodiment starts being wound around a take-up roller.

The film-forming film 100 shown in FIG. 3A does not have the first region 110 and the second region 120. Therefore, when the film-forming film 100 begins to be wound around the take-up roller 32, the film-forming film 100 cannot escape in the direction of the axis 32c, for example, and the film-forming film 100 cannot escape in the direction of the axis 32c. 100 may have wrinkles 130.

Therefore, if the film-forming process to the film-forming film 100 is continued in this state, the wrinkles 130 may also be transferred to the film-forming film 100 wound on the wrinkles 130.

On the other hand, in this embodiment shown in FIG. 3(b), the film-forming film 100 has the first region 110 or the second region 120. Therefore, when the film-forming film 100 begins to be wound around the take-up roller 32, the film-forming film 100 can easily escape in the direction of the axis 32c, for example, and the film-forming film 100 can easily escape in the direction of the axis 32c. Wrinkles 130 are less likely to occur on the 100.

Therefore, even if the film forming process is continued on the film forming film 100 in this state, the wrinkles 130 will not be transferred to the film forming film 100 wound on the wrinkles 130 and will not be wound around the winding roller 32. Wrinkles are less likely to occur in the film-forming film 100.

Although the embodiments of the present invention have been described above, it goes without saying that the present invention is not limited to the above-described embodiments and can be modified in various ways. Each embodiment is not necessarily an independent form, and can be combined to the extent technically possible.

1... Winding type film forming device 10... Main roller 10s... Outer peripheral surface 10c... Central axis 20... Film forming source 21... Melting container 22... Top plate 23... Spout nozzle 25... Vapor deposition material 30... Film traveling mechanism 31... Unwinding Roller 32... Take-up roller 32c... Axis 33a, 33b, 33c, 33d... Guide roller 40... Partition plate 41... Opening 60... Surface treatment mechanism 70... Vacuum container 71... Exhaust pipe 72... Gas supply mechanism 100... For film formation Film 101...First end 102...Second end 110...First area 120...Second area 110a, 120a...Paper passing area 110b, 120b...Communication area 111...First surface 112...Second surface 130...Wrinkle

Claims (4)

A winding device in which a strip-shaped film-forming film is unwound from an unwinding roller and is wound on a take-up roller, and the film-forming surface of the film-forming film is subjected to vacuum treatment. A type film forming apparatus,
The film for film formation has a first surface that is the film formation surface, and a second surface opposite to the first surface,
When the film for film formation starts to be wound around the take-up roller starting from the first end, on the second surface, the length from the first end to the unwinding roller is 1. Surface treatment is applied to at least a portion of the first region, which is an area of 5 times or less and starts from the first end, so that the surface friction coefficient is smaller than the surface friction coefficient of the area other than the first area. A winding type film forming apparatus equipped with a surface treatment mechanism. Vacuum treatment in which a belt-shaped film forming film, which has both ends consisting of a first end and a second end, is unwound from an unwinding roller and is wound up on a take-up roller, while vacuum processing is performed on the film forming surface of the film forming film. A method,
The film for film formation has a first surface that is the film formation surface, and a second surface opposite to the first surface,
When the film for film formation starts to be wound around the take-up roller starting from the first end, on the second surface, the length from the first end to the unwinding roller is 1. Surface treatment is applied to at least a portion of the first region, which is an area of 5 times or less and starts from the first end, so that the surface friction coefficient is smaller than the surface friction coefficient of the area other than the first area. Vacuum processing method. The vacuum processing method according to claim 2,
When the film-forming film starts to be wound around the take-up roller starting from the second end, on the first surface, the length from the second end to the unwinding roller is 1. Surface treatment is performed so that at least a part of the second region, which is an area of 5 times or less and whose starting point is the second end, has a surface friction coefficient that is different from the surface friction coefficient of the area other than the second area.
Vacuum processing method. The vacuum processing method according to claim 3,
On the first surface, surface treatment is performed so that at least a portion of the second region has a surface friction coefficient smaller than the surface friction coefficient in the region other than the second region.
Vacuum processing method.

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