JP3876915B1 - コンデンサマイクロホン及びコンデンサマイクロホンの製造方法 - Google Patents

コンデンサマイクロホン及びコンデンサマイクロホンの製造方法 Download PDF

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Publication number
JP3876915B1
JP3876915B1 JP2005249458A JP2005249458A JP3876915B1 JP 3876915 B1 JP3876915 B1 JP 3876915B1 JP 2005249458 A JP2005249458 A JP 2005249458A JP 2005249458 A JP2005249458 A JP 2005249458A JP 3876915 B1 JP3876915 B1 JP 3876915B1
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JP
Japan
Prior art keywords
diaphragm
semiconductor film
condenser microphone
impurity
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005249458A
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English (en)
Japanese (ja)
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JP2007067659A (ja
Inventor
誠治 平出
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yamaha Corp
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Yamaha Corp
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Publication date
Application filed by Yamaha Corp filed Critical Yamaha Corp
Priority to JP2005249458A priority Critical patent/JP3876915B1/ja
Priority to CNA200680031364XA priority patent/CN101253805A/zh
Priority to PCT/JP2006/317134 priority patent/WO2007026782A1/ja
Priority to KR1020087004593A priority patent/KR20080031467A/ko
Priority to US12/065,173 priority patent/US20090074211A1/en
Priority to EP06797106A priority patent/EP1921892A4/en
Application granted granted Critical
Publication of JP3876915B1 publication Critical patent/JP3876915B1/ja
Publication of JP2007067659A publication Critical patent/JP2007067659A/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Pressure Sensors (AREA)
JP2005249458A 2005-08-30 2005-08-30 コンデンサマイクロホン及びコンデンサマイクロホンの製造方法 Expired - Fee Related JP3876915B1 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2005249458A JP3876915B1 (ja) 2005-08-30 2005-08-30 コンデンサマイクロホン及びコンデンサマイクロホンの製造方法
CNA200680031364XA CN101253805A (zh) 2005-08-30 2006-08-30 电容式麦克风及其制造方法
PCT/JP2006/317134 WO2007026782A1 (ja) 2005-08-30 2006-08-30 コンデンサマイクロホン及びコンデンサマイクロホンの製造方法
KR1020087004593A KR20080031467A (ko) 2005-08-30 2006-08-30 컨덴서 마이크로폰 및 컨덴서 마이크로폰의 제조 방법
US12/065,173 US20090074211A1 (en) 2005-08-30 2006-08-30 Capacitor microphone and method for manufacturing capacitor microphone
EP06797106A EP1921892A4 (en) 2005-08-30 2006-08-30 CONDENSATE MICROPHONE AND METHOD FOR PRODUCING A CONDENSER MICROPHONE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005249458A JP3876915B1 (ja) 2005-08-30 2005-08-30 コンデンサマイクロホン及びコンデンサマイクロホンの製造方法

Publications (2)

Publication Number Publication Date
JP3876915B1 true JP3876915B1 (ja) 2007-02-07
JP2007067659A JP2007067659A (ja) 2007-03-15

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ID=37801351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005249458A Expired - Fee Related JP3876915B1 (ja) 2005-08-30 2005-08-30 コンデンサマイクロホン及びコンデンサマイクロホンの製造方法

Country Status (2)

Country Link
JP (1) JP3876915B1 (zh)
CN (1) CN101253805A (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009033698A (ja) 2007-06-22 2009-02-12 Panasonic Corp ダイアフラム構造及び音響センサ
CN101808262A (zh) * 2010-03-22 2010-08-18 瑞声声学科技(深圳)有限公司 电容式麦克风
CN101848411A (zh) * 2010-06-07 2010-09-29 瑞声声学科技(深圳)有限公司 硅基电容麦克风及硅基电容麦克风的制作方法
KR101601120B1 (ko) * 2014-10-17 2016-03-08 현대자동차주식회사 마이크로폰 및 그 제조 방법
CN111131987A (zh) * 2019-12-02 2020-05-08 杭州士兰微电子股份有限公司 Mems麦克风及其制造方法

Also Published As

Publication number Publication date
CN101253805A (zh) 2008-08-27
JP2007067659A (ja) 2007-03-15

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