JP3870494B2 - 表面欠陥検査装置 - Google Patents
表面欠陥検査装置 Download PDFInfo
- Publication number
- JP3870494B2 JP3870494B2 JP18913297A JP18913297A JP3870494B2 JP 3870494 B2 JP3870494 B2 JP 3870494B2 JP 18913297 A JP18913297 A JP 18913297A JP 18913297 A JP18913297 A JP 18913297A JP 3870494 B2 JP3870494 B2 JP 3870494B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- inspection
- light source
- surface defect
- curvature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
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- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Image Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18913297A JP3870494B2 (ja) | 1997-06-30 | 1997-06-30 | 表面欠陥検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18913297A JP3870494B2 (ja) | 1997-06-30 | 1997-06-30 | 表面欠陥検査装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH1123243A JPH1123243A (ja) | 1999-01-29 |
| JPH1123243A5 JPH1123243A5 (enExample) | 2005-04-07 |
| JP3870494B2 true JP3870494B2 (ja) | 2007-01-17 |
Family
ID=16235950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18913297A Expired - Fee Related JP3870494B2 (ja) | 1997-06-30 | 1997-06-30 | 表面欠陥検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3870494B2 (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19909534B4 (de) * | 1999-03-04 | 2011-07-07 | BYK-Gardner GmbH, 82538 | Vorrichtung und Verfahren zur Bestimmung der Qualität strukturierter Oberflächen |
| JP2002214151A (ja) * | 2001-01-17 | 2002-07-31 | Nippon Steel Corp | 表面疵検査方法 |
| WO2005038445A1 (ja) | 2003-10-21 | 2005-04-28 | Daihatsu Motor Co., Ltd. | 表面欠陥検査方法及び装置 |
| DE102005003690A1 (de) * | 2005-01-26 | 2006-07-27 | Byk-Gardner Gmbh | Vorrichtung zur Untersuchung optischer Oberflächeneigenschaften |
| JP5481012B2 (ja) * | 2006-06-05 | 2014-04-23 | 吉郎 山田 | 表面検査装置 |
| JP5323320B2 (ja) * | 2006-07-19 | 2013-10-23 | 有限会社シマテック | 表面検査装置 |
| KR101005077B1 (ko) * | 2008-07-10 | 2010-12-30 | 성우테크론 주식회사 | 범퍼 검사장치 |
| JP4612088B2 (ja) * | 2008-10-10 | 2011-01-12 | トヨタ自動車株式会社 | 画像処理方法、塗装検査方法及び装置 |
| JP5634728B2 (ja) * | 2010-03-29 | 2014-12-03 | ジエイ・クオリティ株式会社 | 照明装置 |
| JP6086362B2 (ja) | 2012-12-03 | 2017-03-01 | シーシーエス株式会社 | 検査システム及び検査用照明装置 |
| JP6301194B2 (ja) * | 2014-05-26 | 2018-03-28 | 浜松ホトニクス株式会社 | 光学プレート、光照射装置、光測定装置、光照射方法、及び、光測定方法 |
| JP6531295B2 (ja) * | 2016-05-20 | 2019-06-19 | 国立大学法人 香川大学 | 反射光検出装置及び反射光検出方法 |
| KR102001342B1 (ko) * | 2018-08-14 | 2019-07-17 | 김정덕 | 렌즈 표면 검사장치 |
| CN111323433A (zh) * | 2018-12-13 | 2020-06-23 | 深圳中科飞测科技有限公司 | 检测装置及其检测方法 |
-
1997
- 1997-06-30 JP JP18913297A patent/JP3870494B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH1123243A (ja) | 1999-01-29 |
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