JP3835751B2 - Vertical diffusion / CVD apparatus and wafer transfer method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a longitudinal diffusion/CVD device and a wafer moving method capable of equally dividing moving and mounting positions of monitor wafers by a simple operation in a short time. SOLUTION: In the longitudinal diffusion/CVD device and the wafer moving method, an operator sets various kinds of parameters from an operating panel. When the number of the monitor wafers is one, two and three or more, the moving and mounting positions of the monitor wafers are calculated by a mechanical controller 4 so that the monitor wafers are respectively equally moved and mounted. Further, the moving and mounting data of all the wafers is prepared to carry out a moving and mounting operation in accordance with the moving and mounting data.

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a vertical diffusion / CVD apparatus used in semiconductor manufacturing, and in particular, a vertical type capable of automatically calculating a monitor wafer transfer position to create wafer transfer data and performing a transfer operation. The present invention relates to a diffusion / CVD apparatus and a wafer transfer method.
[0002]
[Prior art]
First, a conventional wafer transfer operation control device will be described with reference to FIG. FIG. 3 is a block diagram of a conventional wafer transfer operation control device. As shown in FIG. 3, a conventional wafer transfer operation control apparatus includes a cassette 1 for storing wafers, a boat 2 for transferring wafers, and a wafer transfer machine for transferring wafers from the cassette 1 to the boat 2. 3, a mechanical controller 4 that controls the wafer transfer device 3, a main controller 5 that controls the entire apparatus, and an operation panel 6.
[0003]
Next, the configuration of each part will be described in detail. The cassette 1 stores a process wafer as a product, a monitor wafer for testing, a side dummy wafer transferred as a dummy above and below the process wafer, etc. However, when transfer data of all wafers is input from the operation panel 6, the mechanical controller 4 controls the wafer transfer device 3 under the control of the main controller 5 in accordance with the transfer data to transfer various wafers from the cassette 1 to the boat 2. It is supposed to be transferred to.
[0004]
Next, a monitor wafer transfer position calculation method in a conventional wafer transfer operation control device will be described. In the conventional wafer transfer operation control device, the total number of grooves in the boat, the number of upper and lower side dummy wafers to be transferred, the number of “process + fill dummy wafers” to be transferred, and the number of monitor wafers to be transferred are determined in the boat. The operator calculates the transfer position of the monitor wafer so that the monitor wafers are evenly distributed to each other, and creates transfer data for all wafers in the data format suitable for the equipment to be used according to the calculated transfer position. The transfer data was input from the panel 6. Then, under the control of the main controller 5 according to the input transfer data, the mechanical controller 4 controls the wafer transfer device 3 to transfer various wafers from the cassette 1 to the boat 2.
[0005]
[Problems to be solved by the invention]
However, in the conventional wafer transfer operation control apparatus and the monitor wafer transfer position distribution method in the above, the calculation of the monitor wafer transfer position, creation of transfer data, and input of the transfer data are all performed by the operator. Therefore, the work is complicated, and there is a high possibility that a human error such as a calculation error or an operation error occurs in each work process, and further, it takes time to prepare for transfer.
[0006]
The present invention has been made in view of the above circumstances, and provides a vertical diffusion / CVD apparatus and a wafer transfer method capable of evenly assigning transfer positions of monitor wafers in a short time and with simple operations. With the goal.
[0007]
[Means for Solving the Problems]
The present invention for solving the problems of the above-mentioned conventional example is a vertical diffusion / CVD apparatus provided with a controller for controlling the operation of a wafer transfer machine for transferring wafers from a cassette to a boat according to transfer data. The operator inputs at least parameters of the number of all processes + fill dummy wafers and the number of monitor wafers from the panel, and the controller inputs at least all processes + fill dummy wafers and the number of monitor wafers input from the operation panel. Using the above parameters, calculation processing is performed to calculate the transfer position of the monitor wafer so that the monitor wafer on the boat is evenly arranged between all processes + fill dummy wafers, and based on the calculation processing result Create transfer data and transfer the monitor wafer based on the transfer data It is a vertical diffusion / CVD system that controls the wafer transfer machine, eliminates calculation errors and human error during data creation and input, shortens transfer preparation time, and improves device reliability. Efficiency can be improved.
[0010]
The present invention is also a wafer transfer method in which a controller controls the operation of a wafer transfer machine for transferring wafers from a cassette to a boat according to transfer data, and at least the entire process + The parameters of the number of fill dummy wafers and the number of monitor wafers are input, and the controller uses the parameters of at least all processes + fill dummy wafers and the number of monitor wafers input from the operation panel to monitor on the boat. Calculation processing for calculating the transfer position of the monitor wafer is performed so that the wafer is evenly arranged between all processes and the fill dummy wafer, transfer data is created based on the calculation processing result, and the transfer is performed. Wafer transfer to control wafer transfer machine to transfer monitor wafer based on data And modulo, eliminate human error in the calculation error or data preparation and input, and to shorten the transfer preparation time, it is possible to improve the reliability and efficiency of the apparatus.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described with reference to the drawings.
The configuration of the wafer transfer operation control device according to the embodiment of the present invention is almost the same as that of a conventional wafer transfer operation control device, and as shown in FIG. 3, a cassette 1 for storing wafers and a boat for stacking wafers. 2, a wafer transfer machine 3 for transferring wafers from the cassette 1 to the boat 2, a mechanical controller 4 for controlling the wafer transfer machine 3, a main controller 5 for controlling the entire apparatus, and an operation panel 6. As a characteristic part of the present embodiment, processing means for calculating the monitor wafer transfer position and creating transfer data for all wafers is provided in the mechanical controller 4.
[0014]
In the wafer transfer operation control apparatus of this embodiment, the processing means is provided in the mechanical controller 4, but the processing means for calculating the monitor wafer transfer position and creating transfer data for all wafers is the main. It may be provided inside the controller 5.
[0015]
Next, the operation of each part will be described in detail. When the operator inputs the number of monitor wafers from the operation panel 6, the input number data is sent to the mechanical controller 4 via the main controller 5. The processing means of the mechanical controller 4 performs calculation processing for calculating the transfer position of the monitor wafer, creates transfer data for all wafers based on the result, and transfers the created transfer data to the wafer transfer machine 3. send. The wafer transfer device 3 sequentially transfers the side dummy wafer, the process wafer, the fill dummy wafer, and the monitor wafer from the cassette 1 to the boat 2 according to the transfer data.
[0016]
Next, a monitor wafer transfer position distribution method in the wafer transfer operation control apparatus of this embodiment will be described. First, a method for evenly arranging monitor wafers between “process + fill dummy wafer” will be described with reference to FIG. FIG. 1 is a state diagram of a boat showing transfer positions according to the number of monitor wafers in this embodiment.
[0017]
In the monitor wafer transfer position distribution method of this embodiment, in order to transfer the monitor wafer evenly between the “process + fill dummy wafer”, the monitor wafer is transferred in one case, We will consider separately the case of three sheets and the case of three or more sheets.
[0018]
When the number of monitor wafers to be transferred is one, as shown in FIG. 1A, the monitor wafer is transferred so that the monitor wafer is inserted in the middle of the “process + fill dummy wafer”. The upper side dummy wafer, the process + fill dummy wafer, the monitor wafer, the process + fill dummy wafer, and the lower side dummy wafer are transferred in this order.
[0019]
When there are two monitor wafers to be transferred, as shown in FIG. 1B, the monitor wafers are transferred so that the monitor wafers are inserted on both sides of the “process + fill dummy wafer”. The upper side dummy wafer, the monitor wafer, the process + fill dummy wafer, the monitor wafer, and the lower side dummy wafer are transferred in this order.
[0020]
When there are 3 or more monitor wafers to be transferred, as shown in Fig. 1 (c), equally separate the "process + fill dummy wafer" on both sides of the "process + fill dummy wafer" and the remaining monitor wafers. The boat is in the upper side dummy wafer, monitor wafer, process + fill dummy wafer, monitor wafer, ..., process + fill dummy wafer, monitor wafer, bottom The side dummy wafers are transferred in this order.
[0021]
Next, a method for calculating the monitor wafer transfer position according to the present embodiment will be described. In this embodiment, in order for the mechanical controller 4 to automatically calculate the transfer position of the monitor wafer, the operator sets in advance from the operation panel 6 using the following five values as parameters. The five parameters are the total number of grooves in the boat (B), the number of upper side dummy wafers (S1), the number of lower side dummy wafers (S2), the number of “process + fill dummy wafers” (Pt), the monitor The number of wafers (M).
[0022]
When there is one monitor wafer to be transferred, as shown in FIG. 1A, the monitor wafer is inserted in the middle of “process + fill dummy wafer”, so that it is transferred above and below the monitor wafer. Calculation of the number of processes + fill dummy wafers P1 and P2
Pt ÷ 2
If the quotient calculated by the equation is a and the remainder is b,
P1 = a + b
P2 = a
Is required. Therefore, the monitor wafer transfer position (M1) on the boat is
M1 = B-S1-P1
It can be calculated by the following formula.
[0023]
When there are two monitor wafers to be transferred, as shown in FIG. 1B, the monitor wafers are inserted on both sides of the “process + fill dummy wafer”. M1, M2)
M1 = B-S1
M2 = M1 -1-Pt
It can be calculated by the following formula.
[0024]
When there are 3 or more monitor wafers to be transferred, as shown in FIG. 1 (c), the "process + fill dummy wafer" is evenly distributed on both sides of the "process + fill dummy wafer" and the remaining monitor wafers. In order to transfer the sheets so as to be inserted between the divided parts, first, the number of “process + fill dummy wafers” P1, P2,..., Pm (m = M−1) equally divided by the monitor wafer is obtained.
Pt ÷ (M-1)
If the quotient calculated by the equation is a and the remainder is b, the distribution number Pn of the n (1 ≦ n ≦ m) th “process + fill dummy wafer” is the case where the remainder b is not 0,
The value of Pn = a + cc is 1 if n≤b, and 0 if n> b.
However, the distribution number Pn when the remainder b is 0 is
Pn = a
It is calculated by the following formula.
[0025]
Therefore, the transfer positions M1, M2,... Mm + 1 of the first, second,.
M1 = B-S1
M2 = M1-1-P1
:
Mn = Mn-1-1-1-Pn-1
:
Mm + 1 = Mm-1-Pm
It can be calculated by the following formula.
[0026]
Next, an operation for realizing the method for calculating the monitor wafer transfer position according to the present embodiment will be described with reference to FIG. FIG. 2 is a flowchart of the calculation processing of the monitor wafer transfer position according to the present embodiment. The parameters are the total number of grooves in the boat (B), the number of upper side dummy wafers (S1), the number of lower side dummy wafers (S2), the number of “process + fill dummy wafers” (Pt), and the monitor wafer. Assume that the number of sheets (M) is already set.
[0027]
First, in order to store the position of the monitor wafer, tables MP (M) corresponding to the number of monitor wafers (M) are secured (100), the number of monitor wafers (M) is checked (101), and if M = 1. The process moves to one monitor wafer. If M = 2, the process moves to two monitor wafers. If M ≧ 3, the process moves to three or more monitor wafers.
[0028]
In processing one monitor wafer, the quotient a and the remainder b of Pt ÷ 2 are obtained (110), the number of first “process + fill dummy wafer” P1 = a + b is obtained (111), and the monitor wafer transfer position is obtained. MP (1) = B-S1-P1 is obtained (112), and the process is terminated.
[0029]
In processing two monitor wafers, the first monitor wafer transfer position MP (1) = B−S1 is obtained (120), and the second monitor wafer transfer position MP (2) = MP (1) −. Pt is obtained (121), and the process is terminated.
[0030]
In the processing of three or more monitor wafers, first, the first monitor wafer transfer position MP (1) = B−S1 is obtained (130), and then the quotient “a” and the remainder “b” of Pt ÷ (M−1) are obtained. (131). Then, the counter n is set to 1 (132), and it is determined whether or not the counter n is larger than b (133). If it is larger than b (n> b), 0 is put into c (134) and larger than b. Otherwise (n ≦ b), 1 is put into c (135).
[0031]
Next, the number P = a + c of “process + fill dummy wafer” is obtained (136), the (n + 1) th monitor wafer transfer position MP (n + 1) = MP (n) -1-P is obtained (137), 1 is added to the counter n (138), and it is determined whether the counter n is smaller than M (n <M) (139). If it is smaller, the process returns to the process 133. Otherwise, the process is terminated.
[0032]
With the method described above, the work involving the worker is only to set five parameters, which reduces the burden on the worker and, as a result, reduces the possibility of operation mistakes and improves the reliability of the device. There is an effect that can be improved.
[0033]
Furthermore, since the calculation of the transfer position of the monitor wafer and the creation of transfer data for all the wafers are automated, there are no calculation errors or human error during data creation and input, and the transfer preparation time is shortened. There is an effect that the reliability and efficiency of the entire apparatus and work can be improved.
[0034]
【The invention's effect】
According to the present invention, at least parameters of the number of all processes + fill dummy wafers and the number of monitor wafers are input by an operator from the operation panel, and the controller inputs at least all processes + fill dummy wafers input from the operation panel. The calculation process of calculating the transfer position of the monitor wafer is performed so that the monitor wafer on the boat is evenly arranged between all processes + fill dummy wafers using the parameters of the number of wafers and the number of monitor wafers, Since the vertical diffusion / CVD apparatus, which is a controller for controlling the wafer transfer device so as to transfer the monitor wafer based on the transfer data, creates transfer data based on the calculation processing result, a calculation error occurs. Eliminates human error during data creation and input, shortens transfer preparation time, There is an effect that it is possible to improve the reliability and efficiency of.
[0037]
Further, according to the present invention, there is provided a wafer transfer method in which the controller controls the operation of the wafer transfer machine for transferring wafers from the cassette to the boat according to the transfer data, and at least the entire operation is performed by the operator from the operation panel. The parameters of the number of processes + fill dummy wafers and the number of monitor wafers are input, and the controller uses the parameters of at least all processes + fill dummy wafers and the number of monitor wafers input from the operation panel on the boat. The calculation process of calculating the transfer position of the monitor wafer is performed so that the monitor wafers are evenly arranged between the entire process and the fill dummy wafer , and transfer data is created based on the calculation process result, A wafer that controls the wafer transfer device to transfer the monitor wafer based on the transfer data. Since the transferring method, eliminating the calculation errors and human errors during data creation and input, and to shorten the transfer preparation time, there is an effect that it is possible to improve the reliability and efficiency of the apparatus.
[Brief description of the drawings]
FIG. 1 is a state diagram of a boat showing transfer positions according to the number of monitor wafers by a vertical diffusion / CVD apparatus and a wafer transfer method according to an embodiment of the present invention.
FIG. 2 is a flowchart of arithmetic processing of a vertical diffusion / CVD apparatus and a wafer transfer method according to an embodiment of the present invention.
FIG. 3 is a configuration diagram of a conventional wafer transfer operation control device.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Cassette, 2 ... Boat, 3 ... Wafer transfer machine, 4 ... Mechanical controller, 5 ... Main controller, 6 ... Operation panel

Claims (2)

In a vertical diffusion / CVD apparatus having a controller for controlling the operation of a wafer transfer machine for transferring wafers from a cassette to a boat according to transfer data,
The operator inputs at least parameters for the number of all processes + the number of fill dummy wafers and the number of monitor wafers from the operation panel.
The controller uses the parameters of at least all processes + fill dummy wafers and the number of monitor wafers input from the operation panel, and the monitor wafers on the boat are evenly distributed between all processes + fill dummy wafers. An arithmetic process for calculating the transfer position of the monitor wafer so as to be arranged is performed, transfer data is created based on the result of the arithmetic process, and the monitor wafer is transferred based on the transfer data A vertical diffusion / CVD apparatus which is a controller for controlling the wafer transfer device. A controller is a wafer transfer method for controlling the operation of a wafer transfer machine for transferring wafers from a cassette to a boat according to transfer data,
The operator inputs at least parameters for the number of all processes + the number of fill dummy wafers and the number of monitor wafers from the operation panel.
The controller uses the parameters of at least all processes + fill dummy wafers and the number of monitor wafers input from the operation panel, and the monitor wafers on the boat are evenly distributed between all processes + fill dummy wafers. An arithmetic process for calculating the transfer position of the monitor wafer so as to be arranged is performed, transfer data is created based on the result of the arithmetic process, and the monitor wafer is transferred based on the transfer data A wafer transfer method comprising controlling the wafer transfer machine.

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