JP3833980B2 - Mask protector storage case - Google Patents

Mask protector storage case Download PDF

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Publication number
JP3833980B2
JP3833980B2 JP2002273138A JP2002273138A JP3833980B2 JP 3833980 B2 JP3833980 B2 JP 3833980B2 JP 2002273138 A JP2002273138 A JP 2002273138A JP 2002273138 A JP2002273138 A JP 2002273138A JP 3833980 B2 JP3833980 B2 JP 3833980B2
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JP
Japan
Prior art keywords
protection device
frame
mask
mask protection
storage case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2002273138A
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Japanese (ja)
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JP2003107679A (en
Inventor
正浩 近藤
高政 津本
稔 藤田
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Mitsui Chemicals Inc
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Mitsui Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to JP2002273138A priority Critical patent/JP3833980B2/en
Publication of JP2003107679A publication Critical patent/JP2003107679A/en
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Publication of JP3833980B2 publication Critical patent/JP3833980B2/en
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  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Description

【０００１】
【産業上の利用分野】
本発明は、マスク保護装置が装着されるケース本体と、該本体に被せられる上蓋とよりなり、マスクやレチクル（以下、「マスク」という）に塵埃等が付着するのを防止する目的で用いられるマスク保護装置の収納ケースに関する。
【０００２】
【従来技術】
集積回路の製造工程におけるフォトリソグラフィ工程では、マスク上に塵埃等が付着すると、これが半導体ウェハに投影され、不良製品となりがちである。この問題を解消し、マスク上に異物等が付着するのを防止するため、マスクパターンを囲う大きさの枠の一側面に透明な薄膜を張設すると共に、他側端面に離型紙付きの両面粘着テープを接着し、離型紙を剥がしてマスク上に接着することにより、マスクを薄膜により一定の間隔を存して覆うようにしたマスク保護装置が供されるようになった。
【０００３】
こうしたマスク保護装置は、出荷して使用に供されるまで通常、塵埃等が付着することのないように、収納ケースに入れられて保管される。図１及び図２は、従来用いられてきたこの種収納ケースについて示すもので、枠１と、枠１の一側面に張設される薄膜２と、枠１の他側端面に貼着される離型紙付きの両面粘着テープ（図示しない）とよりなるマスク保護装置３が位置決めされて装着される台４を中央部に突状に形成した樹脂製のケース本体５と、ケース本体上に被せて装着され、マスク保護装置の枠周縁を押える押え部４を形成した樹脂製の上蓋６と、上蓋６をケース本体５に止めるクリップ７とよりなっている。
【０００４】
【発明が解決しようとする課題】
収納ケースから取出したマスク保護装置をマスク上に接着する際、マスク保護装置をマスク上に押付けても粘着材層の変形によりマスクとの間に浮きを生じ、空気の流通するエアパスが生じることがある。本発明は、粘着材層の変形によるエアパスの解消を目的としてなされたものである。
【０００５】
【課題の解決手段】
上記の目的を達成する第１の発明は、枠と、枠一側面に張設される薄膜と、枠の他側端面に接着される粘着材とよりなるマスク保護装置が装着される台を備えた樹脂製のケース本体と、該本体に被せられる樹脂製の上蓋と、上蓋をケース本体に止めるクリップとよりなるマスク保護装置の収納ケースにおいて、上記台周縁をリブ構造とし、該リブ構造のリブ上に上記マスク保護装置を装着したことを特徴とする。
【０００６】
第２の発明は、枠と、枠一側面に張設される薄膜と、枠の他側端面に接着される粘着材とよりなるマスク保護装置が装着される台を備えた樹脂製のケース本体と、該本体に被せられる樹脂製の上蓋と、上蓋をケース本体に止めるクリップとよりなるマスク保護装置の収納ケースにおいて、上記台を粘着材より軟らかい軟質ゴムマットで構成したことを特徴とする。
【０００７】
第３の発明は、枠と、枠一側面に張設される薄膜と、枠の他側端面に接着される粘着テープとよりなるマスク保護装置が装着される台を備えた樹脂製のケース本体と、該本体に被せられる樹脂製の上蓋と、上蓋をケース本体に止めるクリップとよりなるマスク保護装置の収納ケースにおいて、マスク保護装置の枠に接着された粘着材が当たる台周縁に粘着材に接触してマスク保護装置を支持するピンを設けたことを特徴とする。
【０００８】
第２の発明においては、粘着材より軟らかい軟質ゴムマットを敷くと、その上に当てられる粘着材の変形が防がれる。
第３の発明においては、ピンで数カ所において支持することにより、粘着材はピンの当たる箇所でのみ変形するようになり、粘着材全体の変形が防止される。
【０００９】
【実施例】
図３に示すケース本体１１は、マスク保護装置３が装着される台１２の周縁をリブ１３構造とし、台１２の変形を防ぐようにしたものである。
【００１０】
図４に示すケース本体２０は、マスク保護装置をマスク上に接着するのに用いる粘着材より柔らかい軟質ゴムマット２１を用いて台を形成したものである。
【００１１】
図５に示すケース本体２５は、台２６周縁のマスク保護装置３の枠１が当たる箇所に適当間隔をおいて先の尖ったピン２７を突設し、枠下端面をピン２７に突き刺してマスク保護装置３を支持させるようにしたものである。
【００１２】
【発明の効果】
本発明は以上のように構成され、次のような効果を奏する。
請求項１記載の収納ケースのように、台の周縁をリブ構造とすれば、成形時における台の変形を少なくすることができる。
【００１３】
請求項２記載のように、粘着材より軟らかい軟質ゴムマットを敷けば、ゴムマットによる変形を生じにくい。
【００１４】
請求項３記載の収納ケースのように、ピンでマスク保護装置を数カ所で支持するようにすれば、粘着層はピンの差込位置のみに歪みが多少生じる程度となる。
【図面の簡単な説明】
【図１】マスク保護装置の収納ケースの断面図。
【図２】同装置の平面図。
【図３】本発明に係わる収納ケースのケース本体の断面図。
【図４】別の実施例の断面図。
【図５】更に別の実施例の断面図。
【符号の説明】
１・・枠
２・・薄膜
３・・マスク保護装置
４、１２・・台
５・・ケース本体
６・・上蓋
７・・クリップ
１１、１５、２０・・ケース本体
１３・・リブ
１６・・ガラス板
２１・・軟質ゴムマット
２７・・ピン [0001]
[Industrial application fields]
The present invention includes a case main body on which a mask protection device is mounted and an upper lid that covers the main body, and is used for the purpose of preventing dust or the like from adhering to a mask or a reticle (hereinafter referred to as “mask”). The present invention relates to a storage case for a mask protection device.
[0002]
[Prior art]
In a photolithography process in an integrated circuit manufacturing process, when dust or the like adheres to a mask, it is projected onto a semiconductor wafer and tends to be a defective product. In order to solve this problem and prevent foreign matter from adhering to the mask, a transparent thin film is stretched on one side of a frame that surrounds the mask pattern, and both sides with release paper are attached to the other end face. By attaching an adhesive tape, peeling off the release paper and adhering it onto the mask, a mask protection device has been provided in which the mask is covered with a thin film at regular intervals.
[0003]
Such a mask protection device is usually stored in a storage case so that dust or the like does not adhere until it is shipped and used. 1 and 2 show this type of storage case that has been used in the past, and is attached to the frame 1, a thin film 2 stretched on one side of the frame 1, and the other end face of the frame 1. A base 4 made of resin is formed in a protruding shape at the center, and a base 4 on which a mask protection device 3 comprising a double-sided adhesive tape (not shown) with release paper is positioned and mounted is placed on the case. The upper cover 6 is made of a resin and is provided with a presser portion 4 that presses the peripheral edge of the frame of the mask protection device, and a clip 7 that holds the upper cover 6 to the case body 5.
[0004]
[Problems to be solved by the invention]
When adhering the mask protection device taken out from the storage case onto the mask, even if the mask protection device is pressed onto the mask, the adhesive material layer may be lifted by the deformation of the adhesive material layer, resulting in an air path through which air flows. is there. The present invention has been made for the purpose of eliminating an air path caused by deformation of an adhesive material layer.
[0005]
[Means for solving problems]
A first invention for achieving the above object includes a table on which a mask protection device comprising a frame, a thin film stretched on one side surface of the frame, and an adhesive material bonded to the other side end surface of the frame is mounted. In a storage case of a mask protection device comprising a resin case main body, a resin upper lid that covers the main body, and a clip that holds the upper lid to the case main body, the base periphery has a rib structure, and the rib of the rib structure The mask protection device is mounted on the top.
[0006]
A second invention is a resin case main body provided with a base on which a mask, a thin film stretched on one side of the frame, and a mask protection device composed of an adhesive material bonded to the other end surface of the frame is mounted. In the storage case of the mask protection device comprising a resin upper cover that covers the main body and a clip that holds the upper cover to the case main body, the base is composed of a soft rubber mat that is softer than the adhesive material .
[0007]
According to a third aspect of the present invention, there is provided a resin case main body including a base on which a mask, a mask protection device including a frame, a thin film stretched on one side surface of the frame, and an adhesive tape bonded to the other end surface of the frame is mounted. And an upper cover made of resin covering the main body, and a mask protection device storage case comprising a clip that holds the upper cover to the case main body. A pin that contacts and supports the mask protection device is provided.
[0008]
In the second invention, when a soft rubber mat that is softer than the adhesive material is laid, deformation of the adhesive material applied thereon is prevented.
In the third invention, by supporting the adhesive material at several places with the pins, the adhesive material is deformed only at the location where the pin hits, and deformation of the entire adhesive material is prevented.
[0009]
【Example】
The case main body 11 shown in FIG. 3 has a rib 13 structure on the periphery of the base 12 on which the mask protection device 3 is mounted so as to prevent the base 12 from being deformed.
[0010]
The case body 20 shown in FIG. 4 is formed by using a soft rubber mat 21 that is softer than the adhesive used to bond the mask protection device onto the mask.
[0011]
A case body 25 shown in FIG. 5 has a mask 27 in which a pointed pin 27 protrudes at an appropriate interval at a position where the frame 1 of the mask protection device 3 on the periphery of the base 26 hits, and the lower end surface of the frame pierces the pin 27. The protection device 3 is supported.
[0012]
【The invention's effect】
The present invention is configured as described above and has the following effects.
If the peripheral edge of the base has a rib structure as in the storage case according to the first aspect, deformation of the base during molding can be reduced.
[0013]
If a soft rubber mat that is softer than the adhesive material is laid as described in claim 2 , deformation due to the rubber mat hardly occurs.
[0014]
If the mask protection device is supported by the pin at several places as in the storage case according to the third aspect , the adhesive layer is slightly distorted only at the pin insertion position.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view of a storage case of a mask protection device.
FIG. 2 is a plan view of the apparatus.
FIG. 3 is a cross-sectional view of a case body of a storage case according to the present invention.
FIG. 4 is a cross-sectional view of another embodiment.
FIG. 5 is a cross-sectional view of still another embodiment.
[Explanation of symbols]
1 .. Frame 2 .. Thin film 3. Mask protection device 4, 12... Base 5.. Case body 6.. Top lid 7 .. Clips 11, 15, 20. Board 21 .. Soft rubber mat
27 ・ ・ Pin

Claims (3)

枠と、枠一側面に張設される薄膜と、枠の他側端面に接着される粘着材とよりなるマスク保護装置が装着される台を備えた樹脂製のケース本体と、該本体に被せられる樹脂製の上蓋と、上蓋をケース本体に止めるクリップとよりなるマスク保護装置の収納ケースにおいて、上記台の周縁をリブ構造とし、該リブ構造のリブ上に上記マスク保護装置を装着したことを特徴とするマスク保護装置の収納ケース。  A resin case body including a frame, a thin film stretched on one side surface of the frame, and a base on which a mask protection device composed of an adhesive material bonded to the other end surface of the frame is mounted, and covers the body. In a storage case of a mask protection device comprising an upper lid made of resin and a clip that holds the upper lid to the case body, the periphery of the base has a rib structure, and the mask protection device is mounted on the rib of the rib structure. A storage case for the mask protection device. 枠と、枠一側面に張設される薄膜と、枠の他側端面に接着される粘着材とよりなるマスク保護装置が装着される台を備えた樹脂製のケース本体と、該本体に被せられる樹脂製の上蓋と、上蓋をケース本体に止めるクリップとよりなるマスク保護装置の収納ケースにおいて、上記台を粘着材より軟らかい軟質ゴムマットで構成したことを特徴とするマスク保護装置の収納ケース。 A resin case body including a frame, a thin film stretched on one side surface of the frame, and a base on which a mask protection device composed of an adhesive material bonded to the other end surface of the frame is mounted, and covers the body. A mask protection device storage case, comprising: a resin upper lid, and a mask protection device storage case comprising a clip that holds the upper lid to a case body, wherein the base is made of a soft rubber mat that is softer than an adhesive material . 枠と、枠一側面に張設される薄膜と、枠の他側端面に接着される粘着材とよりなるマスク保護装置が装着される台を備えた樹脂製のケース本体と、該本体に被せられる樹脂製の上蓋と、上蓋をケース本体に止めるクリップとよりなるマスク保護装置の収納ケースにおいて、マスク保護装置の枠に接着された粘着材が当たる台周縁に粘着材に接触してマスク保護装置を支持するピンを設けたことを特徴とするマスク保護装置の収納ケース。  A resin case body including a frame, a thin film stretched on one side surface of the frame, and a base on which a mask protection device composed of an adhesive material bonded to the other end surface of the frame is mounted, and covers the body. In a storage case of a mask protection device comprising an upper lid made of resin and a clip that holds the upper lid to the case body, the mask protection device comes into contact with the adhesive material on the periphery of the base where the adhesive material adhered to the frame of the mask protection device hits A mask protection device storage case, characterized in that a pin for supporting the mask is provided.
JP2002273138A 2002-09-19 2002-09-19 Mask protector storage case Expired - Lifetime JP3833980B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002273138A JP3833980B2 (en) 2002-09-19 2002-09-19 Mask protector storage case

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002273138A JP3833980B2 (en) 2002-09-19 2002-09-19 Mask protector storage case

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP20240794A Division JP3404140B2 (en) 1994-08-26 1994-08-26 Storage case for mask protection device

Publications (2)

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JP2003107679A JP2003107679A (en) 2003-04-09
JP3833980B2 true JP3833980B2 (en) 2006-10-18

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102819184A (en) * 2004-12-02 2012-12-12 旭化成电子材料株式会社 Storage method for large-scale shield
JP4614845B2 (en) * 2005-08-11 2011-01-19 信越ポリマー株式会社 Pellicle storage container
JP7442291B2 (en) * 2019-10-09 2024-03-04 信越化学工業株式会社 Assembly consisting of a pellicle and its dedicated pellicle case

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