JP2008158116A - Pellicle frame - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pellicle frame that can be firmly fixed to a storage container during transportation, can be easily released from the fixed state when the frame is taken out from the storage container after transportation, and can be repeatedly attached and detached for positioning when the frame is stuck to a mask, after the pellicle is manufactured and until the pellicle is stuck to the mask, and after completing positioning, that can be firmly stuck and fixed to the mask. <P>SOLUTION: The pellicle frame 1 has tacky adhesives 2, 3 disposed on a mask adhesion face 4, wherein the tacky adhesives 2, 3 are disposed inside and outside the mask adhesion face 4 of the pellicle frame 1, and at least one of the tacky adhesives 2, 3 shows an elastic modulus of 400 to 900 kg/cm<SP>2</SP>and a viscosity coefficient of 10,000 to 110,000 kg s/cm<SP>2</SP>. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  In the present invention, foreign matter adheres to a photomask or a reticle used in a lithography process when manufacturing a semiconductor device such as an IC (Integrated Circuit), LSI (Large Scale Integrated Circuit), or TFT type LCD (Thin Film Transistor Liquid Crystal Display). In particular, the present invention relates to a pellicle frame and a pellicle using the pellicle frame, and particularly to a large pellicle frame body and a large pellicle suitable for manufacturing a TFT type LCD.

  In general, a pellicle is used to prevent foreign matter from adhering to a photomask or reticle by arranging the pellicle on both sides of the photomask or reticle in the manufacture of a semiconductor circuit pattern or the like.

  The general structure of the pellicle is that a transparent thin film such as a polymer or glass is pasted on one side of a metal, ceramic, or polymer frame, and an adhesive for pasting on a mask or the like is provided on the opposite side. Things.

  For example, the pellicle is a pellicle made of a transparent polymer film such as nitrocellulose or a cellulose derivative having a thickness of 10 μm or less on one edge surface of a frame having a thickness of several millimeters having a shape matching that of a photomask or a reticle. The film is stretched and bonded, and is attached to the surface of the photomask or reticle via an adhesive material on the other edge surface of the frame.

  Due to the above structure of the pellicle, if foreign matter adheres to the surface of the photomask or reticle where the pellicle is not placed, the foreign matter forms an image on the photoresist formed on the semiconductor wafer, causing a circuit pattern defect. However, when a pellicle is placed on at least the pattern surface of a photomask or reticle, the foreign matter attached to the surface of the pellicle will not focus on the photoresist formed on the semiconductor wafer because the focus position will shift. This makes it possible to manufacture a circuit pattern without causing defects in the circuit pattern.

  By the way, the pellicle is handled in a clean room so that no foreign matter adheres until it is actually affixed to the mask and reticle after manufacturing, and naturally, in order to avoid the foreign matter from adhering during transfer. It is transported in a state stored in a special storage container.

  The foreign matter in the pellicle includes dust generated by rubbing between the pellicle frame and the storage container as well as floating in the air. Therefore, for example, when the pellicle is stored and transported in the storage container, it is necessary to firmly fix the pellicle to the storage container (hereinafter referred to as “temporary sticking”), and at the same time, remove the pellicle from the storage container. Affixed for positioning to affix the mask and reticle (this affixing is also referred to as “temporary affixing”) and must be firmly fixed to the mask and reticle so that there is no air path in the end. (Hereinafter referred to as “main sticking”).

  That is, before the final sticking to the mask and reticle after manufacturing, the temporary container for positioning before the main sticking to the storage container and the mask and the reticle at the time of transfer is repeated. However, it is required to be securely fixed each time while repeating the pasting and peeling actions.

  In response to this requirement, the adhesive material for temporary attachment and the adhesive material for main attachment are separately applied to the adhesive surface such as the mask of the pellicle frame, and the height from the adhesive surface of the adhesive material for temporary attachment is applied. Is considered to be higher than the height from the adhesive surface of the sticking adhesive material (for example, Patent Document 1).

JP 2006-163035 A

  However, the adhesive material specifically disclosed in Patent Document 1 only uses a hot-melt adhesive material as a temporary attachment adhesive material and a double-sided tape of a polyethylene foam base material as a permanent adhesive material. According to the inventors' subsequent studies, there are various types of hot-melt type adhesive materials, and depending on the type, the adhesive material is crushed and deformed once temporarily attached. After that, it cannot be peeled off, and even if it can be peeled off, it has been found that it is difficult to attach again because it has been deformed.

  In the present invention, after the pellicle is manufactured and until the pellicle is adhered to the mask, it is firmly fixed to the storage container during transfer, and can be easily released when taken out from the storage container after transfer. Provides a pellicle frame that can be attached and removed repeatedly for positioning when sticking to the mask, and can be firmly fixed to the mask after positioning is complete There is to do.

  As a result of intensive studies aimed at solving the above-mentioned problems, the present inventors have completed the present invention. That is, the configuration of the present invention is as follows.

(1) A pellicle frame in which an adhesive material is disposed on a mask adhesive surface, wherein an adhesive material is disposed on the inside and outside of the mask adhesive surface of the pellicle frame, and at least one of the inside and outside adhesive materials is , elastic modulus ^{400kg / cm 2 ~900kg / cm 2} , a pellicle frame, which is a viscosity coefficient ^{10000kg · s / cm 2 ~110000kg ·} s / cm 2.

(2) The inner and outer adhesive materials having an elastic modulus of 400 kg / cm ^{2 to} 900 kg / cm ² and a viscosity coefficient of 10,000 kg · s / cm ^{2 to} 110000 kg · s / cm ² disposed on the mask adhesive surface of the pellicle frame. The length from the mask adhesive surface of one adhesive material to the topmost part of the adhesive material is longer than the length from the mask adhesive surface of the other adhesive material to the topmost part of the adhesive material (1) ) Pellicle frame.

(3) elastic modulus ^{400kg / cm 2 ~900kg / cm 2} , the adhesive material is a viscosity coefficient ^{10000kg · s / cm 2 ~110000kg ·} s / cm 2 is disposed on the outside of the mask adhesive surface of the pellicle frame, The pellicle frame according to (2), wherein the inner adhesive material is continuously disposed on the mask adhesive surface.

  With the pellicle frame of the present invention, after the pellicle is manufactured and until the pellicle is adhered to the mask, it is firmly fixed to the storage container during transfer, and easily fixed when taken out from the storage container after transfer In addition, it can be repeatedly applied and removed for positioning when sticking to the mask, and after the positioning is completed, it is firmly fixed to the mask. The quality of the pellicle can be maintained after the transfer.

The present invention is particularly effective for a large pellicle having an area of 1000 cm ² or more. As the mask size increases, the inspection range of foreign matter becomes wider, so foreign matter is often missed in the foreign matter inspection process, and foreign matter is often found after sticking the pellicle, so the pellicle can be attached and removed repeatedly. It is effective to be.

  Hereinafter, an embodiment of a pellicle frame according to the present invention will be specifically described with reference to FIGS. FIG. 1 is an explanatory plan view showing the configuration of a pellicle frame according to the present invention, FIG. 2 is a schematic sectional view showing the configuration of a pellicle frame according to the present invention, and FIG. 3 is a plan view showing another configuration of the pellicle frame according to the present invention. It is explanatory drawing.

  1 and 2, the mask adhesive surface 4 of the pellicle to which the adhesive materials 2 and 3 of the pellicle frame 1 according to the present invention are applied will be described first.

  The pellicle has a pellicle film stretched and attached to the pellicle frame 1, and a mask adhesive surface (an adhesive surface such as a mask) 4 on the opposite side of the surface of the pellicle frame 1 to which the pellicle film is attached is a mask or a reticle. Is adhered to the inside of the pellicle film surface continuously so as not to enter the pellicle film and so as not to generate an air path, so that flatness is required.

  This invention solves the said subject by arrange | positioning the adhesive materials 2 and 3 which have a specific physical property with such a specific structure to such a mask adhesive surface 4. FIG. The present invention is characterized in that the adhesive materials 2 and 3 are disposed at least at two locations inside and outside the mask adhesive surface 4. The positions and widths of the inner pressure-sensitive adhesive material 2 and the outer pressure-sensitive adhesive material 3 are not particularly limited as long as the effects of the present invention are exhibited. However, as shown in FIG. A relationship of A <B is preferable between the width A and the adhesion width B between the pellicle frame 1.

  This is because, when the adhesive width B with the pellicle frame 1 is wider than the adhesive width A with the mask, the temporary sticking adhesive 3 can be prevented from being peeled off from the pellicle frame 1 at the time of peeling after temporary sticking. In particular, in the relationship between A and B, A <(2B / 3) is more preferable, A <(B / 2) is particularly preferable, and A <(B / 3) is most preferable.

  Moreover, as shown in FIG. 2, the relationship of A <C is preferable between the adhesion width A of the temporary sticking adhesive material 3 with the mask and the adhesion width C of the main sticking adhesive material 2 with the mask. The adhesive width C between the temporary sticking pressure-sensitive adhesive material 3 and the mask is larger than the adhesive width A between the temporary sticking pressure-sensitive adhesive material 3 and the mask. Also, the adhesive force between the adhesive material 2 for main sticking and the mask is increased, and the adhesive material 2 for sticking can counteract the elastic recovery force (repulsive force) of the adhesive material 3 for temporary sticking. It is because it can prevent that 2 peels.

  Thereby, it is easy to obtain the adhesive effect after the main sticking, and it is possible to obtain the effect of preventing the entry of foreign matter into the sealed portion by preventing the air path. In particular, in the relationship between A and C, A <(2C / 3) is more preferable, A <(C / 2) is particularly preferable, and A <(C / 3) is most preferable.

  Furthermore, in order to prevent the sticking adhesive material 2 from being peeled off by the elastic recovery force (repulsive force) of the temporary sticking adhesive material 3 after the main sticking, the temporary sticking adhesive material 3 is pulled out and removed after the main sticking. By doing so, it is possible to fundamentally eliminate the elastic recovery force (repulsive force) of the temporary sticking adhesive material 3. In this case, as shown in FIG. 2, the adhesive width A between the mask and the adhesive width B between the pellicle frame 1 and the adhesive width C between the mask and the pellicle in the main adhesive material 2 as shown in FIG. The bond width D with the frame 1 preferably has a relationship of A <B <C and A <B <D.

  By doing so, it is possible to prevent the temporary sticking adhesive 3 from being peeled off from the mask and the pellicle frame 1 when the temporary sticking adhesive 3 is pulled out and removed after the main sticking. In particular, in the relationship between A, B, and C, A <B <(2C / 3) and A <B <(2D / 3) are more preferable, and A <B <(C / 2) and A <are particularly preferable. B <(D / 2), most preferably A <B <(C / 3) and A <B <(D / 3).

  Further, as shown in FIG. 2, naturally, the width E of the mask adhesive surface 4 of the pellicle frame 1, the adhesive width B of the temporary adhesive material 3 to the pellicle frame 1, and the pellicle frame 1 of the permanent adhesive material 2. The adhesive width D is preferably E ≧ B + D, but it is preferable that E> B + D considering that the adhesive materials 2 and 3 are crushed and widened in use. This is because if the adhesive materials 2 and 3 protrude from the mask adhesive surface 4 of the pellicle frame 1, the effective area of the pellicle may be reduced, or it may cause dust generation.

  As shown in FIG. 1, the mask adhesive surface 4 to which the adhesive materials 2 and 3 are applied is located on the center side of the pellicle frame 1 as the inner adhesive material 2 and the other as the outer adhesive material 3. .

  The inner pressure-sensitive adhesive material 2 and the outer pressure-sensitive adhesive material 3 may be arranged adjacent to each other or may be arranged at intervals. In consideration of being slightly crushed by being applied, it is preferable that the inner pressure-sensitive adhesive material 2 and the outer pressure-sensitive adhesive material 3 are arranged with some space therebetween. However, when the temporary sticking adhesive 3 and the main sticking adhesive 2 are the same, they may be integrated.

  These widths and intervals are affected by the amount of the adhesive materials 2 and 3 to be applied, that is, the height from the mask adhesive surface 4 in addition to the above-mentioned width, but the width is the above-mentioned condition. Is preferably arranged according to

Therefore, the optimum height will be described next. At least one of the adhesive materials 2 and 3 on the inside and outside of the mask adhesive surface 4 of the pellicle frame 1 has an elastic modulus of 400 kg / cm ^{2 to} 900 kg / cm ² and a viscosity coefficient of 10,000 kg · s / cm ^{2 to} 110000 kg · s / cm ^2. The length from the mask adhesive surface 4 of one of the adhesive materials 2 and 3 to the topmost portion of the adhesive material 2 or 3 is from the mask adhesive surface 4 of the other adhesive material 2 or 3 to the adhesive material 2 , 3 is configured to be longer than the length to the top.

  In the present invention, the height of the pressure-sensitive adhesives 2 and 3 is not limited as long as the adhesive materials 2 and 3 can be bonded with good adhesion to an object at the time of temporary application, but it is temporarily applied until the actual application. The adhesive material 3 used for temporary attachment needs to have a height from the mask adhesive surface 4 of the mask adhesive surface 2 of the main adhesive material 2 for sticking. It is necessary to be higher than 4, and specifically, higher than 0 mm and 1.0 mm or less, preferably higher than 0 mm and 0.5 mm or less, more preferably higher than 0 mm and 0.2 mm or less.

  If the height is not higher than 0 mm, the main sticking adhesive 2 is also used for sticking at the time of temporary sticking, and depending on the type of pressure sensitive adhesive used, the main sticking adhesive 2 may be deformed at the time of temporary sticking. This is because an air path or the like may occur during the pasting.

On the other hand, the difference in height needs to be 1.0 mm or less. The temporary sticking pressure-sensitive adhesive material 3 also has a sticking effect during the main sticking, but the temporary sticking pressure-sensitive adhesive material 3 that can be used in the present invention is The elastic modulus is 400 kg / cm ² or more and 900 kg / cm ² or less, and the viscosity coefficient is 10000 kg · s / cm ² or more and 110000 kg · s / cm ² or less. This is because the sticking effect of the sticking adhesive material 2 may be reduced.

The adhesive materials 2 and 3 used in the present invention may be any material as long as both the temporary adhesive material 3 and the final adhesive material 2 exhibit the effects of the present invention. The tape is temporarily pasted to position the storage container, mask, etc. before it is affixed to the mask and reticle, and even if it is repeatedly affixed and removed, its adhesive performance does not change, and the final book Since it is necessary to maintain the crushed state without degrading the adhesion performance of the main attachment when attaching, the temporary attachment adhesive disposed outside the mask adhesive surface 4 of the pellicle frame 1 It is desirable that the elastic modulus of the material 3 is 400 kg / cm ² or more and 900 kg / cm ² or less, and the viscosity coefficient is 10000 kg · s / cm ² or more and 110,000 kg · s / cm ² or less.

More specifically, the temporary adhering adhesive material 3 of the present invention has an elastic modulus of 500 kg / cm ² or more, preferably 600 kg / cm ² or more, and the upper limit is 900 kg / cm ² or less, preferably 800 kg / cm ^2. The viscosity coefficient may be 10000 kg · s / cm ² or more, preferably 30000 kg · s / cm ² or more, and the upper limit is 100,000 kg · s / cm ² or less, preferably 80000 kg · s / cm ^2. The following is acceptable.

When the viscosity coefficient is less than 10000 kg · s / cm ² , the adhesive material itself is crushed by one time or at most several times of adhesion and removal, and the effect of temporary attachment cannot be obtained. On the other hand, when the viscosity coefficient is larger than 110000 kg · s / cm ² , the adhesive material itself will not be crushed, but the adhesive strength of the main application will be sufficient due to the repulsion of the adhesive material 3 in the temporary application part. There are cases where it cannot be obtained. The same reason can be considered for the elastic modulus.

  Specific examples of the temporary sticking adhesive material 3 having the above-described physical properties that can be used in the present invention include hot-melt adhesive materials such as styrene ethylene butylene styrene, styrene ethylene propylene styrene, and olefins, or silicone adhesive materials. It is possible to use a foam tape product.

  On the other hand, the sticking adhesive material 2 that can be used in the present invention is not limited as long as it can prevent foreign matter from entering the sealed space even after the mask, reticle, and pellicle are closely attached. Absent. Therefore, for example, it is possible to use the same adhesive material as that used for temporary attachment.

  It is preferable that the sticking adhesive material 2 has a lower elastic modulus and viscosity coefficient than those of the temporary sticking adhesive material 3. In the main sticking process, after the temporary sticking adhesive material 3 and the main sticking adhesive material 2 become the same height, the lower elastic modulus and viscosity coefficient are more easily crushed and there is no repulsive force. This is because the pressure can be weak.

  Next, the arrangement | positioning state of the adhesive material 2 for temporary sticking of this invention and the adhesive material 3 for temporary sticking is demonstrated concretely.

  In the present invention, it is preferable that the inner side sticking adhesive material 2 is continuously disposed on the mask adhesive surface 4 as shown in FIG. This is for improving the adhesiveness and enhancing the sealing property.

  On the other hand, the temporary sticking pressure-sensitive adhesive material 3 does not need to be continuously disposed on the mask pressure-sensitive adhesive surface 4 as long as the object of the present invention is achieved, and may be partially disposed as shown in FIG. I do not care. Reference numeral 3 a shown in FIG. 1 denotes an air vent portion in which the temporary sticking adhesive material 3 on the mask adhesive surface 4 is partially discontinuous to form an air vent hole. This is because the temporary adhering adhesive material 3 only needs to be able to achieve fixation and simple removal to the storage container during transfer of the pellicle, and fixation and simple removal during positioning to the mask or the like before the main sticking.

  The case where the temporary adhering adhesive material 3 that meets the above requirements is partially disposed on the mask adhesive surface 4 will be described using an application method as an example. In the present invention, a coating method is used as a means for arranging, but it may be pasted like a tape, or once an adhesive material is arranged on another flat plate or the like, it is transferred to the mask adhesive surface 4 It doesn't matter. However, in particular, when the pellicle frame 1 of a large pellicle is arranged, it is preferable to use a coating method from the viewpoint of productivity.

  As shown in FIG. 3, when the adhesive material 3 for temporary attachment is partially applied, in the case of a rectangular pellicle, it is applied to at least two of the eight corners and the central part of the four sides. What is necessary is just two places chosen from four corners, and two places chosen from the central part of four sides may be sufficient. The applied length may be 20% or more of the entire circumference.

  In the present invention, it is preferable that the coating is applied to two or more selected from among the four corners, since it is easy to peel off after temporary sticking.

  In the present invention, either the main sticking adhesive material 2 or the temporary sticking adhesive material 3 may be inside the mask adhesive surface 4, but the dust on the sealed portion after the main sticking to the pellicle mask or the like In consideration of the possibility of occurrence, as shown in FIGS. 1 and 3, it is preferable that the main sticking adhesive 2 is on the inner side and the temporary sticking adhesive 3 is on the outer side. This is because if the temporary sticking adhesive 3 is inside the main sticking adhesive 2, dust generation due to foreign matter mixed in and attached to the temporary sticking adhesive 3 during the temporary sticking operation can be considered. Moreover, when it is outside, it is easy to insert a peeling jig or the like into the partially coated portion at the time of peeling after temporary attachment.

  Moreover, in this invention, in order to exclude the repulsive force of the temporary sticking adhesive material 3 at the time of a main sticking, it is also possible to peel off the temporary sticking adhesive material 3 at the time of a main sticking, and in order to perform such a process. In addition, it is preferable that the temporary sticking adhesive material 3 is disposed outside.

  The pellicle frame 1 to which the adhesive materials 2 and 3 of the present invention are applied has been described above.

  Next, a manufacturing method will be described.

  The adhesive materials 2 and 3 can be applied by extrusion coating using a normal syringe or the like. Accordingly, the inner pressure-sensitive adhesive material 2 and the outer pressure-sensitive adhesive material 3 can be applied simultaneously or separately, and when the pressure-sensitive adhesive materials 2 and 3 to be used are the same, the inner side and the outer side are continuously applied. You can also.

  In the present invention, the height of the temporary sticking adhesive material 3 from the mask adhesive face 4 is higher than the height of the permanent sticking adhesive material 2 from the mask adhesive face 4. For example, when the coating method by extrusion is used, the adjustment can be performed by controlling the amount of the adhesive materials 2 and 3 (coating pressure) and by controlling the shape of the coating outlet. Pressing or the like may be performed with a molding machine such as a face plate, or a molding machine in which the flat plate itself is crafted can be used.

  When the height is adjusted using such a molding machine, the degree of freedom of the shape of the molding machine is high, so that the height can be easily adjusted, which is preferable. Specifically, there is a method of adjusting the height by providing a step on the molding plate itself, or by providing a step with a heat-resistant material and then heating and pressing the adhesive materials 2 and 3.

  In the present invention, the height of the adhesive materials 2 and 3 can be adjusted by making a step directly on the mask adhesive surface 4 to which the adhesive materials 2 and 3 are applied.

  In the pellicle frame 1 to which the adhesive materials 2 and 3 of the present invention are applied, even if the application process of the adhesive materials 2 and 3 is performed after the pellicle film is spread and attached to the surface opposite to the mask adhesive surface 4 Alternatively, after the adhesive materials 2 and 3 are applied, the pellicle film may be stretched and pasted.

  Hereinafter, the present invention will be described by way of examples. The elastic modulus and viscosity coefficient in the present invention are measured by the following procedure.

  The elastic modulus E is determined by placing an adhesive sample of width: 3.5 mm to 4 mm, length: 20 mm, thickness: 1.4 mm on a flat surface plate in a tensile tester manufactured by Shimadzu Corporation under room temperature conditions. The stroke speed is defined as the value of the elastic modulus when the adhesive material is compressed with a flat quartz glass jig up to a thickness of 0.1 mm at 0.5 mm / min.

  On the other hand, the viscosity coefficient η was measured by placing an adhesive sample of width: 3.5 mm to 4 mm, length: 20 mm, thickness: 1.4 mm on a flat surface plate in a tensile tester manufactured by Shimadzu Corporation. Maxwell model approximation from the stress relaxation curve when the compression was stopped when the adhesive material was compressed with a quartz glass jig attached to a tensile tester at a stroke speed of 0.5 mm / min and a thickness of 0.1 mm under the conditions. σ (t) = σexp (−t / τ), which is derived from τ = η / E, is defined as the value of η at the time when compression is stopped (t = 0).

Using a pellicle frame 1 of size: 290 mm x 430 mm, thickness: 5.6 mm, width: 12 mm, a styrene ethylene butylene styrene-based hot melt adhesive material has an inner and outer frame adhesive width of 4 mm and 3.5 mm, respectively. The adhesive material 3 having an elastic modulus of 800 kg / cm ² and a viscosity coefficient of 100,000 kgs / cm ² was applied to the outside. The outer adhesive material 3 was applied so as to be 1/3 of the mask adhesive width of the inner adhesive material 2 and molded so as to be 1 mm higher than the inner adhesive material 2. Pasting was performed using soda lime glass of (vertical) 330 mm × (horizontal) 450 mm × (thickness) 4.8 mm, and temporary pasting was performed by applying a load of 2 kg to the entire periphery of the pellicle. Even after the temporary sticking, the pellicle did not peel off even when stored with the pellicle facing downward for more than a day. When peeling, it was possible to peel by lifting the pellicle. Moreover, there was almost no crushing of the adhesive material surface of the temporary sticking part by sticking, and it was possible to repeat temporary sticking-> peeling several times.

Using the pellicle frame 1 of the above size, a styrene ethylene butylene styrene hot melt adhesive was applied to the inside and outside so that the frame adhesion widths would be 4 mm and 3.5 mm, respectively, and the elastic modulus was 800 kg / cm ^2, and coated with adhesive material 3 of viscosity 100000kgs / cm ^2. The outer adhesive material 3 was applied so as to be ½ of the mask adhesive width of the inner adhesive material 2, and the outer adhesive material 3 was molded to be 0.2 mm higher than the inner adhesive material 2. Pasting was performed using soda lime glass of (vertical) 330 mm × (horizontal) 450 mm × (thickness) 4.8 mm, and temporary pasting was performed by applying a load of 2 kg to the entire periphery of the pellicle. Only the outer adhesive material 3 was bonded, and the inner adhesive material 2 was not bonded at all. After the temporary sticking, the main sticking was performed by applying a load of 60 kg × 10 min to the entire periphery of the pellicle. After this sticking, the inner side adhesive material 2 was adhere | attached over the perimeter. After the pasting, only the outer adhesive material 3 was removed in order to suppress the repulsion of the outer adhesive material 3. Even after storing for several months with the pellicle facing down after the main sticking, it did not peel off and the sticking state was good.

Using a frame of the above size, a styrene ethylene butylene styrene hot melt adhesive is applied on the inside and outside so that the frame adhesion width is 4 mm and 3.5 mm, respectively, and the elastic modulus is 800 kg / cm ² on the outside. An adhesive material 3 having a viscosity coefficient of 100,000 kgs / cm ² was applied. The outer pressure-sensitive adhesive material 3 is applied so as to be ½ of the mask bonding width of the inner pressure-sensitive adhesive material 2, and the outer pressure-sensitive adhesive material 3 is applied only at four corners so as to be 20% of the entire circumference. Molded to be 0.2 mm higher. Pasting was performed using soda lime glass of (vertical) 330 mm × (horizontal) 450 mm × (thickness) 4.8 mm, and temporary pasting was performed by applying a load of 2 kg to the entire periphery of the pellicle. Even after the temporary sticking, the pellicle did not peel off even when stored with the pellicle facing downward for more than a day. The peeling was easy when the jig was inserted into the uncoated portion of the outer adhesive material 3 while lifting the corners one by one. In this sticking, a load of 30 kg × 10 min was applied to the entire periphery of the pellicle, so that the inner adhesive material 2 was in close contact with the entire periphery. After the main sticking, the partially applied outer adhesive material 3 is no longer necessary, so only the outer adhesive material 3 is removed. After the main sticking, the pellicle did not peel off even when stored vertically for several months, and the sticking state was good.

  The pellicle frame of the present invention has good adhesion fixability even after repeated temporary attachment, and can also achieve adhesion fixation at the time of permanent application, so it can be transferred from the manufacturing site to the use site while maintaining the performance of the pellicle. It becomes. This is particularly effective for large pellicles.

It is a plane explanatory view showing the configuration of the pellicle frame according to the present invention. 1 is a schematic cross-sectional view showing a configuration of a pellicle frame according to the present invention. It is a plane explanatory view showing other composition of the pellicle frame concerning the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Pellicle frame 2, 3 ... Adhesive material 3a ... Air vent part 4 ... Mask adhesive surface

Claims (3)

A pellicle frame in which an adhesive material is disposed on a mask adhesive surface, wherein an adhesive material is disposed on the inside and outside of the mask adhesive surface of the pellicle frame, and at least one of the inside and outside adhesive materials has an elastic modulus. ^{400kg / cm 2 ~900kg / cm 2} , a pellicle frame, which is a viscosity coefficient ^{10000kg · s / cm 2 ~110000kg ·} s / cm 2. Adhesion of one of the inner and outer adhesive materials having an elastic modulus of 400 kg / cm ^{2 to} 900 kg / cm ² and a viscosity coefficient of 10000 kg · s / cm ^{2 to} 110000 kg · s / cm ² disposed on the mask adhesive surface of the pellicle frame The length from the mask adhesive surface of the material to the topmost portion of the adhesive material is longer than the length from the mask adhesive surface of the other adhesive material to the topmost portion of the adhesive material. Pellicle frame. Elastic modulus ^{400kg / cm 2 ~900kg / cm 2} , the adhesive material is a viscosity coefficient ^{10000kg · s / cm 2 ~110000kg ·} s / cm 2 is disposed on the outside of the mask adhesive surface of the pellicle frame, and the inner The pellicle frame according to claim 2, wherein the adhesive material is continuously disposed on the mask adhesive surface.

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