JP3809162B2 - ガス供給集積ユニット - Google Patents

ガス供給集積ユニット Download PDF

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Publication number
JP3809162B2
JP3809162B2 JP2003382139A JP2003382139A JP3809162B2 JP 3809162 B2 JP3809162 B2 JP 3809162B2 JP 2003382139 A JP2003382139 A JP 2003382139A JP 2003382139 A JP2003382139 A JP 2003382139A JP 3809162 B2 JP3809162 B2 JP 3809162B2
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Japan
Prior art keywords
manual valve
flow path
gas
common flow
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003382139A
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English (en)
Japanese (ja)
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JP2005150191A (ja
JP2005150191A5 (enExample
Inventor
貴史 井上
敏一 三輪
憲一 五島
浩 杉田
真之 工藤
修 川久保
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CKD Corp
Original Assignee
CKD Corp
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Publication date
Application filed by CKD Corp filed Critical CKD Corp
Priority to JP2003382139A priority Critical patent/JP3809162B2/ja
Publication of JP2005150191A publication Critical patent/JP2005150191A/ja
Publication of JP2005150191A5 publication Critical patent/JP2005150191A5/ja
Application granted granted Critical
Publication of JP3809162B2 publication Critical patent/JP3809162B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Valve Housings (AREA)
  • Pipeline Systems (AREA)
JP2003382139A 2003-11-12 2003-11-12 ガス供給集積ユニット Expired - Fee Related JP3809162B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003382139A JP3809162B2 (ja) 2003-11-12 2003-11-12 ガス供給集積ユニット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003382139A JP3809162B2 (ja) 2003-11-12 2003-11-12 ガス供給集積ユニット

Publications (3)

Publication Number Publication Date
JP2005150191A JP2005150191A (ja) 2005-06-09
JP2005150191A5 JP2005150191A5 (enExample) 2005-11-10
JP3809162B2 true JP3809162B2 (ja) 2006-08-16

Family

ID=34691291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003382139A Expired - Fee Related JP3809162B2 (ja) 2003-11-12 2003-11-12 ガス供給集積ユニット

Country Status (1)

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JP (1) JP3809162B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100408900C (zh) * 2004-05-20 2008-08-06 喜开理株式会社 气体供给集成单元和气体单元的增设方法
KR101194104B1 (ko) 2011-01-27 2012-10-24 주식회사 바이코 집적화 가스블럭을 이용한 가스공급장치
JP6085492B2 (ja) * 2013-02-08 2017-02-22 Ckd株式会社 プロセスガス分流供給装置

Also Published As

Publication number Publication date
JP2005150191A (ja) 2005-06-09

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