JP3785038B2

JP3785038B2 - Large substrate transfer device

Info

Publication number: JP3785038B2
Application number: JP2000366032A
Authority: JP
Inventors: 洋一郎中島; 英四郎笹川; 直之宮園; 茂一上野
Original assignee: Mitsubishi Heavy Industries Ltd
Current assignee: Mitsubishi Heavy Industries Ltd
Priority date: 2000-11-30
Filing date: 2000-11-30
Publication date: 2006-06-14
Anticipated expiration: 2020-11-30
Also published as: JP2002167035A

Description

【０００１】
【発明の属する技術の分野】
本発明は、プラズマＣＶＤ、スパッタリング、ドライエッチング等の処理を大型基板に施すための大型基板用真空処理装置に用いる大型基板搬送装置に関する。
【０００２】
【従来の技術】
近年太陽電池などの製造を目的として、大型の基板を真空中でプラズマＣＶＤ、スパッタリング、ドライエッチング等の処理を均質・連続・大量に施す必要性が益々高まっている。本発明者等は今までに一連の関連技術の発明を出願、開示してきたが、真空処理装置の各部において解決すべき課題が多々あるなかで、特に大型脆性材質からなる基板を操作するところの基板搬送装置について特願平１１−３０１２７１にその発明の１つを出願した。
【０００３】
前記先願技術（非公知）の要点を図７及び図１０を参照しながら説明すると、トレイレス斜め基板搬送装置１０１において、該装置は基板Ｇを減圧下で処理する真空処理室１１０と、この真空処理室との間で基板を受け渡しする基板搬送台車１０６Ａ、１０６Ｂ、１０６Ｃ、１０６Ｄと、この搬送台車上で基板を斜めに立て掛けて支持する基盤保持機構と、前記真空処理室に設けられた両面型の成膜ユニット１７１と、この成膜ユニットの両側にそれぞれ配置され、それぞれが前記成膜ユニットに対して可動である該ヒーター発熱面を覆うヒーターカバー１７３を有する一対のヒーターユニット１７２と、前記ヒーター発熱面と平面での平行関係を保ちながら前記ヒーターカバーを前記ヒーター発熱面に実質的に直交する方向に移動させ、前記ヒーターカバーを基板に密着させるヒーターカバー移動手段とを具備することを特徴とした。
【０００４】
そして前記先願技術（非公知）の搬送台車の基板保持機構を、その実施態様の一例である図８及び図９を参照しながら説明すると、搬送台車１０６Ａは台車本体１６１と、２本のアーム１６２と、一対の支持カム１６３と間歇回転駆動機構１６５と、一対の保持部材１６６と、一対のストッパ１６８とを備えている。台車本体１６１は図示しない進退駆動機構によりレール１０８Ａに噛み込み連結されており、レール上を進退可能になっている。
【０００５】
２本のアーム１６２は台車本体１６１の長手直交軸に対して約１０°傾斜するように台車本体１６１上に直立して設けられている。アーム１６２の相互間隔は基板Ｇの長辺より少し大きく、これら２本のアーム１６２の間に基板Ｇがもたせ掛けられるようになっている。
【０００６】
各アーム１６２の上部には保持部材１６６および揺動軸１６７が取り付けられ、各アーム１６２の下部には支持カム１６３および間歇回転駆動機構１６５が取り付けられている。上部保持部材１６６は揺動軸１６７周りに揺動可能に支持され、基板Ｇの支持カム１６３は基板Ｇの下部を支持し、回転軸１６４により間歇回転駆動機構１６５に連結されている。支持カム１６３は上面に凹所１６３ａを有する厚みのある板カムである。
【０００７】
間歇回転駆動機構１６５は例えばゼネバストップのような機構からなり、支持カム１６３を軸１６４の周りに所望角度だけ間歇的に回転させるようになっている。支持カム１６３は基板Ｇを保持搬送するときは図９の（ａ）に示すように凹所１６３ａで基板Ｇの下端に接触しているが、基板Ｇを真空処理室内のヒーターカバー１７３に受け渡すときは図９の（ｂ）に示すように凹所１６３ａから基板Ｇの下端が外れるように軸１６４周りに回転される。基板Ｇは受け渡し前後で落差ｈを生じているので、ヒーターカバー１７３は支持突起１７３ａが基板Ｇの下端より少し下方に位置するよう台車１０６Ａに接近するようになっている。
【０００８】
なお、ストッパ１６８は基板Ｇの側端部に当接するようにアーム１６２の適所に取り付けられ、これにより搬送中の基板Ｇが進行方向にずれるのを防止している。
【０００９】
さて前記先願技術（非公知）の搬送台車の基板保持機構においては、
支持カム１６３を軸１６４の周りに所望角度だけ間歇的に回転させる間歇回転駆動機構と上部保持部材１６６を揺動軸１６７周りに揺動させる揺動駆動機構が複雑となるばかりか、真空維持、真空室の大きさを極力コンパクトな設計にするなどの点、受け渡し動作の信頼性確保の点にも困難があり、駆動には大きな力が必要なことも問題であった。
【００１０】
【発明が解決しようとする課題】
本発明はこのような従来の問題点に鑑みなされたもので、大型基板を真空処理室外の基板受け渡しステージで、及び、減圧下で処理する真空処理室内の基板受け渡し位置で、基板を受け渡しさせる搬送台車と、この搬送台車上で基板を保持する基板保持機構とを具えた大型基板搬送装置において、真空室の真空維持が容易な、真空室の大きさを極力コンパクトにすることが可能な、基板受け渡し動作の信頼性の高い、駆動源の小さな基板受け渡し機構を前記基板保持機構に組み込んだ大型基板搬送装置の提供を目的とする。
【００１１】
【課題を解決するための手段】
本発明は、大型基板を真空処理室外の基板受け渡しステージで、及び、減圧下で処理する真空処理室内の基板受け渡し位置で、基板を受け渡しさせる搬送台車と、この搬送台車上で基板を保持する基板保持機構とを具えた大型基板搬送装置において、
傾斜安定角で起立させた基板の上下両端部を係合把持させる少なくとも一対の係合把持手段と、搬送台車により立設する支柱によって支持され、該係合把持手段の少なくとも一方を基板両端より離隔して開放する方向若しくは基板両端へ接近して把持させる上下方向に移動させるリンク機構と、台車と長手方向にほぼ平行に延在され、軸廻りに回動することによって前記リンク機構に駆動力を伝達するシャフト状の駆動伝達部材と、前記シャフト状の駆動伝達部材を軸廻りに回転させてリンク機構を上下方向に移動させる移動手段と、前記係合把持手段を基板係合位置で位置保持させる位置保持手段とからなる基板受渡し機構を、前記基板保持機構に組み込むとともに、
前記移動手段の駆動入力端を台車下方に垂下させ、搬送台車と分離して真空処理室の真空処理部外部に配置された駆動手段の出力端と前記移動手段の駆動入力端とが、前記受渡し位置で連結可能に構成し、
更に前記移動手段が、ウォームホィールとウォームギヤーとにより構成され、前記シャフト状の駆動伝達部材に同軸に固定されたウォームホィールがウォームギヤーと噛合し、該ウォームギヤーのシャフトが駆動入力端となって台車下方へ垂下されていることを特徴とする。
【００１２】
即ち、本発明の基板受け渡し機構を、基板保持機構に持っている搬送台車は、真空処理室外の基板受け渡しステージで基板を受け取って台車上に傾斜安定角度、例えば垂直軸に対して７°から１２°の傾斜角度で起立させた状態で、基板保持機構の係合把持手段により保持して、真空処理室内に移動する。この真空処理室内の基板受け渡し位置で、移動手段と共働して機能するリンク機構により係合把持手段が基板両端より離隔・開放される方向に移動し、基板を真空処理室の受け渡し対象へ、開放受け渡す。台車上で移動する際には、係合把持手段は位置保持手段で基板係合位置で位置保持され、移動等の振動で容易に脱落しないようになっている。そして真空処理が終了して、基板を真空処理室から取り出すときは、空の台車が基板真空処理室の受け渡し位置まで赴き、基板保持機構の係合把持手段は、前記の逆の動作で、受け取り対象に載置されている基板両端へ、接近・把持するに方向に移動し基板を確保し真空室より退去する。
【００１３】
本発明は更に、前記係合把持手段が、基板の上下両端側を開口させた係合爪で形成され、移動手段と共働して機能するリンク機構により一体的に連結されて、基板両端より離隔・開放若しくは接近・把持する上下方向に同時に揺動可能に構成された事を特徴とする。
【００１４】
即ち、把持手段は先ず基板の上下端をつかむ爪があって、その爪は例えばコの字型のように把持すべき基板の端側に開口し向いており、移動手段と共働する例えばリンク機構につながっていて、これにより揺動し基板の両端を掴んだり、放したりできるようになっている。
【００１５】
本発明は更に、前記位置保持手段がリンク機構の係合把持手段側と支柱間に介装されたバネ付勢手段であって、該バネ付勢手段が、係合把持手段を介して基板を緊縛する方向に付勢されていることを特徴とする。
【００１６】
即ち、把持手段の爪がリンク機構に設けられたバネの付勢力によって、上側の爪ならば下方に、下側の爪ならば上方に、基板を緊縛する方向に付勢される。
【００１７】
【００１８】
真空処理装置の真空処理室内には真空処理ユニット、ヒーターユニットなど真空処理に必要な要素を備える必要があるが、極力内容積を小さくして、真空手段の規模が大きくならないようにする必要がある。従って台車上の基板受け渡し機構を動作させる、駆動手段は真空室外において、真空室に進入する台車上には必須な部材のみを限定して装備し出来るだけコンパクトに構成する必要がある。
【００１９】
従って本発明では、真空室内部と気密保持状態を維持するシール部を有する中間動力伝達手段を介して前記駆動手段の出力端を前記移動手段の駆動入力端に連結可能に構成するとともに、前記駆動手段が、真空処理部の真空室外部にあって、エアーシリンダーによりその出力端が定量上下動を発生する外部駆動源であり、前記中間動力伝達手段は、真空室壁に設けたシール手段を介して真空室内部より真空室外に延在させてなる上下動伝達軸機構であって、前記真空室外に延在させた端部が前記駆動手段の駆動出力端に接続可能に構成してなる。
【００２０】
前記した駆動源が回転動力であると、シール機構や係合機構が複雑になるが、この上下動駆動源であれば、移動手段のリンク機構さえ工夫すれば、簡素な機構で動力伝達が可能である。即ち、シール手段は、例えば壁面貫通穴に設けたＯリングが壁面を貫通し上下するロッドを圧迫しつつ摺擦して機密を保ようにするだけでよい。
【００２１】
【００２２】
【００２３】
又本発明は、大型基板を真空処理室外の基板受け渡しステージで、及び、減圧下で処理する真空処理室内の基板受け渡し位置で、基板を受け渡しさせる搬送台車と、この搬送台車のベース長手方向両側に立設する一対の支柱とを有し、該支柱に基板を傾斜安定角で起立保持させる基板保持機構を設けた大型基板搬送装置において、
前記基板保持機構に基板を基板受け取り対象への基板受け渡しと基板受け取り対象よりの基板受け取りを行う基板受渡し機構を組み込むとともに、
前記基板受け渡し機構が、前記夫々の支柱の上下方向位置に支持させ、前記傾斜安定角で起立させた状態の基板の上下両端部を把持するように形成された一対の係合把持手段と、前記支柱に支持され、前記係合把持手段の少なくとも一方を前記基板の上下両端より離隔する方向と接近する方向に揺動させて、係合把持手段による基板の把持と開放を行う一対のリンク機構と、前記台車のベース長手方向に沿って延在されるとともに、軸廻りに回動することによってその両端に連結した夫々のリンク機構に駆動力を伝達するシャフト状の駆動伝達部材と、前記シャフト状の駆動伝達部材に固定された嵌合突起を介して、軸廻りの回転力を付与する移動手段と、前記少なくとも一方の係合把持手段に基板を緊縛する方向に弾性力を付勢させて基板を安定把持させるバネ付勢手段とから構成され、
前記移動手段が、前記ベース上に取り付けられ、一端側を前記嵌合突起に嵌合された振り子状カムと該振り子状カムの他端側に位置する上下駆動軸からなり、該振り子状カムの上下方向の振り子運動により、前記シャフト状の駆動伝達部材を軸周りに回転させるように構成するとともに、該上下駆動軸の下端側を駆動入力端として台車のベース下方へ垂下させ、該台車と分離して真空処理室の真空処理部外部に配置された定量上下動を発生する駆動手段の出力端と前記移動手段の駆動入力端とが、前記基板受け取り対象の受渡し位置で連結可能に構成したことを特徴とする。
【００２４】
【発明の実施の形態】
以下に図面を参照しつつ、本発明の実施の形態を例示的に説明する。但し本実施の形態の製品の形状、寸法、材質、その相対配置等は特に特定的な記載がない限り本発明の範囲をそれのみに限定する趣旨ではなく単なる説明例に過ぎない。
【００２５】
（実施例１）図１は本発明の基板保持機構を備えた搬送台車の一例の概要図である。該搬送台車は図示しない進退機構で同じく図示しないレール上を進退可能であって、前記したように真空処理室内の基板受け渡し位置と真空処理室外の基板受け渡しステージ間を往復できるようになっている。
【００２６】
同搬送台車は搬送台車ベース１１上に一対の搬送台車アーム１２を具え、該アームは基板を安定角度で保持するよう、例えば７°〜１２°、垂直からやや傾いて起立している。更に同アーム１２間には軸受け１６に支えられた基板支持爪駆動シャフト１８が動力伝達部材として回動可能に配置されている。基板支持爪駆動シャフト１８の両端にはカム１９が同軸に固定され、同シャフトの回動に伴って揺動するようになっている。
【００２７】
カム１９の揺動は上部支持爪駆動リンク１５Ａに伝えられ、次いで上部支持爪駆動リンク１５Ｂの搬送台車アーム１２上支点を中心としたシーソー状運動に変換され、上部支持爪駆動リンク１５Ｂの先端に、下部に開口して付けられたコの字状の上部基板支持爪１４を上方又は下方へと開閉する。同じくカム１９の揺動は同時に下部支持爪駆動リンク１５Ｃにも伝えられ、次いで下部支持爪駆動リンク１５Ｄの搬送台車アーム１２上支点を中心としたシーソー状運動に変換され、下部支持爪駆動リンク１５Ｄの先端に、上部に開口して付けられたコの字状の下部基板支持爪１３を上方又は下方へと開閉する。
【００２８】
支持爪駆動リンク１５Ａ及び１５Ｃは同一カム１９に取り付けられているので、下部、上部の爪は同時に開くときは開き、閉じるときには閉じるようになっており、かくなる基板保持機構は支持爪が開くとき基板を開放・受け渡し、支持爪が閉じるとき基板を把持・受け取るよう構成されている。
【００２９】
基板支持爪駆動シャフト１８の回動は、本発明の移動手段によってなされる。即ち該シャフトに同軸に固定されたウォームホィール１７がウォームギヤー１０と噛合し、該ウォームギヤー１０のシャフトが駆動入力端となって台車下方に垂下し、ここに外部より定量的回転駆動力を得て行われる。
【００３０】
（実施例２）図２は本発明の基板保持機構を備えた搬送台車の第二の例の概要図である。実施例１では上部基板支持爪が可動で、上下の支持爪が同時に開閉したが、本実施例ではコの字状の上部支持爪２０は下方開口方向に固定して、搬送台車アーム上端付近に取り付けた。その他は実施例１と同様に構成した。即ち、本実施例では下の爪の開閉のみで、基板の受け渡しができる保持機構の構成とした。これにより構造が簡素となり、信頼性が向上した。
【００３１】
（実施例３）図３は本発明の基板保持機構を備えた搬送台車の第三の例の概要図である。実施例２のリンク機構を動かす移動手段に変えて、本実施例の移動手段は次のように構成する。
【００３２】
即ち、搬送台車ベース１１上に設けられた振り子軸軸受け３５の振り子軸に振り子状カム３３を揺動自在に軸支し、該振り子状カムの一方端にはＵ字状切り込み部を設け、この切り込み部に、軸受け３６及び１６に支えられた基板支持爪駆動シャフト１８に固定された嵌合突起３１の突起３２を摺動自在に嵌合し、振り子状カムの他端に上下駆動軸３７を当接させ、該上下駆動軸３７を駆動入力端として台車下方に垂下させ、ここに外部より定量的上下動を与えて基板支持爪駆動シャフト１８の回動を行う。
【００３３】
（実施例４）図４は本発明の基板保持機構を備えた搬送台車の第四の例の概要図である。実施例３のリンク機構に位置保持手段としてバネ付勢手段４１を付加した例である。
【００３４】
即ち、リンク機構の下部基板支持爪駆動リンク１５Ｄのアーム１２への軸支点より下部基板支持爪１３側にバネ４１の一端を固定し、他端をアーム１２の適所に固定することにより、下部基板支持爪１３は上限位置まで引っ張られる。基板を保持するときは、カム１９の揺動で下部基板支持爪駆動リンク１５Ｃは下方に引かれるので、下部基板支持爪駆動リンク１５Ｄは軸支点を中心に反時計方向に回転移動し、下部基板支持爪１３は下方に動き把持機構は開いた状態となる。そこで、基板を受け取り把持した状態で、バネが伸びてバネの変位に応じた適度な付勢力が基板にかかるよう調節しておけば、台車の進退などで台車が振動しても、基板は安定して保持されている。
【００３５】
（実施例５）図５は本発明の移動手段が搬送台車と分離して真空室外部に設けられ、移動手段の駆動入力端に与えられる動力が回転力であって、リンク機構を動かす移動手段として、ウォームギヤー・ホィールを含む例である。
【００３６】
図５において、５０は基板搬送装置側に装着する部材である。５１は真空室下面に装着する部材である。
【００３７】
ウォームギヤー回転用モーター５６Ａの回転軸は上方に延在し、定量回転を与えるために、回転軸の回転量を検出するロータリーエンコーダー５７を備え、真空室と外部とを、直接接続せず動力を伝達することの出来る磁性流体シール５５によってベロース５４で覆われた室内のウォームギヤー回転軸５３につながっている。ウォームギヤー回転軸５３は室内で分断されており、モーター側の上端が駆動出力端となり、ギヤー側の下端が駆動入力端となり、以下に述べる嵌脱機構で分断軸端同士で嵌脱できるようになっている。
【００３８】
ウォームギヤー回転軸５３の嵌脱は、ウォームギヤー回転軸駆動入力端嵌脱モーター５６Ｂとロータリーエンコーダー５７によって定量回転するボールねじ５９があって、該ボールねじに螺合するウォームギヤー回転モーター部一体がＬＭガイドにスライドして定量的に上下して行われるようになっている。
【００３９】
（実施例６）図６は本発明の移動手段が搬送台車と分離して真空室外部に設けられ、移動手段の駆動入力端に与えられる動力が上下動力であって、リンク機構を動かす移動手段として、振り子状カムと嵌合突起を含む例である。
【００４０】
図６において、エアシリンダー６２および上下駆動軸３７の一部は真空室下面に装着され、基板支持爪駆動シャフト１８、嵌合突起３１、突起３２、振り子状カム３３、振り子軸３４、振り子軸軸受け３５、軸受け３６、上下駆動軸３７の一部などの部材は真空室内の搬送台車の台車ベース１１上に装着される。なおラック６１は搬送台車の進退機構の一部であり、図示していないピニオンと螺合して駆動され、真空室内外に進退可能となっている。
【００４１】
エアシリンダー６２のシリンダーロッドは上下駆動軸３７となって上方に延在し、定量上下動を与える。上下動軸は壁を貫いて室内にも延在し、壁と該軸は例えばＯリングでシールされ、気密下に上下に摺動できるようになっている。この場合駆動出力端と駆動入力端とは一体になっており、シリンダー６２の上下駆動力は駆動軸３７の最上端が振り子状カムの一端に当接して定量上下動を伝えることができるようになっている。
【００４２】
【発明の効果】
以上説明したように、本発明により、大型基板を真空処理室外の基板受け渡しステージで、及び、減圧下で処理する真空処理室内の基板受け渡し位置で、基板を受け渡しさせる搬送台車と、この搬送台車上で基板を保持する基板保持機構とを具えた大型基板搬送装置において、真空室の真空維持が容易な、真空室の大きさを極力コンパクトにすることが可能な、基板受け渡し動作の信頼性の高い、駆動源の小さな基板受け渡し機構を前記基板保持機構に組み込んだ大型基板搬送装置の技術を確立できた。
【図面の簡単な説明】
【図１】基板保持機構を備えた搬送台車の一例の概要図
【図２】基板保持機構を備えた搬送台車の第二の例の概要図
【図３】基板保持機構を備えた搬送台車の第三の例の概要図
【図４】基板保持機構を備えた搬送台車の第四の例の概要図
【図５】移動手段の駆動手段の一例の概要図
【図６】移動手段の駆動手段の第二の例の概要図
【図７】トレイレス斜め基板搬送装置概要図
【図８】先願技術の基板搬送台車概要図
【図９】先願技術の係合把持手段概要図
【図１０】真空処理室の概要図
【符号の説明】
１０ウォームギヤー
１１搬送台車ベース
１２搬送台車アーム
１３下部基板支持爪
１４上部基板支持爪
１５Ａ、Ｂ上部基板支持爪駆動リンク
１５Ｃ、Ｄ下部基板支持爪駆動リンク
１６軸受け
１７ウォームホィール
１８基板支持爪駆動シャフト
１９揺動カム
２０上部基板支持固定爪
３１嵌合突起
３２突起
３３振り子状カム
３４振り子軸
３５振り子軸軸受け
３６軸受け
３７上下駆動軸
４１バネ（付勢手段）
５０基板搬送台車装着部材
５１真空室下面装着部材
５３ウォームギヤー回転軸
５４ベローズ
５５磁性流体シール
５６Ａウォームギヤー回転モーター
５６Ｂウォームギヤー回転軸嵌脱モーター
５７エンコーダー
５８ＬＭガイド
５９ボールネジ
６１ラック
６２エアシリンダー
１０１トレイレス斜め基板搬送装置
１０６Ａ、Ｂ、Ｃ、Ｄ基板搬送台車
１０８Ａレール
１１０真空処理室
１６１台車本体
１６２アーム
１６３支持カム
１６３ａ凹所
１６４回転軸
１６５間歇回転駆動機構
１６６保持部材
１６７揺動軸
１６８ストッパー
１７１真空処理ユニット
１７２ヒーターユニット
１７３ヒーターカバー
１７３ａ支持突起
Ｇ基板
ｈ落差[0001]
[Field of the Invention]
The present invention relates to a large substrate transfer device used in a large substrate vacuum processing apparatus for performing processing such as plasma CVD, sputtering, and dry etching on a large substrate.
[0002]
[Prior art]
In recent years, for the purpose of manufacturing solar cells and the like, there is an increasing need to perform processing such as plasma CVD, sputtering, and dry etching on a large substrate in vacuum in a uniform, continuous, and large amount. The present inventors have applied for and disclosed a series of related technology inventions so far, but there are many problems to be solved in each part of the vacuum processing apparatus, and in particular, a substrate made of a large brittle material is operated. One of the inventions was filed in Japanese Patent Application No. 11-301271 for a substrate transfer device.
[0003]
The main points of the prior application technique (unknown) will be described with reference to FIGS. 7 and 10. In the trayless oblique substrate transfer apparatus 101, the apparatus processes a vacuum processing chamber 110 for processing the substrate G under reduced pressure, and this vacuum. Substrate transport carts 106A, 106B, 106C, and 106D that deliver substrates to and from the processing chamber, a substrate holding mechanism that supports the substrates while leaning on the transport cart, and a double-sided type provided in the vacuum processing chamber A film forming unit 171, a pair of heater units 172 each having a heater cover 173 disposed on both sides of the film forming unit and covering the heater heat generating surface that is movable with respect to the film forming unit, and the heater The heater cover is moved in a direction substantially perpendicular to the heater heating surface while maintaining a parallel relationship with the heating surface in a plane, It was characterized by comprising a heater cover moving means for adhering the heater cover to the substrate.
[0004]
The substrate holding mechanism of the prior art (unknown) transport cart will be described with reference to FIGS. 8 and 9 which are examples of the embodiment. The transport cart 106A includes a cart body 161 and two arms. 162, a pair of support cams 163, an intermittent rotation drive mechanism 165, a pair of holding members 166, and a pair of stoppers 168. The carriage main body 161 is engaged with and connected to the rail 108A by an advancing / retreating drive mechanism (not shown) so that the carriage can advance and retreat.
[0005]
The two arms 162 are provided upright on the carriage main body 161 so as to be inclined by about 10 ° with respect to the longitudinal orthogonal axis of the carriage main body 161. The distance between the arms 162 is slightly larger than the long side of the substrate G, and the substrate G is placed between the two arms 162.
[0006]
A holding member 166 and a swing shaft 167 are attached to the upper part of each arm 162, and a support cam 163 and an intermittent rotation driving mechanism 165 are attached to the lower part of each arm 162. The upper holding member 166 is swingably supported around the swing shaft 167, and the support cam 163 of the substrate G supports the lower portion of the substrate G, and is connected to the intermittent rotation drive mechanism 165 by the rotation shaft 164. The support cam 163 is a thick plate cam having a recess 163a on the upper surface.
[0007]
The intermittent rotation drive mechanism 165 includes a mechanism such as a Genevatop, for example, and rotates the support cam 163 about a shaft 164 intermittently by a desired angle. When holding and transporting the substrate G, the support cam 163 is in contact with the lower end of the substrate G at the recess 163a as shown in FIG. 9A, but the substrate G is transferred to the heater cover 173 in the vacuum processing chamber. In some cases, as shown in FIG. 9B, the substrate G is rotated around the shaft 164 so that the lower end of the substrate G is removed from the recess 163a. Since the substrate G has a drop h before and after the delivery, the heater cover 173 approaches the carriage 106A so that the support protrusion 173a is positioned slightly below the lower end of the substrate G.
[0008]
The stopper 168 is attached to an appropriate position of the arm 162 so as to come into contact with the side edge of the substrate G, thereby preventing the substrate G being transferred from shifting in the traveling direction.
[0009]
Now, in the substrate holding mechanism of the transport vehicle of the prior application technique (unknown),
The intermittent drive mechanism for intermittently rotating the support cam 163 around the shaft 164 by a desired angle and the swing drive mechanism for swinging the upper holding member 166 around the swing shaft 167 are complicated, and the vacuum is maintained. There is a problem in that the size of the vacuum chamber is made as compact as possible, and the reliability of the delivery operation is also difficult to secure, and that a large force is required for driving.
[0010]
[Problems to be solved by the invention]
The present invention has been made in view of such conventional problems, and transports a large substrate at a substrate delivery stage outside the vacuum processing chamber and at a substrate delivery position inside the vacuum processing chamber where the substrate is processed under reduced pressure. Substrate and substrate holding mechanism for holding a substrate on the transfer carriage, a large substrate transfer device that can easily maintain the vacuum in the vacuum chamber and can make the size of the vacuum chamber as compact as possible It is an object of the present invention to provide a large-sized substrate transfer apparatus in which a substrate transfer mechanism with a small drive source with high reliability of transfer operation is incorporated in the substrate holding mechanism.
[0011]
[Means for Solving the Problems]
The present invention relates to a transfer carriage for transferring a substrate at a substrate transfer stage outside a vacuum processing chamber and a substrate transfer position in a vacuum processing chamber for processing under reduced pressure, and a substrate for holding the substrate on the transfer carriage. In a large substrate transfer device with a holding mechanism,
At least a pair of engaging gripping means tilting engage the upper and lower end portions of the substrate which is erected in a stable angle gripped, is supported by pillars erected by conveyance carriage, than at least one of the substrate at both ends of the engaging gripping means A link mechanism that moves in the direction of separating and opening or moving up and down to approach and grip both ends of the board, and a driving force applied to the link mechanism by extending around the carriage and approximately parallel to the longitudinal direction. A shaft-like drive transmission member for transmitting the shaft, a moving means for rotating the shaft-like drive transmission member around an axis to move the link mechanism in the vertical direction, and holding the engagement gripping means at the board engagement position. Incorporating a substrate delivery mechanism consisting of a position holding means to be incorporated into the substrate holding mechanism,
The drive input end of the moving means is suspended below the carriage, separated from the transport carriage, and the output end of the drive means disposed outside the vacuum processing section of the vacuum processing chamber and the drive input end of the moving means are the delivery Configured to be connectable in position ,
Further, the moving means is constituted by a worm wheel and a worm gear, a worm wheel fixed coaxially to the shaft-like drive transmission member meshes with the worm gear, and the shaft of the worm gear serves as a drive input end. It is characterized in that it is suspended downward from the carriage .
[0012]
That is, the transport carriage having the substrate delivery mechanism of the present invention in the substrate holding mechanism receives the substrate at the substrate delivery stage outside the vacuum processing chamber and tilts on the carriage at a stable tilt angle, for example, 7 ° to 12 ° with respect to the vertical axis. In the state of being raised at an inclination angle of °, it is held by the engagement gripping means of the substrate holding mechanism and moved into the vacuum processing chamber. At this substrate transfer position in the vacuum processing chamber, the engagement gripping means is moved away from both ends of the substrate by the link mechanism that works in cooperation with the moving means, and the substrate is transferred to the transfer target in the vacuum processing chamber. Hand open. When moving on the carriage, the engagement gripping means is held at the board engagement position by the position holding means so that it does not easily fall off due to vibrations such as movement. When the vacuum processing is completed and the substrate is taken out from the vacuum processing chamber, the empty carriage moves to the delivery position of the substrate vacuum processing chamber, and the engagement holding means of the substrate holding mechanism receives the substrate in the reverse operation. The substrate is moved in the direction of approaching and grasping to both ends of the substrate placed on the object, and the substrate is secured and then withdrawn from the vacuum chamber.
[0013]
According to the present invention, the engagement gripping means is formed by engagement claws having openings at both upper and lower ends of the substrate, and is integrally connected by a link mechanism that functions in cooperation with the movement means. It is characterized by being able to swing simultaneously in the vertical direction to separate, open, approach, or grip.
[0014]
That is, the gripping means first has claws for gripping the upper and lower ends of the substrate, and the claws open toward the end side of the substrate to be gripped, for example, like a U-shape, for example, links that cooperate with the moving means. It is connected to the mechanism, so that it can swing and grab and release both ends of the substrate.
[0015]
The present invention further provides a interposed a biasing means spring between engaging gripping means side and the support of the position holding means link mechanism, the spring biasing means, through the engagement gripping means substrate It is biased in the direction of tight binding .
[0016]
That is, the claw of the gripping means is urged in the direction of binding the substrate downward by the biasing force of the spring provided in the link mechanism and upward by the lower claw.
[0017]
[0018]
The vacuum processing chamber of the vacuum processing apparatus must be equipped with elements necessary for vacuum processing, such as a vacuum processing unit and a heater unit, but it is necessary to reduce the internal volume as much as possible so that the scale of the vacuum means does not increase. . Therefore, the driving means for operating the substrate transfer mechanism on the carriage needs to be configured as compactly as possible so that only the essential members are provided on the carriage entering the vacuum chamber outside the vacuum chamber.
[0019]
Therefore, in the present invention, the output end of the drive means is configured to be connectable to the drive input end of the moving means via an intermediate power transmission means having a seal portion that maintains an airtight state with the inside of the vacuum chamber, and the drive The means is an external drive source that is outside the vacuum chamber of the vacuum processing section and whose output end generates a fixed vertical movement by an air cylinder, and the intermediate power transmission means is connected via a sealing means provided on the vacuum chamber wall. Thus, the vertical movement transmission shaft mechanism extends from the inside of the vacuum chamber to the outside of the vacuum chamber, and an end portion extending outside the vacuum chamber is configured to be connectable to a driving output end of the driving means .
[0020]
If the drive source described above is rotational power, the seal mechanism and engagement mechanism will be complicated, but with this vertical drive source, power can be transmitted with a simple mechanism if the link mechanism of the moving means is devised. It is. That is, the sealing means only needs to keep the confidentiality by, for example, sliding while rubbing an O-ring provided in the wall surface through-hole through the wall surface and pressing up and down the rod.
[0021]
[0022]
[0023]
The present invention also provides a transport carriage for delivering a substrate at a substrate delivery stage outside the vacuum processing chamber and a substrate delivery position inside the vacuum processing chamber for processing under reduced pressure, and both sides of the longitudinal direction of the base of the transport carriage. In a large substrate transport apparatus having a pair of support columns to be erected and provided with a substrate holding mechanism for standing and holding the substrate at an inclination stable angle on the support columns,
Incorporating a substrate delivery mechanism that performs substrate delivery to the substrate receiving target and substrate reception from the substrate receiving target in the substrate holding mechanism ,
The substrate transfer mechanism, is supported in the vertical position of the respective strut, and a pair of engaging gripping means formed so as to grip the upper and lower end portions of the substrate while being erected at the tilt stabilization angle, the A pair of link mechanisms supported by a support and configured to swing at least one of the engagement gripping means in a direction approaching and separating from the upper and lower ends of the substrate to hold and release the substrate by the engagement gripping means; A shaft-like drive transmission member that extends along the longitudinal direction of the base of the carriage, and that rotates around an axis to transmit a driving force to each link mechanism connected to both ends thereof; and the shaft-like And a moving means for applying a rotational force around the shaft via a fitting protrusion fixed to the drive transmission member, and an elastic force in a direction to bind the board to the at least one engagement gripping means. Is composed of a spring biasing means for stabilizing the grip,
The moving means comprises a pendulum cam mounted on the base and having one end fitted to the fitting projection, and a vertical drive shaft located on the other end of the pendulum cam. The shaft-shaped drive transmission member is configured to rotate around the axis by a pendulum movement in the vertical direction, and the lower end side of the vertical drive shaft is suspended below the base of the carriage as a drive input end to separate it from the carriage the driving input of the moving means and the output terminal of the driving means for generating a quantitative vertical movement, which is disposed in the vacuum processing unit outside of the vacuum processing chamber, and coupleable configured at the transfer position of the substrate receiving object and It is characterized by.
[0024]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described by way of example with reference to the drawings. However, the shape, dimensions, material, relative arrangement, and the like of the product according to the present embodiment are merely illustrative examples and are not intended to limit the scope of the present invention to that unless otherwise specified.
[0025]
(Embodiment 1) FIG. 1 is a schematic view of an example of a transport carriage provided with a substrate holding mechanism of the present invention. The transport carriage can be moved back and forth on a rail (not shown) by an advancing / retracting mechanism (not shown), and can reciprocate between the substrate delivery position in the vacuum processing chamber and the substrate delivery stage outside the vacuum processing chamber as described above.
[0026]
The transport cart includes a pair of transport cart arms 12 on a transport cart base 11, and the arms stand up slightly inclined from the vertical, for example, 7 ° to 12 ° so as to hold the substrate at a stable angle. Further, a substrate support claw drive shaft 18 supported by a bearing 16 is rotatably disposed between the arms 12 as a power transmission member. Cams 19 are coaxially fixed to both ends of the substrate support claw drive shaft 18 and swing with the rotation of the shaft.
[0027]
The swing of the cam 19 is transmitted to the upper support claw drive link 15A, and then converted into a seesaw-like motion centering on the upper support point of the transport carriage arm 12 of the upper support claw drive link 15B. The U-shaped upper substrate support claws 14 attached to the lower portion are opened or closed upward or downward. Similarly, the swing of the cam 19 is simultaneously transmitted to the lower support claw drive link 15C, and then converted into a seesaw-like motion around the upper fulcrum of the transport carriage arm 12 of the lower support claw drive link 15D. A U-shaped lower substrate support claw 13 attached to the top end of the upper portion is opened or closed upward or downward.
[0028]
Since the support claw drive links 15A and 15C are attached to the same cam 19, the lower and upper claws are opened when they are opened simultaneously, and are closed when they are closed. The substrate is opened and delivered, and is configured to grip and receive the substrate when the support claw is closed.
[0029]
The substrate support claw drive shaft 18 is rotated by the moving means of the present invention. That is, the worm wheel 17 fixed coaxially to the shaft meshes with the worm gear 10, and the shaft of the worm gear 10 serves as a drive input end and hangs downward from the carriage, and a quantitative rotational driving force is obtained from the outside here. Done.
[0030]
(Embodiment 2) FIG. 2 is a schematic view of a second example of a transport carriage provided with a substrate holding mechanism of the present invention. In the first embodiment, the upper substrate support claw is movable and the upper and lower support claws are opened and closed simultaneously. However, in this embodiment, the U-shaped upper support claw 20 is fixed in the downward opening direction and is located near the upper end of the transport carriage arm. Attached. Others were the same as in Example 1. That is, in this embodiment, the holding mechanism is configured so that the substrate can be transferred only by opening and closing the lower claw. This simplified the structure and improved reliability.
[0031]
(Embodiment 3) FIG. 3 is a schematic view of a third example of a transport carriage provided with a substrate holding mechanism of the present invention. Instead of the moving means for moving the link mechanism of the second embodiment, the moving means of this embodiment is configured as follows.
[0032]
That is, a pendulum cam 33 is pivotally supported on a pendulum shaft of a pendulum bearing 35 provided on the transport carriage base 11, and a U-shaped cut portion is provided at one end of the pendulum cam. A projection 32 of a fitting projection 31 fixed to the substrate support claw drive shaft 18 supported by the bearings 36 and 16 is slidably fitted into the cut portion, and a vertical drive shaft 37 is provided at the other end of the pendulum cam. The substrate support claw drive shaft 18 is rotated by applying a vertical movement from the outside to the bottom of the carriage with the vertical drive shaft 37 as a drive input end.
[0033]
(Embodiment 4) FIG. 4 is a schematic view of a fourth example of a transport carriage provided with a substrate holding mechanism of the present invention. This is an example in which a spring biasing means 41 is added as a position holding means to the link mechanism of the third embodiment.
[0034]
That is, one end of the spring 41 is fixed to the lower substrate support claw 13 side from the pivot point of the lower substrate support claw drive link 15D of the link mechanism to the arm 12, and the other end is fixed to an appropriate position of the arm 12, thereby lower substrate. The support claw 13 is pulled to the upper limit position. When the substrate is held, the lower substrate support claw drive link 15C is pulled downward by the swing of the cam 19, so that the lower substrate support claw drive link 15D rotates and moves counterclockwise around the shaft fulcrum. The support claw 13 moves downward and the gripping mechanism is opened. Therefore, if the spring is extended and an appropriate biasing force according to the displacement of the spring is applied to the board while the board is received and held, the board will be stable even if the carriage vibrates due to the movement of the carriage. And is held.
[0035]
(Embodiment 5) FIG. 5 shows a moving means for moving the link mechanism in which the moving means of the present invention is provided outside the vacuum chamber separately from the transport carriage, and the power applied to the drive input end of the moving means is rotational force. As an example, including a worm gear wheel.
[0036]
In FIG. 5, 50 is a member to be mounted on the substrate transport apparatus side. A member 51 is attached to the lower surface of the vacuum chamber.
[0037]
The rotation shaft of the worm gear rotation motor 56A extends upward, and is provided with a rotary encoder 57 that detects the amount of rotation of the rotation shaft in order to give a fixed amount of rotation, and the power is not directly connected to the vacuum chamber. A magnetic fluid seal 55 capable of transmitting is connected to a worm gear rotating shaft 53 in a room covered with bellows 54. The worm gear rotating shaft 53 is divided indoors, so that the upper end on the motor side becomes the drive output end, and the lower end on the gear side becomes the drive input end, so that the split shaft ends can be fitted and detached by the fitting / removing mechanism described below. It has become.
[0038]
The worm gear rotating shaft 53 is fitted and removed by a worm gear rotating shaft drive input end fitting / removing motor 56B and a ball screw 59 that rotates by a rotary encoder 57, and the worm gear rotating motor unit integrated with the ball screw is integrated. It slides on the LM guide and moves up and down quantitatively.
[0039]
(Embodiment 6) FIG. 6 shows a moving means for moving the link mechanism in which the moving means of the present invention is provided outside the vacuum chamber separately from the transport carriage, and the power applied to the drive input end of the moving means is vertical power. As an example, a pendulum cam and a fitting protrusion are included.
[0040]
In FIG. 6, the air cylinder 62 and a part of the vertical drive shaft 37 are mounted on the lower surface of the vacuum chamber, and the substrate support claw drive shaft 18, the fitting protrusion 31, the protrusion 32, the pendulum cam 33, the pendulum shaft 34, and the pendulum bearing. 35, a bearing 36, and a part of the vertical drive shaft 37 are mounted on the carriage base 11 of the transfer carriage in the vacuum chamber. Note that the rack 61 is a part of an advance / retreat mechanism of the transport carriage, and is driven by being screwed with a pinion (not shown) so that it can advance / retreat into and out of the vacuum chamber.
[0041]
Cylinder rod of the air cylinder 62 extends upward a vertical drive shaft 37, may grant the quantitative vertical movement. The vertical movement shaft extends through the wall into the room, and the wall and the shaft are sealed with, for example, an O-ring so that the vertical movement shaft can slide up and down in an airtight manner. In this case, the drive output end and the drive input end are integrated, and the vertical drive force of the cylinder 62 can transmit the quantitative vertical movement by the uppermost end of the drive shaft 37 coming into contact with one end of the pendulum cam. It has become.
[0042]
【The invention's effect】
As described above, according to the present invention, a transfer carriage for transferring a substrate at a substrate transfer stage outside a vacuum processing chamber and a substrate transfer position in a vacuum processing chamber for processing under reduced pressure, and a transfer carriage on the transfer carriage. In a large substrate transfer device equipped with a substrate holding mechanism for holding the substrate in the above, it is easy to maintain the vacuum in the vacuum chamber, the size of the vacuum chamber can be made as compact as possible, and the substrate delivery operation is highly reliable The technology of a large-sized substrate transfer apparatus in which a substrate transfer mechanism with a small driving source is incorporated in the substrate holding mechanism has been established.
[Brief description of the drawings]
FIG. 1 is a schematic diagram of an example of a transport cart having a substrate holding mechanism. FIG. 2 is a schematic diagram of a second example of a transport cart having a substrate holding mechanism. Schematic diagram of the third example [FIG. 4] Schematic diagram of the fourth example of the transport carriage provided with the substrate holding mechanism [FIG. 5] Schematic diagram of an example of the driving means of the moving means [FIG. 6] The driving means of the moving means FIG. 7 is a schematic diagram of a trayless oblique substrate transfer device. FIG. 8 is a schematic diagram of a substrate transfer carriage according to the prior application technique. FIG. 9 is a schematic diagram of engagement gripping means according to the prior application technique. Outline of vacuum processing chamber [Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Worm gear 11 Conveying cart base 12 Conveying cart arm 13 Lower substrate supporting claw 14 Upper substrate supporting claw 15A, B Upper substrate supporting claw driving link 15C, D Lower substrate supporting claw driving link 16 Bearing 17 Warm wheel 18 Substrate supporting claw driving shaft 19 Swing cam 20 Upper substrate support fixing claw 31 Fitting projection 32 Projection 33 Pendulum cam 34 Pendulum shaft 35 Pendulum bearing 36 Bearing 37 Vertical drive shaft 41 Spring (biasing means)
50 Substrate carrying carriage mounting member 51 Vacuum chamber lower surface mounting member 53 Worm gear rotating shaft 54 Bellows 55 Magnetic fluid seal 56A Worm gear rotating motor 56B Worm gear rotating shaft fitting / removing motor 57 Encoder 58 LM guide 59 Ball screw 61 Rack 62 Air cylinder 101 Trayless Oblique substrate transfer device 106A, B, C, D Substrate transfer carriage 108A Rail 110 Vacuum processing chamber 161 Car body 162 Arm 163 Support cam 163a Recess 164 Rotating shaft 165 Intermittent rotation drive mechanism 166 Holding member 167 Swing shaft 168 Stopper 171 Vacuum Processing unit 172 Heater unit 173 Heater cover 173a Support protrusion G Substrate h Drop

Claims

A transport carriage for delivering a substrate at a substrate delivery stage outside the vacuum processing chamber and a substrate delivery position in the vacuum processing chamber for processing under reduced pressure, and a substrate holding mechanism for holding the substrate on the transport carriage. In the prepared large substrate transfer device,
At least a pair of engaging gripping means tilting engage the upper and lower end portions of the substrate which is erected in a stable angle gripped, is supported by pillars erected by conveyance carriage, than at least one of the substrate at both ends of the engaging gripping means A link mechanism that moves in the direction of separating and opening or moving up and down to approach and grip both ends of the board, and a driving force applied to the link mechanism by extending around the carriage and approximately parallel to the longitudinal direction. A shaft-like drive transmission member for transmitting the shaft, a moving means for rotating the shaft-like drive transmission member around an axis to move the link mechanism in the vertical direction, and holding the engagement gripping means at the board engagement position. Incorporating a substrate delivery mechanism consisting of a position holding means to be incorporated into the substrate holding mechanism,
The drive input end of the moving means is suspended below the carriage, separated from the transport carriage, and the output end of the drive means disposed outside the vacuum processing section of the vacuum processing chamber and the drive input end of the moving means are the delivery Configured to be connectable in position ,
Further, the moving means is constituted by a worm wheel and a worm gear, a worm wheel fixed coaxially to the shaft-like drive transmission member meshes with the worm gear, and the shaft of the worm gear serves as a drive input end. A large-sized substrate transfer device that is suspended downward from a carriage .

A interposed a biasing means spring between engaging gripping means side and the support of the position holding means link mechanism, the spring biasing means, in the direction of tight binding of the substrate through the engaging gripping means 2. The large substrate transfer apparatus according to claim 1, wherein the large substrate transfer device is biased .

A transport carriage for delivering a substrate at a substrate delivery stage outside the vacuum processing chamber and a substrate delivery position in the vacuum processing chamber for processing under reduced pressure, and a pair of standing upright sides on the base longitudinal direction of the transport carriage In a large-sized substrate transfer apparatus having a support and provided with a substrate holding mechanism that holds the substrate upright at a stable tilt angle on the support.
Incorporating a substrate delivery mechanism that performs substrate delivery to the substrate receiving target and substrate reception from the substrate receiving target in the substrate holding mechanism ,
A pair of engagement gripping means formed so as to grip both the upper and lower ends of the substrate in a state where the substrate transfer mechanism is supported at the vertical position of each of the columns and erected at the tilt stable angle; A pair of link mechanisms supported by a support and configured to swing at least one of the engagement gripping means in a direction approaching and separating from the upper and lower ends of the substrate to hold and release the substrate by the engagement gripping means; A shaft-like drive transmission member that extends along the longitudinal direction of the base of the carriage, and that rotates around an axis to transmit a driving force to each link mechanism connected to both ends thereof; and the shaft-like And a moving means for applying a rotational force around the shaft via a fitting protrusion fixed to the drive transmission member, and an elastic force in a direction to bind the board to the at least one engagement gripping means. Is composed of a spring biasing means for stabilizing the grip,
The moving means comprises a pendulum cam mounted on the base and having one end fitted to the fitting projection, and a vertical drive shaft located on the other end of the pendulum cam. The shaft-shaped drive transmission member is configured to rotate around the axis by a pendulum movement in the vertical direction, and the lower end side of the vertical drive shaft is suspended below the base of the carriage as a drive input end to separate it from the carriage the driving input of the moving means and the output terminal of the driving means for generating a quantitative vertical movement, which is disposed in the vacuum processing unit outside of the vacuum processing chamber, and coupleable configured at the transfer position of the substrate receiving object and A large-sized substrate transfer device.

An output end of the drive means is connectable to a drive input end of the moving means via an intermediate power transmission means having a seal portion that maintains an airtight holding state with the inside of the vacuum chamber. The external power source is an external drive source that generates a fixed amount of vertical movement by an air cylinder, and the intermediate power transmission means is provided from the inside of the vacuum chamber via a sealing means provided on the vacuum chamber wall. a vertical movement transmission shaft mechanism consisting by extending the vacuum outside, claims wherein the end portions extend into the vacuum outside is characterized by being configured to be connectable to a drive output of said drive means 3. The large substrate transfer apparatus according to 3 .