JP3762556B2 - Semiconductor integrated circuit device and manufacturing method thereof - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a semiconductor integrated circuit device, and more particularly to a semiconductor integrated circuit device in which a junction field effect transistor (hereinafter referred to as J-FET) is formed in a BIP-IC.
[0002]
[Prior art]
J-FETs have high input impedance compared to BIP type elements and high electrostatic breakdown resistance compared to MOS type FET elements, and are therefore used for condenser microphone applications and the like. In addition, it has characteristics such as low low frequency noise and good high frequency characteristics for small signal amplification. In addition to the discrete type, a J-FET integrated in a BIP-IC has been developed.
[0003]
For example, Japanese Patent Laid-Open No. 58-197885 is an example, which is shown in FIG. First, an N type epitaxial layer 2 is stacked on a P type semiconductor substrate 1, and an N + type buried layer 3 is formed therebetween. A P + type isolation region 4 is formed so as to penetrate the semiconductor substrate 1 from the surface of the epitaxial layer 2 so as to surround the buried layer 3, thereby forming an island region 5.
[0004]
Further, an N + type top gate region 6 is formed on the surface of the island region 5, and a P type channel region 7 is formed below the top gate region 6. A P-type source region 8 and a P-type drain region 9 are formed at both ends of the channel region, and a high-concentration gate contact region 10 is formed outside.
[0005]
Further, the source electrode, the drain electrode, and the gate electrode are connected via the insulating film, so that a P-channel J-FET is configured.
[0006]
Since a PN junction is formed in the gate region, this is reverse-biased and the drain current is controlled by the size of the depletion layer.
[0007]
[Problems to be solved by the invention]
However, the P-channel J-FET has a problem in that the S / N ratio is poor due to the problem of carrier (hole) mobility. Therefore, it has been desired to integrate N-channel J-FETs having a good SN ratio even in an integrated circuit device.
[0008]
[Means for Solving the Problems]
The present invention has been made in view of the above-mentioned problems. First, the problem is solved by forming an N-channel type J-FET in a well region of one conductivity type formed in an island region and serving as a bottom gate region. is there.
[0009]
Further, by forming the well region, an N-channel J-FET can be formed and can be formed in the BIP-IC.
[0010]
Furthermore, by providing a one conductivity type buried layer between the well region and the reverse conductivity type buried layer provided in the lower layer of the well region, a depletion layer forming portion generated by a reverse bias is reduced. In addition, it can be lowered between the reverse conductivity type buried layer and the one conductivity type buried layer from between the well region and the island region, thereby making it difficult for punch-through of the depletion layer to occur.
[0011]
Further, a simplified manufacturing process is established by forming a gate lead-out region of the J-FET by base diffusion of an NPN transistor and forming a source / drain region by emitter diffusion.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below.
[0013]
First step: A P-type semiconductor substrate 20 is prepared as shown in FIG. The surface is thermally oxidized to form an oxide film, and an opening is formed in the oxide film by a photoetching technique. Antimony (Sb) is diffused on the surface of the semiconductor substrate 20 exposed in the opening to form N + type buried layers 21 and 22. Subsequently, an oxide film is formed again, an opening is formed in the oxide film again by a photoetching method, and boron (B) is ion-implanted into the surface of the substrate 20 to form a P + type buried layer 23 and an isolation region 24. To do.
[0014]
Second Step: See FIG. 1 (B) Subsequently, after removing the oxide film mask for ion implantation, an N-type epitaxial layer 25 is formed by vapor phase growth. The film thickness is 5 to 12 μm and the specific resistance ρ is 5 to 20 Ω · cm.
[0015]
After forming the epitaxial layer, a Si oxide film is formed on the surface of the epitaxial layer 25, and an opening is formed in the Si oxide film by a photoetching technique. Boron (B, BF2) is ion-implanted through this opening to form a P-type well region 26. Then, the lower isolation region 24 is diffused above the epitaxial layer 25 by applying heat treatment to the whole at 1100 ° C. for about 1 to 3 hours.
[0016]
Third Step: See FIG. 2A. Subsequently, a resist mask for ion implantation is formed on the Si oxide film grown on the surface of the epitaxial layer 25 by this heat treatment, and a portion corresponding to the upper isolation region 27 is opened. P-type impurities, here boron, are ion-implanted through the part. Then, after the resist mask is removed, until the upper and lower isolation regions 24 and 27 are bonded and until the P-type buried layer 23 and the P-type well region 26 are bonded, the temperature is also 1100 ° C. for 1 to 3 hours. Degree of thermal diffusion. By the isolation regions 24 and 27, the epitaxial layer 25 is junction-separated into the 1st area | region which should form junction type FET (J-FET), and the 2nd area | region which should form an NPN transistor.
[0017]
Fourth step: After removing the SiO 2 film grown on the surface of the epitaxial layer 25 by the heat treatment described above with reference to FIG. 2B, an SiO 2 film of about 500 mm is added again. A mask for ion implantation is formed on the SiO 2 film with a photoresist film, and portions corresponding to the base region 28 and the gate contact region 29 of the NPN transistor are opened, and boron, which is a base impurity, is ion implanted therein. After removing the resist mask, base diffusion is performed by heat treatment at 1100 ° C. for 1 to 2 hours. The base region 28 and the gate contact region 29 are diffusion regions shallower than the P-type well region 26, and the gate contact region 29 is disposed so as to cover the upper part of the PN junction between the P-type well region 26 and the N-type epitaxial layer 25. ing. That is, the gate contact region 29 surrounds the peripheral portion of the well region 26 in an annular shape. Then, the ion implantation mask is reattached, and portions corresponding to the emitter region 30, source region 31, drain region 32, and contact region 35 to be formed are opened, and N-type impurity arsenic or phosphorus is ionized therein. inject.
[0018]
Fifth step: see FIG. 3 (A) Further, a resist mask for ion implantation is reattached, a portion corresponding to the channel region 33 to be formed is opened, and N-type impurity arsenic or phosphorus is ion-implanted therein. Subsequently, boron or BF2 which is a P-type impurity which is an impurity of the top gate region 34 is ion-implanted using the same mask.
[0019]
Thereafter, the mask for ion implantation is removed, and emitter diffusion is performed at 1000 ° C. for 30 to 1 hour to thermally diffuse the emitter region 30, the source region 31, and the drain region 32, and the channel region 33 and the top gate region 34 are thermally diffused. To do. Note that ion implantation and heat treatment of the channel region 33 and the top gate region 34 may be performed after the emitter diffusion.
[0020]
Step 6: See FIG. 3B. Finally, a contact hole is opened in the SiO2 film on the surface of the epitaxial layer, and a drain electrode, a source electrode, a gate electrode, a VCC application electrode, an emitter electrode, a base electrode, and a collector electrode are formed. To do.
[0021]
In the semiconductor integrated circuit manufactured by these steps, an NPN transistor and a J-FET element are formed in the first and second regions separated by the separation regions 24 and 27, respectively. The J-FET element is an element configured with the well region 26 as a bottom gate, the gate contact region 29 reaches the well region 26 and gives a gate potential to the bottom gate and the top gate, and the source / drain regions 31 and 32 are A depth penetrating the channel region 33 is formed.
[0022]
FIG. 4 shows a plan view of the J-FET element. The gate contact region 33 has an annular shape, overlaps with peripheral portions of the top gate region 34, the channel region 33, and the well region 26, and has a higher impurity concentration than the well region 26, the channel region 33, and the top gate region 34. Designed. Thereby, it is avoided that the PN junction in each region is exposed to the surface of the epitaxial layer 25. A source region 31 and a drain region 32 are formed in a band shape in a portion surrounded by the annular gate contact region 29. Then, in accordance with a voltage applied through the gate contact region 29, a depletion layer formed at the PN junction between the well region 26 and the channel region 33 and a PN junction between the top gate region 34 and the channel region 33 are formed. Thus, the channel current flowing between the source region 31 and the drain region 32 is controlled. The epitaxial layer 25 around the well region 26 is applied with a voltage (for example, power supply voltage Vcc) higher than the voltage applied to the gate electrode by the N + type contact region 35 or short-circuited with the gate contact region 29. Apply the same potential as the gate, apply the ground potential (GND), or enter a floating state where no potential is applied. The circuit design is such that the gate potential is lower than the source potential. For example, when a large amplitude signal having an amplitude of about 1 V or more is applied as the gate signal, a VCC potential is applied to prevent the operation of the parasitic PNP transistor composed of the well region 26, the epitaxial layer 25, and the isolation regions 24 and 27. Is good. On the other hand, when a weak amplitude signal having an amplitude of about 0.01 to 0.5 V is applied as the gate signal, a PN junction is provided by applying a reverse bias with a large potential difference between the epitaxial layer 25 and the well region 26. There is a possibility that the weak signal cannot be recognized due to the dark current. In this case, it is preferable to use a technique such as bringing the epitaxial layer 25 into a floating state in which no potential is applied.
[0023]
The first feature of the present invention is in the well region 26. By forming the P-type well region 26, an N-type channel region 33 can be formed in this region, and an N-channel J-FET can be formed in the BIP-IC. Therefore, an N-channel J-FET having a high S / N ratio, which has been produced only as a discrete type in the past, can be integrated on a single chip, and the ease of assembly of a set using the N-channel J-FET is improved, and the cost merit is increased.
[0024]
The second feature is in the P + type buried layer 23. For example, the epitaxial layer 25 is VCC biased by the contact region 35 and a reverse bias is applied to the bottom / top gate by applying a potential lower than VCC. The depletion layer by the reverse bias is formed by the epitaxial layer 25 and the well region 26. Spread between. If the P + type buried layer 23 is omitted, the remaining film thickness of the well region 26 is small, so that the depletion layer reaches the channel region 33 and is easily punched through. In the present invention, by providing the P + buried layer 23, a depletion layer is generated at the PN junction between the P + buried layer 23 and the N + type buried layer 22, which is far from the channel region 33 and punch through. Therefore, the withstand voltage characteristic between the channel region 33 and the bottom gate (well region) 26 can be improved.
[0025]
In addition, by forming the gate contact region 29 simultaneously with the formation of the base region 28 of the NPN transistor, it is possible to measure the sharing of the manufacturing process. Then, by overlapping the gate contact region 29 on the end of the PN junction formed by the well region 26, the channel region 33, and the top gate region 34, these are formed on the surface of the epitaxial layer 25 (interface with the Si oxide film). The PN junction is not exposed, and leakage current due to the interface with the Si oxide film can be prevented.
[0026]
Further, by forming the source / drain regions 31 and 32 simultaneously with the formation of the emitter region 30, the manufacturing process can be further simplified.
[0027]
【The invention's effect】
According to the present invention, an N-channel J-FET having an excellent S / N ratio is formed in a BIP-IC by forming an N-channel J-FET in a well region of one conductivity type serving as a bottom gate. Has the advantage of being built in.
[0028]
Furthermore, by providing a buried layer of one conductivity type in the lower layer of the well region, the portion where the depletion layer is formed due to the reverse bias can be moved away from the channel region 33, and punch-through of the depletion layer occurs. It is difficult to improve the withstand voltage characteristics between the channel and the bottom gate.
[0029]
Further, by forming the gate contact region 29 and the source / drain regions 31 and 32 by forming each region of the NPN transistor, there is an advantage that the manufacturing process can be simplified.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view for explaining the present invention.
FIG. 2 is a cross-sectional view for explaining the present invention.
FIG. 3 is a cross-sectional view for explaining the present invention.
FIG. 4 is a plan view for explaining the present invention.
FIG. 5 is a cross-sectional view illustrating a conventional semiconductor integrated circuit device.

Claims (2)

A P-type semiconductor substrate; an N-type epitaxial layer formed on the P-type semiconductor substrate; an island surrounded by a P-type isolation region reaching the semiconductor substrate from the surface of the epitaxial layer; Inside the island, an N-type buried layer provided between the semiconductor substrate and the epitaxial layer, a P-type buried layer provided on the N-type buried layer, and the P A P-type well region provided on the surface of the semiconductor substrate, and a P-type gate contact region disposed in a ring shape at the boundary between the well region and the N-type island, the N-type source and drain regions of which are provided inside the region surrounded by the gate contact region, across the source and drain regions, and the N-type channel region which overlaps an end portion on the gate contact region, Formed on the surface of the serial channel region, a P-type top gate region of which overlaps the end portion in the gate contact region over the source and drain regions, and the opening of the insulating film of the epitaxial layer surface, through the opening A semiconductor integrated circuit device having a source electrode, a drain electrode, and a gate electrode formed in the above manner. Forming an N-type buried layer on the surface of a P-type semiconductor substrate;
Forming a P-type buried layer on the N-type buried layer;
Forming an N-type epitaxial layer on the P-type semiconductor substrate;
Forming a P-type well region in the epitaxial layer;
Forming an annular P-type gate contact region on the surface of the well region so as to overlap the gate contact region on the boundary between the well region and the epitaxial layer;
Forming an N-type source / drain region in a region surrounded by the gate contact region on the surface of the well region;
Forming an N-type channel region on the surface of the well region such that an end of the previous N-type channel region overlaps the gate contact region;
Forming a P-type top gate region on the surface of the channel region so that an end of the P-type top gate region overlaps the gate contact region. A method of manufacturing a circuit device.

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