JP3758784B2 - 交流カロリメトリによる熱拡散率測定方法及び装置 - Google Patents
交流カロリメトリによる熱拡散率測定方法及び装置 Download PDFInfo
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- JP3758784B2 JP3758784B2 JP02293597A JP2293597A JP3758784B2 JP 3758784 B2 JP3758784 B2 JP 3758784B2 JP 02293597 A JP02293597 A JP 02293597A JP 2293597 A JP2293597 A JP 2293597A JP 3758784 B2 JP3758784 B2 JP 3758784B2
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- thin film
- thermal diffusivity
- film sample
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- 238000000034 method Methods 0.000 title claims description 6
- 239000010409 thin film Substances 0.000 claims description 92
- 239000010408 film Substances 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 238000000691 measurement method Methods 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 46
- 239000004973 liquid crystal related substance Substances 0.000 description 11
- 238000010586 diagram Methods 0.000 description 7
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 7
- 239000010931 gold Substances 0.000 description 7
- 229910052737 gold Inorganic materials 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
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- 229910001220 stainless steel Inorganic materials 0.000 description 4
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- 238000009529 body temperature measurement Methods 0.000 description 3
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- 239000004065 semiconductor Substances 0.000 description 3
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- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
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- 238000004544 sputter deposition Methods 0.000 description 1
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Images
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- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP02293597A JP3758784B2 (ja) | 1997-02-05 | 1997-02-05 | 交流カロリメトリによる熱拡散率測定方法及び装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP02293597A JP3758784B2 (ja) | 1997-02-05 | 1997-02-05 | 交流カロリメトリによる熱拡散率測定方法及び装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH10221279A JPH10221279A (ja) | 1998-08-21 |
| JPH10221279A5 JPH10221279A5 (https=) | 2004-12-24 |
| JP3758784B2 true JP3758784B2 (ja) | 2006-03-22 |
Family
ID=12096497
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP02293597A Expired - Fee Related JP3758784B2 (ja) | 1997-02-05 | 1997-02-05 | 交流カロリメトリによる熱拡散率測定方法及び装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3758784B2 (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3858660B2 (ja) * | 2001-10-10 | 2006-12-20 | 株式会社日立製作所 | 樹脂の熱抵抗測定方法 |
| WO2003044509A1 (fr) * | 2001-11-19 | 2003-05-30 | The Circle For The Promotion Of Science And Engineering | Methode et systeme d'analyse thermique |
| JP4513582B2 (ja) * | 2005-01-26 | 2010-07-28 | 横浜ゴム株式会社 | 被加熱体の内部温度予測方法およびプログラム |
| CN104020188A (zh) * | 2014-06-18 | 2014-09-03 | 上海电机学院 | 一种不良导体导热系数测量装置及其测量方法 |
| CN109557129B (zh) * | 2018-10-29 | 2021-05-11 | 同济大学 | 一种薄膜热扩散系数的测量方法 |
| CN112415046B (zh) * | 2020-10-30 | 2021-11-09 | 同济大学 | 基于介质探测器的薄膜纵向热扩散系数测量系统和方法 |
| CN113702422A (zh) * | 2021-08-26 | 2021-11-26 | 西安交通大学 | 一种双段铂丝法流体热导率测量装置及方法 |
-
1997
- 1997-02-05 JP JP02293597A patent/JP3758784B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10221279A (ja) | 1998-08-21 |
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