JP3753215B2 - 走査型プローブ顕微鏡 - Google Patents

走査型プローブ顕微鏡 Download PDF

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Publication number
JP3753215B2
JP3753215B2 JP25688098A JP25688098A JP3753215B2 JP 3753215 B2 JP3753215 B2 JP 3753215B2 JP 25688098 A JP25688098 A JP 25688098A JP 25688098 A JP25688098 A JP 25688098A JP 3753215 B2 JP3753215 B2 JP 3753215B2
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JP
Japan
Prior art keywords
cantilever
deflection
probe
cantilevers
scanning
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Expired - Fee Related
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JP25688098A
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English (en)
Japanese (ja)
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JP2000088735A5 (enExample
JP2000088735A (ja
Inventor
竜也 宮谷
邦雄 中島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
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Seiko Instruments Inc
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Publication date
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Priority to JP25688098A priority Critical patent/JP3753215B2/ja
Publication of JP2000088735A publication Critical patent/JP2000088735A/ja
Publication of JP2000088735A5 publication Critical patent/JP2000088735A5/ja
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Publication of JP3753215B2 publication Critical patent/JP3753215B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP25688098A 1998-09-10 1998-09-10 走査型プローブ顕微鏡 Expired - Fee Related JP3753215B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25688098A JP3753215B2 (ja) 1998-09-10 1998-09-10 走査型プローブ顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25688098A JP3753215B2 (ja) 1998-09-10 1998-09-10 走査型プローブ顕微鏡

Publications (3)

Publication Number Publication Date
JP2000088735A JP2000088735A (ja) 2000-03-31
JP2000088735A5 JP2000088735A5 (enExample) 2005-03-17
JP3753215B2 true JP3753215B2 (ja) 2006-03-08

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ID=17298703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25688098A Expired - Fee Related JP3753215B2 (ja) 1998-09-10 1998-09-10 走査型プローブ顕微鏡

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JP (1) JP3753215B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3995819B2 (ja) * 1999-01-18 2007-10-24 エスアイアイ・ナノテクノロジー株式会社 走査型プローブ顕微鏡
JP2006112788A (ja) * 2004-10-12 2006-04-27 Canon Inc 表面形状計測装置、表面計測方法、及び露光装置
JP2007218803A (ja) * 2006-02-17 2007-08-30 Research Institute Of Biomolecule Metrology Co Ltd 走査型プローブ顕微鏡システム及び観察方法
JP2007333432A (ja) * 2006-06-12 2007-12-27 Research Institute Of Biomolecule Metrology Co Ltd 走査型プローブ顕微鏡及び検査方法
JP2008089510A (ja) * 2006-10-04 2008-04-17 Research Institute Of Biomolecule Metrology Co Ltd 走査型プローブ顕微鏡、走査型プローブ顕微鏡用のプローブ、及び検査方法
KR101039328B1 (ko) 2008-06-30 2011-06-08 한양대학교 산학협력단 유체의 유변학적 특성 측정을 위한 자가 진동형 계측시스템 및 계측방법
FR3098918B1 (fr) * 2019-07-16 2022-01-21 Paris Sciences Lettres Quartier Latin Microscope a force atomique

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JP2000088735A (ja) 2000-03-31

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