JP3740424B2 - 干渉計を用いた形状測定方法および装置 - Google Patents

干渉計を用いた形状測定方法および装置 Download PDF

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Publication number
JP3740424B2
JP3740424B2 JP2002060212A JP2002060212A JP3740424B2 JP 3740424 B2 JP3740424 B2 JP 3740424B2 JP 2002060212 A JP2002060212 A JP 2002060212A JP 2002060212 A JP2002060212 A JP 2002060212A JP 3740424 B2 JP3740424 B2 JP 3740424B2
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Japan
Prior art keywords
lens
light
measured
pinhole
optical
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Expired - Fee Related
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JP2002060212A
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English (en)
Japanese (ja)
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JP2003254730A (ja
JP2003254730A5 (enExample
Inventor
勝 大塚
仁 飯島
誠一 神谷
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Canon Inc
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Canon Inc
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Priority to JP2002060212A priority Critical patent/JP3740424B2/ja
Priority to US10/374,142 priority patent/US6972850B2/en
Priority to DE10309586A priority patent/DE10309586B4/de
Publication of JP2003254730A publication Critical patent/JP2003254730A/ja
Publication of JP2003254730A5 publication Critical patent/JP2003254730A5/ja
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Publication of JP3740424B2 publication Critical patent/JP3740424B2/ja
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  • Length Measuring Devices By Optical Means (AREA)
JP2002060212A 2002-03-06 2002-03-06 干渉計を用いた形状測定方法および装置 Expired - Fee Related JP3740424B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2002060212A JP3740424B2 (ja) 2002-03-06 2002-03-06 干渉計を用いた形状測定方法および装置
US10/374,142 US6972850B2 (en) 2002-03-06 2003-02-27 Method and apparatus for measuring the shape of an optical surface using an interferometer
DE10309586A DE10309586B4 (de) 2002-03-06 2003-03-05 Form-Messverfahren und -vorrichtung unter Verwendung eines Interferometers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002060212A JP3740424B2 (ja) 2002-03-06 2002-03-06 干渉計を用いた形状測定方法および装置

Publications (3)

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JP2003254730A JP2003254730A (ja) 2003-09-10
JP2003254730A5 JP2003254730A5 (enExample) 2005-04-07
JP3740424B2 true JP3740424B2 (ja) 2006-02-01

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JP2002060212A Expired - Fee Related JP3740424B2 (ja) 2002-03-06 2002-03-06 干渉計を用いた形状測定方法および装置

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Publication number Publication date
JP2003254730A (ja) 2003-09-10

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