JP3723998B2 - Manufacturing method of thick film Cu circuit board - Google Patents

Manufacturing method of thick film Cu circuit board Download PDF

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JP3723998B2
JP3723998B2 JP30381994A JP30381994A JP3723998B2 JP 3723998 B2 JP3723998 B2 JP 3723998B2 JP 30381994 A JP30381994 A JP 30381994A JP 30381994 A JP30381994 A JP 30381994A JP 3723998 B2 JP3723998 B2 JP 3723998B2
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Prior art keywords
boric acid
circuit board
thick film
manufacturing
film
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JP30381994A
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JPH08162738A (en
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哲也 池田
広次 谷
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Description

【0001】
【産業上の利用分野】
本発明は、電子機器などに用いられる厚膜Cu回路基板の製造方法に関する。
【0002】
【従来の技術】
電子機器などに用いられる厚膜回路基板の導体としては、従来のAg/Pdに代わって、Cuが主として用いられるようになってきた。これは、CuはAg/Pdと比較してコストが安く、また、導体としたときの配線抵抗が低く、耐マイグレーション性に優れるためである。
【0003】
そして、このようなCuを導体とした厚膜回路基板は、アルミナなどのセラミック基板上にCu粉末、ガラスフリットおよび有機ビヒクルからなるCuペーストをスクリーン印刷法などで塗布し乾燥させた後、N2 雰囲気中で焼成することにより得られている。
【0004】
【発明が解決しようとする課題】
ところで、高温においてCuはO2 によって容易に酸化される。このため、従来の厚膜Cu回路基板の製造において、Cuペーストを塗布、乾燥させた後、N2 中で焼成するとき、焼成雰囲気中にppmオーダーで微量に存在するO2 によりCuが酸化されやすかった。
【0005】
したがって、得られたCu導体膜のはんだ濡れ性が悪くなり、その後の部品搭載工程においてはんだ付け不良が発生し、はんだ付け手直し率の増加や製品歩留まり率を減少させるという問題点を有していた。
【0006】
そこで、本発明の目的は、はんだ付け性に優れたCu導体膜を有する厚膜Cu回路基板の製造方法を提供することにある。
【0007】
【課題を解決するための手段】
上記目的を達成するため、本発明の厚膜Cu回路部品の製造方法は、セラミック基板にCuペーストを塗布し、乾燥させて塗膜を形成した後、該塗膜上に溶媒中に硼酸を溶解してなる硼酸溶液を塗布し、その後N2 雰囲気中で焼成することを特徴とする。
【0008】
そして、硼酸溶液中の硼酸濃度は、0.1〜0.3モル/リットルであることが好ましい。
【0009】
【作用】
Cuペースト乾燥膜に硼酸溶液を塗布することにより、Cuペースト乾燥膜表面が硼酸によって薄く均一に覆われる。この硼酸によって、焼成過程におけるCuの酸化が防止される。
【0010】
【実施例】
以下、本発明の厚膜Cu回路部品の製造方法について、その実施例を説明する。
まず、Cuペーストを準備した。即ち、粒径1〜3μmのCu粉末が75wt%、硼珪酸鉛系ガラスフリットが7wt%、エチルセルロース樹脂をテレピネオールに溶解した有機ビヒクルが18wt%となるようにそれぞれを混合した後、3本ロールで分散させてCuペーストを調整した。さらに、イソプロピルアルコールに硼酸を溶解させて、0.05モル/リットルから0.4モル/リットルまで5種類の濃度の硼酸溶液を作製した。
【0011】
次に、セラミック基板としてのアルミナ基板に先に準備したCuペーストをスクリーン印刷し、150℃で10分間乾燥させて塗膜からなる回路パターンを形成した。その後、この乾燥塗膜に同じく先に準備した硼酸溶液を刷毛塗りして乾燥させた。その後、この塗膜をN2 雰囲気の連続焼成炉で600℃、10分で焼成してCu導体膜を形成し、表1に示す5種類の硼酸濃度条件下で厚膜Cu回路基板を作製した。
【0012】
なお比較例として、Cuペーストの塗膜に硼酸溶液を塗布せず、その他は上記実施例と同様の方法で厚膜Cu回路基板を作製した。
【0013】
以上得られた厚膜回路基板のCu導体膜について、はんだ付け性および下地セラミック基板への接着強度の評価を行なった。
【0014】
この場合、はんだ付け性は、はんだ濡れ拡がり率で確認した。即ち、図1に示すように、アルミナ基板1に形成されたCu導体膜2の上に直径2.5mmのはんだボール(はんだ組成:Ag/Sn/Pb=2/60/38重量比)を乗せ、このアルミナ基板1を120℃で60秒間予熱した後、235±5℃のホットプレート上に30秒間放置した。その後、図1に示すはんだボール3の拡がりLaおよびLbを測定し、以下の式によりはんだ濡れ拡がり率(S)を求めた。
【0015】
S(%)={(La+Lb)/(2.5×2)−1}×100
また、接着強度は、Cu導体膜の2mm角の部分を235±5℃に保持した溶融Sn・Pb共晶はんだ中に浸漬してはんだをコートした後、線径0.8mmφの錫めっき軟銅線をはんだ付けした。そして、引張り試験機により、この軟銅線をCu導体膜と垂直方向に20mm/分の速度で引張り、その破壊強度を求めた。なお、この接着強度については回路基板作製直後の初期と、150℃の恒温槽に48時間保持する熱エージングを行なった後との2条件で測定した。以上の、評価結果を表1に示す。
【0016】
【表1】

Figure 0003723998
【0017】
表1に示す通り、本発明の方法により、はんだ濡れ拡がり率の大きい、即ちはんだ付け性の優れたCu導体膜を有する厚膜Cu回路基板を得ることができる。ただし、硼酸濃度が0.1モル/リットル未満の場合は、試料番号1に示すように、比較例と比較してはんだ濡れ拡がり率の向上がみられず、また、硼酸濃度が0.3モル/リットルを超える場合は、試料番号5に示すように、熱エージング後の接着強度がやや低下する傾向を示す。したがって、硼酸溶液中の硼酸濃度としては0.1〜0.3モル/リットルの範囲が最も好ましい。
【0018】
なお、上記はんだ濡れ拡がり率の測定においては、はんだボールの組成がAg/Sn/Pb=2/60/38重量比の場合について説明したが、その他Sn−Pb共晶はんだ、Sn−Ag系はんだ、Sn−Pb系の高温はんだにおいても、同様の結果が得られている。
【0019】
また、上記実施例においては、Cu導体膜を形成するセラミック基板として、アルミナ基板を用いているが、本発明はこれのみに限定されるものではない。即ち、セラミック基板としては、アルミナなどの絶縁体セラミック基板、非還元性誘電体セラミック基板、BaO−Al2 3 −SiO2 などの多層セラミック用基板等、種々のセラミック基板を用いることができる。
【0020】
また、硼酸溶液の溶媒としては、イソプロピルアルコール以外に、硼酸を溶解するアルコール系、ケトン系、炭化水素系もしくは芳香族系の有機溶剤または水を適宜用いることができる。そして、作業性の面より、沸点が比較的低温で揮発性に富んだものが好ましい。
【0021】
さらに、乾燥塗膜への硼酸溶液の塗付方法としては、刷毛塗り以外に、スプレー法、浸漬法などを採用することができる。
【0022】
【発明の効果】
以上の説明で明らかなように、本発明の厚膜Cu回路基板の製造方法によれば、Cuペースト乾燥膜に硼酸溶液を塗布することによって、Cuペースト乾燥膜表面が硼酸によって薄く均一に覆われる。そして、この硼酸によって、焼成過程におけるCuの酸化が防止される。
【0023】
したがって、はんだ付け性に優れたCu導体膜を有する厚膜Cu回路基板を製造することができる。
【図面の簡単な説明】
【図1】はんだ濡れ拡がり率の測定方法を示す斜視図である。[0001]
[Industrial application fields]
The present invention relates to a method for manufacturing a thick film Cu circuit board used in electronic equipment and the like.
[0002]
[Prior art]
Cu has been mainly used as a conductor for thick film circuit boards used in electronic devices and the like, instead of conventional Ag / Pd. This is because Cu is cheaper than Ag / Pd, has low wiring resistance when used as a conductor, and is excellent in migration resistance.
[0003]
Then, such a thick film circuit board with conductor of Cu is, Cu powder ceramic substrate such as alumina, after a Cu paste comprising glass frit and an organic vehicle was applied by screen printing drying, N 2 It is obtained by firing in an atmosphere.
[0004]
[Problems to be solved by the invention]
By the way, Cu is easily oxidized by O 2 at a high temperature. For this reason, in the manufacture of conventional thick film Cu circuit boards, when Cu paste is applied and dried and then fired in N 2 , Cu is oxidized by O 2 present in a trace amount in the order of ppm in the firing atmosphere. It was easy.
[0005]
Therefore, solder wettability of the obtained Cu conductor film is deteriorated, and soldering failure occurs in the subsequent component mounting process, and there is a problem that the soldering rework rate increases and the product yield rate decreases. .
[0006]
Accordingly, an object of the present invention is to provide a method of manufacturing a thick film Cu circuit board having a Cu conductor film excellent in solderability.
[0007]
[Means for Solving the Problems]
In order to achieve the above object, according to the method of manufacturing a thick film Cu circuit component of the present invention, a Cu paste is applied to a ceramic substrate and dried to form a coating film, and then boric acid is dissolved in the solvent on the coating film. A boric acid solution is applied, and then fired in an N 2 atmosphere.
[0008]
The boric acid concentration in the boric acid solution is preferably 0.1 to 0.3 mol / liter.
[0009]
[Action]
By applying a boric acid solution to the Cu paste dry film, the surface of the Cu paste dry film is thinly and uniformly covered with boric acid. This boric acid prevents the oxidation of Cu during the firing process.
[0010]
【Example】
Examples of the method for manufacturing a thick film Cu circuit component according to the present invention will be described below.
First, a Cu paste was prepared. That is, after mixing them so that Cu powder having a particle diameter of 1 to 3 μm is 75 wt%, lead borosilicate glass frit is 7 wt%, and an organic vehicle in which ethyl cellulose resin is dissolved in terpineol is 18 wt%, Cu paste was prepared by dispersing. Further, boric acid was dissolved in isopropyl alcohol to prepare boric acid solutions having five concentrations from 0.05 mol / liter to 0.4 mol / liter.
[0011]
Next, the Cu paste prepared previously was screen-printed on an alumina substrate as a ceramic substrate and dried at 150 ° C. for 10 minutes to form a circuit pattern made of a coating film. Thereafter, the previously prepared boric acid solution was brushed on the dried coating film and dried. Thereafter, this coating film was baked at 600 ° C. for 10 minutes in a continuous baking furnace in an N 2 atmosphere to form a Cu conductor film, and a thick film Cu circuit board was produced under the five types of boric acid concentration conditions shown in Table 1. .
[0012]
As a comparative example, a boric acid solution was not applied to the coating film of the Cu paste, and a thick film Cu circuit board was produced in the same manner as in the above example.
[0013]
The Cu conductor film of the thick film circuit board obtained as described above was evaluated for solderability and adhesion strength to the underlying ceramic substrate.
[0014]
In this case, the solderability was confirmed by the solder wetting spread rate. That is, as shown in FIG. 1, a 2.5 mm diameter solder ball (solder composition: Ag / Sn / Pb = 2/60/38 weight ratio) is placed on the Cu conductor film 2 formed on the alumina substrate 1. The alumina substrate 1 was preheated at 120 ° C. for 60 seconds and then left on a 235 ± 5 ° C. hot plate for 30 seconds. Thereafter, the spread La and Lb of the solder balls 3 shown in FIG. 1 were measured, and the solder wet spread rate (S) was determined by the following equation.
[0015]
S (%) = {(La + Lb) / (2.5 × 2) −1} × 100
Also, the adhesive strength was determined by immersing the 2 mm square part of the Cu conductor film in molten Sn / Pb eutectic solder held at 235 ± 5 ° C. Soldered. Then, the annealed copper wire was pulled at a rate of 20 mm / min in the direction perpendicular to the Cu conductor film by a tensile tester, and the breaking strength was obtained. The adhesive strength was measured under two conditions: the initial stage immediately after the circuit board was produced and the thermal aging that was held in a thermostatic bath at 150 ° C. for 48 hours. The above evaluation results are shown in Table 1.
[0016]
[Table 1]
Figure 0003723998
[0017]
As shown in Table 1, according to the method of the present invention, a thick film Cu circuit substrate having a Cu conductor film having a high solder wetting spread rate, that is, excellent solderability can be obtained. However, when the boric acid concentration is less than 0.1 mol / liter, as shown in Sample No. 1, the improvement of the solder wetting spread rate is not observed as compared with the comparative example, and the boric acid concentration is 0.3 mol. When exceeding / liter, as shown in Sample No. 5, the adhesive strength after thermal aging tends to be slightly reduced. Therefore, the boric acid concentration in the boric acid solution is most preferably in the range of 0.1 to 0.3 mol / liter.
[0018]
In the measurement of the solder wetting spread rate, the case where the composition of the solder balls is Ag / Sn / Pb = 2/60/38 weight ratio has been described. However, other Sn—Pb eutectic solders and Sn—Ag solder Similar results were obtained with Sn-Pb high-temperature solder.
[0019]
Moreover, in the said Example, although the alumina substrate is used as a ceramic substrate which forms Cu conductor film, this invention is not limited only to this. That is, as the ceramic substrate, various ceramic substrates such as an insulating ceramic substrate such as alumina, a non-reducing dielectric ceramic substrate, and a multilayer ceramic substrate such as BaO—Al 2 O 3 —SiO 2 can be used.
[0020]
As a solvent for the boric acid solution, in addition to isopropyl alcohol, an alcohol-based, ketone-based, hydrocarbon-based or aromatic-based organic solvent that dissolves boric acid or water can be used as appropriate. From the viewpoint of workability, those having a relatively low boiling point and high volatility are preferred.
[0021]
Furthermore, as a method for applying the boric acid solution to the dried coating film, a spray method, a dipping method, or the like can be employed in addition to brush coating.
[0022]
【The invention's effect】
As apparent from the above description, according to the method for manufacturing a thick film Cu circuit board of the present invention, the surface of the Cu paste dry film is thinly and uniformly covered with boric acid by applying a boric acid solution to the Cu paste dry film. . The boric acid prevents Cu oxidation during the firing process.
[0023]
Therefore, a thick film Cu circuit board having a Cu conductor film excellent in solderability can be manufactured.
[Brief description of the drawings]
FIG. 1 is a perspective view showing a method for measuring a solder wetting spread rate.

Claims (2)

セラミック基板にCuペーストを塗布し、乾燥させて塗膜を形成した後、該塗膜上に溶媒中に硼酸を溶解してなる硼酸溶液を塗布し、その後N2 雰囲気中で焼成することを特徴とする厚膜Cu回路基板の製造方法。A Cu paste is applied to a ceramic substrate and dried to form a coating film, and then a boric acid solution obtained by dissolving boric acid in a solvent is applied onto the coating film, followed by firing in an N 2 atmosphere. A method for manufacturing a thick film Cu circuit board. 硼酸溶液中の硼酸濃度は、0.1〜0.3モル/リットルであることを特徴とする請求項1記載の厚膜Cu回路基板の製造方法。  2. The method of manufacturing a thick film Cu circuit board according to claim 1, wherein the boric acid concentration in the boric acid solution is 0.1 to 0.3 mol / liter.
JP30381994A 1994-12-07 1994-12-07 Manufacturing method of thick film Cu circuit board Expired - Fee Related JP3723998B2 (en)

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JP3723998B2 true JP3723998B2 (en) 2005-12-07

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KR100369118B1 (en) * 2000-05-13 2003-01-24 한국과학기술연구원 High density ceramic thick film fabrication method by screen printing

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