JP3634858B2 - Molten salt electrolysis equipment - Google Patents

Description

  The present invention relates to a molten salt electrolysis apparatus having excellent sealing properties.

For example, fluorine gas is an essential gas indispensable in the semiconductor manufacturing field. In some cases, nitrogen trifluoride gas synthesized on the basis of fluorine gas (hereinafter referred to as NF ₃ gas) is rapidly in demand as a semiconductor cleaning gas or dry etching gas. It is growing. Further, neon fluoride gas (hereinafter referred to as NeF gas), krypton fluoride gas (hereinafter referred to as KrF gas) and the like are excimer laser oscillation gases used for patterning of semiconductor integrated circuits. A mixed gas of rare gas and fluorine gas is frequently used.

The fluorine gas and NF ₃ gas used for semiconductor manufacture are required to be high purity gas with few impurities. In addition, in manufacturing sites for semiconductors and the like, a necessary amount of gas is taken out from a gas cylinder filled with fluorine gas and used. For this reason, management such as the storage location of the gas cylinder, ensuring the safety of the gas and maintaining the purity is very important. Furthermore, the demand for NF ₃ gas has been increasing rapidly recently, and the supply capacity has become tight. Also, as a part of measures against global warming and ozone holes, it cannot be used like many other fluorides. There is also. As an alternative to these fluorides, it is becoming an environment where fluorine is used in many applications. Taking these into consideration, it is preferable to use the fluorine gas generator on-site rather than handling fluorine gas packed in a high-pressure cylinder in terms of safety and improving the degree of freedom of gas supply.

Usually, fluorine gas is generated in an electrolytic cell as shown in FIG. As the material of the electrolytic cell body 201, nickel (hereinafter referred to as Ni), monel, carbon steel or the like is usually used. A heating and / or cooling device 214 for maintaining the temperature of the electrolytic bath 202 at a constant temperature capable of electrolysis is disposed on the outer periphery of the electrolytic cell main body 201. The electrolytic bath body 201 is filled with a mixed molten salt of potassium fluoride-hydrogen fluoride (hereinafter referred to as KF-HF) as the electrolytic bath 202. The electrolytic cell main body 201 is separated into an anode chamber 210 and a cathode chamber 211 by a partition wall 209 formed of monel or the like. A voltage is applied between the carbon or Ni anode 203 housed in the anode chamber 210 and the cathode 204 made of Ni or iron housed in the cathode chamber 211, and the electrolytic bath 202 is electrolyzed to generate fluorine gas. (For example, refer to Patent Document 1).
JP-T 9-505853

  However, in a conventional industrial electrolytic cell, a plate-like packing is used as a sealing material for the gas generating part in the electrolytic cell, so that atmospheric gas such as air outside the electrolytic cell can enter the electrolytic cell or enter the electrolytic cell. The generated fluorine or hydrogen gas is prevented from leaking outside the electrolytic cell. However, even if such a plate-like packing is used, it cannot be said that the airtightness of the electrolytic cell can be sufficiently maintained. In addition, it cannot be said that the electrical insulation of the connecting portion between the electrode for electrolysis and the terminal is sufficient.

  Then, this invention makes it the further objective to provide the molten salt electrolyzer excellent in the electrical insulation of an electrolysis apparatus, gas-sealing property, and the safety | security with respect to a heat | fever and generated gas.

  The inventors of the present invention have made extensive studies on the improvement of electrical insulation, gas leakage, and work safety in the heat exchange portion of the electrolytic cell, and have completed the present invention.

That is, the present invention has an electrode, an upper lid provided with an opening to which the electrode can be attached, and a main body, and an electrolytic cell for electrolyzing an electrolytic bath made of a mixed molten salt, and a main body of the electrolytic cell 1st heat exchange means for heating and / or cooling, and between the opening of the upper lid and the electrode mounting portion and / or between the upper part of the main body of the electrolytic cell and the upper lid, respectively. A molten salt electrolysis apparatus comprising an electrical insulating material and a gas seal material, wherein the electrical insulating material is made of a material having corrosion resistance to an electrolytic bath component and provided on an inner peripheral side of the gas seal material.
With this configuration, the above-described electrical insulation effect, airtightness, purity of generated gas, and safety are further improved.

In the present invention, the first heat exchanging means includes a flow path through which any one heat exchange medium of pure water, distilled water, fluorinated oil, silicon oil, Ar gas, and He gas flows in the electrolytic cell. It is preferable that
Thereby, since the heat exchange medium circulates, the electrolytic cell can be efficiently heated or cooled. For example, melting of a salt as a raw material of the electrolytic bath and removal of heat generated during electrolysis can be efficiently performed.

The present invention includes an electrode, an upper lid provided with an opening to which the electrode can be attached, and a main body, and an electrolytic cell for electrolyzing an electrolytic bath made of a mixed molten salt, and heating the main body of the electrolytic cell And / or a first heat exchanging means for cooling, an electrical insulating material and a gas sealant between the opening of the upper lid and the electrode mounting portion and / or between the upper part of the main body of the electrolytic cell and the upper lid. The first heat exchange means is a flow path through which any one heat exchange medium of pure water, distilled water, fluorinated oil, silicon oil, Ar gas, and He gas flows in the electrolytic cell. It is a salt electrolysis device.
With this configuration, the above-described electrical insulation effect, airtightness, purity of generated gas, and safety are further improved.

In the present invention, it is preferable that the electrolytic cell is accommodated in a box having an upper part opened. Moreover, it is preferable that the said box is what has the corrosion resistance with respect to an electrolytic bath component, and heat resistance.
The box is provided for the purpose of shielding the electrolytic cell from the outside of the electrolytic cell. The material of the box is not particularly limited as long as it has corrosion resistance and heat resistance against the generated gas generated by electrolysis and the electrolytic bath components. For example, a metal such as stainless steel or a fluororesin (polytetrafluoro Ethylene) and the like. Further, the box is preferably provided at a place where leakage of the electrolytic bath can be prevented, for example, at the bottom of the electrolytic cell.

  In the present invention, the mixed molten salt preferably contains hydrogen fluoride.

  In the molten salt electrolysis apparatus of the present invention, the gas seal material and the electrical insulation material have also been devised, so that the electrical insulation and gas seal properties are improved, and a high purity gas can be obtained and the leakage of the generated gas is reduced. It becomes possible to use it on-site in the semiconductor manufacturing process.

  Hereinafter, an example of an embodiment of a fluorine gas generator according to the present invention will be described with reference to FIGS. 1 to 5. FIG. 1 is a schematic explanatory diagram of the main part of the fluorine gas generator of this embodiment. FIG. 2 is an external view of the electrolytic cell showing the internal structure of the outer frame. FIG. 3 is a cross-sectional view of the electrolytic cell. 4 is an enlarged cross-sectional view of a portion A in FIG. FIG. 5 is an enlarged cross-sectional view of a portion B in FIG.

  FIG. 1 shows the structure of a fluorine gas generator (molten salt electrolyzer), wherein 1 is an electrolyzer composed of an electrolyzer body 1a and an upper lid 17, and 2 is a KF-HF mixed molten salt. An electrolytic bath, 3 is an anode chamber, 4 is a cathode chamber, 5 is an anode, and 6 is a cathode. Reference numeral 22 denotes a generation port for fluorine gas generated from the anode chamber 3. 11 is a thermometer for measuring the temperature in the electrolytic bath 2, 13 is a heat exchange means of the electrolytic cell 1, and 12 is a hot water heating device for supplying hot water to the heat exchange means 13. 51 is a hot water jacket provided on the side surface of the electrolytic cell 1 constituting the heat exchange means 13, and 52 is a heating member (second heat exchange) provided on the bottom surface of the electrolytic cell 1 constituting the heat exchange means 13. Means).

The electrolytic cell 1 is made of a metal such as Ni, Monel, pure iron, or stainless steel.
The inside of the electrolytic cell 1 is separated into an anode chamber 3 and a cathode chamber 4 located in the center of the electrolytic cell 1 by a partition wall 16 made of Ni or Monel. An anode 5 is disposed in the anode chamber 3, and a cathode 6 is provided in the cathode chamber 4. It is preferable to use a low polarizable carbon electrode for the anode 5. Moreover, it is preferable to use what processed the molded object of Ni into the predetermined | prescribed shape as the cathode 6. FIG.

  A flange portion 1 b connected to the peripheral portion of the upper lid 17 is formed on the outer peripheral portion of the upper portion of the electrolytic cell main body 1 a constituting the electrolytic cell 1. As shown in FIGS. 2 and 3, a concave groove 1c is provided around the surface on the flange portion 1b side where the flange portion 1b and the upper lid 17 are connected.

  As shown in FIGS. 3 and 4, the upper lid 17 is attached and fixed to a screw portion 31 formed on the flange portion 1 b with a bolt 30, and an electrically insulating bushing is interposed between the bolt 30 and the upper lid 17. 32 is interposed. By interposing the electrical insulating bushing 32 in this way, even if the upper lid 17 and the electrolytic cell main body 1a tighten the bolt 30 with a tightening torque of 5 to 30 N · m, the upper lid 17 and the electrolytic cell are not damaged. The main body 1a is electrically insulated. In addition, an electrical insulating material 9 and a gas seal material 10 are interposed between the flange portion 1 b and the peripheral edge portion of the upper lid 17. The gas seal material 10 uses an O-ring made of fluororubber that is resistant to fluorine gas, and is disposed in the groove 1c of the flange portion 1b. A plurality of screw portions 31 are formed at predetermined intervals on the surface of the flange portion 1b on the upper lid 17 side, and the upper lid 17 is fixed to the flange portion 1b with the same number of bolts 30.

  Further, the electrical insulating material 9 is arranged along the surfaces of the flange portion 1b and the peripheral portion of the upper lid 17 on the inner and outer peripheral sides (right and left sides in FIG. 3) of the gas seal material 10 provided on the flange portion 1b. Yes. Polytetrafluoroethylene (PTFE) or the like can be used as a material constituting the electrical insulating material 9.

  By interposing the electrical insulating material 9 and the gas seal material 10 between the upper lid 17 and the electrolytic cell main body 1a, the upper lid 17 can be easily detached from the electrolytic cell main body 1a. Further, since the gas seal material 10 is sandwiched between the electrolytic cell main body 1a and the upper lid 17, gas such as fluorine gas, hydrogen gas, hydrogen fluoride, etc. in the electrolytic cell 1 does not leak, and the outside air enters the electrolytic cell 1. Intrusion can be prevented. In addition, the upper lid 17 and the electrolytic cell main body 1a are electrically insulated by the electrically insulating material 9 so as not to energize.

  As shown in FIG. 1, the upper lid 17 of the electrolytic cell 1 has a fluorine gas generation port 22 generated from the anode chamber 3, a hydrogen gas generation port 23 generated from the cathode chamber 4, and an HF supply line 24 for supplying HF. HF inlet 25 and pressure gauges 7 and 8 for detecting the internal pressures of the anode chamber 3 and the cathode chamber 4, respectively.

  As shown in FIG. 5, an opening 35 for inserting the anode 5 into the electrolytic cell main body 1 a is formed at a substantially central portion of the upper lid 17, and a lid 36 is provided so as to cover the opening 35. It has been. The lid body 36 is provided with a connecting rod 37 for attaching the anode 5 vertically. An attachment portion 38 having an L-shaped cross section is formed at the lower end portion of the connection rod 37, and the attachment portion 38 is connected by a connection bolt 39 inserted into a through hole (not shown) formed in the upper end portion of the anode 5. It is fixed to.

  Between the lid body 36 and the upper lid 17, an electrical insulation material 9 a and an O-ring 10 a made of the same material as the electrical insulation material 9 and the gas seal material 10 are disposed. By interposing the electrical insulating material 9a and the O-ring 10a between the lid body 36 and the upper lid 17 in this way, the fluorine gas or hydrogen fluoride gas in the electrolytic cell 1 does not leak and the outside air is electrolyzed. Intrusion into the tank 1 can be prevented. In addition, the outer surface of the lid body 36 is provided with an insulating coating, and the electrical connection portion (terminal block) is covered with an electrically insulating resin coating to prevent short circuit with the outside. It has become so.

  The gas generation ports 22 and 23 provided in the upper lid 17 are provided with tubes formed of a material having corrosion resistance against fluorine gas such as stainless steel. The HF supply line 24 is covered with a temperature adjusting heater (second heat exchanging means) 24a for preventing HF from being liquefied.

  The heat exchange means 13 shown in FIG. 2 includes a hot water jacket 51 disposed so as to surround the outer periphery of the side surface of the electrolytic cell 1, and a heating member (second heat exchange means) 52 disposed on the bottom surface of the electrolytic cell 1. It consists of The hot water jacket 51 is disposed on the outer periphery of the side surface of the electrolytic cell 1, and is connected to the hot water pipe (first heat exchange means) 53 having a passage 53 a (see FIG. 3) through which the heat medium passes and the hot water pipe 53. Furthermore, a vacuum heat insulating layer 55 formed in an outer frame 54 that is disposed with the hot water pipe 53 sealed is provided on the outer periphery with a space therebetween.

  The hot water pipes 53 are arranged at regular intervals so as to surround the outer periphery of the side surface of the electrolytic cell 1 in the horizontal direction, and the hot water pipes 53 are connected and communicated with each other at a connection portion (not shown). Further, the material of the hot water pipe 53 is preferably a metal pipe made of copper having good thermal conductivity, but is not particularly limited. For example, it can be applied to a metal pipe such as iron, stainless steel, or aluminum. Can do.

  If the shape of the hot water pipe 53 is a square pipe shape as shown in FIG. 2, a large contact area with the side surface of the electrolytic cell 1 can be obtained, so that the thermal energy of the heat medium can be efficiently transmitted to the electrolytic cell 1. However, it is not particularly limited. For example, it is possible to apply a round pipe, a triangular pipe, a half-moon shaped pipe that is cut in half through the central axis of the round pipe, and the like. That is, in the case of a half-moon shaped pipe, when the half-moon shaped pipe is arranged on the side surface of the electrolytic cell 1, the outer circumference of the electrolytic cell 1 is included between the half-moon shaped pipe and the outer side surface of the electrolytic cell 1. A formed passage is obtained. A heat medium, which will be described later, is circulated through the passage, and the same as the hot water pipe 53 can be used.

  Further, the hot water pipe 53 is attached by welding to the side surface of the electrolytic cell 1 at a predetermined interval along the longitudinal direction of the hot water pipe 53, and the welded portions along the longitudinal direction of the hot water pipe 53 are attached to each other. In between, a sealing material having high thermal conductivity is adhered. Thus, by attaching the sealing material, the contact area between the hot water pipe 53 and the side surface of the electrolytic cell 1 can be increased, and the heat transfer efficiency from the hot water pipe 53 can be improved.

  In addition, the above-mentioned half-moon-shaped pipe can also be attached by providing a welded portion on the side surface of the electrolytic cell 1 with a predetermined interval in the longitudinal direction of the half-moon-shaped pipe. And by embedding the sealing material mentioned above between welding parts, while preventing that a heat carrier leaks out from the above-mentioned passage, the heat energy of the heat carrier transmitted to a half-moon shaped pipe of the above-mentioned hot water pipe 53 Thus, it can be transmitted to the electrolytic cell 1 through the sealing material.

  Further, in the passage 53a of the hot water pipe 53, the heat medium heated by the hot water heating device 12 shown in FIG. This heat medium is made of pure water, and hot water 56 obtained by heating pure water with the hot water heating device 12 circulates in the direction of the arrow in FIG.

Since the heat medium is circulated through the passage 53a of the hot water pipe 53 which is such a first heat exchange means, the first heat exchange means can be made clean and sealable.
Further, since pure water is used as a heat medium, the electrocatalyst main body 1a that is cathodized as described later and the heat medium are in an (electrically) insulated state, and the electrolysis cell main body 1a and the heat medium are electrically connected. Generation of a short circuit can be prevented. That is, since it is difficult to conduct electricity if it is pure water that does not contain impurities, it is difficult for electricity to be transmitted from the hot water heating device 12 via the pure water, so that the electric water is electrically connected between the electrolytic cell main body 1a and the pure water that is a heat medium. Leakage is less likely to occur.

  In addition, piping from the hot water heating apparatus 12 connected to the hot water pipe 53 is piped from the hot water heating apparatus 12 by connecting the piping itself to an insulator or a connecting portion to which the pipes are connected via an insulator. It is possible to insulate the electricity transmitted through. In this embodiment, a polytetrafluoroethylene (PTFE) hose is applied to the piping. Further, since the electrical insulation resistance of the pipe increases as the pipe length increases, it is preferable to connect the hot water heating device 12 and the electrolytic cell 1 with a length of 10 cm or more, preferably 30 cm or more.

  The outer frame 54 is provided with a check valve (not shown), and the decompressor shown in FIG. 1 is used to remove air from the vacuum heat insulating layer 55 formed between the outer frame 54 and the hot water pipe 53 from the check valve. By pulling out with 14 or the like, the vacuum heat insulating layer 55 is made a reduced pressure or vacuum heat insulating layer. Therefore, the heat generated by the heat medium flowing through the passage 53a of the hot water pipe 53 is not easily released to the outside, and the electrolytic cell 1 is efficiently heated by the hot water pipe 53 in contact with the electrolytic cell 1. In addition, since the vacuum heat insulating layer 55 is under reduced pressure or vacuum, particles from the heat insulating layer that contribute to defects are not generated in the semiconductor manufacturing process. For this reason, it becomes possible to use it on-site in a semiconductor manufacturing process. Further, since the hot water pipe 53 is surrounded by the outer frame 54, the temperature of the atmosphere around the electrolytic cell 1 is kept clean without being raised, and it is possible to prevent burns and the like of the worker, thereby improving safety. .

  The heating member 52 is configured in a plate shape by laminating a rubber insulating layer 52a disposed on the bottom surface side of the electrolytic cell 1 and a heating layer 52b in which a nichrome wire is disposed on the entire surface. . The heating member 52 energizes the nichrome wire from a power source (not shown) to heat the nichrome wire, and heats the bottom surface of the electrolytic cell 1 with the heat. Therefore, the heat release from the bottom surface of the electrolytic cell 1 can be prevented by the heating member 52. Moreover, since the heating member 52 is configured in a plate shape, the electrolytic cell 1 is stably installed on the bottom surface.

Further, the hot water heating device 12 that supplies the hot water heated by pure water to the hot water jacket 51 described above heats the hot water 56 in the hot water jacket 51, and controls the heating medium heating means (not shown). And a temperature control device. The hot water heating device 12 is connected to a thermometer 11 that measures the temperature of the electrolytic bath 2 in the electrolytic cell 1 and a hot water jacket 51 that heats the electrolytic bath 2 in the electrolytic cell 1. The hot water 56 is supplied to the hot water jacket 51 so as to keep the temperature of the electrolytic cell 1 constant based on the temperature information from 11.
Furthermore, if the hot water heating device 12 has a pressure adjustment function, the hot water heating device 12, the hot water pipe 53, and the pipes connecting them can be connected in a sealed state. When the pressure inside the pipe (hot water pipe) rises from the hot water pipe 53 that is hermetically connected to the hot water heating device 12 by heating the hot water, the pressure is reduced in the hot water heating device 12.
In addition, when the hot water is cooled, the internal pressure decreases. In this case, the hot water heating device 12 supplements the pressure. By having such a function, the hot water does not evaporate and decrease during heating, and the inside of the piping is depressurized during cooling and gas such as air does not enter.
With this configuration, it is not necessary to supplement hot water or the like, so that foreign matter can be prevented from being mixed into the hot water. As a result, corrosion of the hot water pipe 53 and the like can be prevented.

  Thus, since the hot water jacket 51 has a reduced pressure or vacuum heat insulating structure, the thermal conductivity coefficient is significantly reduced as compared with a heat insulating layer made of a heat insulating material such as asbestos or urethane, and the thickness of the heat insulating layer 55 is reduced. Is possible. Therefore, it is possible to reduce the size of the electrolytic device, improve safety, and further reduce the loss of heating energy required for heating. Further, generation of particles due to the heat insulating material is eliminated.

  The electrolytic cell 1 as described above is housed in a box body 60 whose upper part is opened as shown in FIG. The box 60 includes a bottom plate 61 having a rectangular shape slightly larger than the bottom surface of the electrolytic cell 1, and four side wall plates 62 having a rectangular shape slightly larger than the side surface of the electrolytic cell 1. A sealing material is interposed from the inside in the connection portion to which the four side wall plates 62 are connected. Since a sealing material is interposed in the connection portion, it is possible to prevent water and the like from leaking out of the box body 60.

  The material and shape of the box 60 are not particularly limited. The electrolytic cell main body 1a is accommodated, and the hot water 56 leaks from the hot water jacket 51, the connection between the pipe from the hot water heating device 12 and the hot water jacket 51, or the like. In this case, it is only necessary to prevent the hot water 56 from spreading in the place where the electrolytic cell 1 is disposed. Thereby, the heated pure water (hot water 56) which is a heat medium from the hot water pipe 53 etc. can be prevented from leaking outside.

  Next, the operation of the fluorine gas generator that is an example of this embodiment will be described. When voltage is applied to the anode 5 and the cathode 6 in the electrolytic cell 1 and the electrolytic bath 2 is normally electrolyzed, fluorine gas is generated from the anode 5 and hydrogen gas is generated from the cathode 6. Thus, the fluorine gas generated from the anode 5 is supplied to the line from the fluorine gas generating port 22 at the top of the anode chamber 3. The hydrogen gas generated from the cathode 6 is supplied to the line from the hydrogen gas generating port 23 at the top of the cathode chamber 4.

  When the electrolytic bath 2 is reduced by a series of electrolysis, a liquid level detecting means (not shown) is activated, and in conjunction with this, HF is supplied from the HF supply line 24 to the electrolytic bath 2 through the HF supply port 25. In this way, the electrolytic bath 2 is electrolyzed with the anode 5 and the cathode 6, and when HF as an electrolytic raw material is reduced, HF is supplied to the electrolytic bath 2 to always maintain the HF concentration in the electrolytic bath at an optimum state. , You can always get the same electrolysis state.

  Further, in order to efficiently perform electrolysis using the electrolytic bath 2, the electrolytic bath 2 is heated to an optimum temperature via the electrolytic cell 1 by the heat exchange means 13. The electrolysis bath 2 is brought to an optimum temperature by the thermometer 11 that monitors the temperature in the electrolysis bath 2, the hot water heating device 12 that heats pure water supplied to the hot water jacket 51, and the plate-like heating member 52. It is kept.

  Further, since the hot water jacket 51 has a reduced pressure or vacuum heat insulating layer 55 formed by the outer frame 54, the generated heat energy is efficiently transmitted (heated) to the electrolytic bath 2 through the outer peripheral side surface of the electrolytic cell 1. And the temperature rise around the outer periphery of the hot water jacket 51 can be prevented. Therefore, the deterioration of the outer peripheral atmosphere of the heat exchanging means 13 is prevented and energy waste by the heat exchanging means 13 is prevented, the electrolytic bath 2 is kept at an appropriate temperature, and the electrolysis is efficiently performed by the anode 5 and the cathode 6. , Can always produce stable fluorine gas.

  The molten salt electrolysis apparatus according to the present invention has been described mainly with respect to the fluorine gas generation apparatus that generates fluorine gas by electrolysis. However, the molten salt electrolysis apparatus according to the present invention is limited to the fluorine gas generation apparatus described above. However, even other electrolytic devices belong to the technical category of the present invention when the technical idea of the present invention is used. Further, the hot water heating apparatus 12 that supplies the hot water 56 to the hot water jacket 51 is not limited to heating the heat exchange medium (pure water), but can also be applied to those that heat and cool the heat exchange medium. . By applying such a hot water heating device, the temperature of the electrolytic bath 2 in the electrolytic cell 1 can be quickly adjusted.

It is a schematic explanatory drawing of the principal part of the fluorine gas generator of this embodiment example. It is an external view of the electrolytic cell which shows the internal structure of an outer frame. It is sectional drawing of an electrolytic cell. It is an expanded sectional view of the A section in FIG. It is an expanded sectional view of the B section in FIG. It is a schematic diagram of the fluorine gas generator used conventionally.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Electrolysis tank 1a Main body 2 Electrolytic bath 3 Anode chamber 4 Cathode chamber 5 Anode 6 Cathode 9 Electrical insulating material 10 Gas seal material 13 Heat exchange means 17 Upper lid 52 Heating member (2nd heat exchange means)
53 Hot water pipe (first heat exchange means)
53a passage 54 outer frame 55 vacuum heat insulation layer (decompression or vacuum heat insulation layer)
56 Hot water (heat exchange medium)
60 box

Claims (6)

An electrolytic cell for electrolyzing an electrolytic bath comprising a mixed molten salt , an electrode, an upper lid provided with an opening to which the electrode can be freely attached, and a main body ;
First heat exchange means for heating and / or cooling the body of the electrolytic cell;
An electrical insulating material and a gas seal material provided in an annular shape between the opening of the upper lid and the electrode mounting portion and / or between the upper portion of the main body of the electrolytic cell and the upper lid ,
The molten salt electrolysis apparatus , wherein the electrically insulating material is made of a material having corrosion resistance to an electrolytic bath component and provided on the inner peripheral side of the gas seal material . The first heat exchanging means is provided with a flow path through which any one heat exchange medium of pure water, distilled water, fluorinated oil, silicon oil, Ar gas, and He gas flows in the electrolytic cell. The molten salt electrolysis apparatus according to 1. An electrolytic cell for electrolyzing an electrolytic bath comprising a mixed molten salt, an electrode, an upper lid provided with an opening to which the electrode can be freely attached, and a main body;
  First heat exchange means for heating and / or cooling the body of the electrolytic cell;
  An electrical insulating material and a gas seal material are provided between the opening of the upper lid and the electrode mounting portion and / or between the upper body of the electrolytic cell and the upper lid,
  The first heat exchanging means is a molten salt electrolyzer that is a flow path through which any one heat exchange medium of pure water, distilled water, fluorinated oil, silicon oil, Ar gas, and He gas flows in the electrolytic cell. . The electrolytic cell is the molten salt electrolysis apparatus according to any one of claims 1 to 3 top is accommodated in the opened box body. The molten salt electrolysis apparatus according to claim 4, wherein the box body has corrosion resistance and heat resistance to an electrolytic bath component. The molten salt electrolysis apparatus according to any one of claims 1 to 5 , wherein the mixed molten salt contains hydrogen fluoride.

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