JP2011058015A - Electrolytic device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electrolytic device where a heat capacity with which temperature regulation in an electrolytic tank can be sufficiently performed can be secured, and further, electric corrosion caused by a potential difference can be securely prevented. <P>SOLUTION: The electrolytic device is provided with: an electrolytic vessel 11 storing an electrolytic bath 12; a heater 21; and a blower 21b. The heater 21a and the blower 21b are provided at the electrolytic vessel 11 in a state of electrically insulated from the electrolytic vessel 11 storing the electrolytic bath 12. The electrolytic vessel 11 is heated by the heater 21a and is cooled by the blower 21b. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an electrolysis apparatus provided with an electrolytic cell.

Conventionally, fluorine gas has been used in various applications such as material cleaning and surface modification in semiconductor manufacturing processes and the like. In this case, fluorine gas itself may be used. Various gases such as NF ₃ (nitrogen trifluoride) gas, NeF (neon fluoride) gas, and ArF (argon fluoride) gas synthesized based on the fluorine gas may be used. Fluorine-based gas may be used.

  In order to stably supply the fluorine gas, an electrolysis apparatus that normally generates fluorine gas by electrolyzing HF (hydrogen fluoride) is used. In such an electrolytic device, for example, an electrolytic bath made of a mixed molten salt of KF-HF (potassium-hydrogen fluoride) is formed in an electrolytic cell. Fluorine gas is generated by electrolysis of the electrolytic bath in the electrolytic cell. In this case, in order to make the electrolysis conditions of the electrolysis apparatus constant, it is necessary to keep the temperature of the electrolysis bath in the electrolyzer within a certain range.

  For example, in the molten salt electrolysis apparatus described in Patent Document 1, a hot water jacket is provided on the outer peripheral side surface of the electrolytic cell. The hot water jacket has a hot water pipe and a heat insulating layer. The hot water pipe is provided so as to surround the outer peripheral side surface of the electrolytic cell. The heat medium heated by the hot water heating device circulates in the hot water pipe. A thermometer is provided in the electrolytic cell. The hot water heating device keeps the electrolytic bath in the electrolytic bath at a predetermined temperature by heating the heat medium based on the temperature measured by the thermometer.

JP 2004-244724 A

  The electrolytic cell of the electrolysis device needs to be grounded to the ground having a reference potential in preparation for at least the lid portion in preparation for discharge in the electrolytic cell due to electric leakage and static electricity. Further, since the hot water heating apparatus handles high-current power, the hot water heating apparatus needs to be grounded to the ground having a reference potential in order to ensure safety.

  In this case, the lid portion of the electrolytic cell is electrically connected to the electrolytic cell through the electrolytic bath. Here, if the heat medium is conductive, a closed circuit is formed of the lid portion of the electrolytic cell, the electrolytic bath, the electrolytic cell, the conductive heat medium, the hot water heating device, and the ground. When electrolysis is started using an electrolytic cell in which such a closed circuit is formed, a current due to a potential difference in the electrolytic cell flows in the closed circuit, and electric corrosion occurs in a metal portion included in the closed circuit.

  In order to prevent such electric corrosion, Patent Document 1 describes a countermeasure using at least a partially insulated pipe and a highly insulating heat medium. However, there is no heat medium that is an insulating solvent (for example, a fluorine-based solvent) and has a large heat capacity so that the temperature of the electrolytic cell can be adjusted. Therefore, pure water is mentioned as a heat medium having a relatively high electrical resistance and a large heat capacity. However, since pure water has a slight electrical conductivity, it has not been able to completely prevent the electrical corrosion of the metal part as described above.

  An object of the present invention is to provide an electrolytic apparatus capable of ensuring a heat capacity capable of sufficiently adjusting the temperature of an electrolytic cell and reliably preventing electric corrosion caused by a potential difference.

  (1) An electrolysis apparatus according to the present invention includes an electrolytic bath that houses an electrolytic bath, heating means that heats the electrolytic bath with a heat source that is electrically insulated from the electrolytic bath, and a discharge that is electrically insulated from the electrolytic bath. A cooling means for cooling the electrolytic cell by a heat source.

  In the electrolysis apparatus according to the present invention, the heat source of the heating means is electrically insulated from the electrolytic cell, and the heat radiation source of the cooling means is electrically insulated from the electrolytic cell. In this state, the electrolytic cell is heated by the heat source of the heating means and cooled by the heat radiation source of the cooling means.

  In this case, unlike the heat exchange using the heat medium, the electrolytic cell is heated and cooled directly by the heat source and the heat radiation source. Thereby, the temperature of the electrolytic cell can be sufficiently adjusted.

  Further, no electric potential is applied to the electrolytic cell through the heat source and the heat radiation source. Therefore, it is possible to reliably prevent the electrolytic corrosion of the electrolytic apparatus due to the potential difference in the electrolytic cell.

  (2) The heating means may include a heater having a heating element covered with an insulating film as a heat source, and the heater may be provided in contact with the outer surface of the electrolytic cell.

  In this case, the heating element of the heater is provided in contact with the outer surface of the electrolytic cell via an insulating film. Therefore, the electrolytic cell is directly heated by heat conduction from the heater heating element to the electrolytic cell. As a result, the electrolytic cell can be heated with high responsiveness.

  (3) The heating means may include an infrared heating device that emits infrared rays as a heat source, and the infrared heating device may be provided so as to be insulated from the electrolytic cell.

  In this case, infrared rays are radiated to the electrolytic cell from an infrared heating device provided apart from the electrolytic cell. Thereby, the electrolytic cell is directly heated by heat radiation. Also, the infrared heating device is reliably insulated from the electrolytic cell.

  (4) The cooling means may include a blower that blows air to the electrolytic cell as a heat radiation source, and the blower may be provided so as to be insulated from the electrolytic cell.

  In this case, the air is blown into the electrolytic cell by a blower provided apart from the electrolytic cell. Thereby, the electrolytic cell is directly cooled by air circulation. Also, the blower is reliably insulated from the electrolytic cell.

  (5) The cooling means may include a cooling body having a cooling element covered with an insulating film as a heat radiation source, and the cooling body may be provided in contact with the outer surface of the electrolytic cell.

  In this case, the cooling element is provided in contact with the outer surface of the electrolytic cell via an insulating film. Therefore, the electrolytic cell is directly cooled by the heat absorption from the electrolytic cell to the cooling body. Thereby, the electrolytic cell can be cooled with high responsiveness.

  (6) The first chamber is provided in the electrolytic cell, the second chamber is provided between the first chamber and the electrolytic cell, the first electrode is disposed in the first chamber, and the electrolytic cell is the second electrolytic cell. It may function as an electrode.

  In this case, the electrolytic cell electrically insulated from the installation surface, the heat source, and the heat radiation source functions as the second electrode. Therefore, a stable and accurate voltage can be applied between the first electrode and the second electrode.

  (7) The electrolysis apparatus may further include a control unit that controls the heating unit and the cooling unit so that the temperature of the electrolytic bath in the electrolytic cell is maintained within a predetermined target temperature range.

  In this case, heating of the electrolytic cell by the heating unit and cooling of the electrolytic cell by the cooling unit are controlled by the control unit. As a result, the temperature in the electrolytic cell can be stably and reliably maintained within the target temperature range.

  (8) The electrolysis apparatus further includes detection means for detecting the temperature of the electrolytic bath in the electrolytic cell, and the control means is configured to reach a first temperature at which the temperature detected by the detection means is lower than the upper limit value of the target temperature range. When the temperature rises, the operation of the heating unit is stopped and the cooling unit is operated. When the temperature detected by the detection unit is lowered to a second temperature higher than the lower limit value of the target temperature range, the heating unit is operated. The operation of the cooling means may be stopped.

  In this case, when the temperature of the electrolytic cell rises to a first temperature lower than the upper limit value of the target temperature range, the operation of the heating unit stops and the cooling unit operates. Thereby, it can prevent that the temperature of an electrolytic cell exceeds the upper limit of a target temperature range by overshoot.

  Further, when the temperature of the electrolytic cell is lowered to a second temperature higher than the lower limit value of the target temperature range, the heating unit is operated and the cooling unit is stopped. Thereby, it can prevent that the temperature of an electrolytic cell becomes less than the lower limit of a target temperature range by undershoot.

  Further, the heating unit is stopped and the cooling unit is operated. The heating unit is operated and the cooling unit is stopped. Thereby, the amount of overshoot and the amount of undershoot at the temperature of the electrolytic cell can be reduced. As a result, the target temperature range can be reduced, and the temperature of the electrolytic cell can be maintained almost constant.

  (9) The control means may control the heating means and the cooling means so that the difference between the upper limit value and the lower limit value of the target temperature is within 2 degrees.

  In this case, the temperature of the electrolytic bath is kept almost constant. Therefore, the electrolysis conditions are kept almost constant. Thereby, more stable electrolysis can be performed.

  (10) The electrolytic cell may be a fluorine generating electrolytic cell. The vapor pressure of the fluorine compound used as the electrolytic bath varies greatly depending on the temperature. Even in such a case, since the temperature of the electrolytic bath is controlled stably and with high accuracy, the fluorine compound vapor is prevented from being released from the electrolytic bath in the electrolytic bath.

  ADVANTAGE OF THE INVENTION According to this invention, it becomes possible to provide the electrolyzer which controls the temperature of the electrolytic bath in an electrolytic vessel stably and with high precision by low-cost and simple structure.

1 is a schematic cross-sectional view of an electrolysis apparatus according to an embodiment of the present invention. It is a schematic diagram mainly of the outer side of the electrolytic cell of the electrolysis apparatus of FIG. It is a flowchart which shows the control operation | movement of the heater and air blower by a control part. It is a figure which shows the result of the temperature of the electrolytic bath in an Example and a comparative example. It is a schematic diagram mainly on the outer side of the electrolytic cell of the electrolyzer according to another embodiment of the present invention. It is a schematic diagram mainly on the outer side of the electrolytic cell of the electrolytic apparatus according to still another embodiment of the present invention.

  Hereinafter, an electrolysis apparatus according to an embodiment of the present invention will be described with reference to the drawings.

(1) Configuration of Electrolyzer FIG. 1 is a schematic cross-sectional view of an electrolyzer according to an embodiment of the present invention. FIG. 2 is a schematic view mainly of the outside of the electrolytic cell of the electrolysis apparatus of FIG.

  The electrolyzer 10 of FIG. 1 is a gas generator that generates fluorine gas. The electrolysis device 10 includes an electrolytic cell 11. The electrolytic cell 11 includes an electrolytic cell main body 11a, an upper lid 11b, and an insulating member 11c.

  The electrolytic cell main body 11a and the upper lid body 11b are made of a metal or alloy such as Ni (nickel), monel, pure iron or stainless steel.

  The electrolytic cell main body 11a has a bottom surface portion and four side surface portions, and has an opening at the top. The insulating member 11c is provided along the upper end surface of the side surface portion. The insulating member 11c is formed of an insulating material such as resin. An upper lid 11b is disposed on the insulating member 11c so as to close the opening of the electrolytic cell main body 11a. Thereby, the electrolytic cell main body 11a and the upper lid body 11b are electrically insulated from each other by the insulating member 11c.

  In the electrolytic cell 11, high current power is handled. Moreover, it is necessary to prevent discharge in the electrolytic cell 11 due to static electricity. Therefore, the upper lid 11b of the electrolytic cell 11 is grounded to the ground E by the ground wire S1. Thereby, an electric shock or the like due to leakage from the electrolytic cell 11 is prevented.

  The electrolytic cell 11 is supported by a plurality of support members 31 made of an insulating material in a housing 32 made of a conductive material. The support member 31 is formed by, for example, bakelite. A wheel 33 made of an insulating material is attached to the bottom surface of the housing 32. Thus, the electrolytic cell 11 is electrically insulated from the housing 32, and the housing 32 is electrically insulated from the installation surface.

  In the electrolytic cell 11, an electrolytic bath 12 made of a KF-HF (potassium-hydrogen fluoride) mixed molten salt is formed. A cylindrical partition wall 13 is provided integrally with the upper lid body 11b so as to be partially immersed in the electrolytic bath 12. The partition wall 13 is made of, for example, Ni or Monel. In the electrolytic cell 11, an anode chamber 14 a is formed inside the partition wall 13, and a cathode chamber 14 b is formed outside the partition wall 13.

  An anode 15a is disposed so as to be immersed in the electrolytic bath 12 in the anode chamber 14a. As a material of the anode 15a, for example, a low polarizable carbon electrode is preferably used. A cathode 15b is formed on the inner surface of the electrolytic cell main body 11a. Hydrogen gas is mainly generated in the cathode chamber 14b. For example, Ni is preferably used as the material of the cathode 15b.

  An HF supply line 18a for supplying HF is connected to the upper lid 11b. The HF supply line 18a is covered with a temperature adjusting heater 18b. This prevents HF from being liquefied in the HF supply line 18a. The height of the electrolytic bath 12 is detected by a liquid level detector (not shown). When the height of the liquid level detected by the liquid level detection device becomes lower than a predetermined value, HF is supplied into the electrolytic cell 11 through the HF supply line 18a.

  The electrolysis device 10 includes a control unit 23. The controller 23 applies a voltage between the anode 15a and the cathode 15b. Thereby, the electrolytic bath 12 in the electrolytic cell 11 is electrolyzed. Thereby, fluorine gas is mainly generated in the anode chamber 14a.

  Gas discharge ports 16a and 16b are provided in the upper lid 11b. An exhaust pipe 17a is connected to the gas exhaust port 16a, and an exhaust pipe 17b is connected to the gas exhaust port 16b. The gas discharge port 16a communicates with the anode chamber 14a, and the gas discharge port 16b communicates with the cathode chamber 14b. The gas generated in the anode chamber 14a is discharged from the gas discharge port 16a through the exhaust pipe 17a, and the gas generated in the cathode chamber 14b is discharged from the gas discharge port 16b through the exhaust pipe 17b.

  The electrolytic cell 11 includes a heater 21a and a blower 21b. In the present embodiment, a sheathed heater is used as the heater 21a. The sheathed heater has a structure in which a heating wire is covered with an edge coating. The sheathed heater can obtain a heat capacity of an arbitrary size with a heating wire. By providing the heater 21a in contact with the electrolytic cell 11, the electrolytic cell 11 can be heated quickly. The heater 21 a is provided in contact with the electrolytic cell 11, but is electrically insulated from the electrolytic cell 11.

  As shown in FIG. 2, the heater 21a is attached to meander on the outer surface of the side surface portion of the electrolytic cell main body 11a. Thereby, the contact area of the heater 21a and the electrolytic cell main body 11a becomes large. The heater 21a heats the electrolytic cell 11 by heat conduction.

  The blower 21 b is provided so as to be insulated from the electrolytic cell 11 and blows air to the electrolytic cell 11. Thereby, the air blower 21b cools the electrolytic cell 11 by air circulation in a state of being electrically insulated from the electrolytic cell 11.

  The heater 21 a and the blower 21 b are operated by electric power supplied from the power supply device 21. The power supply device 21 is grounded to the ground E by a ground wire S2 in order to ensure safety.

  In this Embodiment, the heater 21a and the electrolytic cell 11 are electrically insulated by the insulating film with which the sheathed heater which is the heater 21a is provided. Moreover, the air blower 21b and the electrolytic cell 11 are electrically insulated by the air which is an insulator. In this case, even if the upper lid body 11b and the power supply device 21 are grounded to the ground E and a closed circuit is formed, current due to the potential difference in the electrolytic cell 11 does not flow to the metal portion of the electrolysis device. Thereby, the electric corrosion of the metal part of an electrolysis apparatus is prevented.

  The electrolysis apparatus 10 is provided with a temperature sensor 22a for detecting the temperature of the heater 21a and a temperature sensor 22b for detecting the temperature of the electrolytic bath 12 in the electrolytic cell main body 11a. In the present embodiment, the temperature sensors 22a and 22b are thermocouples.

  The control unit 23 controls the heater 21a and the blower 21b based on the temperature of the electrolytic cell 11 detected by the temperature sensor 22a and the temperature of the electrolytic bath 12 detected by the temperature sensor 22b.

(2) Temperature Control Operation Next, the temperature control operation of the electrolytic bath 12 in the electrolytic cell 11 by the control unit 23 will be described.

  The electrolytic bath 12 in the electrolytic cell 11 is in a solid state at room temperature and atmospheric pressure. Therefore, in order to electrolyze the electrolytic bath 12, it is necessary to heat the electrolytic bath 12 to 80 to 90 ° C. and dissolve it in a liquid state.

  When current flows through the anode 15a, the cathode 15b, and the electrolytic bath 12 during electrolysis, Joule heat is generated due to the electrical resistance of the anode 15a, the cathode 15b, and the electrolytic bath 12. Further, when the electrolytic bath 12 is dissolved, heat of dissolution is generated. Thereby, the temperature of the electrolytic bath 12 rises excessively. As a result, the vapor pressure of HF in the electrolytic bath 12 increases and HF is released from the electrolytic bath 12. In this case, there is a possibility that the purity of the fluorine gas taken out from the exhaust pipe 17a is lowered and the electrolytic efficiency of HF is lowered. Therefore, it is necessary to maintain the temperature of the electrolytic bath 12 in an appropriate temperature range.

  First, the control unit 23 turns on the heater 21a. Thereby, the temperature of the electrolytic cell 11 rises, and the temperature of the electrolytic bath 12 in the electrolytic cell 11 also rises. Until the electrolytic bath 12 is dissolved, the control unit 23 controls on and off of the heater 21a based on the temperature detected by the temperature sensor 22a. The temperature of the electrolytic cell 11 when the electrolytic bath 12 is dissolved (hereinafter referred to as the electrolytic cell temperature lower limit) is measured in advance.

  When the temperature detected by the temperature sensor 22a is equal to or higher than a preset upper limit value (hereinafter referred to as an electrolytic cell temperature upper limit value), the control unit 23 is heated to prevent an excessive temperature rise in the electrolytic cell 11. The device 21a is turned off.

  When the electrolytic bath 12 is dissolved, the temperature of the electrolytic bath 12 can be detected by the temperature sensor 22b. When electrolysis is started, a larger amount of heat than the amount of heat lost due to natural heat dissipation is input to the electrolytic bath 12 due to generation of Joule heat or the like. Thereby, even in a state where the heater 21a is stopped, the temperature of the electrolytic bath 12 rises.

  When the temperature detected by the temperature sensor 22a is equal to or higher than the electrolytic cell temperature lower limit value, the control unit 23 controls the heater 21a and the blower 21b to be turned on and off based on the temperature detected by the temperature sensor 22b.

  FIG. 3 is a flowchart showing the control operation of the heater 21a and the blower 21b by the controller 23.

  Hereinafter, the upper limit value of the temperature range of the electrolytic bath optimal for electrolysis is referred to as a target upper limit temperature, and the lower limit value of the temperature range of the electrolytic bath optimal for electrolysis is referred to as a target lower limit temperature.

  Further, the temperature at which the heater 21a is turned off and the blower 21b is turned on so that the temperature of the electrolytic bath does not exceed the target upper limit temperature is called a cooling start temperature, and heating is performed so that the temperature of the electrolytic bath does not fall below the target lower limit temperature. The temperature at which the device 21a is turned on and the blower 21b is turned off is called the heating start temperature. The cooling start temperature is set lower than the target upper limit temperature by a certain temperature (for example, 1 degree), and the heating start temperature is set higher than the target lower limit temperature by a certain temperature (for example, 1 degree).

  In the initial state, it is assumed that the heater 21a is on and the blower 21b is off.

  The controller 23 determines whether or not the temperature of the electrolytic bath 12 detected by the temperature sensor 22b has increased to the cooling start temperature (step S1). If the temperature of the electrolytic bath 12 has not risen to the cooling start temperature, the control unit 23 waits until the temperature of the electrolytic bath 12 reaches the cooling start temperature. When the temperature of the electrolytic bath 12 rises to the cooling start temperature, the control unit 23 turns off the heater 21a (step S2) and turns on the blower 21b (step S3).

  Next, the controller 23 determines whether or not the temperature of the electrolytic bath 12 detected by the temperature sensor 22b has decreased to the heating start temperature (step S4). If the temperature of the electrolytic bath 12 has not decreased to the heating start temperature, the control unit 23 waits until the temperature of the electrolytic bath 12 reaches the heating start temperature. When the temperature of the electrolytic bath 12 falls to the heating start temperature, the control unit 23 turns on the heater 21a (step S5), turns off the blower 21b (step S6), and returns to the process of step S1.

  In this way, the temperature of the electrolytic bath 12 is maintained between the target upper limit temperature that is a constant temperature higher than the cooling start temperature and the target lower limit temperature that is a constant temperature lower than the heating start temperature.

(3) Effects of the Embodiment In the electrolysis apparatus 10 according to the present embodiment, the electrolytic cell 11 is supported by the support member 31 so as to be electrically insulated from the housing 32. Further, the heater 21 a and the blower 21 b are electrically insulated from the electrolytic cell 11. In this state, the electrolytic cell 11 is heated by heat conduction from the heater 21a and cooled by air circulation from the blower 21b.

  In this case, no electric potential is applied to the electrolytic cell 11 through the heater 21a and the blower 21b. Therefore, corrosion of the electrolytic cell 11 can be easily prevented by applying a stable anticorrosion voltage to the electrolytic cell 11. Thereby, the maintenance cost of the electrolytic cell 11 can be reduced.

  Moreover, the electrolytic cell 11 is heated by heat conduction, and the electrolytic cell 11 is cooled by air circulation. In this case, an insulating heat medium for heating and cooling the electrolytic cell 11 is not required. Therefore, the electrolytic cell 11 can be heated and cooled with a low cost and simple configuration.

  Furthermore, unlike the heat exchange using the heat medium, the electrolytic cell 11 is directly heated and cooled by heat conduction from the heater 21a and air flow from the blower 21b. Thereby, it becomes possible to control the temperature of the electrolytic bath 12 in the electrolytic cell 11 stably and with high accuracy.

(4) Examples In the following examples and comparative examples, temperature control of the electrolytic bath 12 was performed using the electrolysis apparatus 10 shown in FIGS. 1 and 2 based on the above embodiment. The electrolysis apparatus used in the comparative example has the same structure as the electrolysis apparatus 10 of FIGS. 1 and 2 except that the blower 21b is not attached.

  In the examples and comparative examples, the heating start temperature and the cooling start temperature of the electrolytic bath 12 were set to 85 ° C. and 86 ° C., respectively.

  In the embodiment, when the temperature of the electrolytic bath 12 detected by the temperature sensor 22b rises to 86 ° C., the heater 21a is turned off and the blower 21b is turned on, and the electrolytic bath 12 is forcibly cooled by blowing. . When the temperature of the electrolytic bath 12 detected by the temperature sensor 22b is lowered to 85 ° C., the heater 21a is turned on and the blower 21b is turned off to heat the electrolytic bath 12.

  On the other hand, in the comparative example, when the temperature of the electrolytic bath 12 detected by the temperature sensor 22b rises to 86 ° C., the heater 21a is turned off and the electrolytic bath 12 is naturally cooled. When the temperature of the electrolytic bath 12 detected by the temperature sensor 22b is lowered to 85 ° C., the heater 21a is turned on and the electrolytic bath 12 is heated.

  FIGS. 4A and 4B are diagrams showing the results of the temperature of the electrolytic bath 12 in the examples and comparative examples, respectively. In FIG. 4, the horizontal axis indicates time, and the vertical axis indicates the temperature of the electrolytic bath 12.

  As shown in FIG. 4A, in the example, the temperature variation of the electrolytic bath 12 was controlled within a range of 2 degrees for a period of 889 minutes. On the other hand, in the comparative example, the fluctuation of the temperature of the electrolytic bath 12 became 4 degrees or more during the period of 865 minutes.

  From the results of the examples and the comparative examples, it became clear that the fluctuation of the temperature of the electrolytic bath 12 can be maintained almost constant by using the blower 21b in addition to the heater 21a.

(5) Other Embodiments FIG. 5 is a schematic view mainly outside the electrolytic cell of an electrolysis apparatus according to another embodiment of the present invention.

  The electrolysis apparatus 10 of FIG. 5 differs from the electrolysis apparatus 10 of FIGS. 1 and 2 in that a plurality of infrared heating apparatuses 21c are arranged around the electrolysis tank 11 instead of the heater 21a.

  The plurality of infrared heating devices 21 c are provided so as to be separated from the electrolytic cell 11 and radiate infrared rays to the electrolytic cell 11. Thereby, the plurality of infrared heating devices 21 c heat the electrolytic cell 11 by thermal radiation while being electrically insulated from the electrolytic cell 11.

  FIG. 6 is a schematic view mainly outside the electrolytic cell of an electrolysis apparatus according to still another embodiment of the present invention.

  The electrolyzer 10 of FIG. 6 differs from the electrolyzer 10 of FIGS. 1 and 2 in that a plurality of cooling bodies 21d are in contact with the outer surface of the side surface portion of the electrolytic cell main body 11a in place of the blower 21b, and are dispersed. It is a point attached to. The cooling body 21d has a structure in which a Peltier element is insulated by a ceramic material and an insulating coating. Accordingly, the plurality of cooling bodies 21 d cool the electrolytic cell 11 by performing an endothermic operation while being electrically insulated from the electrolytic cell 11.

  A plurality of infrared heating devices 21c may be provided instead of the heater 21a shown in FIGS. 1 and 2, and a plurality of cooling bodies 21d may be provided instead of the blower 21b.

(6) Correspondence between each component of claim and each part of embodiment The following describes an example of a correspondence between each component of the claim and each part of the embodiment. It is not limited.

  The heater 21a and the infrared heating device 21c are examples of heat sources and heating means, the blower 21b and the cooling body 21d are examples of heat radiation sources and cooling means, and the heating wire of the sheathed heater is an example of a heating element. 21a is an example of a heater, a Peltier element is an example of a cooling element, an anode chamber 14a is an example of a first chamber, a cathode chamber 14b is an example of a second chamber, and an anode 15a is an example of a first electrode. The cathode 15b is an example of the second electrode, the controller 23 is an example of the control means, and the temperature sensor 22b is an example of the detection means.

  As each constituent element in the claims, various other elements having configurations or functions described in the claims can be used.

  The present invention can be effectively used for an electrolysis device such as a gas generator.

DESCRIPTION OF SYMBOLS 10 Electrolyzer 11 Electrolyzer 11a Electrolyzer main body 11b Upper cover 11c Insulating member 12 Electrolytic bath 13 Partition 14a Anode chamber 14b Cathode chamber 15a Anode 15b Cathode 16a, 16b Gas exhaust port 17a, 17b Exhaust pipe 18a HF supply line 18b Temperature adjustment Heater 21 Power supply device 21a Heater 21b Blower 21c Infrared heating device 21d Cooling body 22a, 22b Temperature sensor 23 Control unit 31 Support member 32 Housing 33 Wheel E Ground S1, S2 Ground wire

Claims (10)

An electrolytic cell containing an electrolytic bath;
Heating means for heating the electrolytic cell with a heat source electrically insulated from the electrolytic cell;
An electrolysis apparatus comprising: cooling means for cooling the electrolyzer with a heat radiation source electrically insulated from the electrolyzer. The heating means includes a heater having a heating element covered with an insulating film as the heat source,
The electrolyzer according to claim 1, wherein the heater is provided in contact with an outer surface of the electrolytic cell. The heating means includes an infrared heating device that emits infrared rays as the heat source,
The electrolysis apparatus according to claim 1 or 2, wherein the infrared heating device is provided so as to be insulated from the electrolyzer. The cooling means includes a blower that blows air to the electrolytic cell as the heat radiation source,
The electrolyzer according to claim 1, wherein the blower is provided so as to be insulated from the electrolytic cell. The cooling means includes a cooling body having a cooling element covered with an insulating film as the heat radiation source,
The electrolysis apparatus according to claim 1, wherein the cooling body is provided in contact with an outer surface of the electrolytic cell. A first chamber is provided in the electrolytic cell, and a second chamber is provided between the first chamber and the electrolytic cell,
The electrolysis apparatus according to claim 1, wherein the first electrode is disposed in the first chamber, and the electrolytic cell functions as a second electrode. 7. The apparatus according to claim 1, further comprising control means for controlling the heating means and the cooling means so that the temperature of the electrolytic bath in the electrolytic cell is maintained within a predetermined target temperature range. The electrolysis apparatus in any one. It further comprises detection means for detecting the temperature of the electrolytic bath in the electrolytic cell,
The control means stops the operation of the heating means and operates the cooling means when the temperature detected by the detection means rises to a first temperature lower than the upper limit value of the target temperature range, The operation of the cooling unit and the operation of the cooling unit are stopped when the temperature detected by the detection unit decreases to a second temperature higher than a lower limit value of the target temperature range. The electrolyzer described. The electrolyzer according to claim 8, wherein the control unit controls the heating unit and the cooling unit so that a difference between an upper limit value and a lower limit value of the target temperature is within 2 degrees. The electrolyzer according to claim 1, wherein the electrolyzer is an electrolyzer for generating fluorine.

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