JP3569817B2 - Bonding equipment - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a bonding apparatus having a feature in a structure for mounting a pulse heat tool to an electrode, and was developed mainly for mounting a metal pulse heat tool which is easily affected by thermal expansion.
[0002]
[Prior art]
As one of bonding apparatuses for bonding a chip to a substrate or the like by thermocompression bonding, a method in which a large current is passed through a pulse heat tool and the pulse heat tool is heated to perform bonding.
[0003]
2. Description of the Related Art As an example of mounting a pulse heat tool of a conventional bonding apparatus of this type, there has been a pulse heat tool mounting structure as shown in FIG. Here, a pulse heat tool in which sparks frequently occur due to thermal deformation is taken as an example, and a mounting structure of the pulse heat tool will be described with reference to FIG.
[0004]
First, a cable 1 is connected to an arm 2 from a power supply (not shown), a conversion 3 serving as an electrode is connected to and held by the arm 2, and a pulse heat tool 4 is fixed to the conversion 3 with a fixing screw 5. Although not shown in FIG. 2, the conversion 3 has a positioning surface 8 formed at the tip as shown in FIG. 3, and also plays a role of positioning the pulse heat tool 4.
[0005]
The pulse heat tool 4 and the conversions 3 and 31 are thermally affected by the use of the pulse heat tool 4 for a long time or at a high temperature, and a gap is generated between the two due to a difference in the coefficient of thermal expansion. appear. FIG. 3 shows the state in an exaggerated manner. In FIG. 3, numeral 7 indicates a spark generating portion.
[0006]
When a spark occurs between the pulse heat tool 4 and the conversion 3 serving as an electrode, the temperature control of the pulse heat tool 4 becomes impossible, and projections generated when the spark occurs cause the positioning surface 8 of the pulse heat tool 4 and the conversion 3. , The positioning of the pulse heat tool 4 becomes impossible.
[0007]
[Problems to be solved by the invention]
The present invention not only connects the pulse heat tool and its electrodes normally, but also double-connects them by using jumpers to enable reliable current supply to the pulse heat tool and manage the temperature of the pulse heat tool appropriately. At the same time, it is intended to prevent the occurrence of sparks by the reliable supply of current and to eliminate obstacles to accurate positioning of the pulse heat tool due to protrusions.
[0008]
[Means for Solving the Problems]
The present invention solves the above problems by providing a pulse heating tool in a bonding apparatus in which a pulse heating tool is positioned and fixed between both electrodes to supply a current for heating the pulse heating tool. It is an object of the present invention to provide a bonding apparatus characterized in that the tool and the electrode are further connected to each other by a separate jumper.
[0009]
Furthermore, in order to more reliably solve the problem, in addition to the above-described means, a bonding tool including a means for fixing a fixture used for connecting the pulse heat tool and the jumper by inserting a washer made of a material having a higher coefficient of thermal expansion than the fixture. Provide equipment.
[0010]
BEST MODE FOR CARRYING OUT THE INVENTION
Embodiments of the present invention will be described below together with the illustrated embodiments. FIG. 1 is a perspective view showing a relationship between a pulse heat tool and an electrode, which is a feature of the present invention. Since the outline of the entire bonding apparatus does not have a feature, the overall view is not shown.
[0011]
First, a metal pulse heat tool 4 is used as a pulse heat tool in a bonding apparatus. As a material of the pulse heat tool 4, a material such as Kovar or molybdenum having a large current resistance value is used in order to increase heat generation efficiency. Reference numeral 11 inserted between the pulse heat tools 4 is an insulating partition.
[0012]
In the figure, reference numerals 3 and 31 denote negative and positive electrodes for supplying a current for heating the pulse heating tool, which is referred to as conversion in the embodiment. A current supply for heating is connected to an arm 2 by a cable 1 from a power source (not shown), and conversions 3 and 31 serving as electrodes are connected and held to the arm 2. The cable 1, the arm 2, and the conversion 3 are made of a material having a small current resistance (copper in the embodiment) in order to prevent waste of current.
[0013]
In the conversions 3 and 31, the positioning surface 8 is formed at the same position as the position shown in FIG. 3, and the pulse heat tool 4 is pressed and fixed to the positioning surface 8 by the fixing screw 5. In the illustrated embodiment, the pulse heat tool 4 is in contact not only on the positioning surface 8 of the conversions 3 and 31, but also on the upper surface and one side surface. Reference numeral 6 in the figure denotes a fixing heat damper for fixing the conversions 3 and 31, which are both the positive and negative electrodes, and is made of a non-conductive ceramic material.
[0014]
According to the present invention, a jumper is added between the pulse heating tool 4 and the conversions 3 and 31 so that the current can be appropriately supplied even if the pulse heating tool 4 and the conversions 3 and 31 are slightly deformed. Although the jumper is a copper jumper plate 9 having a small current resistance in the illustrated embodiment, it is a matter of course that the jumper may be a jumper wire instead of a plate. The jumper plate 9 is used by stacking a plurality of jumper plates 9 in order to secure the volume and flexibility as a current path, and the surface thereof is plated with high heat resistance to prevent oxidation.
[0015]
The conversions 3 and 31 have fixing screws 51 for the jumper plate 9. The jumper plate 9 is fixed between the pulse heating tool 4 and the conversions 3 and 31 by the fixing screws 5 of the pulse heating tool 4 and the fixing screws 51. Connection is fixed. In the illustrated embodiment, the fixing screws 5 and 51 may be made of a commonly used iron but may be made of stainless steel.
[0016]
Conventionally, the conversions 3 and 31 have played the role of positioning the pulse heat tool 4 and supplying current. However, the conversions 3 and 31 in the present invention have the role of positioning the pulse heat tool 4 as the main role and the role of current supply. The jumper board 9 is about to be held.
[0017]
A washer 10 made of a material having a higher coefficient of thermal expansion than the fixing screws 5 and 51 is inserted between the pulse heat tool 4 and the fixing screw 5 and between the conversions 3 and 31 and the fixing screw 51 and fastened and fixed. The washer 10 is added to secure a contact surface necessary for flowing a large current between the jumper plate 9 and the pulse heat tool 4 and between the jumper plate 9 and the conversions 3 and 31.
[0018]
The washer 10 is made of aluminum having a larger coefficient of thermal expansion than the stainless fixing screws 5 and 51 in order to prevent the pulse heat tool 4 and the fixing screw 5 from loosening due to a difference in thermal expansion coefficient. In the illustrated embodiment, the washer 10 is attached to both the fixing screw 5 on the pulse heat tool 4 side and the fixing screw 51 on the conversion 3 and 31 sides, but the pulse heat tool is easily affected by thermal expansion. A similar effect can be expected even when only the fixing screw 5 on the fourth side is attached.
[0019]
【The invention's effect】
In the present invention, first, since the pulse heat tool and the electrode are doubly connected to each other by a separate jumper, even if the pulse heat tool and the conversion which has conventionally served the role of the electrode are somewhat thermally deformed, the jumper can be used. The contact surface was secured by the flexibility, no spark was generated between the pulse heating tool and the electrode, and stable temperature control and accurate positioning could be performed.
[0020]
Furthermore, by making the jumper share the role of supplying current, parts having the positioning structure of the pulse heat tool (conversion in the embodiment) are free from projections due to sparks, and the durability of these parts is improved. It became something.
[0021]
According to the second aspect of the present invention, the fixing tool used for connecting the pulse heat tool and the jumper is fixed by inserting a washer made of a material having a higher coefficient of thermal expansion than the fixing tool, so that the jumper caused by the expansion of the fixing tool. And the pulse heat tool can be prevented from loosening, and the occurrence of spark due to expansion of the fixture can be prevented.
[Brief description of the drawings]
1 is a perspective view showing the relationship between a pulse heat tool and an electrode according to the present invention; FIG. 2 is a perspective view showing the relationship between a conventional pulse heat tool and an electrode; FIG. 3 is a gap between the pulse heat tool and an electrode due to thermal expansion; Cross-sectional explanatory view showing [Description of reference numerals]
1. . . . . . Cable2. . . . . . Arm 3, 31. . . Conversion 4. . . . . . Pulse heat tool 5, 51. . . Fixing screw 6. . . . . . 6. Heat damper for fixing . . . . . Spark generation part8. . . . . . Positioning surface 9. . . . . . Jumper board10. . . . . Washer 11. . . . . Insulation partition

Claims (2)

In a bonding machine in which the pulse heat tool is positioned and fixed between the two electrodes to supply current for heating the pulse heat tool, the pulse heat tool and the electrode are connected by separate jumpers. A bonding device, wherein the bonding device is further connected. 2. The bonding apparatus according to claim 1, wherein a washer made of a material having a higher coefficient of thermal expansion than that of the fixture is inserted into a fixture used to connect the pulse heat tool and the jumper.

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