JP3545982B2 - Method for manufacturing vibrating membrane for electrostatic electroacoustic transducer, vibrating membrane, and electrostatic electroacoustic transducer including this vibrating membrane - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method for manufacturing a vibrating membrane for an electrostatic electroacoustic transducer, a vibrating membrane and an electrostatic electroacoustic transducer having the vibrating membrane, and particularly to a vibrating membrane having excellent heat resistance together with an electretized material film. The present invention relates to a method of manufacturing a vibrating film for an electrostatic electroacoustic transducer with high productivity, which is formed at a time, a vibrating membrane, and an electrostatic electroacoustic transducer including the vibrating membrane.
[0002]
[Prior art]
A prior example of the present invention will be described with reference to FIG.
Referring to FIG. 6A, a mask 2 is formed in a region other than a region where a nickel thin film is to be formed on the surface of the aluminum thin plate base material 1 as a base material. As the material of the mask 2, a material that is not plated with a metal material forming the vibration film is selected.
[0003]
Referring to FIG. 6B, a nickel thin film 3 is formed on the surface of the thin aluminum base material 1 on which the mask 2 is not formed by applying a plating technique.
Referring to FIG. 6 (c), a mask 2 'is formed on the aluminum thin plate preform 1 in a region corresponding to the nickel thin film 3 formed on the surface of the aluminum thin plate preform 1 by etching and removed. Thereby, the lower surface of the nickel thin film 3 is exposed.
Here, an adhesive applied to the upper end surface of the metal material ring 15 is separately prepared, and this is placed on the etched-out region 4 of the aluminum thin plate base material 1 with the adhesive applied upper end surface facing upward. Then, it is bonded to the exposed lower surface of the nickel thin film 3. As the constituent material of the metal material ring, a metal material whose coefficient of thermal expansion is close to the coefficient of thermal expansion of the metal material forming the vibrating membrane 16 'is selected. When the metal material forming the vibrating film 16 ′ is nickel, stainless steel SUS430 is selected as the material of the metal material ring 15 in addition to nickel. Next, a vibrating film 16 is formed by punching the outer peripheral edge of the nickel thin film 3 to be bonded to the metal material ring 15 to use the metal material ring 15 as a support ring of the nickel thin film 3. See Japanese Patent Application No. 11-262076 related to the application).
[0004]
[Problems to be solved by the invention]
The vibrating film made of the nickel thin film 3 and having excellent heat resistance can also be formed by the above-described steps of the preceding example.
However, the process of the prior art requires a masking process of the aluminum thin plate base material 1 when forming and forming the nickel thin film 3, and further, the aluminum thin plate base material 1 is removed by etching to expose the previous nickel thin film 3. In this case, a masking process of the aluminum thin plate preform 1 is further required, which complicates the manufacturing process of the vibration film.
[0005]
The present invention solves the above-mentioned problem of forming a vibrating film made of a nickel thin film 3 and having excellent heat resistance together with an electretized material film, and provides a method of manufacturing a vibrating film for an electrostatic electroacoustic transducer with high productivity. An object of the present invention is to provide a vibration film and an electrostatic electroacoustic transducer provided with the vibration film.
[0006]
[Means for Solving the Problems]
Claim 1: A nickel thin film 12 is formed and formed on one surface of the metal material substrate 11, an electretized material film 31 is formed and formed on the surface of the nickel thin film 12, and a partial region of the other surface of the metal material substrate 11 is formed. 131 is removed by etching to expose the nickel thin film 12, the vibrating membrane ring 15 is joined to the exposed nickel thin film 12, and the metal electromechanical transducer 11 is punched along the outer peripheral surface of the vibrating membrane ring 15. The manufacturing method of the vibrating membrane for use was constituted.
[0007]
Claim 2: In the method of manufacturing a vibrating membrane for an electrostatic electroacoustic transducer according to claim 1, the nickel thin film 12 is formed on the surface of the metal material substrate 11 while the metal material substrate 11 is continuously drawn from the metal material substrate roll 1. Then, while the metal material substrate 11 on which the nickel thin film 12 is plated is continuously pulled out from the nickel-plated metal material substrate roll 1 ′, the electretization material coating 31 is formed on the nickel thin film 12 to form the electretization material coating nickel. A method for manufacturing a vibrating membrane for an electrostatic electroacoustic transducer for forming the plated metal material substrate 14 was constructed.
[0008]
In a third aspect of the present invention, in the method of manufacturing a vibration film for an electrostatic electroacoustic transducer, the metal material substrate 11 is formed of an aluminum substrate. Was configured.
Further, in the method for manufacturing a vibrating membrane for an electrostatic electroacoustic transducer according to any one of claims 1 to 3, the electretized material film is formed by joining the electretized material film; Alternatively, a method for producing a vibrating membrane for an electrostatic electroacoustic transducer, which is formed by applying and firing a solution of an electret material, or depositing an electret material, is provided.
[0009]
In a fifth aspect of the present invention, in the method for manufacturing a vibrating membrane for an electrostatic type electroacoustic transducer, the electretized material may be tetrafluoroethylene-hexafluoropropylene. A method for manufacturing a vibrating membrane for an electrostatic electroacoustic transducer, which is any one selected from a polymer, a perfluoroalkoxy fluororesin, amorphous Teflon, and silicon oxide, was configured.
Here, in the method for producing a vibrating membrane for an electrostatic electroacoustic transducer according to claim 6, the electretized material-coated nickel-plated metal material substrate 14 is provided. While continuously pulling out from the roll 10, the partial region 131 on the other surface of the metal material substrate 11 is removed by etching, the vibration film ring 15 is joined, and the metal material substrate 11 is punched. The manufacturing method was configured.
[0010]
Claim 7: The electretized material film 31 is formed on the surface of the nickel thin film 12 of the metal material substrate 11 having the nickel thin film 12 formed on one surface, and the partial region 131 on the other surface of the metal material substrate 11 is formed. The vibrating membrane ring 15 is bonded to the exposed nickel thin film 12 by removing the metal film, and a vibrating membrane for an electrostatic electroacoustic transducer is formed by punching the metal material substrate 11 along the outer peripheral surface of the vibrating membrane ring 15. .
Further, in the vibrating film for an electrostatic electroacoustic transducer according to claim 8, the metal material substrate 11 constitutes the vibrating film for an electrostatic electroacoustic transducer made of an aluminum substrate.
[0011]
Claim 9: In the vibrating membrane for an electrostatic electroacoustic transducer according to any one of claims 7 and 8, the electretized material is a tetrafluoroethylene-hexafluoropropylene copolymer, A vibrating membrane for an electrostatic electroacoustic transducer, which was selected from perfluoroalkoxy fluororesin, amorphous Teflon, and silicon oxide, was formed.
Claim 10: An electretized material film 31 is formed on the surface of the nickel thin film 12 of the metal material substrate 11 having the nickel thin film 12 formed on one surface, and a partial region 131 on the other surface of the metal material substrate 11 is formed. The vibrating membrane ring 15 is joined to the nickel thin film 12 which has been removed and exposed, and an electrostatic electro-acoustic transducer having a vibrating membrane formed by punching a metal material substrate 11 along the outer peripheral surface of the vibrating membrane ring 15 is provided. Configured.
[0012]
In the eleventh aspect, in the electrostatic electroacoustic transducer according to the tenth aspect, the metal material substrate 11 forms an electrostatic electroacoustic transducer made of an aluminum substrate.
Further, claim 12: In the electrostatic electroacoustic transducer according to any one of claims 10 and 11, the electretized material is a tetrafluoroethylene-hexafluoropropylene copolymer, a perfluoroalkoxy fluororesin. , Amorphous Teflon, and silicon oxide were formed.
[0013]
BEST MODE FOR CARRYING OUT THE INVENTION
As a metal material substrate, a nickel thin film having a thickness of about 1.0 to 2.0 μm is formed on one side of a roll-shaped aluminum substrate having a thickness of about 0.1 mm by employing electrolytic or electroless plating technology. The surface of the electretized material film is continuously welded, or the solution of the electretized material is applied and baked, or silicon oxide is continuously formed by the CVD method, and then the aluminum substrate is continuously etched, and the vibrating membrane ring is thermoset epoxy. By bonding with a system adhesive and cutting the outer periphery, a highly heat-resistant nickel thin film electret vibration film that can withstand a high temperature of 150 ° C. is manufactured.
[0014]
【Example】
An embodiment of the present invention will be described with reference to the drawings.
Referring to FIG. 1, an aluminum substrate is used as a metal material substrate. Reference numeral 1 denotes an aluminum substrate roll as a raw material. The aluminum substrate roll 1 is formed by winding an aluminum substrate 11 having a thickness of about 0.1 mm by 500 to 100 m. Then, on one surface of the aluminum substrate 11, a vinyl tape is pressure-bonded to the entire surface with a heat roller, and a coating is formed by masking or chemically treating the entire surface. Here, the aluminum substrate 11 is introduced into the nickel electroless or electrolytic plating tank 2 while being continuously pulled out from the aluminum substrate roll 1, and a nickel thin film 12 is formed on the surface of the aluminum substrate 11 here. The nickel thin film 12 is formed only on the uncoated surface, and the nickel thin film 12 is not formed on the coated surface by this coating. The nickel-plated aluminum substrate 13 having the nickel thin film 12 formed only on one entire surface is wound up to form a nickel-plated aluminum substrate roll 1 '. Prior to winding up the nickel-plated aluminum substrate roll 1 ′, while the aluminum substrate is being wound up, on one side, a vinyl tape is peeled off or a chemical treatment is performed to remove the film, and the above coating is performed. Remove it. As described above, the nickel-plated aluminum substrate 13 can be continuously manufactured while forming the nickel thin film 12 having a purity of 99.9% or more and a film thickness of about 1 μm without pinholes.
[0015]
Referring to FIG. 2, an FEP film is used as an example of the electretized material coating. Reference numeral 3 denotes an FEP film roll. The FEP film 31 drawn from the FEP film roll 3 is superimposed on the surface of the nickel-plated aluminum substrate 13 drawn from the nickel-plated aluminum substrate roll 1 ′ on which the nickel thin film 12 is formed, and is introduced into the welding tank 4 in this state. The FEP film 31 is welded to the surface of the nickel thin film 12 of the nickel-plated aluminum substrate 13 to form the FEP film-coated nickel-plated aluminum substrate 14. The FEP film-coated nickel-plated aluminum substrate 14 is wound up to constitute the FEP film-coated nickel-plated aluminum substrate roll 10.
[0016]
In the above embodiment, the FEP film coating of the nickel-plated aluminum substrate 13 was formed by directly fusing the FEP film 31, but the FEP layer was formed by spraying the FEP solution on the surface of the nickel-plated aluminum substrate 13. By heating this, the FEP film coating 31 can be formed. Hereinafter, referring to FIG. 3, the tank 32 is filled with the FEP solution 33. The FEP solution 33 is sprayed on the surface of the aluminum substrate 13 on which the nickel thin film 12 is formed, which is drawn from the nickel-plated aluminum substrate roll 1 '. The nickel thin film 12 sprayed with the FEP solution is then introduced into a firing furnace 4 ′ and wound up on a substrate roll 10 while an FEP coat 31 ′ is formed on the surface of the nickel thin film 12 of the nickel-plated aluminum substrate 13.
[0017]
Here, as the electretized polymer material, PFA (perfluoroalkoxy fluororesin) and AF (amorphous Teflon) can be used in addition to FEP. Further, SiO ₂ (silicon oxide) as an inorganic material is formed as a thin film of an electret material by a CVD method.
Referring to FIG. 4, the FEP film-coated nickel-plated aluminum substrate 14 is pulled out from the roll 10, introduced into the etching bath 5, and further wound up on the substrate winding roll 100 via the drying furnace 6 and the press 7. .
[0018]
5A, the roll 10 feeds out the FEP film-coated nickel-plated aluminum substrate 14 with its FEP film-coated surface facing down in FIG. 5A. That is, the upper side of the FEP film-coated nickel-plated aluminum substrate 14 sent out from the roll 10 is composed of the aluminum substrate 13 itself on which the nickel thin film 12 and the FEP film 31 are not formed.
[0019]
(Step 1)
Prior to introducing the FEP film-coated nickel-plated aluminum substrate 14 into the etching bath 5, a mask 8 is applied to the surface of the substrate 14, that is, the surface of the aluminum substrate 13 except for the circular region 131. Specifically, a film is formed by performing a chemical treatment on the surface of the aluminum substrate 14 without a mask.
(Step 2)
The FEP film-coated nickel-plated aluminum substrate 14 with the mask 8 applied to the surface of the aluminum substrate 13 excluding the circular region 131 is introduced into the etching tank 5 and subjected to etching. With this etching, the etching of the aluminum substrate 13 proceeds from the circular region 131 on the surface of the aluminum substrate 13 on which the mask 8 is not applied, the aluminum substrate 13 is etched away, and the etching concave portion where the surface of the next nickel thin film 12 is exposed 131 'is formed. The state where the surface of the nickel thin film 12 is exposed is as shown on the left side of FIG. 5B in which the substrate 14 is pulled out from the etching bath 5.
[0020]
(Step 3)
Here, the metal material ring 15 is separately prepared. The constituent material of the metal material ring 15 is selected from metal materials whose coefficient of thermal expansion is close to the coefficient of thermal expansion of the metal material forming the vibrating membrane. When the metal material forming the vibrating membrane is nickel, stainless steel SUS430 is selected as a constituent material of the metal material ring in addition to nickel.
Referring to FIG. 5B, the metal material ring 15 has an etching recess 131 formed by applying an adhesive to the lower end surface thereof and removing the aluminum substrate 14 with the lower end surface of the metal material ring 15 facing down. And bonded to the exposed surface of the nickel thin film 12.
[0021]
(Step 4)
The aluminum substrate 14 with the metal material ring 15 bonded to the exposed surface of the nickel thin film 12 is then introduced into the drying furnace 6.
(Step 5)
In the drying furnace 6, when the adhesive applied to the metal material ring 15 is dried and the metal material ring 15 and the nickel thin film 12 are completely bonded, the press 7 is operated to remove the upper mold ring remover 71 to the metal material ring. The FEP film-coated nickel-plated aluminum substrate 14 is punched by driving downward along the outer peripheral surface of the substrate 15. As a result, a nickel thin film electret vibration film having the metal material ring 15 as a support ring is formed. FIG. 5C is a diagram showing a cross section of the nickel thin film electret vibration film.
[0022]
Here, the aluminum substrate 11 does not exist in the nickel thin film electret vibration film of FIG. 5C. However, since the diameter of the ring punch 71 of the upper mold is configured to be very slightly larger than the outer diameter of the metal material ring 15, the aluminum substrate 11 must be provided on the lower outer peripheral edge of the metal material ring 15 during this punching. Traces remain, and it is determined that this nickel thin film electret vibration film was manufactured by the above process.
[0023]
【The invention's effect】
As described above, the present invention provides a method for forming a nickel thin film on one surface of a metal material substrate, forming an electretized material film on a surface of the nickel thin film, and forming a film on the other surface of the metal material substrate. The nickel thin film is exposed by removing the partial area by etching, the vibrating membrane ring is joined to the exposed nickel thin film, and a metal material substrate is punched along the outer peripheral surface of the vibrating membrane ring to vibrate the vibration for the electrostatic electroacoustic transducer. Construct the membrane.
[0024]
Accordingly, the vibrating membrane for the electrostatic electroacoustic transducer can be formed of a relatively thick nickel thin film having a thickness of 1 to 2 μm. Therefore, by adjusting and designing the thickness of the vibration film within the range of the film thickness, the resonance frequency of the vibration film can be set high, and an electrostatic electroacoustic transducer having a wide frequency characteristic is designed and configured. be able to.
Since the vibration film is formed of a nickel thin film, the vibration film has excellent heat resistance. The increased heat resistance of the vibrating membrane has made it possible to adopt a reflow soldering manufacturing process when assembling and assembling an electrostatic electroacoustic transducer composed of this vibrating thin film on a circuit board. As a result, it is possible to provide an inexpensive electrostatic electroacoustic transducer with improved quality performance, high productivity, and low cost.
[0025]
In addition, since the heat resistance of the vibration film is increased, silicon oxide, which is an inorganic material, can be formed on the nickel thin film by the CVD method as the electret material thin film. This makes it possible to further increase the heat resistance of the electrostatic electroacoustic transducer.
[Brief description of the drawings]
FIG. 1 is a view for explaining a method of forming a nickel thin film on a metal material substrate.
FIG. 2 is a view for explaining a method of forming an electretized material film on a nickel thin film.
FIG. 3 is a diagram illustrating a method of forming an FEP layer by spraying a FEP solution on a surface of an aluminum substrate.
FIG. 4 is a diagram illustrating a method of forming a vibration film.
FIG. 5 is a diagram illustrating details of FIG. 4;
FIG. 6 is a diagram illustrating a prior example.
[Explanation of symbols]
Reference Signs List 1 aluminum substrate roll 1 'nickel-plated aluminum substrate roll 10 FEP film-coated nickel-plated aluminum substrate roll 100 substrate take-up roll 11 aluminum substrate 12 nickel thin film 13 nickel-plated aluminum substrate 131 circular region 131' etching recess 14 FEP film-coated nickel-plated aluminum Substrate 15 Metal material ring 2 Nickel electroless plating tank 3 FEP film roll 31 FEP film 4 Welding tank 5 Etching tank 6 Drying furnace 7 Press 8 Mask

Claims (12)

Forming a nickel thin film on one surface of the metal material substrate,
An electret material film is formed on the surface of the nickel thin film,
Etching away a partial area on the other surface of the metal material substrate to expose the nickel thin film,
Join the vibrating membrane ring to the exposed nickel thin film,
A method of manufacturing a vibrating membrane for an electrostatic electroacoustic transducer, comprising punching a metal material substrate along an outer peripheral surface of a vibrating membrane ring. The method for manufacturing a vibration film for an electrostatic electroacoustic transducer according to claim 1,
While the metal material substrate is continuously pulled out from the metal material substrate roll, a nickel thin film is plated on the surface thereof. Then, the metal material substrate plated with the nickel thin film is continuously drawn from the nickel-plated metal material substrate roll, and the electret is formed on the nickel thin film. A method for producing a vibrating film for an electrostatic electroacoustic transducer, comprising forming an electretized material coating nickel-plated metal material substrate by forming a passivating material film. The method for manufacturing a vibration film for an electrostatic electroacoustic transducer according to claim 1,
A method for manufacturing a vibrating film for an electrostatic electroacoustic transducer, wherein the metal material substrate is an aluminum substrate. A method for manufacturing a vibrating membrane for an electrostatic electroacoustic transducer according to any one of claims 1 to 3,
The electretized material film is formed by bonding an electretized material film, or applying and firing a solution of the electretized material, or vapor-depositing the electretized material. Manufacturing method. A method for manufacturing a vibrating membrane for an electrostatic electroacoustic transducer according to any one of claims 1 to 4,
The material for electretization is any one selected from a tetrafluoroethylene-hexafluoropropylene copolymer, a perfluoroalkoxy fluororesin, amorphous Teflon, and silicon oxide. Manufacturing method of membrane. A method for manufacturing a vibrating membrane for an electrostatic electroacoustic transducer according to any one of claims 2 to 5,
Electretized material coating Nickel plating Metal material substrate is continuously removed from the roll while etching and removing a partial area on the other surface of the metal material substrate, joining the vibrating membrane ring, and punching the metal material substrate. A method for producing a vibrating membrane for an electrostatic electroacoustic transducer. A vibrating membrane for an electrostatic electroacoustic transducer manufactured by the manufacturing method according to claim 1,
A ring-shaped metal material ring,
A nickel thin film in which an edge of one surface is bonded to one end surface of the metal material ring,
A vibrating film for an electrostatic electroacoustic transducer, comprising an electretized material film deposited on the other surface of a nickel thin film. The diaphragm for an electrostatic electroacoustic transducer according to claim 7,
A vibration film for an electrostatic electroacoustic transducer, wherein the metal material substrate is an aluminum substrate. The diaphragm for an electrostatic electroacoustic transducer according to any one of claims 7 and 8,
The material for electretization is any one selected from a tetrafluoroethylene-hexafluoropropylene copolymer, a perfluoroalkoxy fluororesin, amorphous Teflon, and silicon oxide. film. An electrostatic electro-acoustic transducer manufactured by the method according to claim 1,
A ring-shaped metal material ring,
A nickel thin film in which an edge of one surface is bonded to one end surface of the metal material ring,
An electrostatic electroacoustic transducer comprising an electretized material film deposited on the other surface of the nickel thin film . The electrostatic electro-acoustic transducer according to claim 10,
An electrostatic electro-acoustic transducer, wherein the metal material substrate is an aluminum substrate. In the electrostatic electroacoustic transducer according to any one of claims 10 and 11,
The electrostatic type electroacoustic transducer, wherein the electret material is any one selected from tetrafluoroethylene-hexafluoropropylene copolymer, perfluoroalkoxy fluororesin, amorphous Teflon, and silicon oxide.

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