JP2001177899A - Manufacturing method for vibration film for electrostatic type electroacoustic transducer element, the vibrating film and electrostatic type electroacoustic transducer element provided with the vibration film - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method for a vibrating film for an electrostatic type electroacoustic transducer element with high productivity where the vibrating film with excellent heat resistance is formed at once with an electret material film and to provide the vibrating film and the electrostatic type electroacoustic transducer element provided with the vibrating film. SOLUTION: A nickel thin film 12 is formed to one side of a metallic material base 11, an electret material coating film 31 is formed on the surface of the nickel thin film 12, a partial region 131 on the other side of the metallic material base 11 is removed by etching to expose the nickel thin film 12, a vibration film ring 15 is joined to the exposed nickel thin film 12, and the metallic material base 11 is punched along the outer circumferential face of the vibration film ring 15 in the manufacturing method of the vibration film for the electrostatic type electroacoustic transducer element.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a vibrating membrane for an electrostatic electroacoustic transducer, a vibrating membrane and an electrostatic electroacoustic transducer provided with the vibrating membrane, and more particularly to a vibration excellent in heat resistance. The present invention relates to a method of manufacturing a vibrating membrane for an electrostatic electroacoustic transducer with high productivity in which a film is formed at once with an electretized material film, a vibrating membrane, and an electrostatic electroacoustic transducer including the vibrating membrane.

[0002]

2. Description of the Related Art A prior art example of the present invention will be described with reference to FIG. Referring to FIG. 6A, a mask 2 is formed in a region other than a region where a nickel thin film is to be formed on the surface of the aluminum thin plate base material 1 as a base material. Mask 2
Is selected as a material from which the metal material constituting the vibration film is not plated.

Referring to FIG. 6B, a nickel thin film 3 is formed on the surface of the thin aluminum base material 1 on which the mask 2 is not formed by applying a plating technique. Referring to FIG. 6 (c), a mask 2 'is formed on the aluminum thin plate preform 1 in a region corresponding to the nickel thin film 3 formed on the surface of the aluminum thin plate preform 1, and is etched away. Thereby, the lower surface of the nickel thin film 3 is exposed. Here, an adhesive applied to the upper end surface of the metal material ring 15 is separately prepared, and this is placed on the etched-out region 4 of the aluminum thin plate preform 1 with the adhesive applied upper end face up. It is inserted and joined to the exposed lower surface of the nickel thin film 3. The constituent material of the metal material ring has a coefficient of thermal expansion of the vibrating membrane 1
A metal material that is close to the coefficient of thermal expansion of the metal material constituting 6 ′ is selected. When the metal material constituting the vibrating film 16 'is nickel, stainless steel SUS4
30 is selected as a constituent material of the metal material ring 15.
Next, the nickel thin film 3 bonded to the metal material ring 15
The vibrating membrane 16 is formed by punching out the outer peripheral edge of the ring to use the metal material ring 15 as a support ring for the nickel thin film 3 (for details, refer to Japanese Patent Application No. Hei 10 (1994) -207, filed by the present applicant).
See Japanese Patent Application Publication No. 1-262076).

[0004]

The vibrating membrane made of the nickel thin film 3 and having excellent heat resistance can also be formed by the above-mentioned prior art steps. However, the process of the prior example is
When the nickel thin film 3 is formed, a masking process of the aluminum thin plate preform 1 is required. In addition, when the aluminum thin plate preform 1 is removed by etching to expose the preceding nickel thin film 3, A masking process is required, which complicates the manufacturing process of the vibrating membrane.

According to the present invention, there is provided a vibrating membrane for an electrostatic electro-acoustic transducer having high productivity, which solves the above-mentioned problem of forming a vibrating membrane made of a nickel thin film 3 having excellent heat resistance together with an electretized material film. An object of the present invention is to provide a manufacturing method, a vibration film, and an electrostatic electroacoustic transducer having the vibration film.

[0006]

A nickel thin film is formed on one surface of a metal material substrate, and an electretized material film is formed on the surface of the nickel thin film.
Is formed, and the partial region 131 on the other surface of the metal material substrate 11 is removed by etching to expose the nickel thin film 12. The vibrating membrane ring 15 is joined to the exposed nickel thin film 12, and the outer periphery of the vibrating membrane ring 15 is formed. A method for manufacturing a vibrating membrane for an electrostatic electroacoustic transducer, in which a metal material substrate 11 is punched along a surface, is configured.

In a second aspect of the present invention, there is provided a method of manufacturing a vibrating membrane for an electrostatic electroacoustic transducer.
While continuously pulling out the metal material substrate 11 from the metal material substrate roll 1, the surface thereof is plated with a nickel thin film 12, and then the metal material substrate 11 on which the nickel thin film 12 is plated is continuously removed from the nickel-plated metal material substrate roll 1 ′. A method for manufacturing a vibrating membrane for an electrostatic electroacoustic transducer in which an electretized material coating 31 is formed on the nickel thin film 12 while being pulled out to form the electretized material-coated nickel-plated metal material substrate 14.

According to a third aspect of the present invention, in the method of manufacturing a vibration film for an electrostatic electroacoustic transducer, the metal material substrate 11 is formed of an aluminum substrate. Was constructed. Further, in the method for manufacturing a vibrating membrane for an electrostatic electroacoustic transducer according to any one of claims 1 to 3, the electretized material film is formed by joining the electretized material film; Alternatively, a method of manufacturing a vibrating membrane for an electrostatic electroacoustic transducer, which is formed by applying and firing a solution of an electretization material or vapor-depositing an electretization material.

Claim 5: Claims 1 to 4
In the method of manufacturing a vibrating membrane for an electrostatic electroacoustic transducer described in any one of the above, the electretized material is a tetrafluoroethylene-hexafluoropropylene copolymer, a perfluoroalkoxy fluororesin, amorphous Teflon, silicon oxide A method for manufacturing a vibrating membrane for an electrostatic electro-acoustic transducer, which is one selected from the above. Here, in the method for manufacturing a vibrating membrane for an electrostatic electroacoustic transducer according to claim 6, the electretized material-coated nickel-plated metal material substrate 14 is formed. While continuously pulling out from the roll 10, the partial region 131 on the other surface of the metal material substrate 11 is removed by etching, the vibration film ring 15 is joined, and the metal material substrate 11 is punched. The manufacturing method was configured.

[0010] Claim 7: The nickel thin film 1 of the metal material substrate 11 having the nickel thin film 12 formed on one surface.
The vibration film ring 15 is joined to the nickel thin film 12 which has been formed by forming an electretization material film 31 on the surface of the metal film substrate 2 and removing and exposing the partial region 131 on the other surface of the metal material substrate 11. A vibrating membrane for an electrostatic electro-acoustic transducer was formed by punching out a metal material substrate 11 along the outer peripheral surface of. Further, in the vibrating film for an electrostatic electroacoustic transducer according to claim 8, the metal material substrate 11 constitutes the vibrating film for an electrostatic electroacoustic transducer made of an aluminum substrate.

Further, claim 9: claims 7 and 8
In the vibrating membrane for an electrostatic electroacoustic transducer described in any of the above, the electretized material is a tetrafluoroethylene-hexafluoropropylene copolymer, a perfluoroalkoxy fluororesin, amorphous Teflon, or silicon oxide. A selected one of the vibrating films for the electrostatic electroacoustic transducer was formed. Claim 1
0: An electret material film 31 is formed on the surface of the nickel thin film 12 of the metal material substrate 11 having the nickel thin film 12 formed on one surface, and the partial region 131 on the other surface of the metal material substrate 11 is removed. The vibrating membrane ring 15 is joined to the exposed nickel thin film 12 and
An electrostatic electroacoustic transducer having a vibrating membrane formed by punching a metal material substrate 11 along the outer peripheral surface of No. 5 was constructed.

Here, in the eleventh aspect, in the electrostatic electroacoustic transducer according to the tenth aspect, the metal material substrate 1
Numeral 1 constituted an electrostatic electroacoustic transducer made of an aluminum substrate. Claim 12: In the electrostatic electroacoustic transducer according to any one of claims 10 and 11, the electretized material is a tetrafluoroethylene-hexafluoropropylene copolymer or a perfluoroalkoxy fluororesin. , An amorphous electro-acoustic transducer selected from amorphous Teflon and silicon oxide.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION A metal material substrate has a thickness of 0.1.
Electrolytic or electroless plating technology is applied to one side of a roll-shaped aluminum substrate having a thickness of about 1.0 mm to 1.0 to 2.0.
A nickel thin film having a thickness of about μm is formed, an electret material film is continuously deposited on the nickel thin film surface, or a solution of the electret material is applied and baked, or silicon oxide is continuously formed by a CVD method, and then an aluminum substrate is formed. Are continuously etched, the vibration film ring is bonded with a thermosetting epoxy-based adhesive, and the outer periphery is cut to produce a high heat-resistant nickel thin film electret vibration film withstanding a high temperature of 150 ° C.

[0014]

An embodiment of the present invention will be described with reference to the drawings.
Referring to FIG. 1, an aluminum substrate is used as a metal material substrate. Reference numeral 1 denotes an aluminum substrate roll as a raw material. The aluminum substrate roll 1 comprises an aluminum substrate 11 having a thickness of about
It is made of 0 m wound. Then, on one surface of the aluminum substrate 11, a vinyl tape is pressure-bonded to the entire surface with a heat roller, and an entire surface is masked or chemically treated to form a film. Here, the aluminum substrate 11 is introduced into the nickel electroless or electrolytic plating tank 2 while being continuously drawn from the aluminum substrate roll 1, and a nickel thin film 12 is formed on the surface of the aluminum substrate 11 here. The nickel thin film 12 is formed only on the uncoated surface, and the nickel thin film 12 is not formed on the coated surface by this coating. Nickel-plated aluminum substrate 1 having nickel thin film 12 formed only on one entire surface
3 is wound up to form a nickel-plated aluminum substrate roll 1 '. Prior to winding up the nickel-plated aluminum substrate roll 1 ′, while winding up the aluminum substrate, one of the vinyl tapes is peeled off or a chemical treatment is performed to remove the film, and the coating is performed. Remove it. As described above, the nickel thin film 12 having a purity of 99.9% or more and a film thickness of about 1 μm is formed without pinholes.
The nickel-plated aluminum substrate 13 can be manufactured continuously.

Referring to FIG. 2, an FEP film is used as an example of an electretized material coating. 3 is F
3 shows an EP film roll. The FEP film 31 drawn from the FEP film roll 3 is superimposed on the surface of the nickel-plated aluminum substrate 13 drawn from the nickel-plated aluminum substrate roll 1 ′ on which the nickel thin film 12 is formed, and is introduced into the welding tank 4 in this state.
Nickel thin film 1 on nickel-plated aluminum substrate 13
The FEP film 31 is welded to the second surface to form the FEP film-coated nickel-plated aluminum substrate 14. The FEP film-coated nickel-plated aluminum substrate 14 is wound up to constitute the FEP film-coated nickel-plated aluminum substrate roll 10.

In the above embodiment, the FEP film coating on the nickel-plated aluminum substrate 13 was formed by directly fusing the FEP film 31, but the FEP layer was sprayed on the surface of the nickel-plated aluminum substrate 13 by spraying the FEP solution. Is formed and heated to form FE
The P film coating 31 can be formed. Hereinafter, referring to FIG. 3, the FEP solution 3
3 are filled. The FEP solution 33 is sprayed on the surface of the aluminum substrate 13 on which the nickel thin film 12 is formed, which is drawn from the nickel-plated aluminum substrate roll 1 '. The nickel thin film 12 sprayed with the FEP solution is then introduced into a firing furnace 4 ′, and the FEP coat 31 ′ is formed on the surface of the nickel thin film 12 of the nickel-plated aluminum substrate 13 while the substrate roll 1 is formed.
Rolled up to 0.

Here, as the electretized polymer material, PFA (perfluoroalkoxy fluororesin) and AF (amorphous Teflon) can be used in addition to FEP. Further, SiO ₂ (silicon oxide), which is an inorganic material, is formed as a thin film of an electret material by a CVD method. Referring to FIG. 4, the FEP film-coated nickel-plated aluminum substrate 14 is pulled out from the roll 10, introduced into the etching bath 5, and further dried.
The substrate is taken up by a substrate take-up roll 100 via a press 7.

Referring to FIG. 5 in detail, in FIG. 5A, the roll 10 is a FEP film-coated nickel-plated aluminum substrate
The film is fed with the film coating side down. That is, the upper side of the FEP film-coated nickel-plated aluminum substrate 14 sent out from the roll 10 is the nickel thin film 1
2 and the aluminum substrate 13 on which the FEP film 31 is not formed.

(Step 1) Prior to introducing the FEP film-coated nickel-plated aluminum substrate 14 into the etching bath 5, a mask 8 is formed on the surface of the substrate 14, that is, the surface of the aluminum substrate 13 except for the circular region 131. Apply. Specifically, a film is formed by performing a chemical treatment on the surface of the aluminum substrate 14 without a mask. (Step 2) Circular area 13 on the surface of aluminum substrate 13
The FEP film-coated nickel-plated aluminum substrate 14 provided with a mask 8 in the region except
And etched. By this etching, the aluminum substrate 13 on which the mask 8 is not applied is formed.
The etching of the aluminum substrate 13 proceeds from the circular region 131 on the surface, the aluminum substrate 13 is etched away, and an etching recess 131 ′ exposing the surface of the next nickel thin film 12 is formed. The state where the surface of the nickel thin film 12 is exposed is as shown on the left side of FIG. 5B in which the substrate 14 is pulled out from the etching bath 5.

(Step 3) Here, the metal material ring 15
Are prepared separately. The constituent material of the metal material ring 15 is selected from metal materials whose coefficient of thermal expansion is close to the coefficient of thermal expansion of the metal material forming the vibrating membrane. When the metal material forming the vibrating membrane is nickel, stainless steel SUS430 is selected as a constituent material of the metal material ring in addition to nickel. Referring to FIG. 5B, the metal material ring 1
5 is a method in which an adhesive is applied to the lower end surface of the nickel thin film 12, and the lower end surface with the adhesive applied is inserted into the etching recess 131 ′ where the aluminum substrate 14 is formed by removing the aluminum substrate 14. I do.

(Step 4) The aluminum substrate 14 with the metal material ring 15 bonded to the exposed surface of the nickel thin film 12 is then introduced into the drying furnace 6. (Step 5) In the drying furnace 6, when the adhesive applied to the metal material ring 15 is dried and the metal material ring 15 and the nickel thin film 12 are completely bonded, the press 7 is operated to remove the upper mold ring 71. Is driven downward along the outer peripheral surface of the metal material ring 15, and the FEP film-coated nickel-plated aluminum substrate 14 is punched. This allows
A nickel thin film electret vibration film having the metal material ring 15 as a support ring is formed. FIG. 5C is a diagram showing a cross section of the nickel thin film electret vibration film.

Here, the aluminum substrate 11 does not exist in the nickel thin film electret vibration film of FIG. 5C.
However, since the diameter of the ring punch 71 of the upper mold is configured to be very slightly larger than the outer diameter of the metal material ring 15, the aluminum substrate 11 must be provided on the lower outer peripheral edge of the metal material ring 15 in this punching. Traces remain, and it is determined that this nickel thin film electret vibration film was manufactured by the above-described steps.

[0023]

As described above, according to the present invention, a nickel thin film is formed on one surface of a metal material substrate, and an electretized material film is formed on the surface of the nickel thin film. Etching and removing a partial area of the other surface of the above, exposing the nickel thin film, joining the vibrating membrane ring to the exposed nickel thin film, and punching out a metal material substrate along the outer peripheral surface of the vibrating membrane ring to form an electrostatic electroacoustic A vibration film for a conversion element is formed.

Thus, the vibrating membrane for the electrostatic electroacoustic transducer can be made of a relatively thick nickel thin film having a thickness of 1 to 2 μm. Therefore, by adjusting and designing the thickness of the vibrating film within the range of the film thickness, the resonance frequency of the vibrating film can be set high, and an electrostatic electroacoustic transducer having a wide frequency characteristic can be designed and configured. be able to. Since the vibration film is formed of a nickel thin film, the vibration film has excellent heat resistance. Due to the increased heat resistance of the vibrating membrane, a reflow soldering manufacturing process can be adopted when mounting and assembling an electrostatic electroacoustic transducer configured using the vibrating thin film on a circuit board. As a result, it is possible to provide an inexpensive electrostatic electroacoustic transducer with improved quality performance, high productivity, and low cost.

In addition, since the heat resistance of the vibrating film is increased, silicon oxide, which is an inorganic material, can be formed on the nickel thin film by the CVD method as the electret material thin film. This makes it possible to further increase the heat resistance of the electrostatic electroacoustic transducer.

[Brief description of the drawings]

FIG. 1 is a view for explaining a method of forming a nickel thin film on a metal material substrate.

FIG. 2 is a view for explaining a method of forming an electretized material film on a nickel thin film.

FIG. 3 is a view for explaining a method of forming a FEP layer by spraying a FEP solution on a surface of an aluminum substrate.

FIG. 4 is a diagram illustrating a method of forming a vibrating membrane.

FIG. 5 is a diagram illustrating details of FIG. 4;

FIG. 6 is a diagram illustrating a preceding example.

[Explanation of symbols]

Reference Signs List 1 aluminum substrate roll 1 'nickel-plated aluminum substrate roll 10 FEP film-coated nickel-plated aluminum substrate roll 100 substrate take-up roll 11 aluminum substrate 12 nickel thin film 13 nickel-plated aluminum substrate 131 circular region 131' etched recess 14 FEP film-coated nickel-plated aluminum Substrate 15 Metal material ring 2 Nickel electroless plating tank 3 FEP film roll 31 FEP film 4 Welding tank 5 Etching tank 6 Drying furnace 7 Press 8 Mask

Continued on the front page (72) Inventor Yasuo Sugimori 1-4-3 Kitakyuho-ji Temple, Yao-shi, Osaka F-Side Co., Ltd. F-term (reference) 5D021 CC03 CC04

Claims (12)

[Claims] A nickel thin film is formed on one surface of a metal material substrate, an electretized material film is formed on a surface of the nickel thin film, and a partial region of the other surface of the metal material substrate is removed by etching. Manufacturing a vibrating membrane for an electro-acoustic electro-acoustic transducer, characterized by exposing a nickel thin film by welding, joining a vibrating membrane ring to the exposed nickel thin film, and punching a metal material substrate along an outer peripheral surface of the vibrating membrane ring. Method. 2. A method for manufacturing a vibrating membrane for an electrostatic electroacoustic transducer according to claim 1, wherein a nickel thin film is plated on a surface of the metal material substrate while the metal material substrate is continuously pulled out from the metal material substrate roll. Then
An electretized material coating is formed on the nickel thin film while continuously pulling out the nickel-plated metal material substrate from the nickel-plated metal material substrate roll to form an electretized material-coated nickel-plated metal material substrate. A method for manufacturing a vibrating membrane for an electrostatic electroacoustic transducer. 3. The method for manufacturing a vibrating film for an electrostatic electroacoustic transducer according to claim 1, wherein the metal material substrate is made of an aluminum substrate. Manufacturing method. 4. The method for manufacturing a vibrating membrane for an electrostatic electroacoustic transducer according to any one of claims 1 to 3, wherein the electretized material film is formed by joining an electretized material film, or A method for producing a vibrating membrane for an electrostatic electroacoustic transducer, comprising applying and firing a solution of an electret material, or vapor-depositing an electret material. 5. The method for producing a vibrating membrane for an electrostatic electroacoustic transducer according to claim 1, wherein the electret material is a tetrafluoroethylene-hexafluoropropylene copolymer. A method for producing a vibrating membrane for an electrostatic electro-acoustic transducer, wherein the vibrating membrane is selected from the group consisting of coalesced, perfluoroalkoxy fluororesin, amorphous Teflon, and silicon oxide. 6. The method for producing a vibrating membrane for an electrostatic electroacoustic transducer according to claim 2, wherein the nickel-plated metal substrate coated with an electret material is continuously rolled from its roll. A method of manufacturing a vibrating membrane for an electrostatic electroacoustic transducer, wherein a partial region on the other surface of a metal material substrate is etched away while being pulled out, a vibrating membrane ring is joined, and the metal material substrate is punched out. 7. A metal material substrate having a nickel thin film formed on one surface, an electretized material film formed on the surface of the nickel thin film, and a partial region on the other surface of the metal material substrate is removed and exposed. A vibrating membrane for an electrostatic electroacoustic transducer, wherein a vibrating membrane ring is joined to a thinned nickel thin film, and a metal material substrate is punched out along an outer peripheral surface of the vibrating membrane ring. 8. The vibration film for an electrostatic electroacoustic transducer according to claim 7, wherein the metal material substrate is made of an aluminum substrate. 9. The vibrating membrane for an electrostatic electroacoustic transducer according to claim 7, wherein the electretized material is a tetrafluoroethylene-hexafluoropropylene copolymer, A vibrating membrane for an electrostatic electroacoustic transducer, wherein the vibrating membrane is any one selected from an alkoxy fluororesin, amorphous Teflon, and silicon oxide. 10. A metal material substrate having a nickel thin film formed on one surface, an electretized material film formed on the surface of the nickel thin film, and a partial region on the other surface of the metal material substrate is removed and exposed. An electrostatic electro-acoustic transducer comprising: a vibrating film formed by joining a vibrating film ring to a thinned nickel thin film and punching a metal material substrate along an outer peripheral surface of the vibrating film ring. 11. The electrostatic electroacoustic transducer according to claim 10, wherein the metal material substrate is made of an aluminum substrate. 12. The electrostatic electroacoustic transducer according to claim 10, wherein the electret material is a tetrafluoroethylene-hexafluoropropylene copolymer, a perfluoroalkoxy fluororesin, An electrostatic electroacoustic transducer characterized by being selected from amorphous Teflon and silicon oxide.