JP3536593B2 - Surface coated cemented carbide cutting tool with excellent wear resistance with hard coating layer - Google Patents

Surface coated cemented carbide cutting tool with excellent wear resistance with hard coating layer

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Publication number
JP3536593B2
JP3536593B2 JP15231497A JP15231497A JP3536593B2 JP 3536593 B2 JP3536593 B2 JP 3536593B2 JP 15231497 A JP15231497 A JP 15231497A JP 15231497 A JP15231497 A JP 15231497A JP 3536593 B2 JP3536593 B2 JP 3536593B2
Authority
JP
Japan
Prior art keywords
cemented carbide
coating layer
hard coating
cutting tool
coated cemented
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP15231497A
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Japanese (ja)
Other versions
JPH111762A (en
Inventor
俊克 須藤
徹也 田中
恵一 桜井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
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Mitsubishi Materials Corp
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Filing date
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Priority to JP15231497A priority Critical patent/JP3536593B2/en
Publication of JPH111762A publication Critical patent/JPH111762A/en
Application granted granted Critical
Publication of JP3536593B2 publication Critical patent/JP3536593B2/en
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Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、硬質被覆層がす
ぐれた耐摩耗性を有し、したがって例えば鋼などの連続
切削や断続切削で長期に亘ってすぐれた切削性能を発揮
し、工具寿命の延命化を可能ならしめる表面被覆超硬合
金製切削工具(以下、被覆超硬工具と云う)に関するも
のである。
BACKGROUND OF THE INVENTION The present invention relates to a hard coating layer having excellent wear resistance, and therefore, exhibits excellent cutting performance over a long period of time in continuous cutting or intermittent cutting of steel, for example, and has a long tool life. The present invention relates to a cutting tool made of a surface-coated cemented carbide (hereinafter, referred to as a coated cemented carbide tool) capable of extending the life.

【0002】[0002]

【従来の技術】従来、一般に、例えば図3に概略説明図
で示される物理蒸着装置の1種であるアークイオンプレ
ーティング装置を用い、ヒータで装置内を、例えば雰囲
気を20mtorrの真空として、500℃の温度に加
熱した状態で、アノード電極と所定組成を有するTi−
Al合金がセットされたカソード電極(蒸発源)との間
に、例えば電圧:35V、電流:90Aの条件でアーク
放電を発生させ、同時に装置内に反応ガスとして窒素ガ
スを導入し、一方炭化タングステン(以下、WCで示
す)基超硬合金または炭窒化チタン(以下、TiCNで
示す)基サーメットからなる基体(以下、これらを総称
して超硬基体と云う)には、例えば−200Vのバイア
ス電圧を印加した条件で、前記超硬合金基体の表面に、
例えば特開昭62−56565号公報に記載されるよう
に、TiとAlの複合窒化物[以下、(Ti,Al)N
で示す]で構成された硬質被覆層を2〜20μmの平均
層厚で蒸着することにより被覆超硬工具を製造すること
が知られている。また、これらの被覆超硬工具が、例え
ば鋼などの連続切削や断続切削に用いられることも良く
知られるところである。
2. Description of the Related Art Conventionally, an arc ion plating apparatus, which is a kind of physical vapor deposition apparatus schematically shown in FIG. 3, is generally used, and the inside of the apparatus is heated to 500 mtorr, for example, by a heater. In the state heated to a temperature of ° C., the anode electrode and Ti-
An arc discharge is generated between the cathode electrode (evaporation source) on which the Al alloy is set, for example, under the conditions of a voltage: 35 V and a current: 90 A, and at the same time, nitrogen gas is introduced into the apparatus as a reaction gas, while tungsten carbide is introduced. A substrate made of a base cemented carbide (hereinafter referred to as WC) or a cermet based on titanium carbonitride (hereinafter referred to as TiCN) (hereinafter, these are collectively referred to as a cemented carbide) has a bias voltage of -200 V, for example. Under the conditions of applying, the surface of the cemented carbide substrate,
For example, as described in JP-A-62-56565, a composite nitride of Ti and Al [hereinafter, (Ti, Al) N
It is known to produce a coated cemented carbide tool by depositing a hard coating layer constituted by the following formula with an average layer thickness of 2 to 20 μm. It is also well known that these coated carbide tools are used for continuous cutting or interrupted cutting of steel, for example.

【0003】[0003]

【発明が解決しようとする課題】一方、近年の切削装置
のFA化はめざましく、かつ切削加工の低コスト化に対
する要求も強く、これに伴い、切削工具には使用寿命の
延命化が強く望まれているが、上記の従来被覆超硬工具
は、これらの要求に十分満足に対応できるだけの耐摩耗
性を具備するものではなく、したがってより一段と長い
使用寿命を示す被覆超硬工具の開発が望まれている。
On the other hand, in recent years, the use of FA in cutting devices has been remarkable, and there has been a strong demand for lowering the cost of cutting. Accordingly, it has been strongly desired that cutting tools have a longer service life. However, the conventional coated carbide tools described above do not have sufficient wear resistance to meet these requirements, and therefore, there is a demand for the development of coated carbide tools that exhibit a longer service life. ing.

【0004】[0004]

【課題を解決するための手段】そこで、本発明者等は、
上述のような観点から、上記の従来被覆超硬工具を構成
する硬質被覆層に着目し、特にこれの耐摩耗性向上を図
るべく研を行った結果、 (a)一般に上記の従来被覆超硬工具の硬質被覆層を構
成する(Ti,Al)Nは、上記の通り図3に例示され
るアークイオンプレーティング装置を用い、 雰囲気圧力(真空度):5〜30mtorr、 雰囲気温度:300〜700℃、 アーク放電電流:80〜100A、 アーク放電電圧:10〜50V、 基体へのバイアス電圧:−150〜−300V、 とした条件で形成されていること。 (b)上記(a)の蒸着手段で形成された(Ti,A
l)N層が硬質被覆層を構成する被覆超硬工具は、Cu
kα線を線源として用いたX線回折で、図2に例示され
るX線回折パターンを示し、図2に示される通り35.
5〜37.5度、42.5〜44.5度、および61.
5〜64.5度のそれぞれの範囲内の回折角(2θ)に
回折ピークが現れるが、これらの回折ピークのうちの3
5.5〜37.5度の範囲内の回折角(2θ)に最高回
折ピーク高さが現れること。 (c)同じく図3に例示されるアークイオンプレーティ
ング装置において、これのカソード電極(蒸発源)にセ
ットされるTi−Al合金の組成を、組成式:(Ti
1−X Al)N(ただし、Xは原子比で0.3〜
0.5を示す)を満足する硬質被覆層が得られる組成に
特定した上で、上記(a)の蒸着条件のうち、アーク放
電電流およびバイアス電圧をいずれも上げて、それぞれ
200〜250Aおよび−30〜−80Vとし、その他
の条件は同じとした条件、すなわち、 雰囲気圧力(真空度):5〜30mtorr、 雰囲気温度:300〜700℃、 アーク放電電流:200〜250A、 アーク放電電圧:10〜50V、 基体へのバイアス電圧:−30〜−80V、 とした条件で、超硬基体の表面に1〜10μmの平均層
厚で(Ti,Al)N層の形成を行うと、この(Ti,
Al)N層が形成された被覆超硬工具は切削加工できわ
めいすぐれた耐摩耗性を長期に亘って発揮すること。 (d)上記(c)の蒸着条件で形成された(Ti,A
l)N層を硬質被覆層とする被覆超硬工具を、上記
(b)におけると同じくCukα線を線源として用いた
X線回折で観察すると、図1に例示されるX線回折パタ
ーンを示し、図1に示される通り硬質被覆層を構成する
(Ti,Al)Nは42.5〜44.5度の範囲内の回
折角(2θ)に最高回折ピーク高さが現れるようになる
こと。 以上(a)〜(d)に示される研究結果を得たのであ
る。
Means for Solving the Problems Accordingly, the present inventors have
From the above-mentioned viewpoints, attention was paid to the hard coating layer constituting the above-mentioned conventional coated carbide tool, and in particular, the grinding was carried out to improve the wear resistance thereof. (Ti, Al) N constituting the hard coating layer of the tool is obtained by using the arc ion plating apparatus illustrated in FIG. 3 as described above, the atmospheric pressure (degree of vacuum): 5 to 30 mtorr, and the atmospheric temperature: 300 to 700. C., arc discharge current: 80 to 100 A, arc discharge voltage: 10 to 50 V, bias voltage to the substrate: -150 to -300 V. (B) (Ti, A) formed by the vapor deposition means of (a) above
1) The coated carbide tool in which the N layer constitutes the hard coating layer is Cu
In X-ray diffraction using kα ray as a radiation source, an X-ray diffraction pattern exemplified in FIG. 2 is shown, and as shown in FIG.
5-37.5 degrees, 42.5-44.5 degrees, and 61.
Diffraction peaks appear at diffraction angles (2θ) in the respective ranges of 5 to 64.5 degrees.
The highest diffraction peak height appears at a diffraction angle (2θ) within the range of 5.5 to 37.5 degrees. (C) In the arc ion plating apparatus also illustrated in FIG. 3, the composition of the Ti—Al alloy set on the cathode electrode (evaporation source) of the apparatus is represented by a composition formula: (Ti
1-X Al X ) N (where X is an atomic ratio of 0.3 to
0.5 ), and the arc discharge current and the bias voltage were increased in the deposition conditions of the above (a) to 200 to 250 A and −200 A, respectively. 30 to -80 V, and other conditions were the same, that is, atmosphere pressure (degree of vacuum): 5 to 30 mtorr, atmosphere temperature: 300 to 700 ° C, arc discharge current: 200 to 250 A, arc discharge voltage: 10 When a (Ti, Al) N layer is formed on the surface of the cemented carbide substrate at an average layer thickness of 1 to 10 μm under the conditions of 50 V and a bias voltage to the substrate of −30 to −80 V, the (Ti, Al)
The coated carbide tool on which the Al) N layer is formed exhibits excellent wear resistance over a long period of time by cutting. (D) (Ti, A) formed under the vapor deposition conditions of (c) above.
1) When the coated carbide tool having the N layer as the hard coating layer is observed by X-ray diffraction using the Cukα ray as the radiation source as in (b) above, an X-ray diffraction pattern exemplified in FIG. 1 is obtained. As shown in FIG. 1, (Ti, Al) N constituting the hard coating layer has a maximum diffraction peak height at a diffraction angle (2θ) within the range of 42.5 to 44.5 degrees. The research results shown in (a) to (d) above were obtained.

【0005】この発明は、上記の研究結果に基づいてな
されたものであって、超硬基体の表面に、蒸着条件のう
ちのアーク放電電流を200〜250A、および基体へ
のバイアス電圧を−30〜−80Vとした条件でアーク
イオンプレーティング形成され、かつ組成式:(Ti
1−X Al)N(ただし、Xは原子比で0.3〜
0.5を示す)を有する(Ti,Al)Nからなる硬質
被覆層を1〜10μmの平均層厚で物理蒸着してなる被
覆超硬工具にして、Cukα線を線源として用いた上記
被覆超硬工具のX線回折で、上記硬質被覆層を構成する
上記(Ti,Al)Nの回折ピークのうち、42.5〜
44.5度の範囲内の回折角(2θ)に最高回折ピーク
高さが現れるX線回折パターンを示してなる、硬質被覆
層がすぐれた耐摩耗性を有する被覆超硬工具に特徴を有
するものである。
The present invention has been made based on the results of the above-mentioned research, and is based on the conditions of vapor deposition on the surface of a superhard substrate.
200-250 A of arc discharge current to the substrate
Is formed under the condition of a bias voltage of −30 to −80 V , and a composition formula: (Ti
1-X Al X) N (provided that, X is 0. 3 in atomic ratio
0.5 ) and a hard coating layer made of (Ti, Al) N having an average layer thickness of 1 to 10 μm to form a coated carbide tool, and using the Cukα ray as a radiation source. Among the diffraction peaks of (Ti, Al) N constituting the hard coating layer by X-ray diffraction of a carbide tool, 42.5 to
Characterized by a coated carbide tool having a hard coating layer with excellent wear resistance, showing an X-ray diffraction pattern in which the highest diffraction peak height appears at a diffraction angle (2θ) within the range of 44.5 degrees. It is.

【0006】なお、この発明の被覆超硬工具において、
硬質被覆層を構成する(Ti,Al)NのAlはTiC
Nに対して硬さを高め、もって耐摩耗性を向上させるた
めに固溶するものであり、したがって組成式:(Ti
1−X Al )NのX値が0.3未満では所望の耐
摩耗性を確保することができず、一方その値が0.5
越えると、切刃にチッピングが発生し易くなると云う理
由によりX値を0.3〜0.5(原子比)と定めたので
ある。また、同じく硬質被覆層の平均層厚を1〜10μ
mとしたのは、その層厚が1μm未満では所望のすぐれ
た耐摩耗性を確保することができず、一方その層厚が1
0μmを越えると切刃に欠けやチッピングが発生し易く
なると云う理由によるものである。さらに、この発明の
被覆超硬工具に、これの使用前および使用後の識別を容
易にするために、最表面層として金色の色調を有する窒
化チタン(TiN)層を0.1〜1μmの平均層厚で蒸
着してもよい。
[0006] In the coated carbide tool of the present invention,
Al of (Ti, Al) N constituting the hard coating layer is TiC
N to form a solid solution in order to increase the hardness with respect to N and thereby improve the wear resistance.
If the X value of 1-X Al X ) N is less than 0.3, the desired wear resistance cannot be secured, while if the X value exceeds 0.5 , chipping tends to occur on the cutting edge. For this reason, the X value was determined to be 0.3 to 0.5 (atomic ratio). Also, the average thickness of the hard coating layer is 1 to 10 μm.
The reason why m is that if the layer thickness is less than 1 μm, the desired excellent wear resistance cannot be secured, while the layer thickness is 1 μm.
This is because if it exceeds 0 μm, chipping and chipping of the cutting edge are likely to occur. Furthermore, in order to facilitate the discrimination before and after use of the coated cemented carbide tool of the present invention, a titanium nitride (TiN) layer having a golden color tone as an outermost surface layer has an average thickness of 0.1 to 1 μm. It may be deposited with a layer thickness.

【0007】[0007]

【発明の実施の形態】ついで、この発明の被覆超硬工具
を実施例により具体的に説明する。原料粉末として、い
ずれも1〜3μmの平均粒径を有するWC粉末、TiC
粉末、VC粉末、TaC粉末、NbC粉末、Cr3 2
粉末、TiN粉末、TaN粉末、およびCo粉末を用意
し、これら原料粉末を、表1に示される配合組成に配合
し、ボールミルで72時間湿式混合し、乾燥した後、
1.5ton/cm2 の圧力で圧粉体にプレス成形し、
この圧粉体を真空中、温度:1400℃に1時間保持の
条件で焼結し、焼結後、切刃部分にR:0.05のホー
ニング加工を施してISO規格・SPGA120408
のチップ形状をもったWC基超硬合金製の超硬基体A−
1〜A−7を形成した。また、原料粉末として、いずれ
も0.5〜2μmの平均粒径を有するTiCN(重量比
でTiC/TiN=50/50)粉末、Mo2 C粉末、
TaC粉末、WC粉末、Co粉末、およびNi粉末を用
意し、これら原料粉末を、表2に示される配合組成に配
合し、ボールミルで24時間湿式混合し、乾燥した後、
1ton/cm2 の圧力で圧粉体にプレス成形し、この
圧粉体を10torrの窒素雰囲気中、温度:1540
℃に1時間保持の条件で焼結し、焼結後、切刃部分に
R:0.03のホーニング加工を施してISO規格・S
EKN1203AFEN1のチップ形状をもったTiC
N系サーメット製の超硬基体B−1〜B−3を形成し
た。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the coated carbide tool of the present invention will be specifically described with reference to examples. WC powder, TiC, each having an average particle size of 1 to 3 μm, as raw material powders
Powder, VC powder, TaC powder, NbC powder, Cr 3 C 2
Powder, TiN powder, TaN powder, and Co powder were prepared, and these raw material powders were blended in the blending composition shown in Table 1, wet-mixed for 72 hours in a ball mill, and dried.
Press molding into a green compact with a pressure of 1.5 ton / cm 2 ,
This green compact is sintered in a vacuum at a temperature of 1400 ° C. for one hour, and after sintering, the cutting edge portion is subjected to a honing process of R: 0.05 to obtain ISO standard SPGA120408.
Carbide substrate A- made of WC-based cemented carbide with a chip shape of
1 to A-7 were formed. As raw material powders, TiCN (TiC / TiN = 50/50 by weight) powder, Mo 2 C powder, each having an average particle size of 0.5 to 2 μm,
A TaC powder, a WC powder, a Co powder, and a Ni powder were prepared, and these raw material powders were blended in the composition shown in Table 2, wet-mixed in a ball mill for 24 hours, and dried.
A green compact is press-formed at a pressure of 1 ton / cm 2 , and the green compact is pressed in a nitrogen atmosphere of 10 torr at a temperature of 1540.
Sintering under the condition of holding at 1 ° C. for 1 hour. After sintering, the cutting edge is subjected to a honing process of R: 0.03 to conform to ISO standard S
TiC with chip shape of EKN1203AFEN1
Carbide substrates B-1 to B-3 made of N-based cermet were formed.

【0008】ついで、これら超硬基体A−1〜A−7
よびB−1〜B−3を、アセトン中で超音波洗浄し、乾
燥した状態で、それぞれ第3図に例示される通常のアー
クイオンプレーティング装置に装入し、一方カソード電
極(蒸発源)として種々の成分組成をもったTi−Al
合金を装着し、装置内を排気して1×10-5torrの
真空に保持しながら、ヒーターで装置内を500℃に加
熱した後、Arガスを装置内に導入して1×10-3to
rrのAr雰囲気とし、この状態で超硬基体に−800
vのバイアス電圧を印加して超硬基体表面をArガスボ
ンバート洗浄し、ついで装置内に反応ガスとして窒素ガ
スを導入して、それぞれ表3、4に示される反応雰囲気
温度を保持しながら、同じく表3、4に示される反応雰
囲気(真空度)とすると共に、前記超硬基体に印加する
バイアス電圧を下げて、表3、4に示される電圧とし、
かつアーク放電電流およびアーク放電電圧をそれぞれ同
じく表3、4に示される条件として、前記カソード電極
とアノード電極との間にアーク放電を発生させ、もって
前記超硬基体A−1〜A−7およびB−1〜B−3のそ
れぞれの表面に、同じく表3、4に示されるX値および
平均層厚をもった(Ti,Al)Nからなる硬質被覆層
を蒸着することにより本発明被覆超硬工具1〜10およ
び従来被覆超硬工具1〜10をそれぞれ製造した。この
結果得られた各種の被覆超硬工具について、その硬質被
覆層表面をCukα線を線源として用いたX線回折で観
察したところ、蒸着条件のうちのアーク放電電流および
バイアス電圧を相対的に高くして(Ti,Al)N層を
形成した本発明被覆超硬工具1〜10は、いずれも(T
i,Al)Nの回折ピークのうち、42.5〜44.5
度の範囲内の回折角(2θ)に最高回折ピーク高さが現
れるX線回折パターンを示し、一方蒸着条件のうちのア
ーク放電電流およびバイアス電圧が相対的に低い、従来
蒸着条件で(Ti,Al)N層を形成した従来被覆超硬
工具1〜10は、いずれも(Ti,Al)Nの回折ピー
クのうち、35.5〜37.5度の範囲内の回折角(2
θ)に最高回折ピーク高さが現れるX線回折パターンを
示した。なお、図1が本発明被覆超硬工具2のX線回折
パターンを示し、図2が従来被覆超硬工具2のX線回折
パターンを示すものである。
[0008] Next, these super-hard substrates A-1 to A-7 and B-1 to B-3 are ultrasonically cleaned in acetone and dried, and each of the conventional arcs illustrated in FIG. Ti-Al having various component compositions as a cathode electrode (evaporation source) was charged into an ion plating apparatus.
After mounting the alloy and evacuating the inside of the apparatus to maintain a vacuum of 1 × 10 −5 torr, the inside of the apparatus was heated to 500 ° C. with a heater, and then Ar gas was introduced into the apparatus to obtain 1 × 10 −3. to
rr in an Ar atmosphere, and in this state, -800
Applying a bias voltage of v to clean the surface of the cemented carbide substrate with Ar gas bombardment, then introducing nitrogen gas as a reaction gas into the apparatus, and while maintaining the reaction atmosphere temperatures shown in Tables 3 and 4, respectively, In addition to the reaction atmosphere (degree of vacuum) shown in Tables 3 and 4, the bias voltage applied to the carbide substrate was lowered to the voltage shown in Tables 3 and 4,
The arc discharge current and the arc discharge voltage are set to the conditions shown in Tables 3 and 4, respectively, and arc discharge is generated between the cathode electrode and the anode electrode, whereby the carbide substrates A-1 to A-7 and By coating a hard coating layer of (Ti, Al) N having an X value and an average layer thickness also shown in Tables 3 and 4 on the respective surfaces of B-1 to B-3, the coating of the present invention is superposed. Hard tools 1 to 10 and conventional coated carbide tools 1 to 10 were produced, respectively. When the surface of the hard coating layer of each of the coated carbide tools obtained as a result was observed by X-ray diffraction using a Cukα ray as a radiation source, the arc discharge current and the bias voltage among the deposition conditions were relatively determined. The coated carbide tools 1 to 10 of the present invention in which the (Ti, Al) N layer was
Among the diffraction peaks of i, Al) N, 42.5 to 44.5
5 shows an X-ray diffraction pattern in which the highest diffraction peak height appears at a diffraction angle (2θ) within a range of degrees, while the arc discharge current and the bias voltage of the deposition conditions are relatively low, and the conventional deposition conditions (Ti, The conventional coated cemented carbide tools 1 to 10 on which the Al) N layer is formed have diffraction angles (2, 35.5 to 37.5 degrees) of the diffraction peaks of (Ti, Al) N.
The X-ray diffraction pattern at which the highest diffraction peak height appears at θ) was shown. FIG. 1 shows an X-ray diffraction pattern of the coated carbide tool 2 of the present invention, and FIG. 2 shows an X-ray diffraction pattern of the conventionally coated carbide tool 2.

【0009】つぎに、この結果得られた本発明被覆超硬
工具1〜および従来被覆超硬工具1〜については、 被削材:SCM440(硬さ:HB 220)の角材、 切削速度:120m/min.、 切込み:2.5mm、 送り:0.25mm/刃、 の条件での合金鋼の乾式断続切削(フライス切削)試験
を行ない、また本発明被覆超硬工具8〜10および従来
被覆超硬工具8〜10については、 被削材:SNCM440(硬さ:HB 220)の角材、 切削速度:300m/min.、 切込み:2mm.、 送り:0.15mm/刃、 の条件での合金鋼の乾式断続切削(フライス切削)試験
を行い、いずれの切削試験でも切刃の逃げ面摩耗幅が
0.2mmに至るまでの切削時間を測定した。これらの
測定結果を表3、4に示した。
[0009] Next, the present invention coated cemented carbide tool 1-7 and the conventional coated cemented carbide tools 1 to 7 in which the results obtained are Workpiece: SCM440 (hardness: HB 220) square bar of cutting speed: 120 m / min. , Depth of cut: 2.5 mm, feed: 0.25 mm / tooth, a dry interrupted cutting (milling) test of alloy steel was performed, and the coated carbide tools 8 to 10 of the present invention and the conventionally coated carbide tools 8 About 10 to 10 , Work material: Square material of SNCM440 (hardness: HB220), Cutting speed: 300 m / min. , Notch: 2 mm. , Feed: 0.15mm / tooth, dry intermittent cutting (milling) test of alloy steel under the conditions of: In any cutting test, the cutting time until the flank wear width of the cutting edge reaches 0.2mm It was measured. Tables 3 and 4 show the measurement results.

【0010】[0010]

【表1】 [Table 1]

【0011】[0011]

【表2】 [Table 2]

【0012】[0012]

【表3】 [Table 3]

【0013】[0013]

【表4】 [Table 4]

【0014】[0014]

【発明の効果】表3、4に示される結果から、本発明被
覆超硬工具1〜10は、いずれも従来被覆超硬工具1〜
10に比してすぐれた耐摩耗性を発揮し、長い使用寿命
を示すことが明らかである。上述のように、この発明の
被覆超硬工具は、この種の従来被覆超硬工具に比して長
い使用寿命を示すので、切削装置のFA化および切削加
工の低コスト化に十分満足に対応することができるもの
である。
According to the results shown in Tables 3 and 4, all of the coated carbide tools 1 to 10 of the present invention are the same as those of the conventional coated carbide tools 1 to 10 .
It is evident that it exhibits excellent wear resistance as compared to No. 10 and has a long service life. As described above, the coated carbide tool of the present invention has a longer service life than this type of conventional coated carbide tool. Is what you can do.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明被覆超硬工具1のX線回折パターンを示
す図である。
FIG. 1 is a view showing an X-ray diffraction pattern of a coated carbide tool 1 of the present invention.

【図2】従来被覆超硬工具1のX線回折パターンを示す
図である。
FIG. 2 is a view showing an X-ray diffraction pattern of a conventional coated carbide tool 1.

【図3】アークイオンプレーティング装置の概略説明図
である。
FIG. 3 is a schematic explanatory view of an arc ion plating apparatus.

フロントページの続き (72)発明者 桜井 恵一 茨城県結城郡石下町大字古間木1511番地 三菱マテリアル株式会社 筑波製作所 内 (56)参考文献 特開 平8−209333(JP,A) 特開 平8−127862(JP,A) 特開 平6−122959(JP,A) 特開 平6−322517(JP,A) 池田 外1名,PVD法によって作製 したTi−Al−N系硬質膜の高温酸化 特性と耐摩耗性,日本金属学会誌,日 本,1993年,第57巻/第8号,p.919 −925 (58)調査した分野(Int.Cl.7,DB名) C23C 14/00 - 14/58 B23B 27/14 B23P 15/28 Continuation of front page (72) Inventor Keiichi Sakurai 1511 Furamaki, Ishishita-cho, Yuki-gun, Ibaraki Prefecture Mitsubishi Materials Corporation Tsukuba Works (56) References JP-A-8-209333 (JP, A) JP-A-8- 127862 (JP, A) JP-A-6-122959 (JP, A) JP-A-6-322517 (JP, A) Ikeda et al., High-temperature oxidation characteristics of Ti-Al-N-based hard films produced by PVD method And abrasion resistance, Journal of the Japan Institute of Metals, Japan, 1993, Vol. 57 / No. 8, p. 919 −925 (58) Field surveyed (Int.Cl. 7 , DB name) C23C 14/00-14/58 B23B 27/14 B23P 15/28

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 炭化タングステン基超硬合金基体または
炭窒化チタン系サーメット基体の表面に、蒸着条件のう
ちのアーク放電電流を200〜250A、および基体へ
のバイアス電圧を−30〜−80Vとした条件でアーク
イオンプレーティング形成され、かつ組成式:(Ti
1−X Al)N(ただし、Xは原子比で0.3〜
0.5を示す)を有するTiとAlの複合窒化物からな
る硬質被覆層を1〜10μmの平均層厚で物理蒸着して
なる表面被覆超硬合金製切削工具にして、Cukα線を
線源として用いた上記表面被覆超硬合金製切削工具のX
線回折で、上記硬質被覆層を構成する上記TiとAlの
複合窒化物の回折ピークのうち、42.5〜44.5度
の範囲内の回折角(2θ)に最高回折ピーク高さが現れ
るX線回折パターンを示すことを特徴とする硬質被覆層
がすぐれた耐摩耗性を有する表面被覆超硬合金製切削工
具。
1. The method according to claim 1, wherein the surface of a tungsten carbide-based cemented carbide substrate or a titanium carbonitride-based cermet substrate is subjected to vapor deposition conditions.
200-250 A of arc discharge current to the substrate
Is formed under the condition of a bias voltage of −30 to −80 V , and a composition formula: (Ti
1-X Al X ) N (where X is an atomic ratio of 0.3 to
0.5 ) and a hard coating layer made of a composite nitride of Ti and Al having a mean thickness of 1 to 10 μm as a surface coated cemented carbide cutting tool. X of the above surface-coated cemented carbide cutting tool used as
The highest diffraction peak height appears at a diffraction angle (2θ) in the range of 42.5 to 44.5 degrees among the diffraction peaks of the composite nitride of Ti and Al constituting the hard coating layer by line diffraction. A cutting tool made of a surface-coated cemented carbide having a hard coating layer exhibiting an X-ray diffraction pattern and having excellent wear resistance.
JP15231497A 1997-06-10 1997-06-10 Surface coated cemented carbide cutting tool with excellent wear resistance with hard coating layer Expired - Fee Related JP3536593B2 (en)

Priority Applications (1)

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JP3536593B2 true JP3536593B2 (en) 2004-06-14

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Country Link
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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1029945A1 (en) * 1999-02-17 2000-08-23 Balzers Aktiengesellschaft Method for coating tools
JP4725773B2 (en) * 2004-12-27 2011-07-13 三菱マテリアル株式会社 Surface coated cermet cutting tool whose hard coating layer exhibits excellent chipping resistance in intermittent heavy cutting
JP4725774B2 (en) * 2004-12-27 2011-07-13 三菱マテリアル株式会社 Cutting tool made of surface-coated cubic boron nitride based sintered material whose hard coating layer exhibits excellent chipping resistance in intermittent heavy cutting of high hardness steel

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
池田 外1名,PVD法によって作製したTi−Al−N系硬質膜の高温酸化特性と耐摩耗性,日本金属学会誌,日本,1993年,第57巻/第8号,p.919−925

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