JP3521381B2 - Particle counting device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a particle counting device for counting the number of particles passing through a flow channel by discriminating the particle size.

[0002]

2. Description of the Related Art As a conventional particle counting device, as shown in FIG. 22, a laser beam La is irradiated onto an internal flow path of a flow cell 110, and when the particle passes through the internal flow path, the particle is emitted. The scattered light Ls is condensed on the photoelectric conversion element 112 by the condensing optical system 111, and based on the output signal of the photoelectric conversion element 112, the comparison circuit 113 and the pulse counting circuit 11
4, there is known a light scattering type particle counting device for counting the number of particles passing through the internal flow path by discriminating the particle size.

The photoelectric conversion element 112 outputs a pulsed voltage corresponding to the scattered light Ls emitted by the particles when the particles pass through the internal flow path. The peak value of this pulsed voltage is
It depends on the particle size. The comparison circuit 113 compares the output voltage of the photoelectric conversion element 112 with a predetermined value, and when the output voltage of the photoelectric conversion element 112 is larger than a predetermined value, outputs a pulse signal as being larger than the predetermined particle size. This pulse signal is counted by the pulse counting circuit 114 to detect the number of particles.

[0004]

However, in the light-scattering type particle counting device shown in FIG. 22, when the laser light intensity of the internal flow path irradiated with the laser light La is not constant, the discrimination of the particle diameter is erroneously counted. There is a problem of doing. The laser light intensity of the internal flow path is generally highest in the center of the laser beam,
In many cases, the distribution deviates from the center and becomes lower toward the ends (almost Gaussian distribution).

Therefore, even if the particle size and optical properties of the particles are the same, the intensity of the scattered light Ls of the particles is different between when passing through the end portion of the laser beam and when passing through the central portion. The output voltage of the photoelectric conversion element 112 is different. Therefore, the output signal of the comparison circuit 113 is also different, and the pulse counting circuit 114 may or may not count particles.

The present invention has been made in view of the above problems of the prior art, and an object of the present invention is to obtain a light intensity distribution in a measurement region for irradiating light.
An object of the present invention is to provide a particle counting device capable of accurately discriminating particle diameters and counting particles even if they are not uniform.

[0007]

In order to solve the above-mentioned problems, the invention according to claim 1 discloses a particle position detecting means for detecting a passage position of a particle passing through a light irradiation region, and a scattered light emitted from the particle. The scattered light detecting means for detecting the intensity and the output signal of the particle position detecting means determine whether or not the output signal is within a predetermined range of the irradiation area, and the output signal of the scattered light detecting means is a predetermined value or more. It is provided with a discriminating means for discriminating whether or not the pulse signal is outputted within the prescribed range and when it is equal to or larger than a prescribed value, and a counting means for counting the pulse signals outputted by the discriminating means.

According to a second aspect of the present invention, a light intensity distribution detecting means for detecting a light intensity distribution in a measurement area for irradiating light, and a particle position detecting means for detecting a passage position of particles passing through the measurement area, Scattered light detection means for detecting the intensity of scattered light emitted by the particles , a particle information reference table using the output signal of the light intensity distribution detection means using standard particles as a table and the output signal of the particle position detection means Reference means for calculating the correction value of the scattered light intensity of the particles based on the normalization means for correcting the output signal of the scattered light detection means based on the correction value, the output signal of the normalization means is a predetermined value A discriminating means for outputting a pulse signal at the above time and a counting means for counting the pulse signal output by the discriminating means are provided.

According to a third aspect of the present invention, in the particle counting apparatus according to the second aspect, the light intensity distribution detecting means irradiates the flow cell formed in a bent shape with a transparent member and the flow path of the flow cell with light. And a light source that forms a measurement region, a light collecting unit that has an optical axis that coincides with the central axis of the flow path, and collects scattered light of particles generated in the measurement region, and the light collecting unit collects light. The light detection means composed of a plurality of photoelectric conversion elements for receiving the scattered light, the voltage detection means for detecting the output signals of the plurality of photoelectric conversion elements, and the output signals of the voltage detection means are compared with each other and the particles pass through. The particle information detecting means for outputting the passing position data of the measurement region and the scattered light intensity data of the particles is provided.

According to a fourth aspect of the present invention, in the particle counting device according to the first, second or third aspect, the particle position detecting means includes a flow cell formed of a transparent member in a bent shape, and the flow cell of the flow cell. A light source that irradiates the channel with light to form a measurement region, and a condensing unit that condenses scattered light of particles generated in the measurement region with an optical axis that coincides with the central axis of the channel, The light detecting means composed of a plurality of photoelectric conversion elements for receiving the scattered light collected by the light collecting means, the voltage detecting means for detecting the output signals of the plurality of photoelectric conversion elements, and the output signal of the voltage detecting means It is provided with a position detecting means for comparing with each other and outputting passage position data of the measurement region where the particles have passed.

According to a fifth aspect of the present invention, in the particle counting apparatus according to the third or fourth aspect, in the light detecting means including the plurality of photoelectric conversion elements, each light receiving surface is perpendicular to the central axis of the flow path. The photoelectric conversion element array includes N (N is an integer of 2 or more) photoelectric conversion elements provided adjacent to each other in the direction substantially perpendicular to the central axis of the flow path and the optical axis of the light source.

According to a sixth aspect of the present invention, in the particle counting device according to the third or fourth aspect, the photo-detecting means including the plurality of photoelectric conversion elements has a vertical and horizontal length of V × H (V,
H is an integer of 2 or more) and each light receiving surface is perpendicular to the central axis of the flow path.

The invention according to claim 7 is the particle counting device according to claim 2, wherein the light intensity distribution detecting means is
A flow cell formed of a transparent member, a light source that irradiates the flow path of the flow cell with light to form a measurement region, and a scattering of particles that have an optical axis that coincides with the central axis of the light and that occur in the measurement region. Light collecting means for collecting light, a trap located on the optical axis of the light collecting means, a light detecting means comprising a plurality of photoelectric conversion elements for receiving scattered light collected by the light collecting means, Particles for outputting voltage detection means for detecting output signals of a plurality of photoelectric conversion elements, and comparison of output signals of the voltage detection means with each other and passing position data of the measurement region where particles have passed and scattered light intensity data of particles. The information detecting means is provided.

The invention according to claim 8 is the particle counting device according to claim 1, claim 2 or claim 7, wherein the particle position detecting means includes a flow cell formed of a transparent member and a flow path of the flow cell. A light source that irradiates light to form a measurement region, and a light condensing unit that has an optical axis that coincides with the central axis of the light and condenses scattered light of particles generated in the measurement region,
A trap located on the optical axis of the light converging means, a light detecting means including a plurality of photoelectric conversion elements for receiving the scattered light condensed by the light condensing means, and an output signal of the plurality of photoelectric conversion elements are detected. And a position detecting means for comparing the output signals of the voltage detecting means with each other and outputting passage position data of the measurement region where the particles have passed.

According to a ninth aspect of the present invention, in the particle counting apparatus according to the seventh or eighth aspect, the light detecting means including the plurality of photoelectric conversion elements has each light receiving surface perpendicular to the optical axis of the light source. And N provided adjacent to each other in a direction substantially perpendicular to the central axis of the flow path and the optical axis of the light source (N is an integer of 2 or more)
The photoelectric conversion element array is composed of individual photoelectric conversion elements.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the accompanying drawings. Here, FIG. 1 is a conceptual configuration diagram of the particle counting device according to the present invention, FIG. 2 is a configuration diagram of the particle counting device according to the first embodiment of the present invention, and FIG. 3 is the laser beam irradiation in FIG. Fig. 2 is a plan sectional view of the measurement area.
5 is a longitudinal sectional view of a measurement region irradiated with laser light in FIG.
9 is a diagram showing a light receiving state (a) of the photoelectric conversion element array in FIG. 2 and an output waveform (b) at that time, FIG. 10 is a diagram showing a particle information reference table, and FIG. 11 is a particle counting according to the present invention. 12 is a conceptual configuration diagram of the apparatus, FIG. 12 is a configuration diagram of a particle counting apparatus according to a second embodiment of the present invention, FIG. 13 is a diagram showing a particle information reference table, and FIG. 14 is a third embodiment of the present invention. 16 is a block diagram of a particle counting device according to the present invention, FIG. 15 is a block diagram of a particle counting device according to a fourth embodiment of the present invention, FIG.
15 is a vertical cross-sectional view of the measurement region irradiated with laser light in FIG. 15, and FIGS. 17 to 21 are views showing a light receiving state (a) of the photoelectric conversion element array in FIG. 15 and an output waveform (b) at that time.

The particle counting device according to the present invention, as shown in FIG. 1, detects a particle position detecting means 2 for detecting a passage position of a particle passing through a light irradiation region and an intensity of scattered light emitted by the particle. Based on the magnitudes of the output signals of the scattered light detecting means 3 and the particle position detecting means 2, it is determined whether or not the particle passing position is within a predetermined range of the irradiation area, and the output signal of the scattered light detecting means 3 is predetermined. It is provided with a discriminating means 8 for discriminating whether or not the value is equal to or more than a value and outputting a pulse signal within a predetermined range and in the case of being equal to or more than the predetermined value, and a counting means 7 for counting the pulse signal output by the discriminating means 8. Composed.

The particle counting device according to the first embodiment of the present invention is constructed as shown in FIG. This particle counting device measures only particles that pass through the central portion where the difference in light intensity is small among the measurement areas irradiated with light.

The particle position detecting means 2 comprises a flow cell 11,
It comprises a laser light source 12, a condensing optical system 13, a photoelectric conversion element array 14, peak value detecting means 16a, 16b, 16c and a position detecting means 18.

The scattered light detecting means 3 comprises a condensing optical system 13, a photoelectric conversion element array 14, and peak value detecting means 16a, 16a.
b, 16c and particle information detecting means 17.
The peak value detecting means 16a, 16b, 16c, the particle information detecting means 17, the position detecting means 18, the discriminating means 8 and the counting means 7 serve as a processing device 15.

The flow cell 11 is made of a transparent member, has a linear flow path 11a of a predetermined length, and is bent as a whole. The flow cell 11 has a quadrangular cross section and is formed in an L-shaped tubular shape as a whole. The central axis of the straight flow path 11a coincides with the X direction.

The reason why the linear flow path 11a having a predetermined length is provided is that the flow of the test fluid is laminar when the test fluid is flown through the flow cell 11. The conditions for obtaining the laminar flow include the viscosity of the sample fluid, the length of the linear flow passage, the cross-sectional shape of the flow passage, the flow velocity, and the like.
The length and the cross-sectional shape of the flow path are determined in consideration of the viscosity and flow velocity of the test fluid.

The laser light source 12 irradiates a predetermined portion of the linear flow path 11a of the flow cell 11 with the laser light La to form an irradiation area. Here, the optical axis of the laser light La coincides with the Z direction and is orthogonal to the central axis of the linear flow path 11a which coincides with the X direction.

Further, as shown in FIG. 3, the angle formed by the optical axis of the laser beam La and the outer wall of the flow cell 11 may be set to a predetermined angle θ. This is because the laser light La is the flow cell 1
This is for preventing a part of the reflected light from being reflected by the outer wall of No. 1 and returning to the laser light source 12. This is because, when a part of the reflected light returns to the laser light source 12, the feedback noise is superimposed on the laser light La, which is not preferable.

If the laser light La can be guided to a predetermined position of the linear flow path 11a through the same material as the outer wall of the flow cell 11 so that the laser light La is not reflected by the outer wall of the flow cell 11, the predetermined angle θ is obtained. No need to set.

The condensing optical system 13 has an optical axis that coincides with the central axis of the linear flow path 11a of the flow cell 11, and has a predetermined area M (hereinafter referred to as measurement area M) in the irradiation area shown in FIG.
Light Ls emitted by particles that have received the laser light La at
It has a function of condensing light.

The photoelectric conversion element array 14 is composed of three photoelectric conversion elements 14a, 14b, 14c, each light-receiving surface is perpendicular to the central axis of the flow path, and the central axis (X direction) of the flow path and the laser beam. It is provided adjacent to the Y direction perpendicular to the axis (Z direction). The photoelectric conversion elements 14a, 14b, 14c convert the scattered light Ls emitted while the particles pass through the measurement region M into a voltage.

The optical axis of the laser beam La and the flow cell 1
When the angle formed with the outer wall of 1 is set to the predetermined angle θ shown in FIG. 3, the light receiving surfaces of the photoelectric conversion elements 14a, 14b, 14c are set to the surface perpendicular to the optical axis of the condensing optical system 13. May be inclined by a predetermined angle θ.

Particle information detecting means 17 and position detecting means 18
Are both composed of a calculation unit 17a and a storage unit 17b. In the particle information detecting means 17 and the position detecting means 18, first, in the calculating part 17a, the following calculation processes (1) and (2) are performed, and the result is stored in the storing part 17b, and the particle information shown in FIG. Create a table.

(1) The ratio Ea / Eb of the output voltage Ea of the peak value detecting means 16a to the output voltage Eb of the peak value detecting means 16b is calculated. (2) Ratio Ec / Eb of the output voltage Ec of the peak value detecting means 16c to the output voltage Eb of the peak value detecting means 16b.
Is calculated.

Therefore, the function of the particle information detecting means 17 is as follows.
All the functions of the position detecting means 18 are included.

The discriminating means 8 refers to the particle information reference table on the basis of the magnitudes of the output signals (Ea / Eb and Ec / Eb) of the particle information detecting means 17 to determine the passage position of the particles in the measurement area M.
If the output voltage Eb of the peak value detecting means 16b is not less than a predetermined value, it is determined whether the output voltage Eb is within the predetermined range. The pulse signal is output to. The predetermined value compared with the output voltage Eb of the peak value detecting means 16b is a voltage value proportional to the particle size, and is set to a desired value (when detecting the number of particles having a certain particle size or more) in advance. .

The counting means 7 counts the number of pulse signals output from the discrimination means 8, and the counted number is the number of particles having a certain particle diameter or more.

The operation of the particle counting device according to the first embodiment of the present invention constructed as above will be described. A method of creating a particle information reference table necessary for detecting the passage position of particles will be described.

As shown in FIG. 2, a fluid containing a large number of standard particles (having the same particle size) is poured into the flow cell 11 from the direction of arrow A. At this time, the photoelectric conversion element array 1 depends on which position in the measurement region M the standard particles pass through.
The output waveforms of the photoelectric conversion elements 14a, 14b, 14c of No. 4 are various. Then, the three photoelectric conversion elements 14
In the case of the photoelectric conversion element array 14 including a, 14b, and 14c, five main passage patterns are considered.

First, the standard particles are measured in the measurement area M shown in FIG.
Of light scattered by standard particles when passing through the center Mc of
The spot S of s appears only in the photoelectric conversion element 14b at the center of the photoelectric conversion element array 14, as shown in FIG. At this time, each photoelectric conversion element 14a, 14b, 14c
Output waveform (relationship between time t and voltage E) is shown in FIG.
As shown in.

That is, only the photoelectric conversion element 14b passes through the center Mc of the measurement region M for a certain period of time (time t1 to time t2) and has a substantially pulsed voltage (peak value Eb) corresponding to the scattered light Ls of the standard particles. ) Is output, and another photoelectric conversion element 14
a and 14c are substantially level voltages (peak value E corresponding to noise)
Only a, Ec) are output.

Next, the standard particles are measured in the measurement area M shown in FIG.
6A, the spot S of the scattered light Ls by the standard particles appears only on the photoelectric conversion element 14a at one end of the photoelectric conversion element array 14 as shown in FIG. 6A. At this time, the photoelectric conversion elements 14a, 14b, 14
The output waveform of c (relationship between time t and voltage E) is shown in FIG.
As shown in (b).

That is, only the photoelectric conversion element 14a moves one end Ms of the measurement region M for a certain time (time t3 to time t4).
Outputs a substantially pulsed voltage (peak value Ea) according to the scattered light Ls of the standard particles passing through the other photoelectric conversion element 14
b and 14c are substantially level voltages (peak value E corresponding to noise)
b, Ec) only.

Similarly, when the standard particles pass through the other end Ms (symmetrical to the one end Ms) of the measurement area M shown in FIG. 4, the spot S of the scattered light Ls by the standard particles is shown in FIG.
As shown in (a), it appears only in the photoelectric conversion element 14c at the other end of the photoelectric conversion element array 14. At this time, the output waveform of each photoelectric conversion element 14a, 14b, 14c (relationship between time t and voltage E) is as shown in FIG. 7 (b).

That is, only the photoelectric conversion element 14c moves the other end Ms of the measurement region M for a certain period of time (time t3 to time t4).
Outputs a substantially pulsed voltage (peak value Ec) according to the scattered light Ls of the standard particles passing through the other photoelectric conversion element 14
a and 14b are substantially level voltages (peak value E corresponding to noise).
Only a, Eb) are output.

Further, the standard particles are the measurement area M shown in FIG.
When passing through one path Mm, the spot S of the scattered light Ls by the standard particles appears across the boundary between the photoelectric conversion elements 14a and 14b as shown in FIG. 8A. At this time, each photoelectric conversion element 14a, 14b, 1
The output waveform of 4c (relationship between time t and voltage E) is shown in FIG.
As shown in (b).

That is, the photoelectric conversion elements 14a and 14b pass through the one path Mm of the measurement region M for a certain time (time t5 to time t6) and have a substantially pulse-like voltage (peak) according to the scattered light Ls of the standard particles. The values Ea and Eb) are output, and the photoelectric conversion element 14c outputs a level voltage (peak value E) corresponding to noise.
Only output c).

Similarly, when the standard particles pass through the other path Mm (symmetrical to one path Mm) of the measurement region M shown in FIG. 4, the spot S of the scattered light Ls by the standard particles is shown in FIG.
As shown in (a), it appears straddling the boundary between the photoelectric conversion elements 14b and 14c. At this time, the output waveform of each photoelectric conversion element 14a, 14b, 14c (relationship between time t and voltage E) is as shown in FIG. 9 (b).

That is, the photoelectric conversion elements 14b, 14c pass through the other path Mm of the measurement region M for a certain time (time t5 to time t6) and have a substantially pulsed voltage (peak) corresponding to the scattered light Ls of the standard particles. The values Eb and Ec) are output, and the photoelectric conversion element 14a outputs a substantially level voltage (peak value E) corresponding to noise.
Only a) is output.

Then, in the position detecting means 18, FIG.
As shown in (a), when the spot S appears only in the central photoelectric conversion element 14b, the ratio Ea / Eb of the peak voltage Ea of the photoelectric conversion element 14a to the peak voltage Eb of the photoelectric conversion element 14b in the calculation unit 17a. To calculate Ea
Since <Eb, the ratio Ea / Eb is almost zero (E
The value of a / Eb≈0) is output and stored in the storage unit 17b.

In addition, in the calculation unit 17a, the photoelectric conversion element 14c for the peak voltage Eb of the photoelectric conversion element 14b.
Of the peak voltage Ec of Ec / Eb is calculated, and Ec <Eb
Therefore, the ratio Ec / Eb is almost zero (Ec / Eb
The value of b≈0) is output and stored in the storage unit 17b.

Further, in the position detecting means 18, FIG.
When the spot S appears only on the photoelectric conversion element 14a at one end as shown in FIG. 7, the photoelectric conversion element 14a corresponding to the peak voltage Eb of the photoelectric conversion element 14b is calculated in the calculation unit 17a.
Of the peak voltage Ea of Ea / Eb is calculated, and Ea> Eb
Therefore, a very large value (Ea / Eb) as the ratio Ea / Eb is obtained.
/ Eb≈∞) is output and stored in the storage unit 17b. Similarly, the ratio Ec / Eb of the peak voltage Ec of the photoelectric conversion element 14c to the peak voltage Eb of the photoelectric conversion element 14b is calculated. Since Ec≈Eb, the ratio Ec / Eb is about 1
The value of (Ec / Eb≈1) is output and stored in the storage unit 17b.

Further, in the position detecting means 18, FIG.
When the spot S appears only in the photoelectric conversion element 14c at the other end, as shown in FIG. 5, in the calculation unit 17a, the photoelectric conversion element 14a corresponding to the peak voltage Eb of the photoelectric conversion element 14b.
Of the peak voltage Ea of Ea / Eb is calculated, and Ea≈Eb
Therefore, the ratio Ea / Eb is about 1 (Ea / Eb≈
The value of 1) is output and stored in the storage unit 17b. Similarly,
The ratio Ec / Eb of the peak voltage Ec of the photoelectric conversion element 14c to the peak voltage Eb of the photoelectric conversion element 14b is calculated,
Since Ec> Eb, a very large value (Ec / Eb≈∞) is output as the ratio Ec / Eb and stored in the storage unit 17b.

Next, in the position detecting means 18, FIG.
, The photoelectric conversion element 14a and the photoelectric conversion element 14
When the spot S appears across the boundary of b, the peak voltage Eb of the photoelectric conversion element 14b is calculated in the calculation unit 17a.
Ratio of peak voltage Ea of photoelectric conversion element 14a to Ea
/ Eb is calculated, and since Ea≈Eb, the ratio Ea / Eb
Output a value of about 1 (Ea / Eb≈1) as
Store in 7b. Similarly, the peak voltage Ec of the photoelectric conversion element 14c with respect to the peak voltage Eb of the photoelectric conversion element 14b.
The ratio Ec / Eb is calculated and Ec <Eb, so the ratio E
A value of substantially zero (Ec / Eb≈0) is output as c / Eb and stored in the storage unit 17b.

Further, in the position detecting means 18, FIG.
, The photoelectric conversion element 14b and the photoelectric conversion element 14
When the spot S appears across the boundary of c, the peak voltage Eb of the photoelectric conversion element 14b is calculated by the calculation unit 17a.
Ratio of peak voltage Ea of photoelectric conversion element 14a to Ea
/ Eb is calculated, and since Ea <Eb, the ratio Ea / Eb
As a value, a value of substantially zero (Ec / Eb≈0) is output and stored in the storage unit 17b. Similarly, the ratio Ec / Eb of the peak voltage Ec of the photoelectric conversion element 14c to the peak voltage Eb of the photoelectric conversion element 14b is calculated, and since Ec≈Eb,
A value of about 1 (Ec / Eb≈1) is output as the ratio Ec / Eb and stored in the storage unit 17b.

The reference voltage is the photoelectric conversion element 1
Photoelectric conversion elements 14a other than the peak voltage Eb of 4b,
The peak voltages Ea and Ec of 14c may be used, or the sum of the peak voltages (Ea + Eb + Ec) may be used. The point is that not the absolute value of the peak voltage of the photoelectric conversion elements 14a, 14b, 14c, but the photoelectric conversion elements 14a, 1 with respect to the reference voltage.
This is because it is more accurate to obtain the position of the spot S of the scattered light Ls by the standard particles from the ratio (ratio) of the peak voltages of 4b and 14c.

FIG. 1 shows the above five cases.
As shown in 0, a particle information reference table can be created when the reference voltage is the peak voltage Eb of the photoelectric conversion element 14b. Therefore, the ratio of the peak voltage Ea of the photoelectric conversion element 14a to the peak voltage Eb of the photoelectric conversion element 14b Ea /
If Eb and the ratio Ec / Eb of the peak voltage Ec of the photoelectric conversion element 14c to the peak voltage Eb of the photoelectric conversion element 14b are known, by referring to the particle information reference table, the passage position of the particle in the measurement region M in the Y direction. Can be identified from the five ways.

In addition to the above-described five passage patterns, spots S appear to be uneven and straddle at the boundary between the photoelectric conversion element 14a and the photoelectric conversion element 14b or the boundary between the photoelectric conversion element 14b and the photoelectric conversion element 14c. Even when the photoelectric conversion element 14 passes through the path of the measurement region M,
If the ratio Ea / Eb of the peak voltage Ea of the photoelectric conversion element 14a to the peak voltage Eb of b and the ratio Ec / Eb of the peak voltage Ec of the photoelectric conversion element 14c to the peak voltage Eb of the photoelectric conversion element 14b are known, the ratio Ea / By applying the value of Eb and the value of the ratio Ec / Eb to the particle information reference table, the passage position of the particle in the measurement area M in the Y direction can be identified.

Next, a case will be described in which particles having an unknown particle size are counted by using a particle information reference table created from standard particles. The particle counting device according to the first embodiment of the present invention detects only particles in the measurement region M that pass through the central portion where the light intensity distribution is substantially uniform and have a predetermined particle size or more.

Particles of unknown particle size pass through the measurement area M,
The ratio Ea / Eb of the peak voltage Ea of the photoelectric conversion element 14a to the peak voltage Eb of the photoelectric conversion element 14b is substantially zero (Ea / Eb≈0), and the peak of the photoelectric conversion element 14c with respect to the peak voltage Eb of the photoelectric conversion element 14b. Voltage E
It is assumed that the ratio Ec / Eb of c is also substantially zero (Ec / Eb≈0). In this state, referring to the particle information reference table shown in FIG. 10, the spot S only on the photoelectric conversion element 14b.
Corresponds to the case (FIG. 5A), and it can be estimated that the particles have passed through the central portion of the measurement region M.

Then, the discriminating means 8 determines that the passage position of the particles is within the predetermined range of the measurement region M, that is, from the magnitudes of the output signals (Ea / Eb≈0 and Ec / Eb≈0) of the particle information detecting means 17. When the output voltage Eb of the peak value detecting means 16b is equal to or higher than a predetermined value while determining that it is the central portion, the number of pulse signals corresponding to the number of particles is output. Then, the counting means 7 counts the number of pulse signals output by the determining means 8, and the counted number is the number of particles.

When the particles pass through other than the central portion of the measurement area M, for example, the ratio Ea / Eb is about 1 (Ea / Eb≈
1) and the ratio Ec / Eb is almost zero (Ec / Eb≈
In the case of 0), referring to the particle information reference table shown in FIG. 10, it is estimated that the spot S appears across the boundary between the photoelectric conversion elements 14a and 14b, and the particle is at the center of the measurement region M. The determination means 8 does not output the pulse signal because it is determined that it has not passed through the section. That is, particles that have passed other than the central portion of the measurement area M are not measured.

The particle counting device according to the present invention is shown in FIG.
As shown in FIG. 1, a light intensity distribution detecting means 1 for detecting a light intensity distribution of a measurement area irradiated with light, a particle position detecting means 2 for detecting a passage position of particles passing through the measurement area, and scattering generated by the particles. Scattered light detecting means 3 for detecting the intensity of light,
Based on the particle information reference table created in advance from the output signal of the light intensity distribution detection means 1 and the reference means 4 for calculating the correction value of the scattered light intensity of the particles based on the output signal of the particle position detection means 2, and based on the correction value. A normalizing means 5 for correcting the output signal of the scattered light detecting means 3; a discriminating means 6 for outputting a pulse signal when the output signal of the normalizing means 5 is a predetermined value or more;
It can also be configured by including counting means 7 for counting the pulse signals output by the discrimination means 6.

The particle counting device according to the second embodiment of the present invention is constructed as shown in FIG. This particle counting device targets all particles passing through the measurement region M in the particle counting device according to the first embodiment of the present invention.

The light intensity distribution detecting means 1 is the flow cell 1
1, a laser light source 12, a condensing optical system 13, a photoelectric conversion element array 14, peak value detecting means 16a, 16b, 16c, and particle information detecting means 17. The particle position detecting means 2 includes a flow cell 11, a laser light source 12, a condensing optical system 13, a photoelectric conversion element array 14, and a peak value detecting means 1.
It is composed of 6a, 16b, 16c and a position detecting means 18.

The scattered light detecting means 3 includes a condensing optical system 13, a photoelectric conversion element array 14, and peak value detecting means 16a, 16a.
b, 16c and particle information detecting means 17.
The reference unit 4 is composed of a particle information detection unit 17. The peak value detecting means 16a, 16b, 16c,
The particle information detecting means 17, the position detecting means 18, the normalizing means 5, the discriminating means 6 and the counting means 7 constitute a processing device 15.

Here, the flow cell 11, laser light source 12, condensing optical system 13, and photoelectric conversion element array 14 shown in FIG. 12 are the same as the flow cell 11, laser light source 12, and laser light source 12 shown in FIG.
Since the condensing optical system 13 and the photoelectric conversion element array 14 have the same configurations, the description thereof will be omitted.

Particle information detecting means 17 and position detecting means 18
Are both composed of a calculation unit 17a and a storage unit 17b. In the particle information detecting means 17 and the position detecting means 18, first, in the calculating part 17a, the following calculation processes (1) and (2) are performed, and the results are stored in the storing part 17b. The following (3) arithmetic processing is also performed, the result is stored in the storage unit 17b, and the particle information reference table shown in FIG. 13 is created.

(1) The ratio Ea / Eb of the output voltage Ea of the peak value detecting means 16a to the output voltage Eb of the peak value detecting means 16b is calculated. (2) Ratio Ec / Eb of the output voltage Ec of the peak value detecting means 16c to the output voltage Eb of the peak value detecting means 16b.
Is calculated. (3) The sum (Ea + Eb + Ec) of the output voltages Ea, Eb, Ec of the peak value detecting means 16a, 16b, 16c is calculated.

Therefore, the function of the particle information detecting means 17 is as follows.
Similar to the particle counting device according to the first embodiment shown in FIG. 2, all the functions of the position detecting means 18 are included.

The normalizing means 5 outputs the output voltage of the peak value detecting means 16a, 16b, 16c obtained from unknown particles to be measured, based on a particle information reference table created by flowing standard particles in the flow cell 11 in advance. Sum of (Ea +
Eb + Ec) is multiplied by the correction count k, and the voltage ((Ea +
Eb + Ec) × k) is output.

The discriminating means 6 makes the size of the particle diameter correspond to the freely settable voltage Er, and the output signal ((Ea + Eb + Ec) × k) of the normalizing means 5 is larger than the set voltage Er. ((Ea + Eb + Ec) × k> Er)
Then, the pulse signal is output. The counting means 7 is the discrimination means 6
The number of pulse signals output by is counted, and the counted number is the number of particles.

The operation of the particle counting device according to the second embodiment of the present invention constructed as above will be described. First, similarly to the particle counting device according to the first embodiment of the present invention, in order to create a particle information reference table of standard particles, as shown in FIG. Flow cell 1 containing a large number of fluids containing the same)
Pour into 1.

Here, as shown in FIG. 4, each photoelectric conversion element 14a, 14b, 14c of the photoelectric conversion element array 14 depends on which position in the measurement region M the standard particle passes through.
Although there are various output waveforms, the same as in the case of the first embodiment of the present invention (FIGS. 5 to 9), the description thereof will be omitted.

Then, in the particle information detecting means 17, FIG.
As shown in (a), when the spot S appears only in the central photoelectric conversion element 14b, the ratio Ea / Eb of the peak voltage Ea of the photoelectric conversion element 14a to the peak voltage Eb of the photoelectric conversion element 14b in the calculation unit 17a. To calculate Ea
Since <Eb, the ratio Ea / Eb is almost zero (Ea / Eb
The value of / Eb≈0) is output and stored in the storage unit 17b.

In addition, in the calculation unit 17a, the photoelectric conversion element 14c for the peak voltage Eb of the photoelectric conversion element 14b.
Of the peak voltage Ec of Ec / Eb is calculated, and Ec <Eb
Therefore, the ratio Ec / Eb is almost zero (Ec / Eb
The value of (≈0) is output and stored in the storage unit 17b. Furthermore,
In the calculation unit 17a, the photoelectric conversion elements 14a, 14b,
14c output voltage Ea, Eb, Ec sum (Ea + Eb +
Ec) is calculated and, for example, 1.0 is stored in the storage unit 17b.

Further, in the particle information detecting means 17, as shown in FIG.
As shown in (a), when the spot S appears only on one end of the photoelectric conversion element 14a, the ratio Ea / Eb of the peak voltage Ea of the photoelectric conversion element 14a to the peak voltage Eb of the photoelectric conversion element 14b in the calculation unit 17a. To calculate Ea
Since> Eb, a very large value (Ea / Eb≈∞) is output as the ratio Ea / Eb and stored in the storage unit 17b.

Similarly, the ratio Ec / Eb of the peak voltage Ec of the photoelectric conversion element 14c to the peak voltage Eb of the photoelectric conversion element 14b is calculated. Since Ec≈Eb, the ratio Ec / Eb
A value of about 1 (Ec / Eb≈1) is output as Eb and stored in the storage unit 17b. Further, in the arithmetic unit 17a, the output voltages Ea, E of the photoelectric conversion elements 14a, 14b, 14c are
The sum of b and Ec (Ea + Eb + Ec) is calculated, and for example,
0.2 is stored in the storage unit 17b.

Further, in the particle information detecting means 17, as shown in FIG.
As shown in (a), when the spot S appears only in the photoelectric conversion element 14c at the other end, the ratio Ea / of the peak voltage Ea of the photoelectric conversion element 14a to the peak voltage Eb of the photoelectric conversion element 14b in the calculation unit 17a. Eb is calculated and Ea
Since ≈Eb, the ratio Ea / Eb is about 1 (Ea / Eb
The value of b≈1) is output and stored in the storage unit 17b.

Similarly, the ratio Ec / Eb of the peak voltage Ec of the photoelectric conversion element 14c to the peak voltage Eb of the photoelectric conversion element 14b is calculated. Since Ec> Eb, the ratio Ec / Eb
A very large value (Ec / Eb≈∞) is output as Eb and stored in the storage unit 17b. Further, in the arithmetic unit 17a, the sum (Ea + Eb + Ec) of the output voltages Ea, Eb, Ec of the photoelectric conversion elements 14a, 14b, 14c is calculated,
For example, 0.2 is stored in the storage unit 17b.

Next, in the particle information detecting means 17, as shown in FIG.
As shown in (a), when the spot S appears across the boundary between the photoelectric conversion elements 14a and 14b,
In the calculation unit 17a, the ratio Ea / Eb of the peak voltage Ea of the photoelectric conversion element 14a to the peak voltage Eb of the photoelectric conversion element 14b is calculated, and since Ea≈Eb, the ratio Ea
A value of about 1 (Ea / Eb≈1) is output as / Eb and stored in the storage unit 17b.

Similarly, the ratio Ec / Eb of the peak voltage Ec of the photoelectric conversion element 14c to the peak voltage Eb of the photoelectric conversion element 14b is calculated. Since Ec <Eb, the ratio Ec / Eb /
A value of almost zero (Ec / Eb≈0) is output as Eb,
It is stored in the storage unit 17b. Further, in the calculation unit 17a, the output voltage E of the photoelectric conversion elements 14a, 14b, 14c is
The sum (Ea + Eb + Ec) of a, Eb, and Ec is calculated, and, for example, 0.75 is stored in the storage unit 17b.

Further, in the particle information detecting means 17, FIG.
As shown in (a), when the spot S appears across the boundary between the photoelectric conversion elements 14b and 14c,
The calculation unit 17a calculates the ratio Ea / Eb of the peak voltage Ea of the photoelectric conversion element 14a to the peak voltage Eb of the photoelectric conversion element 14b. Since Ea <Eb, the ratio Ea
A value of substantially zero (Ea / Eb≈0) is output as / Eb and stored in the storage unit 17b.

Similarly, the ratio Ec / Eb of the peak voltage Ec of the photoelectric conversion element 14c to the peak voltage Eb of the photoelectric conversion element 14b is calculated. Since Ec≈Eb, the ratio Ec / Eb
A value of about 1 (Ec / Eb≈1) is output as Eb and stored in the storage unit 17b. Further, in the arithmetic unit 17a, the output voltages Ea, E of the photoelectric conversion elements 14a, 14b, 14c are
The sum of b and Ec (Ea + Eb + Ec) is calculated, and for example,
0.75 is stored in the storage unit 17b.

The reference voltage is the photoelectric conversion element 1
Photoelectric conversion elements 14a other than the peak voltage Eb of 4b,
The peak voltages Ea and Ec of 14c may be used, or the sum of the peak voltages (Ea + Eb + Ec) may be used. The point is that not the absolute value of the peak voltage of the photoelectric conversion elements 14a, 14b, 14c, but the photoelectric conversion elements 14a, 1 with respect to the reference voltage.
This is because it is more accurate to obtain the position of the spot S of the scattered light Ls by the standard particles from the ratio (ratio) of the peak voltages of 4b and 14c.

FIG. 1 shows the above five cases.
As shown in FIG. 3, a particle information reference table by standard particles can be created when the reference voltage is the peak voltage Eb of the photoelectric conversion element 14b. Therefore, the ratio Ea / Eb of the peak voltage Ea of the photoelectric conversion element 14a to the peak voltage Eb of the photoelectric conversion element 14b and the ratio Ec / Eb of the peak voltage Ec of the photoelectric conversion element 14c to the peak voltage Eb of the photoelectric conversion element 14b are separated. For example, by obtaining the sum (Ea + Eb + Ec) of the output voltages corresponding to them, the laser light L
It is possible to qualitatively know the laser light intensity distribution of the measurement region M irradiated with a.

In addition to the above-described five passage patterns, the measurement area M in which the spot S appears across the boundary between the photoelectric conversion element 14a and the photoelectric conversion element 14b or the boundary between the photoelectric conversion element 14b and the photoelectric conversion element 14c. Even when the photoelectric conversion element 14a passes through the path of the peak voltage Ea of the photoelectric conversion element 14a with respect to the peak voltage Eb of the photoelectric conversion element 14b.
Ratio Ea / Eb and the peak voltage E of the photoelectric conversion element 14b
Ratio E of peak voltage Ec of photoelectric conversion element 14c to b
If c / Eb is known, the value of the ratio Ea / Eb and the ratio Ec / Eb
By applying the value of to the particle information lookup table,
The sum (Ea + Eb + Ec) of the output voltages corresponding to them can be estimated to qualitatively know the laser light intensity distribution of the measurement region M irradiated with the laser light La.

Next, description will be made regarding the case of counting particles of unknown particle size by using the particle information reference table based on standard particles. It is assumed that particles of unknown particle size pass through the measurement area M and the position of the spot S is the position shown in FIG.
Then, the ratio Ea / Eb of the peak voltage Ea of the photoelectric conversion element 14a to the peak voltage Eb of the photoelectric conversion element 14b is almost zero (Ea / Eb≈0).
The ratio Ec / Eb of the peak voltage Ec of the photoelectric conversion element 14c to the peak voltage Eb of b is almost zero (Ec / Eb≈).
0). Then, the photoelectric conversion elements 14a, 14b, 1
4c sum of output voltages Ea, Eb, Ec (Ea + Eb + E
Let c) be 0.2.

At this time, the normalizing means 5 determines the peak value detecting means 16a, 1 from the particle information reference table shown in FIG.
Sum of output voltages Ea, Eb, Ec of 6b, 16c (Ea +
Eb + Ec) is read and the output voltage Ea, Eb, of the peak value detecting means 16a, 16b, 16c currently obtained is read.
The sum of Ec (Ea + Eb + Ec) is multiplied by the correction count k.
The correction count k is a value (1 / (Ea + Eb + Ec)) obtained by dividing 1 by the sum (Ea + Eb + Ec) of the output voltages Ea, Eb, Ec of the peak value detecting means 16a, 16b, 16c of the corresponding particle information reference table. .

When the position of the spot S is the position shown in FIG. 5 (a), the output voltages Ea, Eb, E of the peak value detecting means 16a, 16b, 16c of the corresponding particle information reference table.
Since the sum of c (Ea + Eb + Ec) is 1.0, the correction count k becomes 1 (1 / 1.0), and the sum of the output voltages of the normalized peak value detecting means 16a, 16b, 16c is It remains 0.2 (0.2 × 1). This means that the particles having a small particle size have passed through the measurement region M corresponding to the position of the spot S shown in FIG.

Next, it is assumed that the spot S appears at the position shown in FIG. 6 (a). Then, the ratio Ea / Eb of the peak voltage Ea of the photoelectric conversion element 14a to the peak voltage Eb of the photoelectric conversion element 14b is a very large value (Ea / Eb≈).
∞), which is the ratio Ec / E of the peak voltage Ec of the photoelectric conversion element 14c to the peak voltage Eb of the photoelectric conversion element 14b.
b becomes about 1 (Ec / Eb≈1). Then, output voltages Ea, Eb, E of the photoelectric conversion elements 14a, 14b, 14c
It is assumed that the sum of c (Ea + Eb + Ec) is 0.6.

At this time, the normalizing means 5 uses the particle information reference table shown in FIG.
Sum of output voltages Ea, Eb, Ec of 6b, 16c (Ea +
Eb + Ec) is read and the output voltage Ea, Eb, of the peak value detecting means 16a, 16b, 16c currently obtained is read.
The sum of Ec (Ea + Eb + Ec) is multiplied by the correction count k.
The correction count k is a value (1 / (Ea + Eb + Ec)) obtained by dividing 1 by the sum (Ea + Eb + Ec) of the output voltages Ea, Eb, Ec of the peak value detecting means 16a, 16b, 16c of the corresponding particle information reference table. .

When the spot S is at the position shown in FIG. 6A, the output voltages Ea, Eb, E of the peak value detecting means 16a, 16b, 16c of the corresponding particle information reference table are displayed.
Since the sum of c (Ea + Eb + Ec) is 0.2, the correction count k becomes 5 (1 / 0.2), and the sum of the output voltages of the normalized peak value detecting means 16a, 16b, 16c is It is normalized to 3.0 (0.6 × 5).

As described above, the normalizing means 5 uses the particle information reference table of the standard particles prepared in advance, even if the particles to be measured have passed through the measurement region M of low laser light intensity. By multiplying the sum (Ea + Eb + Ec) of the output voltages Ea, Eb, and Ec of the obtained peak value detecting means 16a, 16b, and 16c by the correction count k, the particles to be measured have passed through the region where the laser light intensity is high. I shall.

Then, the output signal ((Ea
+ Eb + Ec) × k) is compared with the set voltage Er in the discrimination means 6 and is larger than the set voltage Er ((E
When a + Eb + Ec) × k> Er), the discriminating means 6 outputs one pulse signal for one particle. Then, the counting means 7 counts the pulse signal, and the number of particles larger than the particle diameter corresponding to the set voltage Er can be detected. Therefore, the particle counting device can discriminate the particle size with high accuracy and count the number of particles.

As shown in FIG. 14, the particle counting device according to the third embodiment of the present invention comprises a flow cell 21, a laser light source 22, a condensing optical system 23, a light detecting means 24 and a processing device 25. Here, the flow cell 21, the laser light source 22, and the condensing optical system 23 have the same configurations as those shown in FIG.

The light detecting means 24 has a vertical (Y direction) and a horizontal (Z direction).
Direction) 3 × 3 matrix photoelectric conversion elements D
₁₁ , D ₁₂ , D ₁₃ , D ₂₁ , ... D ₃₃ , and each light-receiving surface forms a YZ plane perpendicular to the central axis (X direction) of the flow path 21a.

The processing device 25 includes the peak values E ₁₁ , E ₁₂ , E ₁₃ , of the output voltages of the three photoelectric conversion elements D ₁₁ , D ₁₂ , D ₁₃ , D ₂₁ , ... D ₃₃ . E ₂₁ , ... E ₃₃ peak value detecting means 26 a, 26 b, 26 c and particle information detecting means for detecting particle position from peak values E ₁₁ , E ₁₂ , E ₁₃ , E ₂₁ , ... E _33. 27, a normalizing means 5, a discriminating means 6, and a counting means 7.

The peak value detecting means 26a is a photoelectric conversion element D.
The output voltages of ₁₁ , D ₁₂ and D ₁₃ are sampled in a time division manner to detect their peak values E ₁₁ , E ₁₂ and E ₁₃ , and the peak value detecting means 26b detects the photoelectric conversion elements D ₂₁ , D ₂₂ and D ₂₃ . The output voltage is sampled in a time division manner and its peak values E ₂₁ , E ₂₂ ,
Detecting the E _23, a peak value detecting means 26c detects the photoelectric conversion element D _31, D _32, the peak value is sampled in a time division output voltage of the _{D 33 E 31, E 32,} E 33.

It is also possible to provide the peak value detecting means for the number of photoelectric conversion elements and detect the peak value by constantly sampling the output voltage of the scattered light Ls of the particles passing through the measurement region M at a certain time.

The particle information detecting means 27 is provided with a computing section 27a and a storage section 27b. First, in the computing section 27a, the peak values E ₁₁ , E ₁₂ , E ₁₃ , E detected by the peak value detecting means 26a, 26b, 26c are detected. ₂₁ , ... One voltage (for example, peak value E ₂₂ ) is selected from E ₃₃ , and the ratio with other peak values based on this voltage (E ₁₁ / E ₂₂ , E ₁₂ / E ₂₂ ...
...) is calculated and the result is stored in the storage unit 27b. Further, in the calculation unit 27a, the peak values E ₁₁ , E ₁₂ ,
E _13, E _21, the sum of _{...... E 33 (E 11 + E} 12 + E 13 + E 21 +
... + E ₃₃ ) is calculated, and for example, 1.0 is stored in the storage unit 27b.
Remember.

Then, as shown in FIG. 14, a fluid containing a large number of standard particles (having the same particle diameter) is flown into the flow cell 21 from the direction of arrow A, and the spot S becomes 9 in the particle information detecting means 27. Photoelectric conversion elements D ₁₁ ,
_{D 12, D 13, D 21} , portions which are adjacent to each other among ...... D _33, such as site or in contact with the photoelectric conversion element D ₁₁ and the photoelectric conversion element D _12, 9 pieces of photoelectric conversion elements D _11, D _12, D ₁₃ ,
D ₂₁ , ... D _{33 is} a portion where the corner portions of four photoelectric conversion elements are in contact, for example, four photoelectric conversion elements D ₁₁ , D ₁₂ , D
A particle information reference table similar to that of FIG. 13 is created in consideration of the case where the path of the measurement region M that appears at the portions where the corner portions of ₂₁ and D ₂₂ come into contact is passed.

Further, the arithmetic unit 27a selects the largest peak value from the peak values E ₁₁ , E ₁₂ , E ₁₃ , E ₂₁ , ... E ₃₃ detected by the peak value detecting means 26a, 26b, 26c. The result may be stored in the storage unit 27b.

The operation of the particle counting device according to the third embodiment of the present invention constructed as above will be described. As shown in FIG. 14, a fluid containing unknown particles is poured into the flow cell 21 from the direction of arrow A. At this time, the photoelectric conversion elements D ₁₁ , D ₁₂ , D ₁₃ , D ₂₁ , ... D of the photo-detecting means 24 depend on which position of the measurement region M the particles pass through.
The output waveform of ₃₃ is various.

For example, when the particles pass through the path of the measurement area M corresponding to the light receiving surface of the photoelectric conversion element D _{22 in} the light detection means 24, the peak value detection means 26a, 26b, 26c cause the particles to move in the measurement area M. While passing, the output voltage of the photoelectric conversion elements D ₁₁ , D ₁₂ , D ₁₃ , D ₂₁ , ... D ₃₃ according to the scattered light Ls of the particles is sampled to detect the peak value.

In this case, the laser light intensity in the measurement region M has a distribution that the intensity is strongest in the central portion and weakens toward the end portion deviating from the central portion (almost Gaussian distribution). Since the light intensity weak portion passes through the strong central portion and the weak portion again, only the photoelectric conversion element D ₂₂ outputs a substantially pulsed voltage, and the other photoelectric conversion elements are
Only the level voltage corresponding to the noise is output.

Therefore, the peak value E ₂₂ of the photoelectric conversion element D ₂₂ is
When compared with other peak values, the ratio (E ₁₁ /
_{E 22, E 12 / E 22} ......) if is known, it can be known by referring to the particle information reference table, qualitatively the laser light intensity distribution in the measurement region M where the laser beam La is irradiated.

Next, in the case of counting particles of unknown particle size using the particle information reference table based on standard particles, it is the same as the particle counting device according to the second embodiment of the present invention shown in FIG. Therefore, the description is omitted.

The particle counting device according to the fourth embodiment of the present invention is constructed as shown in FIG. The light intensity distribution detecting means 1 includes a flow cell 31, a laser light source 32, a condensing optical system 33, a photoelectric conversion element array 34, peak value detecting means 36a, 36b, 36c and a particle information detecting means 37.
Composed of. The particle position detecting means 2 is a flow cell 3
1, a laser light source 32, a condensing optical system 33, a photoelectric conversion element array 34, peak value detecting means 36a, 36b, 36c, and a position detecting means 38.

The scattered light detecting means 3 comprises a condensing optical system 33, a photoelectric conversion element array 34, and peak value detecting means 36a, 36.
b, 36c and particle information detecting means 37.
The reference unit 4 is composed of a particle information detection unit 37.

The flow cell 31 is made of a transparent member and has a linear flow path 31a (Y direction) of a predetermined length. Here, the cross-sectional shape of the flow cell 31 is a rectangular tube shape.
The reason for providing the linear flow path 31a having a predetermined length is that the flow cell 11 of the particle counting device according to the first embodiment of the present invention.
It is similar to the case of.

The laser light source 32 irradiates a predetermined portion of the linear flow path 31a of the flow cell 31 with the laser light La to form an irradiation area. Here, the optical axis (X direction) of the laser beam La and the linear flow path 21a (Y direction) intersect.

The condensing optical system 33 has an optical axis (X direction) that coincides with the optical axis of the laser light source 32, and has a predetermined area M (hereinafter referred to as measurement area M) in the irradiation area shown in FIG. It has a function of condensing the scattered light Ls generated in.

The photoelectric conversion element array 34 is composed of three photoelectric conversion elements 34a, 34b, 34c, each light-receiving surface is perpendicular to the optical axis (X direction) of the condensing optical system 33, and the central axis of the flow path. They are provided adjacent to each other in the Z direction perpendicular to the (Y direction) and the laser optical axis (X direction). Photoelectric conversion elements 34a, 34
b and 34c convert the scattered light Ls emitted while the particles pass through the measurement region M into a voltage.

The trap 30 located on the optical axis of the condensing optical system 33 blocks the light source light La of the laser light source 32 from directly entering the photoelectric conversion element array 34. As a result, only the scattered light Ls emitted by the particles passing through the flow path 31a is incident on the photoelectric conversion element 34.

The processing device 35 includes the peak values (pulse heights) Ea, Eb, of the voltages output by the three photoelectric conversion elements 34a, 34b, 34c while the particles pass through the measurement region M.
Peak value detecting means 36a, 36b, 36 for detecting Ec
c, particle information detection means 37 and position detection means 38 for creating a particle information reference table, normalization means 5, discrimination means 6
And counting means 7.

Particle information detecting means 37 and position detecting means 38
Are both composed of a calculation unit 37a and a storage unit 37b. In the particle information detecting means 37 and the position detecting means 38, first, in the calculating part 37a, the following calculation processes (1) and (2) are performed and the result is stored in the storing part 37b. The following calculation processing (3) is also performed, the result is stored in the storage unit 37b, and the particle information reference table is created.

(1) The ratio Ea / Eb of the output voltage Ea of the peak value detecting means 36a to the output voltage Eb of the peak value detecting means 36b is calculated. (2) Ratio Ec / Eb of the output voltage Ec of the peak value detecting means 36c to the output voltage Eb of the peak value detecting means 36b.
Is calculated. (3) The sum (Ea + Eb + Ec) of the output voltages Ea, Eb, Ec of the peak value detecting means 36a, 36b, 36c is calculated.

Therefore, the function of the particle information detecting means 37 is as follows.
All the functions of the position detecting means 38 are included.

The normalizing means 5 outputs the output voltage of the peak value detecting means 36a, 36b, 36c obtained from unknown particles to be measured, based on a particle information reference table created by flowing standard particles in the flow cell 31 in advance. Sum of (Ea +
Eb + Ec) is multiplied by the correction count k, and the voltage ((Ea +
Eb + Ec) × k) is output.

The discriminating means 6 makes the size of the particle diameter correspond to the freely settable voltage Er, and the output signal ((Ea + Eb + Ec) × k) of the normalizing means 5 is larger than the set voltage Er. ((Ea + Eb + Ec) × k> Er)
Then, the pulse signal is output. The counting means 7 is the discrimination means 6
The number of pulse signals output by is counted, and the counted number is the number of particles.

The operation of the particle counting device according to the fourth embodiment of the present invention configured as above will be described. As shown in FIG. 15, a fluid containing a large number of standard particles (having the same particle size) is poured into the flow cell 31 from the direction of arrow A. At this time, the output waveforms of the photoelectric conversion elements 34a, 34b, 34c of the photoelectric conversion element array 34 vary depending on which position in the measurement region M the particles pass through. Then, the three photoelectric conversion elements 34a, 34b, 34
In the case of the photoelectric conversion element array 34 composed of
Street passage patterns are possible.

First, when the standard particles pass through the center Mc of the measurement region M shown in FIG. 16, the spot S of the scattered light Ls by the standard particles shows the photoelectric conversion element array as shown in FIG. 17 (a). It appears only in the photoelectric conversion element 34b at the center of 34, and moves in the arrow direction. At this time, the output waveform of each photoelectric conversion element 34a, 34b, 34c (relationship between time t and voltage E) is as shown in FIG. 17 (b).

That is, only the photoelectric conversion element 34b passes through the center Mc of the measurement region M for a certain time (time t1 to time t2) and has a substantially pulsed voltage (peak value Eb) corresponding to the scattered light Ls of the standard particles. ) Is output, and another photoelectric conversion element 34
a and 34c are substantially level voltages (peak value E corresponding to noise).
Only a, Ec) are output.

Next, when the standard particles pass through one end Ms of the measurement area M shown in FIG. 16, the spot S of the scattered light Ls by the standard particles is photoelectrically converted as shown in FIG. 18 (a). It appears only in the photoelectric conversion element 34a at one end of the element array 34, and moves in the arrow direction. At this time, the output waveforms of the photoelectric conversion elements 34a, 34b, 34c (time t and voltage E
18) is as shown in FIG.

That is, only the photoelectric conversion element 34a moves the one end Ms of the measurement region M for a certain time (time t3 to time t4).
Outputs a substantially pulsed voltage (peak value Ea) according to the scattered light Ls of the standard particles passing through the other photoelectric conversion element 34.
b and 34c are substantially level voltages (peak value E corresponding to noise)
b, Ec) only.

Similarly, when the standard particle passes through the other end Ms (position symmetrical to the one end Ms) of the measurement area M shown in FIG. 16, the spot S of the scattered light Ls by the standard particle is
As shown in FIG. 19A, it appears only in the photoelectric conversion element 34c at the other end of the photoelectric conversion element array 34, and moves in the arrow direction. At this time, the photoelectric conversion elements 34a, 34b, 34
The output waveform of c (relationship between time t and voltage E) is shown in FIG.
As shown in (b).

That is, only the photoelectric conversion element 34c moves the other end Ms of the measurement region M for a certain period of time (time t3 to time t4).
A substantially pulse-shaped voltage (peak value Ec) corresponding to the scattered light Ls of the standard particles passing through is output, and the other photoelectric conversion element 34 is output.
a and 34b are substantially level voltages (peak value E corresponding to noise).
Only a, Eb) are output.

Further, when the standard particles pass through one path Mm of the measurement region M shown in FIG. 16, the spot S of the scattered light Ls due to the standard particles is, as shown in FIG. It appears across the boundary between 34a and the photoelectric conversion element 34b, and moves in the direction of the arrow. At this time, the output waveform of each photoelectric conversion element 34a, 34b, 34c (relationship between time t and voltage E) is as shown in FIG.

That is, the photoelectric conversion elements 34a and 34b pass through the one path Mm of the measurement region M for a certain time (time t5 to time t6) and have a substantially pulse-like voltage (peak) according to the scattered light Ls of the standard particles. The values Ea, Eb) are output, and the photoelectric conversion element 34c outputs a substantially level voltage (peak value E) corresponding to noise.
Only output c).

Similarly, when the standard particles pass the other path Mm of the measurement region M shown in FIG. 16 (a position symmetrical to the one path Mm), the spot S of the scattered light Ls by the standard particles is
As shown in FIG. 21 (a), the photoelectric conversion element 34b and the photoelectric conversion element 34c appear evenly over the boundary and move in the arrow direction. At this time, the photoelectric conversion elements 34a, 34
The output waveforms of b and 34c (relationship between time t and voltage E) are
It becomes as shown in FIG.

That is, the photoelectric conversion elements 34b and 34c pass through the other path Mm of the measurement region M for a certain time (time t5 to time t6) in accordance with the scattered light Ls of the standard particles and have a substantially pulse-like voltage (peak The values Eb, Ec) are output, and the photoelectric conversion element 34a outputs a substantially level voltage (peak value E) corresponding to noise.
Only a) is output.

In the particle information detecting means 37, as shown in FIG.
As shown in 7 (a), when the spot S appears only in the central photoelectric conversion element 34b, the ratio Ea / of the peak voltage Ea of the photoelectric conversion element 34a to the peak voltage Eb of the photoelectric conversion element 34b in the calculation unit 37a. Eb is calculated and E
Since a <Eb, the ratio Ea / Eb is almost zero (E
The value of a / Eb≈0) is output and stored in the storage unit 37b.

In addition, in the calculation unit 37a, the photoelectric conversion element 34c for the peak voltage Eb of the photoelectric conversion element 34b.
Of the peak voltage Ec of Ec / Eb is calculated, and Ec <Eb
Therefore, the ratio Ec / Eb is almost zero (Ec / Eb
A value of ≈0) is output and stored in the storage unit 37b. Furthermore,
In the calculation unit 37a, the photoelectric conversion elements 34a, 34b,
Sum of output voltages Ea, Eb, Ec of 34c (Ea + Eb +
Ec) is calculated and, for example, 1.0 is stored in the storage unit 37b.

Further, in the particle information detecting means 37, as shown in FIG.
As shown in (a), when the spot S appears only in the photoelectric conversion element 34a at one end, the ratio Ea / Eb of the peak voltage Ea of the photoelectric conversion element 34a to the peak voltage Eb of the photoelectric conversion element 34b in the calculation unit 37a. To calculate Ea
Since> Eb, a very large value (Ea / Eb≈∞) as the ratio Ea / Eb is output and stored in the storage unit 37b.

Similarly, the ratio Ec / Eb of the peak voltage Ec of the photoelectric conversion element 34c to the peak voltage Eb of the photoelectric conversion element 34b is calculated. Since Ec≈Eb, the ratio Ec / Eb
A value of about 1 (Ec / Eb≈1) is output as Eb and stored in the storage unit 37b. Further, in the calculation unit 37a, the output voltages Ea, E of the photoelectric conversion elements 34a, 34b, 34c are
The sum of b and Ec (Ea + Eb + Ec) is calculated, and for example,
0.2 is stored in the storage unit 27b.

Further, in the particle information detecting means 37, as shown in FIG.
As shown in (a), when the spot S appears only on the photoelectric conversion element 34c at the other end, the ratio Ea / of the peak voltage Ea of the photoelectric conversion element 34a to the peak voltage Eb of the photoelectric conversion element 34b is calculated in the calculation unit 37a. Eb is calculated and Ea
Since ≈Eb, the ratio Ea / Eb is about 1 (Ea / Eb
The value of b≈1) is output and stored in the storage unit 37b.

Similarly, the ratio Ec / Eb of the peak voltage Ec of the photoelectric conversion element 34c to the peak voltage Eb of the photoelectric conversion element 34b is calculated. Since Ec> Eb, the ratio Ec / Eb
A very large value (Ec / Eb≈∞) is output as Eb and stored in the storage unit 37b. Further, in the calculation unit 37a, the sum (Ea + Eb + Ec) of the output voltages Ea, Eb, Ec of the photoelectric conversion elements 34a, 34b, 34c is calculated,
For example, 0.2 is stored in the storage unit 37b.

Next, in the particle information detecting means 37, as shown in FIG.
As shown in (a), when the spot S appears across the boundary between the photoelectric conversion elements 34a and 34b,
In the calculation unit 37a, the ratio Ea / Eb of the peak voltage Ea of the photoelectric conversion element 34a to the peak voltage Eb of the photoelectric conversion element 34b is calculated, and since Ea≈Eb, the ratio Ea
A value of about 1 (Ea / Eb≈1) is output as / Eb and stored in the storage unit 37b.

Similarly, the ratio Ec / Eb of the peak voltage Ec of the photoelectric conversion element 34c to the peak voltage Eb of the photoelectric conversion element 34b is calculated. Since Ec <Eb, the ratio Ec / Eb
A value of almost zero (Ec / Eb≈0) is output as Eb,
It is stored in the storage unit 37b. Further, in the arithmetic unit 37a, the output voltage E of the photoelectric conversion elements 34a, 34b, 34c is
The sum (Ea + Eb + Ec) of a, Eb, and Ec is calculated, and 0.75 is stored in the storage unit 37b, for example.

Further, in the particle information detecting means 37, as shown in FIG.
As shown in (a), when the spot S appears across the boundary between the photoelectric conversion elements 34b and 34c,
The calculation unit 37a calculates the ratio Ea / Eb of the peak voltage Ea of the photoelectric conversion element 34a to the peak voltage Eb of the photoelectric conversion element 34b. Since Ea <Eb, the ratio Ea
A value of substantially zero (Ea / Eb≈0) is output as / Eb and stored in the storage unit 37b.

Similarly, the ratio Ec / Eb of the peak voltage Ec of the photoelectric conversion element 34c to the peak voltage Eb of the photoelectric conversion element 34b is calculated. Since Ec≈Eb, the ratio Ec / Eb
A value of about 1 (Ec / Eb≈1) is output as Eb and stored in the storage unit 37b. Further, in the calculation unit 37a, the output voltages Ea, E of the photoelectric conversion elements 34a, 34b, 34c are
The sum of b and Ec (Ea + Eb + Ec) is calculated, and for example,
0.75 is stored in the storage unit 37b.

Incidentally, the reference voltage is the photoelectric conversion element 3
Photoelectric conversion elements 34a other than the peak voltage Eb of 4b,
The peak voltages Ea and Ec of 34c may be used, or the sum (Ea + Eb + Ec) of each peak voltage may be used. The point is not the absolute value of the peak voltage of the photoelectric conversion elements 34a, 34b, 34c, but the respective photoelectric conversion elements 34a, 3 with respect to the reference voltage.
This is because it is more accurate to obtain the position of the spot S of the scattered light Ls by the standard particles from the ratio (ratio) of the peak voltages of 4b and 34c.

FIG. 1 shows the above five cases.
Similar to the particle information reference table shown in FIG. 3, a particle information reference table when the reference voltage is the peak voltage Eb of the photoelectric conversion element 34b can be created. Therefore, the photoelectric conversion element 3
If the ratio Ea / Eb of the peak voltage Ea of the photoelectric conversion element 34a with respect to the peak voltage Eb of 4b and the ratio Ec / Eb of the peak voltage Ec of the photoelectric conversion element 34c with respect to the peak voltage Eb of the photoelectric conversion element 34b are known, they correspond to them. By obtaining the sum of the output voltages (Ea + Eb + Ec), the laser light intensity distribution of the measurement region M irradiated with the laser light La can be qualitatively known.

In addition to the above-mentioned five passage patterns, the measurement area M where the spot S appears across the boundary between the photoelectric conversion element 34a and the photoelectric conversion element 34b or the boundary between the photoelectric conversion element 34b and the photoelectric conversion element 34c. Even when passing through the path of, the peak voltage Ea of the photoelectric conversion element 34a with respect to the peak voltage Eb of the photoelectric conversion element 34b.
Ratio Ea / Eb and the peak voltage E of the photoelectric conversion element 34b
Ratio E of peak voltage Ec of photoelectric conversion element 34c to b
If c / Eb is known, the value of the ratio Ea / Eb and the ratio Ec / Eb
By applying the value of to the particle information lookup table,
The sum (Ea + Eb + Ec) of the output voltages corresponding to them can be estimated to qualitatively know the laser light intensity distribution of the measurement region M irradiated with the laser light La.

Next, description will be made regarding the case of counting particles of unknown particle size using the particle information reference table based on standard particles. It is assumed that particles of unknown particle size pass through the measurement area M and the position of the spot S is the position shown in FIG. Then, the ratio Ea / E of the peak voltage Ea of the photoelectric conversion element 34a to the peak voltage Eb of the photoelectric conversion element 34b.
b is substantially zero (Ea / Eb≈0), and the ratio Ec / Eb of the peak voltage Ec of the photoelectric conversion element 34c to the peak voltage Eb of the photoelectric conversion element 34b is also substantially zero (Ec / Eb).
≈0). Then, the photoelectric conversion elements 14a, 14b,
14c output voltage Ea, Eb, Ec sum (Ea + Eb +
Ec) is assumed to be 0.2.

At this time, the normalizing means 5 uses the particle information reference table shown in FIG. 13 to determine the peak value detecting means 36a, 36a.
Sum of output voltages Ea, Eb, Ec of 6b, 36c (Ea +
Eb + Ec) is read, and the output voltages Ea, Eb, of the peak value detecting means 36a, 36b, 36c currently obtained are read.
The sum of Ec (Ea + Eb + Ec) is multiplied by the correction count k.
The correction count k is a value (1 / (Ea + Eb + Ec)) obtained by dividing 1 by the sum (Ea + Eb + Ec) of the output voltages Ea, Eb, Ec of the peak value detecting means 36a, 36b, 36c of the corresponding particle information reference table. .

When the position of the spot S is the position shown in FIG. 17A, the output voltages Ea, Eb, Eb, Eb, Ec of the peak value detecting means 36a, 36b, 36c of the corresponding particle information reference table.
Since the sum of Ec (Ea + Eb + Ec) is 1.0,
The correction count k becomes 1 (1 / 1.0), and the sum of the output voltages of the normalized peak value detecting means 36a, 36b, 36c remains 0.2 (0.2 × 1). This means that particles having a small particle size have passed the measurement region M corresponding to the position of the spot S shown in FIG.

Next, it is assumed that the spot S appears at the position shown in FIG. Then, the photoelectric conversion element 34b
The ratio Ea / Eb of the peak voltage Ea of the photoelectric conversion element 34a to the peak voltage Eb of Ea / Eb is very large (Ea / Eb
≈∞), and the ratio Ec / of the peak voltage Ec of the photoelectric conversion element 34c to the peak voltage Eb of the photoelectric conversion element 34b.
Eb is about 1 (Ec / Eb≈1). Then, the output voltages Ea, Eb of the photoelectric conversion elements 34a, 34b, 34c,
It is assumed that the sum of Ec (Ea + Eb + Ec) is 0.6.

At this time, the normalizing means 5 uses the particle information reference table shown in FIG. 13 to determine the peak value detecting means 36a, 36a.
Sum of output voltages Ea, Eb, Ec of 6b, 36c (Ea +
Eb + Ec) is read, and the output voltages Ea, Eb, of the peak value detecting means 36a, 36b, 36c currently obtained are read.
The sum of Ec (Ea + Eb + Ec) is multiplied by the correction count k.
The correction count k is a value (1 / (Ea + Eb + Ec)) obtained by dividing 1 by the sum (Ea + Eb + Ec) of the output voltages Ea, Eb, Ec of the peak value detecting means 36a, 36b, 36c of the corresponding particle information reference table. .

When the spot S is at the position shown in FIG. 18A, the output voltages Ea, Eb, Eb, Eb, Ec of the peak value detecting means 36a, 36b, 36c of the corresponding particle information reference table are shown.
Since the sum of Ec (Ea + Eb + Ec) is 0.2,
The correction count k becomes 5 (1 / 0.2), and the sum of the output voltages of the peak value detecting means 36a, 36b, 36c after normalization is normalized to 3.0 (0.6 × 5). .

As described above, the normalizing means 5 uses the particle information reference table of the standard particles prepared in advance, even if the particles to be measured pass through the measurement region M having a low laser light intensity. By multiplying the sum (Ea + Eb + Ec) of the output voltages Ea, Eb, Ec of the obtained peak value detecting means 36a, 36b, 36c by the correction count k, the particles to be measured have passed through the region where the laser light intensity is high. I shall.

Then, the output signal ((Ea
+ Eb + Ec) × k) is compared with the set voltage Er in the discrimination means 6 and is larger than the set voltage Er ((E
When a + Eb + Ec) × k> Er), the discriminating means 6 outputs one pulse signal for one particle. Then, the counting means 7 counts the pulse signal, and the number of particles larger than the particle diameter corresponding to the set voltage Er can be detected. Therefore, the particle counting device can discriminate the particle size with high accuracy and count the number of particles.

The present invention is not limited to the above-described embodiments of the present invention. For example, as the overall shape of the flow cell, L-shaped flow cells 11 and 21 and linear flow cell 31 are used. May have a shape that can be arranged so that the central axis of the flow path and the optical axis of the condensing optical system coincide with each other. Therefore, the overall shape of the flow cell may be a bent or curved shape as long as it does not affect the optical relationship between the laser light La and the scattered light Ls.

Although the flow cell has a rectangular cross section in the above-described embodiment of the invention, it may have a circular cross section.

[0152]

As described above, according to the invention of claim 1, the position of the flow path through which the particles pass is discriminated, and only the particles passing through the central portion of the irradiation region where the difference in light intensity is small are detected. Since the measurement target is used, even if the light intensity distribution in the irradiation region is not uniform, the particle size can be accurately discriminated and the number of particles can be counted.

According to the second aspect of the invention, the light intensity distribution of the measurement region can be known from the scattered light intensity distribution of the particles passing through the measurement region irradiated with light and the position of the flow path through which the particles pass. Therefore, the light intensity distribution in the measurement area is
Even if it is not uniform, it is possible to accurately discriminate the particle size and count the number of particles.

According to the third aspect of the invention, the light intensity distribution of the measurement region can be known from the scattered light intensity distribution of the particles passing through the measurement region irradiated with light and the position of the flow path through which the particles pass. Therefore, the light intensity distribution in the measurement area is
Even if it is not uniform, it is possible to accurately discriminate the particle size and count the number of particles.

According to the invention of claim 4, it is possible to know the light intensity distribution of the measurement region from the scattered light intensity distribution of the particles passing through the measurement region irradiated with light and the position of the flow path through which the particles pass. Therefore, the light intensity distribution in the measurement area is
Even if it is not uniform, it is possible to accurately discriminate the particle size and count the number of particles.

According to the invention of claim 5, the light intensity distribution of the measurement region can be known from the scattered light intensity distribution of particles passing through the measurement region irradiated with light and the position of the flow path through which the particles pass. Therefore, the light intensity distribution in the measurement area is
Even if it is not uniform, it is possible to accurately discriminate the particle size and count the number of particles.

According to the invention of claim 6, the light intensity distribution of the measurement region can be known more finely from the scattered light intensity distribution of the particles passing through the measurement region irradiated with light and the position of the flow path through which the particles pass. Therefore, even if the light intensity distribution in the measurement region is not uniform, the particle size can be accurately discriminated and the number of particles can be counted.

According to the invention of claim 7, the light intensity distribution of the measurement region can be known from the scattered light intensity distribution of the particles passing through the measurement region irradiated with light and the position of the flow path through which the particles pass. Therefore, the light intensity distribution in the measurement area is
Even if it is not uniform, it is possible to accurately discriminate the particle size and count the number of particles.

According to the invention of claim 8, the light intensity distribution of the measurement region can be known from the scattered light intensity distribution of the particles passing through the measurement region irradiated with light and the position of the flow path through which the particles pass. Therefore, the light intensity distribution in the measurement area is
Even if it is not uniform, it is possible to accurately discriminate the particle size and count the number of particles.

According to the invention of claim 9, the light intensity distribution of the measurement region can be known from the scattered light intensity distribution of the particles passing through the measurement region irradiated with light and the position of the flow path through which the particles pass. Therefore, the light intensity distribution in the measurement area is
Even if it is not uniform, it is possible to accurately discriminate the particle size and count the number of particles.

[Brief description of drawings]

FIG. 1 is a conceptual configuration diagram of a particle counting device according to the present invention.

FIG. 2 is a configuration diagram of a particle counting device according to a first embodiment of the present invention.

FIG. 3 is a plan sectional view of a measurement region irradiated with laser light in FIG.

FIG. 4 is a vertical cross-sectional view of a measurement region irradiated with laser light in FIG.

5 is a diagram showing a light receiving state (a) of the photoelectric conversion element array in FIG. 2 and an output waveform (b) at that time.

6 is a diagram showing a light receiving state (a) of the photoelectric conversion element array in FIG. 2 and an output waveform (b) at that time.

7 is a diagram showing a light receiving state (a) of the photoelectric conversion element array in FIG. 2 and an output waveform (b) at that time.

8 is a diagram showing a light receiving state (a) of the photoelectric conversion element array in FIG. 2 and an output waveform (b) at that time.

9 is a diagram showing a light receiving state (a) of the photoelectric conversion element array in FIG. 2 and an output waveform (b) at that time.

FIG. 10 is a diagram showing a particle information reference table.

FIG. 11 is a conceptual configuration diagram of a particle counting device according to the present invention.

FIG. 12 is a configuration diagram of a particle counting device according to a second embodiment of the present invention.

FIG. 13 is a diagram showing a particle information reference table.

FIG. 14 is a configuration diagram of a particle counting device according to a third embodiment of the present invention.

FIG. 15 is a configuration diagram of a particle counting device according to a fourth embodiment of the present invention.

16 is a vertical cross-sectional view of the measurement region irradiated with laser light in FIG.

17 is a diagram showing a light receiving state (a) of the photoelectric conversion element array in FIG. 15 and an output waveform (b) at that time.

FIG. 18 is a diagram showing a light receiving state (a) of the photoelectric conversion element array in FIG. 15 and an output waveform (b) at that time.

19 is a diagram showing a light receiving state (a) of the photoelectric conversion element array in FIG. 15 and an output waveform (b) at that time.

20 is a diagram showing a light receiving state (a) of the photoelectric conversion element array in FIG. 15 and an output waveform (b) at that time.

21 is a diagram showing a light receiving state (a) of the photoelectric conversion element array in FIG. 15 and an output waveform (b) at that time.

FIG. 22 is a configuration diagram of a conventional light scattering type particle counting device.

[Explanation of symbols]

1 ... Light intensity distribution detecting means, 2 ... Particle position detecting means, 3 ...
Scattered light detection means, 4 ... Reference means, 5 ... Normalization means, 6 ...
Discrimination means, 7 ... Counting means, 8 ... Discrimination means 11, 21, 21
31 ... Flow cell, 11a, 21a, 31a ... Linear flow path, 12, 22, 32 ... Laser light source (light source), 13, 2
3, 33 ... Condensing optical system, 14, 34 ... Photoelectric conversion element array, 14a, 14b, 14c, 34a, 34b, 34c
... Photoelectric conversion element, 15, 25, 35 ... Processing device, 16
a, 16b, 16c, 26a, 26b, 26c, 36
a, 36b, 36c ... Peak value detecting means, 17, 27,
37 ... Particle information detecting means, 18, 28, 38 ... Position detecting means, 24 ... Photodetecting means, 30 ... Trap, La ... Laser light, Ls ... Scattered light, M ... Measuring area.

─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. ⁷ , DB name) G01N 15/14 G01N 15/02

Claims (9)

(57) [Claims] 1. A particle position detecting means for detecting a passage position of a particle passing through a light irradiation area, a scattered light detecting means for detecting an intensity of scattered light emitted by the particle, and an output signal of the particle position detecting means. Is within a predetermined range of the irradiation area, and whether the output signal of the scattered light detecting means is a predetermined value or more, and within the predetermined range and a predetermined value or more A particle counting device, comprising: a discriminating means for outputting a pulse signal to the first and a counting means for counting the pulse signal output by the discriminating means. 2. A light intensity distribution detecting means for detecting a light intensity distribution of a measurement area for irradiating light, a particle position detecting means for detecting a passage position of a particle passing through the measurement area, and a scattered light emitted by the particle. Scattered light detection means for detecting the intensity of
Output signal of the light intensity distribution detecting means using standard particles
Reference table for calculating a correction value of scattered light intensity of the particles based on an output signal of the particle position reference means and a particle information reference table, and an output signal of the scattered light detection means based on the correction value. Normalizing means for correcting
A particle counting device comprising: a discriminating means for outputting a pulse signal when the output signal of the normalizing means is equal to or more than a predetermined value; and a counting means for counting the pulse signal output by the discriminating means. 3. The light intensity distribution detection means includes a flow cell formed of a transparent member in a bent shape, a light source that irradiates light to a flow path of the flow cell to form a measurement region, and a central axis of the flow path. Light detecting means comprising a condensing means for condensing scattered light of particles generated in the measurement region with coincident optical axes, and a plurality of photoelectric conversion elements for receiving the scattered light condensed by the condensing means. A voltage detecting means for detecting the output signals of the plurality of photoelectric conversion elements, and comparing the output signals of the voltage detecting means with each other, the passing position data of the measurement region where the particles have passed and the scattered light intensity data of the particles. The particle counting device according to claim 2, further comprising particle information detecting means for outputting. 4. The particle position detecting means includes a flow cell formed of a transparent member in a bent shape, a light source for irradiating light to a flow path of the flow cell to form a measurement region, and a central axis of the flow path. A condensing means for condensing scattered light of particles generated in the measurement region having an optical axis, and a light detecting means comprising a plurality of photoelectric conversion elements for receiving the scattered light condensed by the condensing means. And a voltage detecting means for detecting output signals of the plurality of photoelectric conversion elements, and position detecting means for comparing output signals of the voltage detecting means with each other and outputting passage position data of the measurement region where particles have passed. The particle counting device according to claim 1, claim 2 or claim 3. 5. The light detecting means including the plurality of photoelectric conversion elements has a direction in which each light receiving surface is perpendicular to a central axis of the flow path and substantially perpendicular to a central axis of the flow path and an optical axis of the light source. The particle counting device according to claim 3 or 4, which is a photoelectric conversion element array including N (N is an integer of 2 or more) photoelectric conversion elements provided adjacent to each other. 6. The photo-detecting means composed of the plurality of photoelectric conversion elements is composed of V × H (vertical and horizontal) photoelectric conversion elements in the vertical and horizontal directions (both V and H are integers of 2 or more), and each light receiving surface is the above-mentioned light-receiving surface. A particle counter according to claim 3 or 4, which is perpendicular to the central axis of the path. 7. The light intensity distribution detecting means includes a flow cell formed of a transparent member, a light source that irradiates a flow path of the flow cell with light to form a measurement region, and a central axis of the light. The light collecting means having an optical axis for collecting scattered light of particles generated in the measurement region, the trap located on the optical axis of the light collecting means, and the scattered light collected by the light collecting means Light detection means composed of a plurality of photoelectric conversion elements for receiving light, voltage detection means for detecting output signals of the plurality of photoelectric conversion elements, and the measurement area where particles have passed by comparing the output signals of the voltage detection means with each other. The particle counting device according to claim 2, further comprising particle information detecting means for outputting the passing position data of the particle and the scattered light intensity data of the particle. 8. The particle position detecting means includes a flow cell formed of a transparent member, a light source that irradiates light to a flow path of the flow cell to form a measurement region, and an optical axis that coincides with a central axis of the light. Condensing means for collecting the scattered light of particles generated in the measurement region, a trap located on the optical axis of the condensing means, and a plurality of light receiving means for receiving the scattered light collected by the collecting means. Photodetection means comprising a photoelectric conversion element of, and voltage detection means for detecting the output signal of the plurality of photoelectric conversion elements,
8. The particle counting device according to claim 1, comprising a position detecting means for comparing output signals of the voltage detecting means with each other and outputting passage position data of the measurement region where particles have passed. 9. A light detecting means comprising a plurality of photoelectric conversion elements, wherein each light receiving surface is in a direction perpendicular to an optical axis of the light source and substantially perpendicular to a central axis of the flow path and an optical axis of the light source. The particle counting device according to claim 7 or 8, which is a photoelectric conversion element array including N (N is an integer of 2 or more) photoelectric conversion elements provided adjacent to each other.