JP3519922B2 - Two-dimensional input module element - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic component made of an optical semiconductor capable of two-dimensionally reading information such as a character graphic written on a manuscript, and in particular, it can be inserted into a circuit board or the like. The present invention relates to a two-dimensional input module element that can be easily mounted on an information device or the like.

[0002]

2. Description of the Related Art A photoelectric converter in which light receiving elements are arranged one-dimensionally and which receives light from a light source applied to an original, and an electric device obtained by moving a relative position between the photoelectric converter and the original in a direction orthogonal to each other A device provided with a data processing unit for transmitting a signal as a read signal of information is well known as, for example, a facsimile or a copying machine.

A device in which light receiving elements are arranged one-dimensionally and which is connected to a personal computer, a word processor or the like to read a manuscript or a part of a sentence is well known as a hand scanner.

An image input / output device described in Japanese Patent Publication No. 5-40927, for example, is known as an input / output device for image information such as characters and figures, which is being studied for practical use as an input / output device for a computer. There is. The information input section of such an apparatus is composed of a panel in which light receiving elements are formed in a two-dimensional matrix, and such a panel is disclosed, for example, in JP-A-60-262236 and JP-B-4-52485. And the applicant of the present application has also disclosed in JP-A-60-1135.
No. 87 has been proposed, and a panel in which a plurality of photovoltaic cells are arranged in a two-dimensional matrix is further proposed.
-130152 is proposed.

[0005]

When the above-mentioned prior art is applied to a two-dimensional input module element for a portable information device, the two-dimensional input is performed so that the performance of the portable information device can be sufficiently exerted. Although it is necessary to devise the structure of the module element, this point is not mentioned in the above-mentioned conventional technology.

An object of the present application is to provide a two-dimensional input module element having structural characteristics suitable as a component for portable information equipment.

[0007]

[Means for Solving the Problems] Characters recorded on a manuscript,
A two-dimensional input module element having a sensor panel for reading in pictorial information and the like, and an envelope supporting the sensor panel, wherein the envelope has a so-called cylindrical shape having an upper opening and a lower opening. The sensor panel has a shape and supports the sensor panel in such a manner as to surround the peripheral portion of the sensor panel, and the sensor panel has a transparent substrate and a photovoltaic cell formed on the transparent substrate, and the photovoltaic cell formation surface side of the transparent substrate. Is oriented toward the document contact surface.

Further, the transparent substrate has an electrode hole for connecting a signal line, and the signal line is attached to the surface of the transparent substrate which is not the original contact surface side through the electrode hole. Is characterized by.

The electrode holes are arranged in a staggered pattern on the transparent substrate. Further, it is characterized in that it is an element structure formed by hermetically sealing.

Further, the sensor panel is attached to the envelope via a fine movement portion, and the fine movement portion is attached so that the driving direction thereof coincides with the surface direction of the sensor panel.

The upper opening and the lower opening of the envelope are both closed by a sensor panel.

Further, the envelope has a fine movement part for changing the installation angle of the sensor panel, and the fine movement part is formed so that the driving direction thereof coincides with the vertical direction of the surface direction of the sensor panel. It is characterized by

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a two-dimensional input module element according to the present invention will be described below in detail with reference to the drawings. In the following description, the same members are designated by the same reference numerals.

[First Embodiment] First, the two-dimensional sensor device used in the two-dimensional input module element of the present invention is
A two-dimensional sensor panel 12 (hereinafter referred to as a sensor panel) for inputting information by light reflection, which is described in detail in Japanese Patent Application No. 7-130152 filed by the present applicant. The present invention is a so-called inverted structure (Japanese Patent Application No. 7-
This is a two-dimensional input module element using the two-dimensional sensor panel of No. 130152 (see FIG. 8). 1 to 3
Will be described with reference to the drawings. As the two-dimensional sensor panel 12, a panel having another conventional structure can be used.

FIG. 1 is a plan view of the two-dimensional sensor panel 12, FIG. 2 is a sectional view taken along the line EF of FIG. 1, and FIG. 3 is a detailed view of FIG.

In FIG. 1, reference numeral 1 is a transparent substrate, and a glass substrate, for example, is used as the material. First electrode 4
Is a stripe-shaped first electrode formed on the transparent substrate 1 by an optically low-transmittance material such as nickel or aluminum. On the transparent substrate 1 on which the first electrode 4 is formed, an amorphous silicon layer 3 stacked in a stripe shape in a direction orthogonal to the first electrode 4, and an ITO optically on the amorphous silicon layer 3 are formed. There is a stripe-shaped second electrode 2 formed of a material having high transmittance such as.

When an ITO film having a light transmittance of 80% is used for the second electrode 2 and a glass substrate having a light transmittance of 95% is used for the transparent substrate 1, a stack of the second electrode 2 and the transparent substrate is used. The light transmittance of the portion b is 75%.

At the end of the transparent substrate 1, there is a terminal portion 5 which is a region necessary for connecting a scanning signal.

The two-dimensional sensor panel 1 shown in FIG.
The sectional structure of No. 2 has a structure in which the first electrode 4, the amorphous silicon layer 3, and the second electrode 2 are sequentially laminated from the transparent substrate 1 side. In this way, the photovoltaic cells 6 are arranged in a two-dimensional matrix at the intersections of the first electrode 4 and the second electrode 2.
Is formed.

Therefore, light incident on the transparent substrate 1 like the incident light X in FIG. 2 passes through the transparent substrate 1 and the second electrode 2 and is formed into a stripe shape as shown by a in FIG. The amorphous silicon layer 3 and the first electrode 4 formed in a stripe shape are passed through, and the light is transmitted to the surface. Light incident as the incident light Y in FIG. 2 passes through the second electrode 2 and the transparent substrate 1 formed in the stripe shape shown in FIG. 1B and is transmitted to the back surface. Thus, it is possible to provide a sensor panel having a high light transmittance.

On the other hand, the light incident on the portion of FIG. 1a (the portion where the first electrode 4, the amorphous silicon layer 3 and the second electrode 2 overlap) is incident from the X direction (back surface) of FIG. Whether it is incident from the Y direction (front surface) or not, the light does not pass through to the opposite surface. This is because the incident light is blocked by the first electrode 4 having an optically low transmittance.

In this way, the first electrode 4 and the second electrode 2 are
Since the photovoltaic cells 6 are formed in a two-dimensional matrix shape at the intersection of, and there is a difference in light transmittance between the first electrode 4 and the second electrode 2,
The photocell does not respond to the light incident from the side (rear surface) where the first electrode 4 having a low light transmittance exists, while the light enters from the side (front surface) where the second electrode 2 having a high light transmittance exists. The photovoltaic cell 6 responds only to the generated light to generate a photoelectromotive force. The sensor panel 12 is configured in this way.

The amorphous silicon layer 3 has a very low lateral electric conductivity. That is, it can be said that the leakage between the lateral photovoltaic cells using amorphous silicon is extremely low. Therefore, even if the amorphous silicon layers 3 are connected in a stripe shape, the photovoltaic cell 6 is actually formed only near the intersection of the first electrode 4 and the second electrode 2. In some cases, a completely separated photovoltaic cell may be used.

As a method of forming each electrode and the amorphous silicon layer on the transparent substrate 1, a thin film may be formed by using a CVD apparatus or the like and then etching may be performed by an appropriate method.

The amorphous silicon layer is a p-type semiconductor,
The insulating layer and the n-type semiconductor are sequentially formed on the first electrode, or the n-type semiconductor, the insulating layer, and the p-type semiconductor are sequentially formed on the first electrode. There is no functional difference between them, and in short, the photovoltaic cell may be formed at the intersection of the first electrode and the second electrode. The sensor panel 12 shown in FIG. 1 does not depend on the number of photovoltaic cells formed in a matrix. That is, as long as it is a plural number, it may be four as used in the explanatory diagram, or a large number of 10,000 or more.

FIG. 3 shows a characteristic structure of the sensor panel 12 of the present application, that is, a structure in which the transparent protective film 100 in the final step is attached to the sensor panel 12 shown in FIG. As shown in the drawing, the original 8 comes into close contact with the surface of the transparent protective film 100 side. The transparent protective film 100 is intended to protect the second electrode 2 and the photovoltaic cell. The state of inputting the information written on the document in the configuration will be described with reference to FIG.

When reading information, the original 8 is placed on the surface 7 of the transparent substrate 1. Information is recorded on the original 8 with ink 9, for example. When the light a and the light b of the light source are incident from the surface opposite to the surface on which the original 8 is placed, the incident light is transmitted through the portion b of the sensor panel 12, and the transmitted light a and the light b are transmitted by the original 8. Is reflected.

At this time, the light b which is incident on the original 8 where the character or graphic information is written in the ink 9 like the light b is absorbed by the surface of the ink 9 so that the reflection is weak and the reflected light is reflected. Is almost gone. On the other hand, conversely, the original 131
Light that is incident on the blank part of is strongly reflected. Therefore, if the intensity of this light is detected as the intensity of the current generated by the photocell, the information written on the original 8 can be read.

The two-dimensional input module element of the present invention has a structure that can be inserted into a printed circuit board or an IC socket by using the two-dimensional sensor panel 12 for inputting information by light reflection described in FIGS. 1 to 4. Thus, anyone can easily use it as a module element of an electronic component.

Therefore, the two-dimensional input module element of the present invention will be described with reference to FIGS. 5 is a perspective view of the overall structure of a two-dimensional input module element as a module component, and FIG. 6 is a cross-sectional view of the two-dimensional input module element of FIG.

In FIG. 5, there are a plurality of metal electrode pins 11 protruding from the inside of the envelope 10 having a flat package structure. The electrode pins 11 can be easily connected to a printed circuit board, an IC socket or the like. I am trying.

In order to use the electrode pin 11 as an electronic component, it must be easily attached to a printed circuit board or an IC socket. In particular, it is desirable to unify the pin intervals called the DIP type of the IC packages which are becoming popular nowadays. Since the DIP type pins have a pin spacing of 2.54 mm (0.1 inch), the electrode pins 11 are installed at a spacing of 2.54 mm (0.1 inch) also in the two-dimensional input module element of the present application. deep.

Further, since the two-dimensional input module element scans a plurality of photocells, the number of signal lines is very large, and even if electrodes are provided around the envelope 10 at a pitch of 2.54 mm, it may be insufficient. If necessary, it may be 1.27 mm. The spacing is set to an integral multiple of 1.27 mm so that wiring can be easily performed on a printed circuit board or an IC socket.

The electrode pin 11 projects so as to surround the side surface of the envelope 10 having a flat package structure once. However, since the envelope 10 is used from both front and back sides, the electrode pin 11 is formed. The shape of the protrusion is an I shape. Of course, an L shape that can be inserted into a conventional socket may be used as long as it does not interfere with the incidence of light or the opening of the envelope.

The structure of the envelope 10 having the flat package structure is such that an upper opening 14 is provided at an upper portion of the envelope 10 and a lower opening 15 is provided at a lower portion of the envelope 10 so that external light such as natural light can freely enter and exit. The external light 16 can pass from the outside of the envelope 10 through the inside of the envelope and go outside.

The opening 14 in the upper part of the envelope 10 is arranged so that the surface 12a of the sensor panel can be seen, and the opening 1
Photoelectric cells 6, which are light receiving portions, are arranged in a matrix at 4. With the plurality of photocells 6, information can be read by placing an original document to be input on the sensor panel surface 12a.

That is, the light reflected on the document surface takes in external light 16 from the lower opening 15 from the outside of the envelope 10, passes through the inside of the envelope, passes through the sensor panel 12, and passes through the document surface. The light reflected by the light is detected by sequentially scanning the photocells 6, which are a plurality of light receiving parts. The opening 15 at the bottom of the envelope 10 is closed by a transparent plate 19 made of a material that transmits light. The material of the transparent plate 19 is, for example, a glass plate,
Acrylic board may be used.

In this state, it is important that the document to be read can be seen outside the upper opening 14 when viewed through the lower opening 15. The greatest feature is that there is no member that obstructs the light 16 and the sensor panel 12 can be visually carried to the information desired to be read on the document.

Further, since the signal processing unit or the like mounted inside the envelope 10 handles a very small signal (for example, the output signal of the photocell 6 is of the order of nA), the signal SN
Noise measures are indispensable so that the noise can be improved. In the present invention, the envelope 10 is made of a metal material having a high shielding effect that shields external noise from the outside. The material is preferably aluminum or copper in terms of cost. Surface plating with high shielding effect may be used. The envelope 10 made of, for example, a metal material is provided with an insulating material 17 in order to insulate it from the electrode pins 11.

As for the reading range of the document information, when the document is placed so as to close the opening 14 in the upper part of the envelope 10, the range corresponding to the area of the opening 14 can be read.

As long as the shape is an electronic part, the input is in a narrow range, but the advantage is that the small size and flat structure are utilized, and as a part that can be mounted anywhere, the opposite side can be seen through the envelope 10. By utilizing the above, the range of application can be expanded as follows. 1. It is possible to read a wide information range by mounting the two-dimensional input module element on the XY mechanism system and moving the document while moving the document. 2. A wide information range can be read by inputting an original while moving it along the two-dimensional input module element. 3. While reading a manuscript with a relatively small area such as business cards and postcards, you can do so while checking the read information. 4. Even when the detection signal is weak on a document that is difficult to reflect depending on the information, the external light source can be freely brought close to it, and the user can create a measurement environment with a table lamp or the like according to the document. 5. By making it into a thin package, it becomes an IC card or PC card type, and it is made into a small scanner by taking advantage of its small size and portability. 6. Strong light is input from the outside as a fingerprint input, the detected minute signal is amplified by the light, and the S / N is raised before use. Fingerprint input module element. As described above, according to the present invention, the surface of the document on which the information is written is changed to the envelope 10
This is an information input component that can input document information by closely contacting the opening 14 of the sensor device surface 12a.

Next, a means for bringing the original into close contact with the sensor panel surface 12a which closes the opening 14 of the envelope 10 will be described.

In order to reliably obtain a signal from the sensor panel 12, it is essential that the panel and the original are in close contact with each other. The sensor panel surface 12a that closes the opening 14 of the envelope 10 must be free from the step 90. Further, in order to scan the photocells of the sensor panel 12 to process signals, it is necessary to connect signal lines to the electrodes of the sensor panel 12. This time, the signal processing unit was integrated into an IC and mounted, but there was a big problem here.

The first electrode 4 and the second electrode 2 are the transparent substrate 1
Is formed on the surface side of. That is, it is on the side of the sensor panel surface 12a where the photocell 6 on the side of contacting the document exists.

A chip 50 in which a signal processing unit is integrated is arranged on a flexible substrate 51, and this is mounted on the sensor panel 1.
2 will be connected to the first electrode 4 and the second electrode 2.

The problem of the above configuration will be described together with the problem solving means with reference to FIG. Although the connection to the second electrode 2 will be described here, the same applies to the first electrode 4.

FIG. 7A is an explanatory view showing a state in which the flexible substrate 51 of the conventional method is connected to the second electrode 2 formed on the sensor panel 12.

In the conventional structure shown in FIG. 3A, the height of the chip 50 mounted on the flexible substrate 51 prevents the original 8 from being brought into close contact with the flexible substrate 51. A very small original can be in close contact, but a large original cannot be in close contact with the flexible substrate 51 and the chip 50.

A means for solving this is shown in FIG. A small electrode hole 52 is formed in the second electrode 2 to guide the electrode to the back surface of the sensor panel 12, and the flexible substrate 5
1 is connected to the back surface of the sensor panel 12. As shown in the figure, the original 8 can be brought into close contact with the flexible substrate 51 and the chip 50 without being disturbed. It is to be noted that FIG. 3C is a schematic view of the configuration of FIG. 2B viewed in a direction perpendicular to the sensor panel 12.

As shown in the figure, the chip 50 is arranged on the flexible substrate 51, and connects a plurality of signal lines forming the flexible substrate 51 and a plurality of electrode holes 52 of the sensor panel 12. Then, the plurality of signal lines are connected to the electrode pins 11 so as to be guided to the outside of the envelope 10. When the envelope 10 is made of a metallic material or the like, the insulating material 17 is sandwiched between the conductive material and the electrode pin 11.

A method of forming the electrode holes 52 on the transparent substrate 1 will be described with reference to FIG. FIG. 6A is an explanatory diagram when the electrode holes 52 are processed in a line on the transparent substrate 1, and FIG. 6B is an explanatory diagram when the electrode holes 52 are processed in a staggered pattern on the transparent substrate 1.

With the current technology, which is difficult to perform fine processing, there are cases where it is not possible to process holes that match the width of the electrodes. As the arrangement at that time, it is desirable that the arrangement shown in FIG. Of course, depending on the length of the flexible substrate and the length of the extraction electrode from the photocell, the number of rows may be three or more instead of two as in (b).
The wider the gap, the more the strength of the sensor panel 12 is maintained.

Next, regarding the method of forming the electrode holes 52,
The details will be described below. Before vapor-depositing the electrodes (the first electrode 4 and the second electrode 2) on the glass substrate 1, a plurality of fine holes are provided at an electrode pitch as a glass microfabrication technique. This time, as a processing technique, CO ₂ laser processing was used to perform 100 μmφ to 200 μmφ (the diameter according to the width of the electrode does not depend on this value). Also, 100μ
If it is a hole having a diameter of mφ or more, it can be processed by water jet processing.

After making holes in the glass substrate 1, a Teflon film is attached to the back side of the glass substrate 1 (the side on which ICs and the like are wired), and electrodes are formed by vapor deposition from the front side (the side on which the photovoltaic cell is formed). Thereby, the electrode is vapor-deposited on the inner wall surface of the hole of 100 μmφ to 200 μmφ by using CO ₂ laser processing in advance.

The Teflon film is attached for the following reason. That is, when the electrode material is vapor-deposited on the surface of the glass substrate (= photocell formation surface) having the holes, the electrode material is exposed through the holes on the back surface of the glass substrate (=
The phenomenon of being attached to the flexible substrate connection surface) occurs. This phenomenon is used to form the electrode material for connecting the flexible substrate around the hole on the back surface of the substrate. In this case, the amount of the electrode material deposited may be excessive. In order to prevent this and form the electrode material in a predetermined shape, a Teflon film is previously attached to a transparent substrate for masking (the Teflon film is removed after the electrode vapor deposition process).

This method enables the embodiment shown in FIG. 8 (b) in which the signal line connected to the sensor panel 12 is on the back side.

FIG. 9 shows a sectional view of the modularized element structure. If necessary, the electrode pin 11 and the electrode hole 52 are connected by the wire lead 23. In this way, by connecting each input / output signal line to the electrode pin 11 made of a conductive material, a flat package structure can be provided in which the signal is guided to the outside of the envelope 10 and signals can be input / output.

In the inside of the element structure, the transparent plate 19 that closes the lower opening and the sensor panel 1 that closes the upper opening.
An airtight seal 40 is preferably made by bonding 2 to the envelope 10. With such a configuration, the airtightness of the inside is enhanced, and therefore, it is less likely to be affected by the humidity and the temperature change from the outside, so that the deterioration of the sensor panel 12 can be prevented.

It should be noted that, in FIG. 9, the envelope 10 and the one that closes the opening of the envelope 10 are made flat. It is desirable not to disturb the movement of the original that comes into close contact with the envelope.

Further, it is desirable that the inside of the envelope 10 is kept in vacuum for heat insulation. As described above, the sensor panel 12 is hermetically sealed, and the sensor panel 12 and the current-voltage conversion / amplification unit 45 mounted as necessary.
The generated heat is vacuum-insulated by holding it in a vacuum so as not to be thermally connected.

The structure at this time is shown in FIG. With this configuration, the gain adjusting unit 46 can be controlled from the outside 71,
It is possible to follow changes in the incident amount of external light. The vacuum heat insulation treatment has the effect of preventing the characteristic change of the center panel 12 due to the temperature characteristic and the change of the bias current of the FET input OP amplifier of the amplifying section used for amplifying a minute signal, and is a very stable module element. Can be realized.

[Embodiment 2] While eliminating the plane light source by utilizing external light has a great effect, when only natural light is taken in from the outside of the envelope, the sensor panel 1
It is desirable that the light passing through a portion (opening portion of the sensor panel) where the second photovoltaic cell is not formed is as much as possible.

When reading characters with the sensor panel 12, it is necessary to increase the number of segments in order to have a specification of 200 dpi or more, that is, a certain resolution.

However, if an attempt is made to increase the aperture ratio of the sensor panel 12 in order to increase the amount of light transmission, the number of photocells installed in the sensor panel 12 cannot be increased and the resolution cannot be improved. is there.

In the second embodiment, the sensor panel 12
2 shows a structure in which the envelope is provided with a fine movement part in order to increase the information reading amount and increase the resolution without increasing the number of photocells formed in (1) (without changing the aperture ratio of the sensor panel 12).

FIG. 11 shows the structure, that is, the structure of the envelope 10 having the fine moving part 69. The sensor panel 12, the fine movement part 69, and the envelope 10 are connected to each other, and the fine movement movement 120 of the fine movement portion 69 enables the sensor panel 12 to be finely moved in the direction 121.

The fine movement part 69 connected to the sensor panel 12 implemented this time will be described. A piezoelectric element is used for the fine movement unit 69. The piezoelectric element has the advantage that it is easy to obtain a desired amount of movement and that it is easy to attach it to the envelope.

The piezoelectric element is an element capable of reversibly converting electric energy into mechanical energy. This is an element in which a positive piezoelectric effect in which an electric field proportional to the stress is generated when a mechanical stress is applied, and an inverse piezoelectric effect in which a distortion is proportional to the electric field when an electric field is applied, appear on the contrary.

In this element structure, an electric field of a certain value or more is applied from the outside to invert the domains (polarization treatment) so that the domains have a single domain crystal structure in which all crystal axes are aligned. Consists of. The ceramic exhibits a piezoelectric effect in response to external energy. In this way, the piezoelectric effect does not occur unless the domains are aligned by polarization processing.

When polarized, when not polarized, a large strain is generated in the polarization direction differently, and this strain exhibits an inverse piezoelectric effect according to an electric field from the outside. This effect is mainly obtained when the longitudinal direction electrode direction and the stretching strain direction are the same direction (piezoelectric constant d ₃₃ ).
And the case where the lateral effect electrode direction and the stretching strain direction are vertical (piezoelectric constant d ₃₁ ). The relationship between the applied voltage and the expansion / contraction direction depends on whether the design uses the vertical effect or the horizontal effect.

The actual expansion / contraction operation will be described in detail with reference to FIG. FIG. 11A is an explanatory diagram of a state in which a voltage is applied to the piezoelectric element 90 designed in the lateral effect, and FIG. 9B is an explanatory diagram of a state in which a voltage is applied to the piezoelectric element 90.

When the lateral effect design is performed as shown in FIG. 12, the electrode direction and the expansion / contraction part displacement direction are perpendicular. When a positive voltage 92 is applied to the polarization electrode 91 of the piezoelectric element 90, the polarization electrode 91 tends to expand in the polarization direction due to the lateral effect, and consequently contracts in the vertical direction.

Next, when a negative voltage 92 is applied to the polarized electrode 91 of the piezoelectric element 90, the polarized electrode 91 is generated by the lateral effect.
Tends to contract in the polarization direction, and consequently expands in the vertical direction.

A state 160a extends in the polarization direction and contracts in the vertical direction from the standard state 160, and a state 160b extends in the vertical direction from the standard state 160 due to contraction in the polarization direction.

FIG. 13 is a schematic explanatory view of the operation of the fine moving part in the configuration of the present application. The figure (a) shows the configuration of the present application as seen from the cross-sectional direction, and the figure (b) shows the configuration of the present application as seen from directly above.

The first fine moving portion 68 and the second fine moving portion 69 can be freely expanded and contracted by operating as described above.
By contracting the fine moving part 69 when the fine moving part 68 is extended, and by contracting the fine moving part 69 when the fine moving part 68 is extended, the sensor panel 12 moves to the left and right.

Therefore, the sensor panel 12 attached to the ends of the fine moving portions 68 and 69 moves slightly in the direction of the reference numeral 121, and the reading range of the original can be changed.

The sensor panel 12 that closes the opening is moved by the fine movements of the fine movement portions 68 and 69 in the X-axis direction, and further by the fine movements of the fine movement portions 70 and 71 attached to the envelope in the Y-axis direction. Also moves in the Y direction. By controlling this by applying a voltage, the sensor panel 12 can be freely moved in the two-dimensional direction.

The fine movement parts 68, 69, 70, 71 are fixed in the envelope 10 so as not to move. As described above, it is possible to provide the two-dimensional input module element in which the sensor panel 12 can be freely two-dimensionally finely moved by the voltage input.

As described above, by configuring the fine movement part by the piezoelectric element made of the piezoelectric material capable of reversibly converting the electric energy into the mechanical energy, the fine movement amount can be easily determined by the voltage. Further, by adopting the configuration of the piezoelectric element, it is possible to obtain a fine movement unit that is small in size, can generate a large force, has quick response, high displacement accuracy, is lightweight, and is inexpensive. Since it has a very small structure, the sensor panel surface and the envelope surface do not feel strange, and it is easy to mount.

Since the amount of fine movement of the piezoelectric element can be designed by calculation, the sensor panel 12 can be accurately controlled by changing the voltage value.

According to the two-dimensional input module element according to the second embodiment, the integrated sensor panel 12 is provided.
The user can freely change the fine movement part by freely placing it on the upper part of the envelope, and it can be used anywhere. The two-dimensional input module element of the sensor panel 12 provided with the fine movement part is placed on a document from which information is read, and at that time, control is performed so that a good signal output can be obtained depending on the state of use. Therefore, it has lower power consumption, thinner and lighter weight.
It can be a dimensional input module element.

Next, the principle of increasing the resolution by the above configuration will be described with reference to FIG. When the sensor panel 12 is finely moved in the direction of reference numeral 190 as shown in FIG. 7A, the photocell located at the position 6 moves to the position 6a as the sensor panel 12 moves.

In this way, if the amount of information read by the photocell is increased, such as at position 6 and position 6a, information corresponding to photocell 6a can be obtained between photocell 6 and photocell 6f before the movement. In addition, this time, photocell 6 and photocell 6f
While the information corresponding to the photocell 6a is obtained during the period, the amount of information to be read may be increased by further moving in a stepwise manner.

An example of reading by moving the other sensor panel 12 is shown in FIG. The photocell located at the position 6 is replaced by the four fine movement parts 68, 69, 7 in FIG.
By driving 0 and 71, fine movement is performed sequentially. Code 20
By moving sequentially in the direction 0, 201, 202, 203, the photovoltaic cell moves sequentially from position 6 to 6a, 6b, 6c and back to position 6 and detects the information at each position. As a result, the resolution can be increased without increasing the number of photocells provided in the sensor panel 12.

When a defect is found in any of the photocells of the sensor panel 12, the reading appears as a line defect. At this time, it is possible to cover a normal photocell located in the vicinity of the defective part by moving it to the position of the photodefective part by the fine movement part, and a simple relief can be performed.

[Third Embodiment] Next, a two-dimensional module element structure is proposed in which it is possible to confirm whether or not the envelope is securely approaching and closely contacting the original. A perspective view of the structure is shown in FIG.

In this structure, the envelope 10 is provided with the paper detecting section 210. The paper detection unit 210 is provided so as not to project from the surface of the envelope 10, and a document is confirmed using a reflective sensor that reflects a signal on the document surface. Further, it is possible to detect a case where the document is interrupted.

Further, if a photosensitivity detection sensor is used as the paper detection unit 210, it is possible to determine the type of the original by detecting the change in reflectance due to the difference between the thin and thick papers of the original.

[Fourth Embodiment] FIG. 16 is an explanatory view of an embodiment in which an auxiliary light source is mounted at a position that does not prevent the incidence of external light inside the envelope.

The signal may be weak with natural light only depending on the usage environment. If the light is weak, the output signal from the sensor panel 12 will be weak, and the resolution will be deteriorated.
Furthermore, it may be difficult to take outside light depending on the arrangement of each component around the sensor panel 12.

Therefore, the transparent plate 19 and the sensor panel 12
The auxiliary light source 130 is provided at a position that does not interfere with outside light such as natural light passing through the sensor panel 12 to increase the amount of light. Further, a reflection plate 131 is provided behind the auxiliary light source 130 and at a position facing the sensor panel 12, so that the light of the auxiliary light source 130 can be effectively used. At this time, it is desirable that the auxiliary light source 130, the reflection plate 131, and the like be provided at the end of the envelope in which the flexible substrate 51 and the like are housed so as not to block light incident from the outside.

[Fifth Embodiment] Further, when various signal processing units such as the current-voltage conversion amplification unit 45 for amplifying the detection signal are mounted inside the envelope 10, the signals handled by the processing unit are extremely small. Since it is a very small signal, it is surrounded by a shield plate 140 as shown in FIG.
It is desirable to take measures by 41. The transparent plate 1
9 and the sensor panel 12 are preferably provided at a position where they do not interfere with outside light such as natural light passing through, and are preferably provided at the end of the envelope that houses the flexible substrate 51 and the like.

In the case of combining with the fourth embodiment, a signal processing section is installed after the reflecting plate 131, and the auxiliary light source 130 is installed.
Have both the reflection purpose and the shield purpose of.

[Embodiment 6] In the next-proposed two-dimensional module element, the upper and lower openings of the envelope are closed by two sensor panels 12, and the original can be read on any surface of the envelope. This is a module structure proposal. In the present embodiment, the transparent plate 19 having the structure shown in FIG. 6 is used for the second sensor panel having the same structure as the sensor panel 12 to close the lower opening of the envelope so that both sides of the module element can be used.

In the drawings of the embodiment, the transparent plate 19 shown in FIG. 9 is merely replaced with the sensor panel 12, and the description thereof is omitted here. However, since the aperture ratio of the sensor panel 12 is smaller than that of the first embodiment, the amount of light from the outside is reduced, and thus it is desirable to provide the auxiliary light source shown in the fourth embodiment.

Further, in order to transmit the light from the outside as much as possible, the photocells of the first sensor panel 12 that closes the opening in the upper part of the envelope and the photocells of the second sensor panel that closes the opening in the lower part of the envelope. The center points of the formed parts should be aligned. As a result, the first sensor panel opening that closes the opening in the upper part of the envelope and the second sensor panel opening that closes the opening in the lower part of the envelope become linear, and the original does not interfere with the straight movement of light. Be led to.

Furthermore, the center points of the portions where the photocells are formed of the first sensor panel that closes the opening in the upper part of the envelope and the second sensor panel that closes the opening in the lower part of the envelope are aligned. By doing so, even if the two-dimensional input module elements are aligned and attached, they can be easily turned upside down and can be used without changing the original reading portion.

[Seventh Embodiment] Next, a seventh embodiment is proposed as a means for surely bringing the original into close contact. After fixing the two-dimensional input module element to the system, the position of the envelope is almost fixed and cannot be moved by reading. However, when actually reading the original, due to the thickness of the original, folds, wrinkles, etc., the sensor panel and the original do not always adhere to each other in the same state. Then, FIG. 18 proposes a two-dimensional input module element provided with a means for bringing the sensor panel close to the original so as to lift the sensor panel from the attached envelope.

That is, the close contact fine movement part 150a that moves finely so as to lift the sensor panel 12 is provided at the connecting portion with the sensor panel 12 mounted so as to close the opening of the envelope 10. Adhesion fine movement part 150a
It is desirable that the fine movement part is composed of, for example, a piezoelectric element. The operation principle of the close contact fine movement part 150a at this time is shown in FIG.
Since it has been described above by using, the description thereof will be omitted here.

In the state shown in FIG. 18A, the close contact fine movement part 150a is in a normal state and the sensor panel 12 is in the envelope 1.
It is set to be within 0. Here, the state in which the close contact fine movement part 150b is operated so as to lift the sensor panel 12 depending on the state of the original is the state shown in FIG. As a result, the folds and wrinkles can be extended so as to push the original document on the sensor panel 12, so that the documents can be surely brought into close contact with each other.

Further, as shown in FIG.
0 fine contact parts 150c, 150 provided on the left and right
The amount of fine movement is changed by operating d independently,
The angle of the sensor panel 12 may be changed. In the drawing, the close contact fine movement part 150c is the close contact fine movement part 1
By increasing the displacement amount from 50d, the sensor panel 12
It shows that it is angled.

Of course, the function of moving the sensor panel 12 in the two-dimensional direction for the purpose of increasing the resolution is to use the contact fine movement unit 1
It may be configured to operate in a three-dimensional direction in combination with 50a. With such a configuration, it is possible to realize a two-dimensional input module element that can deal with all documents and according to the usage status.

[0104]

According to the present invention, in the structure of the sensor panel, since the photocell formation surface side of the transparent substrate faces the document contact surface, the distance between the document surface and the photocell is short, and therefore the loss of light input to the photocell is reduced. Therefore, a high-performance module element can be provided.

It is preferable that the envelope is made of a metal material or the like that blocks noise, because it can exhibit the effect of blocking external noise from the outside of the envelope. Also, when it is mounted on the system, it can be easily set to the ground potential by using a metal enclosure.

In addition, the wiring board of the sensor panel 12 is
By placing the sensor panel 12 on the back surface of the sensor surface of the sensor panel 12 that comes into contact with the original, the original can be brought into close contact with the sensor panel without being disturbed by the signal lines and the flexible cable. Of course, by eliminating the step from the envelope, it is possible to attach even large documents. In addition, since the electrodes in a matrix are very thin, the signal lines that can be connected are naturally thin and easy to break, but it is possible to protect by connecting the signal lines on the back side inside the envelope. it can. Furthermore, the IC itself can be protected because the IC is housed inside the envelope.

Further, the electrode can be guided to the back surface most reliably and simply by forming a hole penetrating the sensor panel.

Further, there is no need to form an electrode on the back surface of the sensor panel, which is advantageous in terms of cost.
Also, if a hole is formed in advance through the sensor panel and then a film is formed, the inner wall surface of the hole is also vapor-deposited at one time to form an electrode, and the electrode can be guided to the back surface by a simple process.

In addition, since there is a limit in the present technology for finely processing holes on a plurality of electrodes, the problem that adjacent electrode holes may be connected in some cases causes a staggered arrangement of holes at the time of fine processing. It can be avoided by making a state. Further, it is advantageous to arrange the sensor panels in a zigzag pattern rather than in a line.

Further, the opening of the envelope is hermetically sealed by the sensor panel, and heat generated by signal processing of each part and heat generated by light emission of an auxiliary light source mounted as necessary are thermally coupled. In order to prevent this, the inside of the envelope is vacuum-insulated by maintaining a vacuum. Further, it is possible to suppress the output change due to the temperature characteristics of the sensor panel.

Further, since it is a transmissive type envelope, it is possible to move the photocell portion of the sensor panel so as to obtain a good signal while confirming the information written on the document. Further, the read information amount can be increased by slightly shifting the read information after reading it once again, and the resolution can be increased. One photocell corresponds to one pixel, but by moving it with the fine movement part, more information can be obtained than with the photocell, and there is a great effect that the interpolation pixel can be apparent.

Further, it is possible to provide a fine movement part made of a material most suitable for a module, which is small in size, capable of generating a large force, quick in response, high in displacement accuracy, light in weight, and low in cost. Of course, fine movement is possible without requiring a complicated mechanical system, and it can be mounted on the envelope with a simple shape.

Further, not only the signal can be surely obtained at the time of reading the original, but also the control signal for suppressing the power consumption except when necessary can be obtained. Further, the degree of contact between the module element and the original can be confirmed.

Further, the detection output signal from the sensor panel can be increased by adding the light amount of the auxiliary light source to the natural light which is the external light and increasing the light amount.

It is possible to adjust the amount of light that changes depending on the usage environment.

Further, a module which can be used on both sides can be provided by closing the lower opening with a sensor panel composed of a plurality of photovoltaic cells. Since the aperture ratio of the sensor panel that allows light to pass through is about half, it is desirable to install an auxiliary power supply.

Further, unless the positions of the opening windows through which the light of the sensor panel passes are matched between the upper and lower sensor panels, it is difficult for external light to pass therethrough, and it is possible to prevent the problem that the amount of light decreases.

Further, when the envelope of the module element is not in close contact with the document, the sensor panel can independently move slightly so as to push the document.

Further, since the envelope cannot be moved after the systemization as a module element, the sensor panel can be aligned with the document as the final adjustment of the module element according to the usage pattern. Further, it can be adjusted so as to be in close contact with creases, wrinkles, etc. of the document. In addition, the detection signal is as large as this,
Adjustment can be performed by the vertical fine movement unit so that SN increases.

[Brief description of drawings]

FIG. 1 is a plan view of a sensor panel according to an embodiment of the present invention.

FIG. 2 is a sectional view of a sensor panel according to an embodiment of the present invention.

FIG. 3 is a more detailed cross-sectional view of the sensor panel of the present application.

FIG. 4 is an explanatory diagram showing how information is input to the sensor panel of the present application.

FIG. 5 is a perspective view of a two-dimensional input module device of the present invention.

FIG. 6 is a sectional view of a two-dimensional input module element of the present invention.

7A to 7C are explanatory views (a) to (c) showing how the IC mounted on the sensor panel of the present application is mounted.

8A and 8B are explanatory views (a) and (b) of the arrangement of electrode holes for IC mounting on the sensor panel.

FIG. 9 is an explanatory diagram of an internal state of the two-dimensional input module element of the present application.

FIG. 10 is an explanatory diagram of a signal processing unit of the two-dimensional input module element of the present application.

FIG. 11 is a diagram showing a fine movement unit that enables the sensor panel of the present application to move in parallel to the surface direction of the panel.

FIG. 12 is a diagram showing the principle of operation of the piezoelectric element of one embodiment used in the present invention.

13A and 13B are a diagram (a) seen from a cross section of the panel and a diagram (b) seen from directly above, showing a moving state of the sensor panel by the fine movement part.

FIG. 14 is an explanatory diagram of interpolation processing by fine movement of the sensor panel of the present application.

FIG. 15 is an explanatory diagram of the two-dimensional input module element of the present application in which the envelope has a paper detection unit.

FIG. 16 is an explanatory diagram of a two-dimensional input module device of the present application including an auxiliary light source.

FIG. 17 is an explanatory diagram of a two-dimensional input module device of the present application including a shield plate.

FIG. 18 is an explanatory diagram of a two-dimensional input module device of the present application including a close contact fine movement part.

[Explanation of symbols]

1 Transparent base 2 Second electrode 3 Amorphous silicon layer 4 First electrode 6 photocells 8 manuscript 9 ink 10 envelope 12 sensor panel 14 Upper opening 15 Lower opening 16 outside light 19 Transparent plate 51 Flexible substrate 52 Electrode hole 68, 69, 70, 71 Fine movement part 90 Piezoelectric element 130 Auxiliary light source 150a Adhesion fine movement part 210 Paper detector

Claims (7)

(57) [Claims] 1. A two-dimensional input module element having a sensor panel for reading characters, picture information, etc. recorded on a document, and an envelope supporting the sensor panel, wherein the envelope is an upper part. It has a so-called tubular shape having an opening and a lower opening, and supports the sensor panel in a form surrounding the peripheral portion of the sensor panel, the sensor panel being a transparent substrate, and a photovoltaic cell formed on the transparent substrate. A two-dimensional input module element, characterized in that the photocell formation surface side of the transparent substrate faces the document contact surface. 2. The transparent substrate has an electrode hole for connecting a signal line, and the signal line is attached to the surface of the transparent substrate, which is not the original contact surface side, through the electrode hole. The two-dimensional input module element according to claim 1, characterized in that 3. The two-dimensional input module element according to claim 2, wherein the electrode holes are arranged in a staggered pattern on a transparent substrate. 4. The two-dimensional input module element according to claim 2, which is an element structure formed by hermetically sealing. 5. The sensor panel is attached to an envelope via a fine movement part, and the fine movement part is attached so that a driving direction thereof matches a surface direction of the sensor panel. Item 2. The two-dimensional input module element according to item 1. 6. The two-dimensional input module element according to claim 1, wherein both the upper opening and the lower opening of the envelope are closed by a sensor panel. 7. The envelope has a fine movement part for changing an installation angle of the sensor panel, and the fine movement part is formed so that a driving direction thereof coincides with a vertical direction of a surface direction of the sensor panel. The two-dimensional input module device according to claim 1, wherein