JP3498293B2 - Substrate support device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate supporting device for supporting a large number of substrates on which thin films are formed by vacuum film formation such as sputtering.

[0002]

2. Description of the Related Art Conventionally, a substrate supporting device for supporting a large number of substrates has a pallet 1 as shown in FIGS.
Revolving type substrate support device in which a plurality of substrate holders 2 are non-rotatably installed along the circumference of the pallet 1 and only the pallet 1 is rotated, or along the circumference of the pallet 1 as shown in FIG. There is known a substrate supporting device of a revolving type in which a plurality of substrate holders 2 installed as above are rotatable, and a fixed gear 3 and a rotating gear 4 are meshed with each other so that when the pallet 1 rotates, the substrate holder 2 also rotates. Was there. Reference numeral 5 in each figure is a substrate (see, for example, JP-A-60-204882).

[0003]

In forming a thin film on the surface of a substrate, it is required that the film characteristics within the substrate can be made uniform and the film characteristics be made uniform between the substrates.

When forming a film on a substrate by sputtering, the revolving type substrate supporting device (FIGS. 5 and 6) also supports the revolving type substrate supporting device so that the substrate passes through a portion having good cathode characteristics. Also in the apparatus (FIG. 7), the substrate holders are arranged on one circumference along the periphery of the pallet, and one substrate is supported by each substrate holder, so that the characteristics of the cathode can be improved. They were able to face each other under the same conditions and satisfied the above requirements. However, in recent years, the diameter of the substrate has been reduced, and there is a demand for improving the productivity. To improve the productivity, the substrate is replaced (removed) with respect to the substrate supporting device.
Had to be automated.

In the conventional substrate supporting apparatus, it is expected that the number of substrates that can be supported on the pallet is increased and the productivity is improved by providing the substrate holders provided on the pallet on a plurality of circumferences. Since each circumference is at a position where the cathode characteristics are different, the film characteristics between the substrates become non-uniform, which makes it difficult to adopt.

Therefore, in order to increase the number of substrates that can be supported on the pallet, it is necessary to support a plurality of substrates on the substrate holder. In this case, the substrates are placed at the replacement position where they are attached and detached. If the arrangement is random, it is necessary for an automatic machine such as a robot for exchanging substrates to search for the substrate and move the attachment / detachment device, which is an obstacle to improving productivity.

[0007]

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and can support a large number of small-diameter substrates, make uniform film characteristics between the substrates, and automate substrate exchange. It is an object of the present invention to provide a substrate supporting device that can also be applied to.

In the substrate supporting apparatus of the present invention which achieves the above object, the rotatable pallet is provided with the substrate supporting portion at the center, and the pallet is equally divided along the circumference of the pallet (e is 2). In the substrate supporting device in which each of the substrate holders is rotatable at a position of (the above integer), and the substrate holder revolves by the rotation of the pallet, the substrate holder is arranged along the circumference of the substrate holder. Substrate supporting portions are provided at equal positions (d is an integer of 2 or more), and the auto-revolution mechanism between the pallet and the substrate holder is a substrate holder viewed from the pallet side when the pallet makes one revolution. The substrate support inside is rotated by k / (d × m) (k,
(m is an integer) and the pallet is n /
When rotated e (n <e, n is an integer),
Arrangement of the substrate support part on a certain substrate holder
Placement of the substrate support on the substrate holder in place
It is characterized by the same arrangement as .

[0009] Before SL predetermined position to one position or a plurality of locations.

[0010]

The rotation mechanism is a fixed gear or a fixed wheel.
And fixed to the shaft of the substrate holder and fixed gear or fixed
As the pallet rotates, the wheel meshes with the wheel or its peripheral surface makes contact.
Rotating gear that rolls around the fixed gear or fixed wheel
Can be configured with a rotating wheel . Fixed gear or fixed
Gear ratio between the wheel and the rotating gear or rotating wheel, or the circumference ratio of the circumferential surface
(Number of teeth of fixed gear or circumference of fixed ring / number of teeth of rotary gear or
Is the circumference of the rotating wheel) is k / (d × m).

[0012]

According to the substrate supporting apparatus of the present invention, since each substrate holder can support a plurality of substrates, it is possible to cope with an increase in the number of processed substrates.

Further, when the pallet makes one rotation, the substrate supporting portion in the substrate holder as viewed from the pallet side is rotated at a position rotated by k / (d × m). d × m) When rotated, each substrate will return to the initial position, so that each substrate in the substrate holder can be made to face the characteristics of the cathode on average, and the film between the substrates The characteristics can be made uniform.

Further, the pallet rotates n / e (n <e, n
Is an integer) , place it on the substrate holder in the predetermined position.
The board support is placed at a predetermined position before rotation.
Since the arrangement is the same as the arrangement of the substrate support portion in the plate holder, it is not necessary to search for the substrate on the automatic machine side such as a robot arranged at a predetermined position, and the substrate can be easily attached and detached. .

[0015]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 and FIG. 2 show a substrate supporting device of an embodiment, in which a circular substrate holder 13 is provided along a circumference of a circular pallet 12 rotatably supported by a stand 11.
The individual pieces are provided at evenly spaced positions. Axis 1 of substrate holder 13
The rotation gear 15 fixed to the No. 4 meshes with the fixed gear 16 provided on the stand 11 side, and when the pallet 12 is rotated, the substrate holder 13 revolves and rotates about its own axis.

The substrate holder 13 has 3 units at intervals of 120 degrees.
Substrate supporting portions 17 are formed at the points, and each substrate supporting portion 1
7, a circular substrate 18 can be supported via an outer peripheral mask 19 and an inner peripheral mask 20.

The ratio between the fixed gear 16 and the rotary gear 15 which constitute the above-mentioned auto-revolution mechanism is 16/3 = 5 · 1/3 (for example, the number of teeth of the fixed gear 16 is 160, the number of teeth of the rotary gear 15 is 30).

In the substrate supporting apparatus of the above embodiment, when the pallet 12 is rotated in the direction of the arrow 21, the substrate holder 1
3 revolves in the same direction, and the arrow 22 is shown around the shaft 14.
Rotate in the direction of. Here, the number of substrate holders 13 is e =
Since eight substrate support portions 17 are provided in the substrate holder 13 at d = 3 equal positions, the integers k and m are respectively k =
1 and m = 1, when the pallet 12 makes one rotation,
The substrate support portion 17 in the substrate holder 13 viewed from the pallet 12 side rotates on its own axis at a position rotated by k / (d × m) = 1/3. That is, with the state of FIG. 1 as the initial state, the pallet 12
When the substrate is rotated once in the direction of arrow 21, the substrate supporting portion 17 and the substrate 18, which were located at the position a in the substrate holder 13 located at the position A, come to the position b. That is, 1 for pallet 12
When rotated, the substrate holder 13 moves 1 in the same direction as the arrow 22.
/ 3 turn.

Therefore, the substrate support 17 located at the position a
Then, the substrate 18 returns to its original position after the pallet 12 has rotated three times.

Now, at the position of A in FIG. 1, the substrate holder 13 is installed so that the substrate 18 is located at each apex of the triangle convex to the left, and the pallet 12 is n / n with integer n = 1.
Next substrate holder 13 that comes to the position A every e = 1/8 rotation
Similarly, if all the eight board holders 13 are installed in the arrangement in which the board 18 is located at each vertex of the triangle convex to the left,
In the position of, the positions of the substrate supporting portion 17 and the substrate 18 in the substrate holder 13 can be always arranged as shown in FIG. At other positions, the arrangement as shown in FIG. 1 can be always set.

Therefore, if an automatic substrate changer is installed corresponding to the arrangement of the substrate 18 at the position of the apex of the triangle which is convex to the left with respect to the position of A, every rotation of the pallet by 1/8 rotation In addition, if the substrates 18 supported by the substrate holder 13 are detached and replaced by threes, the detaching work is performed eight times,
All substrates (24) can be replaced.

Further, the same automatic board changer as that described above is installed at the position A, and the board 18 is arranged at the apex of the triangle convex to the right with respect to the position B. An automatic exchange is installed, and the pallet 12 is rotated 1 / 8th,
The substrate 18 supported by the substrate holder 13 each time the substrate 18 is rotated.
If every three substrates are detached and replaced at two positions A and B, all the substrates (24 substrates) can be exchanged by four times of detaching work.

Considering the film formation process by sputtering, the substrate 18 supported at the position a on the substrate holder 13 at the position A returns to the position a after the pallet 12 rotates three times. That is, all the substrates 18 have three pallets 12
As a result of rotating and returning to the original position, the facing relationship with the target is averaged among the substrates, and the film forming characteristics between the substrates can be made uniform.

FIG. 3 shows the relationship between the pallet 12 and the substrate holder 13 of another embodiment.

FIG. 3 (a) shows an embodiment in which eight substrate holders 13 capable of supporting three substrates 18 are installed in the same manner as in the above-mentioned embodiment, and the pallet side at the position A and the position B. The arrangement of the substrate supporting portions in the substrate holder is the same as seen from above.

The gear ratios of the fixed gear 16 and the rotary gear 15 forming the auto-revolution mechanism are 11/3 = 3/2/3, 13/3 =
This can be achieved by setting 4 · 1/3, 17/3 = 5 · 2/3, etc.

In this embodiment, the automatic switch for the substrate for the position A and the automatic switch for the position B can have the same structure.

In FIG. 3A, the gear ratio between the fixed gear 16 and the rotary gear 15 is 77/18 = 77 / (3 × 6) = 4.
As 5 / (3 × 6), at the position A and the position B, the arrangement of the substrate support portions in the substrate holder 13 viewed from the pallet 12 side is the same, and the pallet 12 is rotated ⅛. Then, the next substrate holder 13 is placed in the same position at the position A and the position B, and the same work is repeated 8
After installing all the substrate holders 13, the pallet 12
The substrate holder 13 which was first rotated at the position A and rotated in the reverse direction.
When the state where the pallet 12 has returned to the position of A is the initial state, when the pallet 12 is rotated 18 times from the initial state, the position of the A and B
At each position, each substrate supporting portion 17 returns to the initial state.

By rotating the pallet 12 six times from the initial state, the substrate supporting portion 17 in the substrate holder 13 is moved to the positions A and B, respectively, at positions shifted by 2/3 rotations from the initial state, The arrangement is the same as the initial state.

That is, when d = 3 and m = 6, 77 / (3 × 6)
In the case of the gear ratio as shown in the above, the pallet is rotated six times until the arrangement of the substrate support portion 17 becomes the same shape at the position A and the position B, and then the automatic exchange of the substrate is started and the pallet 12 is ⅛
If the substrate is automatically exchanged each time it is rotated or rotated, all the substrates can be exchanged by four times of the detaching work.

FIG. 3B shows an embodiment in which seven substrate holders 13 capable of supporting four substrates 18 are installed.
The positions of the substrate supporting portions in the substrate holder are the same when viewed from the pallet side at the position C and the position D.

The gear ratio in the auto revolution mechanism is 17/4 = 4.
・ 1/4, 31/4 = 7 ・ 3/4, etc.

FIG. 3 (c) shows that the pallet 12 has 5
In this embodiment, six substrate holders 13 capable of supporting one substrate 18 are installed. At the position A and the position B, the arrangement of the substrate supporting portions in the substrate holder as viewed from the pallet side is the same.

The gear ratio in the auto revolution mechanism is 17/5 = 3.
・ 2/5, 19/5 = 3 ・ 4/5, 21/5 = 4 ・ 1 /
This can be done by setting 5, 23/5 = 4/3/5, etc.

Next, FIG. 3D shows an embodiment in which five substrate holders 13 capable of supporting seven substrates 18 are installed on the pallet 12. The substrate supporting portion 17 is provided at the center position of the substrate holder 13 and at a position where the circumference is equally spaced by 6 so that seven substrates 18 can be supported. E
The positions of the substrate supporting portions in the substrate holder as viewed from the pallet side are made to be the same at the position F and the position F.

The gear ratio in the auto revolution mechanism is 19/6 = 3.
This can be done by setting 1/6, 29/6 = 4/5/6, etc.

FIG. 4 shows a substrate holder 1 capable of supporting three substrates 18 as in the embodiment shown in FIG. 3 (a).
This is an example in which eight 3 are installed.

The arrangement of the substrate supporting portion 17 in the substrate holder is the same at each position of G, H, I and J.
If e = 8 and n = 2, then n / e = 2 /
The substrate support portions of the substrate holders that come to the positions of G, H, I, and J when 8 = 1/4 rotation are arranged in the same manner.

The gear ratio of the fixed gear and the rotating gear is 11/3 =
3/2/3, 13/3 = 4/1/3, 17/3 = 5.2
If set to / 3 etc., when the pallet 12 makes one revolution,
The substrate support portions 17 in the substrate holder 13 at the positions G, H, I, and J are rotated by 2/3, 1/3, 2/3, etc., respectively, so that the substrate support portions 17 in the substrate holder 13 are arranged. It will be constant. Here, an automatic board changer is installed at positions G to J to perform automatic board change, and then the pallet 12 is moved to 2/8 = 1 /
By rotating the substrate 4 times and automatically exchanging the substrates, all the substrates on the pallet can be exchanged.

Although some embodiments have been described above, the number of substrate holders 13 provided in the pallet 12, the number of substrate support portions 17 provided in the substrate holder 13 and the gear ratio are limited to those of the embodiments. Not. In addition to the diameter of the substrate 18, the number of supportable sheets, the allowable diameter of the pallet 12 and the installation conditions of the automatic exchange, the shape of each component and the gear ratio of the revolving mechanism can be determined. . In addition, although the self-revolving mechanism is a gear in the embodiment, it may be a mechanism other than the gear, that is, a self-revolving mechanism such as a fixed wheel and a rotating wheel.

[0042]

As described above, according to the present invention, since a large number of small-diameter substrates can be supported, it is possible to provide a substrate supporting device capable of increasing the number of substrates processed at one time.

Further, since the facing relationship between the substrate and the target can be averaged among the substrates, there is an effect that it is possible to provide a substrate supporting device which can make the film forming characteristics between the substrates uniform.

Furthermore, since the arrangement of the substrate supporting portions in the substrate holder viewed from the pallet side can be fixed, the automatic exchange for detaching the substrate does not need to search for the substrate, and the detaching work of the substrate can be performed. There is an effect that it is possible to provide a substrate supporting device that is easy and can improve efficiency.

[Brief description of drawings]

FIG. 1 is a front view of an embodiment of the present invention.

FIG. 2 is a partial cross-sectional view of the same embodiment.

3 (a), (b), (c) and (d) are explanatory views showing a relationship between a pallet and a substrate holder according to another embodiment of the present invention.

FIG. 4 is a schematic front view of yet another embodiment of the present invention.

FIG. 5 is a front view of a conventional revolution type substrate supporting device.

FIG. 6 is a partial cross-sectional view of a conventional substrate supporting device.

FIG. 7 is a partial cross-sectional view of a conventional rotation-revolution type substrate support device.

[Explanation of symbols]

12 pallets 13 Substrate holder 15 rotating gears 16 fixed gear 17 Substrate support 18 substrates

─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yoshihiro Sugiyama 5-8-1, Yotsuya, Fuchu-shi, Tokyo Within Nichiden Anerva Co., Ltd. (56) References JP-A-1-133319 (JP, A) JP-A-1 -312835 (JP, A) JP-A-4-13566 (JP, A) JP-A-57-70274 (JP, A) JP-A-5-314540 (JP, A) (58) Fields investigated (Int.Cl) . ^7, DB name) C23C 14/00 - 14/58 C23C 16/00 - 16/56

Claims (2)

(57) [Claims] 1. A rotatable pallet is provided with a substrate supporting portion at the center thereof, and is rotatable at a position of an equal part (e is an integer of 2 or more) along the circumference of the pallet. In a substrate holder, wherein the substrate holder is a substrate holder that revolves around the rotation of the pallet, the substrate holder is divided into d equal parts (d is an integer of 2 or more) along the circumference of the substrate holder. Substrate support portions are respectively provided at positions, and when the pallet makes one revolution, the substrate support portion inside the substrate holder when viewed from the pallet side is k / (d × m) Rotate to the rotated position (k and m are integers), and pallet
When n is rotated n / e (n <e, n is an integer),
The position of the board support on the
Substrate support part in the substrate holder in a predetermined position before transfer
A substrate supporting device having the same arrangement as the above arrangement . 2. The self-revolving mechanism includes a fixed gear or a fixed wheel,
It is fixed to the shaft of the substrate holder, meshes with or comes into contact with the fixed gear or the fixed wheel, and is composed of a rotary gear or a rotary wheel that rolls around the fixed gear or the fixed wheel as the pallet rotates. , Gear ratio of fixed gear or fixed wheel to rotary gear or rotating wheel or circumference ratio of circumferential surface (number of teeth of fixed gear or circumference of fixed ring / number of teeth of rotary gear or circumference of rotating wheel)
Is set as k / (d × m).
The substrate support device described.