JP3489909B2 - Monolithic crystal filter - Google Patents
Monolithic crystal filterInfo
- Publication number
- JP3489909B2 JP3489909B2 JP11377095A JP11377095A JP3489909B2 JP 3489909 B2 JP3489909 B2 JP 3489909B2 JP 11377095 A JP11377095 A JP 11377095A JP 11377095 A JP11377095 A JP 11377095A JP 3489909 B2 JP3489909 B2 JP 3489909B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrodes
- input
- output
- weighting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は通信機器等に用いられる
厚み系振動を用いたモノリシック水晶フィルタに関する
ものであり、特に一般に非調和（インハーモニック）振
動と称される不要振動の影響を抑制するモノリシック水
晶フィルタに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a monolithic crystal filter using thickness type vibration used in communication equipment and the like, and particularly suppresses the influence of unnecessary vibration generally called anharmonic vibration. The present invention relates to a monolithic crystal filter.
【０００２】[0002]
【従来の技術】従来技術を図１３、図１４、図１５とと
もに説明する。図１３はモノリシック水晶フィルタの表
面の電極構成を示す図、図１４は同裏面の電極構成を示
す図、図１５は同断面から見た電極構成並びに主振動モ
ードと（１，１，３）モードと一般に称されるスプリア
ス振動モードの振動エネルギー分布を示す図である。水
晶板１はＡＴカット水晶板であり、その表面に入力電極
８１、出力電極８２とこれら電極を水晶板外周に導く引
出電極８１ａ，８２ａが真空蒸着法等の薄膜形成手段に
て設けられ、裏面には同様の手段にて共通電極８３とこ
れら電極を水晶板外周に導く引出電極８３ａが設けられ
ている。なお、図示していないが、上記入出力電極８
１，８２はそれぞれ入出力端子に接続され、共通電極は
アース端子に接続された状態で気密封止されている。2. Description of the Related Art A conventional technique will be described with reference to FIGS. FIG. 13 is a diagram showing an electrode configuration on the front surface of the monolithic crystal filter, FIG. 14 is a diagram showing an electrode configuration on the back surface, and FIG. 15 is an electrode configuration viewed from the same cross section and a main vibration mode and a (1,1,3) mode. FIG. 3 is a diagram showing a vibration energy distribution of a spurious vibration mode generally called The crystal plate 1 is an AT-cut crystal plate, and an input electrode 81, an output electrode 82, and extraction electrodes 81a and 82a for guiding these electrodes to the outer periphery of the crystal plate are provided on the surface thereof by a thin film forming means such as a vacuum vapor deposition method, and the rear surface. A common electrode 83 and a lead-out electrode 83a for guiding these electrodes to the outer circumference of the quartz plate are provided by the same means. Although not shown, the input / output electrode 8
1, 82 are respectively connected to input / output terminals, and the common electrode is hermetically sealed in a state of being connected to the ground terminal.
【０００３】[0003]
【発明が解決しようとする課題】このような構成のモノ
リシック水晶フィルタは、水晶板を挟んで対向して形成
された入出力電極と共通電極部分を共振領域として厚み
すべり振動が励振される。図１７はモノリシック水晶フ
ィルタの共振領域を示す模式図であり、（ａ）は表面か
らみた主振動にかかわる振動エネルギーの分布を示す図
であり、（ｂ）はそのＥ−Ｅ断面図である。上記電極構
成により、対称モード振動（ｆｓ）と斜対称モード振動
（ｆａ）が励振され、これらが音響的に結合することに
より主振動を形成し、所定の通過帯域を有するフィルタ
を構成している。In the monolithic crystal filter having such a structure, the thickness shear vibration is excited with the input / output electrodes and the common electrode portion formed facing each other with the crystal plate sandwiched therebetween as the resonance region. FIG. 17 is a schematic diagram showing a resonance region of a monolithic crystal filter, (a) is a diagram showing a distribution of vibration energy related to a main vibration seen from the surface, and (b) is a sectional view taken along line EE thereof. With the above electrode configuration, symmetrical mode vibration (fs) and oblique symmetrical mode vibration (fa) are excited, and these are acoustically coupled to form the main vibration, thus forming a filter having a predetermined pass band. .
【０００４】しかしながら、このようなモノリシック水
晶フィルタは上記対称モード、斜対称モード振動以外
に、各振動モードに対して、励振電極の外周端面が境界
条件となって励振される例えば（１，１，３）モードと
呼ばれるスプリアス振動モードも同時に励振されること
が知られている。図１８は対称モードｆｓのスプリアス
振動である（１，１，３）モードのエネルギー分布を示
す模式図であり、（ａ）は表面からみた図であり、
（ｂ）はそのＥ−Ｅ断面図である。この振動モードは
Ｚ’軸方向に３つの振動の山（谷）を有している。図１
９は同じく対称モードｆｓのスプリアス振動である
（１，３，１）モードのエネルギー分布を示す模式図で
ある。この振動モードはＸ軸方向に３つの振動の山
（谷）を有している。ここで例えば（１，１，３）の各
記号は、それぞれ水晶板のＹ’軸（厚み）方向のオーバ
ートーンの次数、Ｘ軸方向のオーバートーンの次数、
Ｚ’軸方向のオーバートーンの次数を表している。図１
６に示すように、水晶板１の板厚で決まる遮断周波数を
ｆ１とし、対称、斜対称モード振動の共振周波数をそれ
ぞれｆｓ，ｆａとすると、その周波数配列はｆｓ＜ｆａ
＜ｆ１となる。これら共振領域内にはｆｓからｆ１間の
周波数範囲Δｆ１がエネルギー閉じ込めされる周波数範
囲となる。前記スプリアス振動ｆｐは、主振動を構成す
るｆｓ，ｆａより高く、ｆ１より低い共振周波数として
存在していることが知られており、エネルギー閉じ込め
範囲（Δｆ１）内にあることから定在波として比較的強
く励振され、スプリアスとして主振動に悪影響を与えた
り、フィルタとしての通過帯域特性を乱す等の問題点を
有していた。However, in such a monolithic crystal filter, in addition to the symmetric mode and the oblique symmetric mode vibration, the outer peripheral end face of the excitation electrode is excited as a boundary condition for each vibration mode, for example (1, 1, 1). 3) It is known that a spurious vibration mode called a mode is also excited at the same time. FIG. 18 is a schematic diagram showing the energy distribution of the (1,1,3) mode which is the spurious vibration of the symmetrical mode fs, and FIG. 18 (a) is a diagram seen from the surface,
(B) is the EE sectional view. This vibration mode has three vibration peaks (valleys) in the Z′-axis direction. Figure 1
9 is a schematic diagram showing the energy distribution of the (1, 3, 1) mode which is the spurious vibration of the symmetrical mode fs. This vibration mode has three vibration peaks (valleys) in the X-axis direction. Here, for example, each symbol of (1, 1, 3) is the order of the overtone in the Y′-axis (thickness) direction of the quartz plate, the order of the overtone in the X-axis direction,
It represents the order of overtones in the Z′-axis direction. Figure 1
As shown in FIG. 6, when the cutoff frequency determined by the plate thickness of the quartz plate 1 is f1 and the resonance frequencies of the symmetric and oblique symmetric mode vibrations are fs and fa, respectively, the frequency array is fs <fa.
<F1. In these resonance regions, the frequency range Δf1 between fs and f1 is the frequency range in which energy is confined. It is known that the spurious vibration fp exists as a resonance frequency higher than fs and fa constituting the main vibration and lower than f1, and is compared with the standing wave because it is within the energy confinement range (Δf1). It is strongly excited and has a problem that it adversely affects the main vibration as a spurious and disturbs the pass band characteristic as a filter.
【０００５】本発明は上記問題点を解決するためになさ
れたもので、主振動（公称周波数）近傍に発生していた
スプリアス振動（不要振動）モードを抑制し、電気機械
フィルタとしての良好な通過帯域を得ることの可能なモ
ノリシック水晶フィルタを提供することを目的とするも
のである。The present invention has been made to solve the above problems, and suppresses the spurious vibration (unnecessary vibration) mode generated near the main vibration (nominal frequency), and excellently passes as an electromechanical filter. It is an object of the present invention to provide a monolithic crystal filter capable of obtaining a band.
【０００６】[0006]
【課題を解決するための手段】上記問題点を解決するた
めに、請求項１によるモノリシック水晶フィルタは、水
晶板の表面に入力電極、出力電極を所定の間隔で近接さ
せて形成し、かつ当該裏面に前記入力電極、出力電極に
それぞれ対応した共通電極を設けることにより共振領域
を形成するとともに、前記各電極を外部に導出する引出
電極を形成し、厚み系振動を用いたモノリシック水晶フ
ィルタにおいて、前記入力電極、出力電極を外部に導出
する引出電極にほぼ対応する裏面に、前記共通電極と所
定の間隔を隔てて重み付け電極を形成するとともに、当
該重み付け電極は水晶板の端面に引き出され、かつ前記
重み付け電極は共通電極との近接部において、共通電極
に向かって漸次その幅が小さくなる形状であることを特
徴としている。In order to solve the above-mentioned problems, a monolithic crystal filter according to a first aspect of the present invention has an input electrode and an output electrode formed close to each other on a surface of a crystal plate at a predetermined interval, and While forming a resonance region by providing a common electrode corresponding to each of the input electrode and the output electrode on the back surface, forming a lead electrode that leads out each electrode to the outside, in a monolithic crystal filter using thickness-based vibration, Forming a weighting electrode at a predetermined distance from the common electrode on the back surface substantially corresponding to the extraction electrode for leading out the input electrode and the output electrode to the outside, the weighting electrode is drawn out to the end face of the crystal plate, and The weighting electrode is characterized in that its width gradually decreases toward the common electrode in the vicinity of the common electrode.
【０００７】また請求項２に示すように、水晶板の表面
に入力電極、出力電極を所定の間隔で近接させて形成
し、かつ当該裏面に前記入力電極、出力電極にそれぞれ
対応した共通電極を設けることにより共振領域を形成す
るとともに、前記各電極を外部に導出する引出電極を形
成し、厚み系振動を用いたモノリシック水晶フィルタに
おいて、前記共通電極を外部に導出する引出電極にほぼ
対応する裏面に、前記入力電極、出力電極と所定の間隔
を隔てて重み付け電極を形成し、当該重み付け電極は水
晶板の端面に引き出されているとともに、前記入力電
極、出力電極との近接部において、前記入力電極と出力
電極間に向かって漸次その幅が小さくなる形状であるこ
とを特徴とするモノリシック水晶フィルタであってもよ
い。According to a second aspect of the present invention, an input electrode and an output electrode are formed close to each other on a front surface of a quartz plate at a predetermined interval, and a common electrode corresponding to each of the input electrode and the output electrode is formed on the back surface. In the monolithic crystal filter using the thickness-based vibration, a back surface that substantially corresponds to the lead-out electrode that leads out the common electrode while forming the resonance region by providing the lead-out electrode that leads out each of the electrodes A weighting electrode is formed at a predetermined distance from the input electrode and the output electrode, and the weighting electrode is drawn out to the end face of the crystal plate, and the input electrode is provided in the vicinity of the input electrode and the output electrode. It may be a monolithic crystal filter having a shape in which the width gradually decreases between the electrode and the output electrode.
【０００８】さらに請求項３に示すように、請求項１ま
たは請求項２記載のモノリシック水晶フィルタにおい
て、水晶板の表面に入力電極、出力電極を所定の間隔で
近接させて形成し、かつ当該裏面に前記入力電極、出力
電極にそれぞれ対応した共通電極を設けることにより共
振領域を形成するとともに、前記各電極を外部に導出す
る引出電極を形成し、前記入力電極、出力電極、共通電
極の少なくとも１つが引出電極に向かってその幅が漸次
減少する減衰部を有することを特徴とする構成としても
よい。Further, as described in claim 3, in the monolithic crystal filter according to claim 1 or 2, the input electrode and the output electrode are formed close to each other on the surface of the crystal plate at a predetermined interval, and the back surface thereof. At least one of the input electrode, the output electrode, and the common electrode is formed by providing a common electrode corresponding to each of the input electrode and the output electrode to form a resonance region and forming a lead electrode for leading each electrode to the outside. One may have an attenuating portion whose width gradually decreases toward the extraction electrode.
【０００９】また、請求項３記載のモノリシック水晶フ
ィルタにおいて、前記共振領域から外につながる前記各
電極部分の少なくとも１つに細幅無電極部を設けた構成
としてもよい。Further, in the monolithic crystal filter according to claim 3, a narrow electrodeless portion may be provided in at least one of the electrode portions connected to the outside of the resonance region.
【００１０】[0010]
【作用】前記スプリアス振動は、図３，図１８，図１９
に示すように、その振動エネルギーの分布が前記対称、
斜対称モード振動の音響的結合で構成される主振動モー
ドよりやや外側に偏っている。前述のように引出電極を
構成することにより、例えば対称モードｆｓのスプリア
ス振動モードが引出電極を伝搬して振動エネルギーが外
方に漏れ出てくる。すなわち図３の点線で模式的に示す
ように、（１，１，３）モードの振動エネルギー分布に
おいて、その裾野が広がった状態となる。請求項１によ
れば、前記入力電極、出力電極を外部に導出する引出電
極にほぼ対応する裏面に、共通電極と所定の間隔を隔て
て重み付け電極を形成した構成であるので、前記引出電
極により漏れ出たスプリアス振動の振動エネルギーをそ
の裏面に形成した重み付け電極で急激に減衰させること
ができる。また、前記重み付け電極の共通電極との近接
部において、共通電極に向かって漸次その幅が小さくな
る構成であり、スプリアス振動の振動エネルギーの端部
をスポット的に重み付けすることができ、重み付け電極
による境界条件の付加による悪影響（新たな不要振動の
発生等）を最小限にすることができる。The action of the spurious vibrations is as shown in FIGS.
As shown in FIG.
It is biased slightly outward from the main vibration mode, which is composed of acoustic coupling of obliquely symmetric mode vibrations. By configuring the extraction electrode as described above, for example, the spurious vibration mode of the symmetrical mode fs propagates through the extraction electrode and the vibration energy leaks to the outside. That is, as schematically shown by the dotted line in FIG. 3, the base of the vibration energy distribution in the (1,1,3) mode is widened. According to claim 1, since the weighting electrode is formed at a predetermined distance from the common electrode on the back surface substantially corresponding to the extraction electrode that leads out the input electrode and the output electrode to the outside, the extraction electrode Vibration energy of the leaked spurious vibration can be rapidly attenuated by the weighting electrode formed on the back surface thereof. Further, in the vicinity of the common electrode of the weighting electrode, the width is gradually reduced toward the common electrode, and the end portion of the vibration energy of spurious vibration can be spot-weighted. It is possible to minimize the adverse effect (addition of new unnecessary vibration) due to the addition of the boundary condition.
【００１１】請求項２によれば、前記共通電極を外部に
導出する引出電極にほぼ対応する裏面に、入力電極、出
力電極と所定の間隔を重み付け電極を形成した構成であ
るので、前記引出電極により漏れ出たスプリアス振動の
振動エネルギーをその裏面に形成した重み付け電極で急
激に減衰させることができ、また前記重み付け電極の入
力電極、出力電極との近接部において、漸次その幅が小
さくなる形状であることを特徴とする構成により、スプ
リアス振動の振動エネルギーの端部をスポット的に重み
付けすることができ、重み付け電極による境界条件の付
加による悪影響（新たな不要振動の発生等）を最小限に
することができる。According to the second aspect of the present invention, since the weighting electrode is formed at a predetermined interval with the input electrode and the output electrode on the back surface substantially corresponding to the extraction electrode for leading the common electrode to the outside, the extraction electrode is formed. Vibration energy of leaked spurious vibration can be rapidly attenuated by the weighting electrode formed on the back surface thereof, and the width of the weighting electrode is gradually reduced in the vicinity of the input electrode and the output electrode. With the configuration characterized in that, the end of the vibration energy of spurious vibration can be spot-weighted, and the adverse effect (addition of unnecessary vibration, etc.) due to the addition of the boundary condition by the weighting electrode can be minimized. be able to.
【００１２】請求項３によれば、入出力電極、共通電極
の少なくとも１つが引出電極に向かってその幅が漸次減
少する減衰部を有する形状であり、この引出電極に対応
する重み付け電極を形成した構成であるので、スプリア
ス振動の外側の振動エネルギーが徐々に減衰して引出電
極に伝わるとともに、重み付け電極により急激に減衰さ
せることができる。According to the third aspect, at least one of the input / output electrode and the common electrode has a shape having an attenuating portion whose width gradually decreases toward the extraction electrode, and the weighting electrode corresponding to the extraction electrode is formed. With this structure, the vibration energy outside the spurious vibration is gradually attenuated and transmitted to the extraction electrode, and can be rapidly attenuated by the weighting electrode.
【００１３】請求項４によれば、請求項３記載のモノリ
シック水晶フィルタにおいて、前記共振領域から外につ
ながる前記各電極部分の少なくとも１つに細幅無電極部
を設けたことにより、共振領域を限定できるので電極形
状、寸法の設計を容易にすることができる。According to a fourth aspect of the present invention, in the monolithic crystal filter according to the third aspect, at least one of the electrode portions connected to the outside of the resonance region is provided with a narrow electrodeless portion, thereby reducing the resonance region. Since it can be limited, the shape and size of the electrode can be easily designed.
【００１４】[0014]
【実施例】本発明について、図面を参照して説明する。
図１は本発明の第１の実施例を示す水晶板の表面の平面
図、図２は同裏面の平面図、図３は同Ａ−Ａ断面図であ
り、図３には対称モードｆｓとそのスプリアス振動の１
つである（１，１，３）モードの振動エネルギーの分布
状態も併せて模式的に記載している。水晶板１はＡＴカ
ット水晶板であり、円形に加工されている。表面には入
力電極２１、出力電極２２がＺ’軸方向に並んで所定の
間隔で近接して設けられ、それぞれの電極から水晶板の
端面に引出電極２１１，２２１が引き出されている。裏
面には前記入力電極、出力電極２１，２２に対応する２
つの共通電極２３，２３が設けられ、これが共通電極の
下方で共通接続され、水晶板の下方端面に引出電極２３
１が引き出されている。また、表面の引出電極に対応す
る裏面に前記共通電極に近接させた重み付け電極３１，
３２が水晶板の端面にまで延びるとともに、裏面の引出
電極の一つに対応した重み付け電極３３が水晶板表面に
設けられている。この実施例では、表面の引出電極２１
１，２２１あるいは裏面の引出電極２３１とほぼ同じ形
状で、かつ水晶板を挟み対応させて重み付け電極３１，
３２あるいは３３を設けているが、必ずしも正確に重な
っている必要はない。これは振動エネルギーがある一定
のエリアに分布しているからである。この重み付け電極
の厚さは共通電極等と同じ厚さでもよいが、重み付け効
果をより得るために、厚くしてもよい。ただし、厚くし
すぎると主振動自体に悪影響を与えることがあり、また
他の新たな不要振動を生ぜしめる場合があるので、設計
には注意が必要である。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described with reference to the drawings.
1 is a plan view of the front surface of a quartz plate showing a first embodiment of the present invention, FIG. 2 is a plan view of the back surface thereof, FIG. 3 is a sectional view taken along line AA of FIG. 3, and FIG. 1 of that spurious vibration
The distribution state of the vibration energy of the (1,1,3) mode, which is one of the two, is also schematically described. The crystal plate 1 is an AT-cut crystal plate and is processed into a circular shape. An input electrode 21 and an output electrode 22 are arranged on the surface side by side in the Z′-axis direction and closely arranged at a predetermined interval, and lead electrodes 211 and 221 are drawn from the respective electrodes to the end faces of the quartz plate. 2 on the back surface corresponding to the input electrodes and the output electrodes 21 and 22.
Two common electrodes 23, 23 are provided, which are commonly connected below the common electrode, and are connected to the lower end surface of the crystal plate by the extraction electrode 23.
1 is pulled out. In addition, a weighting electrode 31, which is located close to the common electrode on the back surface corresponding to the extraction electrode on the front surface,
32 extends to the end surface of the crystal plate, and a weighting electrode 33 corresponding to one of the extraction electrodes on the back surface is provided on the crystal plate surface. In this embodiment, the extraction electrode 21 on the surface is
1, 221 or the weighting electrodes 31, which have substantially the same shape as that of the extraction electrode 231 on the back surface and which are sandwiched by a crystal plate.
Although 32 and 33 are provided, they do not necessarily have to overlap exactly. This is because the vibration energy is distributed in a certain area. The thickness of the weighting electrode may be the same as that of the common electrode or the like, but may be increased in order to obtain the weighting effect. However, if the thickness is made too thick, the main vibration itself may be adversely affected, and other new unnecessary vibrations may be generated, so attention must be paid to the design.
【００１５】以上の構成により、水晶板の厚さで決定さ
れる遮断周波数ｆ１と主振動モード（対称、斜対称モー
ド振動の音響的結合によって構成される）間のエネルギ
ー閉じ込めエリア内に、前述の（１，１，３）、（１，
３，１）モード等のスプリアス振動が閉じ込められ、不
要振動として存在している。図３には振動の山（谷）が
Ｚ’軸方向に並んだ（１，１，３）モードを例示してい
るが、Ｘ軸方向に振動の山（谷）が並んだ（１，３，
１）モードも同時に定在波として存在している。このス
プリアス振動は図３に示すように、その振動エネルギー
の分布が前記主振動モードよりやや外側に偏っているの
で、前述のように引出電極を構成することにより、引出
電極に特にスプリアス振動の振動エネルギーが漏れ出て
くる。すなわち図３の点線で模式的に示すように、振動
エネルギー分布において、その裾野が広がった状態とな
り、前記引出電極により漏れ出たスプリアス振動の振動
エネルギーをその裏面に形成した重み付け電極で急激に
減衰させることができる。この実施例では（１，１，
３）モードの抑制に効果がある。With the above configuration, the above-mentioned structure is provided in the energy confinement area between the cutoff frequency f1 determined by the thickness of the quartz plate and the main vibration mode (which is constituted by acoustic coupling of symmetrical and obliquely symmetric mode vibrations). (1,1,3), (1,
3, 1) Spurious vibrations such as modes are trapped and exist as unnecessary vibrations. FIG. 3 exemplifies the (1,1,3) mode in which the vibration peaks (valleys) are arranged in the Z′-axis direction, but the vibration peaks (valleys) are arranged in the X-axis direction (1,3). ，
1) Mode also exists as a standing wave at the same time. As shown in FIG. 3, the distribution of the vibration energy of the spurious vibration is slightly outward from the main vibration mode. Therefore, by constructing the extraction electrode as described above, the vibration of spurious vibration is particularly generated in the extraction electrode. Energy leaks out. That is, as schematically shown by the dotted line in FIG. 3, the base of the vibration energy distribution is widened, and the vibration energy of the spurious vibration leaked by the extraction electrode is rapidly attenuated by the weighting electrode formed on the back surface thereof. Can be made. In this example, (1, 1,
3) Effective in suppressing modes.
【００１６】なお、モノリシック水晶フィルタは、図示
していないが支持体に各々つながるリード端子を有する
ベースを用意し、前述の電極構成の水晶板１をリード端
子と接合された支持体で支持し、キャップにより気密封
止することにより完成となる。In the monolithic crystal filter, a base (not shown) having lead terminals respectively connected to the support is prepared, and the crystal plate 1 having the above-mentioned electrode structure is supported by the support joined to the lead terminals. It is completed by hermetically sealing with a cap.
【００１７】本発明による第２の実施例を図４，図５，
図６とともに説明する。図４は水晶板表面の平面図、図
５は同裏面の平面図、図６は同Ｂ−Ｂ断面図である。水
晶板１の表面には入力電極２４、出力電極２５が所定の
間隔で近接して設けられ、これら入出力電極から外方に
向かって漸次幅の狭くなる減衰部２４ａ，２５ａを形成
した後、引出電極２４１，２５１に接続され、それぞれ
の電極が水晶板の端面に引き出されている。裏面には水
晶板を介して前記入力電極、出力電極２４，２５に対応
する部分を有する１つの共通電極２６が設けられ、水晶
板の下方端面に引出電極２６１が引き出されている。前
記入出力電極と同じく外方に向かって漸次幅の狭くなる
減衰部２６ａ，２６ａを形成した後、引出電極２６１に
つながっている。表面には前述の引出電極２６１に対応
した重み付け電極３４，３５が形成されており、また裏
面には前述の入出力電極２４１，２５１に対応した重み
付け電極３６，３７が形成されている。これら重み付け
電極の先端は漸次幅の狭くなる円弧形状にされている。The second embodiment according to the present invention is shown in FIGS.
This will be described with reference to FIG. FIG. 4 is a plan view of the front surface of the crystal plate, FIG. 5 is a plan view of the back surface thereof, and FIG. 6 is a sectional view taken along the line BB. The input electrode 24 and the output electrode 25 are provided close to each other on the surface of the crystal plate 1 at a predetermined interval, and after forming the attenuating portions 24a and 25a whose width gradually narrows outward from these input / output electrodes, The electrodes are connected to the extraction electrodes 241, 251 and the respective electrodes are extracted to the end surface of the crystal plate. One common electrode 26 having portions corresponding to the input electrodes and the output electrodes 24 and 25 is provided on the back surface via a crystal plate, and a lead electrode 261 is drawn to the lower end face of the crystal plate. Similar to the input / output electrodes, attenuating portions 26a, 26a having a width gradually narrowing outward are formed, and then connected to the extraction electrode 261. Weighting electrodes 34 and 35 corresponding to the extraction electrodes 261 are formed on the front surface, and weighting electrodes 36 and 37 corresponding to the input / output electrodes 241 and 251 are formed on the back surface. The tips of these weighting electrodes are formed in an arc shape whose width is gradually narrowed.
【００１８】このように入出力電極、共通電極に外方に
向かって漸次幅の狭くなる減衰部を形成した構成である
ので、スプリアス振動の外側の振動エネルギーが徐々に
減衰して引出電極に伝わるとともに、振動エネルギーを
引出電極部分に集中させることができる。そしてこの集
中した振動エネルギーを重み付け電極３４，３５，３
６、３７により、そのエネルギーレベルを急激に減衰さ
せることができる。なお、先端が円弧形状にされた重み
付け電極を用いることにより、スポット的に振動エネル
ギーを減衰させることが可能となるとともに、前述の減
衰部との併用により、より効率よく不要振動を抑制する
効果を得ることができる。As described above, since the input / output electrodes and the common electrode are formed with the attenuating portion whose width is gradually narrowed outward, the vibration energy outside the spurious vibration is gradually attenuated and transmitted to the extraction electrode. At the same time, the vibration energy can be concentrated on the extraction electrode portion. The concentrated vibrational energy is applied to the weighting electrodes 34, 35, 3
6, 37, the energy level can be rapidly attenuated. In addition, by using the weighting electrode having the arcuate tip, it is possible to damp the vibration energy in a spot manner, and by using the weighting electrode in combination with the above-mentioned attenuating portion, it is possible to more efficiently suppress the unwanted vibration. Obtainable.
【００１９】本発明による第３の実施例を図７，図８，
図９とともに説明する。図７は水晶板表面の平面図、図
８は同裏面の平面図、図９は同Ｃ−Ｃ断面図である。水
晶板１の表面には入力電極２７、出力電極２８が所定の
間隔で近接して設けられ、これら入出力電極から外方に
向かってほぼ円弧状に漸次幅の狭くなる減衰部２７ａ，
２８ａを形成した後、引出電極２７１，２８１に接続さ
れ、それぞれの電極が水晶板の端面に引き出されてい
る。なお、減衰部２７ａ，２８ａと引出電極２７１，２
８１の間には電極くびれ部２７１ａ，２８１ａが設けら
れている。また、入出力電極各々と減衰部２７ａ，２８
ａ間には電極の一部がスリット状に切り欠かれており、
これにより細幅無電極部２７ｂ，２８ｂが形成されてい
る。これは入出力電極の形状、大きさを明確にするため
のもので、フィルタの設計を簡単化するための工夫であ
り、後述の共通電極に形成された細幅無電極部と目的を
同じくするものである。裏面には水晶板を介して前記入
力電極、出力電極２７，２８に対応する部分を有する１
つの共通電極２９が設けられ、水晶板の下方端面に引出
電極２９１が引き出されている。前記入出力電極と同じ
く外方に向かって漸次幅の狭くなる減衰部２９ａ，２９
ａを形成した後、引出電極２９１につながっている。な
お、減衰部２９ａと引出電極２９１の間には電極くびれ
部２９１ａが設けられている。表面には前述の引出電極
２９１に対応した重み付け電極３８，３９が形成されて
おり、また裏面には前述の入出力電極２７１，２８１に
対応した重み付け電極４０，４１が形成されている。こ
れら重み付け電極の先端は漸次幅の狭くなる三角形状に
されている。A third embodiment according to the present invention is shown in FIGS.
This will be described with reference to FIG. 7 is a plan view of the front surface of the crystal plate, FIG. 8 is a plan view of the back surface thereof, and FIG. 9 is a sectional view taken along line CC of FIG. An input electrode 27 and an output electrode 28 are provided close to each other on the surface of the crystal plate 1 at a predetermined interval, and an attenuating portion 27a whose width gradually narrows outward from these input / output electrodes in a substantially arc shape.
After forming 28a, it is connected to the extraction electrodes 271, 281 and the respective electrodes are extracted to the end face of the crystal plate. In addition, the attenuating portions 27a and 28a and the extraction electrodes 271 and 271,
Electrode constricted portions 271a and 281a are provided between 81. Further, each of the input / output electrodes and the attenuating portions 27a, 28
A part of the electrode is cut out like a slit between a and
As a result, the narrow electrodeless portions 27b and 28b are formed. This is for clarifying the shape and size of the input / output electrodes, and is a device for simplifying the design of the filter, and has the same purpose as the narrow electrodeless portion formed on the common electrode described later. It is a thing. The back surface has portions corresponding to the input electrodes and the output electrodes 27 and 28 via a crystal plate 1
One common electrode 29 is provided, and a lead electrode 291 is led to the lower end face of the crystal plate. Like the input / output electrodes, the attenuation portions 29a, 29 have a width that gradually narrows outward.
After forming a, it is connected to the extraction electrode 291. An electrode constriction portion 291a is provided between the attenuating portion 29a and the extraction electrode 291. Weighting electrodes 38 and 39 corresponding to the extraction electrodes 291 are formed on the front surface, and weighting electrodes 40 and 41 corresponding to the input / output electrodes 271 and 281 are formed on the back surface. The tips of these weighting electrodes are formed in a triangular shape whose width is gradually narrowed.
【００２０】このような構成により、第２の実施例と同
様の効果を得るとともに、また電極くびれ部２７１ａ，
２８１ａ，２９１ａの存在により、より振動エネルギー
が集中し、不要振動を抑制するとともに、前述の細幅無
電極部２７ｂ，２８ｂにより、入出力電極、共通電極の
形状、大きさを明確にすることができ、フィルタの設計
を簡単化することができる。With this structure, the same effect as that of the second embodiment can be obtained, and the electrode constricted portions 271a, 271a,
Due to the presence of 281a and 291a, vibration energy is more concentrated and unnecessary vibration is suppressed, and the shape and size of the input / output electrodes and the common electrode are clarified by the narrow electrodeless portions 27b and 28b. Therefore, the filter design can be simplified.
【００２１】本発明による第４の実施例を図１０，図１
１，図１２とともに説明する。図１０は水晶板表面の平
面図、図１１は同裏面の平面図、図１２は同断面図であ
る。基本的な構成は第３の実施例と同じ構成であり、水
晶板１の表面には入力電極２７、出力電極２８が所定の
間隔で近接して設けられ、これら入出力電極から外方に
向かってほぼ円弧状に漸次幅の狭くなる減衰部２７ａ，
２８ａを形成した後、引出電極２７１，２８１に接続さ
れ、それぞれの電極が水晶板の端面に引き出されてい
る。なお、入出力電極各々と減衰部２７ａ，２８ａ間に
は電極の一部がスリット状に切り欠かれており、これに
より細幅無電極部２７１ｂ，２８１ｂが形成されてい
る。これは上述の実施例と同じように、入出力電極、共
通電極の形状、大きさを明確にするためのもので、フィ
ルタの設計を簡単化するための工夫である。裏面には水
晶板を介して前記入力電極、出力電極２７，２８に対応
する部分を有する１つの共通電極２９が設けられ、水晶
板の下方端面に引出電極２９１が引き出されている。前
記入出力電極と同じく外方に向かって漸次幅の狭くなる
減衰部２９ａ，２９ａを形成した後、引出電極２９１に
つながっているとともに、共通電極と減衰部２９ａ，２
９ａ間には電極の一部がスリット状に切り欠かれた細幅
無電極部２９１ｂ，２９１ｂが形成されている。表面に
は前述の引出電極２９１，２９１に対応した重み付け電
極４２，４５が形成されており、また裏面には前述の入
出力電極２７１，２８１に対応した重み付け電極４０，
４１が形成されている。これら重み付け電極の先端は漸
次幅の狭くなる円弧状にされている。この実施例ではス
プリアス振動をより効率的に抑制するために、重み付け
電極４２，４５のそれぞれの両側に所定の間隔を持って
重み付け補助電極４３，４４，４６，４７が設けられて
いる。これらの補助電極はスプリアス振動の１つである
（１，１，３）モードの振動領域の一部に接するように
設けられている。The fourth embodiment according to the present invention is shown in FIGS.
1 and FIG. 12 will be described. 10 is a plan view of the front surface of the crystal plate, FIG. 11 is a plan view of the back surface thereof, and FIG. 12 is a sectional view thereof. The basic structure is the same as that of the third embodiment, and an input electrode 27 and an output electrode 28 are provided close to each other on the surface of the crystal plate 1 at a predetermined interval, and these input and output electrodes face outward. Attenuating portion 27a whose width gradually becomes narrower in an arc shape,
After forming 28a, it is connected to the extraction electrodes 271, 281 and the respective electrodes are extracted to the end face of the crystal plate. In addition, a part of the electrode is cut out in a slit shape between each of the input / output electrodes and the attenuating portions 27a and 28a, whereby narrow electrodeless portions 271b and 281b are formed. This is for clarifying the shapes and sizes of the input / output electrodes and the common electrode, as in the above-described embodiment, and is a device for simplifying the design of the filter. One common electrode 29 having portions corresponding to the input electrodes and output electrodes 27, 28 is provided on the back surface via a crystal plate, and a lead electrode 291 is drawn out to the lower end face of the crystal plate. After forming the attenuating portions 29a, 29a having a width gradually narrowing outward like the input / output electrodes, the attenuating portions 29a, 29a are connected to the extraction electrode 291 and the common electrode and the attenuating portions 29a, 2a are formed.
Narrow electrodeless portions 291b and 291b are formed between the electrodes 9a by cutting a part of the electrodes in a slit shape. Weighting electrodes 42 and 45 corresponding to the extraction electrodes 291, 291 are formed on the front surface, and weighting electrodes 40 corresponding to the input / output electrodes 271, 281 are formed on the back surface.
41 are formed. The tips of these weighting electrodes are formed in an arc shape whose width is gradually narrowed. In this embodiment, in order to suppress spurious vibrations more efficiently, weighting auxiliary electrodes 43, 44, 46, 47 are provided on both sides of each of the weighting electrodes 42, 45 at a predetermined interval. These auxiliary electrodes are provided so as to be in contact with part of the vibration region of the (1,1,3) mode which is one of spurious vibrations.
【００２２】[0022]
【比較データ】従来品と本発明品の周波数特性の比較検
証データを図２０，図２１，図２２に示す。比較検証に
用いた水晶板は４．５mmφＡＴカット水晶板であり、中
心周波数を２１．４ＭＨｚに設定している。なお電極の
基本的構成は第１の実施例に記載した電極構成を用いて
おり、従来品については重み付け電極を形成していな
い。それぞれの電極寸法は、入出力電極の長辺が１．４
５mm、短辺が０．７５mm、各電極間の間隔が０．５５mm
であり、裏面の共通電極もほぼこの入出力電極に対応し
た寸法となっている。図２０は従来品による周波数特性
を示すグラフであり、図２１は本発明品Ａとして重み付
け電極と入出力電極あるいは共通電極との間隔を０．６
７mmとした場合の周波数特性を示すグラフであり、図２
２は本発明品Ｂとして前記間隔を０．２７mmとした場合
のグラフである。これら各グラフから、本発明品は従来
品に較べて主振動の右側に現れていたスプリアス振動を
抑制していることが理解でき、また重み付け電極と入出
力電極あるいは共通電極との間隔を狭くした場合は、よ
りその効果が現れていることも理解できる。なお前述し
たように、スプリアス抑制効果は重み付け電極の厚さに
よっても変化するので、電極形成時に用いる真空蒸着時
の機械的マスク手段の設計精度等を勘案して、上記各電
極と重み付け電極との間隔、厚さ等を決定する必要があ
る。[Comparison Data] Comparison verification data of the frequency characteristics of the conventional product and the product of the present invention are shown in FIGS. 20, 21, and 22. The crystal plate used for the comparative verification is a 4.5 mmφ AT cut crystal plate, and the center frequency is set to 21.4 MHz. The basic structure of the electrode is the electrode structure described in the first embodiment, and no weighting electrode is formed in the conventional product. The length of each input / output electrode is 1.4.
5mm, short side 0.75mm, spacing between electrodes 0.55mm
The size of the common electrode on the back surface also corresponds to this input / output electrode. FIG. 20 is a graph showing the frequency characteristics of the conventional product, and FIG. 21 shows the product A of the present invention in which the distance between the weighting electrode and the input / output electrode or the common electrode is 0.6.
FIG. 2 is a graph showing frequency characteristics when it is set to 7 mm, and FIG.
2 is a graph of the product B of the present invention when the interval is 0.27 mm. From each of these graphs, it can be understood that the product of the present invention suppresses the spurious vibration appearing on the right side of the main vibration as compared with the conventional product, and the interval between the weighting electrode and the input / output electrode or the common electrode is narrowed. In that case, it can be understood that the effect is more apparent. As described above, since the spurious suppression effect also changes depending on the thickness of the weighting electrode, the design accuracy of the mechanical mask means during vacuum deposition used during electrode formation is taken into consideration, and the above-mentioned electrodes and weighting electrodes are It is necessary to determine the spacing, thickness, etc.
【００２３】[0023]
【発明の効果】前記スプリアス振動は、図３に示すよう
に、その振動エネルギーの分布が前記対称、斜対称モー
ド振動の音響的結合で構成される主振動モードよりやや
外側に偏っている。前述のように引出電極を構成するこ
とにより、引出電極に特にスプリアス振動モードの振動
エネルギーが漏れ出てくる。すなわち図３の点線で模式
的に示すように、（１，１，３）モードの振動エネルギ
ー分布において、その裾野が広がった状態となる。請求
項１によれば、前記入力電極、出力電極を外部に導出す
る引出電極にほぼ対応する裏面に、共通電極と所定の間
隔を隔てて重み付け電極を形成した構成であるので、前
記引出電極により漏れ出たスプリアス振動の振動エネル
ギーをその裏面に形成した重み付け電極で急激に減衰さ
せることができる。よって、主振動（公称周波数）近傍
に発生していたスプリアス振動による不要振動を抑制
し、電気機械フィルタとしての良好な通過帯域を得るこ
とができる。As shown in FIG. 3, the vibration energy distribution of the spurious vibration is biased slightly outside the main vibration mode constituted by the acoustic coupling of the symmetrical and obliquely symmetric mode vibrations. By constructing the extraction electrode as described above, vibration energy particularly in the spurious vibration mode leaks to the extraction electrode. That is, as schematically shown by the dotted line in FIG. 3, the base of the vibration energy distribution in the (1,1,3) mode is widened. According to claim 1, since the weighting electrode is formed at a predetermined distance from the common electrode on the back surface substantially corresponding to the extraction electrode that leads out the input electrode and the output electrode to the outside, the extraction electrode Vibration energy of the leaked spurious vibration can be rapidly attenuated by the weighting electrode formed on the back surface thereof. Therefore, unnecessary vibration due to spurious vibration that has occurred near the main vibration (nominal frequency) can be suppressed, and a good pass band as an electromechanical filter can be obtained.
【００２４】また、前記重み付け電極の共通電極との近
接部において、共通電極に向かって漸次その幅が小さく
なる形状であることを特徴とする構成であり、スプリア
ス振動の振動エネルギーの端部をスポット的に重み付け
することができ、重み付け電極による境界条件の付加に
よる悪影響（新たな不要振動の発生等）を最小限にする
ことができる。よって、主振動（公称周波数）近傍に発
生していたスプリアス振動による不要振動を抑制し、電
気機械フィルタとしての良好な通過帯域を得ることがで
きる。Further, the weighting electrode has a shape such that its width gradually decreases toward the common electrode in the vicinity of the common electrode, and the end of the vibration energy of the spurious vibration is spotted. It is possible to minimize the adverse effect (e.g., generation of new unnecessary vibration) due to the addition of the boundary condition by the weighting electrode. Therefore, unnecessary vibration due to spurious vibration that has occurred near the main vibration (nominal frequency) can be suppressed, and a good pass band as an electromechanical filter can be obtained.
【００２５】請求項２によれば、前記共通電極を外部に
導出する引出電極にほぼ対応する裏面に、入力電極、出
力電極と所定の間隔を重み付け電極を形成した構成であ
るので、前記引出電極により漏れ出たスプリアス振動の
振動エネルギーをその裏面に形成した重み付け電極で急
激に減衰させることができ、また前記重み付け電極の入
力電極、出力電極との近接部において、漸次その幅が小
さくなる形状であることを特徴とする構成により、スプ
リアス振動の振動エネルギーの端部をスポット的に重み
付けすることができ、重み付け電極による境界条件の付
加による悪影響（新たな不要振動の発生等）を最小限に
することができ、良好な通過帯域を得ることができる。According to the second aspect of the present invention, since the weighting electrode is formed at a predetermined distance from the input electrode and the output electrode, the weighting electrode is formed on the back surface substantially corresponding to the extraction electrode leading the common electrode to the outside. Vibration energy of leaked spurious vibration can be rapidly attenuated by the weighting electrode formed on the back surface thereof, and the width of the weighting electrode is gradually reduced in the vicinity of the input electrode and the output electrode. With the configuration characterized in that, the end of the vibration energy of spurious vibration can be spot-weighted, and the adverse effect (addition of unnecessary vibration, etc.) due to the addition of the boundary condition by the weighting electrode can be minimized. It is possible to obtain a good pass band.
【００２６】請求項３によれば、入出力電極、共通電極
の少なくとも１つが引出電極に向かってその幅が漸次減
少する減衰部を有する形状であり、この引出電極に対応
する重み付け電極を形成した構成であるので、スプリア
ス振動の外側の振動エネルギーが徐々に減衰して引出電
極に伝わるとともに、重み付け電極により急激に減衰さ
せることができる。よって、主振動（公称周波数）近傍
に発生していたスプリアス振動による不要振動を抑制
し、電気機械フィルタとしての良好な通過帯域を得るこ
とができる。According to the third aspect, at least one of the input / output electrode and the common electrode has a shape having an attenuating portion whose width gradually decreases toward the extraction electrode, and the weighting electrode corresponding to the extraction electrode is formed. With this structure, the vibration energy outside the spurious vibration is gradually attenuated and transmitted to the extraction electrode, and can be rapidly attenuated by the weighting electrode. Therefore, unnecessary vibration due to spurious vibration that has occurred near the main vibration (nominal frequency) can be suppressed, and a good pass band as an electromechanical filter can be obtained.
【００２７】請求項４によれば、請求項４記載のモノリ
シック水晶フィルタにおいて、前記共振領域から外につ
ながる前記各電極部分の少なくとも１つに細幅無電極部
を設けたことにより、共振領域を限定できるので電極形
状、寸法の設計を容易にすることができる。According to a fourth aspect of the present invention, in the monolithic crystal filter according to the fourth aspect, at least one of the electrode portions connected to the outside of the resonance region is provided with a narrow electrodeless portion, thereby reducing the resonance region. Since it can be limited, the shape and size of the electrode can be easily designed.
【図１】第１の実施例の水晶板表面の電極構成を示す平
面図。FIG. 1 is a plan view showing an electrode configuration on a surface of a quartz plate according to a first embodiment.
【図２】第１の実施例の水晶板裏面の電極構成を示す平
面図。FIG. 2 is a plan view showing an electrode configuration on the back surface of the quartz plate of the first embodiment.
【図３】第１の実施例の水晶板の断面図。FIG. 3 is a cross-sectional view of the crystal plate of the first embodiment.
【図４】第２の実施例の水晶板表面の電極構成を示す平
面図。FIG. 4 is a plan view showing an electrode configuration on the surface of a quartz plate according to a second embodiment.
【図５】第２の実施例の水晶板裏面の電極構成を示す平
面図。FIG. 5 is a plan view showing an electrode configuration on the back surface of the quartz plate of the second embodiment.
【図６】第２の実施例の水晶板の断面図。FIG. 6 is a sectional view of a quartz plate according to a second embodiment.
【図７】第３の実施例の水晶板表面の電極構成を示す平
面図。FIG. 7 is a plan view showing an electrode configuration on the surface of a crystal plate of a third embodiment.
【図８】第３の実施例の水晶板裏面の電極構成を示す平
面図。FIG. 8 is a plan view showing an electrode configuration on the back surface of a quartz plate according to a third embodiment.
【図９】第３の実施例の水晶板の断面図。FIG. 9 is a sectional view of a crystal plate of a third embodiment.
【図１０】第４の実施例の水晶板表面の電極構成を示す
平面図。FIG. 10 is a plan view showing an electrode configuration on the surface of a crystal plate of a fourth embodiment.
【図１１】第４の実施例の水晶板裏面の電極構成を示す
平面図。FIG. 11 is a plan view showing an electrode configuration on the back surface of the quartz plate of the fourth embodiment.
【図１２】第４の実施例の水晶板の断面図。FIG. 12 is a sectional view of a quartz plate according to a fourth embodiment.
【図１３】従来例を示す水晶板表面の電極構成を示す平
面図。FIG. 13 is a plan view showing an electrode configuration on the surface of a quartz plate showing a conventional example.
【図１４】従来例を示す水晶板裏面の電極構成を示す平
面図。FIG. 14 is a plan view showing an electrode configuration on the back surface of a quartz plate showing a conventional example.
【図１５】従来例を示す水晶板の電極構造並びに振動モ
ードを示す断面図。FIG. 15 is a cross-sectional view showing an electrode structure and a vibration mode of a quartz plate showing a conventional example.
【図１６】周波数配列を示す図FIG. 16 is a diagram showing a frequency array.
【図１７】主振動の振動エネルギー分布を示す図FIG. 17 is a diagram showing a vibration energy distribution of main vibration.
【図１８】スプリアス振動の振動エネルギー分布を示す
図FIG. 18 is a diagram showing a vibration energy distribution of spurious vibrations.
【図１９】スプリアス振動の振動エネルギー分布を示す
図FIG. 19 is a diagram showing a vibration energy distribution of spurious vibrations.
【図２０】比較データを示す図FIG. 20 is a diagram showing comparison data.
【図２１】比較データを示す図FIG. 21 is a diagram showing comparison data.
【図２２】比較データを示す図FIG. 22 is a diagram showing comparison data.
１ 水晶板
２１，２４，２７，８１ 入力電極
２２，２５，２８，８２ 出力電極
２３，２６，２９，８３ 共通電極
３１，３２，３３，３４，３５，３６，３７，３８，３
９，４０，４１，４２，４４ 重み付け電極1 Crystal plate 21, 24, 27, 81 Input electrode 22, 25, 28, 82 Output electrode 23, 26, 29, 83 Common electrode 31, 32, 33, 34, 35, 36, 37, 38, 3
9, 40, 41, 42, 44 Weighting electrodes
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平２−261212（ＪＰ，Ａ) 特開 昭49−114383（ＪＰ，Ａ) 特開 平５−327402（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) H03H 9/56,9/13 ─────────────────────────────────────────────────── ─── Continuation of front page (56) Reference JP-A-2-261212 (JP, A) JP-A-49-114383 (JP, A) JP-A-5-327402 (JP, A) (58) Field (Int.Cl. 7 , DB name) H03H 9 / 56,9 / 13
Claims (4)
定の間隔で近接させて形成し、かつ当該裏面に前記入力
電極、出力電極にそれぞれ対応した共通電極を設けるこ
とにより共振領域を形成するとともに、前記各電極を外
部に導出する引出電極を形成し、厚み系振動を用いたモ
ノリシック水晶フィルタにおいて、 前記入力電極、出力電極を外部に導出する引出電極にほ
ぼ対応する裏面に、前記共通電極と所定の間隔を隔てて
重み付け電極を形成するとともに、当該重み付け電極は
水晶板の端面に引き出され、かつ前記重み付け電極は共
通電極との近接部において、共通電極に向かって漸次そ
の幅が小さくなる形状であることを特徴とするモノリシ
ック水晶フィルタ。1. A resonance region is formed by forming an input electrode and an output electrode close to each other on a front surface of a quartz plate at a predetermined interval and providing common electrodes corresponding to the input electrode and the output electrode on the back surface thereof. In addition, in the monolithic crystal filter using the thickness-based vibration, the extraction electrodes that lead out the respective electrodes to the outside are formed, and the common surface is provided on the back surface that substantially corresponds to the extraction electrodes that lead out the input electrodes and the output electrodes to the outside. The weighting electrode is formed at a predetermined distance from the electrode, the weighting electrode is drawn out to the end face of the quartz plate, and the weighting electrode is shared.
In the vicinity of the through electrode, gradually increase toward the common electrode.
A monolithic crystal filter characterized by having a narrow width .
定の間隔で近接させて形成し、かつ当該裏面に前記入力
電極、出力電極にそれぞれ対応した共通電極を設けるこ
とにより共振領域を形成するとともに、前記各電極を外
部に導出する引出電極を形成し、厚み系振動を用いたモ
ノリシック水晶フィルタにおいて、 前記共通電極を外部に導出する引出電極にほぼ対応する
裏面に、前記入力電極、出力電極と所定の間隔を隔てて
重み付け電極を形成し、当該重み付け電極は水晶板の端
面に引き出されているとともに、前記入力電極、出力電
極との近接部において、前記入力電極と出力電極間に向
かって漸次その幅が小さくなる形状であることを特徴と
する モノリシック水晶フィルタ。2. An input electrode and an output electrode are provided on the surface of the crystal plate.
They are formed close to each other at regular intervals, and the input is made on the back surface.
Provide common electrodes corresponding to the electrodes and output electrodes respectively.
To form a resonance region, and
Form an extraction electrode leading to the part and use a thickness-based vibration
Corresponds to a lead electrode that leads out the common electrode to the outside in a noric crystal filter
On the back side, separate the input and output electrodes from each other
Forming a weighting electrode, the weighting electrode being the edge of the quartz plate
The input electrode and output
Directly between the input and output electrodes near the pole.
The feature is that the width is gradually reduced
A monolithic crystal filter.
定の間隔で近接させて形成し、かつ当該裏面に前記入力
電極、出力電極にそれぞれ対応した共通電極を設けるこ
とにより共振領域を形成するとともに、前記各電極を外
部に導出する引出電極を形成し、厚み系振動を用いたモ
ノリシック水晶フィルタにおいて、 前記入力電極、出力電極、共通電極の少なくとも１つが
引出電極に向かってその幅が漸次減少する減衰部を有す
ることを特徴とする請求項１または請求項２記載の モノ
リシック水晶フィルタ。3. An input electrode and an output electrode are provided on the surface of the quartz plate.
They are formed close to each other at regular intervals, and the input is made on the back surface.
Provide common electrodes corresponding to the electrodes and output electrodes respectively.
To form a resonance region, and
Form an extraction electrode leading to the part and use a thickness-based vibration
At least one of the input electrode, the output electrode, and the common electrode in the Noric crystal filter
Has an attenuator whose width gradually decreases toward the extraction electrode
The monolithic crystal filter according to claim 1 or 2, wherein:
極部分の少なくとも１つに細幅無電極部を設けたことを
特徴とする請求項３記載のモノリシック水晶フィルタ。 4. Each of the electric wires connected to the outside from the resonance region
At least one of the pole parts has a narrow electrodeless part.
The monolithic crystal filter according to claim 3, which is characterized in that .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11377095A JP3489909B2 (en) | 1995-04-14 | 1995-04-14 | Monolithic crystal filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11377095A JP3489909B2 (en) | 1995-04-14 | 1995-04-14 | Monolithic crystal filter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08288789A JPH08288789A (en) | 1996-11-01 |
| JP3489909B2 true JP3489909B2 (en) | 2004-01-26 |
Family
ID=14620699
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11377095A Expired - Fee Related JP3489909B2 (en) | 1995-04-14 | 1995-04-14 | Monolithic crystal filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3489909B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5240794B2 (en) | 2009-06-30 | 2013-07-17 | 日本電波工業株式会社 | Sensing device |
-
1995
- 1995-04-14 JP JP11377095A patent/JP3489909B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH08288789A (en) | 1996-11-01 |
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