JP3483090B2 - Method for manufacturing semiconductor device - Google Patents

Description

BACKGROUND OF THE INVENTION [0001] [Technical Field of the Invention The present invention relates to a method of manufacturing a semiconductor equipment provided with a trench for element in isolation or device isolation. 2. Description of the Related Art In recent years, in the field of semiconductor devices such as memory devices such as DRAMs, device performance and integration have been remarkably improved due to progress in miniaturization of elements. In such a highly miniaturized and integrated semiconductor device, when insulating isolation between semiconductor elements or between required parts in a semiconductor element is performed, an isolation groove (hereinafter, referred to as an isolation groove) is used.
It is called a trench. ) Is filled with an insulating material (buried) to use a trench isolation region. On the other hand, a connection between an element active region (eg, a source / drain region in a MOS device) formed on a semiconductor substrate and an upper wiring layer is generally made by contact holes formed in an interlayer insulating film on the semiconductor substrate. Is to be done through. FIG. 9 shows a cross-sectional structure in a manufacturing process of a semiconductor device having a conventional trench isolation structure as described above. This device is formed so as to bury the trench 115 for isolation between elements provided on the front surface side of the semiconductor substrate 111, an oxide film 116 formed so as to cover the inner surface of the trench 115, and the trench 115. Separated insulating film 117. Trench 11
An oxide film 112 as a gate insulating film, a gate electrode 119 formed on the oxide film 112, and a self-alignment with the gate electrode 119 near the surface of the semiconductor substrate 111 A MOS transistor including the formed diffusion layer (the source region 121 and the drain region (not shown)) is formed. The source region 121 is adjacent to the trench 115. In such a semiconductor device, the source region 1
The connection between 21 and the upper wiring layer is performed as follows.
That is, after forming the MOS transistor having the above structure, the interlayer insulating film 122 is formed so as to cover the entire surface.
Further, a resist layer 120 is formed on the entire surface. Next, the resist layer 120 is formed by a photolithography process.
After the opening is formed in the contact hole forming portion, the interlayer insulating film 122 is etched by an anisotropic etching method using the resist layer 120 as an etching mask to form the contact hole. Next, a wiring layer (not shown) is formed on the entire surface.
After the contact hole 124 is filled with a wiring material, the wiring layer is patterned into a predetermined wiring pattern. As described above, the contact hole 124 is formed in accordance with the contact pattern of the resist layer 120. Generally, the contact pattern is formed with a slight deviation from the original design position. Often. Therefore, when the distance between the designed position of the contact hole 124 and the trench 115 is not sufficient, as shown in FIG.
Therefore, when the interlayer insulating film 122 is etched, a part of the isolation insulating film 117 may be simultaneously removed, and a groove 130 may be formed. In this case, a diffusion layer (not shown) of another element adjacent to the isolation insulating film 117 in the trench 115 and the contact hole 1 are formed.
The distance (that is, the substantial separation distance) from the wiring member (not shown) embedded in the wiring 24 is shortened, and the leakage current 131 as shown by the broken line in the figure increases, causing a significant deterioration in the separation characteristics. It becomes. In order to avoid such a situation, it is necessary to make the separation distance between the contact hole 124 and the trench 115 sufficiently large, or to control the formation position of the contact hole 124 very accurately. However, the former hinders high integration as a semiconductor device, and the latter is usually difficult to achieve with a precision control method, and even if it could be achieved, it may cause an increase in cost. [0008] The present invention has been made to solve the above problems, and an object thereof while preventing deterioration of the degree of integration of semiconductor equipment, which can ensure a good isolation characteristic by a trench structure It is to provide a manufacturing method. Method for producing [0009] [0010] Means for Solving the Problems] claim 1 semiconductor device according form separation grooves for element portion on the surface side of the semiconductor substrate on which various semiconductor devices are formed The step and the step of embedding the isolation insulating film in the isolation groove, at least, on the isolation insulating film along the boundary between the isolation groove and the semiconductor substrate,
Forming an etching stopper film. element
In the step of forming the separation groove for the part, the separation groove is
The oxidation resistant film selectively formed on the plate is used as an etching mask.
Formed by anisotropic etching
In the step of forming a stop film, the etching stop film is separated.
After the step of embedding the isolation insulating film in the groove, the side of the oxidation-resistant film
Formed as a wall. In the method for manufacturing a semiconductor device according to the present invention,
After the isolation insulating film is buried in the isolation trench formed in the semiconductor substrate, an etching stopper film is formed on at least the isolation insulating film along the boundary between the isolation trench and the semiconductor substrate.
That is, the etching stopper film extends over the entire periphery of the upper portion of the isolation insulating film in the isolation trench, and thereby the isolation insulating film is protected from the subsequent etching for forming the contact hole. Furthermore, after implantation isolation insulating film to the separation grooves, the etch stop layer, since in order to form a side wall of the oxidation resistant film used for the formation of the separation grooves, the etching stop layer is oxidation resistant film Is formed in a self-aligned manner. Therefore, the etching stopper film is formed only on the isolation insulating film, and does not protrude beyond the boundary between the isolation trench and the semiconductor substrate (on the side of the semiconductor substrate). Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 shows a sectional structure of a main part of a semiconductor device according to an embodiment of the present invention. Here, an NMOS element will be described as an example of an element to be separated, but the present invention can be applied to a PMOS element or other elements. As shown in FIG. 1, this semiconductor device has a
A trench 15 for element isolation provided on the surface side of the semiconductor substrate 11 made of a silicon substrate or the like, and an oxide film 16 formed so as to cover the inner surface of the trench 15.
An isolation insulating film 17 made of a silicon oxide film (SiO ₂ ) or the like formed so as to fill the trench 15 is provided. An oxide film 12 serving as a gate insulating film is formed in the element active region adjacent to the trench 15.
A gate electrode 19 made of polycrystalline silicon (polysilicon) containing impurities and an n-type diffusion layer (source region 21 and drain not shown) formed near the surface of semiconductor substrate 11 in self-alignment with gate electrode 19. region)
Are formed. The source region 21 is adjacent to the trench 15. Isolation insulating film 17 embedded in trench 15
An etching stopper film 18 having a predetermined width is formed on the semiconductor substrate 11 so as to cover the periphery of the upper part of the isolation insulating film 17 in the trench 15 along the boundary with the semiconductor substrate 11 (source region 21). An interlayer insulating film 22 made of a silicon oxide film or the like is formed so as to cover the above structure, and a conductive adhesive layer 25 and a wiring layer 26 patterned in a predetermined pattern are further formed thereon. ing. A contact hole 24 is formed in the interlayer insulating film 22 just above the source region 21.
Is formed, whereby the source region 21 and the wiring layer 26 are electrically connected. The adhesion layer 25 has a two-layer structure of, for example, titanium (Ti) and titanium nitride (TiN), and the wiring layer 26 is formed of, for example, tungsten (W). The etching stopper film 18 is formed of a material having a large etching selectivity (hard to be etched) with respect to the silicon oxide film forming the isolation insulating film 17 and the interlayer insulating film 22 in the trench 15, for example, polycrystalline silicon. ing. Next, the operation of the semiconductor device having the above structure will be described. As described above, the source region 21 and the wiring layer 2
6 is made by a contact hole 24,
The formation position of the contact hole 24 often shifts from the design position due to patterning shift in the photolithography process, and the position of the trench 15 may also slightly shift from the design position. Therefore,
If a sufficient separation distance between the trench 15 and the contact hole 24 cannot be obtained due to a demand for high integration, there is a possibility that a part of the contact hole 24 overlaps with the region of the trench 15 as illustrated. However, the isolation insulating film 1 in the trench 15
7, an etching stop film 18 having a high etching selectivity extends along the boundary between the trench 15 and the semiconductor substrate 11, so that a portion of the contact hole 24 is Even if they are overlapped, when the interlayer insulating film 22 is etched, the isolation insulating film 17 underlying the over-chip portion is etched.
8 and can be prevented from being etched. For this reason, unnecessary grooves are not formed unlike the related art, and deterioration of element isolation characteristics can be avoided. Next, with reference to FIGS. 2 to 8, a method of manufacturing the semiconductor device having the above-described configuration will be described. First, as shown in FIG. 2, a semiconductor substrate 1 formed by introducing a p-type impurity into a single crystal silicon substrate
An oxide film 12 as a so-called pad oxide film having a thickness of, for example, about 10 nm is formed on the surface of the substrate 1 by a thermal oxidation method, and then a silicon nitride film (Si ₃ N ₄ ;
_An oxidation resistant film 13 made of XN _Y ) is formed on the entire surface. Next, as shown in FIG. 3, after forming a resist layer 14 patterned so as to have an opening in the trench formation region, the resist layer 14 is used as an etching mask to form an oxidation resistant film 13 and an oxide film. 12 is etched by an anisotropic etching method such as RIE (reactive ion etching). Next, as shown in FIG.
After removing 4 by ashing, the semiconductor substrate 11 is etched using the oxidation resistant film 13 as an etching mask,
A trench 15 for element isolation having a depth of, for example, about 200 nm is formed in the semiconductor substrate 11. Further, as shown in the figure, a thermal oxidation process is performed to form an oxide film 16 on the surface of the semiconductor substrate 11 exposed to the outside and on the inner surface of the trench 15. The oxidation treatment in this case is performed by heating at, for example, about 1000 ° C. in a dry oxygen atmosphere containing 1% of hydrochloric acid, and the oxide film 16 has a thickness of, for example, about 20 nm. Next, as shown in FIG. 5, for example, bias ECR-CVD (Electron Cyclotron Resonance-Ch)
An isolation insulating film 17 made of a silicon oxide film or the like is formed to a thickness of, for example, about 500 nm on the entire surface so as to fill the trench 15 by an emical vapor deposition (CVD) method or the like. ,
Using the oxidation-resistant film 13 as a polishing stopper (until the oxidation-resistant film 13 is exposed), the isolation insulating film 17 is polished and removed.
The isolation insulating film 17 is formed by anisotropic etching such as RIE.
Is etched to the surface height of the semiconductor substrate 11. Next, as shown in FIG.
After a polysilicon film is deposited on the entire surface to a thickness of about 100 nm by an etching method, this is etched by anisotropic etching such as an RIE method, so that a region from the side surface of the oxidation-resistant film 13 to the surface of the isolation insulating film 17 is formed. 50n
Then, an etching stopper film 18 in the form of a side wall (side wall) having a width of about 100 nm is formed. Next, as shown in FIG. 7, for example, H ₃ P
The oxidation-resistant film 13 is removed by wet etching using an etching solution such as O ₄ (orthophosphoric acid). In this manner, an element formation region electrically isolated by the trench 15 buried by the oxide film 16 and the isolation insulating film 17 is formed, and the isolation insulation along the boundary between the trench 15 and the semiconductor substrate 11 is formed. An etch stop film 18 is formed on film 17 (ie, over the entire perimeter of trench 15). This etching stopper film 1
Numeral 8 is made of a polysilicon film or the like as described above, and has a sufficiently high etching selectivity (a ratio showing difficulty in etching) as compared with the isolation insulating film 17 buried in the trench 15 and the interlayer insulating film formed in the next step. )have. Next, as also shown in FIG. 7, after a polysilicon layer into which impurities are introduced is formed on the entire surface by a CVD method or the like, the polysilicon layer and the oxide film 12 are sequentially formed in a predetermined pattern by a photolithography method. The gate electrode 19 is formed by patterning.
Further, by using this gate electrode 19 as a mask, an n-type impurity is introduced into the vicinity of the surface of semiconductor substrate 11 in the element forming region by, for example, ion implantation and heat treatment, so that source region 21 and self-aligned source region 21 are not shown. Forming a drain region; This allows
A gate oxide film made of an oxide film 12 and a gate electrode 19
Then, an NMOS transistor including the source region 21 and the drain region (not shown) is formed. Next, as shown in FIG. 8, an interlayer insulating film 22 made of a silicon oxide film is formed on the entire surface to a thickness of, for example, about 400 nm by a CVD method or the like, and a resist layer 23 is coated thereon. Form. Then, the resist layer 23 is patterned by a photolithography process so as to have an opening in a contact hole forming portion, and then the interlayer insulating film 22 is etched by RIE or the like using the resist layer 23 as an etching mask.
A contact hole reaching the source region on the surface of the semiconductor substrate is formed. At this time, even if a part of the contact hole 24 overlaps with the region of the trench 15 due to the patterning misalignment of the resist layer 24 by the photolithography process, the etching selectivity for the RIE is not formed on the isolation insulating film 17 at that part. Since the high etching stopper film 18 is extended, it serves as a stopper, preventing the isolation insulating film 17 from being etched, and forming an unnecessary groove at the boundary between the trench 15 and the semiconductor substrate 11 as in the conventional case. Never be. Next, as shown in FIG. 1, after an adhesion layer 25 made of, for example, titanium and titanium nitride is formed on the entire surface, a wiring layer made of a conductive material such as tungsten is formed thereon by a CVD method or the like. 26, and the contact hole 24 is formed in the contact layer 25 and the wiring layer 26.
Embed by Thereby, a contact connecting the source region 21 of the NMOS transistor and the wiring layer 26 is formed. At this time, the thicknesses of Ti and TiN as the adhesion layer 25 are, for example, 20 nm and 40 nm, respectively.
And the thickness of W as the wiring layer 26 is, for example, 300
nm. Thereafter, as shown in the figure, a resist layer (not shown) is formed on the wiring layer 26, is patterned by a photolithography process, and is used as an etching mask by the RIE method.
Then, the adhesive layer 25 is etched to obtain a predetermined wiring pattern. As described above, in the manufacturing method of the present embodiment, the etching stopper film 18 is extended all over the upper part of the isolation insulating film 17 in the trench 15, and the contact hole 24 is formed thereafter. Since the isolation insulating film 17 is protected from the above etching, it is possible to reliably prevent the isolation insulating film 17 in the trench 15 from being shaved to form an unnecessary groove, and prevent the element isolation characteristics from deteriorating. Is done. In particular, in the present embodiment, the trench 15
After the isolation insulating film 17 is embedded in the etching stopper film 1
8 is formed as a sidewall of the oxidation-resistant film 13 used in forming the trench 15, the etching stopper film 18 is formed in a self-aligned manner with the oxidation-resistant film 13, and the trench 15 and the semiconductor substrate 11 are formed. Does not protrude outside the semiconductor substrate 11 side. Therefore, the effective contact area in the contact hole 24 is not reduced, and an increase in contact resistance can be prevented. In the above embodiment, for convenience, a cross-sectional view in a certain direction is used, and the M
Although only the element isolation relationship with the OS element has been described, it is needless to say that the same effect is exerted also in the isolation relation with all the elements existing in contact with the periphery of the trench 15. The etching stopper film 18 is formed along the boundary between the trench 15 and the semiconductor substrate 11 along the trench 1.
This is because it is formed over the entire periphery of the upper part of the isolation insulating film 17 in FIG. In this case, the element to be separated is not limited to the MOS element, but may be another type of element such as a bipolar transistor. Although the present invention has been described with reference to the embodiment, the present invention is not limited to this embodiment, and can be variously modified within an equivalent range. For example, in the above embodiment, the etching stopper film 18 is formed on the oxidation-resistant film 13 formed on the semiconductor substrate 11 (source region 21).
Is formed on the isolation insulating film 17 as the side wall (FIG. 6). However, the present invention is not limited to this and may be formed by another method. Also, the etching stopper film 18
Is not limited to the values described above, and can be changed as appropriate by controlling the thickness of the oxidation-resistant film 13 and the amount of etching by RIE. In this embodiment, polycrystalline silicon is used as the etching stopper film 18. However, the material used for the isolation insulating film 17 and the interlayer insulating film 22 (here, silicon oxide film) is more suitable for RIE. Other materials having a high etching selectivity can be used. Furthermore, it is assumed that a silicon nitride film as the anti-oxidation film 13, Ru possible der possible to use other materials. [0038] As has been described in the foregoing, according to the method of manufacturing the semiconductor device according to claim 1, after filling the isolation insulating film isolation grooves formed in a semiconductor substrate, at least the separation grooves Since the etching stopper film is formed on the isolation insulating film along the boundary with the semiconductor substrate, the etching stopper film extends over the entire upper periphery of the isolation insulating film in the isolation trench. As a result, the isolation insulating film is protected from subsequent etching for forming a contact hole, and deterioration of element isolation characteristics is prevented. In addition, separation grooves
After embedding the isolation insulating film in the
Formed as sidewalls of oxidation-resistant film used in forming separation grooves
As a result, the etching stop film is self-aligned with the oxidation resistant film.
They can be formed together. For this reason, etching
The stop film is located outside the boundary between the separation groove and the semiconductor substrate (semiconductor
The contact area is reduced without protruding from the
Prevents the disadvantage of increased contact resistance
be able to. [0039]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view illustrating a main structure of a semiconductor device according to an embodiment of the present invention. FIG. 2 is a cross-sectional view illustrating one process in a method for manufacturing the semiconductor device. FIG. 3 is a sectional view illustrating a step following the step of FIG. 2; FIG. 4 is a sectional view illustrating a step following FIG. 3; FIG. 5 is a sectional view illustrating a step following FIG. 4; FIG. 6 is a cross-sectional view illustrating a process following the process in FIG. FIG. 7 is a cross-sectional view illustrating a process following the process in FIG. FIG. 8 is a cross-sectional view illustrating a process following FIG. FIG. 9 is a cross-sectional view illustrating a structure of a conventional semiconductor device. [Description of Signs] 11: semiconductor substrate, 12: oxide film, 13: oxidation-resistant film, 1
5: trench (isolation groove), 16: oxide film, 17: isolation insulating film, 18: etching stopper film, 19: gate electrode, 2
DESCRIPTION OF SYMBOLS 1 ... Source region, 22 ... Interlayer insulating film, 24 ... Contact hole, 25 ... Adhesion layer, 26 ... Wiring layer

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) H01L 21/768 H01L 21/76

Claims (1)

(57) [Claims] 1. A semiconductor substrate on which various semiconductor elements are formed.
A step of forming an isolation groove for an element portion on the surface side of the plate, a step of embedding an isolation insulating film in the isolation groove, and at least a boundary between the isolation groove and the semiconductor substrate.
Forming an etching stopper film on the isolation insulating film along
That comprises the step, oxidation of the separation groove, and selectively formed on a semiconductor substrate
Anisotropic etching using the film as an etching mask
Forming an etching stopper film and an isolation insulating film in the isolation trench.
After the step of embedding, it is formed as a sidewall of the oxidation resistant film.
A method of manufacturing a semiconductor device.