JP3478330B2 - Dust combustion device for inert gas exhaust system of single crystal puller - Google Patents

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to an exhaust system for sucking and discharging an inert gas supplied to a single crystal pulling machine. And more particularly to that instrumentation <br/> location combust dust inert gas exhaust system.

[0002]

2. Description of the Related Art Conventionally, as an inert gas exhaust system for a single crystal pulling machine, as shown in FIG. 5, a vacuum pump 3 is connected to a silicon single crystal rod pulling machine 1 via an exhaust pipe line 2.
This vacuum pump 3 pulls up the machine 1 through the exhaust line 2.
It is known that the inert gas (for example, Ar gas) supplied to the device is sucked. In this inert gas exhaust system, one end of an intake pipe line 4 for supplying the inert gas into the puller 1 is connected to the upper part of the puller 1, and the other end of the intake pipe line 4 stores the inert gas. It is connected to a tank (not shown). A cyclone 6 is installed in the exhaust pipe line 2.
Is provided, and a dust chamber 6a is provided at the lower end of the cyclone 6. Reference numeral 7 is a manual ball valve provided in the open pipe line 8. In the inert gas exhaust system configured as described above, when the silicon single crystal rod is pulled up by the pulling machine 1, the inert gas is supplied from the intake pipe line 4 into the pulling machine 1 and the inert gas in the pulling machine 1 is pulled up. The active gas is sucked by the vacuum pump 3 and the inside of the pulling machine 1 is maintained at a predetermined negative pressure. On the other hand, since dust such as SiO and SiO ₂ is mixed in the inert gas in the pulling machine 1, the dust is separated from the inert gas by the cyclone 6 and deposited in the dust chamber 6a.

[0003]

In the inert gas exhaust system of the above conventional single crystal pulling machine, after pulling 8 to 10 single crystal rods and several hundred hours have passed, the manual ball valve is opened to remove dust. Atmosphere is introduced into the chamber and the exhaust pipe line. At this time, since a relatively large amount of combustible dust is accumulated in the dust chamber and the exhaust pipe line, these dusts burn rapidly and the temperature and pressure in the exhaust pipe line and the dust chamber rise rapidly. There was a risk of rising. In addition,
The dust such as SiO and SiO ₂ is generated because oxygen contained in the quartz crucible in the puller 1 is combined with the silicon melt and evaporated. An object of the present invention is to allow the dust accumulated in the exhaust pipe or the dust chamber to be gently and gently combusted with a rapid rise in temperature and pressure in the exhaust pipe or the dust chamber. possible to provide a dust retardant Summarize location of the inert gas exhaust system.

[0004]

Means for Solving the Problems The invention according to 請 Motomeko 1,
As shown in FIG. 1, a single crystal pulling apparatus including an exhaust pipe line 12 connected to a single crystal pulling machine 11 and a vacuum pump 13 for sucking an inert gas supplied to the pulling machine 11 through the exhaust pipe line 12. This is an improvement of the inert gas exhaust system of the machine. The characteristic configuration is that the exhaust line 1 is connected to the exhaust line 1.
Exhaust pipe opening pipe line 21 for introducing the atmosphere into 2 and exhaust gas
An exhaust pipe opening valve 31 capable of opening and closing the exhaust passage open conduit 21 provided in the conduit open conduit 21, opening the exhaust line relief valve 31 at detecting the stopping of the vacuum pump 13 Controller 23 It is equipped with and.

[0005] In dust combustion device described in claim 1, when pulling a single crystal rod by pulling a single crystal device 11,
Dust contained in the inert gas gradually accumulates in the exhaust pipe line 12. When the pulling of one single crystal rod by the single crystal pulling machine 11 is completed and the vacuum pump 13 stops, the controller 23 turns on the exhaust pipe line opening valve 31, so that the exhaust pipe line 12 is opened. Atmosphere is introduced through the conduit 21. At this time, although the dust accumulated in the exhaust pipe line 12 reacts with oxygen in the atmosphere and burns, the amount of dust accumulated in the exhaust pipe line 12 is still small, so the temperature and pressure in the exhaust pipe line 12 are reduced. Does not rise sharply.
The introduction of the atmosphere into the exhaust pipe line 12 is repeated for each batch, and after the pulling of a predetermined number of single crystal rods is completed, a relatively large amount of dust accumulates in the exhaust pipe line 12. But since almost all of these dusts have already burned,
Even if the exhaust pipe line 12 is opened to the atmosphere in order to remove the dust, the dust can be easily removed without causing a rapid increase in the temperature and pressure in the exhaust pipe line 12.

The invention according to claim 2 is, as shown in FIG. 2 or FIG. 3, an exhaust pipe line 1 connected to a single crystal pulling machine 11.
2, a vacuum pump 13 for sucking the inert gas supplied to the puller 11 through the exhaust pipe 12, and a puller 11
It is an improvement of the inert gas exhaust system of the single crystal pulling machine provided with the dust chamber 51 or 81a provided in the exhaust pipe line 12 between the vacuum pump 13 and the vacuum pump 13. The characteristic configuration is that the chamber is connected to the dust chamber 51 or 81a and the chamber is opened to introduce the atmosphere into the dust chamber 51 or 81a.
The pipe 52 for the chamber and the pipe 52 for opening the chamber
A chamber release valve 62 capable of opening and closing the chamber opening conduit 52, sometimes detects the stopping of the vacuum pump 13 Chang
The controller 23 for opening the opening valve 62 is provided.

In the dust combustion apparatus according to the second aspect of the present invention, the dust chamber 51 or 81a provided in the exhaust pipe 12 separates dust contained in the inert gas to some extent and collects it. It is gradually deposited in 81a. When the vacuum pump 13 pulling is completed one of the single crystal ingot by a single crystal pulling apparatus 11 is stopped, the controller 23 so that on the chamber relief valve 62, chamber open to the dust chamber 51 or the 81a <br / > Atmosphere is introduced through line 52 . At this time, the dust accumulated in the dust chamber 51 or 81a reacts with oxygen in the atmosphere and burns.
Alternatively, since the amount of dust accumulated in 81a is still small, the temperature and pressure in dust chamber 51 or 81a do not rise sharply. The introduction of the atmosphere into the dust chamber 51 or 81a is repeated for each batch, and after the pulling of a predetermined number of single crystal rods is completed, the dust chamber 51 is removed.
Alternatively, a relatively large amount of dust accumulates in 81a. However, since almost all of these dusts have already burned, the dust chamber 51 must be removed to remove these dusts.
Or even if the inside of 81a is opened to the atmosphere, the dust chamber 51
Alternatively, the dust can be easily removed without causing a rapid rise in temperature and pressure inside 81a.

In the invention according to claim 3 , as shown in FIG. 4, an exhaust pipe line 12 connected to a single crystal pulling machine 11,
A vacuum pump 13 for sucking the inert gas supplied to the puller 11 through the exhaust pipe 12 and a dust chamber 81a provided in the exhaust pipe 12 between the puller 11 and the vacuum pump 13 are provided. This is an improvement of the inert gas exhaust system of the crystal puller. The characteristic structure is that the exhaust pipe line 12
Is connected to the exhaust pipe line 12 and the exhaust pipe line is opened to introduce the atmosphere into the exhaust pipe line 12.
A discharge conduit 21 and an exhaust conduit opening valve 31 provided in the exhaust conduit opening conduit 21 capable of opening and closing the exhaust conduit opening conduit 21 and a dust chamber 81a connected to the dust chamber 81a. Chamber opening pipeline 5 for introducing the atmosphere
2 and the chamber opening pipe 52 provided in the chamber
Open chamber opens the open conduit 52 valve 62
And when detecting the stop of the vacuum pump 13, the exhaust pipe line is opened.
Opening the valve 31 and the chamber opening valves 6 2 is in place and a controller 23.

In the dust combustion apparatus according to the third aspect of the present invention, the inside of the exhaust pipe 12 and the dust chamber 8 are batch by batch.
The dust accumulated in 1a burns without a rapid rise in temperature and pressure in the exhaust pipe line 12 and the dust chamber 81a. After the pulling of the predetermined number of single crystal rods is completed, a relatively large amount of dust accumulates in the exhaust pipe line 12 and the dust chamber 81a, but since almost all of the dust has already burned, Even if the exhaust pipe line 12 and the dust chamber 81a are opened to the atmosphere in order to remove the dust, the dust powder is not accompanied by a rapid increase in the temperature and the pressure in the exhaust pipe line 12 and the dust chamber 81a. It can be easily removed.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION Next, a first embodiment of the present invention will be described with reference to the drawings. In this embodiment, the single crystal rod pulled by the puller is a silicon single crystal rod. As shown in FIG. 1, the puller 11 includes a chamber 11a.
And a casing 11b connected to the upper end of the chamber 11a. Although not shown, a quartz crucible in which the silicon melt is stored, a heater which surrounds the quartz crucible and heats the silicon melt, and the like are housed in the chamber 11a. Further, pulling means 11c for pulling up the silicon single crystal ingot is provided at the upper end of the casing 11b. A vacuum pump 13 is connected to the lower surface of the chamber 11a via an exhaust pipe line 12, and an intake pipe line 14 is connected to the casing 11b.
Are connected. One end of the intake pipe line 14 has a casing 11b.
And the other end of the intake pipe line 14 is connected to a tank (not shown) in which an inert gas (Ar gas in this embodiment) is stored.

The exhaust pipe line 12 has a chamber 11a at one end.
And a pair of first and second branch pipelines 12a and 12b connected to the lower surface of the first branch and the other end, and one end connected to the other ends of the first and second branch pipelines 12a and 12b and the other end to the vacuum pump 13
And a collecting conduit 12c connected to the inlet of the. In addition,
As the vacuum pump 13, a combination of a water-sealed pump and a mechanical booster, an oil rotary pump, a dry vacuum pump, or the like is used.

Reference numerals 16 and 17 in FIG. 1 are electric control valves for controlling the pressure in the chamber 11a by adjusting the flow rates of Ar gas flowing through the intake conduit 14 and the collecting conduit 12c, respectively. Reference numerals 18 and 19 are air-operated angle valves that open and close the collecting conduit 12c. Further, reference numeral 20 is a flapper valve provided at the upper end of the third branch pipe line 12d branched from the middle of the collecting pipe line 12c. This valve 20 burns dust accumulated in the exhaust pipe line 12 to exhaust pipe line. It is provided to open the inside of the exhaust pipe line 12 to the atmosphere when the pressure in the inside 12 suddenly rises.

The exhaust pipe line 12 between the puller 11 and the vacuum pump 13, and more specifically, the collecting pipe line 12c between the angle valve 19 and the vacuum pump 13, is the collecting pipe line 12c.
The exhaust pipe opening pipe line 21 for introducing the atmosphere to is connected to
The exhaust pipe opening valve 3 is provided in the exhaust pipe opening pipe 21.
1 is provided. The exhaust line relief valve 31 is an electromagnetic valve of the two-port two-position switching, opens the exhaust pipe opening valve 31 and turning on the exhaust pipe release valve 31 to OFF
Is supposed to close. Further, the vacuum pump 13 is provided with a rotation sensor 22 that detects the rotation speed of the pump 13. The detection output of the rotation sensor 22 is the controller 2
3 and the control output of the controller 23 is connected to the exhaust pipe opening valve 31.

The operation of the dust combustion apparatus of the inert gas exhaust system having the above structure will be described. When operating the single crystal pulling machine 11 to pull up the silicon single crystal rod, an inert gas is supplied from the intake pipe line 14 into the pulling machine 11 and the inert gas in the pulling machine 11 is sucked by the vacuum pump 13. Then, the inside of the pulling machine 11 is maintained at a predetermined negative pressure. Pulling machine 1
Since dust such as SiO and SiO ₂ is mixed in the inert gas inside 1, the dust gradually accumulates in the exhaust pipe line 12. When the pulling of one silicon single crystal rod by the single crystal pulling machine 11 is completed and the vacuum pump 13 is stopped, the rotation sensor 22 detects the stop of the vacuum pump 13. Controller 23 so that on the exhaust line relief valve 31 based on the detection output of the rotation sensor 22, an exhaust pipe opening into the exhaust conduit 12 is opened exhaust passage opening valve 31
Air is introduced through the use line 21. At this time, although the dust accumulated in the exhaust pipe line 12 reacts with oxygen in the atmosphere and burns, the amount of dust accumulated in the exhaust pipe line 12 is still small, so the combustion is performed gently and the exhaust gas is exhausted. The temperature and pressure in the conduit 12 do not rise sharply.
The introduction of the atmosphere into the exhaust pipe line 12 is repeated for each batch, and after the pulling of 8 to 10 silicon single crystal rods is completed, a relatively large amount of dust is accumulated in the exhaust pipe line 12. However, since almost all of these dusts have already burned, even if the exhaust pipe line 12 is opened to the atmosphere in order to remove these dusts, the temperature and pressure inside the exhaust pipe line 12 will be drastically increased. The dust can be easily removed without ascending.

FIG. 2 shows a second embodiment of the present invention.
2, the same reference numerals as those in FIG. 1 indicate the same parts. In this embodiment, the dust chamber 51 is provided in the exhaust pipe line 12 between the puller 11 and the vacuum pump 13, and more specifically, in the collecting pipe line 12c between the angle valve 18 and the angle valve 19.
Is provided, the chamber opening for <br/> conduit 52 into the dust chamber 51 is connected, further the chamber open conduit 52
A chamber opening valve 62 is provided in the chamber . The dust chamber 51 has a chamber body 51a and a single substantially U-shaped baffle plate 51b provided inside the chamber body 51a so as to face the outlet of the dust chamber 51.
In the dust chamber 51, SiO contained in Ar gas
Dust separated from Ar gas by collision of dust such as SiO ₂ or the like with the baffle plate 51b, the dust separated from the Ar gas is deposited on the bottom of the chamber body 51a, and the removed Ar gas is discharged from both sides of the baffle plate 51b. And is discharged from the dust chamber 51. Also
The chamber opening valve 62 is a 2-port / 2-position switching electromagnetic valve. When the chamber opening valve 62 is turned on, the chamber opening valve 62 is opened, and when it is turned off, the chamber opening valve 62 is closed. The chamber opening valve 62 is the controller 23.
Connected to the control output of. In addition, in this embodiment,
Exhaust pipeline opening pipeline and exhaust as in the first embodiment
It does not have a line opening valve. The configuration other than the above is the same as that of the second embodiment.

In the dust combustor of the inert gas exhaust system constructed as described above, the dust contained in the Ar gas is separated to some extent by the dust chamber 51 provided in the exhaust pipe 12. When the pulling of one silicon single crystal rod by the single crystal pulling machine 11 is completed and the vacuum pump 13 is stopped, the rotation sensor 22 is used to stop the vacuum pump 13.
To detect. The controller 23 turns on the chamber opening valve 62 based on the detection output of the rotation sensor 22, and the atmosphere is introduced into the dust chamber 51 through the chamber opening conduit 52. At this time, the dust chamber 51
Although the dust accumulated in the interior of the dust chamber 51 reacts with oxygen in the atmosphere and burns, the amount of dust accumulated in the dust chamber 51 is still small, so the combustion is performed slowly, and the temperature and pressure in the dust chamber 51 are increased. Does not rise sharply. Further, the dust accumulated in the exhaust pipe line 12 near the dust chamber 51 also burns without a rapid increase in temperature and pressure. The introduction of the atmosphere into the dust chamber 51 is repeated for each batch, and after the pulling of 8 to 10 silicon single crystal rods is completed, a relatively large amount of dust is accumulated in the dust chamber 51. However, since almost all of the above-mentioned relatively large amount of dust has already burned, even if the inside of the dust chamber 51 is opened to the atmosphere in order to remove these dusts, the temperature and pressure inside the dust chamber 51 rapidly increase. It is possible to easily remove the dust without causing any rise.

FIG. 3 shows a third embodiment of the present invention.
3, the same reference numerals as those in FIG. 2 indicate the same parts. In this embodiment, a cyclone 81 is provided in the exhaust pipe line 12 between the puller 11 and the vacuum pump 13, and more specifically in the collecting pipe line 12c between the angle valve 18 and the angle valve 19. The dust chamber 8 is provided at the lower end of the cyclone 81.
1a is provided. The cyclone 81 is configured to separate dust such as SiO and SiO ₂ contained in Ar gas, and the separated dust is stored in the dust chamber 81a. However, in order to keep the inside of the pulling machine 11 at a predetermined negative pressure, the cyclone 81 does not reduce the inner diameter of the exhaust pipe 12 so much just before the inlet of the cyclone 81 to reduce the pressure loss. Therefore, although the cyclone 81 has not so high dust separation ability, it has a higher dust separation ability than the dust chamber of the second embodiment. The second embodiment similarly to the chamber open conduit 52 is connected to the dust chamber 81a, the Chang
A chamber opening valve 62 is provided in the pipe opening line 52. The configuration other than the above is the same as that of the second embodiment.

In the thus constructed cleaning device, the cyclone 81 separates a larger amount of dust from the Ar gas than the second embodiment, and this dust is discharged into the cyclone 81.
Is deposited in the dust chamber 81a at the lower end of the. But 1
Since the amount of dust accumulated in the dust chamber 81a for each batch is small, even if the chamber opening valve 62 is turned on and the atmosphere is introduced into the dust chamber 81a and the dust is burned, the temperature and pressure in the dust chamber 81a are reduced. It does not rise sharply. Further, the dust accumulated in the exhaust pipe line 12 near the cyclone 81 is also burned without causing a rapid increase in temperature and pressure. As a result, although a relatively large amount of dust accumulates in the dust chamber 81a after the pulling of the 8 to 10 silicon single crystal rods is completed, almost all of the dust has already burned. Even if the inside of the dust chamber 81a is opened to the atmosphere in order to remove the dust, it is possible to easily remove the dust without causing the temperature and pressure in the dust chamber 81a to rapidly increase.

FIG. 4 shows a fourth embodiment of the present invention.
4, the same reference numerals as those in FIGS. 1 and 3 indicate the same parts. In this embodiment, as in the first embodiment,
Collecting line 12 between the angle valve 19 and the vacuum pump 13
an exhaust pipe open conduit 21 is connected to c, the exhaust pipe
An exhaust pipe opening valve 31 is provided in the opening pipe 21. Further, as in the third embodiment, the dust chamber 81a is provided at the lower end of the cyclone 81 provided in the collecting pipe line 12c between the angle valve 18 and the angle valve 19.
Chamber relief valve 62 is provided in the chamber opening for <br/> conduit 52 connected to the dust chamber 81a. The configuration other than the above is the same as that of the first and third embodiments.

In the dust combustor thus constructed,
In the exhaust pipe line 12 and the dust chamber 81a for each batch
The dust accumulated inside burns without a sharp rise in temperature and pressure inside the exhaust pipe line 12 and inside the dust chamber 81a. After pulling up the 8 to 10 silicon single crystal rods, a relatively large amount of dust accumulates in the exhaust pipe line 12 and the dust chamber 81a, but almost all of the dust has already burned. Therefore, in order to remove these dusts, the inside of the exhaust pipe line 12 and the dust chamber 81 are removed.
Even if the inside of “a” is opened to the atmosphere, the above dust can be easily removed without causing a rapid rise in the temperature and pressure inside the exhaust pipe line 12 and inside the dust chamber 81a.

Incidentally, in the above-mentioned first to fourth embodiments,
Although Ar gas is mentioned as the inert gas, nitrogen gas or the like may be used. In the first and fourth embodiments, the exhaust pipe line
Although the opening pipe is provided in the exhaust pipe between the angle valve and the vacuum pump, the collecting pipe 12c between the puller 11 and the control valve 17 and between the control valve 17 and the angle valve 18 are provided. It may be connected to the collecting pipe 12c, the collecting pipe 12c between the angle valve 18 and the angle valve 19, and the exhaust pipe opening pipe 21 is connected to each part of the collecting pipe 12c. Further, the exhaust pipe line opening valves 31 may be provided in the exhaust pipe line opening pipe lines 21, respectively.

[0022]

As described above, according to the present invention, the exhaust pipe opening pipe for introducing the atmosphere into the exhaust pipe is connected to the exhaust pipe , and the exhaust pipe opening pipe is exhausted. A pipe line opening valve was provided, and the controller opened the exhaust pipe line opening valve when detecting the stop of the vacuum pump . Therefore , the atmosphere is automatically introduced into the exhaust pipe line for each batch, and the exhaust pipe line is opened. A small amount of dust accumulated inside burns gently. As a result, even if a relatively large amount of dust accumulates in the exhaust pipe line after the pulling of a prescribed number of single crystal rods is completed, almost all of this dust has already burned, so the exhaust pipe line The dust can be easily removed without causing a sharp rise in temperature and pressure.

[0023] switch to introduce air into the dust chamber
The Yanba open conduit connected to the dust chamber, the chamber
If a chamber opening valve is provided in the opening pipeline and the controller is configured to open the chamber opening valve when detecting the stop of the vacuum pump, the atmosphere is automatically introduced into the dust chamber for each batch and the dust chamber is opened. A small amount of dust accumulated inside burns gently. As a result, even if a relatively large amount of dust accumulates in the dust chamber after the pulling of a predetermined number of single crystal rods is completed, almost all of this dust has already burned, so the temperature inside the dust chamber is reduced. Also, the dust can be easily removed without a rapid increase in pressure.

Further, an exhaust pipe opening pipe line and a chamber opening pipe pipe for introducing air into the exhaust pipe pipe and the dust chamber are connected to the exhaust pipe pipe , respectively, and the exhaust pipe pipe pipe opening pipe line and the exhaust pipe pipe pipe pipe are opened. > exhaust pipe beauty chamber open conduit path opening valves and Chang
Each has a bar opening valve to detect when the vacuum pump has stopped .
The exhaust pipe open valve and channel
If the open valves are configured to be opened individually, the atmosphere is automatically introduced into the exhaust pipe line and the dust chamber for each batch, and a small amount of dust accumulated in the exhaust pipe line and the dust chamber is gradually released. Burn to. As a result,
Even if a relatively large amount of dust accumulates in the exhaust pipe and dust chamber after the pulling of the specified number of single crystal rods is completed, almost all of this dust has already burned, so the dust chamber The dust can be easily removed without causing a sharp rise in temperature and pressure.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing a dust combustion device of an inert gas exhaust system according to a first embodiment of the present invention.

FIG. 2 is a configuration diagram corresponding to FIG. 1, showing a second embodiment of the present invention.

FIG. 3 is a configuration diagram corresponding to FIG. 1 showing a third embodiment of the present invention.

FIG. 4 is a configuration diagram corresponding to FIG. 1, showing a fourth embodiment of the present invention.

FIG. 5 is a configuration diagram corresponding to FIG. 1 showing a conventional example.

[Explanation of symbols]

11 Single Crystal Pulling Machine 12 Exhaust Pipeline 13 Vacuum Pump 21 Exhaust Pipeline Opening Pipeline 23 Controller 31 Exhaust Pipeline Opening Valve 51, 81a Dust Chamber 52 Chamber Opening Pipeline 62 Chamber Opening Valve

─────────────────────────────────────────────────── ─── Continuation of front page (56) Reference JP-A-11-199388 (JP, A) JP-A-59-39800 (JP, A) JP-A-7-187889 (JP, A) JP-A-9- 175881 (JP, A) JP 2000-219591 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) C30B 1/00-35/00 F23G 5/44 F23G 7/00 F23L 1 / 00

Claims (3)

(57) [Claims] 1. An exhaust pipe line (12) connected to a single crystal pulling machine (11), and the pulling machine (11) through the exhaust pipe line (12).
In an inert gas exhaust system of a single crystal pulling machine equipped with a vacuum pump (13) for sucking the inert gas supplied to, in the exhaust pipe (12) connected to the exhaust pipe (12) The exhaust pipe opening pipe (21) for introducing the atmosphere and the exhaust pipe opening pipe (21) provided in the exhaust pipe opening pipe (21) are opened.
A closable exhaust pipe release valve conduit (21) release (31), at the exhaust pipe for detecting the stop of the vacuum pump (13)
A dust combustion apparatus, comprising: a controller (23) for opening an opening valve (31). 2. An exhaust pipe line (12) connected to a single crystal pulling machine (11), and the pulling machine (11) through the exhaust pipe line (12).
A vacuum pump (13) for sucking the inert gas supplied to
In the inert gas exhaust system of the single crystal puller equipped with a dust chamber (51, 81a) provided in the exhaust pipe line (12) between the puller (11) and the vacuum pump (13), A chamber opening conduit (5) connected to the dust chamber (51, 81a) for introducing air into the dust chamber (51, 81a)
2) and the chamber opening pipe (52) provided in the chamber opening
Sometimes the chamber for detecting the open chamber relief valve conduit (52) release (62), the stop of the vacuum pump (13)
A dust combustor comprising: a controller (23) for opening the release valve (62). 3. An exhaust pipe line (12) connected to a single crystal pulling machine (11), and the pulling machine (11) through the exhaust pipe line (12).
A vacuum pump (13) for sucking the inert gas supplied to
In an inert gas exhaust system of a single crystal puller equipped with a dust chamber (81a) provided in an exhaust pipe line (12) between the puller (11) and the vacuum pump (13), the exhaust gas conduit the exhaust pipe is connected to the (12) (12) an exhaust pipe open conduit for introducing air into the (21), the exhaust pipe is provided in the exhaust pipe open conduit (21) Road opening
An exhaust pipe opening valve (31) capable of opening and closing the discharge pipe (21), and a chamber opening pipe (52) connected to the dust chamber (81a) for introducing air into the dust chamber (81a)
If the provided chamber open conduit (52) the chamber open
A chamber opening valve (62) that can open and close the discharge pipe (52) and the exhaust pipe when detecting the stop of the vacuum pump (13).
A dust combustion apparatus comprising an open valve (31) and a controller (23) for opening the chamber open valve (62) .