JP3460313B2 - Film transport roller and film forming equipment - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film conveying roller and a film forming apparatus. More specifically, a film-conveying roller that has a small temperature difference in the width direction and is easy to maintain, for conveying a film formed by casting a solution on a substrate while separating it from the substrate and drying the film, and the same. The present invention relates to a film forming apparatus using.

[0002]

2. Description of the Related Art A raw material solution is coated or cast on a substrate,
The method of forming a thin film or a thin layer is an important technique for obtaining a highly functional material, and various techniques have been recently researched and developed. In a solution casting method capable of producing a thin film, a film raw material solution is cast onto various substrates, and the gelled film on the substrate or the film from which a part of the solvent has been removed is peeled from the substrate and peeled. The formed film is dried to form a film.

Many methods have been disclosed for these techniques. For example, regarding the manufacturing process of a cellulose triacetate film, US Pat.
Nos. 2,607,704, 2,739,069, etc., Japanese Patent Publication No. 45-9074, 54-48.
862, JP-A-62-115035 and the like.

In order to shorten the film forming step in a shorter time to improve the production efficiency, the film is rapidly cooled on the substrate immediately after casting to be gelated and then dried while being conveyed by a conveying roller or the like. The method is effective. In the method of rapidly cooling and gelling immediately after casting, when peeled from the substrate, the solvent remains in a large amount in the film and is sent to the carrying step, and is dried while being carried by the carrying roller.
In this method, the shorter the time from casting to peeling, the shorter the production process, and the higher the production efficiency.

[0005]

The residual solvent ratio in the film is high and the residual solvent ratio in the film is relatively high particularly when the film cooled for gelation is conveyed. In the initial transporting step, the film gelated at the high temperature portion of the transport roller surface becomes sol again and exhibits tackiness, so that part of the film composition may adhere to the transport roller. When such adhesion occurs, not only the flatness of the film after drying is impaired, but also the film composition dried and solidified is scattered on the surface of the adhered transport roller, and directly adheres to the film, or adheres again to the convey roller. As a result, problems such as the occurrence of pressure-like defects on the film occur.

At the beginning of conveyance immediately after peeling, the temperature of the film is low, and the temperature of the portion near the center of the conveying roller with which the film comes into contact is lowered, but the temperature is high outside the widthwise ends where the film does not come in contact with the temperature of the dry atmosphere. It becomes temperature. Therefore, the above-mentioned adhesion to the transport roller occurs remarkably at both end portions in the width direction of the film and at the roller at the initial stage of transport near the peeling step. Even in the transport rollers other than the initial stage of transport, since the amount of residual solvent in the film is large, the temperature near the center of the transport roller where the film comes into contact due to the heat of vaporization decreases, but the widthwise both ends where the film does not come into contact On the outside, the temperature becomes higher according to the temperature of the dry atmosphere, and similarly the above-mentioned adhesion is likely to occur. The above problem tends to occur when the temperature difference between the center and both ends of the transport roller exceeds about 20 ° C.

Instead of cooling and gelling the film cast on the substrate, the film cast on the substrate is heated to evaporate a part of the solvent and concentrate it, and then peeled from the substrate to a drying zone. Even in the case of the feeding method, in the drying zone where evaporation of the solvent occurs, especially immediately after peeling, the phenomenon that the temperature becomes high at both widthwise end portions of the film occurs similarly, and the same adhesion failure occurs to some extent. Occur. Furthermore, when such a temperature difference is significant,
In any case of cooling / gelling or heating / concentration, in addition to the adhesion failure as described above, the solvent gas in the dry atmosphere is condensed on the film in the center of the film where the temperature is relatively low. There is even dew condensation.

On the other hand, in the latter half of drying, when the set temperature on the downstream side is lower than that on the upstream side of the transport, the relationship between the film temperature and the transport roller temperature is reversed, and the temperature at both ends of the film in the width direction is reversed. May be colder than the central part. In such a case, the components such as the plasticizer present in the film may be precipitated at the both ends which are at a low temperature. The component thus deposited is solidified on the transport roller by drying, and if the film is transported on this, it may cause damage to the film. Further, when a temperature difference in the width direction is generated on the conveying roller due to any of the above causes, the frictional force on the surface of the conveying roller is affected by the temperature and thus has a delicate distribution, and the sheet is thus conveyed. It may cause wrinkles in the film.

In order to prevent dirt and the like from adhering to the carrying roller, conventionally, a measure has been taken in which the operator regularly cleans the carrying roller. This method is a method of removing dirt on the conveying roller using a cloth moistened with a solvent such as methylene chloride, but since this work is performed in a gas atmosphere of an organic solvent such as methylene chloride, methanol, butanol, etc. Moreover, it is not preferable in terms of environmental hygiene. Further, the film conveyed during the cleaning operation cannot be made into a product, and if the cleaning operation is frequently performed, it causes a significant decrease in production efficiency.

As means for solving this, Japanese Patent Laid-Open No. 4-8
Japanese Patent No. 5011 discloses a method of using a material having a surface energy of 80 dyne / cm or less for the surface of the transport roller in the manufacturing process of a cellulose triacetate film. However, although this method has the effect of making it difficult for the film composition to adhere, it does not have the effect of reducing the temperature difference in the width direction, so at the edge of the film where the temperature rises, the film adhesion is not completely achieved. It cannot be prevented.

Further, Japanese Patent Application Laid-Open No. 5-185443 discloses a method of cooling the film from the film edge on the conveying roller to the inner side of 30 mm to 20 ° C. or less in the manufacturing process of the cellulose triacetate film.
In this case, as a cooling means, a method of partially blowing cold air or introducing cold air into the hollow roller is used. With the method of blowing cold air, it is difficult to control the temperature of the cold air, and a precise device and high cost are required for accurate temperature control. On the other hand, in the method of introducing cold air into the inside of the roller, special processing is required to rotate the roller, resulting in high cost of manufacturing the roller.

Further, Japanese Patent Laid-Open No. 6-118558 discloses a method for producing a resin-coated paper photographic support in which a molten resin is coated on a substrate while applying pressure, and a coated heat pipe system in which a heating medium such as CFC gas is enclosed. A method of using a chill roll is disclosed. In this method, the molten resin substantially provided on the substrate is forcibly cooled by the cooling water flowing through the pipe inside the roll, and the temperature difference between the inlet and the outlet of the cooling water is improved by the heat medium inside the roll. However, if the temperature difference between the center and the end of the roller exceeds 20 ° C., a sufficient effect cannot be obtained. Further, this method is a method of forcibly cooling the inside of the roll with cooling water, which requires a pipe for cooling water in the roll, resulting in high cost of manufacturing the roller. Furthermore, it is necessary to cool the cooling water, which increases the running cost.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to solve the above-mentioned problems of the prior art by correcting the temperature difference in the width direction of the film conveying roller, and adhering the film composition to the conveying roller. While preventing process failures,
An object of the present invention is to provide a film transport roller which is easy to maintain and a film forming apparatus using the same.

[0014]

The above object of the present invention can be achieved by the following constitutions. (1) In a film transport roller for transporting a film formed by casting a raw material solution on a substrate while peeling it from the substrate and drying it, a gas phase and A film transport roller characterized by being filled with a liquid-phase refrigerant and having a groove running in the rotation direction over the entire length on the inner surface. (2) Before being provided on the inner surface of the hollow cylindrical conveying roller
The film conveying roller according to the above (1), wherein the groove running in the rotation direction is a screw groove which is different in direction from the center in the conveying roller axial direction. (3) The film conveying roller as described in (1) or (2) above, wherein the inner diameter of the hollow cylindrical conveying roller is gradually increased from the center in the axial direction of the conveying roller toward both ends. (4) Casting means for casting the raw material solution on the cooled substrate, peeling means for peeling the film formed on the substrate from the substrate, and conveying means for conveying the peeled film while drying. In the film forming apparatus provided, at least one of the transport rollers arranged in the vicinity of the peeling means of the transport means fills the inside of the sealed hollow cylindrical transport roller with a refrigerant in a gas phase and a liquid phase, and A film forming apparatus, characterized in that it is a conveying roller having a groove on its surface that runs in the rotation direction over the entire length.

[0015]

The transport roller of the present invention is a transport roller having a hollow cylindrical transport roller which is filled only with vapor-phase and liquid-phase refrigerants and has an inner surface provided with a groove running in the rotational direction . The vapor-phase and liquid-phase refrigerants thus hermetically filled in the transport rollers cause evaporation or condensation in accordance with the local level of the temperature of the inner surface of the rotating transport roller, and the so-called heat pump action locally It acts in the direction of canceling out various temperatures. At the same time, the liquid-phase refrigerant flows on the inner surface of the carrying roller and comes into contact with the inner surface of the cylinder of the carrying roller, and acts so as to uniformize the temperature of the entire carrying roller by heat conduction. Due to these two effects, the temperature difference between the central portion and the end portion of the transport roller as described above, which occurs in the transport roller used for film production by solution casting, can be made uniform. In particular, when the temperature difference between the transport roller and the film is large and the temperature difference in the width direction is large, only one action is not sufficient, and it is extremely effective to use both of them together.

These actions will be described with reference to the schematic diagram of FIG. 1 when the film temperature is lower than the temperature of the transport roller. FIG. 1 is a cross-sectional view of the transport roller 1, in which the coolant 2 is filled. When the temperature of the transport roller 1 is constant throughout, the amounts of the gas phase 2a and the liquid phase 2b of the filled refrigerant 2 are in an equilibrium state determined by the pressure, temperature, and filling amount in the roller 1. . Here, consider a state in which the low-temperature film 3 is conveyed on the relatively high-temperature conveying roller 1. At the center portion 1b in the width direction of the transport roller 1 which is in contact with the film 3, the film 3 having a low temperature absorbs heat to lower the temperature. In this region, the vapor-phase refrigerant 2a filled in the conveying roller 1 is condensed and gives heat of condensation to the roller 1, so that the temperature of that portion of the conveying roller 1 rises. On the other hand, since the portion not in contact with the film 3 is on the outside, the temperature is relatively high in both end portions 1a of the transport roller 1 which is relatively high due to the dry atmosphere, and the liquid-phase refrigerant 2b is vaporized and vaporized. Since heat is taken from the roller 1, the temperature of that portion of the transport roller 1 is lowered.

Due to the heat pump action of evaporation / condensation, the refrigerant 2 circulates in the conveying roller 1 as shown by the arrow in FIG. 1 while repeatedly converting between the gas phase 2a and the liquid phase 2b. As a result, the temperature difference in the width direction of the transport roller 1 is offset, and the temperature difference in the width direction of the transported film 3 is also made uniform.

Above, the temperature of the film 3 is kept at the conveying roller 1.
Although the case where the temperature of the film 3 is lower than the temperature of the transport roller 1 has been described,
That is, when the roller central portion 1b is at a high temperature and the roller end portion 1a is at a low temperature, conversely to the above, the liquid phase refrigerant 2b at the central portion 1b.
And the condensation of the vapor phase refrigerant 2a at the end 1a, respectively, and the circulation opposite to the arrow in FIG. 1 occurs. However, even if the circulation direction is reversed, the temperature of the end portion 1a and the central portion 1b on the roller can be made uniform. Here, the temperature difference in the width direction (center portion and end portion) in the present invention is within an allowable range as long as it does not cause the above-mentioned various failures, but specifically, within about 20 ° C. It is within the allowable range. However, this temperature range is variously determined depending on the film used, the solvent, the coating film thickness, the ambient temperature, and the like.

Inside the conveying roller 1 of the present invention,
As shown in FIG. 2, the liquid-phase refrigerant 2b inside the transport roller 1 generates a circulating flow in a substantially rotational direction by the rotation of the transport roller 1, and acts as a heat transfer medium on the inner surface of the cylinder of the transport roller 1 to rotate. This contributes to uniform temperature in the direction. In the present invention,
This action is used more efficiently by providing a groove that runs in the rotation direction on the inner surface of the cylinder of the transport roller 1 to increase the heat conduction area and further facilitate the stirring of the refrigerant 2. Further, as a means to be used in combination with the above heat pump action, screw grooves which are different in direction from each other are provided on the inner surface of the cylinder of the conveying roller 1 with the center of the conveying roller 1 in the axial direction as a boundary so that the flow of the liquid-phase refrigerant 2b is in the axial direction. It is particularly effective to have a component (width direction of the film 3). Further, a taper is provided in the cylinder of the transport roller 1 with the center as a boundary, so that the liquid-phase refrigerant 2
It is also possible that b is biased toward the center or both ends in the width direction of the transport roller 1 by the centrifugal force generated by the rotation. When this taper is provided, not only the groove in the rotational direction but also the groove in the axial direction of the roller can be provided. Thereby, the flow of the refrigerant in the axial direction can be made faster. The combined use of the above heat pump action and these means is extremely effective for correcting the temperature difference at both end portions in the width direction where a temperature difference is likely to occur.

By using the conveying roller 1 of the present invention, the temperature difference in the width direction of the film 3 is eliminated and the temperature at the edge of the film is lowered, so that the film composition is effectively prevented from adhering to the conveying roller 1. be able to. Further, in the central portion of the film, the problem of being too cold can be solved and the condensation of gas can be prevented. Further, it is possible to prevent the wrinkles of the film 3 from occurring due to the temperature difference between the end portion 1a and the central portion 1b of the transport roller 1. On the other hand, when the temperature of the film 3 is higher than the temperature of the transport roller 1, it is possible to prevent the components such as the plasticizer in the film 3 from being deposited at the end portions of the film, so that the quality and process of transporting the film 3 can be prevented. The failure can be effectively prevented.

Since the conveying roller 1 of the present invention has a simple structure in which the gas-phase and liquid-phase refrigerant 2 is enclosed, there is no need to perform any special processing when manufacturing the roller, and the conveying roller 1 can be conveyed. Almost no troubles such as adhered matters or troubles in conveyance occur therein, so that cleaning and maintenance of the apparatus are almost unnecessary, and production efficiency can be improved and running cost can be reduced.

Further, the carrying roller of the present invention can be used both for carrying a film during the manufacturing process of a solution film and for carrying a film during the manufacturing process of a solution coating layer. Also in the case of the coating step, various failures (film wrinkles, etc.) due to the temperature difference between the rollers can be prevented. The transport roller of the present invention has little effect even if it comes into contact with the film below the transport roller in which the liquid-phase refrigerant is accumulated. Therefore, it is necessary for the transport roller to contact the peripheral surface of the roller other than the liquid pool of the coolant to transport the film.

In the present invention, any refrigerant can be used as the refrigerant to be filled in the conveying roller as long as it vaporizes at a temperature between -5 ° C and 10 ° C and the pressure does not rise so much. The filling amount of the above-mentioned refrigerant into the conveying roller is
The refrigerant may be set such that the refrigerant repeatedly evaporates and condenses in the carrying roller, the pressure does not rise so much, and the refrigerant circulates. For example, the amount of the liquid phase refrigerant is 5 times the internal volume of the inner space of the carrying roller. -30% by volume (converting the refrigerant at 20 ° C) is preferable, and more preferably 10-20% by volume (converting the refrigerant at 20 ° C).

The refrigerant used in the present invention is preferably a liquid phase refrigerant filled with 10 to 20% by weight of the internal volume,
Examples thereof include those exhibiting a low pressure of 10 kg / cm ² or less. Furthermore, the refrigerant preferably has a boiling point of -35 ° C to 50 ° C, more preferably -10 ° C to 30 ° C. Further, the refrigerant that can be used in the present invention preferably has a large heat of vaporization, specifically, 10 kcal / kg or more (20 ° C.),
It is preferably 30 kcal / kg or more (20 ° C.). Accordingly, the temperature difference in the width direction of the transport roller can be corrected more quickly. As an example of the refrigerant used in the present invention, alternative fluorocarbons (HCFC123
Etc.), alcohols, acetone, water, ammonia, methylene chloride (CH ₂ Cl ₂ ), and the like, and mixtures thereof. The selection of the cooling medium is performed in consideration of the temperature of the film to be transported, the temperature of the drying process, the size of the transport roller, the material, and the like.

Examples of the solution of the film raw material to be cast according to the present invention include those in which the concentration of the sum of the film components and other components which become solid after drying is 18 to 35% by weight.
The film material that can be produced in the present invention includes cellulose triacetate and cellulose ester (for example,
Cellulose acetate, cellulose propionate, cellulose butyrate, cellulose acetate butyrate), polyamide, polycarbonate, polystyrene,
Examples thereof include polysulfone, polyether sulfone, polyarylate, polyphenylene oxide, polyimide, acrylic resin, and polyolefin. The solvent of the solution of the film raw material that can be used in the present invention, chlorinated hydrocarbons such as methylene chloride, acetone, ketones such as methyl ethyl ketone, aromatics such as toluene, hydrocarbons such as normal hexane, And combinations thereof. For example, when cellulose triacetate is used as a material, methylene chloride: methanol = 97: 3
A mixed solvent of 80:20 can be used, and a small amount of butanol or the like may be added if necessary.

[0026]

EXAMPLES The present invention will now be specifically described with reference to examples, but the present invention is not limited thereto. Example In this example, a specific example of a film forming apparatus using the transport roller of the present invention in the solution film forming step will be described. As shown in FIG. 3, the film forming apparatus 10 includes a casting die 4 and a drum 5 for drying the cast film 3 while cooling, a stripping roller 21 for stripping and transporting the cooled film, and a transfer roller 22. It is composed of a drying unit including a transfer roller 23 and a blower 6 for blowing warm air for drying.

In the film solution film forming method using the apparatus 10 described above, the film 3 cast on the rotating drum 5 by the casting die 4 is cooled on the drum 5. By this cooling, the film 3 is gelled and dried to some extent, and then the film 3 is peeled off from the drum 5, and is sequentially conveyed by the peeling roller 21, the transfer roller 22, and the transfer roller 23. The temperature of the film 3 immediately after being peeled off was about 0 ° C. While the film 3 is being conveyed, the blowing device 6 blows warm air 7 (about 30 ° C.) to dry the film 3. In order to peel the film 3 from the drum 5, it is achieved by drying the solvent on the drum 5 and evaporating the solvent and cooling the surface temperature of the drum 5 to a temperature below the freezing point according to the residual solvent amount of the film 3 at the peeling point. To be done. Further, it is not necessary to use all the carrying rollers of the drying section as the carrying rollers of the present invention, and it is possible to carry out only the rollers which are particularly liable to be contaminated, for example, the upstream carrying rollers having a high residual solvent ratio.

The stripping roller 21, the transition roller 22, and the transition roller 23 have cross sections as shown in FIG. 4 in detail. The transport roller 1 is composed of a hollow cylindrical outer cylinder 11 that comes into contact with the film 3 to be transported, and two disc-shaped outer cylinders 11 that are inserted into both side surfaces of the outer cylinder 11 and have a hole for inserting a shaft 12 in the center. It is composed of a side plate 13 and a shaft 12 inserted into a hole of the side plate 13. Outer cylinder 11, side plate 13 and shaft 1
2 is liquid-tightly fixed by seal welding or the like, and the inside of the conveying roller 1 is held in a sealed state.

The shafts 12 at both ends of the conveying roller 1 are rotatably supported by bearings so that the outer cylinder 11 fixed to the shaft 12 can be rotated by a frictional force with the film 3 being conveyed. It has become. The refrigerant 2 with which the inside of the conveying roller 1 is filled can be filled with, for example, a pipe located on the left side of FIG. The filling method is, for example, by degassing the inside of the roller 1, then filling the refrigerant 2 from the tip of a pipe or the like, and then sealing the inlet of the pipe or the like so that the refrigerant in the gas phase and the liquid phase can be filled and conveyed. The inside of the roller 1 can be sealed. In this example, HCFC123 (boiling point 27.5 ° C.) was used as the refrigerant.
3 types of conveying rollers, a stripping roller 21 (internal volume: 1.0 × 10 ⁴ cc), and a transfer roller 22 (internal volume:
1.9 × 10 ⁴ cc), the transfer roller 23 (internal volume: 2.
Fill 7 × 10 ⁴ cc) all with the above refrigerant. The filling amounts are 13.4% by volume, 15% by volume, and 17% by volume, respectively.

In this embodiment, the outer cylinder 11 of the conveying roller 1 is used.
As shown in FIG. 5A, a thread groove 16 is provided on the inner surface of the. The screw grooves 16 are provided in mutually opposite directions with the center of the outer cylinder 11 as a boundary, and the refrigerant 2 filled therein is provided so as to move from the center to both ends by the rotation of the conveying roller. Here, the pitch of the thread groove 16 is 1 m
m, the depth of the groove is 0.3 mm. In addition to the thread groove, the surface of the outer cylinder 11 on the inner side of the transport roller 1 is not shown in FIG.
As shown in b), the inner diameter can be gradually increased from the axial center toward both ends so that the refrigerant 2 can be moved from the center of the outer cylinder 11 toward both ends. As the material of the conveying roller 1 in this embodiment, the outer cylinder 11 is made of steel (STKM), and nickel (30 μm) and hard chrome (30 μm) are formed on the outer surface of the outer cylinder 11 of the roller 1. It is laminated in order and Teflon processing is applied on it. Thereby, the film 3 to be conveyed
Can be less likely to adhere to the surface of the transport roller 1. In addition, stainless steel (SUS30
4).

In the present embodiment, a mixed solvent of methylene chloride: methanol: butanol = 81.7: 15.2: 3.1 was used as the film raw material solution put in the casting die 4, and cellulose triacetate (cellulose) was used. Triacetate: mixed solvent = 18: 82 to 25: 7
What was melt | dissolved in the ratio of 5) was used. Using this raw material solution, a solution film-forming step of forming a film having a width 40 to 80 mm shorter than the roller length in the center of the roller was carried out by an apparatus equipped with the above-mentioned transport roller of the present invention. . Here, the film 3 peeled off from the drum 5 was 0 degreeC, and the average residual solvent ratio was 73 weight%. The temperature of both ends of the stripping roller 21 and the transition roller 22 (temperature at a position 20 mm from the film edge) was measured. The results are shown in Table-1. Table-1 Roller end temperature Central temperature Peeling roller 21 9 ° C. (both ends) 0 ° Crossing roller 22 12 ° C., 11 ° C. 0 ° C. From the results in Table 1, when the carrying roller of the present invention was used,
The temperature at the end of the used transport roller hardly increased, and the temperature difference from the center was within the allowable range. Here, the allowable range of the temperature difference in this embodiment is about 20 ° C. or less. Further, there was no film deposit on the roller surface, and there was no wrinkling of the film, and a film having good surface characteristics was obtained. Therefore, it is considered that the self-cooling action of the film is caused by the vaporization action of the residual solvent, the surface of each roller is cooled, and further the refrigerant is filled in the conveying roller, so that the temperature rise of the film end can be prevented. .

COMPARATIVE EXAMPLE 1 As Comparative Example 1, instead of the carrying rollers 21, 22 and 23 of the present invention, a carrying roller similar to that of the embodiment is used, except that the carrying rollers are not filled with a refrigerant. Then, cooling air (temperature -5 ° C) was blown to the roller end portion.
Other than this, the film forming process was performed in the same manner as in the above-described example. At that time, the temperatures of both ends of the stripping roller 21 and the transition roller 22 (temperature at a position 20 mm from the film edge) were measured. The results are shown in Table-2. Table-2 Roller end temperature Central part temperature Stripping roller 21 9 ° C, 10 ° C 0 ° C Transition roller 22 12 ° C, 13 ° C 0 ° C From the results of Table-2, even when the conveyance roller of Comparative Example 1 is used, The temperature of the end of the conveying roller hardly increased, and there was almost no difference in temperature from the center. Further, there was no film deposit on the roller surface, and there was no wrinkling of the film, and a film having good surface characteristics was obtained. However, since the transport roller of Comparative Example 1 is provided with the cooling air blowing means for cooling, the manufacturing cost of the device was high.

Comparative Example 2 As Comparative Example 2, the same apparatus as in the above-mentioned embodiment except that the above-mentioned conveying roller was not filled with the refrigerant in the above-mentioned embodiment,
A film forming process was performed. At that time, the temperatures of both ends of the stripping roller 21 and the transition roller 22 (temperature at a position 20 mm from the film edge) were measured. The results are shown in Table-3. Table-3 Roller end temperature Central temperature Peeling roller 21 26 ° C, 24 ° C 0 ° C Rolling roller 22 21 ° C, 24 ° C 0 ° C From the results of Table-3, compared with the results of the examples of Table-1, respectively. The temperature at the roller edge increased and a considerable difference in temperature from the temperature at the center occurred. Further, the roller is contaminated with stains, which gradually grows to cause a flaw on the formed film. Therefore, unless a means for cooling the end portion of the roller is provided, the temperature of the end portion rises and a film surface failure occurs.

In the above embodiment, the film solution is cast on the cooled drum in the solution film-forming step to be cooled, the film is peeled from the drum, and then dried under heating. The present invention can also be used in the same film forming step, in which the film solution is cast on a heated drum and dried, and the film is peeled from the drum and then dried. By using this method, it is possible to prevent failures such as film adhesion. Furthermore, the present invention can be used for film transport during the manufacturing process of the solution coating layer for coating the coating solution on the substrate. As a result, various failures due to the temperature difference in the width direction of the transport roller can be prevented.

[0035]

According to the present invention, in the conveying roller for drying while conveying the film, the temperature difference in the width direction of the roller during the conveyance of the film can be made uniform, so that the conveying of the film end portion is possible. It is possible to prevent film quality troubles such as adhesion to rollers and transport troubles, and because of its relatively simple structure, the initial cost can be made low, and maintenance operations during film production are not necessary, so running A film transport roller and a film transport device that can be manufactured at low cost can be provided.

[Brief description of drawings]

FIG. 1 is a schematic view showing the action of a film transport roller of the present invention.

FIG. 2 is a schematic view showing the action of the film transport roller of the present invention.

FIG. 3 is a diagram showing one embodiment of a film forming apparatus of the present invention.

FIG. 4 is a cross-sectional view showing an aspect of a film transport roller of the present invention.

FIG. 5 is a sectional view of an outer cylinder of the film transport roller of the present invention.

[Explanation of symbols]

1 Film transport roller 1a Roller end 1b Roller central part 2 refrigerant 2a Gas-phase refrigerant 2b Liquid phase refrigerant 3 film 4 casting die 5 drums 6 blower 7 warm air 10 Film forming equipment 11 outer cylinder 12 axes 13 Side plate 16 screw groove 21 Peeling roller 22 Crossing roller 23 Crossing roller

Continuation of the front page (56) Reference JP-A-5-185443 (JP, A) JP-A-50-142459 (JP, A) JP-A-61-257231 (JP, A) Actual development Sho-58-162342 (JP , U) Japanese Patent Publication Sho 49-10341 (JP, B1) (58) Fields investigated (Int.Cl. ⁷ , DB name) B29C 41/00-41/52 B29C 47/00-47/96 F16C 13/00 -15/00

Claims (4)

(57) [Claims] 1. A film transport roller for transporting a film formed by casting a raw material solution on a substrate while peeling it from the substrate and drying the film. A film conveying roller, which is filled with a liquid phase refrigerant and a liquid phase refrigerant, and is provided with a groove running in the rotation direction over the entire length on the inner surface. 2. The groove running in the rotation direction , which is provided on the inner surface of the hollow cylindrical conveying roller, is a thread groove that is different in direction from the center in the axial direction of the conveying roller. Item 1. The film transport roller according to Item 1. 3. The film conveying roller according to claim 1, wherein the inner diameter of the hollow cylindrical conveying roller is gradually increased from the center of the conveying roller axial direction toward both ends. 4. A casting means for casting a raw material solution on a cooled substrate, a peeling means for peeling a film formed on the substrate from the substrate, and a conveying means for conveying the peeled film while drying. In a film forming apparatus equipped with
At least one of the transfer rollers arranged in the vicinity of the peeling means of the transfer means fills the inside of the sealed hollow cylindrical transfer roller with the refrigerants in the gas phase and the liquid phase, and the inner surface of the transfer roller in the rotation direction over the entire length. A film forming apparatus, which is a conveying roller provided with running grooves.