JP3458460B2 - Flow measurement device - Google Patents

Flow measurement device

Info

Publication number
JP3458460B2
JP3458460B2 JP15352494A JP15352494A JP3458460B2 JP 3458460 B2 JP3458460 B2 JP 3458460B2 JP 15352494 A JP15352494 A JP 15352494A JP 15352494 A JP15352494 A JP 15352494A JP 3458460 B2 JP3458460 B2 JP 3458460B2
Authority
JP
Japan
Prior art keywords
movable body
flow rate
signal
detecting means
vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP15352494A
Other languages
Japanese (ja)
Other versions
JPH0814975A (en
Inventor
行夫 長岡
基之 名和
謙三 黄地
博 藤枝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP15352494A priority Critical patent/JP3458460B2/en
Publication of JPH0814975A publication Critical patent/JPH0814975A/en
Application granted granted Critical
Publication of JP3458460B2 publication Critical patent/JP3458460B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、超音波を利用してガス
などの流量を計測する流量計測装置に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flow rate measuring device for measuring the flow rate of gas or the like using ultrasonic waves.

【0002】[0002]

【従来の技術】従来のこの種の流量計測装置は、図9
(例えば特開平4−328424号公報)に示すよう
に、流体管路1の一部に超音波振動子2と3を流れの方
向に相対して設け、振動子1から流れ方向に超音波を発
生し振動子2に達するまでの時間と、逆に振動子2から
流れに逆らって超音波を発生し振動子1に達するまでの
時間の差から流体の速度を求め、通過断面積に応じた補
正計数を乗じて流量を演算していた。
2. Description of the Related Art A conventional flow rate measuring device of this type is shown in FIG.
As shown in, for example, Japanese Patent Laid-Open No. 4-328424, ultrasonic transducers 2 and 3 are provided in a part of the fluid conduit 1 so as to face each other in the flow direction, and ultrasonic waves are transmitted from the transducer 1 in the flow direction. The velocity of the fluid was obtained from the difference between the time required to reach the oscillator 2 and the time required to generate the ultrasonic wave against the flow from the oscillator 2 and reach the oscillator 1, and determined the velocity of the fluid according to the cross-sectional area of passage. The flow rate was calculated by multiplying the correction factor.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、上記従
来の流量計測装置では音速(気体では340m/秒)に
対して流速が小さい場合、例えば0.1m/秒以下の流
速では時間差が極めて小さくなるので測定精度を高くす
ることができない。このため流路口径を小さくしたり振
動子間の距離を長くすることが考えられるが振動子の大
きさや発生パワーの増大あるいは圧力損失の点から実用
が困難であった。
However, in the above-mentioned conventional flow rate measuring device, when the flow velocity is small with respect to the sonic velocity (340 m / sec for gas), for example, the time difference becomes extremely small when the flow velocity is 0.1 m / sec or less. Measurement accuracy cannot be increased. For this reason, it may be possible to reduce the diameter of the flow path or increase the distance between the vibrators, but it was difficult to put into practical use in terms of the size of the vibrator, the increase in generated power, and the pressure loss.

【0004】本発明は上記課題を解決するもので、低流
量を精度よく計測することを目的としている。
The present invention is intended to solve the above problems and has an object to measure a low flow rate with high accuracy.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するため
に本発明の流量計測装置は、以下の構成とした。
In order to achieve the above object, the flow rate measuring device of the present invention has the following configuration.

【0006】流速に応じて流体の開口部が変化する可動
体と、前記可動体の位置を検出する可動体位置検出手段
と、前記可動体に設けられた第1振動子と、前記第1振
動子と信号を授受する第2振動子と、前記2つの振動子
間の相互の信号伝達時間差に基づく信号を演算する計時
手段と、前記可動体位置検出手段と前記計時手段の信号
より流量を求める流量演算手段とを備えたものである。
A movable body whose fluid opening changes according to the flow velocity, movable body position detecting means for detecting the position of the movable body, a first vibrator provided on the movable body, and the first vibration. A second oscillator that sends and receives a signal to and from a child, a timer that calculates a signal based on a signal transmission time difference between the two oscillators, and a flow rate is obtained from the signals of the movable body position detector and the timer. And a flow rate calculating means.

【0007】また流速に応じて流体の開口部が変化する
可動体と、流体の温度を検出する温度検出手段と、前記
可動体に設けられた第1振動子と、前記第1振動子と信
号を授受する第2振動子と、前記2つの振動子間の相互
の信号伝達時間差に基づく信号を演算する計時手段と、
前記振動子間の相互の信号伝達時間の平均値と前記温度
検出手段の信号から前記可動体の位置を求める可動体位
置検出手段と、前記可動体位置検出手段と前記計時手段
の信号より流量を求める流量演算手段とを備えたもので
ある。
Further, a movable body in which the opening of the fluid changes according to the flow velocity, a temperature detecting means for detecting the temperature of the fluid, a first vibrator provided on the movable body, the first vibrator and a signal A second vibrator for transmitting and receiving the signal, and a clocking means for calculating a signal based on a mutual signal transmission time difference between the two vibrators,
The movable body position detecting means for obtaining the position of the movable body from the average value of the mutual signal transmission time between the oscillators and the signal of the temperature detecting means, and the flow rate from the signals of the movable body position detecting means and the clocking means. It is provided with a flow rate calculating means for obtaining.

【0008】また流速に応じて流体の開口部が変化する
可動体と、前記可動体の上流と下流にそれぞれ設けられ
た第1振動子および第2振動子と、前記振動子間の相互
の信号伝達時間差に基づく信号を演算する計時手段と、
前記振動子間の相互の信号伝達時間の平均値から前記可
動体の変位量を求める可動体位置検出手段と、前記可動
体位置検出手段と前記計時手段の信号より流量を求める
流量演算手段とを備えたものである。
[0008] a first transducer and second transducer opening of the fluid is respectively provided with a movable member that changes, upstream and downstream of the previous SL movable member in response to flow rate, the cross between the transducers Time measuring means for calculating a signal based on a signal transmission time difference,
A movable body position detecting means for obtaining a displacement amount of the movable body from an average value of mutual signal transmission times between the vibrators; and a flow rate calculating means for obtaining a flow rate from signals of the movable body position detecting means and the time measuring means. Be prepared.

【0009】また流速に応じて流体の開口部が変化する
可動体と、前記可動体の位置を検出する可動体位置検出
手段と、前記可動体に設けられた第1振動子および第2
振動子と、前記2つの振動子間の相互の信号伝達時間差
に基づく信号を演算する計時手段と、前記可動体位置検
出手段と前記計時手段の信号より流量を求める流量演算
手段とを備えたものである。
A movable body whose fluid opening changes according to the flow velocity, a movable body position detecting means for detecting the position of the movable body, a first vibrator and a second oscillator provided on the movable body.
A vibrator, a timer for calculating a signal based on a signal transmission time difference between the two vibrators, a flow rate calculator for obtaining a flow rate from the movable body position detector, and the signal from the timer. Is.

【0010】また流速に応じて流体の開口部が変化する
可動体と、前記可動体の位置を検出する可動体位置検出
手段と、流路中に超音波を発生する第1振動子および第
2振動子と、前記2つの振動子間の相互の信号伝達時間
差に基づく信号を演算する計時手段と、前記可動体位置
検出手段と前記計時手段の信号より流量を求める流量演
算手段とを備えたものである。
Further, a movable body in which the opening of the fluid changes according to the flow velocity, a movable body position detecting means for detecting the position of the movable body, a first oscillator and a second oscillator for generating ultrasonic waves in the flow path. A vibrator, a timer for calculating a signal based on a signal transmission time difference between the two vibrators, a flow rate calculator for obtaining a flow rate from the movable body position detector, and the signal from the timer. Is.

【0011】また可動体は、流体の圧力差によって自動
的に移動あるいは電気的駆動手段によって移動し、振動
子の動作中にはその位置を保持するものである。
The movable body is automatically moved by the pressure difference of the fluid or moved by an electric driving means, and holds its position during the operation of the vibrator.

【0012】また可動体は、あらかじめ設定された位置
に段階的に移動するものである。
Further, the movable body moves in a stepwise manner to a preset position.

【0013】[0013]

【作用】本発明は上記構成によって、可動体によって流
路面積を可変させ、その流路の流速を超音波の流れに対
する伝達時間の差から演算し、可動体の位置と流速から
流量を求めるものである。
According to the present invention, the flow passage area is varied by the movable body, the flow velocity of the flow passage is calculated from the difference of the transmission time with respect to the flow of ultrasonic waves, and the flow rate is obtained from the position of the movable body and the flow velocity. Is.

【0014】[0014]

【実施例】以下、本発明の第1の実施例を図面にもとづ
いて説明する。図1において、流体管路4の途中に可動
体5を回転自在になるように取り付け、可動体5にはそ
の位置を検出する角度検出器のような可動体位置検出手
段6が設けられている。また可動体5には超音波を発生
または受信する振動子7が固定され、この振動子7に相
対する振動子8は管路4に取り付けられている。振動子
7から発生する超音波は振動子8で受信され、また振動
子8から発信する超音波は振動子7で受信される。この
発振と受信の切り換えは切換手段9で行なう。すなわち
コントローラ10の制御信号により超音波発生手段11
によって振動子8から超音波が発生し、この超音波を振
動子7で受信し、受信増幅手段12を介しコントローラ
10に到達するまでの時間を計時手段13で計測する。
しかる後、切換手段により振動子7と8の発信受信を逆
に接続し、今度は振動子7から振動子8に向かって超音
波を発信し前述と同様に到達時間を求め、流量演算手段
14で流量値を演算する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described below with reference to the drawings. In FIG. 1, a movable body 5 is rotatably attached in the middle of a fluid conduit 4, and the movable body 5 is provided with movable body position detecting means 6 such as an angle detector for detecting the position thereof. . A vibrator 7 for generating or receiving ultrasonic waves is fixed to the movable body 5, and a vibrator 8 facing the vibrator 7 is attached to the conduit 4. The ultrasonic wave generated from the vibrator 7 is received by the vibrator 8, and the ultrasonic wave transmitted from the vibrator 8 is received by the vibrator 7. Switching between oscillation and reception is performed by the switching means 9. That is, the ultrasonic wave generation means 11 is generated by the control signal of the controller 10.
Then, an ultrasonic wave is generated from the vibrator 8, the ultrasonic wave is received by the vibrator 7, and the time required to reach the controller 10 via the reception amplification means 12 is measured by the time measuring means 13.
After that, the transmission and reception of the vibrators 7 and 8 are reversely connected by the switching means, this time ultrasonic waves are transmitted from the vibrator 7 to the vibrator 8, the arrival time is obtained in the same manner as described above, and the flow rate calculation means 14 Calculate the flow rate value with.

【0015】静止流体中の音をc、流体の流れの速さを
vとすると、流れの順方向のの超音波の伝搬速度は(c
+v)、逆方向の伝搬速度は(c−v)となる。振動子
7と8の間の距離をL、超音波伝幡軸と管路の中心軸と
がなす角度をφとすると、順方向と逆方向にそれぞれ超
音波が到達する時間t1とt2は、 t1=L/(c+vCOSφ) (1) t2=L/(c−vCOSφ) (2) となり、(1)、(2)式より v=L/2COSφ(1/t1−1/t2) (3) となり、Lとφが既知ならt1とt2を測定すれば流速
vが求められる。
When the sound in the stationary fluid is c and the velocity of the fluid flow is v, the propagation velocity of the ultrasonic wave in the forward direction of the flow is (c
+ V), and the propagation velocity in the opposite direction is (cv). Assuming that the distance between the transducers 7 and 8 is L and the angle formed by the ultrasonic wave propagation axis and the central axis of the conduit is φ, the times t1 and t2 at which the ultrasonic waves reach the forward direction and the reverse direction, respectively, are t1 = L / (c + vCOSφ) (1) t2 = L / (c-vCOSφ) (2), and from equations (1) and (2), v = L / 2COSφ (1 / t1-1 / t2) (3) If L and φ are known, the flow velocity v can be obtained by measuring t1 and t2.

【0016】この流速より流量Qは、通過面積をS、補
正計数をKとすれば、 Q=KSv (4) となる。
From this flow velocity, the flow rate Q becomes Q = KSv (4), where S is the passage area and K is the correction count.

【0017】このt1とt2を計時手段13で求め、管
路4の流路断面積や管内流速分布を考慮して流量演算手
段14で流量を演算する。流速が小さい場合には時間t
1、t2との差は非常に小さいので複数回の発信と受信
を繰り返しその積分値で信号処理する。
These t1 and t2 are obtained by the time measuring means 13, and the flow rate calculating means 14 calculates the flow rate in consideration of the flow passage cross-sectional area of the pipe 4 and the flow velocity distribution in the pipe. When the flow velocity is small, time t
Since the difference between 1 and t2 is very small, transmission and reception are repeated a plurality of times to perform signal processing with the integrated value.

【0018】次にその動作について述べる。流速が小さ
いとき可動体5は自重で図の下の方に位置しているので
図2に示すように流体の通過面積は小さい。流速測定は
前述のように振動子7から振動子8までの超音波の伝達
時間と振動子8から振動子7までの伝達時間をそれぞれ
計測しその伝達時間の差を求めるとともに、可動体位置
検出手段6によって可動体5の位置を検出しL、φおよ
びSを求め(4)式により流量演算手段14で流量を求
める。流速が大きくなると可動体5は流れの力によって
破線5’のように上方に移動し流路面積は大きくなる。
このときの可動体5の位置を可動体位置検出手段6によ
って検出し、移動した状態でのL、φおよびSを求め流
量を演算する。
Next, the operation will be described. When the flow velocity is low, the movable body 5 is located at the bottom of the figure due to its own weight, so that the fluid passage area is small as shown in FIG. As described above, the flow velocity is measured by measuring the transmission time of the ultrasonic wave from the transducer 7 to the transducer 8 and the transmission time from the transducer 8 to the transducer 7, obtaining the difference between the transmission times, and detecting the movable body position. The position of the movable body 5 is detected by the means 6 and L, φ and S are calculated, and the flow rate is calculated by the flow rate calculation means 14 by the equation (4). When the flow velocity increases, the movable body 5 moves upward due to the force of the flow as shown by the broken line 5 ', and the flow passage area increases.
The position of the movable body 5 at this time is detected by the movable body position detecting means 6, and L, φ and S in the moved state are obtained and the flow rate is calculated.

【0019】可動体位置検出手段6は必ずしも図2に示
す角度検出器のような特別な検出手段を付加しなくて
も、図3の本発明の第2の実施例に示すように超音波の
演算によっても可能である。すなわち(1)式と(2)
式からt1とt2の平均値を求めると (t1+t2)/2=L(c−vCOSφ) (5) となり、c>>vCOSφであるからLが求めることがで
き、あらかじめLに対するφの関係を求めておけば流速
を演算することができる。流体の温度が大きく変わるよ
うな環境においては図1に示すように温度検出手段15
を管路の途中の流れを乱さない位置に設けて音速の補正
をすればさらに精度を向上させることができる。
The movable body position detecting means 6 does not necessarily need to be provided with any special detecting means such as the angle detector shown in FIG. 2, but as shown in the second embodiment of the present invention in FIG. It is also possible by calculation. That is, equation (1) and equation (2)
When the average value of t1 and t2 is calculated from the formula, it becomes (t1 + t2) / 2 = L (c−vCOSφ) (5). Since c >> vCOSφ, L can be calculated, and the relation of φ to L is calculated in advance. The flow velocity can be calculated if this is done. In an environment where the temperature of the fluid changes significantly, as shown in FIG.
The accuracy can be further improved by providing a position at which the flow is not disturbed in the middle of the pipeline to correct the sound velocity.

【0020】図4は本発明の第3の実施例であり、可動
体位置検出手段(図示せず)を有する可動体5の上流と
下流に固定の振動子7と8があって、可動体5によって
流速に応じて流路の通過面積を変え、その通過部の流速
を前述と同様に超音波で計測するものである。この場合
振動子7、8の距離は一定であるから伝達時間の平均値
から式(5)より音速を算出することができ、音速より
流体の温度が求められるので温度補正が容易になる。可
動体5の移動にともなって流路面積は変化するので当然
式(4)の面積の項は変更する必要があるが、さらに流
速分布も変化するので補正計数も可動体5の移動に応じ
て変更することが望ましい。
FIG. 4 shows a third embodiment of the present invention in which fixed oscillators 7 and 8 are provided upstream and downstream of a movable body 5 having movable body position detecting means (not shown). 5, the passage area of the flow passage is changed according to the flow velocity, and the flow velocity at the passage portion is measured by ultrasonic waves as described above. In this case, since the distance between the vibrators 7 and 8 is constant, the sound velocity can be calculated from the average value of the transmission time by the equation (5), and the temperature of the fluid can be obtained from the sound velocity, so that the temperature correction becomes easy. Since the flow path area changes with the movement of the movable body 5, it is necessary to change the area term of the equation (4), but the flow velocity distribution also changes, so that the correction count also depends on the movement of the movable body 5. It is desirable to change.

【0021】図5、図6は本発明の第4の実施例であ
り、可動体位置検出手段6を有する可動体5上に摺動体
16が上端点16aを支点にして取り付けられており、
この摺動体16上に振動子7、8が固定されている。流
体は図6に示すように摺動体16の周辺を通過し流速に
応じて可動体5が移動すると摺動体16の上端点16a
はそれにつれて移動し、下端点16bは管路4上を摺動
するので流路の面積は変化する。この場合も振動子7、
8の距離は変わらないが流路の面積と流速分布は変化す
るので補正する必要がある。
FIGS. 5 and 6 show a fourth embodiment of the present invention, in which a sliding body 16 is mounted on a movable body 5 having a movable body position detecting means 6 with an upper end point 16a as a fulcrum.
The vibrators 7 and 8 are fixed on the sliding body 16. The fluid passes around the sliding body 16 as shown in FIG. 6, and when the movable body 5 moves in accordance with the flow velocity, the upper end point 16a of the sliding body 16a.
Moves along with it, and the lower end point 16b slides on the conduit 4 so that the area of the flow path changes. In this case as well, the oscillator 7,
Although the distance of 8 does not change, the area of the flow path and the flow velocity distribution change, so it is necessary to correct it.

【0022】可動体5は流体の力ばかりでなく、図7に
示すように電気的駆動手段17で行わせればより確実な
動作が保証される。この電気的駆動手段はステップモー
タのように位置が容易に識別できるものでは特別な可動
体位置検出手段は必要でない。
In addition to the force of the fluid, the movable body 5 is guaranteed to operate more reliably if it is driven by the electric drive means 17 as shown in FIG. This electric drive means, like a step motor, whose position can be easily identified does not require any special movable body position detection means.

【0023】また可動体5は振動子7、8の動作中に位
置が変わると計時手段の演算が正しく行われないので、
その位置を保持する方が望ましい。このため前述のよう
に電気的駆動手段17で保持するか、あるいは位置検出
手段に磁石を用いてその吸着力を利用することができ
る。図8に示すように磁石18を円周状にいくつか設け
ていれば可動体5の位置もディジタル的に変化する。
If the position of the movable body 5 changes during the operation of the vibrators 7 and 8, the calculation of the time measuring means will not be performed correctly.
It is better to hold that position. Therefore, it can be held by the electric driving means 17 as described above, or the attraction force can be utilized by using a magnet for the position detecting means. As shown in FIG. 8, if several magnets 18 are provided circumferentially, the position of the movable body 5 also changes digitally.

【0024】[0024]

【発明の効果】以上の説明から明らかのように本発明の
流量計測装置によれば次の効果が得られる。
As is apparent from the above description, the following effects can be obtained by the flow rate measuring device of the present invention.

【0025】(1)流速に応じて流体の開口部が変化す
る可動体と、前記可動体の位置を検出する可動体位置検
出手段と、前記可動体に設けられた第1振動子と、前記
第1振動子と信号を授受する第2振動子と、前記2つの
振動子間の相互の信号伝達時間差に基づく信号を演算す
る計時手段と、前記可動体位置検出手段と前記計時手段
の信号より流量を求める流量演算手段とを備えたので、
小流量の場合開口部が小さくなって流速が比較的大きく
なり流量の検出精度が向上し、大流量の場合には開口部
が大きくなって流速が比較的大きくならず、大きな測定
範囲の得ることができ最大圧力損失が小さい。また可動
体位置検出手段の信号に応じて流量を演算しているので
可動体の動作精度に影響されず正確な流量を測定でき
る。
(1) A movable body whose fluid opening changes according to the flow velocity, movable body position detection means for detecting the position of the movable body, a first vibrator provided on the movable body, and A second oscillator that transmits and receives a signal to and from the first oscillator, a clocking unit that calculates a signal based on a signal transmission time difference between the two oscillators, and a signal from the movable body position detecting unit and the clocking unit. Since it was equipped with a flow rate calculation means for obtaining the flow rate,
When the flow rate is small, the opening is small and the flow velocity is relatively large, so the flow rate detection accuracy is improved.When the flow rate is large, the opening is large and the flow velocity is not relatively large, and a large measurement range can be obtained. The maximum pressure loss is small. Further, since the flow rate is calculated according to the signal from the movable body position detecting means, the accurate flow rate can be measured without being affected by the operation accuracy of the movable body.

【0026】(2)流速に応じて流体の開口部が変化す
る可動体と、流体の温度を検出する温度検出手段と、前
記可動体に設けられた第1振動子と、前記第1振動子と
信号を授受する第2振動子と、前記2つの振動子間の相
互の信号伝達時間差に基づく信号を演算する計時手段
と、前記振動子間の相互の信号伝達時間の平均値と前記
温度検出手段の信号から前記可動体の位置を求める可動
体位置検出手段と、前記可動体位置検出手段と前記計時
手段の信号より流量を求める流量演算手段とを備えたの
で、振動子間の距離が変化しても超音波伝達時間の演算
により自動的に距離を算出するので距離を測定する特別
の装置を必要とせず安価にかつ小型に構成できる。
(2) Movable body whose fluid opening changes according to the flow velocity, temperature detecting means for detecting the temperature of the fluid, a first vibrator provided on the movable body, and the first vibrator. A second oscillator for transmitting and receiving a signal, a time measuring means for calculating a signal based on a mutual signal transmission time difference between the two oscillators, an average value of mutual signal transmission times between the oscillators, and the temperature detection. Since the movable body position detecting means for obtaining the position of the movable body from the signal of the means, and the flow rate calculating means for obtaining the flow rate from the signal of the movable body position detecting means and the timing means are provided, the distance between the transducers changes. However, since the distance is automatically calculated by the calculation of the ultrasonic wave transmission time, a special device for measuring the distance is not required, and the device can be constructed inexpensively and in a small size.

【0027】(3)流速に応じて流体の開口部が変化す
る可動体と、前記可動体の上流と下流にそれぞれ設けら
れた第1振動子および第2振動子と、前記振動子間の相
互の信号伝達時間差に基づく信号を演算する計時手段
と、前記振動子間の相互の信号伝達時間の平均値から前
記可動体の変位量を求める可動体位置検出手段と、前記
可動体位置検出手段と前記計時手段の信号より流量を求
める流量演算手段とを備えたので、小流量の場合開口部
が小さくなって流速が比較的大きくなり流量の検出精度
が向上し、大流量の場合には開口部が大きくなって流速
が比較的大きくならないので、大きな測定範囲を得るこ
とができ最大圧力損失が小さい。また可動体位置検出手
段の信号に応じて流量を演算しているので、可動体の動
作精度に影響されず正確な流量を測定でき、また振動子
の位置が固定であるので信頼性が高い。
[0027] (3) a first transducer and second transducer opening of the fluid is respectively provided with a movable member that changes, upstream and downstream of the previous SL movable member in response to flow rate, between the transducers A clocking means for calculating a signal based on a mutual signal transmission time difference, a movable body position detecting means for obtaining a displacement amount of the movable body from an average value of mutual signal transmission times between the vibrators, and the movable body position detecting means. And the flow rate calculating means for obtaining the flow rate from the signal of the time measuring means, the opening is small for a small flow rate and the flow velocity is relatively large to improve the flow rate detection accuracy. Since the portion does not become large and the flow velocity does not become relatively large, a large measurement range can be obtained and the maximum pressure loss is small. Further, since the flow rate is calculated according to the signal of the movable body position detecting means, the accurate flow rate can be measured without being influenced by the operation accuracy of the movable body, and the position of the vibrator is fixed, so that the reliability is high.

【0028】(4)流速に応じて流体の開口部が変化す
る可動体と、前記可動体の位置を検出する可動体位置検
出手段と、前記可動体に設けられた第1振動子および第
2振動子と、前記2つの振動子間の相互の信号伝達時間
差に基づく信号を演算する計時手段と、前記可動体位置
検出手段と前記計時手段の信号より流量を求める流量演
算手段とを備えたので、小流量の場合開口部が小さくな
って流速が比較的大きくなり流量の検出精度が向上し、
大流量の場合には開口部が大きくなって流速が比較的大
きくならず、大きな測定範囲を得ることができ最大圧力
損失が小さい。また可動体位置検出手段の信号に応じて
流量を演算しているので可動体の動作精度に影響され
ず、また開口部に応じて振動子が移動するので開口部全
域を超音波が操作できるので正確な流量を測定できる。
(4) Movable body in which the opening of the fluid changes according to the flow velocity, movable body position detecting means for detecting the position of the movable body, first oscillator and second oscillator provided on the movable body. Since the vibrator is provided with a time measuring means for calculating a signal based on a mutual signal transmission time difference between the two vibrators, a flow rate calculating means for calculating a flow rate from the movable body position detecting means and the signal of the time measuring means. When the flow rate is small, the opening becomes smaller and the flow velocity becomes relatively high, improving the flow rate detection accuracy.
When the flow rate is large, the opening becomes large and the flow velocity does not become relatively large, so that a large measurement range can be obtained and the maximum pressure loss is small. Further, since the flow rate is calculated in accordance with the signal of the movable body position detecting means, the operation accuracy of the movable body is not affected, and since the transducer moves in accordance with the opening, ultrasonic waves can be operated throughout the opening. Accurate flow rate can be measured.

【0029】(5)流速に応じて流体の開口部が変化す
る可動体と、前記可動体の位置を検出する可動体位置検
出手段と、流路中に超音波を発生する第1振動子および
第2振動子と、前記2つの振動子間の相互の信号伝達時
間差に基づく信号を演算する計時手段と、前記可動体位
置検出手段と前記計時手段の信号より流量を求める流量
演算手段とを備えたので、小流量の場合開口部が小さく
なって流速が比較的大きくなり流量の検出精度が向上
し、大流量の場合には開口部が大きくなって流速が比較
的大きくならないので、大きな測定範囲を得ることがで
き最大圧力損失が小さい。また可動体位置検出手段の信
号に応じて流量を演算しているので可動体の動作精度に
影響されず正確な計測ができる。
(5) Movable body whose fluid opening changes according to flow velocity, movable body position detecting means for detecting the position of the movable body, first oscillator for generating ultrasonic waves in the flow path, and A second oscillator; a timer for calculating a signal based on a signal transmission time difference between the two oscillators; and a flow rate calculator for obtaining a flow rate from the movable body position detector and the signal from the timer. Therefore, when the flow rate is small, the opening is small and the flow velocity is relatively large, so the flow rate detection accuracy is improved.When the flow rate is large, the opening is not large and the flow velocity is not relatively large. The maximum pressure loss can be small. Further, since the flow rate is calculated according to the signal from the movable body position detecting means, accurate measurement can be performed without being affected by the operation accuracy of the movable body.

【0030】(6)可動体は、流体の圧力差によって自
動的に移動するので、安価に製作することができる。
(6) Since the movable body automatically moves according to the pressure difference of the fluid, it can be manufactured at low cost.

【0031】(7)可動体は、電気的駆動手段によって
移動するので動作を確実にすることができる。
(7) Since the movable body is moved by the electric drive means, the operation can be ensured.

【0032】(8)振動子の動作中には可動体の位置を
保持するので、計測の誤差が小さくできる。
(8) Since the position of the movable body is held during the operation of the vibrator, the measurement error can be reduced.

【0033】(9)可動体は、あらかじめ設定された位
置に段階的に移動するので、位置検出がディジタルで行
え、演算処理を速くすることができる。
(9) Since the movable body moves stepwise to a preset position, position detection can be performed digitally, and the arithmetic processing can be speeded up.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1の実施例の流量計測装置の構成図FIG. 1 is a configuration diagram of a flow rate measuring device according to a first embodiment of the present invention.

【図2】同装置の可動体の側面図FIG. 2 is a side view of a movable body of the device.

【図3】本発明の第2の実施例の流量計測装置の構成図FIG. 3 is a configuration diagram of a flow rate measuring device according to a second embodiment of the present invention.

【図4】本発明の第3の実施例の流量計測装置の部分構
成図
FIG. 4 is a partial configuration diagram of a flow rate measuring device according to a third embodiment of the present invention.

【図5】本発明の第4の実施例の流量計測装置の部分構
成図
FIG. 5 is a partial configuration diagram of a flow rate measuring device according to a fourth embodiment of the present invention.

【図6】同装置の可動体の側面図FIG. 6 is a side view of a movable body of the device.

【図7】本発明の第5の実施例の可動体の側面図FIG. 7 is a side view of a movable body according to a fifth embodiment of the present invention.

【図8】本発明の第6の実施例の可動体位置検出手段の
構成図
FIG. 8 is a configuration diagram of a movable body position detecting means according to a sixth embodiment of the present invention.

【図9】従来の流量計測装置の構成図FIG. 9 is a block diagram of a conventional flow rate measuring device.

【符号の説明】[Explanation of symbols]

5 可動体 6 可動体位置検出手段 7 第1振動子 8 第2振動子 13 計時手段 14 流量演算手段 15 温度検出手段 16 電気的駆動手段 5 movable body 6 Movable body position detection means 7 First transducer 8 Second oscillator 13 Timekeeping means 14 Flow rate calculation means 15 Temperature detection means 16 Electric drive means

───────────────────────────────────────────────────── フロントページの続き (72)発明者 藤枝 博 大阪府門真市大字門真1006番地 松下電 器産業株式会社内 (56)参考文献 特開 昭53−95667(JP,A) 実開 昭63−72519(JP,U) (58)調査した分野(Int.Cl.7,DB名) G01F 1/00 - 9/02 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hiroshi Fujieda 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (56) References JP-A-53-95667 (JP, A) 72519 (JP, U) (58) Fields surveyed (Int.Cl. 7 , DB name) G01F 1/00-9/02

Claims (9)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】流速に応じて流体の開口部が変化する可動
体と、前記可動体の位置を検出する可動体位置検出手段
と、前記可動体に設けられた第1振動子と、前記第1振
動子と信号を授受する第2振動子と、前記2つの振動子
間の相互の信号伝達時間差に基づく信号を演算する計時
手段と、前記可動体位置検出手段と前記計時手段の信号
より流量を求める流量演算手段とを備えた流量計測装
置。
1. A movable body in which an opening of a fluid changes according to a flow velocity, movable body position detecting means for detecting a position of the movable body, a first vibrator provided on the movable body, and the first vibrator. A second oscillator that sends and receives a signal to and from one oscillator, a timer that calculates a signal based on a signal transmission time difference between the two oscillators, and a flow rate based on the signals of the movable body position detector and the timer. A flow rate measuring device comprising:
【請求項2】流速に応じて流体の開口部が変化する可動
体と、流体の温度を検出する温度検出手段と、前記可動
体に設けられた第1振動子と、前記第1振動子と信号を
授受する第2振動子と、前記2つの振動子間の相互の信
号伝達時間差に基づく信号を演算する計時手段と、前記
振動子間の相互の信号伝達時間の平均値と前記温度検出
手段の信号から前記可動体の位置を求める可動体位置検
出手段と、前記可動体位置検出手段と前記計時手段の信
号より流量を求める流量演算手段とを備えた流量計測装
置。
2. A movable body in which an opening of a fluid changes according to a flow velocity, a temperature detecting means for detecting a temperature of the fluid, a first vibrator provided on the movable body, and the first vibrator. A second oscillator that transmits and receives a signal, a time measuring unit that calculates a signal based on a mutual signal transmission time difference between the two oscillators, an average value of mutual signal transmission times between the oscillators, and the temperature detection unit. A flow rate measuring device comprising a movable body position detecting means for obtaining the position of the movable body from the signal, and a flow rate calculating means for obtaining a flow rate from the signal of the movable body position detecting means and the time measuring means.
【請求項3】 流速に応じて流体の開口部が変化する可
動体と、前記可動体の上流と下流にそれぞれ設けられた
第1振動子および第2振動子と、前記振動子間の相互の
信号伝達時間差に基づく信号を演算する計時手段と、前
記振動子間の相互の信号伝達時間の平均値から前記可動
体の変位量を求める可動体位置検出手段と、前記可動体
位置検出手段と前記計時手段の信号より流量を求める流
量演算手段とを備えた流量計測装置。
A movable body opening of the fluid is changed in accordance with claim 3] flow rate, the first oscillator and the second oscillator respectively provided upstream and downstream of the previous SL movable member, mutual between the transducers And a movable body position detecting means for obtaining a displacement amount of the movable body from an average value of mutual signal transmission times between the vibrators, and a movable body position detecting means. A flow rate measuring device comprising a flow rate calculating means for obtaining a flow rate from a signal of the time measuring means.
【請求項4】流速に応じて流体の開口部が変化する可動
体と、前記可動体の位置を検出する可動体位置検出手段
と、前記可動体に設けられた第1振動子および第2振動
子と、前記2つの振動子間の相互の信号伝達時間差に基
づく信号を演算する計時手段と、前記可動体位置検出手
段と前記計時手段の信号より流量を求める流量演算手段
とを備えた流量計測装置。
4. A movable body in which an opening of a fluid changes according to a flow velocity, a movable body position detecting means for detecting a position of the movable body, a first vibrator and a second vibration provided in the movable body. Flow rate measurement including a child, a time measuring means for calculating a signal based on a signal transmission time difference between the two vibrators, a flow rate calculating means for obtaining a flow rate from the movable body position detecting means and the signal of the time measuring means. apparatus.
【請求項5】流速に応じて流体の開口部が変化する可動
体と、前記可動体の位置を検出する可動体位置検出手段
と、流路中に超音波を発生する第1振動子および第2振
動子と、前記2つの振動子間の相互の信号伝達時間差に
基づく信号を演算する計時手段と、前記可動体位置検出
手段と前記計時手段の信号より流量を求める流量演算手
段とを備えた流量計測装置。
5. A movable body in which an opening of a fluid changes in accordance with a flow velocity, a movable body position detecting means for detecting a position of the movable body, a first oscillator and an oscillator for generating ultrasonic waves in a flow path. Two oscillators, a timer for calculating a signal based on a signal transmission time difference between the two oscillators, a movable body position detector, and a flow rate calculator for obtaining a flow rate from the signals of the timer. Flow rate measuring device.
【請求項6】可動体は、流体の圧力差によって自動的に
開閉する請求項5記載の流量計測装置。
6. The flow rate measuring device according to claim 5, wherein the movable body is automatically opened and closed by a pressure difference of the fluid.
【請求項7】可動体は、電気的駆動手段によって移動す
る請求項5記載の流量計測装置。
7. The flow rate measuring device according to claim 5, wherein the movable body is moved by an electric drive means.
【請求項8】可動体は、振動子の動作中にはその位置を
保持する請求項5記載の流量計測装置。
8. The flow rate measuring device according to claim 5, wherein the movable body holds its position during operation of the vibrator.
【請求項9】可動体は、あらかじめ設定された位置に段
階的に移動する請求項5記載の流量計測装置。
9. The flow rate measuring device according to claim 5, wherein the movable body moves stepwise to a preset position.
JP15352494A 1994-07-05 1994-07-05 Flow measurement device Expired - Fee Related JP3458460B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15352494A JP3458460B2 (en) 1994-07-05 1994-07-05 Flow measurement device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15352494A JP3458460B2 (en) 1994-07-05 1994-07-05 Flow measurement device

Publications (2)

Publication Number Publication Date
JPH0814975A JPH0814975A (en) 1996-01-19
JP3458460B2 true JP3458460B2 (en) 2003-10-20

Family

ID=15564420

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15352494A Expired - Fee Related JP3458460B2 (en) 1994-07-05 1994-07-05 Flow measurement device

Country Status (1)

Country Link
JP (1) JP3458460B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102589626B (en) * 2012-01-20 2015-06-17 北京嘉洁能科技有限公司 High-resolution time measurement and processing device and measurement method thereof
GB201402884D0 (en) * 2014-02-18 2014-04-02 Pcme Ltd Ultrasonic flow probe and method of monitoring fluid flow in a conduit

Also Published As

Publication number Publication date
JPH0814975A (en) 1996-01-19

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