JP3443375B2 - Transfer device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer device for holding and transferring a plate-shaped work such as a semiconductor wafer or a glass substrate.

[0002]

2. Description of the Related Art When a plate-shaped work such as a semiconductor wafer or a floppy disk is transferred, a transfer device is used to direct one by one to another processing step after the predetermined processing is completed. To transport.

In order to convey such a work, there is used a conveying device in which the work is vacuum-adsorbed by using a vacuum cup, but an impression of the vacuum cup may remain on the surface of the work.

Therefore, a non-contact type transfer device in which the transfer head does not directly contact the surface of the work is, for example,
It is proposed as shown in Japanese Patent Laid-Open No. 62-105831. This transfer device applies the principle of an ejector-type vacuum pump, but this device cannot generate an ejector function unless it is blown with air. Further, in such a method, there is a problem in that the work is easily blown off during the conveyance, and the conveyance becomes unstable.

Therefore, the inventor of the present invention has found that Japanese Patent Laid-Open No. 10-181
As shown in Japanese Patent No. 879, a structure has been developed in which a work can be reliably held and conveyed without generating an indentation on the work. A transfer head mounted on a moving member such as a robot arm has an annular holding surface for holding a plate-shaped work,
A gas discharge portion provided at a position retracted from the holding surface and a gas guide surface connecting the gas discharge portion and the holding surface are formed, and a nozzle for supplying air along the gas guide surface is used to discharge the gas. A negative pressure is formed on the holding surface by the gas flowing from the gas discharge portion through the gas guide surface to the holding surface, and the work is held by this negative pressure.

That is, since a gas layer is formed on the front end surface of the transfer head by the gas flowing along the end surface of the transfer head, the front surface of the transfer head is irrespective of the presence or absence of the work in front of the transfer head. Since a negative pressure area is formed in the area, the work can be securely held.

[0007]

In the transfer device having the above-mentioned annular holding surface, the gas discharged from the gas discharge portion is radially ejected in the circumferential direction, that is, in all directions. . However, depending on the work, there may be a direction that does not want to be affected by the discharged gas from the transfer device, but in such a case, the transfer device having the above-described configuration in which gas is ejected in all directions cannot be used. .

An object of the present invention is, in a carrying device for holding a work by forming a negative pressure at the tip of a carrying head, restricting the discharge direction of the discharge gas for forming the negative pressure to a specific direction, and then discharging the discharge gas. It is to be able to hold a work that has a direction that does not want to be affected by gas.

[0009]

The present invention is mounted on a moving member such as a robot arm and faces a workpiece.
And a transfer head having a ridge line on the tip surface.
Formed on one side of the ridge with an inclination to the work
The gas guide surface and the ridgeline through the ridgeline to the tip surface
Formed on the other side of the workpiece with an inclination with respect to the workpiece
Attached to the gas diffusion surface and the gas guide surface,
From the inner surface to the gas diffusion surface via the ridgeline
A gas ejection member that forms a jet layer of gas attached to the end face;
Has a negative pressure generated on the gas diffusion surface from the ridge line.
It is characterized by holding more work .

A plurality of gas diffusion surfaces and a plurality of gas ejection members corresponding thereto may be provided on the tip surface. A gas discharge path connected to a plurality of gas diffusion surfaces may be formed in the transport head. It is characterized in that the flow of the gas that adheres to each of the gas diffusion surfaces and diffuses in the opposite direction. It is characterized in that a gas diffusion groove is formed on the front end surface of the transport head, and gas is caused to flow in the gas diffusion groove.

In the above structure, the gas ejected from the gas ejection member diffuses along the gas diffusion surface to generate a negative pressure, and the negative pressure holds the work. The gas diffusing surface may be formed on the entire surface of the tip of the transfer head, but a gas guiding surface and a gas diffusing surface which are inclined with respect to each other are formed on both sides of the gas guiding surface through the ridge line portion, The gas may be jetted in layers from the gas jetting member.

In such a structure, the gas ejected at a high speed forms a spouted bed, traverses the ridge, and diffuses while being attached to the gas diffusion surface provided on the side opposite to the gas guide surface. .

Negative pressure is generated when the spouted bed diffuses toward the gas diffusion surface via the ridge, and this negative pressure causes a non-existence from the ridge to the gas diffusion surface with the work piece interposing the spouted bed. Will be held in contact. If the gas diffusion surface is provided and the gas diffusion surface is provided on the opposite side of the gas guiding surface via the ridge portion, the discharged gas is blown in the lateral direction and on the side where the gas guiding surface is provided. Never put out.

That is, in the carrier device of the present invention, unlike the conventional structure in which the discharge gas is blown out in all directions, there is a direction in which the discharge gas does not blow out, and there is a direction in which there is a direction in which the discharge gas is not affected, The portion can be held so that it is positioned in a direction in which the discharged gas does not blow out.

[0015]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described in detail below with reference to the drawings.

FIG. 1A is a cross-sectional view of the carrying device of the present invention, and FIG. 1B is a perspective view of the carrying device of FIG.

In the transfer device, as shown in FIG. 1, the transfer head 1 is mounted on a robot arm 2 (indicated by a chain double-dashed line in the figure) and moved along a predetermined locus by the robot arm 2 as a moving member. You can do it.

In the transport head 1, a gas guide surface 3 is set to an inclined surface at an inclination angle α with respect to the work W, and a gas diffusion surface 4 is also set to an inclined surface at an inclination angle β to the work W. Are provided on opposite sides of each other via the ridge portion 5. In this way, the gas guide surface 3 and the gas diffusion surface 4 are provided so as to be inclined with respect to each other via the ridge line portion 5, that is, the tapered surfaces are formed on both sides of the ridge line portion 5. ing.

A nozzle 6 is provided on the gas guide surface 3 as a gas ejection member. Inside the ejection end of the nozzle 6,
An air pocket 7 formed in the recess is formed, and on the gas guide surface 3 side corresponding to the air pocket 7, the open end of a gas passage 8 communicating with a supply source (not shown) of the compressed gas has a gas discharge port. It is opened as 8a. A slit 9 is formed between the ejection end side of the nozzle 6 and the gas guide surface 3.

The gas discharged from the gas discharge port 8a through the gas passage 8 flows out through the air pocket 7 from the slit 9 as a layered jet while being attached to the gas guide surface 3. Air may be used as the gas, for example.

The gas discharged while attached to the gas guide surface 3 is diffused through the ridge line portion 5 while being attached to the gas diffusion surface 4 provided on the opposite side of the gas guide surface 3. That is, the gas flows as a thin layered jet layer A from the gas guide surface 3 to the gas diffusion surface 4 via the ridge portion 5. In FIG. 1B, a wide arrow A (indicated by a chain double-dashed line in the figure) is shown.

In this way, when the gas is diffused along the gas diffusion surface 4 via the ridge portion 5, a negative pressure is generated from the ridge portion 5 toward the gas diffusion surface 4.

Due to such negative pressure, the work W is moved to the position shown in FIG.
As shown in, from the ridge portion 5 to the gas diffusion surface 4 side,
It is held in a non-contact state with the spouted bed A formed between the ridge portion 5 and the work W interposed therebetween. As shown in FIG. 1, the nozzle 6 is attached to the gas guide surface 3 with a bolt 10 or the like.

In the transport head 1 having the above-described structure, the gas guide surface 3 and the gas diffusion surface 4 are provided on the opposite sides of the ridge line portion 5, and the discharged gas is attached to the gas guide surface 3 toward the ridge line portion 5. Since it flows out in this state and is diffused on the gas diffusion surface 4 side, the gas does not directly blow onto the work W at the lower position of the gas guide surface 3.

Therefore, as shown in FIG. 1 (A), for example, in the case where the work W is not provided with a component Wa which is not desired to be blown with gas, this component Wa is used as the gas guide surface 3.
The ridge line portion 5 can be brought closer to the work W so as to hold the work by arranging it on the side of.

In the case shown in FIG. 1, since the work W is assumed to be a plate having rigidity such as a metal plate, the work W is held in a flat state without contact. When a flexible material such as cloth or paper is used for the work W, depending on the flexibility, the work W is held in a state of being bent along the taper portion from the ridge portion 5 to the gas diffusion surface 4 side. It may be done.

FIGS. 2A and 2B are sectional views showing a modified example of the carrying head used in the carrying apparatus of the present invention. Also in the case shown in FIG. 2A, although not shown, the transfer head 11 is connected to the robot arm 2 as a moving member and can move along a predetermined locus.

The transfer head 11 is provided with a plurality of ridge lines 5. The gas diffusion surface 4 of each of the plurality of ridges 5 is provided with the diffusion direction facing the gas discharge path 12 provided across the center of the transport head 11. That is,
The gas discharge path 12 is configured as a common gas discharge path connected to the plurality of gas diffusion surfaces 4.

On the opposite side of each gas diffusion surface 4, there is provided a gas guide surface 3 formed as an inclined surface with respect to the work W via a ridge line portion 5. A nozzle 6 is provided on each gas guide surface 3 as a gas ejection member. An air pocket 7 formed in a recess is formed inside the ejection end of the nozzle 6, and a gas passage that communicates with a compressed gas supply source (not shown) is provided on the gas guide surface 3 side corresponding to the air pocket 7. The open end of 8 is opened as a gas discharge port 8a. A slit 9 is formed between the ejection end side of the nozzle 6 and the gas guide surface 3.

The gas discharged from the gas discharge port 8a through the gas passage 8 flows out through the air pocket 7 from the slit 9 as a layered jet while being attached to the gas guide surface 3. The gas thus ejected diffuses as a thin layered jet layer via the ridge line portion 5 to the gas diffusion surface 4 side. The diffused gas is guided while being attached to the gas diffusion surface 4 and reaches the gas discharge path 12,
It is discharged to the outside of the transport head 11.

In the carrying device having such a structure, the carrying head 1
Since the plurality of ridge lines 5 are provided in the workpiece 1, the work W can be held in a non-contact manner at a plurality of places, and the work W that can be held can be provided as compared with the transport device in which the ridge lines 5 are provided at one place.
The weight and area can be increased. Further, a range B in the drawing corresponds to a region in which there is no fear of directly spraying the discharge gas onto the work W.

Also in the case shown in FIG. 2B, although not shown, the transfer head 14 is connected to the robot arm 2 as a moving member and can move along a predetermined locus. The transport head 14 has a central portion 1
A ridge line portion 5 is provided on both sides of the ridge line portion 5, and a gas guide surface 3 and a gas diffusion surface 4 which are inclined with respect to each other are provided on both sides of the ridge line portion 5. These gas diffusion surfaces 4 provided via the plurality of ridge portions 5 have gas diffusion directions directed in mutually opposite directions, and the jet layer is diffused in the opposite direction.

On the opposite side of each gas diffusion surface 4, there is provided a gas guide surface 3 which is formed as an inclined surface with respect to the work W via a ridge line portion 5. A nozzle 6 is provided on each gas guide surface 3 as a gas ejection member. An air pocket 7 formed in a recess is formed inside the ejection end of the nozzle 6, and a gas passage that communicates with a compressed gas supply source (not shown) is provided on the gas guide surface 3 side corresponding to the air pocket 7. The open end of 8 is opened as a gas discharge port 8a. A slit 9 is formed between the ejection end side of the nozzle 6 and the gas guide surface 3.

The gas discharged from the gas discharge port 8a through the gas passage 8 flows out through the air pocket 7 from the slit 9 as a layered jet while being attached to the gas guide surface 3. The gas flowing out in this way becomes a thin layered jet layer and passes through the ridge line portion 5 to form the gas diffusion surface 4
Diffuses in the state of being attached to. When diffusing, a negative pressure is formed from the ridge line portion 5 to the gas diffusion surface 4, and the negative pressure can hold the work W in a non-contact manner from the ridge line portion 5 to the gas diffusion surface 4. In the figure, the range B is a range in which there is no concern that the discharge gas will directly hit the work W.

In the carrying device having such a structure, the carrying head 1
Since the plurality of ridge lines 5 are provided in the workpiece 1, the work W can be held in a non-contact manner at a plurality of places, and the work W that can be held can be provided as compared with the transport device in which the ridge lines 5 are provided at one place.
The weight and area can be increased.

FIG. 3A is a sectional view showing a modified example of the carrying head used in the carrying apparatus of the present invention, FIG. 3B is a front view of the carrying head shown in FIG. 3A, and FIG. It is the top view seen from the ridgeline part side of the conveyance head of (A).

In the case shown in FIG. 3 as well, although not shown, the carrying head 16 is connected to the robot arm 2 as a moving member and can move along a predetermined locus, although not shown. ing.

In the transfer head 16, a tip end surface opposite to the gas guide surface 3 provided via the ridge line portion 5 is set parallel to the work W as shown in FIG. 3 (A). It is formed on the contact surface 17. As shown in FIGS. 3B and 3C, the work contact surface 17 has a plurality of gas diffusion grooves 1
8 are provided in parallel with each other, and the bottom surface 19 of the gas diffusion groove 18 is set to be an inclined surface with respect to the work W to form a gas diffusion surface.

Corresponding to the bottom surface 19 of the gas diffusion groove 18 having such a structure, a plurality of gas guide surfaces 3 set to be inclined with respect to the work W are provided on the opposite side of the ridge line portion 5. . A nozzle 6 is provided on the gas guide surface 3 as a gas ejection member. An air pocket 7 formed in a recess is formed inside the ejection end of the nozzle 6, and a gas passage that communicates with a compressed gas supply source (not shown) is provided on the gas guide surface 3 side corresponding to the air pocket 7. The open end of 8 is opened as a gas discharge port 8a. A slit 9 is formed between the ejection end side of the nozzle 6 and the gas guide surface 3.

The gas discharged from the gas discharge port 8a through the gas passage 8 flows out through the air pocket 7 from the slit 9 as a layered jet while being attached to the gas guide surface 3. The spouted bed of gas that has flown out in this way enters the gas diffusion groove 18 provided in the workpiece contact surface 17 via the ridge line portion 5. The gas that has entered the gas diffusion groove 18 flows along the bottom surface 19 of the gas diffusion groove 18 and is discharged to the outside.

The gas discharged as described above adheres to the gas guide surface 3 and passes through the ridge 5 to form the gas diffusion groove 1
Negative pressure is generated when the work W is diffused into the work piece 8, and the work W is held in non-contact with the ridge line portion 5. In addition, the work W has a work contact surface 17 on which the ridge line portion 5 is not formed.
Are in direct contact with.

By providing the work contact surface 17 in this way, a frictional force is generated between the work W and the work contact surface 17, and the work W is not displaced with respect to the transport head 16. The frictional force can be set to various magnitudes by changing the flow rate and flow velocity of the discharged gas and the material of the constituent members of the work contact surface 17. The conveyance head 1 can be driven by a slight frictional force without generating an indentation on the work W.
It can be set so that the work W does not deviate from the transport head 16 when the work 6 is moved horizontally.

Further, since the transport head 16 having the above-described structure is provided with a plurality of ridge line portions 5, the work W can be held in a non-contact manner at a plurality of places, and the ridge line portion 5 is provided at one place. The weight and area of the work W that can be held can be increased in comparison with the above. A range B in the drawing corresponds to a region where there is no fear of directly spraying the discharge gas onto the work W.

The present invention is not limited to the above-mentioned embodiments, but can be variously modified without departing from the gist thereof.

For example, in the above embodiment, the transfer head is moved by the robot arm, but the transfer head may be attached to a moving member that moves in the horizontal and vertical directions.

In the above embodiment, the case where air is used as the gas to be discharged has been described, but other gas such as nitrogen or an inert gas may be used. The work to be transported may be a substrate having holes formed therein, or a non-woven fabric or the like having air permeability can be held and transported.

Further, the work may be formed in a strip shape and wound in a roll shape, and the pull-out end side of the work may be held by the ridge portion and pulled out. When holding the pull-out end of a flexible work wound in a roll like this, it is held so as to be slightly warped from the ridge portion toward the gas diffusion surface side, and thus is held flat. It can be pulled out while applying tensile tension so as not to loosen in the middle.

In the above embodiment, the air pocket is formed inside the ejection end of the nozzle on the side of the gas guide surface that opposes the gas discharge port. However, an air pocket may be provided in the transfer head, or an air pocket may be provided. Without pockets
It may be formed flat so as to face the gas guide surface.

In the above embodiment, the structure in which the gas diffusing surface and the gas guiding surface are provided has been described, but the gas diffusing surface may be provided on the entire tip of the carrying head without providing the gas guiding surface. Good.

[0050]

According to the present invention, a gas guiding surface and a gas diffusing surface which are inclined to each other are provided on both sides of the gas guiding surface via the ridge, and the gas guiding surface is attached to the gas diffusing surface via the ridge. Since it is a configuration for diffusing gas in the above, unlike the conventional configuration for diffusing gas in all directions, the diffusion direction of gas can be specified as the direction along the gas diffusion surface. Therefore, even a work having a portion which is not desired to be affected by the gas can be held without blowing the discharged gas to the portion by removing the portion from the gas diffusion direction.

[Brief description of drawings]

FIG. 1A is a cross-sectional view of a carrying device of the present invention,
(B) is a perspective view of the transfer device of (A) seen from the ridge line side.

2A and 2B are side cross-sectional views showing a modified example of the carrying head used in the carrying device of the present invention.

3A is a cross-sectional view showing a modified example of the transport head used in the transport device of the present invention, FIG. 3B is a front view of the transport head of FIG. 3A, and FIG. It is the top view seen from the ridgeline part side of the conveyance head of A).

[Explanation of symbols]

1 Transport head 2 robot arm 3 gas guide surface 4 Gas diffusion surface 5 ridge 6 nozzles 7 air pockets 8 gas passages 8a Gas outlet 9 slits 10 volts 11 Conveyor head 12 Gas discharge path 13 Air vent 13a open end 14 Conveyor head 15 Central 16 Conveyor head 17 Work contact surface 18 Gas diffusion groove 19 bottom W work Wa component A spouted bed B range

Claims (5)

(57) [Claims] 1. A transfer head mounted on a moving member such as a robot arm and having a front end surface facing a work, and a work head on one side of the front end surface via a ridge line.
And a gas guide surface that is formed to be inclined with respect to the front end surface and the ridge line on the other side of the ridge line.
The gas diffusion surface is formed to be inclined with respect to the work, and is attached to the gas guide surface, and is attached to the front of the gas guide surface.
Attached to the tip surface to the gas diffusion surface via the ridgeline
And a gas ejection member forming a spouted layer of gas, the negative pressure generated from the ridge line to the gas diffusion surface
Conveying device characterized by holding the grip . 2. The transfer device according to claim 1, wherein
The gas guide surface and the gas diffusion on each side of the tip surface
A plurality of ridges forming a surface and each of the gas
A conveying device, characterized in that a gas ejection member is provided on each of the guide surfaces . 3. The transfer device according to claim 2, wherein a gas discharge path connected to the plurality of gas diffusion surfaces is formed in the transfer head. 4. The transfer device according to claim 2, wherein the flow of gas diffused to each gas diffusion surface is opposite. 5. The conveying device according to any one of claims 1 to 4, the distal end face of the carrying head, the word
The work contact surface that contacts the
And a gas diffusion surface having the gas diffusion surface, through which a gas flows, and the gas is caused to flow through the gas diffusion groove.