JP3423461B2 - Vacuum degreasing cleaning method - Google Patents

Vacuum degreasing cleaning method

Info

Publication number
JP3423461B2
JP3423461B2 JP02584995A JP2584995A JP3423461B2 JP 3423461 B2 JP3423461 B2 JP 3423461B2 JP 02584995 A JP02584995 A JP 02584995A JP 2584995 A JP2584995 A JP 2584995A JP 3423461 B2 JP3423461 B2 JP 3423461B2
Authority
JP
Japan
Prior art keywords
cleaning
chamber
cleaned
vacuum
heating chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP02584995A
Other languages
Japanese (ja)
Other versions
JPH08197019A (en
Inventor
博 菊地
一朗 阿部
博 武田
稔 小田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP02584995A priority Critical patent/JP3423461B2/en
Publication of JPH08197019A publication Critical patent/JPH08197019A/en
Application granted granted Critical
Publication of JP3423461B2 publication Critical patent/JP3423461B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は工業製品等に付着する
油脂等を洗い落とす真空脱脂洗浄方法に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum degreasing and washing method for washing off oils and fats attached to industrial products.

【0002】[0002]

【従来の技術】従来の真空脱脂洗浄方法に用いられる装
置は図2に示されており、同図において、洗浄室1の上
部には真空加熱室2が連設されており、洗浄室1と真空
加熱室2とを連通させる開口3は仕切弁4で閉鎖されて
いる。真空加熱室2内の開口3の上部には、第1駆動シ
リンダ5のシリンダロッド(図示せず)に接続された被
洗浄物6を載せるラック7が吊り下げられており、仕切
弁4を開放し、第1駆動シリンダ5を作動させてシリン
ダロッドを下降させると、ラック7は開口3を通過し
て、洗浄室1内に下降する。
2. Description of the Related Art An apparatus used in a conventional vacuum degreasing and cleaning method is shown in FIG. 2, in which a vacuum heating chamber 2 is connected to an upper part of a cleaning chamber 1 and is connected to the cleaning chamber 1. An opening 3 communicating with the vacuum heating chamber 2 is closed by a sluice valve 4. A rack 7 for suspending an object to be cleaned 6 connected to a cylinder rod (not shown) of the first drive cylinder 5 is suspended above the opening 3 in the vacuum heating chamber 2, and the gate valve 4 is opened. Then, when the first drive cylinder 5 is operated to lower the cylinder rod, the rack 7 passes through the opening 3 and is lowered into the cleaning chamber 1.

【0003】なお、図中、8はオイルトラップ9を介し
て真空加熱室2に接続された真空ポンプ、10は真空加
熱室2内に不活性ガスを導入する第1不活性ガス源、1
1は被洗浄物5の搬入・搬出用の扉、12は扉11を開
閉させる第2駆動シリンダ、13は洗浄室1内に溜めら
れた第3石油類等の炭化水素系の洗浄液である。
In the figure, 8 is a vacuum pump connected to the vacuum heating chamber 2 via an oil trap 9, 10 is a first inert gas source for introducing an inert gas into the vacuum heating chamber 2, 1
Reference numeral 1 is a door for loading and unloading the object to be cleaned 5, 12 is a second drive cylinder for opening and closing the door 11, and 13 is a hydrocarbon-based cleaning liquid such as third petroleum stored in the cleaning chamber 1.

【0004】このような装置を使用して真空脱脂洗浄方
法を行う場合には、次のような手順で行う。 まず、真空加熱室2に搬入した被洗浄物6をラック7
に載せ、真空加熱室2内を真空ポンプ8で真空排気す
る。 次に、真空加熱室2内に第1不活性ガス源10より不
活性ガスを大気圧まで導入し、真空加熱室2内を不活性
ガスで置換する。 その次に、仕切弁4を開放した後、第1駆動シリンダ
5を作動させて真空加熱室2から洗浄室1へラック7を
下降させ、洗浄室1へ搬送した被洗浄物6を洗浄室1内
の洗浄液13に浸漬して洗浄する。 最後に、第1駆動シリンダ5を作動させて洗浄室1か
ら真空加熱室2へラック7を上昇させた後、仕切弁4を
閉鎖し、真空加熱室2で被洗浄物6を真空乾燥する。
When performing the vacuum degreasing cleaning method using such an apparatus, the following procedure is performed. First, the cleaning object 6 carried into the vacuum heating chamber 2 is loaded with the rack 7
Then, the inside of the vacuum heating chamber 2 is evacuated by the vacuum pump 8. Next, an inert gas is introduced into the vacuum heating chamber 2 from the first inert gas source 10 up to the atmospheric pressure, and the inside of the vacuum heating chamber 2 is replaced with the inert gas. Next, after opening the sluice valve 4, the first drive cylinder 5 is operated to lower the rack 7 from the vacuum heating chamber 2 to the cleaning chamber 1, and the cleaning target 6 conveyed to the cleaning chamber 1 is cleaned. It is immersed in the cleaning liquid 13 inside and cleaned. Finally, the first drive cylinder 5 is operated to raise the rack 7 from the cleaning chamber 1 to the vacuum heating chamber 2, then the sluice valve 4 is closed, and the object 6 to be cleaned is vacuum dried in the vacuum heating chamber 2.

【0005】[0005]

【発明が解決しようとする課題】従来の真空脱脂洗浄方
法は、洗浄液13に第3石油類等の炭化水素系のものを
使用しているので、洗浄液13を大気と接触させないよ
うにするため、真空加熱室2内を真空排気した後、不活
性ガスを大気圧まで導入して真空加熱室2内を不活性ガ
スで置換し、その後、仕切弁4を開放し、大気圧の不活
性ガスの雰囲気下で、被洗浄物6を洗浄室1内の洗浄液
13に浸漬して洗浄していた。
In the conventional vacuum degreasing cleaning method, since the cleaning liquid 13 is a hydrocarbon type such as a third petroleum, the cleaning liquid 13 is prevented from coming into contact with the atmosphere. After the inside of the vacuum heating chamber 2 is evacuated, an inert gas is introduced to the atmospheric pressure to replace the inside of the vacuum heating chamber 2 with the inert gas, and then the sluice valve 4 is opened to remove the inert gas of the atmospheric pressure. Under the atmosphere, the article to be cleaned 6 was immersed in the cleaning liquid 13 in the cleaning chamber 1 for cleaning.

【0006】そのため、被洗浄物6が多孔質状のものや
止まり穴のあるものの場合、洗浄液13に被洗浄物6を
浸漬しても、孔の内部や止まり穴の内部に不活性ガスが
充満しているため、これらの内部に洗浄液13が流れ込
まず、孔の内部や止まり穴の内部に付着した油脂等を洗
い落とせない問題が起きた。
Therefore, when the object to be cleaned 6 is porous or has blind holes, even if the object to be cleaned 6 is immersed in the cleaning liquid 13, the inside of the holes and the blind holes are filled with an inert gas. Therefore, the cleaning liquid 13 does not flow into the inside of these, and there is a problem that the oil and fat adhering to the inside of the hole and the inside of the blind hole cannot be washed off.

【0007】この発明の目的は、従来の上記問題を解決
して、被洗浄物の孔の内部や止まり穴の内部に付着した
油脂等を洗い落とすことが可能な真空脱脂洗浄方法を提
供することにある。
An object of the present invention is to solve the above-mentioned problems of the prior art and to provide a vacuum degreasing cleaning method capable of washing off oils and fats and the like adhering to the inside of the hole of the object to be cleaned and the inside of the blind hole. is there.

【0008】[0008]

【課題を解決するための手段】上記目的を達成するため
に、この発明は、仕切弁を介して洗浄室と連設する真空
加熱室に被洗浄物を搬入し、真空加熱室の内部を不活性
ガスで置換した後、仕切弁を開放し、真空加熱室から洗
浄室へ搬送した被洗浄物を、洗浄室内の洗浄液に浸漬し
て洗浄する真空脱脂洗浄方法において、洗浄液に被洗浄
物を浸漬して洗浄する際、真空加熱室と洗浄室との内部
を減圧しておくものである。
In order to achieve the above object, the present invention introduces an object to be cleaned into a vacuum heating chamber which is connected to a cleaning chamber through a gate valve and keeps the inside of the vacuum heating chamber uninhibited. In the vacuum degreasing cleaning method in which the cleaning valve conveyed from the vacuum heating chamber to the cleaning chamber is immersed in the cleaning liquid after cleaning by opening the sluice valve after substituting with the active gas, the cleaning liquid is immersed in the cleaning liquid. During the cleaning, the pressure inside the vacuum heating chamber and the cleaning chamber is reduced.

【0009】更に、この発明は、洗浄液に被洗浄物を浸
漬して洗浄している途中から、洗浄液中に不活性ガスを
噴出させ、その噴出した不活性ガスで洗浄液を攪拌しな
がら被洗浄物を洗浄するものである。
Further, according to the present invention, the object to be cleaned is sprayed with an inert gas into the cleaning liquid while the object to be cleaned is immersed in the cleaning liquid and is being cleaned, and the cleaning liquid is stirred by the jetted inert gas. Is to be washed.

【0010】[0010]

【作用】この発明においては、洗浄液に被洗浄物を浸漬
して洗浄する際、真空加熱室と洗浄室との内部を減圧し
ておくので、被洗浄物の孔の内部や止まり穴の内部に残
留する不活性ガスがなくなるため、これらの内部に洗浄
液が流れ込み、孔の内部や止まり穴の内部に付着した油
脂等を洗い落とすことが可能になる。
In the present invention, when the object to be cleaned is dipped in the cleaning liquid to be cleaned, the insides of the vacuum heating chamber and the cleaning chamber are decompressed. Since there is no residual inert gas, the cleaning liquid flows into these parts, and it is possible to wash off the oil and fat and the like adhering to the inside of the holes and the inside of the blind holes.

【0011】更に、この発明においては、洗浄液に被洗
浄物を浸漬して洗浄している途中から、洗浄液中に不活
性ガスを噴出させ、その噴出した不活性ガスで洗浄液を
攪拌しながら被洗浄物を洗浄するので、一層洗浄効率が
良くなる。
Further, according to the present invention, an object to be cleaned is sprayed with an inert gas while the object to be cleaned is immersed in the cleaning solution and the cleaning solution is agitated with the sprayed inert gas. Since the object is washed, the washing efficiency is further improved.

【0012】[0012]

【実施例】以下、この発明の実施例について図面を参照
しながら説明する。この発明の実施例の方法に用いられ
る装置は従来の装置を改良したもので、図1に示されて
いる。同図において、洗浄室1内の下部にはガスノズル
14が配設され、このガスノズル14は第2不活性ガス
源15に接続されている。
Embodiments of the present invention will be described below with reference to the drawings. The apparatus used in the method of an embodiment of the present invention is an improvement over the conventional apparatus and is shown in FIG. In the figure, a gas nozzle 14 is arranged in the lower part of the cleaning chamber 1, and this gas nozzle 14 is connected to a second inert gas source 15.

【0013】なお、図中、従来の装置を示す図2の符号
と同じ符号のものは同一物につき、その説明を省略す
る。
In the figure, the same reference numerals as those in FIG. 2 showing the conventional device are the same and their explanations are omitted.

【0014】このような装置を使用してこの発明の実施
例の方法を行う場合には、従来と同様に、まず、真空加
熱室2に搬入した被洗浄物6をラック7に載せ、真空加
熱室2内を真空ポンプ8で真空排気する。次に、真空加
熱室2内に第1不活性ガス源10より不活性ガスを大気
圧まで導入し、真空加熱室2内を不活性ガスで置換す
る。
When carrying out the method of the embodiment of the present invention using such an apparatus, first, as in the conventional case, the article 6 to be cleaned carried into the vacuum heating chamber 2 is placed on the rack 7 and vacuum heated. The inside of the chamber 2 is evacuated by the vacuum pump 8. Next, an inert gas is introduced into the vacuum heating chamber 2 from the first inert gas source 10 up to the atmospheric pressure, and the inside of the vacuum heating chamber 2 is replaced with the inert gas.

【0015】しかしながら、その次に、仕切弁4を開放
した後、真空加熱室2と洗浄室との内部を真空ポンプ8
で真空排気する。その後、第1駆動シリンダ7を作動さ
せて真空加熱室2から洗浄室1へラック7を下降させ、
洗浄室1へ搬送した被洗浄物6を洗浄室1内の洗浄液1
3に浸漬して洗浄する。そして、洗浄した後、第1不活
性ガス源10より真空加熱室2と洗浄室との内部に不活
性ガスを大気圧まで導入する。
However, next, after opening the sluice valve 4, the insides of the vacuum heating chamber 2 and the cleaning chamber are vacuum pumps 8.
Evacuate with. Then, the first driving cylinder 7 is operated to lower the rack 7 from the vacuum heating chamber 2 to the cleaning chamber 1,
The cleaning liquid 1 in the cleaning chamber 1 is the object 6 to be cleaned transferred to the cleaning chamber 1.
Immerse in 3 and wash. Then, after cleaning, the inert gas is introduced from the first inert gas source 10 into the vacuum heating chamber 2 and the cleaning chamber up to the atmospheric pressure.

【0016】最後に、従来と同様に、第1駆動シリンダ
7を作動させて洗浄室1から真空加熱室2へラック7を
上昇させた後、仕切弁4を閉鎖し、真空加熱室2で被洗
浄物6を真空乾燥する。
Finally, as in the conventional case, the first drive cylinder 7 is operated to raise the rack 7 from the cleaning chamber 1 to the vacuum heating chamber 2, then the sluice valve 4 is closed and the vacuum heating chamber 2 is closed. The washed product 6 is vacuum dried.

【0017】このような実施例においては、洗浄液13
に被洗浄物6を浸漬して洗浄する際、真空加熱室2と洗
浄室1との内部を減圧しておくので、被洗浄物6の孔の
内部や止まり穴の内部に充満する不活性ガスがなくなる
ため、これらの内部に洗浄液が流れ込み、孔の内部や止
まり穴の内部に付着した油脂等を洗い落とすことが可能
になる。
In such an embodiment, the cleaning liquid 13
Since the insides of the vacuum heating chamber 2 and the cleaning chamber 1 are depressurized when the object to be cleaned 6 is immersed in the cleaning, the inert gas filling the inside of the hole of the object to be cleaned 6 and the inside of the blind hole is filled. As a result, the cleaning liquid flows into these parts, and it is possible to wash off the oil and fat and the like adhering to the insides of the holes and the blind holes.

【0018】更に、洗浄した後、第1不活性ガス源10
より真空加熱室2と洗浄室1との内部に不活性ガスを大
気圧まで導入する代わりに、洗浄液13に被洗浄物6を
浸漬して洗浄している途中から、ガスノズル14より洗
浄液13中に不活性ガスを噴出させ、その噴出した不活
性ガスで洗浄液13を攪拌しながら被洗浄物6を洗浄す
ると、一層洗浄効率が良くなる。
After further cleaning, the first inert gas source 10
Instead of introducing an inert gas to the inside of the vacuum heating chamber 2 and the cleaning chamber 1 up to the atmospheric pressure, the object 6 to be cleaned is immersed in the cleaning liquid 13 to clean the cleaning liquid 13 from the middle of the cleaning process. When the inert gas is ejected and the cleaning object 13 is cleaned while stirring the cleaning liquid 13 with the ejected inert gas, the cleaning efficiency is further improved.

【0019】ところで、上記実施例では、仕切弁4を開
放した後、真空加熱室2と洗浄室1との内部を真空ポン
プ8で真空排気し、その後、第1駆動シリンダ5を作動
させて真空加熱室2から洗浄室1へラック7を下降させ
ているが、真空加熱室2から洗浄室1へラック7を下降
させている最中に、真空加熱室2と洗浄室1との内部を
真空ポンプ8で真空排気してもよい。
By the way, in the above-mentioned embodiment, after opening the sluice valve 4, the inside of the vacuum heating chamber 2 and the cleaning chamber 1 is evacuated by the vacuum pump 8, and then the first drive cylinder 5 is operated to evacuate. Although the rack 7 is lowered from the heating chamber 2 to the cleaning chamber 1, the insides of the vacuum heating chamber 2 and the cleaning chamber 1 are vacuumed while the rack 7 is lowered from the vacuum heating chamber 2 to the cleaning chamber 1. The pump 8 may be evacuated.

【0020】[0020]

【発明の効果】この発明は、上記のように、洗浄液に被
洗浄物を浸漬して洗浄する際、真空加熱室と洗浄室との
内部を減圧しておくので、被洗浄物の孔の内部や止まり
穴の内部に残留する不活性ガスがなくなるため、これら
の内部に洗浄液が流れ込み、孔の内部や止まり穴の内部
に付着した油脂等を洗い落とすことが可能になる。
As described above, according to the present invention, when the object to be cleaned is immersed in the cleaning liquid for cleaning, the inside of the vacuum heating chamber and the cleaning chamber is depressurized. Since the inert gas remaining inside the blind holes disappears, the cleaning liquid flows into these holes, and it is possible to wash off the oil and fat adhering to the inside of the holes and the blind holes.

【0021】更に、洗浄液に被洗浄物を浸漬して洗浄し
ている途中から、洗浄液中に不活性ガスを噴出させ、そ
の噴出した不活性ガスで洗浄液を攪拌しながら被洗浄物
を洗浄するので、一層洗浄効率が良くなる。
Further, since the inert gas is jetted into the cleaning liquid while the cleaning liquid is being immersed in the cleaning liquid and the cleaning liquid is stirred by the jetted inert gas, the cleaning liquid is washed. The cleaning efficiency is further improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の実施例の方法に用いられる装置を示
す説明図
FIG. 1 is an explanatory view showing an apparatus used in a method of an embodiment of the present invention.

【図2】従来の真空脱脂洗浄方法に用いられる装置を示
す説明図
FIG. 2 is an explanatory view showing an apparatus used in a conventional vacuum degreasing cleaning method.

【符号の説明】[Explanation of symbols]

1・・・・・・・・洗浄室 2・・・・・・・・真空加熱室 3・・・・・・・・開口 4・・・・・・・・仕切弁 6・・・・・・・・被洗浄物 7・・・・・・・・ラック 5・・・・・・・・第1駆動シリンダ 8・・・・・・・・真空ポンプ 9・・・・・・・・オイルトラップ 10・・・・・・・第1不活性ガス源 11・・・・・・・扉 12・・・・・・・第2駆動シリンダ 13・・・・・・・洗浄液 14・・・・・・・ガスノズル 15・・・・・・・第2不活性ガス源 1 ・ ・ ・ ・ ・ ・ Washing room 2 ... Vacuum heating chamber 3 ... Opening 4 ... Gate valve 6 ・ ・ ・ ・ ・ ・ Cleaning object 7 ... Rack 5 ... First drive cylinder 8 ... Vacuum pump 9: Oil trap 10 --- First inert gas source 11 ... Door 12 --- Second drive cylinder 13 ...- Cleaning liquid 14 ... Gas nozzle 15 --- Second inert gas source

───────────────────────────────────────────────────── フロントページの続き (72)発明者 小田 稔 神奈川県茅ヶ崎市萩園2500番地日本真空 技術株式会社内 (58)調査した分野(Int.Cl.7,DB名) B08B 3/08 C23G 5/02 F28G 9/00 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Minor Oda Minoru Oda 2500 Hagizono, Chigasaki City, Kanagawa Japan Vacuum Technology Co., Ltd. (58) Fields investigated (Int.Cl. 7 , DB name) B08B 3/08 C23G 5 / 02 F28G 9/00

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】仕切弁を介して洗浄室と連設する真空加熱
室に被洗浄物を搬入し、真空加熱室の内部を不活性ガス
で置換した後、仕切弁を開放し、真空加熱室から洗浄室
へ搬送した被洗浄物を、洗浄室内の洗浄液に浸漬して洗
浄する真空脱脂洗浄方法において、洗浄液に被洗浄物を
浸漬して洗浄する際、真空加熱室と洗浄室との内部を減
圧しておくことを特徴とする真空脱脂洗浄方法。
1. A vacuum heating chamber, which is connected to a cleaning chamber via a sluice valve, carries an object to be cleaned, replaces the inside of the vaccum heating chamber with an inert gas, and then opens the sluice valve to open the vacuum heating chamber. In the vacuum degreasing cleaning method, in which the object to be cleaned conveyed from the cleaning chamber to the cleaning chamber is immersed in the cleaning liquid in the cleaning chamber for cleaning, when the object to be cleaned is immersed in the cleaning liquid and cleaned, the insides of the vacuum heating chamber and the cleaning chamber are A vacuum degreasing cleaning method characterized in that the pressure is reduced.
【請求項2】請求項1に記載の真空脱脂洗浄方法におい
て、洗浄液に被洗浄物を浸漬して洗浄している途中か
ら、洗浄液中に不活性ガスを噴出させ、その噴出した不
活性ガスで洗浄液を攪拌しながら被洗浄物を洗浄するこ
とを特徴とする真空脱脂洗浄方法。
2. The vacuum degreasing cleaning method according to claim 1, wherein an inert gas is jetted into the cleaning liquid while the cleaning target is being immersed in the cleaning liquid and is being washed. A vacuum degreasing cleaning method, which comprises cleaning an object to be cleaned while stirring the cleaning liquid.
JP02584995A 1995-01-20 1995-01-20 Vacuum degreasing cleaning method Expired - Fee Related JP3423461B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP02584995A JP3423461B2 (en) 1995-01-20 1995-01-20 Vacuum degreasing cleaning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP02584995A JP3423461B2 (en) 1995-01-20 1995-01-20 Vacuum degreasing cleaning method

Publications (2)

Publication Number Publication Date
JPH08197019A JPH08197019A (en) 1996-08-06
JP3423461B2 true JP3423461B2 (en) 2003-07-07

Family

ID=12177298

Family Applications (1)

Application Number Title Priority Date Filing Date
JP02584995A Expired - Fee Related JP3423461B2 (en) 1995-01-20 1995-01-20 Vacuum degreasing cleaning method

Country Status (1)

Country Link
JP (1) JP3423461B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6505165B2 (en) * 2017-07-14 2019-04-24 中外炉工業株式会社 Cleaning device
CN113198797B (en) * 2021-05-21 2022-11-18 萍乡市方兴石化填料有限公司 Regular packing degreasing equipment

Also Published As

Publication number Publication date
JPH08197019A (en) 1996-08-06

Similar Documents

Publication Publication Date Title
JPH06326073A (en) Method and apparatus for treatment of cleaning and drying of substrate
JPH05255876A (en) Method for washing metallic articles, device for washing metallic articles and device for drying metallic articles
JPH07508904A (en) Liquid/supercritical carbon dioxide dry cleaning equipment
JP2804210B2 (en) Cleaning equipment
JP2002282801A (en) Vacuum steam cleaning method and device for the same
JP3441706B2 (en) Vacuum distillation cleaning method
JP3423461B2 (en) Vacuum degreasing cleaning method
EP0222777B1 (en) Unit intended to restore the initial cleanness conditions in a quartz tube used as reaction chamber for fabricating integrated circuits
JP2977922B2 (en) Pressure swing cleaning method and apparatus
JP3328460B2 (en) Vacuum degreasing cleaning method
JPH07185484A (en) Method and apparatus for vacuum washing
JPH06306658A (en) Degreasing and washing method and its equipment
JP3910757B2 (en) Processing apparatus and processing method
JPH0576852A (en) Aqueous washing and drying treatment method and apparatus
JP3184672B2 (en) Metal article cleaning method and metal article cleaning apparatus
JPH09283489A (en) Board treatment method and board treatment device
JPH04354128A (en) Method and apparatus for chemical liquid treatment of substrate, and method and apparatus for chemical liquid treatment washing and drying of substrate
JP2973772B2 (en) Vacuum cleaning equipment
JPH01226157A (en) Method of drying semiconductor substrate
JPS6254443A (en) Process and device for drying wafers
RU2036734C1 (en) Device for article cleaning
JPH07243071A (en) Washing device
JPH0567380U (en) Cleaning equipment
JPH0688264A (en) Vacuum degreasing and washing device
JP3746551B2 (en) Vacuum cleaning and drying equipment

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20071108

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120425

Year of fee payment: 9

LAPS Cancellation because of no payment of annual fees