JP3361024B2 - Scribing device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scribing device for scribing a sample with a blade. In order to evaluate a fine pattern of a photomask, a liquid crystal filter, etc., it is necessary to observe these cross sections with a scanning electron microscope. The size of the fragment is appropriately a cube of about 3 mm to 6 mm due to the restrictions of the scanning electron microscope. The present invention relates to a scribe device for a sample, which is most important in producing a fragment of this size. Further, the present invention relates to a scribing device for breaking a curved sample such as a large-diameter liquid crystal filter or a cathode ray tube.

[0002]

2. Description of the Related Art Conventionally, when a sample of a scanning electron microscope is manually created by scribing a photomask, a liquid crystal filter or the like, there have been the following problems.

(1) It was almost impossible to perform the above-mentioned breaking work with a commercially available scribing tool. (2) The accuracy of the position to be marked was poor, and the cross section at the desired position could not be obtained.

Further, the scribe device has the following problems. (1) Since the direction of the rotary blade and the scribing movement direction of the sample stage do not completely match, a desired scribing line cannot be obtained. In particular, when a specific point is skipped and scribing, the scribing lines before and after the skip are not on a straight line, and therefore the skipping part has a meandering crack between the scribing lines.

(2) The force for lowering the scriber blade onto the sample was changed depending on the thickness of the sample, so that the blade pressure could not be set uniquely, and the sample could not be broken cleanly. (3) In particular, the curved surface could not be scribed with a constant blade pressure.

[0006]

The failure and difficulty of making test strips such as photomasks have a significant impact on development and manufacturing processes.

The material of the substrate of the photomask or the liquid crystal filter is quartz or glass, and the surface thereof has a fine pattern to be the subject of the scanning electron microscope. Since the material of this substrate is a dielectric and the breaking phenomenon occurs due to electromagnetic stress, it is necessary to perform the scribe with proper force and position for the breaking.

If the force is small, the mechanical stress cannot accumulate sufficient electromagnetic stress in the sample. Further, if the force is too large, the mechanical stress will be spent on the destruction around the scribe line, and sufficient electromagnetic stress will not remain inside the sample.

In order not to damage the observed portion, it is necessary to skip the portion and injure it. If the traveling direction of the sample stage and the traveling direction of the blade (especially the carbide wheel) are different,
The desired fracture surface cannot be obtained at the skip portion. The scribe line up to the point where the blade rises above the sample and the scribe line after the blade has fallen are not on a straight line, so the skip part does not crack as an extension of the scribe line. Also, the inscribed line is not a straight line,
Meander. The fracture surface along the meandering scribing will not be a clean flat surface.

The present invention solves these problems.
Match the traveling direction of the blade to the traveling direction of the stage,
The purpose is to make it possible to set the blade pressure constant regardless of the thickness of the sample, and to perform a proper scribing with a desired constant blade pressure to easily obtain a clean fracture surface.

[0011]

[Means for Solving the Problems] Means for solving the problems will be described with reference to FIG. In FIG. 1, a scribing rotary blade 1 is a rotating blade for scribing a sample 17.

The scribing blade rotation base 2 rotates the scribing blade 1 with respect to the moving direction of the stage. The scribing blade support 3 rotates around a scribing blade support fulcrum 7.

The pressure arm 4 is used by the scribing rotary blade 1 to press the sample 17 to apply a predetermined blade pressure. The scribing blade support fulcrum 7 is for holding and rotating the scribing rotary blade 1 to move it in the vertical direction.

The position sensor 6 detects the position of the portion B of the pressure arm 4 in the height direction. The scriber blade support fulcrum 7 is a fulcrum for rotating the scriber blade support 3.

The pressure arm support fulcrum 8 is a fulcrum for rotating the pressure arm support 5. The pressure spring 9 applies a force to the portion B of the pressure arm 4.

The cam 12 moves the pressure arm fulcrum 13 up and down. The pressure arm fulcrum 13 is a fulcrum of the pressure arm. The sample 17 is a sample to be injured.

Next, the operation will be described. Rotating blade for scribing 1
A scribing blade support 3 provided on one end of the scribing blade rotation base 2 and rotatably connected to the scribing rotation base 2
The scribing blade support fulcrum at the other end of the scribing blade is moved up and down with respect to the sample 17 as a first fulcrum, and the scribing rotary base 2 is rotated around the scribing blade rotation fulcrum 14 to sample the scribing rotary blade 1. Adjust the scribing direction for 17,
A pressure spring 9 is attached to one end of the pressure arm 4, and a pressure arm fulcrum 13 is provided as a second fulcrum between one end and the other end, and the other end of the pressure spring 9 is provided. The scribing rotary blade 1 is pressed against the sample 17 by force, the position of the other end in the vertical direction is detected by the position sensor 6, and the pressing arm fulcrum 13, which is the second fulcrum, is moved vertically by the cam 12. The portion B of the pressure arm 4 detected by the position sensor 6 is adjusted to be constant, and even if the sample 17 has irregularities, the force for the rotary scribing blade 1 to press the sample 17 is constant. I am trying.

The positions of the pressure spring 9, which is a mechanism for pressurizing, the pressure arm support fulcrum 8, which is the first fulcrum, and the shaving blade support fulcrum 7, which is the second fulcrum, are the same in the vertical direction. It is designed to be installed at the position.

Therefore, the running direction of the blade is made to completely coincide with the running direction of the stage, the blade pressure is set to be constant irrespective of the thickness of the sample 17, and appropriate scribing is performed with a desired constant blade pressure to make a clean break. The cross section can be easily obtained.

[0020]

BEST MODE FOR CARRYING OUT THE INVENTION Next, embodiments and operations of the present invention will be sequentially described in detail with reference to FIGS.

FIG. 1 shows a block diagram of an embodiment of the present invention.
In FIG. 1, a scribing rotary blade 1 is a rotating blade for scribing a sample 17.

The scribing blade rotary base 2 rotates to adjust the scribing rotary blade 1 in the moving direction of the stage 18. The scribing blade support 3 is for rotating the scribing blade rotation base 2 with the scribing blade rotation fulcrum 14 as a fulcrum, and adjusting the scribing blade 1 in the moving direction of the stage 18.

The pressure arm 4 is for applying a predetermined pressure to the scribing rotary blade 1, and as shown in the figure, scribing at the portion A on the left side around the pressure arm fulcrum 13. Rotary blade 1
Then, the pressure is applied to the right side, and the right side portion B is pulled upward by the pressure spring 9.

The pressure arm support 5 holds the pressure arm fulcrum 13 of the pressure arm 4 and rotates about the pressure arm support fulcrum 8. The position sensor 6 detects the vertical position of the portion B of the pressing arm 4.

The scriber blade support fulcrum 7 is a fulcrum for holding and rotating the scriber blade support 3. The pressure arm support fulcrum 8 is a fulcrum for rotating the pressure arm support 5.

The pressing spring 9 pulls the B portion of the pressing arm upward and presses the A portion downward so that the scribing rotary blade 1
It is for applying a predetermined pressure to. Pressure spring base 1
Reference numeral 0 is a base for holding the pressure spring 9.

The spring pressure adjusting motor 11 adjusts the length of the pressure spring 9 to adjust the pulling force by the pressure spring 9, and as a result, the blade pressure that the rotary scribe blade 1 presses against the sample 17 is adjusted. It is for adjustment.

The cam 12 moves the pressing arm fulcrum 13 in the upward or downward direction as shown by the arrow. For example, when the sample 17 is uneven, the pressing arm 4 is automatically moved to the B position. This is for automatically moving and adjusting the pressing arm fulcrum 13 in the vertical direction so that the position of the portion is detected by the position sensor 6 is constant.

The pressure arm fulcrum 13 is a fulcrum of the pressure arm 4. The scribing blade rotation fulcrum 14 is a scribing blade 1
Is a fulcrum for rotating the stage with respect to the moving direction of the stage 18.

The scribing blade direction adjusting screw 15 is a screw for rotating the scribing blade 1 about the scribing blade rotation fulcrum 14 and fixing it at a point aligned with the moving direction of the stage 18.

The pressure arm lifting spring 16 is a spring for lifting the pressure arm 4. The sample 17 is a sample that is scratched and broken, and is, for example, a photomask or a wafer.

The stage 18 fixes the sample 17 and moves it in the direction of the arrow shown. The base 19 is
It is a base that fixes the whole.

Next, the configuration and operation will be described. (1) Scribing blade support fulcrum 7, on the base 19
The pressure arm support fulcrum 8, the position sensor 6, the pressure spring 9, and the pressure spring support are aligned and supported on a vertical line. The stage 18 is placed on the base 19, and the sample 17 is placed on the stage 18. (2) When a rotating carbide blade is used as the scribing blade 1, the scribing blade rotation base 2 for fixing the scribing blade 1 has a scribing blade support 3 and a scribing blade rotation fulcrum 1.
4 to the left and right, and the direction is adjusted by the scribing blade direction adjusting screw 15 (the scribing rotary blade 1 is mounted on the stage 1
Adjust so that it matches the moving direction of 8) and fix. As a result, as the stage 18 moves, the scribing rotary blade 1
Rotates to scratch the sample 17 so that it is completely aligned with the traveling direction of the stage 18. (3) The scribing rotary blade 1 is always lifted upward from the sample 17 by the pressure arm lifting spring 16 (state (a) of FIG. 2). From this suspended state, the pressure arm fulcrum 13 of the pressure arm support 5 is gradually moved by the cam 12 from the pressure arm support fulcrum 8.
When the pressure arm 4 is lowered around the center, the pressure arm 4 is also lowered via the pressure arm fulcrum 13, and due to the pulling force of the pressure spring 9, the portion A of the pressure arm 4 is lowered about the scriber blade support fulcrum 7 as the center of rotation. . At this time, the position of the portion B of the pressurizing arm 4 just above the scriber blade support fulcrum 7 hardly changes (see (b) of FIG. 2 and (c) of FIG. 3). Pressure arm 4
The scribing blade support 3 and the scribing blade rotation base 2 that come into contact with the part A of FIG. The scribing blade rotation base 2 and the scribing blade support 3 are integrated, and when the scribing rotating blade 1 contacts the sample 17, the descending movement of the scribing rotating blade 1 is stopped. At this time the cam 12
The pressure arm support 5 is still descending,
The portion B of the pressure arm 4 starts to descend against the force of the pressure spring 9. The position sensor 6 detects this slight position change,
The downward movement of the cam 12 is stopped. As a result, the pressure spring 9
The force applied by is the blade pressure of the rotary scribing blade 1 against the sample 17 via the pressure arm fulcrum 13.

At this time, the force can be arbitrarily set by the extension amount of the pressure spring 9. The amount of extension can be adjusted by adjusting the position of the other end of the pressure spring 9 attached to the pressure arm 4 by the spring pressure adjustment motor 11 or manually. (4) When the stage 18 is moved in the direction of the arrow in the state of (3), the surface of the sample 17 can be marked with the set predetermined blade pressure without changing the blade pressure due to the thickness of the sample 17. .

Next, a specific description will be given with reference to FIGS. 2 (a) and 2 (b) and FIGS. 3 (c) and 3 (d). FIG. 2A shows a state in which the scribing blade (scribing rotary blade) is raised. In this state, the pressure arm lifting spring 16
Thus, the scribing rotary blade 1 is always lifted upward from the sample 17.

In FIG. 2 (b), the scribing blade (rotating blade for scribing) descends onto the sample 17, and the predetermined scribing blade pressure is applied to the sample 1.
7 shows the state of hanging. As described above, this state is changed from the suspended state of FIG.
When the pressure arm fulcrum 13 of the pressure arm support 5 is gradually lowered by 2 around the pressure arm support fulcrum 8, the pressure arm 4 is also lowered via the pressure arm fulcrum 13 and the pressure spring 9 moves. The pulling force lowers the A portion of the pressing arm 4 around the scriber blade support fulcrum 7 as the center of rotation. Scratching blade support 3 that contacts the A part of the pressure arm 4
The scribing blade rotation base 2 also descends with the scribing blade support fulcrum 7 as the center of rotation. The scribing blade rotating base 2 and the scribing blade support 3 are integrated, and the scribing rotating blade 1 is the sample 17
When it touches, the descending movement of the scribing rotary blade 1 stops.
At this time, the pressing arm support 5 is still lowered by the cam 12, and the portion B of the pressing arm 4 starts to descend against the force of the pressing spring 9. The position sensor 6 detects this slight position change and stops the downward movement of the cam 12. As a result, the force applied by the pressure spring 9 becomes the blade pressure of the rotary scribing blade 1 against the sample 17 via the pressure arm fulcrum 13.

FIG. 3 (c) shows a state in which the scribing blade (scribing rotary blade) descends on the thin sample 17 and a predetermined scribing blade pressure is applied to the sample 17. This state is similar to that of FIG.

FIG. 3D shows a state in which the scribing blade (scribing rotary blade) is scribing on the curve of the sample 17. The stage 18 is running in the direction of the arrow shown in the drawing, and the sample 1
I have just begun to scratch the thicker part of 7. Since the portion A of the pressure arm 4 has risen as the pressure arm fulcrum 13, the portion B of the pressure arm 4 is being amplified by the lever ratio and is just beginning to descend. At this time, the position sensor 6 sends a signal indicating the lowering of the B section to the cam 12, and the cam 12 raises the position of the pressing arm fulcrum 13 until the B section returns to the original position of the position sensor 6 ( Actually, the position of the pressing arm fulcrum 13 is raised corresponding to the change in the thickness of the sample at the micron level by the amplification of the displacement by the lever).

Although the embodiment has been described with reference to FIGS. 1 to 3 using the scribing rotary blade 1, it is not limited to the scribing rotary blade, and a non-rotating blade may be used.

[0040]

As described above, according to the present invention,
Match the traveling direction of the blade to the traveling direction of the stage,
Since the blade pressure is set to be constant regardless of the thickness of the sample 17, a proper fracture can be performed with a desired constant blade pressure to easily obtain a clean fracture surface. As a result, (1) the direction in which the blade rolls is perfectly aligned with the traveling direction of the stage 18, and straight line scribing without meandering is possible. (2) Since the blade pressure can be uniquely set regardless of the thickness of the sample 17, it is possible to easily select an appropriate scribing force and to break it easily.
For example, according to an experiment, a quartz substrate with a thickness of 6.35 mm is about 5
Breaking to × 4 mm was extremely easy even for an amateur.

[Brief description of drawings]

FIG. 1 is a configuration diagram of an embodiment of the present invention.

FIG. 2 is an explanatory diagram (1) of the present invention.

FIG. 3 is an explanatory diagram (2) of the present invention.

[Explanation of symbols]

1: Rotary blade for scribing 2: Scratching blade rotation base 3: Scribing blade support 4: Pressure arm 5: Pressure arm support 6: Position sensor 7: Scribing blade support fulcrum 8: Pressurizing arm support fulcrum 9: Pressure spring 10: Pressure spring base 11: Spring pressure adjusting motor 12: Cam 13: Pressure arm fulcrum 14: Scribing blade rotation fulcrum 15: Scribing blade direction adjustment screw 16: Lifting spring for pressure arm 17: Sample 18: Stage 19: Base

─────────────────────────────────────────────────── ─── Continuation of front page (56) References JP-A-9-113423 (JP, A) Actual development Sho 62-195485 (JP, U) (58) Fields investigated (Int.Cl. ⁷ , DB name) G01N 1/28 JISST file (JOIS)

Claims (4)

(57) [Claims] 1. A scribing device for scribing a sample with a blade, a mechanism for moving a scribing blade up and down with respect to the sample, a mechanism for adjusting a scribing direction with respect to the sample by the blade, A position sensor for detecting the position of the blade in the vertical direction, and a pressure adjusting mechanism for applying a constant force to the scribing blade based on the position detected by the position sensor. Scribing device. 2. A scribing device for scribing a sample with a blade, wherein a scribing blade is provided at one end and the other end is used as a first fulcrum to move up and down with respect to the sample, and the sample by the blade. A mechanism for adjusting the scribing direction with respect to the scissors, and a spring is attached to one end to provide a second fulcrum between the one end and the other end, and the scribing blade is provided with the force of the spring at the other end. And a position sensor for detecting the position of the other end, and a mechanism for vertically moving the position of the second fulcrum so that the position detected by this position sensor is constant. A scribing device characterized by the above. 3. The scoring device according to claim 2, wherein a third fulcrum is provided in which the second fulcrum is connected to an arbitrary position in the vertical direction of the first fulcrum by an arm. 4. The pressurizing mechanism, the first fulcrum, and the second fulcrum are provided at the same arbitrary position in the vertical direction.
The described scribe device.