JP3356585B2 - Magnetic detection element and magnetic head - Google Patents
Magnetic detection element and magnetic headInfo
- Publication number
- JP3356585B2 JP3356585B2 JP12988895A JP12988895A JP3356585B2 JP 3356585 B2 JP3356585 B2 JP 3356585B2 JP 12988895 A JP12988895 A JP 12988895A JP 12988895 A JP12988895 A JP 12988895A JP 3356585 B2 JP3356585 B2 JP 3356585B2
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- Japan
- Prior art keywords
- magnetic
- film
- permeability
- magnetic film
- sliding surface
- Prior art date
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- Measuring Magnetic Variables (AREA)
- Hall/Mr Elements (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、磁界検出を行なう磁気
検出素子、及び磁気記録媒体に記録された磁気記録情報
の再生を行なう磁気ヘッドに関し、特に磁気インピーダ
ンス効果を利用した磁気検出素子および磁気ヘッドに関
するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic detecting element for detecting a magnetic field and a magnetic head for reproducing magnetically recorded information recorded on a magnetic recording medium, and more particularly to a magnetic detecting element and a magnetic element utilizing a magnetic impedance effect. It concerns the head.
【０００２】[0002]
【従来の技術】最近の磁気センサーは、情報機器や計測
・制御機器等の急速な発展に伴い、多様化してきたが、
今後更に小型高精度化が期待されている。2. Description of the Related Art Recent magnetic sensors have been diversified with the rapid development of information devices, measurement and control devices, and the like.
Further miniaturization and high precision are expected in the future.
【０００３】磁気ヘッドの分野ではディジタル磁気記録
機器の小型化が進み、例えば、コンピュータの外部記憶
装置のハードディスクやディジタルオーディオのディジ
タルコンパクトカセット（ＤＣＣ）に於いて、従来の誘
導型の磁気ヘッドではトラック幅及び相対速度の減少に
よるＳ／Ｎの低下が生じるため、再生ヘッドにＭＲ素子
（磁気抵抗効果素子）が使われている。しかし、ＭＲ素
子は媒体の速度依存性が無く、低速での出力の取り出し
に向いているが、抵抗変化率が数％しかないため、将来
の高密度化の為には更に感度の高い素子の開発が望まれ
ている。[0003] In the field of magnetic heads, digital magnetic recording equipment has been miniaturized. For example, in a hard disk of an external storage device of a computer or a digital compact cassette (DCC) of digital audio, a conventional inductive magnetic head uses a track. Since the S / N ratio decreases due to the decrease in the width and the relative speed, an MR element (magnetoresistive element) is used for the reproducing head. However, the MR element has no speed dependence of the medium and is suitable for taking out the output at a low speed. However, since the resistance change rate is only a few%, an element having higher sensitivity is required for higher density in the future. Development is desired.
【０００４】また、磁気エンコーダー等のセンサーの分
野でも着磁媒体の磁化ピッチの縮小により、外部に漏れ
る磁束が極端に小さくなり、ＭＲ素子でも感度不足が問
題となりつつある。Also, in the field of sensors such as magnetic encoders, the magnetic flux leaking to the outside becomes extremely small due to the reduction of the magnetization pitch of the magnetized medium.
【０００５】そこで、最近注目を集めているのが特開平
６−２８１７１２号に開示されているアモルファスワイ
ヤーによる磁気インピーダンス効果（以下、ＭＩ効果と
略す）を利用した素子である。ＭＩ効果とは、磁性体に
ＭＨｚ帯域の高周波電流を流すと外部磁界により磁性体
のインピーダンスが変化し、それにより磁性体の両端の
電圧の振幅が数ガウスの微小磁界で数十％変化する現象
である。Therefore, an element utilizing a magneto-impedance effect (hereinafter, abbreviated as MI effect) using an amorphous wire disclosed in Japanese Patent Application Laid-Open No. 6-281712 has recently attracted attention. The MI effect is a phenomenon in which when a high-frequency current in the MHz band is applied to a magnetic material, the impedance of the magnetic material changes due to an external magnetic field, whereby the amplitude of the voltage at both ends of the magnetic material changes by several tens of% with a small magnetic field of several Gauss. It is.
【０００６】ＭＩ効果を利用した素子の利点は、磁性体
の長さ方向に励磁しないため反磁界の影響が無く素子の
長さを１ｍｍ以下程度に短くでき小型化に適しているこ
と、また、磁束検出の分解能が、ＭＲ素子が０．１Ｏｅ
の低感度に対して、１０-5Ｏｅ程度の高感度が得られる
ことである。また、インピーダンス変化量もＭＲ素子が
３％程度に対し、ＭＩ効果を利用した素子は数１０％オ
ーダーの変化が得られる。The advantage of the element utilizing the MI effect is that the element is not excited in the length direction of the magnetic body and is not affected by a demagnetizing field, so that the element length can be reduced to about 1 mm or less, which is suitable for miniaturization. Magnetic flux detection resolution is 0.1 Oe for MR element
Is to obtain a high sensitivity of about 10 -5 Oe with respect to the low sensitivity. Also, the impedance change amount of the MR element is about 3%, whereas the change utilizing the MI effect is about several tens%.
【０００７】[0007]
【発明が解決しようとする課題】上記ＭＩ効果による素
子の機能はアモルファスワイヤーで見いだされたもので
あり、アモルファスワイヤーは材料として生産性は優れ
ている。しかし、磁気ヘッドの様な微小磁化を扱う場
合、断面が円であることや径が３０ミクロン程度にしか
小さくできないため、誘導型磁気ヘッドの磁気ギャップ
に当たる磁気記録媒体接触部で適切な形状が得られず、
要求されるトラック幅が得られず、ギャップ幅に対応す
る厚さも得られない。The function of the element by the above-mentioned MI effect has been found with an amorphous wire, and the amorphous wire has excellent productivity as a material. However, when dealing with micromagnetization such as a magnetic head, since the cross section is circular and the diameter can be reduced to only about 30 microns, an appropriate shape can be obtained at the magnetic recording medium contact portion corresponding to the magnetic gap of the induction type magnetic head. I ca n’t
The required track width cannot be obtained, and the thickness corresponding to the gap width cannot be obtained.
【０００８】また、図１１に示すように、磁気記録媒体
１１１の微小な磁化は磁束が還流しやすく、ＭＩ効果を
利用した磁気検出素子１１２は媒体１１１に対し垂直に
配置されるので、磁気検出素子１１２の奥に行くに従い
磁束密度が低下する。これにより、素子全体の感度（イ
ンピーダンス変化量）が得られないという問題が生ず
る。素子の長さを短くすれば、素子全体の感度は向上す
るが、インピーダンスそのものの絶対値が小さくなり、
両端電圧またはＬＣ発振回路での出力が低下し、動作も
不安定になってしまう。Further, as shown in FIG. 11, the minute magnetization of the magnetic recording medium 111 easily returns the magnetic flux, and the magnetic detecting element 112 utilizing the MI effect is disposed perpendicularly to the medium 111. The magnetic flux density decreases toward the back of the element 112. This causes a problem that the sensitivity (impedance variation) of the entire device cannot be obtained. If the length of the element is shortened, the sensitivity of the whole element improves, but the absolute value of the impedance itself decreases,
The voltage at both ends or the output of the LC oscillation circuit decreases, and the operation becomes unstable.
【０００９】さらに取り扱いの点でもアモルファスワイ
ヤーは、数１０ミクロンの径では曲がりやすく位置出し
や端子の取り出しなどの作業が困難であり、素子の製造
が容易でないという問題があった。Further, in terms of handling, an amorphous wire having a diameter of several tens of microns is likely to bend, and it is difficult to perform operations such as positioning and taking out a terminal, and there is a problem that it is not easy to manufacture an element.
【００１０】そこで本発明の課題は、ＭＩ効果を利用し
た磁気検出素子及び磁気ヘッドにおいて上記のような問
題を解決し、安定して高い出力が得られ、素子本体の取
り扱い上の問題がなくて製造が容易であり、特に磁気ヘ
ッドでは磁気ギャップに相当する磁性体の媒体接触部で
トラック幅を所望に設定できるとともに、ギャップ幅に
対応する厚さも所望に設定できる構成を提供することに
ある。Accordingly, an object of the present invention is to solve the above-described problems in a magnetic sensing element and a magnetic head utilizing the MI effect, to obtain a high output stably, and to avoid a problem in handling the element body. It is an object of the present invention to provide a configuration which is easy to manufacture, and in which a track width can be set as desired at a medium contact portion of a magnetic material corresponding to a magnetic gap, and a thickness corresponding to the gap width can be set as desired.
【００１１】[0011]
【課題を解決するための手段】上記の課題を解決するた
め、本発明によれば、ＭＩ効果を利用した磁気検出素子
であって、非磁性基板上に高透磁率磁性膜を形成して構
成され、前記高透磁率磁性膜は、磁界検出方向に沿った
複数本の直線部分が所定間隔で平行に並び、順次折り返
すように連結され、電気的に直列接続されたつづら折り
状パターンに形成され、且つ磁化容易軸方向が磁界検出
方向に対し膜面内で垂直な方向になるように磁気異方性
が付けられており、該高透磁率磁性膜の両端部から高周
波電流を印加し外部磁界により前記両端部間に発生する
インピーダンスの変化を電気信号に変換して出力を得ら
れるようにした構成を採用した。According to the present invention, there is provided a magnetic sensing element utilizing the MI effect, comprising a high-permeability magnetic film formed on a non-magnetic substrate. The high permeability magnetic film, a plurality of linear portions along the magnetic field detection direction are arranged in parallel at a predetermined interval, connected so as to be sequentially folded, formed in a zigzag pattern electrically connected in series, Magnetic anisotropy is provided so that the direction of the easy axis of magnetization is perpendicular to the direction of magnetic field detection in the film plane. A high-frequency current is applied from both ends of the high-permeability magnetic film, and an external magnetic field is applied. A configuration is adopted in which a change in impedance generated between the both ends is converted into an electric signal to obtain an output.
【００１２】また、本発明によれば、ＭＩ効果を利用し
た再生用の磁気ヘッドであって、先端面が磁気記録媒体
摺動面として形成された非磁性基板の前記摺動面に対し
略垂直な表面に第１と第２の高透磁率磁性膜を形成して
構成され、第１の高透磁率磁性膜は、前記摺動面から離
間して、前記摺動面に対し垂直な方向に沿った複数本の
直線部分が所定間隔で平行に並び、順次折り返すように
連結され、電気的に直列接続されたつづら折り状パター
ンに形成され、且つ磁化容易軸方向が膜面内で前記摺動
面に略平行な方向になるように磁気異方性が付けられて
おり、第２の高透磁率磁性膜は、前記第１の高透磁率磁
性膜のつづら折り状パターンの前記摺動面側の折り返し
部と絶縁膜を挟んで重なり、前記摺動面まで延びるよう
に形成され、前記第１の高透磁率磁性膜の両端部より高
周波電流を印加し、磁気記録媒体から前記第２の高透磁
率磁性膜を介して前記第１の高透磁率磁性膜に印加され
る磁界により前記第１の高透磁率磁性膜の両端部間に発
生するインピーダンスの変化を電気信号に変換して再生
出力を得られるようにした構成を採用した。Further, according to the present invention, there is provided a reproducing magnetic head utilizing the MI effect, wherein a front end surface is substantially perpendicular to the sliding surface of a non-magnetic substrate formed as a sliding surface of a magnetic recording medium. The first and second high permeability magnetic films are formed on an appropriate surface, and the first high permeability magnetic film is separated from the sliding surface and is perpendicular to the sliding surface. A plurality of linear portions are arranged in parallel at a predetermined interval, are connected so as to be sequentially folded, are formed in a serpentine pattern electrically connected in series, and the direction of the axis of easy magnetization is the sliding surface in the film plane. The second high magnetic permeability magnetic film is formed by folding the first high magnetic permeability magnetic film on the sliding surface side in the serpentine pattern of the first high magnetic permeability magnetic film. Part and an insulating film sandwiched therebetween, formed to extend to the sliding surface, the A high-frequency current is applied from both ends of the first high-permeability magnetic film, and the magnetic field is applied to the first high-permeability magnetic film from the magnetic recording medium via the second high-permeability magnetic film. In this configuration, a change in impedance generated between both ends of the high-permeability magnetic film is converted into an electric signal to obtain a reproduction output.
【００１３】[0013]
【作用】上記本発明の磁気検出素子の構成によれば、素
子本体としての高透磁率磁性膜をつづら折り状パターン
とすることで、ＭＩ効果の感度を上げるために素子本体
の磁界検出方向の長さを短くしても、インピーダンスの
絶対値を稼ぐことができ、安定した高い出力が得られ
る。According to the structure of the magnetic sensing element of the present invention, the high magnetic permeability magnetic film as the element body is formed into a zigzag pattern, so that the length of the element body in the magnetic field detecting direction can be increased in order to increase the sensitivity of the MI effect. Even if the length is shortened, the absolute value of the impedance can be obtained, and a stable high output can be obtained.
【００１４】また、素子本体は非磁性基板上に成膜され
た高透磁率磁性膜からなるので、アモルファスワイヤー
の様な取り扱い上の問題はない。Further, since the element body is made of a high-permeability magnetic film formed on a non-magnetic substrate, there is no problem in handling like an amorphous wire.
【００１５】また、上記本発明の磁気ヘッドの構成によ
れば、上記本発明の磁気検出素子と同様の作用により安
定した高い出力が得られる。また、媒体摺動面に露出す
る第２の高透磁率磁性膜の端部の幅と厚さの設定によ
り、トラック幅とギャップ幅に対応する寸法を所望に設
定できる。Further, according to the configuration of the magnetic head of the present invention, a stable and high output can be obtained by the same operation as that of the magnetic detecting element of the present invention. Further, by setting the width and thickness of the end of the second high permeability magnetic film exposed on the medium sliding surface, dimensions corresponding to the track width and the gap width can be set as desired.
【００１６】[0016]
【実施例】以下、図を参照して本発明の実施例を説明す
る。なお、各実施例の図において共通ないし対応する部
分には共通の符号を付してある。第２実施例以下で第１
実施例と共通の部分の説明は省略する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. In the drawings of the embodiments, common or corresponding parts are denoted by common reference numerals. First in the second embodiment and below
The description of the parts common to the embodiment is omitted.
【００１７】［第１実施例］図１〜図３は本発明の第１
実施例として、ＭＩ効果を利用した磁気検出素子の実施
例を説明するもので、まず図１は素子全体の構造を示し
ている。[First Embodiment] FIGS. 1 to 3 show a first embodiment of the present invention.
As an embodiment, an embodiment of a magnetic sensing element utilizing the MI effect will be described. First, FIG. 1 shows the entire structure of the element.
【００１８】図１において、１０は非磁性基板であり、
チタン酸カルシウム（Ｔｉ−Ｃａ系セラミック）、酸化
物ガラス、チタニア、アルミナ等で形成される。In FIG. 1, reference numeral 10 denotes a nonmagnetic substrate;
It is formed of calcium titanate (Ti-Ca based ceramic), oxide glass, titania, alumina, or the like.
【００１９】非磁性基板１０の上面に、磁気検出素子本
体として、つづら折り状パターンの高透磁率磁性膜（以
下、磁性膜と略す）１２がＦｅ−Ｃｏ−Ｂ系アモルファ
ス、Ｆｅ−Ｃ系、Ｆｅ−Ｎ系の微結晶膜等の磁性膜とし
て真空成膜技術により形成されている。磁性膜１２の厚
さは薄すぎるとＭＩ効果が低下し、また厚すぎるとイン
ピーダンスが低下するため１μｍ〜２０μｍの間で設定
するのがよい。On the upper surface of the non-magnetic substrate 10, as a magnetic sensing element body, a high permeability magnetic film (hereinafter abbreviated as “magnetic film”) 12 in a serpentine pattern is made of Fe—Co—B amorphous, Fe—C, It is formed by a vacuum film forming technique as a magnetic film such as a -N based microcrystalline film. If the thickness of the magnetic film 12 is too small, the MI effect is reduced. If the thickness is too large, the impedance is reduced.
【００２０】磁性膜１２のつづら折り状パターンは、図
２に示すように、検出対象の外部磁界Ｈexが印加される
方向である磁界検出方向に沿った複数本の所定長の直線
部分が所定間隔で平行に並び、順次折り返すように隣り
合う直線部分の端部が折り返し部１２Ｃ，１２Ｄとして
垂直に屈曲して連結され、全体として電気的に直列接続
されたパターンとなっている。そのパターンの両端には
長方形の端子部１２Ａ，１２Ｂが形成されている。As shown in FIG. 2, the serpentine pattern of the magnetic film 12 includes a plurality of linear portions having a predetermined length at predetermined intervals along a magnetic field detection direction in which an external magnetic field Hex to be detected is applied. The ends of the adjacent linear portions that are arranged in parallel and are sequentially folded are bent and connected vertically as folded portions 12C and 12D, so that the pattern is electrically connected in series as a whole. Rectangular terminals 12A and 12B are formed at both ends of the pattern.
【００２１】また磁性膜１２は、磁化容易軸方向が外部
磁界Ｈexの印加される磁界検出方向に対し膜面内で垂直
な方向である図１中の矢印Ｂ方向になるように、成膜後
の磁場中冷却等により磁気異方性をつけておく。The magnetic film 12 is formed after the film is formed so that the direction of the axis of easy magnetization is in the direction of arrow B in FIG. 1 which is a direction perpendicular to the magnetic field detection direction to which the external magnetic field Hex is applied in the film plane. Magnetic anisotropy is provided by cooling in a magnetic field.
【００２２】このような構成で、外部磁界Ｈexの検出時
には、磁性膜１２に対し両端の端子部１２Ａ，１２Ｂか
ら高周波電流を印加する。外部磁界Ｈexの強さに応じて
端子部１２Ａ，１２Ｂ間のインピーダンスが変化し、こ
の変化を電気信号に変換して出力が得られるようになっ
ている。With such a configuration, when the external magnetic field Hex is detected, a high-frequency current is applied to the magnetic film 12 from the terminal portions 12A and 12B at both ends. The impedance between the terminals 12A and 12B changes according to the strength of the external magnetic field Hex, and the change is converted into an electric signal to obtain an output.
【００２３】ここで磁性膜１２のつづら折り状のパター
ンでは、図１のＡ−Ａ’線に沿う断面である図３に示す
とおり、隣り合うパターン直線部１２１，１２２，１２
３に流れる電流は図の矢印の通り交互に逆方向となり、
パターン直線部のそれぞれの周囲に発生する磁界は符号
１３Ａ〜１３Ｃで示す様になる。この磁界は磁性膜１２
内に還流磁束を形成し、素子のインダクタンスを形成す
る。パターン直線部の間隔Ｄｍを狭くしても磁界１３Ａ
〜１３Ｃ間の干渉等の悪影響はほとんど無く、所定のイ
ンダクタンスを得るためにパターン直線部の幅Ｗｐ、厚
さｔｍとともに自由に選択できる。Here, in the serpentine pattern of the magnetic film 12, as shown in FIG. 3, which is a cross section taken along the line AA 'in FIG. 1, the adjacent pattern linear portions 121, 122, 12
The current flowing in 3 alternates in the opposite direction as shown by the arrow in the figure.
The magnetic fields generated around each of the pattern linear portions are as shown by reference numerals 13A to 13C. This magnetic field is applied to the magnetic film 12
A return magnetic flux is formed therein to form an inductance of the element. 13 A magnetic field even if the distance Dm between the linear portions of the pattern is reduced
There is almost no adverse effect such as interference between .about.13C and can be freely selected along with the width Wp and the thickness tm of the pattern linear portion in order to obtain a predetermined inductance.
【００２４】つづら折り状パターンにより断面積が小さ
くなることで単位体積あたりのインダクタンスが増加す
ることと、つづら折りによる総延長を稼ぐ効果より、素
子本体の全体としての磁界検出方向の長さが短くても大
きなインダクタンスを稼ぐことが可能となり、インピー
ダンスの絶対値を稼ぐことが可能となる。また、素子本
体の磁界検出方向の長さをほとんどＭＲ素子並に短くで
き、微小磁化に対し優れたＭＩ効果を発揮できる。Due to the fact that the inductance per unit volume increases due to the reduced cross-sectional area due to the serpentine pattern and the effect of increasing the total extension due to the serpentine folding, even if the length of the element body as a whole in the magnetic field detection direction is short, A large inductance can be obtained, and an absolute value of the impedance can be obtained. Further, the length of the element body in the magnetic field detection direction can be almost shortened to the same level as that of the MR element, and an excellent MI effect can be exhibited with respect to minute magnetization.
【００２５】次に以上のような本実施例の磁気検出素子
を試作し、特性を試験した結果を述べる。磁性膜１２は
Ｆｅ−Ｔａ−Ｃ系磁性膜とし、つづら折りの回数７回、
パターン直線部の幅１０μｍ、厚さ５μｍ、パターン直
線部の間隔１０μｍ、直線部の長さ０．２ｍｍとして形
成した。インピーダンスの測定は、磁性膜１２の両端よ
り１００ＭＨｚの高周波電流を流し、両端電圧の変化を
調べた。外部磁界はヘルムホルツコイルで印加し、±２
５Ｏｅの範囲で変化させた。Next, the results of a trial production of the magnetic sensing element of the present embodiment as described above and a test of its characteristics will be described. The magnetic film 12 is a Fe—Ta—C based magnetic film, and has a meandering frequency of 7 times.
The width of the pattern linear portion was 10 μm, the thickness was 5 μm, the interval between the pattern linear portions was 10 μm, and the length of the linear portion was 0.2 mm. The impedance was measured by applying a high-frequency current of 100 MHz from both ends of the magnetic film 12 and examining the change in the voltage at both ends. The external magnetic field is applied by a Helmholtz coil, ± 2
It was changed in the range of 5 Oe.
【００２６】結果は、まず１００ＭＨｚのインダクタン
スＬが５８ｎＨあり、その時のＱ値は５．５であった。
これに対し従来の径３０μｍのＦｅ−Ｃｏ−Ｂアモルフ
ァスワイヤーの場合は１ｍｍの長さでＬ４５ｎＨ、Ｑ
５．８であり、本実施例の素子では長さが０．２ｍｍと
短いながら、Ｌ，Ｑ共に高い数値が得られた。インピー
ダンスの変化量も本実施例の素子は外部磁界Ｈex＝８Ｏ
ｅで６２％の変化を示し、良好な変化を示した。As a result, first, the inductance L at 100 MHz was 58 nH, and the Q value at that time was 5.5.
On the other hand, in the case of a conventional Fe—Co—B amorphous wire having a diameter of 30 μm, a length of 1 mm and L45 nH, Q
In the device of this example, although the length was as short as 0.2 mm, high values were obtained for both L and Q. The amount of change in the impedance of the element of this embodiment is also the external magnetic field Hex = 80.
e showed a 62% change, indicating a good change.
【００２７】このようにして本実施例の磁気検出素子で
は安定して高い出力が得られる。また、素子本体は磁性
膜であるので、アモルファスワイヤーの場合のような取
り扱い上の問題がなく、素子の製造が容易となり、１個
のブロックから１度に多数個の素子を得る多数個取りも
可能であり、安価に製造できる。In this way, a high output can be obtained stably in the magnetic sensing element of this embodiment. In addition, since the element body is a magnetic film, there is no problem in handling as in the case of an amorphous wire, and the manufacture of the element is easy, and a large number of elements can be obtained from one block at a time. Possible and inexpensive to manufacture.
【００２８】［第２実施例］次に図４は第２実施例の磁
気検出素子の構造を示している。本実施例では、第１実
施例と同様に非磁性基板１０上につづら折り状パターン
の磁性膜１２を形成した上に、その端子部に１２Ａ，１
２Ｂと折り返し部１２Ｃ，１２Ｄ上にＣｕ，Ａｕ膜等の
導電膜１８Ａ〜１８Ｄを形成している。[Second Embodiment] FIG. 4 shows the structure of a magnetic sensing element according to a second embodiment. In the present embodiment, as in the first embodiment, a magnetic film 12 having a zigzag pattern is formed on a non-magnetic substrate 10, and 12A, 1
Conductive films 18A to 18D such as Cu and Au films are formed on 2B and folded portions 12C and 12D.
【００２９】このような構造によれば、導電膜１８Ａ〜
１８Ｄによって端子部１２Ａ，１２Ｂと折り返し部１２
Ｃ，１２Ｄの磁気インピーダンス効果を消し、外部磁界
Ｈexが印加される磁界検出方向に沿ったパターン直線部
のみの磁界検出機能を使用し、磁界検出方向の磁気イン
ピーダンス効果を忠実に引き出し、検出感度を上げるこ
とができる。According to such a structure, the conductive films 18A to 18A
18D, the terminal portions 12A and 12B and the folded portion 12
The magnetic impedance effect of C and 12D is eliminated, and the magnetic field effect of only the linear portion of the pattern along the magnetic field detection direction to which the external magnetic field Hex is applied is used. Can be raised.
【００３０】［第３実施例］次に図５は第３実施例の磁
気検出素子の構造を示している。本実施例では、第１実
施例と同様に非磁性基板１０上につづら折り状パターン
の磁性膜１２を形成した上に、つづら折り状パターンの
隙間のそれぞれに直線状の高透磁率磁性膜２０を形成し
ている。[Third Embodiment] FIG. 5 shows the structure of a magnetic sensing element according to a third embodiment. In the present embodiment, as in the first embodiment, a magnetic film 12 having a serpentine pattern is formed on a non-magnetic substrate 10 and a linear high magnetic permeability magnetic film 20 is formed in each gap of the serpentine pattern. are doing.
【００３１】このような構造によれば、外部磁界Ｈexの
印加方向の素子本体全体の磁気抵抗を下げ、外部磁界Ｈ
exの検出感度を上げることができる。なお、本実施例の
つづら折り状パターンの隙間に直線状の磁性膜２０を配
する構造を第２実施例の構造に適用してもよい。According to such a structure, the magnetic resistance of the entire element body in the direction of application of the external magnetic field Hex is reduced, and the external magnetic field Hex is reduced.
ex detection sensitivity can be increased. The structure in which the linear magnetic film 20 is disposed in the gap between the serpentine patterns of the present embodiment may be applied to the structure of the second embodiment.
【００３２】［第４実施例］次に、第４実施例として、
第１実施例の構成を変更して再生用の磁気ヘッドとした
実施例を図６〜図１０により説明する。[Fourth Embodiment] Next, as a fourth embodiment,
An embodiment in which the configuration of the first embodiment is changed to a magnetic head for reproduction will be described with reference to FIGS.
【００３３】図６，図７に示す磁気ヘッドの構成におい
て、非磁性基板１０の先端面１０Ａは、不図示の磁気記
録媒体が矢印で示す図中上方向に摺動する媒体摺動面と
して形成される。その基板１０の媒体摺動面１０Ａに垂
直な表面において前述のつづら折り状パターンの磁性膜
１２が第１の高透磁率磁性膜として媒体摺動面１０Ａか
ら離間して形成されている。磁性膜１２のつづら折り状
パターンの向きは、所定間隔で複数本平行に並ぶパター
ン直線部が媒体摺動面１０Ａに対し垂直になる向きにさ
れている。また、磁性膜１２は、磁化容易軸方向が図６
中矢印Ｂで示すように膜面内で媒体摺動面１０Ａに平行
になるように磁気異方性が付けられている。In the configuration of the magnetic head shown in FIGS. 6 and 7, the front end face 10A of the non-magnetic substrate 10 is formed as a medium sliding surface on which a magnetic recording medium (not shown) slides upward in the figure as indicated by an arrow. Is done. On the surface of the substrate 10 perpendicular to the medium sliding surface 10A, the above-mentioned serpentine-shaped pattern magnetic film 12 is formed as a first high magnetic permeability magnetic film at a distance from the medium sliding surface 10A. The orientation of the serpentine pattern of the magnetic film 12 is such that a plurality of pattern linear portions arranged in parallel at predetermined intervals are perpendicular to the medium sliding surface 10A. The magnetic film 12 has an easy axis direction of magnetization as shown in FIG.
Magnetic anisotropy is provided so as to be parallel to the medium sliding surface 10A in the film plane as shown by the middle arrow B.
【００３４】一方、磁性膜１２のつづら折り状パターン
の媒体摺動面１０Ａ側の折り返し部１２Ｃの下に、Ｓｉ
Ｏ2，Ｃｒ2Ｏ3等の酸化物の絶縁膜１４を挟んで第２の
高透磁率磁性膜１６が重なるように形成されており、磁
性膜１２に対し磁気的に接続され、電気的には絶縁膜１
４により絶縁されている。そして磁性膜１６は折り返し
部１２Ｃの下から媒体摺動面１０Ａの縁まで延び、先端
が媒体摺動面１０Ａに露出するように形成されており、
この先端に対し不図示の磁気記録媒体がその膜面に垂直
な図中上方向に摺動する。On the other hand, under the folded portion 12C on the medium sliding surface 10A side of the serpentine pattern of the magnetic film 12, Si
A second high-permeability magnetic film 16 is formed so as to overlap with an insulating film 14 of an oxide such as O 2 , Cr 2 O 3 or the like, is magnetically connected to the magnetic film 12, and is electrically connected to the magnetic film 12. Is the insulating film 1
4 insulated. The magnetic film 16 extends from under the folded portion 12C to the edge of the medium sliding surface 10A, and is formed such that the tip is exposed on the medium sliding surface 10A.
A magnetic recording medium (not shown) slides in the upward direction in the drawing perpendicular to the film surface with respect to this tip.
【００３５】磁性膜１６は、磁気記録媒体の記録磁化の
磁界を磁性膜１２へ導くためのものである。磁性膜１６
としては、センダスト，パーマロイ，アモルファス，Ｆ
ｅ−Ｎ系またはＦｅ−Ｃ系の微結晶膜等が採用される。
媒体摺動面１０Ａに露出する磁性膜１６の先端部の厚さ
は誘導型磁気ヘッドの磁気ギャップのギャップ幅に相当
する。また、磁性膜１６の先端部の幅Ｗｔはトラック幅
となるが、第１の磁性膜１２と重なる接続部の幅Ｗｍよ
り絞り込まれている。The magnetic film 16 is for guiding the magnetic field of the recording magnetization of the magnetic recording medium to the magnetic film 12. Magnetic film 16
Are sendust, permalloy, amorphous, F
An e-N-based or Fe-C-based microcrystalline film or the like is employed.
The thickness of the tip of the magnetic film 16 exposed on the medium sliding surface 10A corresponds to the gap width of the magnetic gap of the induction type magnetic head. Further, the width Wt of the tip portion of the magnetic film 16 becomes the track width, but is narrowed down from the width Wm of the connection portion overlapping the first magnetic film 12.
【００３６】また、図７の断面図に示す第１と第２の磁
性膜１２，１６の重なる接続部の幅Ｗｇは、接続部のギ
ャップの磁気抵抗増加と第１の磁性膜１２の折り返し部
１２Ｃで不要なインピーダンスが生じないように決定さ
れ、０〜１００μｍの範囲で選択する。The width Wg of the overlapping portion of the first and second magnetic films 12 and 16 shown in the cross-sectional view of FIG. 7 is determined by the increase in the magnetic resistance of the gap of the connecting portion and the folded portion of the first magnetic film 12. It is determined so that unnecessary impedance does not occur at 12C, and is selected in the range of 0 to 100 μm.
【００３７】なお、図６，図７では磁性膜１６が磁性膜
１２の折り返し部１２Ｃの下に重なっているが、上に重
なるようにしても機能としては何ら問題は無い。In FIGS. 6 and 7, the magnetic film 16 overlaps below the folded portion 12C of the magnetic film 12, but there is no problem in function even if it overlaps above.
【００３８】また、磁性膜１２，１６間の絶縁膜１４の
厚さは、下限は絶縁効果の得られる０．０５μｍとし、
磁性膜１２，１６の接続部の磁気抵抗が大きくならない
１μｍの厚さを上限として選択するのが好ましい。The lower limit of the thickness of the insulating film 14 between the magnetic films 12 and 16 is 0.05 μm at which the insulating effect can be obtained.
It is preferable to select a thickness of 1 μm as an upper limit so that the magnetic resistance of the connection between the magnetic films 12 and 16 does not increase.
【００３９】このような構成のもとに、再生時には、不
図示の磁気記録媒体が媒体摺動面１０Ａに対し摺動する
とともに、第１の磁性膜１２に対し両端の端子部１２
Ａ，１２Ｂから高周波電流が印加される。そして磁気記
録媒体の記録磁化の磁界が第２の磁性膜１６を介して第
１の磁性膜１２に印加され、その磁界により磁性膜１２
の端子部１２Ａ，１２Ｂ間のインピーダンスが変化し、
この変化を電気信号に変換して再生出力が得られるよう
になっている。Under such a configuration, at the time of reproduction, a magnetic recording medium (not shown) slides on the medium sliding surface 10A and the terminal portions 12 at both ends with respect to the first magnetic film 12.
A and 12B apply a high-frequency current. Then, the magnetic field of the recording magnetization of the magnetic recording medium is applied to the first magnetic film 12 via the second magnetic film 16 and the magnetic field
The impedance between the terminal portions 12A and 12B changes,
This change is converted into an electric signal to obtain a reproduction output.
【００４０】そして第１実施例と同様の作用により本実
施例の磁気ヘッドは高感度かつインピーダンスを稼ぐこ
とができ、安定した高い再生出力が得られる。また、同
様に製造が容易であり、多数個取りも可能である。By the same operation as in the first embodiment, the magnetic head of this embodiment can obtain high sensitivity and high impedance, and can obtain a stable and high reproduction output. In addition, it is also easy to manufacture, and it is possible to take many pieces.
【００４１】なお、媒体摺動面１０Ａに露出する第２の
磁性膜１６は絶縁膜１４により第１の磁性膜１２と絶縁
されているので、第１の磁性膜１２に印加される高周波
電流が第２の磁性膜１６を介して媒体側に流出する心配
は無い。Since the second magnetic film 16 exposed on the medium sliding surface 10A is insulated from the first magnetic film 12 by the insulating film 14, the high-frequency current applied to the first magnetic film 12 There is no risk of flowing out to the medium side via the second magnetic film 16.
【００４２】また、本実施例の磁気ヘッドでは、媒体摺
動面１０Ａに露出する磁性膜１６の先端の幅Ｗｔの設定
によりトラック幅を所望に設定できる。また、誘導型磁
気ヘッドのギャップ幅に対応する磁性膜１６の媒体摺動
面１０Ａに露出する先端部の厚さも所望に設定できる。
例えば、図８に示す様に、磁性膜１６の媒体摺動面１０
Ａに露出する先端部の厚さＴｇを第１の磁性膜１２に重
なる残りの部分の厚さＴｍより薄くすることでギャップ
幅に対応する厚さを薄くし、微小磁化に対する形状ロス
を改善する事も可能である。In the magnetic head of this embodiment, the track width can be set as desired by setting the width Wt of the tip of the magnetic film 16 exposed on the medium sliding surface 10A. In addition, the thickness of the tip of the magnetic film 16 exposed on the medium sliding surface 10A corresponding to the gap width of the induction type magnetic head can be set as desired.
For example, as shown in FIG.
By making the thickness Tg of the tip exposed to A thinner than the thickness Tm of the remaining portion overlapping the first magnetic film 12, the thickness corresponding to the gap width is reduced, and the shape loss with respect to minute magnetization is improved. Things are also possible.
【００４３】なお、媒体摺動面１０Ａに対し垂直な方向
の第１の磁性膜１２のパターン直線部の長さが短い場合
には、磁性膜１２内の反磁界が大きくなり感度の低下が
生ずる場合が考えられる。その場合は、図９に示すとお
り、第３の高透磁率磁性膜２２を、磁性膜１２の媒体摺
動面と反対側の折り返し部１２Ｄと端子部１２Ａ，１２
Ｂの下に不図示の絶縁膜を挟んで重なり、媒体摺動面と
反対側に延びるように形成することで改善できる。When the length of the pattern linear portion of the first magnetic film 12 in the direction perpendicular to the medium sliding surface 10A is short, the demagnetizing field in the magnetic film 12 becomes large and the sensitivity is reduced. The case is conceivable. In this case, as shown in FIG. 9, the third high-permeability magnetic film 22 is formed by folding the magnetic film 12 with the folded portion 12D and the terminal portions 12A and 12A opposite to the medium sliding surface.
B can be improved by forming an insulating film (not shown) that overlaps below B and extends so as to extend on the side opposite to the medium sliding surface.
【００４４】また、第１の磁性膜１２，第２の磁性膜１
６，絶縁膜１４からなる素子本体を図１０に示すように
非磁性基板１０の表面に複数並設することによりマルチ
トラックヘッドも容易に構成できる。この場合、隣り合
う素子本体どうしの対向面積が非常に小さいためクロス
トークを防止することができる。Further, the first magnetic film 12 and the second magnetic film 1
6, a multi-track head can be easily configured by arranging a plurality of element bodies composed of the insulating film 14 on the surface of the non-magnetic substrate 10 as shown in FIG. In this case, cross-talk can be prevented because the opposing area between adjacent element bodies is very small.
【００４５】[0045]
【発明の効果】以上の説明から明らかなように、本発明
の磁気検出素子によれば、非磁性基板上に素子本体とし
て高透磁率磁性膜をつづら折り状パターンに形成するこ
とで、素子本体全体の磁界検出方向の長さを短くしても
インピーダンスの絶対値を確保することができ、微小磁
化に対する素子本体のインピーダンス変化効率も向上さ
せることができ、安定した高い出力が得られる。また、
従来のアモルファスワイヤーが微小磁化に対応できなか
った断面形状、取り扱い上の問題は解消でき、製造が容
易であり、多数個取りも可能で安価に提供できる。また
素子本体の磁界検出方向の長さをほとんどＭＲ素子なみ
に短くできることで、微小磁化に対しても優れたＭＩ効
果を発揮でき、ＭＲ素子に代わり新しい用途を拡大でき
る。As is clear from the above description, according to the magnetic sensing element of the present invention, the high magnetic permeability magnetic film is formed in a zigzag pattern on the non-magnetic substrate as the element main body, so that the entire element main body is formed. Even if the length of the magnetic field detection direction is shortened, the absolute value of the impedance can be secured, the efficiency of impedance change of the element body with respect to minute magnetization can be improved, and a stable and high output can be obtained. Also,
Problems with the cross-sectional shape and handling of the conventional amorphous wire that could not cope with the minute magnetization can be solved, manufacturing is easy, multi-piece manufacturing is possible, and it can be provided at low cost. In addition, since the length of the element body in the magnetic field detection direction can be almost as short as that of the MR element, an excellent MI effect can be exhibited even for minute magnetization, and new applications can be expanded in place of the MR element.
【００４６】また、本発明の磁気ヘッドによれば、非磁
性基板の磁気記録媒体摺動面に対し略垂直な表面に第１
と第２の高透磁率磁性膜を形成して構成され、第１の高
透磁率磁性膜は媒体摺動面から離間してつづら折り状パ
ターンに形成され、第２の高透磁率磁性膜は第１の高透
磁率磁性膜のつづら折り状パターンの媒体摺動面側の折
り返し部と絶縁膜を挟んで重なり、媒体摺動面まで延び
るように形成された構成により、本発明の磁気検出素子
と同様に安定した高い再生出力が得られ、製造も容易で
多数個取りも可能であり、安価に提供できる。またマル
チヘッド化も容易である。さらに、媒体摺動面に露出す
る第２の高透磁率磁性膜の端部の幅と厚さの設定により
トラック幅とギャップ幅に対応する寸法を所望に設定で
き、応用範囲が広いという優れた効果が得られる。Further, according to the magnetic head of the present invention, the first surface of the non-magnetic substrate is substantially perpendicular to the sliding surface of the magnetic recording medium.
And a second high-permeability magnetic film are formed. The first high-permeability magnetic film is formed in a zigzag pattern away from the medium sliding surface, and the second high-permeability magnetic film is formed of the second high-permeability magnetic film. 1 has a configuration in which the folded portion on the medium sliding surface side of the serpentine pattern of the high-permeability magnetic film overlaps with the insulating film interposed therebetween and extends to the medium sliding surface. In addition, a stable and high reproduction output can be obtained, the production is easy, a large number of pieces can be obtained, and the apparatus can be provided at a low cost. Also, it is easy to form a multi-head. Furthermore, the dimensions corresponding to the track width and the gap width can be set as desired by setting the width and thickness of the end portion of the second high magnetic permeability magnetic film exposed on the medium sliding surface, and the excellent application range is wide. The effect is obtained.
【図１】本発明の第１実施例の磁気検出素子の構造を示
す斜視図である。FIG. 1 is a perspective view showing the structure of a magnetic sensing element according to a first embodiment of the present invention.
【図２】同素子の本体の高透磁率磁性膜のつづら折り状
パターンを示す平面図である。FIG. 2 is a plan view showing a serpentine pattern of a high-permeability magnetic film of a main body of the element.
【図３】同素子の駆動時におけるつづら折り状パターン
の直線部における電流と磁界の様子を示す説明図であ
る。FIG. 3 is an explanatory diagram showing a state of a current and a magnetic field in a linear portion of a serpentine pattern when the device is driven.
【図４】第２実施例の磁気検出素子の構造を示す平面図
である。FIG. 4 is a plan view illustrating a structure of a magnetic sensing element according to a second embodiment.
【図５】第３実施例の磁気検出素子の構造を示す平面図
である。FIG. 5 is a plan view showing the structure of a magnetic sensing element according to a third embodiment.
【図６】第４実施例の磁気ヘッドの構造を示す斜視図で
ある。FIG. 6 is a perspective view showing the structure of a magnetic head according to a fourth embodiment.
【図７】同磁気ヘッドの媒体摺動面側の端部の断面図で
ある。FIG. 7 is a sectional view of an end of the magnetic head on the side of the medium sliding surface.
【図８】同磁気ヘッドにおいて媒体摺動面に露出する第
２の高透磁率磁性膜の先端部の厚さを薄くした場合を示
す断面図である。FIG. 8 is a cross-sectional view showing a case where the thickness of the tip of the second high magnetic permeability magnetic film exposed on the medium sliding surface in the magnetic head is reduced.
【図９】同磁気ヘッドの変形例を示す斜視図である。FIG. 9 is a perspective view showing a modification of the magnetic head.
【図１０】同磁気ヘッドをマルチトラック化した場合を
示す斜視図である。FIG. 10 is a perspective view showing a case where the magnetic head is multi-tracked.
【図１１】従来の問題点を説明するもので、磁気検出素
子に対する磁気記録媒体の微小磁化からの磁束の印加の
様子を示す説明図である。FIG. 11 is a diagram for explaining a conventional problem and showing how a magnetic flux is applied from a minute magnetization of a magnetic recording medium to a magnetic detecting element.
１０ 非磁性基板 １２ 高透磁率磁性膜 １２Ａ，１２Ｂ 端子部 １２Ｃ，１２Ｄ 折り返し部 １２１〜１２３ パターン直線部 １４ 絶縁膜 １６ 高透磁率磁性膜 １８Ａ〜１８Ｄ 導電膜 ２０ 高透磁率磁性膜 DESCRIPTION OF SYMBOLS 10 Non-magnetic substrate 12 High magnetic permeability magnetic film 12A, 12B Terminal part 12C, 12D Folding part 121-123 Pattern linear part 14 Insulating film 16 High magnetic permeability magnetic film 18A-18D Conductive film 20 High magnetic permeability magnetic film
フロントページの続き (56)参考文献 特開 平８−75835（ＪＰ，Ａ) 特開 平８−285930（ＪＰ，Ａ) 特開 平８−320362（ＪＰ，Ａ) 特開 平６−281712（ＪＰ，Ａ) 特開 平４−102215（ＪＰ，Ａ) 特開 平３−30108（ＪＰ，Ａ) 電気学会マグネティクス研究会資料, 1994年，ＭＡＧ−94−222，ｐｐ．35− 44 (58)調査した分野(Int.Cl.7，ＤＢ名) H01L 43/00 G01R 33/09 G11B 5/33 ＪＩＣＳＴファイル（ＪＯＩＳ)Continuation of the front page (56) References JP-A-8-75835 (JP, A) JP-A-8-285930 (JP, A) JP-A 8-320362 (JP, A) JP-A-6-281712 (JP) , A) JP-A-4-102215 (JP, A) JP-A-3-30108 (JP, A) Materials of the Institute of Magnetics, IEICE, 1994, MAG-94-222, pp. 35-44 (58) Fields surveyed (Int. Cl. 7 , DB name) H01L 43/00 G01R 33/09 G11B 5/33 JICST file (JOIS)
Claims (11)
検出素子であって、 非磁性基板上に高透磁率磁性膜を形成して構成され、 前記高透磁率磁性膜は、磁界検出方向に沿った複数本の
直線部分が所定間隔で平行に並び、順次折り返すように
連結され、電気的に直列接続されたつづら折り状パター
ンに形成され、且つ磁化容易軸方向が磁界検出方向に対
し膜面内で垂直な方向になるように磁気異方性が付けら
れており、 該高透磁率磁性膜の両端部から高周波電流を印加し外部
磁界により前記両端部間に発生するインピーダンスの変
化を電気信号に変換して出力を得られるようにしたこと
を特徴とする磁気検出素子。1. A magnetic sensing element utilizing a magnetic impedance effect, comprising a high-permeability magnetic film formed on a non-magnetic substrate, wherein the high-permeability magnetic film includes a plurality of magnetic films arranged along a magnetic field detection direction. The straight line portions of the book are arranged in parallel at a predetermined interval, are connected so as to be sequentially folded, are formed in a serpentine pattern electrically connected in series, and the direction of the easy axis of magnetization is perpendicular to the magnetic field detection direction in the film plane. A high-frequency magnetic current is applied from both ends of the high-permeability magnetic film to convert an impedance change generated between the both ends by an external magnetic field into an electric signal. A magnetic detecting element characterized in that an output can be obtained.
０μｍであることを特徴とする請求項１に記載の磁気検
出素子。2. The high-permeability magnetic film has a thickness of 1 μm to 2 μm.
The magnetic sensing element according to claim 1, wherein the thickness is 0 µm.
ーンの折り返し部上に導電膜を設けたことを特徴とする
請求項１または２に記載の磁気検出素子。3. The magnetic sensing element according to claim 1, wherein a conductive film is provided on the folded portion of the serpentine pattern of the high magnetic permeability magnetic film.
ーンの両端部上に導電膜を設けたことを特徴とする請求
項１から３までのいずれか１項に記載の磁気検出素子。4. The magnetic sensing element according to claim 1, wherein a conductive film is provided on both ends of the serpentine pattern of the high-permeability magnetic film.
ーンの隙間に略直線状の高透磁率磁性膜を設けたことを
特徴とする請求項１から４までのいずれか１項に記載の
磁気検出素子。5. The magnetic device according to claim 1, wherein a substantially linear high-permeability magnetic film is provided in a gap between the serpentine patterns of the high-permeability magnetic film. Detection element.
用の磁気ヘッドであって、 先端面が磁気記録媒体摺動面として形成された非磁性基
板の前記摺動面に対し略垂直な表面に第１と第２の高透
磁率磁性膜を形成して構成され、 第１の高透磁率磁性膜は、前記摺動面から離間して、前
記摺動面に対し垂直な方向に沿った複数本の直線部分が
所定間隔で平行に並び、順次折り返すように連結され、
電気的に直列接続されたつづら折り状パターンに形成さ
れ、且つ磁化容易軸方向が膜面内で前記摺動面に略平行
な方向になるように磁気異方性が付けられており、 第２の高透磁率磁性膜は、前記第１の高透磁率磁性膜の
つづら折り状パターンの前記摺動面側の折り返し部と絶
縁膜を挟んで重なり、前記摺動面まで延びるように形成
され、 前記第１の高透磁率磁性膜の両端部より高周波電流を印
加し、磁気記録媒体から前記第２の高透磁率磁性膜を介
して前記第１の高透磁率磁性膜に印加される磁界により
前記第１の高透磁率磁性膜の両端部間に発生するインピ
ーダンスの変化を電気信号に変換して再生出力を得られ
るようにしたことを特徴とする磁気ヘッド。6. A reproducing magnetic head utilizing a magneto-impedance effect, wherein a front end surface is formed on a surface of a non-magnetic substrate formed as a sliding surface of a magnetic recording medium, the surface being substantially perpendicular to the sliding surface. And a second high-permeability magnetic film. The first high-permeability magnetic film is separated from the sliding surface by a plurality of magnetic films extending in a direction perpendicular to the sliding surface. The straight line parts are arranged in parallel at a predetermined interval, and are connected so as to fold sequentially,
A magnetic anisotropy is formed so as to be formed in a serpentine pattern electrically connected in series and that the direction of the axis of easy magnetization is substantially parallel to the sliding surface in the film plane; The high-permeability magnetic film is formed so as to overlap the folded portion on the sliding surface side of the serpentine pattern of the first high-permeability magnetic film with an insulating film interposed therebetween and to extend to the sliding surface. A high-frequency current is applied from both ends of the first high-permeability magnetic film, and the magnetic field is applied to the first high-permeability magnetic film from the magnetic recording medium via the second high-permeability magnetic film. 1. A magnetic head characterized in that a change in impedance generated between both ends of the high-permeability magnetic film is converted into an electric signal to obtain a reproduction output.
ｍであることを特徴とする請求項６に記載の磁気ヘッ
ド。7. The thickness of the insulating film is 0.05 μm to 1 μm.
7. The magnetic head according to claim 6, wherein m is m.
に露出する端部の幅が前記摺動面に向かって絞り込まれ
たことを特徴とする請求項６または７に記載の磁気ヘッ
ド。8. according to claim 6 or 7, characterized in that the width of the end portion exposed to the sliding surface of the second high permeability magnetic film is narrowed toward the sliding surface Magnetic head.
に露出する端部の厚さが前記第１の高透磁率磁性膜に重
なる部分の厚さより薄くされたことを特徴とする請求項
６から８までのいずれか１項に記載の磁気ヘッド。9. The method according to claim 1, wherein an end of the second high magnetic permeability magnetic film exposed on the sliding surface is thinner than a thickness of a portion overlapping the first high magnetic permeability magnetic film. The magnetic head according to any one of claims 6 to 8, wherein:
高透磁率磁性膜のつづら折り状パターンの前記摺動面と
反対側の折り返し部と絶縁膜を挟んで重なり、前記摺動
面と反対側に延びるように形成されたことを特徴とする
請求項６から９までのいずれか１項に記載の磁気ヘッ
ド。And a third high-permeability magnetic film overlapping the folded portion of the first high-permeability magnetic film on the opposite side to the sliding surface of the serpentine pattern with an insulating film interposed therebetween. the magnetic head according to any one of claims 6 to 9, characterized in that it is formed so as to extend in the surface opposite.
縁膜からなる素子本体が前記非磁性基板の表面に複数並
設されたことを特徴とする請求項６から１０までのいず
れか１項に記載の磁気ヘッド。11. Any of claims 6, wherein the first and element body made of a second high permeability magnetic film and the insulating film is more juxtaposed to the surface of the non-magnetic substrate to 10 2. The magnetic head according to claim 1.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12988895A JP3356585B2 (en) | 1995-05-29 | 1995-05-29 | Magnetic detection element and magnetic head |
| US08/618,066 US5889403A (en) | 1995-03-31 | 1996-03-25 | Magnetic detecting element utilizing magnetic impedance effect |
| US09/229,112 US6351119B1 (en) | 1995-03-31 | 1999-01-13 | Magnetic detecting element utilizing magnetic impedance effect |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12988895A JP3356585B2 (en) | 1995-05-29 | 1995-05-29 | Magnetic detection element and magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08330644A JPH08330644A (en) | 1996-12-13 |
| JP3356585B2 true JP3356585B2 (en) | 2002-12-16 |
Family
ID=15020833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12988895A Expired - Lifetime JP3356585B2 (en) | 1995-03-31 | 1995-05-29 | Magnetic detection element and magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3356585B2 (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002131342A (en) | 2000-10-19 | 2002-05-09 | Canon Electronics Inc | Current sensor |
| EP1408562A4 (en) | 2001-07-19 | 2009-12-23 | Panasonic Corp | Magnetic sensor and method for manufacturing the same |
| JP4695325B2 (en) * | 2001-09-17 | 2011-06-08 | キヤノン電子株式会社 | Magnetic detection element, method of manufacturing the same, and portable device using the element |
| JP5053532B2 (en) * | 2005-09-28 | 2012-10-17 | 三洋電機株式会社 | Magnetic detector |
| WO2013136751A1 (en) | 2012-03-16 | 2013-09-19 | キヤノン電子株式会社 | Measurement module, electronic apparatus, power source tap, power source unit, and embedded measurement module |
| JP6583208B2 (en) * | 2016-10-14 | 2019-10-02 | 株式会社デンソー | Magnetic detection element |
| JP7203490B2 (en) | 2017-09-29 | 2023-01-13 | 昭和電工株式会社 | Magnetic sensor assembly and magnetic sensor assembly manufacturing method |
| JP7203630B2 (en) * | 2019-02-19 | 2023-01-13 | 昭和電工株式会社 | Magnetic sensors and magnetic sensor systems |
| CN112038486A (en) * | 2020-08-04 | 2020-12-04 | 北京大学 | Method for realizing M-type magnetoresistance curve of device under external magnetic field parallel to substrate surface |
-
1995
- 1995-05-29 JP JP12988895A patent/JP3356585B2/en not_active Expired - Lifetime
Non-Patent Citations (1)
| Title |
|---|
| 電気学会マグネティクス研究会資料，１９９４年，ＭＡＧ−９４−２２２，ｐｐ．３５−４４ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH08330644A (en) | 1996-12-13 |
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