JP3356195B2 - Heater structure, thermocompression bonding method and thermocompression bonding apparatus - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heater for thermocompression-bonding an object to be crimped to a wiring pattern in which chips and leads are arranged on the same line on a wiring board which is a crimped object. And a thermocompression bonding method and a thermocompression bonding apparatus.

[0002]

2. Description of the Related Art Conventionally, as shown in FIGS. 10 and 11, a rigid insulating substrate made of phenol resin, glass epoxy resin, or the like, a flexible insulating substrate made of polyimide resin, polyester resin, or the like, a liquid crystal substrate, or the like. A wiring pattern 2 composed of a lead portion 2b of TAB or the like having a pitch of a micron is formed around the wiring substrate 1. This wiring pattern
The conductive layer 2 is formed by forming a conductive layer on an insulating substrate and removing portions other than required portions of the conductive layer by etching or the like.

[0005] On the wiring pattern 2, a solder, an anisotropic conductive film 3 and the like are formed to constitute a wiring board 1. A lead wire (object to be crimped) 4 in which a large number of LSI leads and IC leads are formed in parallel with the wiring pattern 2 is connected to the wiring board 1. As a joining method, as shown in FIGS.
By passing a pulse-like large current through the heaters 6, 20 formed of high heat and high resistance members such as o and titanium,
There is a pulse heat bonding method in which bonding is performed using the generated Joule heat.

[0004] This pulse heat bonding method uses the wiring board 1.
Since the thermoplastic anisotropic conductive film 3 is used as a means for joining the wiring pattern (compression-bonded material) 2 and the object 4 to be crimped, the joint area is heated by the heater 6. Thereafter, it is necessary to wait until the anisotropic conductive film 3 hardens. Therefore, in the pulse heat connection method, the heating of the heater 6 is not always performed, but a pulse-like heating current is supplied only at the time of the thermocompression bonding. This method is optimal because it is cooled.

As a thermocompression bonding apparatus using the pulse heat bonding method, there is an apparatus shown in FIG. 10, and when a lead wire 4 or the like is connected to the wiring pattern 2, flexibility is required. A pair of conductive plates 9 fixed to the pair of power supply bands 7 by bolts 8, a pair of conductive blocks 11 fixed to the conductive plates 9 by bolts 10, and inserted and supported in a gap 12 between the conductive blocks 11 facing each other. Section U
It is composed of a letter-shaped heater 6 (FIG. 12), an insulating block 15 fixed to the conductive block 11 by bolts 13 and a spindle 14 fixed thereto.

The heater 6 is heated by a heating current from a power supply for supplying a pulsed heating current,
By moving the spindle 14 of the thermocompression bonding device 5 in the vertical direction, the bonding area is pressurized and heated, and thermocompression bonding is performed by solder or a thermoplastic anisotropic conductive film 3 or the like.

A heater 6 for press-contacting and thermocompression-bonding the joint area between the wiring pattern 2 of the wiring board 1 and the lead wire (object to be crimped) 4 of the external board 4a is provided. , FIG. 10,
As shown in FIG. 12, the support portion 6b is provided with a screw hole 18 for being sandwiched and fixed by the conductive block 11.
A tapered portion 6d projecting from the conductive block 11 and formed in a tapered shape from the support portion 6b; and a rectangular tip portion connected to the tapered portion 6d. Is integrally formed with the heating section 6c.
The tapered portion 6d is for connecting the heating section 6c and the support section 6b, and the heating section 6c and the support section 6b may be directly connected.

The heating section 6c of the heater 6
Is longer in the length direction of the bonding region, that is, in the direction along the wiring pattern 2 formed on the wiring board 1, and in the width direction of the bonding region, that is, in the wiring pattern 2. It has a flat crimping surface having a width corresponding to the length of the lead wire 4 to be thermocompression-bonded. The heating section 6 is inserted from both ends in the width direction of the heating section with a long groove 19 interposed therebetween.
c and a pair of support portions 6b formed integrally with the support member 6c.

With such a structure, the longitudinal direction of the heating portion 6c of the heater 6 corresponds to the width of the group of lead wires 4, and the width direction of the heating portion 6c corresponds to the lead portion. The outer surface of the lower end of the heating section 6c corresponds to the length direction of the lead wire 4 constituting the lead wire 4 as a crimping surface 6a for crimping a group of the lead wires 4.

A heater 20 shown in FIG. 13 is formed of a high heat and high resistance member, is long along the length of the joining region, and has a width corresponding to the width of the joining region. The heating section 20a and the both ends 20b and 20c integrally formed at both ends of the heating section 20a are formed in a substantially U-shape. The lower surface of the heating section 20a is formed flat and the crimping surface 20d is formed. It has become. And the hots
In order to compensate for cooling from both ends of the heating part 20a of the screw 20, a surface 20e facing the crimping surface 20d is formed in a chevron shape in which both end portions are thin and the center portion is thick and protruding.

Therefore, similarly to the above-mentioned heater 6, the length direction of the heater 20 is a group of leads of the lead portion.
The width direction of the heating portion 20a corresponds to the length direction of the lead wire 4 constituting the lead portion.

Both ends 20b, 20c of the heater 20
A pair of conductive blocks (not shown) are connected to the screw holes 21 formed in the heating section 20a, and a heating current is supplied from a power source (not shown) through the conductive blocks, so that the heating section 20a
Is heated, and the crimping surface 20d is heated.

On the other hand, recently, a wiring pattern (compression-bonded object) 2 of the wiring board 1 and a lead wire (compression-bonded object) 4 of the external substrate 4a have been used.
A thermosetting anisotropic conductive film has begun to be used as a means for bonding the two. When using the thermosetting anisotropic conductive film, a heating current is always supplied to the heater from a power source, and the heating is constantly maintained at a constant heating temperature to join the heater. A constant heating joining method is adopted.

As a heat tool used in the constant heat bonding method, a substantially U-shaped heat tool (not shown) is used.
There is a heating unit, that is, a cartridge heater type heater in which a large number of cartridge heaters (not shown) are buried in the heating unit, and the crimping surface is formed long.

[0015]

As described above, there are various types of heat tools which are pressed against the bonding area. Among them, there are various types of heat tools which are used in the pulse heat bonding method. -When the heating current is turned off, the heaters 6 and 20 are turned on and off.
In order to cool sequentially from both ends of the heating sections 6c and 20a toward the center, the heating sections 6c and 20a are heated again.
The vicinity of both ends of c and 20a is not heated to a predetermined temperature,
The temperature of the crimping surfaces 6a and 20d varies. The uniformly heated portion is in a range excluding the vicinity of both ends from the center portion, and there is a problem that the effective length L of the crimping surfaces 6a and 20d is shorter than the actual crimping surfaces 6a and 20d.

As a practical matter, the above-mentioned heaters 6, 2
In the case of the shape of 0, the use range of the crimping surfaces 6a and 20d is limited to about 100 mm. As recently, L
When the size of ED etc. is about 240-360mm,
The length in the longitudinal direction of the crimping surfaces 6a and 20d of the heat towels 6 and 20 is also necessary, but an excessively long heating portion 6 is required.
Even if a heater having c and 20a is formed, in the case of the pulse heat bonding method, the heating portions 6c and 20a
However, there is a problem that even if it is heated again, it is not sufficiently heated as a whole, the heating temperature varies widely, and a material having a long effective length L cannot be used.

Further, a heater 20 shown in FIG.
Is inexpensive, but it is formed thin at both ends in order to compensate for a temperature drop from both ends in the longitudinal direction of the heating section 20a. Could not be used. In addition, the heating current is controlled by the heating unit 20.
Since the current flows in the length direction a, a voltage is generated on the crimping surface 20d, and the crimping object 2 (FIG. 10) and the crimping object 4 (FIG. 10) may be broken. Further, when the effective length L of the crimping surface 20d is increased, the generated voltage is increased accordingly, and the variation in the heating temperature is increased as described above. Therefore, the effective length L cannot be made too long. In addition, as the number of times of thermocompression bonding increases, distortion occurs on the compression surface 20d, which causes a problem that the life is short.

On the other hand, the heater 6 shown in FIG. 12 differs from the heater 20 in that the heating current flowing through the heating portion 6c flows in the width direction of the heating portion 6c. It is short and the generated voltage can be almost ignored.
The heating temperature of the crimping surface 6a is uniform, and the effective length L is longer than that of the heater 20.
If the length is too long, the crimping surface 6a is distorted as in the case of the heater 20, so that the life is short. In addition, there is a problem that the price is expensive.

In the case of a cartridge heater type heater used for a constant heating method, a large number of cartridge heaters are buried in a heating section, and the heater is constantly heated. Because of this, it is possible to create a long effective length L. However, this type has a problem in that the heat of the press-bonded surface is deprived to the bonding area at the moment when the heater comes into contact with the bonding area, and the heating temperature is lowered, so that a predetermined bonding temperature cannot be obtained. In addition, this type of
The tackle also has problems such as poor temperature accuracy. Therefore, in order to eliminate the above-mentioned drawbacks, even if a thermosetting anisotropic conductive film is used and a constant heating method is adopted,
It has been proposed that the heating temperature is always kept lower than the joining temperature, and that the heating is performed to a predetermined joining temperature during the joining.

[0020]

SUMMARY OF THE INVENTION According to the present invention, a heating current is supplied from a power source, and the heating current is elongated along the length direction of the joining area between the crimping object and the article to be crimped, and in the width direction of the joining area. Heater having a heating portion having a flat crimping surface having a corresponding width, and a pair of support portions formed integrally with the heating portion through long grooves from both ends in the width direction of the heating portion. In the structure of the heating unit, a temperature control opening whose capacity is gradually increased from the center point of the surface facing the crimping surface of the heating part to both ends in the longitudinal direction of the heating part is formed at both ends from the center point of the heating part. In this case, a plurality of crimping surfaces are formed in the direction of the crimping surface so as to keep the bonding temperature of the entire crimping surface of the heater constant.

According to another aspect of the present invention, a cylindrical hole is formed as a temperature control opening from the surface facing the crimping surface toward the crimping surface, or the temperature control opening is formed as a temperature control opening. A groove is formed in the width direction of the surface facing the crimping surface from the surface facing the crimping surface toward the crimping surface.

Further, according to the present invention, a heating current is supplied from a power source, and the heating current is long along a length direction of a joining area between the crimping object and the article to be crimped, and has a width corresponding to a width direction of the joining area. In the structure of a heater formed substantially in a U-shape by a heating section having a flat crimping surface and both ends integrally formed at both ends in the longitudinal direction of the heating section,
A temperature control opening, whose volume is gradually increased from the center point of the surface facing the crimping surface of the heating section to both ends in the longitudinal direction of the heating section, is paired from the center point of the heating section to both ends. At a plurality of crimping surface directions.

Further, according to the present invention, as a temperature control opening, a cylindrical hole is recessed from the surface facing the crimping surface toward the crimping surface, or the temperature control opening is formed as a temperature control opening. A groove is formed in the width direction of the surface facing the crimping surface from the surface facing the crimping surface toward the crimping surface.

Further, according to the present invention, the heating portion of the heater formed in a substantially U-shape is formed in a flat plate shape, and the opening of the heater is formed by a super hard member. This is reinforced with a reinforcing portion formed in the shape of the opening.

Further, according to the present invention, the crimping surface of the heat shield is covered with an insulating sheet having elasticity, and the insulating sheet can be sequentially wound only in a portion facing the crimping surface. Means are provided.

Further, according to the present invention, a heating current is supplied to a heater from a power supply, and the joining area is heated by the heater by the vertical movement of a joining head for holding the heater. In the thermocompression bonding method, the heat-pressed surface of the heater is covered with an insulating sheet having elasticity, and a predetermined heating current is supplied to the heat-heater to constantly heat the heater in advance to a predetermined temperature. The part is lowered and a predetermined pressure is applied to the joint area between the crimped object and the object to be crimped by the heater, and at the same time, a pulse-like heating current is supplied to the heater and the heating is performed. The heater is heated to the joining temperature and the joining area is thermocompressed. After the joining area is thermocompressed, the heater is cooled to a predetermined temperature and the thermocompression bonding step of the joining area is completed a predetermined number of times. After that, move the insulation sheet only to the part facing the crimping surface and Insulating sheet - it is obtained as in the root section covers the crimping surface.

Further, according to the present invention, a heating current is supplied to the heater from a power source, and the joining area is heated by the heater by the up and down movement of the joining head for holding the heater. In a thermocompression bonding apparatus for crimping, an insulating sheet having elasticity to cover a crimping surface of a heat sheet, and this insulating sheet is arranged near both sides of the crimping surface. A pair of rollers for winding, a power supply for supplying a predetermined heating current to the heater and always heating to a predetermined temperature in advance, and a pulse-like heating current for the heater during thermocompression bonding. Power supply for heating the heater to the junction temperature and a predetermined number of rotations of the roller to wind up the insulation sheet only at the portion facing the crimping surface. Calculate the number of thermocompression bonding of the joining area by the driving means and the heater. After reaching the constant, a thermocompression bonding apparatus provided with a counter means for driving the driving means.

[0028]

The surface 30e facing the crimping surfaces 30a, 31a, 40d, 41d of the heaters 30, 31, 40, 41,
31e, 40e, and 41e have openings 34 for temperature control,
35, 44, 45 are heating units 30c, 31c, respectively.
Since it is formed so as to be closer to both ends in the longitudinal direction of 40a, 41a, the passage of the heating current is restricted as it is closer to both ends in the longitudinal direction, the resistance value is larger than the central portion, and the generated Joule heat is larger. Become. Thus, the heating unit 30
By increasing the temperature near both ends of c, 31c, 40a, and 41a so that the temperature near both ends does not drop below the center, an average temperature distribution can be obtained as a whole.

No voltage is generated in the heating section 50a of the heater 50. Also, as a joining means of the joining area,
When an anisotropic conductive film is used, strict flatness is required for bonding to the crimped surface 50c of the heater 50, but this crimped surface 50c is made of an elastic insulating sheet.
Since it is covered with the gate 52, the unevenness of the anisotropic conductive film can be reduced.

In the thermocompression bonding device 60, no voltage is generated because the compression surface 50c of the heat shield 50 is covered with the insulating sheet 52 having elasticity. Heat - Tatsu - le 50 advance are always heated to a predetermined temperature T _2, the bonding head is lowered heat - Tatsu - by Le 50, a predetermined pressure to the bonding region of the crimp was 2 and the pressure bonding object 4 At the same time is applied, the heat - Tatsu - Le 50 pulsed heating current is fed, the heat - Tatsu - junction region by heating the Le 50 to the bonding temperature T ₃ is thermocompression.

After the bonding area is thermocompression-bonded,
Le 50 is cooled to a predetermined temperature T _2, performing the following thermal compression process. After the predetermined number of times, the insulating sheet 52 is moved only by the portion facing the crimping surface 50c, that is, by the width portion, and the crimping surface 50 is moved by the new insulating sheet 52.
Cover c.

[0032]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described in detail with reference to FIGS. 1 and 2 show an embodiment of the present invention, and are partially cutaway perspective views of heaters 30 and 31. FIG. 3 and 4 show an embodiment of the present invention, and are perspective views of heaters 40 and 41. FIG. FIG.
FIG. 7 shows a still further embodiment of the present invention. FIG. 6 is a perspective view of a heater, FIG. 6 is a perspective view showing a still another embodiment of the present invention, and FIG. It is a principal part perspective view which shows the Example of the thermocompression bonding apparatus by this invention. FIG. 8 shows an embodiment of the present invention, and is a graph showing the relationship between the heating temperature of the heater and time, and FIG. 9 is a flow chart showing the operation state. The same components as those of the conventional example are denoted by the same names and the same reference numerals, and description thereof is omitted.

In FIG. 1 and FIG.
31 has the same outer shape as that shown in FIG. 12 as a conventional example, and has support portions 30b, 31b, respectively.
Heating portions 30c, 31c, tapered portions 30d, 31d
The surfaces 30e, 31e of the heating units 30c, 31c facing the crimping surfaces 30a, 31a are respectively provided from the center points 32, 33 of the surfaces 30e, 31e.
The temperature control openings 34, 35 whose volumes are sequentially increased toward both ends in the longitudinal direction of the heating units 30c, 31c form a pair from the center points 32, 33 of the heating units 30c, 31c to both ends. A plurality of crimping surfaces 30a and 31a are formed in the direction of the crimping surfaces.

In the embodiment shown in FIG. 1, the temperature control opening 34 has a surface 30e facing the crimping surface 30a.
, A cylindrical hole 34a is formed in the direction toward the crimping surface 30a.

On the other hand, in the embodiment shown in FIG. 2, the temperature control opening 35 is cut in the width direction from a surface 31e facing the crimping surface 31a toward the crimping surface 31a by a wire cutter or the like. The cut groove 35a is formed.

3 and 4, the heater 40,
Numeral 41 denotes a heating section 20a, which is formed of a high heat and high resistance member, is long along the length direction of the joining area, and has a width corresponding to the width direction of the joining area.
0a, 41a, both ends 4 integrally formed at both ends
0b, 40c, 41b and 41c are formed in a substantially U-shape. The lower surfaces of the heating units 40a and 41a are formed flat to form crimping surfaces 40d and 41d. And
Surfaces 40e, 41e opposed to the crimping surfaces 40d, 41d
And the crimping surfaces 40d and 41d are formed in parallel with each other, and the center points 42 and 4 of the surfaces 40e and 41e, respectively.
3, temperature control openings 44, 4 whose volumes are sequentially increased to both ends in the longitudinal direction of the heating units 40 a, 41 a.
5 are formed in the directions of the crimping surfaces 40d and 41d at a plurality of places so as to form a pair from the center points 42 and 43 of the heating sections 40a and 41a to both ends.

In the case of the embodiment shown in FIG. 3, the temperature control opening 44 is a surface 40e opposed to the crimping surface 40d.
A cylindrical hole 44a is recessed toward the crimping surface 40d from the side.

On the other hand, in the case of the embodiment shown in FIG. 4, the opening 45 for temperature control is formed from the surface 41e facing the crimping surface 41d toward the crimping surface 41d in the direction shown in FIG.
As in the case of the tool 31, use a wire cutter or the like to
A cut groove 45a cut in the width direction of 1e is formed.

As described above, the heaters 30, 31, 40, and 41 having any of the shapes shown in FIGS. 1 to 4 also have the temperature control openings 34, 35, 44, and 45, respectively.
Since it is formed larger as it approaches the lengthwise ends of 0c, 31c, 40a, and 41a, the path of the heating current is restricted as it approaches the lengthwise ends, and the resistance value becomes larger than that of the central portion, and the generated judging occurs. Heat increases. In this way, the temperature near the both ends of the heating sections 30c, 31c, 40a, and 41a is increased so that the temperature near the both ends does not decrease from the center, so that an average temperature distribution can be obtained as a whole. It is configured. Therefore, the crimping surface 30
a, 31a, 40d, and 41d can be maintained at a constant bonding temperature, and the effective length L can be longer.

However, the heaters 30, 31, 40, and 41 having the structure shown in FIGS. 1 to 4 have a very long effective length L due to their structure.
As the use functions of 0a, 31a, 40d, and 41d increase, problems such as distortion occur, and the one having an effective length L that is too long cannot be used.

Therefore, as shown in FIG. 5, the heater 50 has a long effective length L, for example, 240 to 240 mm.
The heater 50 is invented for joining a large LCD or the like having a size of 360 mm or more to the wiring board 1. The heater 50 includes a heating section 50a and both end sections 50b extending from both ends thereof. 50b.
The heater 50 is formed by refracting a simple rectangular bar into a substantially U-shape.
Power is supplied from one end 50b to the other end 50b via the heating unit 50a.

The opening of the heater 50 is reinforced with a reinforcing portion 51 formed of a super hard member in the shape of the opening, so that the mechanical strength of the heater 50 is reduced. Is held. Accordingly, since the heater 50 is mechanically reinforced by the reinforcing portion 51, it is possible to form the heater 50 having a sufficiently long effective length L. As the material of the reinforcing portion 51, a super hard member such as ceramic, tungsten, nichrome, titanium, super invar, molybdenum, and tungsten carbide is suitable.

With the above configuration, in the case of the heater 50, the length of the heating section 50a can be made sufficiently long, and an LCD or the like having a long bonding area can be bonded. It is possible, and the production cost and materials are both low.

However, this heater 50 is
Since the heating current flows directly to the heating section 50a, if the effective length L is too long as in the conventional heater 20 shown in FIG. 13, a voltage may be generated on the crimping surface 50c. Thus, as shown in FIG. 6, the bonding area is thermocompression-bonded to the crimping surface 50c of the heat shield 50 while being covered with an elastic insulating sheet 52. A pair of rollers 53 for feeding and winding the insulating sheet 52 are disposed near both sides of the crimping surface 50c of the heater 50.

The insulating sheet 52 is fed and wound up after a predetermined number of thermocompression bonding steps, and then the roller 53 is driven manually or by a stepping motor (not shown) or the like. Only the portion facing 50c, that is, in the case of this embodiment, the width of the crimping surface 50c is about 2 mm, so that the crimping surface 50c is sequentially wound up by 2 mm.

In this embodiment, the insulating sheet 52 is made of silicon rubber having a tape thickness of about 50 to 80 .mu., But is not limited to this. Any sheet may be used as long as it is elastic. In this embodiment, the insulation sheet 52 has a width corresponding to the length of the crimping surface 50c in the longitudinal direction. The crimping surface 50c of the heater 50 is used. Although it is configured to be wound in a direction perpendicular to the longitudinal direction, that is, along the width direction, the present invention is not limited to this, and is a thin insulating sheet corresponding to the width of the crimping surface 50c. The same operation and effect as in the above embodiment can be obtained by covering the crimping surface 50c and winding the thin insulating sheet along the length direction of the crimping surface 50c.

With such a configuration, no voltage is generated in the heating section 50a of the heater 50.
In addition, when an anisotropic conductive film is used as a joining means of the joining region, a strict flatness is required for joining to the crimping surface 50c, but this crimping surface 50c is an elastic insulating material. Since the sheet 52 is covered with the sheet 52, unevenness of the anisotropic conductive film can be reduced.

FIG. 7 is a perspective view of a thermocompression bonding device 60 according to an embodiment of the present invention, and FIG. 8 is a graph showing a relationship between a time for supplying a heating current and a heating temperature. The same components as those already described as the conventional example and the embodiment of the present invention are given the same names and the same numbers, and the description thereof is omitted.

The thermocompression bonding device 60 includes a bonding head 61, a heating power supply 62, a Y-axis moving table 63, and a pressure controller 6.
4, a device control section 65 and a dedicated stand 66, a signal tower 67 and an emergency stop switch 68 as safety specifications. In this apparatus, the heater shown in FIG. Used.

The joining head section 61 is moved by an air cylinder 69 whose up and down is controlled by a pressurizing control section 64.
It is configured to grip the heater 50 and move up and down. The insulating sheet 52 contacts and covers the crimping surface 50c of the heater 50, and both ends thereof are connected to the crimping surface 50c.
c is wound around a pair of rollers 53 arranged near both sides. In the case of this embodiment, a pair of rollers 53
Are connected to each other via a belt 70, and are configured so that the knob 71 is manually rotated and wound.
The roller 53 may be connected to a stepping motor or the like so as to automatically perform a winding operation by a predetermined width automatically.

The thermocompression bonding apparatus 60 according to the present invention employs a constant heating method as described in the above-mentioned problem of the prior art, and maintains the temperature at a temperature lower than the constant heating temperature bonding temperature so that a predetermined temperature can be obtained during thermocompression. It was invented based on the desire to heat to the joining temperature.

Therefore, in the thermocompression bonding apparatus 60, both the pulse heat method and the constant heating method are used. Therefore, as shown in FIG.
Le 50 power source for always heated to a predetermined temperature T ₂ in advance by supplying a predetermined heating current (not shown) and to feed the pulsed heating current, at the time of thermocompression bonding, heat - Tatsu - joining the Le 50 It pulsed heating current for heating to a temperature source comprises a (not shown) and, in the case of this embodiment, the heating temperature is adjusted by 1 ° intervals from room temperature T ₁ up to 490 ° It is configured to be able to.

[0053] Figure 8 shows the relationship between time and temperature for feeding the heating current, heat - Tatsu - le 50, in a working start time t _1, a constant from a power source for powering the heating current heating current is fed, it is previously maintained at a predetermined temperature T ₂ from room temperature T _1.

When the pulse-shaped heating current is supplied from the power source of the pulse-shaped heating current at the thermocompression bonding start time t ₂ , the pressure-bonded surface 50 c of the heater 50 is heated to the bonding temperature T _3.
Heated until. When bonding is completed, because the pulsed heating current is turned off, the temperature of the crimping surface 50c is lowered to a predetermined temperature T _2. For this embodiment, the difference between the junction temperature T ₃ and the predetermined temperature T ₂ is set to about 100 °, heat - Tatsu - the heating temperature of the bonding surface 50c of the Le 50 from the junction temperature T ₃ the method of cooling to a predetermined temperature T _2, the forced air cooling method is adopted by the air.

On the Y-axis moving table 63, a work (not shown) for thermocompression bonding on the upper surface (ie, a work in which the crimping object and the object to be crimped are positioned) is placed. The work is moved to position the work at a predetermined position below the joining head 61. In this embodiment, the drive means is a pulse motor (not shown).
And a parallelism adjusting mechanism is provided. The moving range is 420 mm and the positioning accuracy is ± 0.5 mm. As a method of fixing the work on the Y-axis moving table 63, the work is attached to a guide pin (not shown) and fixed by vacuum suction.

[0056] In the pressurization control unit 64, pressure and the air cylinder 69, heat - Tatsu - pressure, etc. of the air for cooling for cooling is controlled Le 50 to a predetermined temperature T _2.

In the device controller 65, various operations are sequence-controlled according to a program. Dedicated stand 66
Is provided with a caster 72 and a fixing leveler 73, which are configured to be movable and fixed.

The signal tower 67 is configured such that a green lamp is lit at the end of one process and a red lamp is lit at the time of an emergency stop. Emergency stop switch 68
Is disposed on the upper surface of the case of the device control unit 65.

Start switches 74 and 75 are provided on the upper surface of the device control section 65 and on the corners of the dedicated pedestal 66, respectively, and are of a two-handed start type. When the start switches 74 and 75 are turned on, the green lamp of the signal tower 67 is turned off. A counter (not shown) is used as counter means for manually or automatically rotating the roller 53 after the number of thermocompression bonding of the bonding area by the heater 50 reaches a predetermined number. Zu) are arranged.

Next, the operation of the thermocompression bonding apparatus 60 will be described with reference to the operation flow shown in FIG. First, Y
After setting the wiring board 1 and the LCD panel as the object to be crimped 4 on the jig table (not shown) on the axis moving table 63 (step 81), the panel suction switch (FIG. (Not shown) is turned on to suck the LCD panel (step 82).

Next, with both hands, the start switch 74,
When the switch 75 is turned on (step 83), the Y-axis moving table 63 moves forward, moves to a position where the joining head 61 descends (step 84), is positioned, and stops. Next, the joining head unit 61 starts descending (step 8).
5). At this time, heat - Tatsu - le 50 is preheated to a predetermined temperature T _2.

The heater 50 supported by the joining head 61 applies a predetermined pressing force to the work, and at the same time, a pulse-like heating current is supplied from a pulse-like heating current power supply. Tatsu - Le 50 is heated to a bonding temperature T _3, Wa - joining region of click is bonded (step 86).
When bonding is completed, heat - Tatsu - balloon air toward the Le 50, heat - Tatsu - Le 50 is rapidly cooled to a predetermined temperature T ₂ (step 87). Next, the joining head 61 is raised (step 88), and the one-cycle thermocompression bonding step is completed.

After one cycle, the Y-axis movement table 63
Moves forward again, the next joining area of the work is positioned at the lowering position of the joining head 61, and stops (step 89). Next, after the operations of steps 85 to 88 are repeated (step 90), the Y-axis movement table 6
3 moves back (step 91), the suction of the panel is released (step 92), and the work is taken out of the Y-axis moving table 63 (step 93). If the thermocompression bonding step is completed in one cycle, the process moves from step 88 to step 91.

The insulation sheet 52 is, for example, 100
After using about twice, the roller 53 is rotated manually or by a stepping motor to wind up only the portion facing the crimping surface 50c, and the crimping surface 50c is covered with the next new insulation sheet 52. Thus, the predetermined number of times of use is initially set.

[0065]

According to the present invention, a heating current is supplied from a power source, and has a width that is long along the length direction of the joining region between the crimping object and the object to be crimped, and has a width corresponding to the width direction of the joining region. In the structure of a heater having a heating portion having a flat crimping surface and a pair of supporting portions formed integrally with the heating portion through long grooves from both ends in the width direction of the heating portion. , From the center point of the surface facing the crimping surface of the heating section,
The temperature control opening, whose volume is gradually increased toward both ends in the longitudinal direction of the heating section, is formed in a plurality of places toward the crimping surface so as to form a pair from the center point of the heating section to both ends. -It is possible to keep the joining temperature of the entire crimping surface of the tool constant and to obtain a longer effective length L.

According to the present invention, the heating portion of the heater, which is formed in a substantially U-shape, is formed in a flat plate shape, and the opening of the heater is formed by a super-hard member. Because of the high mechanical strength due to the reinforcement with the reinforcing part formed in the shape of the opening, the length of the heating part can be made sufficiently long, and a long effective length can be obtained and made. Both cost and material are low.

According to the present invention, the crimping surface of the heater is covered with an insulating sheet having elasticity, and means for sequentially winding the insulating sheet only at a portion facing the crimping surface is provided. Therefore, no voltage is generated on the crimping surface of the heater. In addition, since the insulating sheet is made of an elastic member, if an anisotropic conductive film is used as the joining means of the joining area, the joining sheet may not be used.
Strict flatness is required, but since the crimped surface is covered with an insulating sheet, the irregularities of the anisotropic conductive film can be reduced.

According to the present invention, a heating current is supplied to a heater from a power source, and the joining area is thermocompression-bonded by the heater by the vertical movement of a joining head for holding the heater. In the thermocompression bonding method, the crimping surface of the heater is covered with an elastic insulating sheet, and a predetermined heating current is supplied to the heater to constantly heat it to a predetermined temperature. At the same time, a predetermined pressure is applied to the joint area between the crimping object and the object to be crimped by the heater, and at the same time, a pulse-like heating current is supplied to the heater to supply the heating. After the towel is heated to the joining temperature and the joining area is thermocompressed, the joining area is thermocompressed, the heater is cooled to a predetermined temperature, and the thermocompression step of the joining area is completed a predetermined number of times. Then, the insulation sheet is moved only by the part facing the crimping surface to create a new insulation sheet. Since as with root section covers the crimping surfaces, the heating temperature of the bonding surfaces even when heated from the predetermined temperature to the bonding temperature during bonding is stable, temperature accuracy is good. In addition, since the heating temperature is only heated and quenched by the difference between the predetermined temperature and the bonding temperature, the temperature of the entire pressure-bonded surface can be stably raised and lowered in a short time without unevenness of the temperature of the entire crimping surface, and the work time of one cycle can be reduced. Can be shortened. In addition, since the crimp surface is covered with the insulating sheet, no voltage is generated on the crimp surface.

[Brief description of the drawings]

FIG. 1 shows an embodiment of the present invention and is a perspective view of a heater tool 30. FIG.

FIG. 2, showing an embodiment of the present invention, is a perspective view of a heater tool 31 including a partial cutout.

FIG. 3 is a perspective view of a heater tool 40 according to another embodiment of the present invention.

FIG. 4 is a perspective view of a heater tool 41, showing still another embodiment of the present invention.

FIG. 5 is a perspective view of a heater tool 50 according to still another embodiment of the present invention.

FIG. 6 is a perspective view of a main part including a partially cut-out part showing still another embodiment of the present invention.

FIG. 7 is a perspective view of an essential part showing an embodiment of the thermocompression bonding apparatus according to the present invention.

FIG. 8 is a graph showing an example of the present invention and showing a relationship between heating temperature and time.

FIG. 9 shows an embodiment of the present invention, and is an operation flow showing an operation state of the thermocompression bonding apparatus.

FIG. 10 is a front view of a main part of a conventional thermocompression bonding apparatus.

FIG. 11 is a plan view of a conventional insulating substrate 1.

FIG. 12 is a perspective view of a conventional heater tool 6.

FIG. 13 is a perspective view of a conventional heater tool 20.

[Explanation of symbols]

2 ························································· Heater tools 30a, 31a, 40d, 41d, 50c · · · , 31c, 40a, 41a, 50a, heating portions 30e, 31e, 40e, 41e,..., A surface facing the crimping surface 32, a central point of the surface 30e 33, a central point of the surface 31e, 34, 35 , 44, 45... Temperature control openings 34a, 44a... Holes 35a, 45a... Cut grooves 52 ... Insulating sheets 53 ... Rollers 60 ... thermocompression bonding device 61 ... joining head 62 ... heating power supply

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ identification code FI H05K 3/32 H05K 3/32 B 3/36 3/36 B (58) Investigated field (Int.Cl. ⁷ , DB name) B23K 3/03 G02F 1/1345 H01L 21/60 H05K 3/32 H05K 3/36

Claims (10)

(57) [Claims] 1. A heating current is supplied from a power source, and is long along a length direction of a joining region between a crimped object and a material to be crimped, and
A heating portion having a flat crimping surface having a width corresponding to the width direction of the joining region, and a pair of heating portions formed integrally with the heating portion through long grooves from both ends in the width direction of the heating portion; In the structure of a heater having a supporting portion, a temperature control portion having a volume gradually increased from a center point of a surface of the heating portion facing the crimping surface to both ends in a longitudinal direction of the heating portion. 2. A structure for a heat-shielding machine according to claim 1, wherein the openings are formed at a plurality of locations in the direction of the crimping surface so as to form a pair from the center point of the heating section to both ends. 2. The heater according to claim 1, wherein a cylindrical hole is formed as the temperature control opening from the surface facing the crimping surface toward the crimping surface. -The structure of the rule. 3. A cutting groove formed in the width direction of the surface facing the crimping surface from the surface facing the crimping surface to the direction of the crimping surface as the temperature control opening. 2. The structure of a heater according to claim 1, wherein: 4. A heating current is supplied from a power source, and is long along a length direction of a joining region between the crimping object and the object to be crimped, and
A heating section having a flat crimping surface having a width corresponding to the length in the width direction of the joining area, and both ends integrally formed at both ends in the length direction of the heating section are substantially U-shaped. In the structure of a heater formed in a shape, the volume of the heating portion is gradually increased from the center point of the surface of the heating portion facing the crimping surface to both ends in the longitudinal direction of the heating portion. 2. A structure for a heat-shielding machine according to claim 1, wherein the openings are formed at a plurality of locations in the direction of the crimping surface so as to form a pair from the center point of the heating section to both ends. 5. The hot-water heater according to claim 4, wherein a cylindrical hole is formed as the temperature control opening from a surface facing the crimping surface toward the crimping surface. -The structure of the rule. 6. The temperature control opening, wherein a cut groove is formed in a width direction of a surface facing the crimping surface from a surface facing the crimping surface toward the direction of the crimping surface. 5. The structure of a heater according to claim 4, wherein 7. A heating portion of a substantially U-shaped heater is formed in a flat plate-like shape, and an opening of the heater is formed by a cemented carbide member. The reinforcing portion formed in the shape of (1) is reinforced.
7. The structure of the heater according to claim 6. 8. A means for covering a crimping surface of a heat shield with an insulating sheet having elasticity, and providing means for sequentially winding the insulating sheet only at a portion opposed to the crimping surface. 8. The structure of a heater according to claim 1, wherein: 9. A heating current is supplied from a power source to the heater, and the joining area is thermocompression-bonded by the heater by a vertical movement of a joining head for holding the heater. In the thermocompression bonding method, the crimping surface of the heater is covered with an elastic insulating sheet, and a predetermined heating current is supplied to the heater to constantly heat the heater to a predetermined temperature. At the same time, a predetermined pressure is applied to the joint area between the crimped object and the object to be crimped by the heater, and a pulse-like heating current is supplied to the heater. Then, the heater is heated to a joining temperature to thermocompression-bond the bonding region, and the bonding region is thermocompression-bonded. Then, the heater is cooled to the predetermined temperature, and After the thermocompression bonding step has been completed a predetermined number of times, the insulating sheet is placed on the crimping surface. A thermocompression bonding method characterized in that only the portion facing the device is moved to cover the compression surface with a new insulating sheet portion. 10. A heating current is supplied from a power supply to the heater, and the joining area is thermocompression-bonded by the heater by a vertical movement of a joining head for holding the heater. In a thermocompression bonding apparatus, an insulating sheet having elasticity for covering a crimping surface of the heat sheet, and this insulating sheet is disposed near both sides of the crimping surface, for feeding the insulating sheet. A pair of rollers for winding, a power supply for supplying a predetermined heating current to the heater and constantly heating the heater to a predetermined temperature in advance, and a pulse-like pulse for the heater during thermocompression bonding. And a power source for a pulse-like heating current for heating the heater to the joining temperature, and winding the insulating sheet only at a portion facing the crimping surface. Drive means for driving the roller a predetermined number of rotations, and the heater And a counter means for driving the driving means after calculating the number of times of thermocompression bonding of the joining area and reaching a predetermined number.