JP3341328B2 - Surface-coated hard member - Google Patents
Surface-coated hard memberInfo
- Publication number
- JP3341328B2 JP3341328B2 JP01282893A JP1282893A JP3341328B2 JP 3341328 B2 JP3341328 B2 JP 3341328B2 JP 01282893 A JP01282893 A JP 01282893A JP 1282893 A JP1282893 A JP 1282893A JP 3341328 B2 JP3341328 B2 JP 3341328B2
- Authority
- JP
- Japan
- Prior art keywords
- hard member
- coated hard
- coating
- coated
- member according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
【０００１】[0001]
【産業上の利用分野】本発明は、ＷＣ基超硬合金、Ｔｉ
ＣＮ系を始めとする各種サーメット、セラミックス、高
速度鋼などで構成された母材の表面に特定の各種硬質物
質を被覆して母材の特性（耐欠損性等）を維持したまま
耐摩耗性を著しく向上させた表面被覆硬質部材に関す
る。なお、この硬質部材は、切削工具、耐摩工具用とし
て特に適するものである。The present invention relates to a WC-based cemented carbide, Ti
Wear resistance while preserving the properties (breakage resistance, etc.) of the base material by coating the surface of the base material composed of various cermets including CN, ceramics, high-speed steel, etc. with specific hard materials Ru significantly related to surface-coated hard member having improved <br/>. The hard member is particularly suitable for cutting tools and wear-resistant tools.
【０００２】[0002]
【従来の技術】切削工具、耐摩工具の耐摩耗性を向上さ
せるため、その表面にＰＶＤ法やＣＶＤ法によりＴｉ、
Ｈｆ、Ｚｒの炭化物、窒化物、炭窒化物、およびＡｌの
酸化物の膜を単層もしくは複層形成した表面被覆硬質部
材が広く実用に供されている。特にＰＶＤ法による被覆
硬質部材は母材強度の劣化なしに耐摩耗性を向上できる
という特長があり、ドリル、エンドミル、フライス切削
用スローアウェイチップなど強度の要求される切削用途
に利用されている。2. Description of the Related Art In order to improve the wear resistance of cutting tools and wear-resistant tools, Ti, Ti is applied to the surface thereof by PVD or CVD.
Surface-coated hard members having a single layer or multiple layers of oxides of carbides, nitrides, carbonitrides, and Al of Hf and Zr are widely used. Particularly, a coated hard member formed by the PVD method has a feature that the wear resistance can be improved without deteriorating the base material strength, and is used for cutting applications requiring high strength such as drills, end mills, and throw-away tips for milling.
【０００３】[0003]
【発明が解決しようとする課題】ＰＶＤ法ではＡｌの酸
化物を安定して被覆することが困難であり、従ってＡｌ
酸化膜については実用化に至っておらず、現状ではＴ
ｉ、Ｈｆ、Ｚｒ等の窒化物が用いられているが、これ等
の窒化物膜は特に高速用途での耐摩耗性が不足し、工具
寿命の飛躍的向上が望めない。なお、耐摩耗性が不足す
る原因の１つは、コーティングの過程で窒化物が粒成長
し、被膜の構成粒子が過大になることにある。In the PVD method, it is difficult to coat Al oxide stably, and
Oxide films have not yet been put into practical use, and at present T
Although nitrides such as i, Hf, and Zr are used, the wear resistance of these nitride films, particularly in high-speed applications, is insufficient, and a dramatic improvement in tool life cannot be expected. One of the causes of insufficient wear resistance is that nitride particles grow during the coating process and the constituent particles of the coating become excessive.
【０００４】ここで、IVａ、Ｖａ、VIａ族金属元素およ
びＡｌ、Ｓｉから選ばれた２種類以上の金属からなる合
金の窒化物、酸化物、炭化物、炭窒化物又はホウ化物の
被膜を形成した表面被覆硬質部材は優れた切削工具、耐
摩工具となり得ることが知られているが、これらの膜を
形成するためには、上記２種類以上の合金の蒸発源を使
用しなければならない。この合金の蒸発源を作るための
コストが非常に大きい。このコスト増に見合う寿命向上
効果が従来の被膜組織では望めず、そのため、IVａ、Ｖ
ａ、VIａ族金属元素およびＡｌ、Ｓｉから２種類以上の
金属からなる合金の窒化物、酸化物、炭化物、炭窒化物
或いはホウ化物の被膜は優れた耐摩耗性をもつことがわ
かっていながらなかなか実用化されるに至っていないの
が実情である。Here, a nitride, oxide, carbide, carbonitride or boride coating of an alloy comprising at least two metals selected from the group consisting of IVa, Va, VIa group metal elements and Al and Si is formed. It is known that surface-coated hard members can be excellent cutting tools and wear-resistant tools, but in order to form these films, evaporation sources of the above two or more alloys must be used. The cost to make a source of evaporation for this alloy is very high. The life-improving effect commensurate with this cost increase cannot be expected with the conventional coating structure.
a, VIa group metal elements and nitrides, oxides, carbides, carbonitrides or borides of alloys composed of two or more metals from Al and Si are known to have excellent abrasion resistance, but it is quite difficult The fact is that it has not been put to practical use.
【０００５】[0005]
【課題を解決するための手段】上記の課題の解決策とな
る本発明の表面被覆硬質部材は、ＷＣ基超硬合金、サー
メット、セラミックス、高速度鋼等から成る母材の表面
に、IVａ、Ｖａ、VIａ族金属元素およびＡｌ、Ｓｉから
選んだ２種類以上の元素からなる合金の窒化物、酸化
物、炭化物、炭窒化物又はホウ化物を物理的蒸着法によ
り５０ｎｍ以下の粒子径で構成した被膜（その膜厚は
０．１〜１５μｍが好ましい）を持つものである。The surface-coated hard member of the present invention, which is a solution to the above-mentioned problems, comprises a base material made of WC-based cemented carbide, cermet, ceramics, high-speed steel, etc. A nitride, an oxide, a carbide, a carbonitride or a boride of an alloy composed of two or more kinds of elements selected from the group consisting of Va, Group VIa metal elements and Al and Si was formed with a particle diameter of 50 nm or less by a physical vapor deposition method. It has a coating (the thickness is preferably 0.1 to 15 μm).
【０００６】この表面被覆硬質部材は、IVａ族、Ｖａ
族、VIａ族金属元素及びＡｌ、Ｓｉの群より選ばれた２
種類以上の純金属、又は２種類以上の元素から成る合金
の蒸発源を使用し、真空容器中に当該蒸発源を対面ある
いは並列に配置し、蒸発源に正対する位置に配置した母
材を高速回転させることにより前述の５０ｎｍ以下の超
微粒子から成る被膜を真空アーク蒸着法で形成する方法
を用いて製造する。The surface-coated hard member is made of a group IVa, Va
2 selected from the group consisting of Group IVa, Group VIa metal elements and Al and Si
Using an evaporation source of more than one kind of pure metal or an alloy consisting of two or more kinds of elements, arranging the evaporation sources facing each other or in parallel in a vacuum vessel, It is manufactured by the method of forming a film made of ultrafine particles of 50 nm or less by rotating the film by a vacuum arc evaporation method.
【０００７】なお、本発明ではＳｉも金属と見なしてい
る。従って、ここで云う合金には、単一金属にＳｉが混
ざり合ったものも含まれる。In the present invention, Si is also regarded as a metal. Therefore, the alloys referred to herein include those in which Si is mixed with a single metal.
【０００８】[0008]
【作用】発明者等は、IVａ、Ｖａ、VIａ族金属元素およ
びＡｌ、Ｓｉから選ばれた２種類以上の金属からなる合
金の窒化物、酸化物、炭化物、炭窒化物及びホウ化物の
被膜をさらに研究開発した結果、物理蒸着法において大
きなアノードをもつ真空炉中ならば蒸発源として上記金
属を純金属で使用でき、また、この時母材（被着物）を
２種金属蒸発源のあいだで高速回転させれば、母材には
２種の蒸発金属の窒化物、酸化物、炭化物、炭窒化物或
いはホウ化物の被膜を形成できることを見い出した。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present inventors have developed a nitride, oxide, carbide, carbonitride and boride coating of an alloy comprising at least two metals selected from the group consisting of IVa, Va, and VIa metal elements and Al and Si. As a result of further research and development, the above metal can be used as a pure metal as an evaporation source in a vacuum furnace having a large anode in the physical vapor deposition method. At this time, the base material (adherend) can be used between the two metal evaporation sources. It has been found that if the material is rotated at a high speed, a coating of a nitride, an oxide, a carbide, a carbonitride or a boride of two kinds of evaporated metals can be formed on the base material.
【０００９】また、この合金の窒化物、酸化物、炭化
物、炭窒化物或いはホウ化物の被膜は、母材の回転速度
と蒸発金属量およびガス圧を変える事によりその構成粒
子系が変わり、その構成粒子が５０ｎｍ以下の微粒であ
る場合に特に優れた耐摩耗性を示すことを発見した。こ
のようにこの被膜は、構成粒子径が小さいほど良い耐摩
耗性を示す傾向があるが、１ｎｍ以下の微粒子の膜を作
る事は困難である。そこで、生産性まで考慮すると実用
的には粒子径が１０ｎｍ程度の粒子径のものが優れてい
る。Further, the constituent particle system of the nitride, oxide, carbide, carbonitride or boride coating of this alloy is changed by changing the rotation speed of the base material, the amount of evaporated metal and the gas pressure. It has been found that particularly excellent abrasion resistance is exhibited when the constituent particles are fine particles of 50 nm or less. Thus, this coating tends to exhibit better wear resistance as the constituent particle diameter is smaller, but it is difficult to form a film of fine particles of 1 nm or less. Therefore, in consideration of productivity, those having a particle diameter of about 10 nm are practically excellent.
【００１０】くわえてこの被膜を形成する際、被膜と母
材の界面または、被膜の最表面にIVａ族金属元素中でも
好ましくはＴｉの窒化物、炭窒化物、炭化物、酸化物の
膜を形成しておくと、さらに良好な耐摩耗性を得ること
ができるという知見を得た。このほか、界面の膜は０．
０５〜５μｍ、最表面の膜は０．１〜５μｍの膜厚が好
ましいことも見い出した。In addition, when forming this film, a film of a nitride, carbonitride, carbide or oxide of Ti, preferably among Ti metals belonging to Group IVa, is formed on the interface between the film and the base material or on the outermost surface of the film. It has been found that better wear resistance can be obtained. In addition, the film at the interface is 0.1 mm.
It has also been found that a film thickness of 0.5 to 5 μm and a film of the outermost surface are preferably 0.1 to 5 μm.
【００１１】なお、蒸発源として合金を使用すると前述
のコストアップの問題が生じるが、本発明の表面被覆硬
質部材は寿命の延長効果が著しいので合金を用いても不
利になることはない。The use of an alloy as an evaporation source causes the above-mentioned problem of cost increase, but the surface-coated hard member of the present invention has a remarkable effect of extending the life, so that there is no disadvantage even if an alloy is used.
【００１２】[0012]
【実施例】この発明の表面硬質部材を実施例を挙げて具
体的に説明する。母材として、組成がＪＩＳ規格Ｐ３０
の超硬合金と、サーメットと、セラミックスを用意し
た。これ等の母材は、形状がＪＩＳ・ＳＮＧ４３２の切
削チップである。この切削チップの表面に公知の真空ア
ーク蒸着法によりターゲットとしてＴｉとＡｌ、Ｚｒと
Ｈｆ、及びＴｉとＴａの三種類を用いて被覆を行なっ
た。EXAMPLES The hard surface member of the present invention will be specifically described with reference to examples. As base material, the composition is JIS P30
, Cermet and ceramics were prepared. These base materials are cutting tips having a shape of JIS SNG432. The surface of the cutting tip was coated by a known vacuum arc deposition method using three types of targets, Ti and Al, Zr and Hf, and Ti and Ta.
【００１３】図１に示すように装置の真空容器内の一方
にＴｉターゲットを設置し、その向い側にＡｌターゲッ
トを設置し、それ等の中央で切削チップが一分間に５０
回転するように調節した後、Ａｌガス１×１０-2Ｔｏｒ
ｒの真空度に保ち、切削チップに−２０００Ｖの電圧を
かけて洗浄を行い、５００℃まで加熱後、Ａｌを排気
し、Ｎ2 ガスを３００ＣＣ／ｍｉｎの割合で導入した。
ここで真空アーク放電によりＴｉターゲット、Ａｌター
ゲットを蒸発、イオン化させると切削チップがＴｉとＡ
ｌの混合蒸気の中を通過することになるが、このとき切
削チップを高速回転させることで表面に合金化していな
いＡｌＮとＴｉＮが交互に形成されてしまうことを防ぐ
ことができる。被膜の全体の膜厚は被覆時間によって制
御した。以上の方法にて表１〜表３に示される層構成、
膜厚の表面硬質被覆層を形成して目的とする表面被覆切
削チップに仕上げた。As shown in FIG. 1, a Ti target is placed on one side of the vacuum vessel of the apparatus, and an Al target is placed on the opposite side.
After adjusting to rotate, Al gas 1 × 10 -2 Torr
The cutting tip was cleaned while applying a voltage of -2000V while maintaining the degree of vacuum at r. After heating to 500 ° C, Al was exhausted, and N 2 gas was introduced at a rate of 300 CC / min.
Here, when the Ti target and the Al target are evaporated and ionized by the vacuum arc discharge, the cutting tip becomes Ti and A.
However, by rotating the cutting tip at a high speed at this time, it is possible to prevent the unalloyed AlN and TiN from being alternately formed on the surface. The overall thickness of the coating was controlled by the coating time. The layer structure shown in Tables 1 to 3 by the above method,
A hard coating layer having a thickness of a film thickness was formed to finish the intended surface-coated cutting tip.
【００１４】同様にＺｒターゲットとＨｆターゲット、
および反応ガスとしてＣＨ4 を使用して表４に示す（Ｈ
ｆＺｒ）Ｃの被膜を形成した。また、Ｔｉターゲットと
Ｔａターゲットを用いて前述の合金を用いた被膜と母材
との界面、最表面及び界面と最表面の双方にＴｉＮおよ
びＨｆＣＮを形成した表面被覆切削チップ（表１〜４の
Ｎｏ．４、５、６）を製造した。Similarly, a Zr target and an Hf target,
And using CH 4 as the reaction gas.
fZr) A film of C was formed. Further, using a Ti target and a Ta target, a surface-coated cutting tip in which TiN and HfCN are formed on the interface between the coating using the above-described alloy and the base material, on the outermost surface, and on both the interface and the outermost surface (see Tables 1 to 4). Nos. 4, 5, and 6) were manufactured.
【００１５】さらに、ＴｉＴａＢ（表５）についても同
様な表面被覆切削チップを用意した。以上のチップ（各
表中のＮｏ．１〜Ｎｏ．６）はいずれも本発明品であ
る。Further, a similar surface-coated cutting tip was prepared for TiTaB (Table 5). All of the above chips (No. 1 to No. 6 in each table) are products of the present invention.
【００１６】また、比較のため、同じ切削チップを母材
として同じ装置にて表面にＴｉ、Ｈｆの窒化物、炭化
物、炭窒化物のうちの１種類の単層、もしくは２種類以
上の複層を形成した表面被覆切削チップＡ〜Ｃをそれぞ
れ製造し、一般によく用いられているＣＶＤ法にてコー
ティングした従来常用されている表面被覆切削チップＤ
Ｅも用意した。さらに、通常良く知られている合金の蒸
発源を使用してＴｉＡｌＮ膜、ＨｆＺｒＣ膜を形成した
表面被覆切削チップＦを用意した。これ等も表１〜５に
まとめて示している。For comparison, a single layer of one of Ti, Hf nitride, carbide, and carbonitride, or a multilayer of two or more types of Ti, Hf nitride, carbide, and carbonitride is formed on the surface using the same cutting tip as a base material and the same apparatus. A surface-coated cutting tip D is manufactured by manufacturing the surface-coated cutting tips A to C each having the same, and coated by a generally used CVD method.
E was also prepared. Further, a surface-coated cutting tip F having a TiAlN film and a HfZrC film formed thereon using a well-known evaporation source of an alloy was prepared. These are also shown collectively in Tables 1-5.
【００１７】次に、このようにして得た試料を表６に示
す条件での連続切削試験及び断続切削試験に供し、切れ
刃の逃げ面摩耗量を測定した。その測定結果を表１〜表
５に併せて示す。Next, the sample thus obtained was subjected to a continuous cutting test and an intermittent cutting test under the conditions shown in Table 6, and the flank wear of the cutting edge was measured. The measurement results are also shown in Tables 1 to 5.
【００１８】[0018]
【表１】 [Table 1]
【００１９】[0019]
【表２】 [Table 2]
【００２０】[0020]
【表３】 [Table 3]
【００２１】[0021]
【表４】 [Table 4]
【００２２】[0022]
【表５】 [Table 5]
【００２３】[0023]
【表６】 [Table 6]
【００２４】この試験結果から判るように、本発明品
は、比較品Ａ〜Ｆとほぼ同じ被膜材料を使用し、被膜厚
みもほぼ同じ、母材は全く同一としたにも拘らず、比較
品に比べてはるかに優れる耐欠損性、耐摩耗性を発揮し
ている。チップに限らず、他の切削工具（ドリル、エン
ドミル等）に利用しても結果は同じであり、長期に渡っ
て良好な切削性能を持ち続ける。As can be seen from the test results, the product of the present invention uses the same coating material as the comparative products A to F, has the same coating thickness, and has the same base material. It has much better fracture and wear resistance than The results are the same even when used for other cutting tools (drills, end mills, etc.), not limited to the inserts, and good cutting performance is maintained for a long time.
【００２５】[0025]
【発明の効果】以上述べたように、本発明の表面被覆硬
質部材は、極めて優れた耐摩耗性と靭性を兼ね備えてい
るので、切削工具や耐摩工具として使用すると寿命の延
長効果が著しく、特に効果的である。As described above, the surface-coated hard member of the present invention has extremely excellent wear resistance and toughness, so that when used as a cutting tool or a wear-resistant tool, the effect of extending the life is remarkable. It is effective.
【００２６】また、粒子径が５０μｍ以下の緻密な組織
の被膜をもつ本発明の表面被覆硬質部材は、本発明の方
法によってその製造が可能になるが、この製造方法のう
ち、純金属を蒸発源として蒸着の過程で合金にするもの
は、蒸発源のコスト低減にも大きく寄与する。Further, the surface-coated hard member of the present invention having a coating of a fine structure having a particle diameter of 50 μm or less can be produced by the method of the present invention. The use of an alloy as a source during the vapor deposition process greatly contributes to a reduction in the cost of the evaporation source.
【図１】本発明の製造方法の一例を示す線図FIG. 1 is a diagram showing an example of a manufacturing method of the present invention.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭60−234961（ＪＰ，Ａ) 特開 平３−180464（ＪＰ，Ａ) 特開 平４−21760（ＪＰ，Ａ) 特開 平４−201002（ＪＰ，Ａ) 特開 平４−201003（ＪＰ，Ａ) 特開 平２−194159（ＪＰ，Ａ) 特開 平４−297568（ＪＰ，Ａ) 特開 平５−186862（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) C23C 14/00 - 14/58 C04B 41/87 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-60-2324961 (JP, A) JP-A-3-180464 (JP, A) JP-A-4-21760 (JP, A) JP-A-4- 201002 (JP, A) JP-A-4-201003 (JP, A) JP-A-2-194159 (JP, A) JP-A-4-297568 (JP, A) JP-A-5-186862 (JP, A) (58) Field surveyed (Int. Cl. 7 , DB name) C23C 14/00-14/58 C04B 41/87
Claims (7)
クス、高速度鋼等から成る母材の表面に、IVａ、Ｖａ、
VIａ族金属元素およびＡｌ、Ｓｉから選んだ２種類以上
の元素からなる合金の窒化物、酸化物、炭化物、炭窒化
物又はホウ化物を物理的蒸着法により５０ｎｍ以下の粒
子径で構成した被膜を持つことを特徴とする表面被覆硬
質部材。1. A surface of a base material made of WC-based cemented carbide, cermet, ceramics, high-speed steel, etc., is coated with IVa, Va,
A film formed of a nitride, oxide, carbide, carbonitride or boride of an alloy composed of two or more kinds of elements selected from the group VIa metal elements and Al and Si by physical vapor deposition with a particle diameter of 50 nm or less. A surface-coated hard member characterized by having.
た請求項１記載の表面被覆硬質部材。2. The surface-coated hard member according to claim 1, wherein said coating has a thickness of 0.1 to 15 μm.
属元素の窒化物、炭化物又は炭窒化物から成る第一層膜
を配した請求項１又は２記載の表面被覆硬質部材。3. The surface-coated hard member according to claim 1, wherein a first layer film made of a nitride, carbide, or carbonitride of a Group IVa metal element is disposed at an interface between the base material and the coating.
とした請求項３記載の表面被覆硬質部材。4. The thickness of the first layer film is 0.05 to 5 μm.
The surface-coated hard member according to claim 3, wherein
物、炭化物又は炭窒化物から成る外層膜を設けた請求項
１乃至４のいずれかに記載の表面被覆硬質部材。5. The surface-coated hard member according to claim 1, wherein an outer layer film made of a nitride, carbide, or carbonitride of a Group IVa metal element is provided on a surface of the coating.
た請求項５記載の表面被覆硬質部材。6. The surface-coated hard member according to claim 5, wherein the thickness of the outer layer film is 0.1 to 5 μm.
質部材で形成されている切削工具又は耐摩工具。7. A cutting tool or a wear-resistant tool formed of the surface-coated hard member according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP01282893A JP3341328B2 (en) | 1993-01-28 | 1993-01-28 | Surface-coated hard member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP01282893A JP3341328B2 (en) | 1993-01-28 | 1993-01-28 | Surface-coated hard member |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06220608A JPH06220608A (en) | 1994-08-09 |
| JP3341328B2 true JP3341328B2 (en) | 2002-11-05 |
Family
ID=11816247
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP01282893A Expired - Fee Related JP3341328B2 (en) | 1993-01-28 | 1993-01-28 | Surface-coated hard member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3341328B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014136755A1 (en) | 2013-03-04 | 2014-09-12 | 株式会社タンガロイ | Coated cutting tool |
| JP2016155221A (en) * | 2012-08-31 | 2016-09-01 | 株式会社タンガロイ | Coated cutting tool |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100330785B1 (en) * | 1999-12-31 | 2002-04-01 | 이계안 | Manufacturing method of high-durability engine parts using PVD coating processing |
| GB0118755D0 (en) * | 2001-08-01 | 2001-09-26 | Univ Leeds | Wear resistant boride based coatings |
| JP3621943B2 (en) | 2003-07-25 | 2005-02-23 | 三菱重工業株式会社 | High wear resistance and high hardness coating |
| JP2006247779A (en) * | 2005-03-10 | 2006-09-21 | Tungaloy Corp | Coated cbn base sintered body cutting tool |
| US20090130434A1 (en) | 2006-03-28 | 2009-05-21 | Kyocera Corporation | Surface Coated Tool |
| JP4967505B2 (en) * | 2006-07-28 | 2012-07-04 | 株式会社タンガロイ | Covering member |
-
1993
- 1993-01-28 JP JP01282893A patent/JP3341328B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016155221A (en) * | 2012-08-31 | 2016-09-01 | 株式会社タンガロイ | Coated cutting tool |
| WO2014136755A1 (en) | 2013-03-04 | 2014-09-12 | 株式会社タンガロイ | Coated cutting tool |
| US9725811B2 (en) | 2013-03-04 | 2017-08-08 | Tungaloy Corporation | Coated cutting tool |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06220608A (en) | 1994-08-09 |
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